CN102601060A - System and method for automatically sorting appearances of quartz wafers - Google Patents

Abstract

The invention discloses an appearance automatic sorting system and method for quartz wafers. The system includes a feeding device, a power supply, a guide rail, a power adapter, a switching power supply, a light source, an industrial camera and a display screen, and also includes an industrial computer, a first optical fiber sensor, The second optical fiber sensor, isolated RS-232 conversion module, isolated digital input and output module and sorting mechanism. In the present invention, an optical fiber sensor and an industrial camera are installed on the guide rail. When the optical fiber sensor on the guide rail senses the quartz wafer, the industrial camera will take pictures of the quartz wafer after a certain time delay, and process the pictures taken by the industrial camera through the visual processing tool on the industrial computer. Use the system program to judge the appearance quality of the quartz wafer, and sort the quartz wafer into the corresponding box through the sorting mechanism. The invention has the advantages of fast sorting speed, high efficiency, simple structure, convenient operation and control, and the like.

Description

A kind of appearance automatic sorting system and method of quartz wafer

technical field

The invention relates to an appearance sorting technology of quartz wafers, in particular to an appearance automatic sorting system and method of quartz wafers.

Background technique

Quartz wafers are widely used in electronic devices and are currently the most used crystalline material in the world. Its products mainly include quartz crystal resonators and quartz crystal oscillators, which have good frequency stability and are mainly used in communications, computers, navigation, aerospace, household appliances and other fields. During the production and processing of quartz wafers, it is inevitable that some of the quartz wafers will have some appearance defects after cutting, grinding and other processes. These defects seriously affect the performance of the quartz wafers, so it is necessary to sort the produced quartz wafers. , to separate the quartz wafers with problems in appearance quality. At present, the production process mainly relies on manual labor to detect the appearance defects of quartz wafers by visual methods. The accuracy and efficiency of such detection methods are relatively low.

Qiu Min published a quartz crystal plate sorting system based on image processing in the journal "Instrument Technology and Sensors" No. 12, 2007. This system has the following shortcomings: First: the image processing process used by this system needs to go through many steps. Calculation and sorting speed are relatively slow; second: the system is based on USB (Universal Serial BUS, universal serial bus) single-chip communication, the communication in this way makes the system control relatively complicated and the reliability is low; the second Three: The sorting mechanism of the system uses stepper motors, detection discs, sorting discs, and electromagnets. The composition and operation process of the sorting mechanism are relatively complicated.

Contents of the invention

The object of the present invention is to overcome the shortcomings and deficiencies of the prior art, and provide an automatic appearance sorting system for quartz wafers with fast sorting speed, high efficiency, simple structure, and convenient operation and control.

Another object of the present invention is to use the above system to realize an automatic appearance sorting method of quartz wafers.

In order to achieve the above-mentioned first object, the present invention adopts the following technical solutions:

Preferably, an appearance automatic sorting system for quartz wafers includes a feeding device, a guide rail, a power supply, a power adapter, a switching power supply, a light source, an industrial camera and a display screen, and also includes an industrial control computer (hereinafter referred to as an industrial computer), a first An optical fiber sensor, a second optical fiber sensor, an isolated RS-232 conversion module, an isolated digital input and output module and a sorting mechanism, the isolated RS-232 conversion module is connected to the data connection port of the industrial computer; the isolated digital input and output The module is connected to the industrial computer through the isolated RS-232 conversion module; the first optical fiber sensor and the second optical fiber sensor are respectively connected to the isolated digital input and output module.

Preferably, the isolated RS-232 conversion module is ADAM-4510, ADAM-4520, ADAM-4510S, ADAM-4522 or ADAM-4521 module; the isolated digital input and output module is ADAM-4055, ADAM-4052 or ADAM -4053 modules.

Preferably, the isolated RS-232 conversion module and the isolated digital input and output module are respectively connected to the switching power supply; the industrial computer, the power adapter and the switching power supply are respectively connected to the power supply; the light source and the industrial camera are respectively connected to the power supply through the power adapter power connection.

Preferably, the sorting mechanism includes an air compressor, a pneumatic triple, a solenoid valve, a pneumatic slide and a sorting box; the air compressor is connected to a power supply; the solenoid valve is connected to an isolated digital input and output module, And it is connected with the air compressor through the pneumatic triple piece; the pneumatic sliding table is connected with the solenoid valve; the sorting box includes a good product box and a defective product box, which are respectively installed at the corresponding outlets of the guide rails.

Preferably, the feeding device includes a first vibration controller, a second vibration controller, a flat vibrator and a circular vibrator; the first vibration controller is connected to the flat vibrator; the second vibration controller is connected to the circular vibrator connection; the first vibration controller and the second vibration controller are respectively connected to the industrial computer and the power supply.

Preferably, the first optical fiber sensor is fixed on the vibrator by bolts; the second optical fiber sensor is fixed on the guide rail by bolts.

Preferably, the display screen is a touch screen for displaying the system control interface and establishing a human-computer interaction platform; the touch screen is connected to the industrial computer; the system control interface includes a start-stop button, an information button, a product replacement button, a debugging button, Image location button and help button.

Preferably, the industrial camera and the light source are installed on a guide rail, the industrial camera is connected to an industrial computer, and its work is controlled by the industrial computer; the light source is used to enhance the brightness of the system environment.

In order to achieve the above-mentioned second purpose, the present invention adopts the following technical solutions:

A method for automatically sorting the appearance of quartz wafers, comprising the following steps:

(1) Power on the system;

(2) Loading programs, parameters and establishing visual tool templates: Load the programs and buttons of the system control interface, user programs and parameters in the visual software of the system. The parameters to be loaded include: flags, BarTime2.Value and BarTime1.Value; The initial value of the flag bit is zero, the values of BarTime2.Value and BarTime1.Value can be set through the system control interface, BarTime2.Value is the parameter for controlling the stop of the vibrator, and BarTime1.Value is the time parameter for the delayed shooting of the industrial camera ; When there is a new product, set up the visual tool template of the new product, and in the operation thereafter, the system automatically loads the visual tool template of the new product, and a threshold value of image speckle area is set in the visual tool template;

(3) The system starts to work: start the system, the circular vibrator and the flat vibrator start to vibrate and discharge, and the quartz wafer reaches the guide rail through the circular vibrator and the flat vibrator; when the first quartz wafer enters the first optical fiber on the flat vibrator When the sensing range of the sensor is within the sensing range, the industrial computer detects a signal, and the flag starts counting up from zero. When the next quartz wafer enters the sensing range of the first optical fiber sensor on the vibrator, the industrial computer detects a signal, and the system judges Whether the flag bit exceeds the value of BarTime2.Value;

Yes, the oscillator works normally, the flag bit is cleared and counting starts again;

No, stop the oscillator, and the flag bit continues to count up. When the flag bit is added to the value of BarTime2.Value, the shaker starts to work again, the flag bit is cleared and the counting is restarted;

(4) Image acquisition: the quartz wafer flows into the guide rail, and after the second optical fiber sensor senses the quartz wafer, it sends a signal to the isolated digital input and output module; the isolated digital input and output module converts the signal sent by the second optical fiber sensor into RS The -232 signal is sent to the isolated RS-232 conversion module. The isolated RS-232 conversion module converts the RS-232 signal into an RS-485 signal and transmits it to the industrial computer. When the industrial computer detects the RS-485 signal, it controls the industrial camera. Shoot the quartz wafer after BarTime1.Value;

(5) Image processing: the image captured by the industrial camera is sent to the industrial computer, the image is processed by the visual processing tool in the visual software, and the final result of the processing is output to the user program;

(6) Quartz wafer sorting: If the image results processed by the visual processing tool are abnormal and the system cannot distinguish the quality of the wafer, the quartz wafer will be listed as a defective product, and the pneumatic solenoid valve will be controlled to open, and the wafer will fall into the defective product box, but exceptions occur only in rare cases and will not affect the accuracy of the entire system;

If there is no abnormality in the image processing results of the visual processing tool, the sorting of quartz wafers is controlled by the system user program; when there are good pieces, the system controls the solenoid valve to close through the isolated digital input and output module, and the quartz wafers fall into the good product box; When there is a defective piece, the system controls the solenoid valve to open through the isolated digital input and output module, and the quartz crystal piece falls into the defective product box.

Preferably, in the above-mentioned step (5), the processing of the image by the visual processing tool includes the following steps:

(5-1) The industrial computer obtains the image source input from the industrial camera;

(5-2) The image source is input to the edge detection tool for edge detection, and the clear image outline is the edge detection result;

(5-3) The result of edge detection is input to the training image tool, and through the processing of the training image tool, the position of the found image relative to the designated origin and the angle of the trained visual tool template are the processing results of the training image tool;

(5-4) Input the result processed by the training tool into the difference detection tool, and through the processing of the difference detection tool, the original difference image obtained is the difference detection result;

(5-5) Input the difference detection result into the coordinate space tool, and after adjusting the root coordinates through the processing of the coordinate space tool, a new user coordinate result is obtained;

(5-6) input the speckle analysis tool with the new user coordinate result, and the speckle analysis tool performs speckle analysis on the image on the new user coordinate result, and obtains the speckle analysis result;

(5-7) The speckle analysis result is input to the result analysis tool, and the result analysis tool determines the quality of the quartz wafer according to the speckle analysis result that step (5-6) obtains, and according to the threshold value that the user sets on the vision tool template, its speckle If the area is larger than the set threshold, it is a bad film, otherwise, it is a good film; the result analysis tool outputs the final result of its analysis to the user program.

Compared with the prior art, the present invention has the following advantages and effects:

(1) The present invention mainly processes the images taken by the industrial camera through visual processing tools. In the process of processing, the images taken are calculated using positioning matching operations and searching spots. The calculation process is simple and fast, so that the speed of sorting has Improved significantly.

(2) The isolation RS-232 conversion module used in the present invention, the isolation digital quantity input and output module is the control system structure based on the RS-232 communication interface, because the system includes the communication of a plurality of control subsystems, the structure of the control system adopts RS-232 232 communication interface can greatly simplify the control of the system and improve the reliability of the system.

(3) The sorting mechanism of the present invention adopts electromagnetic valve, pneumatic sliding table and sorting box; At the initial position, the quartz wafer falls into the good product box; when there is a defective piece, the industrial computer controls the solenoid valve to open through the isolated digital input and output module, the pneumatic slide table does not work, and pushes forward, so that the quartz crystal piece enters the non-standard box. Good product box. The structure composition of the sorting mechanism of the system and the sorting operation process are relatively simple and easy to realize.

(4) the present invention has used two optical fiber sensors, is respectively the first optical fiber sensor and the second optical fiber sensor, and the first optical fiber sensor is installed on the leveler, and the system detects the distance between each quartz wafer by the first optical fiber sensor, When it is detected that the quartz wafers are arranged too densely, the leveler stops working and the feeding is suspended, so as to effectively control the distance between the quartz wafers and prevent the separation effect due to the dense arrangement; the second optical fiber sensor is installed in the system guide rail , only when the second optical fiber sensor detects that there is a quartz wafer, after a certain time delay, the industrial camera starts to shoot after the quartz wafer enters the position where it can be photographed, and can accurately capture the quartz wafer that needs to be sorted , while avoiding the industrial camera to take other images that are not useful for sorting, further improving the efficiency of sorting.

(5) The present invention uses a touch screen as a human-computer interaction platform. The user can check information such as image processing status, total number of wafers, qualified number, unqualified number, and pass rate in real time through the system control interface on the touch screen. The interface is used to control the delay, stop, and work of quartz wafer transmission, adjust the delay time of industrial camera shooting, modify and update the visual tool template, and perform data statistics, making system control more convenient.

(6) The industrial computer used in the present invention is a reinforced enhanced personal computer, which can operate reliably and stably as an industrial controller in an industrial environment. Because the chassis of the industrial computer adopts a steel structure, it has high anti-magnetic, dust-proof, and shock-proof capabilities, and is suitable for use in harsh environments.

Description of drawings

Fig. 1 is the block diagram of the appearance automatic sorting system of the quartz wafer of the present invention.

Fig. 2 is a schematic diagram of the system control interface of the appearance automatic sorting system for quartz wafers of the present invention.

Fig. 3 is a flow chart of the automatic appearance sorting method for quartz wafers of the present invention.

Fig. 4 is a flow chart of the transfer of quartz wafers on the vibrator in the appearance automatic sorting method of quartz wafers of the present invention.

Fig. 5 is a flow chart of image processing by a vision processing tool in the automatic appearance sorting method for quartz wafers of the present invention.

Detailed ways

The present invention will be further described in detail below in conjunction with the embodiments and the accompanying drawings, but the embodiments of the present invention are not limited thereto.

As shown in Figure 1, the appearance automatic sorting system of the quartz wafer of the present embodiment comprises feeding device, sorting mechanism, industrial computer 3, power adapter 4, switching power supply 5, guide rail 8, touch screen 10, ADAM-4520 module 11, ADAM-4055 module 12, industrial camera 13, light source 14, first optical fiber sensor 15 and second optical fiber sensor 16, power supply 20. The isolated RS-232 conversion module used in this embodiment is the ADAM-4520 module 11, and the isolated digital input and output module used is the ADAM-4055 module.

The sorting mechanism includes an air compressor 6, a pneumatic triplex 17, a solenoid valve 18, a pneumatic slide 19 and a sorting box; the solenoid valve 18 is connected to the ADAM-4055 module 12, and is connected to the air compressor 16 through the pneumatic triplex 17 ; Pneumatic sliding table 19 is connected with solenoid valve 18; wherein the sorting box includes a good product box and a defective product box, which are respectively installed on the corresponding outlets of the guide rail 8.

The feeding device comprises a flat vibrator 7, a circular vibrator 9, a first vibration controller 1 and a second vibration controller 2, and the circular vibrator 9 is a funnel shape; the first vibration controller 1 is connected with the flat vibrator 7 for Control the work of the flat vibrator 7; the second vibration controller 2 is connected with the circular vibrator 9 to control the work of the circular vibrator 9.

ADAM-4520 module 11 and ADAM-4055 module 12 are connected with switching power supply 5 respectively. The industrial computer 3 , the power adapter 4 , the switching power supply 5 , the air compressor 6 , the first vibration controller 1 and the second vibration controller 2 are respectively connected to the power supply 20 . The light source 14 and the industrial camera 13 are respectively connected to the power supply 20 through the power adapter 4 .

ADAM-4520 module 11 is connected to the data connection port of industrial computer 3, ADAM-4055 module 12 is connected to industrial computer 3 through ADAM-4520 module 11, and ADAM-4520 module 11 realizes the conversion of RS-232 signal to RS-485 signal.

The first optical fiber sensor 15, the second optical fiber sensor 16 and the solenoid valve 18 are respectively connected to the ADAM-4055 module 12, the first optical fiber sensor 15 is fixed on the leveler 7 by bolts, and the second optical fiber sensor 16 is fixed on the guide rail 8 by bolts superior. The ADAM-4055 module 12 controls the state of the solenoid valve 18, and the state of the solenoid valve 18 has two types: open and closed; the system detects the signals sent by the first optical fiber sensor 15 and the second optical fiber sensor 16 through the ADAM-4055 module 12, and judges the first Whether the optical fiber sensor 15 and the second optical fiber sensor 16 sense a quartz wafer.

The industrial camera 13 is connected to the industrial computer 3, and its work is controlled by the industrial computer 3. The industrial camera 13 and the light source 14 are installed on the guide rail 8. The light source 13 is used to enhance the brightness of the system environment, so that the industrial camera 13 can capture clearer images. .

The display screen of the present embodiment system is a touch screen 10 for displaying the system control interface and setting up a human-computer interaction platform; the touch screen 10 is connected with the industrial computer 3; as shown in Figure 2, the system control interface displayed on the touch screen 10 includes "start Stop", "Info", "Change Product", "Debug", "Picture Location" and "Help" buttons. Through the system control interface, the user can control the delay, stop, and work of the quartz wafer transmission, adjust the parameters that control the stop of the vibrator, adjust the time parameters of the industrial camera delay shooting, modify and update the visual tool template, and perform data statistics.

The first optical fiber sensor 15 on the leveler 7 detects whether the distance between each quartz wafer is too dense. If the quartz wafers are arranged too densely, the leveler 7 stops working. After a certain period of time, the leveler 7 starts working again. , to prevent the sorting effect from being affected by the dense arrangement of quartz wafers.

When the second optical fiber sensor 16 on the guide rail 8 detects that a quartz wafer passes by, it sends a signal to the ADAM-4055 module 12, and the ADAM-4055 module 12 converts the signal received from the second optical fiber sensor 16 into an RS-232 signal and sends it To the ADAM-4520 module 11, the ADAM-4520 module 11 converts the RS-232 signal into an RS-485 signal and then transmits it to the industrial computer 3. When the industrial computer detects the RS-485 signal, it controls the industrial camera to delay for a period of time. Quartz wafer for shooting;

When there is a good film, the industrial computer 3 controls the solenoid valve 18 to close through the ADAM-4055 module 12, the pneumatic slide table 19 does not work, and is in the initial position, and the quartz wafer falls into the good product box; when there is a bad film, the industrial control The machine 3 controls the solenoid valve 18 to open through the ADAM-4055 module 12, the pneumatic sliding table 19 works, and pushes forward, and the quartz crystal sheet enters the defective product box.

As shown in Figure 3, the appearance automatic sorting method of a kind of quartz wafer comprises the following steps:

(1) Power on the system;

(2) Setting and loading programs and parameters: Load the programs and buttons of the system control interface, user programs and parameters in VisionPro (vision software). The parameters to be loaded include BarTime1.Value, BarTime2.Value and flags, BarTime2.Value and the value of BarTime1.Value can be set through the system control interface "Picture Settings" column to set its value, BarTime2.Value is the parameter to control the stop of the vibrator, and BarTime1.Value is the time parameter for the delayed shooting of the industrial camera; when a new product appears When, set up VPP file (VisionPro file, be vision tool template), in the operation afterwards, system automatically loads the vision tool template of new product, and the threshold value of an image speckle area is set in this vision tool template;

(3) The system starts to work: click the "Start" button on the system control interface on the touch screen, the circular vibrator and the flat vibrator start to vibrate and discharge the material, the circular vibrator is in the shape of a funnel, and the quartz wafer is released from the funnel The bottom moves to the top, and arrives on the leveler in an orderly manner, and the leveler further screens the overlapping quartz wafers to ensure that only a single quartz wafer reaches the guide rail through the leveler; as shown in Figure 4 During the transmission of the quartz wafer on the leveler, when the first quartz wafer enters the sensing range of the first optical fiber sensor on the leveler, the industrial computer detects a falling edge signal, and the flag starts counting up from zero. When a quartz wafer enters the sensing range of the first optical fiber sensor on the vibrator, the industrial computer detects a falling edge signal, and the system judges whether the flag exceeds the value of BarTime2.Value;

Yes, the oscillator works normally, the flag bit is cleared and counting starts again;

No, stop the oscillator, and the flag bit continues to count up. When the flag bit is added to the value of BarTime2.Value, the shaker starts to work again, the flag bit is cleared and the counting is restarted;

(4) Image acquisition: the quartz wafer flows into the guide rail, and after the second optical fiber sensor senses the quartz wafer, it sends a signal to the isolated digital input and output module; the isolated digital input and output module converts the signal sent by the second optical fiber sensor into RS The -232 signal is sent to the isolated RS-232 conversion module, the isolated RS-232 conversion module converts the RS-232 signal into an RS-485 signal, and then transmits it to the industrial computer, and the industrial computer controls the industrial camera after detecting the RS-485 signal Shoot the quartz wafer after a delay of BarTime1.Value;

(5) Image processing: the image captured by the industrial camera is sent to the industrial computer, the image is processed by the visual processing tool in the visual software, and the final result of the processing is output to the user program;

(6) Quartz wafer sorting: If the image processed by the visual processing tool is abnormal, the system control interface will pop up a window prompting the exception, and automatically close this window. At this time, the system cannot distinguish the quality of the wafer, and the quartz Chips are listed as defective products, and the pneumatic solenoid valve is controlled to open, and the chips fall into the defective product box, but abnormalities only occur in rare cases, and will not affect the accuracy of the entire system;

If there is no abnormality in the image results processed by the visual processing tool, the sorting of quartz wafers is completed under the control of the system user program; when there are good wafers, the system controls the solenoid valve to close through the ADAM-4055 module, the pneumatic slide table does not work, and In the initial position, the quartz wafer falls into the good product box; when there is a defective piece, the system controls the solenoid valve to open through the ADAM-4055 module, the pneumatic slide table works, and pushes forward, and the quartz crystal piece falls into the defective product box.

As shown in Figure 5, the image processing steps of the visual processing tool are as follows:

(5-1) The industrial computer obtains the image source 301 input from the industrial camera;

(5-2) Image source 301 is input to CogSobelEdgeTool1 (edge detection tool) 302 to carry out edge detection, and edge detection mainly uses Sobel operator (Sobel operator), according to pixel point horizontal and vertical adjacent pixel point gray value weighted value , detect the point that reaches the maximum value as the edge, distinguish the main body of the image from the background, and obtain a clear image outline as the result of edge detection;

(5-3) The result of edge detection is input to CogPMAlignTool1 (training image tool) 303, and training image tool uses PatMax algorithm (the high-precision algorithm of component and feature location in VisionPro software), the real-time image through edge detection and PMAlign tool (Tools that run the PatMax algorithm for calibration) The trained vision tool template performs calibration and positioning matching operations, and the result of the operation is the position of the found image relative to the specified origin and the angle relative to the trained vision tool template; where the vision tool The template is trained, using the parameters set by the software to find the rough and fine features of the image. The parameters set by the software include: polarity, granularity, degree of freedom and search area;

(5-4) The result of the training image tool processing is input to CogPatInspectTool1 (difference detection tool) 304, and the difference detection tool utilizes the image found in step (5-3) relative to the position of the specified origin and relative to the trained vision The angle of the tool template performs affine transformation on the real-time image, and the standardized image obtained after the real-time image undergoes affine transformation is subtracted from the trained template to obtain the original difference image; on the original difference image, the potential difference of the quartz wafer will be retained in the Above the highlighted part; the original difference image obtained is the result of difference detection;

(5-5) The above-mentioned difference detection results are input to CogFixtureTool1 (coordinate space tool) 305, so that the original difference image is on the root space, and the Fixture tool (positioning tool) maps the root coordinates to the root space by creating a new user coordinate system On the new user coordinates, the new user coordinate results are obtained, and a fixed coordinate system is provided for the following operations; where the root coordinate is the left-handed coordinate system that is consistent with the pixels of the collected image before any image processing, when the image is in When performing image processing or resampling, VisionPro software will automatically adjust the root space to ensure that image features remain in the same position;

(5-6) New user coordinate result is input CogBlobTool1 (spot analysis tool) 306, and new user coordinate result makes the range that expects to find in the image fall within the specified range, and the speckle analysis tool is in the specified range according to given The standard detects and analyzes the two-dimensional shape of the image; the speckle analysis tool divides the image, and distinguishes the speckle pixels and background pixels in the image according to the gray value threshold; after distinguishing the speckle pixels, perform connectivity analysis and apply morphological operators Filter out the spots whose area is larger than the minimum area given by the user; the defects of the input image are displayed as spots on the image after being processed by the spot analysis tool;

(5-7) input spot analysis result to CogResultsAnalysisTool1 (result analysis tool) 307, result analysis tool determines the quality of quartz wafer according to the spot that step (5-6) obtains, according to the threshold that the user sets on the vision tool template , if the spot area is greater than the set threshold, it is a bad film, otherwise, it is a good film; the result analysis tool outputs the final result of its analysis to the user program.

The above embodiment is a preferred implementation mode of the present invention, but the implementation mode of the present invention is not limited by the above embodiment, for example, the isolated RS-232 conversion module can also be ADAM-4510, ADAM-4510S, ADAM-4522 or ADAM -4521 and other modules, the isolated digital input and output modules can also be modules such as ADAM-4052 or ADAM-4053, and any other changes, modifications, substitutions, combinations, and simplifications that do not deviate from the spirit and principles of the present invention are applicable. Replacement methods that should be equivalent are all included within the protection scope of the present invention.

Claims (10)

1. an appearance automatic sorting system for quartz wafers, comprising feeding device, guide rail, power supply, power adapter, switching power supply, light source, industrial camera and display screen, is characterized in that: also includes industrial computer, the first optical fiber sensor, the first Two optical fiber sensors, an isolated RS-232 conversion module, an isolated digital input and output module and a sorting mechanism, the isolated RS-232 conversion module is connected to the data connection port of the industrial computer; the isolated digital input and output module is connected through the isolated RS The -232 conversion module is connected with the industrial computer; the first optical fiber sensor and the second optical fiber sensor are respectively connected with the isolated digital input and output module. 2. The appearance automatic sorting system of quartz wafers according to claim 1, characterized in that: the isolated RS-232 conversion module is ADAM-4510, ADAM-4520, ADAM-4510S, ADAM-4522 or ADAM-4521 module; the isolated digital input and output module is an ADAM-4055, ADAM-4052 or ADAM-4053 module. 3. The appearance automatic sorting system of quartz wafer according to claim 1, is characterized in that: described isolation RS-232 conversion module and isolation digital quantity input and output module are respectively connected with switching power supply; Described industrial computer, power adapter and the switching power supply are respectively connected to the power supply; the light source and the industrial camera are respectively connected to the power supply through a power adapter. 4. The appearance automatic sorting system of quartz wafers according to claim 1, characterized in that: the sorting mechanism includes an air compressor, a pneumatic triple, a solenoid valve, a pneumatic slide and a sorting box; the air The compressor is connected to the power supply; the solenoid valve is connected to the isolated digital input and output module, and is connected to the air compressor through a pneumatic triple; the pneumatic slide table is connected to the solenoid valve; the sorting box includes a good product box and The defective product boxes are respectively installed on the corresponding outlets of the guide rails. 5. the appearance automatic sorting system of quartz wafer according to claim 1, is characterized in that: described feeding device comprises the first vibrating controller, the second vibrating controller, flat shaker and circular shaker; A vibration controller is connected with the flat vibrator; a second vibration controller is connected with the circular vibrator; the first vibration controller and the second vibration controller are respectively connected with the industrial computer and the power supply. 6. The appearance automatic sorting system of quartz wafers according to claim 1, characterized in that: the first optical fiber sensor is fixed on the leveler by bolts; the second optical fiber sensor is fixed on the guide rail by bolts. 7. The appearance automatic sorting system of quartz wafers according to claim 1, characterized in that: the display screen is a touch screen for displaying the system control interface and setting up a human-computer interaction platform; the touch screen is connected with an industrial computer; The system control interface includes a start-stop button, an information button, a product replacement button, a debugging button, a picture location button and a help button. 8. The appearance automatic sorting system of a kind of quartz wafer according to claim 1, characterized in that: the industrial camera and the light source are installed on the guide rail, the industrial camera is connected with the industrial computer, and its work is controlled by the industrial computer ; The light source is used to enhance the brightness of the system environment. 9. A sorting method based on the appearance automatic sorting system of any quartz wafer in claim 1-8, is characterized in that, comprises the following steps: (1) Power on the system; (2) Loading programs, parameters and establishing visual tool templates: Load the programs and buttons of the system control interface, user programs and parameters in the visual software of the system. The parameters to be loaded include: flags, BarTime2.Value and BarTime1.Value; The initial value of the flag bit is zero, the values of BarTime2.Value and BarTime1.Value can be set through the system control interface, BarTime2.Value is the parameter for controlling the stop of the vibrator, and BarTime1.Value is the time parameter for the delayed shooting of the industrial camera ; When there is a new product, set up the visual tool template of the new product, and in the operation thereafter, the system automatically loads the visual tool template of the new product, and a threshold value of image speckle area is set in the visual tool template; (3) The system starts to work: start the system, the circular vibrator and the flat vibrator start to vibrate and discharge, and the quartz wafer reaches the guide rail through the circular vibrator and the flat vibrator; when the first quartz wafer enters the first optical fiber on the flat vibrator When the sensing range of the sensor is within the sensing range, the industrial computer detects a signal, and the flag starts counting up from zero. When the next quartz wafer enters the sensing range of the first optical fiber sensor on the vibrator, the industrial computer detects a signal, and the system judges Whether the flag bit exceeds the value of BarTime2.Value; Yes, the oscillator works normally, the flag bit is cleared and counting starts again; No, stop the oscillator, and the flag bit continues to count up. When the flag bit is added to the value of BarTime2.Value, the shaker starts to work again, the flag bit is cleared and the counting is restarted; (4) Image acquisition: the quartz wafer flows into the guide rail, and after the second optical fiber sensor senses the quartz wafer, it sends a signal to the isolated digital input and output module; the isolated digital input and output module converts the signal sent by the second optical fiber sensor into RS The -232 signal is sent to the isolated RS-232 conversion module. The isolated RS-232 conversion module converts the RS-232 signal into an RS-485 signal and transmits it to the industrial computer. When the industrial computer detects the RS-485 signal, it controls the industrial camera. Shoot the quartz wafer after BarTime1.Value; (5) Image processing: the image captured by the industrial camera is sent to the industrial computer, the image is processed by the visual processing tool in the visual software, and the final result of the processing is output to the user program; (6) Quartz wafer sorting: If the image results processed by the visual processing tool are abnormal and the system cannot distinguish the quality of the wafer, the quartz wafer will be listed as a defective product, and the pneumatic solenoid valve will be controlled to open, and the wafer will fall into the defective product box; If there is no abnormality in the image processing results of the visual processing tool, the sorting of quartz wafers is controlled by the system user program; when there are good pieces, the system controls the solenoid valve to close through the isolated digital input and output module, and the quartz wafers fall into the good product box; When there is a defective piece, the system controls the solenoid valve to open through the isolated digital input and output module, and the quartz crystal piece falls into the defective product box. 10. the appearance automatic sorting method of quartz wafer according to claim 9, is characterized in that: in step (5), described vision processing tool processing image comprises the following steps: (5-1) The industrial computer obtains the image source input from the industrial camera; (5-2) The image source is input to the edge detection tool for edge detection, and the clear image outline is the edge detection result; (5-3) The result of edge detection is input to the training image tool, and through the processing of the training image tool, the position of the found image relative to the designated origin and the angle of the trained visual tool template are the processing results of the training image tool; (5-4) Input the result processed by the training tool into the difference detection tool, and through the processing of the difference detection tool, the original difference image obtained is the difference detection result; (5-5) Input the difference detection result into the coordinate space tool, and after adjusting the root coordinates through the processing of the coordinate space tool, a new user coordinate result is obtained; (5-6) input the speckle analysis tool with the new user coordinate result, and the speckle analysis tool performs speckle analysis on the image on the new user coordinate result, and obtains the speckle analysis result; (5-7) The speckle analysis result is input to the result analysis tool, and the result analysis tool determines the quality of the quartz wafer according to the speckle analysis result that step (5-6) obtains, and according to the threshold value that the user sets on the vision tool template, its If the spot area is greater than the set threshold, it is a bad film, otherwise, it is a good film; the result analysis tool outputs the final result of its analysis to the user program.

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