CN114914177A - Multi-swing-arm die bonder for Mini LED - Google Patents
Multi-swing-arm die bonder for Mini LED Download PDFInfo
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- CN114914177A CN114914177A CN202210521536.2A CN202210521536A CN114914177A CN 114914177 A CN114914177 A CN 114914177A CN 202210521536 A CN202210521536 A CN 202210521536A CN 114914177 A CN114914177 A CN 114914177A
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- 239000013078 crystal Substances 0.000 claims abstract description 57
- 239000000463 material Substances 0.000 claims description 41
- 238000007599 discharging Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 6
- 238000003860 storage Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 description 34
- 238000010586 diagram Methods 0.000 description 9
- 230000033001 locomotion Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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Abstract
The invention discloses a multi-swing-arm die bonder for a Mini LED, which comprises a rack, and a die ring module, a thimble module, a support module, a feeding module, a receiving module and two die bonder modules which are arranged on the rack, wherein the thimble module is arranged on the rack; the crystal ring module is used for transferring and positioning a crystal ring, the ejector pin module is arranged on the lower side of the crystal ring module, and the ejector pin module is used for jacking up a chip; the bracket is used for transferring and positioning the bracket; the feeding module and the receiving module are arranged on two sides of the rack, the feeding module is used for placing a support which is not die bonded, the receiving module is used for placing a die bonded support, the die bonding module comprises an upright platform, two cameras and two swing arms, and the two cameras and the two swing arms are arranged on the upright platform and are symmetrically arranged. According to the invention, the arrangement of the four swing arms for joint operation is formed by arranging the two die bonding modules, so that the production efficiency is improved on the premise of meeting the precision requirement.
Description
Technical Field
The invention relates to the field of automation equipment, in particular to a multi-swing-arm die bonder for a Mini LED.
Background
The die bonder is a middle device of a semiconductor packaging production line and is one of the most important rings in semiconductor packaging. The work content of the die bonder is to absorb the chips from the blue film and convey the chips to a carrier for dispensing or brushing solder paste in advance. A plurality of die bonder are available in the market, and the production capacity and the precision of the die bonder are limited by the scheme and the structural layout of the die bonder, so that the production requirement of the Mini LED can not be met.
Therefore, there is a need to provide a new multi-swing arm die bonder for Mini LEDs to solve the above-mentioned problems.
Disclosure of Invention
The invention mainly aims to provide a multi-swing-arm die bonder for a Mini LED, and aims to solve the problem that the capacity of the conventional die bonder is limited.
In order to achieve the purpose, the multi-swing-arm die bonder for the Mini LED comprises a rack, and a die ring module, a thimble module, a support module, a feeding module, a receiving module and two die bonding modules which are arranged on the rack; the crystal ring module is used for transferring and positioning crystal rings, the ejector pin module is arranged on the lower side of the crystal ring module, and the ejector pin module is used for jacking up a chip; the bracket is used for transferring and positioning the bracket; the feeding module and the material receiving module are arranged on two sides of the rack, the feeding module is used for placing a support which is not die bonded, the material receiving module is used for placing a die bonded support, the die bonded module comprises an upright platform, two cameras and two swing arms, the two cameras and the two swing arms are arranged on the upright platform, the two swing arms are symmetrically arranged, one camera is used for positioning a chip suction position, and the other camera is used for positioning a chip placement position.
Optionally, the number of the wafer ring modules, the ejector pin modules, the support module, the wafer ring magazine module, the wafer ring transfer module, and the feeding module is two.
Optionally, the wafer ring transfer device further comprises a wafer ring magazine module and a wafer ring transfer module, wherein the wafer ring magazine module and the die bonding module are arranged oppositely, the wafer ring magazine module is used for storing wafer rings, and the wafer ring transfer module is used for carrying the wafer rings from the wafer ring magazine to the wafer ring module.
Optionally, the die ring magazine module comprises a first lifting driving part, a base and a die ring magazine, the first lifting driving part is arranged on the base, the output end of the first lifting driving part is connected with a supporting arm, the two die ring magazines are arranged on the supporting arm, and a multi-layer die ring storage space is formed in the die ring magazine.
Optionally, brilliant ring moves and carries module includes mount pad, slip platform, second lift driving piece and clamping jaw, the platform that slides passes through the mount pad is located in the frame, second lift driving piece with the platform that slides is connected, the output of second lift driving piece with the clamping jaw is connected, the clamping jaw is used for centre gripping brilliant ring.
Optionally, the wafer ring module includes a base, a longitudinal moving platform, a transverse moving platform, a first rotating driving member and a rotating platform, the longitudinal moving platform is slidably disposed on the base, the transverse moving platform is slidably disposed on the longitudinal moving platform, and sliding directions of the longitudinal moving platform and the transverse moving platform are perpendicular to each other; the first rotating driving piece is arranged on the longitudinal moving platform, the rotating platform is connected with the longitudinal moving platform in a rotating mode, and the first rotating driving piece is used for driving the rotating platform to rotate so as to drive the crystal ring to rotate to a preset angle.
Optionally, the thimble module includes base plate, first slip table, second slip table, first driving piece, second driving piece, third driving piece and thimble, first slip table along first direction slip set up in on the base plate, the second slip table along the second direction set up in on the base, first driving piece with the second driving piece branch is located the both sides of base plate, first driving piece passes through eccentric shaft subassembly drive first slip table, the second driving piece passes through eccentric shaft subassembly drive the second slip table, the third driving piece set up in on the second slip table, third driving piece output shaft with the thimble is connected.
Optionally, the rack module includes a base, a first sliding plate, a second sliding plate, a first linear driving element, and a second linear driving element, the first sliding plate is slidably disposed on the base along a first direction, and the first linear driving element is disposed on the base and is configured to drive the first sliding plate; the second sliding plate is arranged on the first sliding plate in a sliding mode along a second direction, the second linear driving piece is arranged on the first sliding plate and used for driving the second sliding plate, and a traction assembly used for carrying the support is arranged on the second sliding plate.
Optionally, the feeding module comprises a first bottom plate, a discharge box, a first screw rod driving assembly and a first sliding plate, the first screw rod driving assembly and the first sliding plate are arranged on the first bottom plate, the discharge box is slidably connected with the first sliding plate, and the first screw rod driving assembly is used for driving the discharge box to move.
Optionally, the material receiving module comprises a second bottom plate, a supporting plate, a material box, a second lead screw driving assembly and a second sliding plate, wherein the second lead screw driving assembly and the second sliding plate are arranged on the second bottom plate, the material box is connected with the second sliding plate in a sliding manner, the second lead screw driving assembly is used for driving the material box to move, the material box is arranged on the supporting plate, and a belt conveying system is further arranged on the supporting plate.
According to the technical scheme, the feeding module provides a support, the support module carries the support, the crystal ring module provides a crystal ring, the ejector pin module ejects out a chip, the crystal fixing module fixes the chip on the support, and the support module carries the support with the chip fixed to the receiving module, so that the whole crystal fixing operation is realized. Two sets of swing arms symmetry installation, another group's swing arm just in time is located and lays the chip position when a set of swing arm 604 is located and absorbs chip position, and two sets of cameras are fixed a position respectively and are absorbed chip position and lay chip position, through the overall arrangement that will set up two solid brilliant modules and form four swing arm joint work, under the prerequisite that satisfies the precision demand, improve production efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a multi-swing-arm die bonder for Mini LEDs in an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a wafer ring module according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a thimble module according to an embodiment of the present disclosure;
FIG. 4 is a schematic structural diagram of a rack module according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a feeding module according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a material receiving module according to an embodiment of the present disclosure;
FIG. 7 is a schematic structural diagram of a die bonding module according to an embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a wafer ring cassette module according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of a wafer ring transfer module according to an embodiment of the invention.
The reference numbers illustrate:
reference numerals | Name (R) | Reference numerals | Name(s) |
1 | |
52 | Material placing |
2 | |
53 | First lead |
21 | Base seat | 54 | A first |
22 | |
6 | |
23 | |
61 | |
24 | First |
62 | |
25 | |
63 | |
3 | |
64 | Second screw |
31 | |
65 | Second |
32 | First sliding table | 7 | Die bonding module |
33 | Second sliding table | 71 | Upright |
34 | |
72 | Camera with a |
35 | |
73 | |
36 | |
8 | Die set for die |
37 | Thimble | 81 | First |
4 | |
82 | |
41 | |
83 | Crystal |
42 | |
9 | Crystal |
43 | |
91 | |
44 | First |
92 | |
45 | Second |
93 | Second |
5 | |
94 | Clamping |
51 | First base plate |
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
As shown in fig. 1 to 9, in an embodiment of the present invention, a multi-swing arm 73 die bonder for Mini LEDs includes a frame 1, and a die ring module 2, a thimble module 3, a support module 4, a feeding module 5, a receiving module 6, and two die bonding modules 7 disposed on the frame 1; the crystal ring module 2 is used for transferring and positioning crystal rings, the thimble module 3 is arranged at the lower side of the crystal ring module 2, and the thimble module 3 is used for jacking up a chip; the bracket is used for transferring and positioning the bracket; the feeding module 5 with receive the material module 6 branch and locate the both sides of frame 1, the feeding module 5 is used for placing the support that does not solidify the brilliant, receive the material module 6 and be used for placing the support that has solidified the brilliant, gu brilliant module 7 including stand platform 71 and set up in two sets of cameras 72 and two sets of swing arms 73 on the stand platform 71, two sets of swing arms 73 symmetrical arrangement are a set of camera 72 is used for fixing a position the chip and absorbs the position, another group camera 72 is used for fixing a position the chip and lays the position.
In the above embodiment, the feeding module 5 provides a support, the support module 4 carries the support, the crystal ring module 2 provides a crystal ring, the ejector pin module 3 ejects out a chip, the die bonding module 7 fixes the chip on the support, and the support module 4 carries the support with the chip fixed to the material receiving module 6, so that the whole die bonding operation is realized. Two sets of swing arms 73 symmetry installation, another group's swing arm 73 just in time is located and lays the chip position when a set of swing arm 73 is located and absorbs chip position, and two sets of cameras 72 are fixed a position respectively and are absorbed chip position and lay the chip position, through the overall arrangement that will set up two solid brilliant module groups 7 and form four swing arm 73 joint work, under the prerequisite that satisfies the precision demand, improve production efficiency.
The number of the crystal ring modules 2, the thimble modules 3, the support modules 4, the crystal ring material box 83 module 8, the crystal ring transfer module 9 and the feeding module 5 is two. Therefore, the layout of the double-head four-arm matching double-support working module is formed, and the productivity of a single die bonder is greatly improved. The suction nozzle arranged on the swing arm 73 can rotate and correct the angle of the chip in the chip carrying process, the motion module adopts a high-precision linear motor and a grating ruler reading head, and a high-precision camera 72 lens component is arranged, so that the high precision of the die bonder is ensured.
In an embodiment, the multi-swing arm 73 die bonder further includes a wafer cassette 83 module 8 and a wafer transfer module 9, the wafer cassette 83 module 8 is disposed opposite to the die bonder module 7, the wafer cassette 83 module 8 is used for storing wafers, and the wafer transfer module 9 is used for transferring the wafers from the wafer cassette 83 to the wafer module 2. The crystal ring module 2 can be provided with an unused crystal ring and temporarily store the used crystal ring, thereby reducing the times of manually taking and placing the crystal ring, shortening the time of taking and placing the crystal ring and realizing higher automation degree of equipment. The crystal ring transferring module 9 can quickly and accurately carry out crystal ring taking and placing on the crystal ring module 2, so that the waiting time of equipment is greatly shortened, an operator does not need to be close to a high-speed moving area, and the safety factor is improved.
Referring to fig. 8, the die ring magazine 83 module 8 includes a first lifting driving member 81, a base 82, and a die ring magazine 83, the first lifting driving member 81 is disposed on the base 82, an output end of the first lifting driving member 81 is connected to a support arm, the two die ring magazines are disposed on the support arm, and a multi-layer die ring storage space is formed in the die ring magazine 83. The ring magazine 83 to be manually taken and placed is mounted on the platform, the first lifting driving member 81 drives the driving wheel, the synchronous belt and the driven wheel, and finally, power is transmitted to the screw rod to drive the platform to move up and down. The purpose is to drive the wafer ring to move to the wafer ring transfer module 9 to pick and place the height of the wafer ring,
in an embodiment, referring to fig. 9, the wafer ring transferring module 9 includes an installation seat 91, a sliding platform 92, a second lifting driving member 93 and a clamping jaw 94, the sliding platform 92 is erected on the rack 1 through the installation seat 91, the second lifting driving member 93 is connected to the sliding platform 92, an output end of the second lifting driving member 93 is connected to the clamping jaw 94, and the clamping jaw 94 is used for clamping a wafer ring. When the crystal ring needs to be replaced, the clamping jaw 94 moves to the upper part of the rotating platform 25 through the transmission of the screw rod, the second lifting driving piece 93 drives the crystal ring to move into the clamp, the clamping jaw 94 clamps the used crystal ring, the second lifting driving piece 93 ascends, the clamping jaw 94 moves to the inner part of the crystal ring material box 83 through the transmission of the screw rod, after the crystal ring is put down, the clamping jaw 94 moves to the outer side of the crystal ring material box 83, the first lifting driving piece 81 drives the crystal ring material box 83 to move to the position with the same height of the crystal ring to be replaced and the clamp, the clamping jaw 94 moves to the inner part of the crystal ring material box 83 through the transmission of the screw rod, clamps the crystal ring and then moves to the upper part of the rotating platform 25, the cylinder ejects out, the crystal ring clamp opens, the second lifting driving piece 93 drives the crystal ring to descend, the second lifting driving piece 93 ascends to loosen the crystal ring after the crystal ring is received by the rotating platform 25, the cylinder withdraws, the crystal ring clamp closes, the rotating platform 25 transversely moves away from the clamping jaw 94, the second lifting driving member 93 is lifted to complete the automatic ring replacement.
Optionally, referring to fig. 2 in combination, the wafer ring module 2 includes a base 21, a longitudinal moving platform 22, a transverse moving platform 23, a first rotating driving member 24 and a rotating platform 25, wherein the longitudinal moving platform 22 is slidably disposed on the base 21, the transverse moving platform 23 is slidably disposed on the longitudinal moving platform 22, and sliding directions of the longitudinal moving platform 22 and the transverse moving platform 23 are perpendicular to each other; the first rotating driving part 24 is disposed on the longitudinal moving platform 22, the rotating platform 25 is rotatably connected to the longitudinal moving platform 22, and the first rotating driving part 24 is used for driving the rotating platform 25 to rotate so as to drive the wafer ring to rotate to a preset angle. The crystal ring module 2 reliably drives the crystal ring to move accurately at a high speed, the crystal ring module 2 comprises a mounting seat 91, a longitudinal moving platform 22, a transverse moving platform 23 and a rotating platform 25, the crystal ring is fixed on the rotating platform 25, and the three platforms can move simultaneously and are not influenced. The longitudinal moving platform 22 and the transverse moving platform 23 are precisely controlled by using linear motors matched with high-precision grating ruler reading heads, the transverse moving platform 23 is of a closed frame structure, three guide rails are used as supports, the middle guide rail and the right guide rail are used for supporting the linear motors, and a rotor and a stator of the flat plate type linear motor have large magnetic attraction. The middle guide rail and the left guide rail are used for supporting the rotating platform 25, and both ends of the rotating platform 25 are guaranteed to be supported. The structure is more reliable, and the movement is more stable. The condition that one end of the rotary platform 25 is not supported is avoided, the rotary platform 25 is guaranteed not to shake under the condition of high-speed movement, and then the chip is guaranteed not to be driven to shake, and the die bonding precision is improved.
Wherein, rotary platform 25 includes servo motor, brilliant ring clip, cylinder, laser photoelectric sensor, follows driving wheel, hold-in range, action wheel. When the crystal ring needs to be taken out or put down, the cylinder is ejected out, the crystal ring clamp is opened, and the laser photoelectric sensor senses whether the crystal ring exists on the platform.
In an embodiment, please refer to fig. 3 in combination, the ejector pin module 3 includes a substrate 31, a first sliding table 32, a second sliding table 33, a first driving element 34, a second driving element 35, a third driving element 36, and an ejector pin 37, the first sliding table 32 is slidably disposed on the substrate 31 along a first direction, the second sliding table 33 is disposed on the base 82 along a second direction, the first driving element 34 and the second driving element 35 are disposed on two sides of the substrate 31, the first driving element 34 drives the first sliding table 32 through an eccentric shaft assembly, the second driving element 35 drives the second sliding table 33 through an eccentric shaft assembly, the third driving element 36 is disposed on the second sliding table 33, and an output shaft of the third driving element 36 is connected to the ejector pin 37. The thimble module 3 is located below the wafer ring, and the thimble module 3 includes a substrate 31, a first sliding table 32, a second sliding table 33, and a thimble 37. The first sliding table 32 drives the eccentric shaft assembly to move through the first driving part 34, the second sliding table 33 drives the eccentric shaft assembly to move through the second driving part 35, the two platforms adopt a crossed guide rail structure, and the movement is more stable and reliable. The thimble 37 moves upward to pierce the blue film and needs the third driving member 36 to provide power, and the third driving member 36 can adopt a voice coil motor and a grating ruler reading head structure to make the whole structure more compact and the movement precision higher.
In an embodiment, referring to fig. 4 in combination, the rack module 4 includes a base 41, a first sliding plate 42, a second sliding plate 43, a first linear driving element 44 and a second linear driving element 45, the first sliding plate 42 is slidably disposed on the base 41 along a first direction, and the first linear driving element 44 is disposed on the base 41 and is used for driving the first sliding plate 42; the second sliding plate 43 is slidably disposed on the first sliding plate 42 along a second direction, the second linear driving member 45 is disposed on the first sliding plate 42 and is used for driving the second sliding plate 43, and the second sliding plate 43 is provided with a traction assembly for carrying the rack. The first and second sliding plates 42 and 43 are reliably moved with a carriage (PCB) accurately at a high speed, and the first and second sliding plates 42 and 43 can be moved simultaneously in both directions without being affected.
In an embodiment, referring to fig. 5 in combination, the feeding module 5 includes a first bottom plate 51, a discharging box 52, and a first screw driving assembly 53 and a first sliding plate 54 disposed on the first bottom plate 51, the discharging box 52 is slidably connected to the first sliding plate 54, and the first screw driving assembly 53 is configured to drive the discharging box 52 to move. The feeding module 5 can provide two feeding modes, one mode is feeding by the material box 63, the platform of the feeding module 5 can be used for placing the material placing box 52 provided with the support (PCB) which is not die-bonded, the support (PCB) which is not die-bonded in the material placing box 52 is placed in a layered mode, and the pneumatic device is installed in front of the feeding module 5. When feeding is needed, the feeding module 5 drives the material placing box 52 to lift, the support (PCB) and the pneumatic device are located at the same horizontal height, the second sliding plate 43 of the support module 4 moves to the position right ahead of the feeding module 5, and the pneumatic device pushes the support (PCB) out of the conveying belt on the second sliding plate 43 to complete feeding. The other type is conveying line feeding, a conveying belt is installed on the feeding module 5 and can be abutted to the conveying belt of the previous procedure, and the support (PCB) is transferred to the feeding module 5 through the conveying belt of the previous procedure to obtain the conveying belt and then transferred to the conveying belt on the second sliding plate 43 to complete feeding.
Referring to fig. 6, the material receiving module 6 includes a second bottom plate 61, a supporting plate 62, a material box 63, and a second screw rod driving assembly 64 and a second sliding plate 65 which are disposed on the second bottom plate 61, the material box 63 is slidably connected to the second sliding plate 65, the second screw rod driving assembly 64 is used for driving the material box 63 to move, the material box 63 is disposed on the supporting plate 62, and a belt conveying system is further disposed on the supporting plate 62. Receive material module 6 and can provide two kinds of receipts material modes, firstly, the magazine 63 receives the material, the magazine 63 that holds support (PCB) can be placed to the layer board 62 of receiving material module 6, when needing to receive the material, receive material module 6 area magazine 63 and go up and down, be located same level with support (PCB) and pneumatic means, the second platform of support module 4 removes the dead ahead of receiving material module 6, the support (PCB) that has accomplished solid brilliant carries next process through conveyor belt, the completion is received the material.
Referring to fig. 7, the multi-swing-arm die bonder further includes four sets of bottom camera modules for detecting and feeding back signals. Bottom camera module installs under the chip motion trail that swing arm 73 taken, when the chip passes through bottom camera module, the camera can detect the positional information of chip this moment, with the exact positional information contrast that the system preserved to feed back the industrial computer, swing arm 73 can correct the angular deviation of chip, and support module 4 can compensate the deviation of the horizontal and vertical direction of chip, and the precision of solid crystal promotes greatly.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A multi-swing-arm die bonder for Mini LEDs is characterized by comprising a rack, a die ring module, an ejector pin module, a support module, a feeding module, a receiving module and two die bonder modules, wherein the die ring module, the ejector pin module, the support module, the feeding module, the receiving module and the two die bonder modules are arranged on the rack; the crystal ring module is used for transferring and positioning crystal rings, the ejector pin module is arranged on the lower side of the crystal ring module, and the ejector pin module is used for jacking up a chip; the bracket is used for transferring and positioning the bracket; the feeding module and the material receiving module are arranged on two sides of the rack, the feeding module is used for placing a support which is not die bonded, the material receiving module is used for placing a die bonded support, the die bonded module comprises an upright platform, two cameras and two swing arms, the two cameras and the two swing arms are arranged on the upright platform, the two swing arms are symmetrically arranged, one camera is used for positioning a chip suction position, and the other camera is used for positioning a chip placement position.
2. The multi-swing-arm die bonder for Mini LEDs of claim 1, wherein there are two wafer ring modules, two ejector pin modules, two support modules, two wafer ring magazine modules, two wafer ring transfer modules and two feeding modules.
3. The multi-swing-arm die bonder for Mini LEDs as claimed in claim 1, further comprising a die ring magazine module and a die ring transfer module, wherein the die ring magazine module is disposed opposite to the die bonding module, the die ring magazine module is used for storing die rings, and the die ring transfer module is used for transferring die rings from the die ring magazine to the die ring module.
4. The multi-swing-arm die bonder for Mini LEDs according to claim 3, wherein the die ring magazine module comprises a first lifting driving member, a base and a die ring magazine, the first lifting driving member is disposed on the base, an output end of the first lifting driving member is connected with a supporting arm, the two die ring magazines are disposed on the supporting arm, and a multi-layer die ring storage space is formed in the die ring magazine.
5. The multi-swing-arm die bonder for Mini LEDs according to claim 3, wherein the die ring transfer module comprises an installation base, a sliding platform, a second lifting driving member and a clamping jaw, the sliding platform is arranged on the rack through the installation base, the second lifting driving member is connected with the sliding platform, an output end of the second lifting driving member is connected with the clamping jaw, and the clamping jaw is used for clamping a die ring.
6. The multi-swing-arm die bonder for Mini LEDs according to any one of claims 1 to 5, wherein the die ring module comprises a base, a longitudinal moving platform, a transverse moving platform, a first rotating driving member and a rotating platform, the longitudinal moving platform is slidably disposed on the base, the transverse moving platform is slidably disposed on the longitudinal moving platform, and the sliding directions of the longitudinal moving platform and the transverse moving platform are perpendicular to each other; the first rotating driving piece is arranged on the longitudinal moving platform, the rotating platform is connected with the longitudinal moving platform in a rotating mode, and the first rotating driving piece is used for driving the rotating platform to rotate so as to drive the crystal ring to rotate to a preset angle.
7. The multi-swing-arm die bonder for Mini LEDs according to any one of claims 1 to 5, wherein the ejector pin module comprises a base plate, a first sliding table, a second sliding table, a first driving piece, a second driving piece, a third driving piece and ejector pins, the first sliding table is slidably arranged on the base plate along a first direction, the second sliding table is arranged on the base plate along a second direction, the first driving piece and the second driving piece are respectively arranged on two sides of the base plate, the first driving piece drives the first sliding table through an eccentric shaft assembly, the second driving piece drives the second sliding table through an eccentric shaft assembly, the third driving piece is arranged on the second sliding table, and an output shaft of the third driving piece is connected with the ejector pins.
8. The multi-swing-arm die bonder for Mini LEDs according to any one of claims 1 to 5, wherein the support module comprises a base platform, a first sliding plate, a second sliding plate, a first linear driving element and a second linear driving element, the first sliding plate is slidably disposed on the base platform along a first direction, and the first linear driving element is disposed on the base platform and is used for driving the first sliding plate; the second sliding plate is arranged on the first sliding plate in a sliding mode along a second direction, the second linear driving piece is arranged on the first sliding plate and used for driving the second sliding plate, and a traction assembly used for carrying the support is arranged on the second sliding plate.
9. The multi-swing-arm die bonder for Mini LEDs according to any one of claims 1 to 5, wherein the feeding module comprises a first bottom plate, a discharging box, and a first screw rod driving assembly and a first sliding plate which are arranged on the first bottom plate, the discharging box is slidably connected with the first sliding plate, and the first screw rod driving assembly is used for driving the discharging box to move.
10. The multi-swing-arm die bonder for Mini LEDs according to any one of claims 1 to 5, wherein the material receiving module comprises a second bottom plate, a supporting plate, a magazine, and a second screw rod driving assembly and a second sliding plate which are arranged on the second bottom plate, the magazine is slidably connected with the second sliding plate, the second screw rod driving assembly is used for driving the magazine to move, the magazine is arranged on the supporting plate, and a belt conveying system is further arranged on the supporting plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210521536.2A CN114914177A (en) | 2022-05-13 | 2022-05-13 | Multi-swing-arm die bonder for Mini LED |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210521536.2A CN114914177A (en) | 2022-05-13 | 2022-05-13 | Multi-swing-arm die bonder for Mini LED |
Publications (1)
Publication Number | Publication Date |
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CN114914177A true CN114914177A (en) | 2022-08-16 |
Family
ID=82767524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210521536.2A Pending CN114914177A (en) | 2022-05-13 | 2022-05-13 | Multi-swing-arm die bonder for Mini LED |
Country Status (1)
Country | Link |
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CN (1) | CN114914177A (en) |
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2022
- 2022-05-13 CN CN202210521536.2A patent/CN114914177A/en active Pending
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