CN217641259U - Substrate transportation module and die bonder - Google Patents

Abstract

The application relates to the technical field of die bonder equipment, and provides a substrate transportation module and a die bonder, wherein the substrate transportation module comprises a rack, a substrate supply mechanism, a feeding clamping and conveying mechanism, a carrying and moving mechanism, a blanking clamping and conveying mechanism, a recycling and connecting mechanism and a substrate storage mechanism, wherein the feeding clamping and conveying mechanism is used for clamping and fixing a substrate and transferring the substrate from one side of the feeding clamping and conveying mechanism to the other side of the feeding clamping and conveying mechanism; the carrying and moving mechanism is used for transferring the substrate to the die bonding station; the blanking clamping and conveying mechanism is used for clamping and fixing the substrate and transferring the substrate; the recovery connection mechanism is used for transferring the substrate from one side of the recovery connection mechanism to the other side of the recovery connection mechanism; the die bonder includes a substrate transport module. The substrate transportation module and the die bonder have the advantages that the substrate is not prone to shaking and shaking, the transportation stability is high, the length of a transportation path of the substrate is greatly shortened, the time for transferring the substrate is shortened, the running speed is high, and die bonder efficiency and precision are improved.

Description

Substrate transportation module and die bonder

Technical Field

The application belongs to the technical field of die bonding equipment, and particularly relates to a substrate transportation module and a die bonding machine.

Background

Die bonding generally involves sucking the die from the die supply position through a die bonding swing arm, and then moving the die to the die bonding position on the substrate, so as to precisely mount the die on the substrate, thereby achieving die bonding. The wafer is typically mounted in a wafer ring, through which the wafer is supported. After the chip on the wafer is taken out, a blank wafer ring is formed. For convenience of description, the wafer ring storing the wafer is referred to as a full wafer ring. The chip has a front surface and a back surface, the back surface of the chip is generally provided with electrodes to connect with the substrate, and the front surface of the chip on the wafer is attached to the blue film, the substrate is generally a PCB.

The invention discloses a die bonding device which comprises a rack, a bracket feeding assembly, a bracket transferring assembly and a blanking assembly, wherein the bracket feeding assembly can transfer a bracket to the bracket transferring assembly, the bracket transferring assembly can transfer the bracket to a die bonding position, the blanking assembly is used for receiving the bracket transferred by the bracket transferring assembly and used for transferring the bracket to a next station, and the blanking assembly is arranged on the rack and connected with the bracket transferring assembly. In the bracket feeding assembly, the feeding motor drives the corresponding driving wheel to rotate so as to drive the two conveyor belts to synchronously rotate, so that the bracket can be transferred to the bracket transferring assembly; among the unloading subassembly, the support that moves the subassembly and send is arranged in on two belts by the support, rotates through a plurality of running wheels of unloading motor drive, can drive two belts and rotate in step to can transfer the support to next station, the support is the base plate.

With respect to the related art among the above, there are the following drawbacks:

the distance that the base plate was transferred is than far away at the in-process that the base plate was transferred to the support and was carried the subassembly and the in-process that the base plate was transferred on the support carries the subassembly is carried the subassembly, and the base plate mainly is the belt through the conveying of frictional force mode, under the long and just flexible structure prerequisite of own of belt, the base plate is difficult to avoid taking place to shake or rock when long distance is transferred, and stability is not high, so await the improvement.

Disclosure of Invention

An object of the embodiment of the present application is to provide a substrate transportation module and a die bonder, so as to solve the following technical problems: when a common die bonder runs, the substrate is difficult to shake or shake in a long-distance transfer process, and the stability is low.

In order to achieve the above object, in a first aspect, the present application adopts the following technical solutions:

provided is a substrate transport module including:

a substrate supply mechanism provided with a substrate outlet;

the feeding clamping and conveying mechanism is positioned on one side of the substrate supply mechanism close to the substrate output port and is used for clamping, fixing and conveying the substrate;

the loading and transferring mechanism is positioned on one side of the feeding clamping and conveying mechanism, which is far away from the substrate supply mechanism, and is used for transferring the substrate to a die bonding station;

the blanking clamping and conveying mechanism is positioned on one side of the loading and moving mechanism, which is far away from the loading clamping and conveying mechanism, and is used for clamping and fixing the substrate and transferring the substrate;

the recovery connection mechanism is positioned on one side of the blanking clamping and conveying mechanism and used for transferring the substrate from one side of the recovery connection mechanism to the other side of the recovery connection mechanism; and the number of the first and second groups,

and the side part of the substrate accommodating mechanism, which is close to the recovery connection mechanism, is provided with a substrate input port.

In an implementable aspect of the present application, the substrate supply mechanism includes:

supplying a support base;

the supply platform is vertically assembled on the supply support seat in a sliding manner;

the first supply driving unit is arranged on the supply supporting seat, connected to the supply platform and used for driving the supply platform to intermittently lift;

the substrate feeding and storing device comprises a feeding and storing box, wherein a plurality of groups of slots which are arranged at intervals up and down and are used for inserting two sides of a substrate are arranged in the feeding and storing box, the slots are arranged along a first direction, the feeding and storing box is assembled on a feeding platform in a sliding mode along a second direction, and the second direction is perpendicular to the first direction;

the second supply driving unit is arranged on the supply platform, connected to the supply storage box and used for driving the supply storage box to slide back and forth along a second direction; and (c) a second step of,

and the supply pushing unit is arranged on the side part of the supply platform, which is far away from the substrate output port, and is used for pushing the substrates out one by one from the supply storage box along a first direction.

In an implementable aspect of the present application, the feeding clamping and conveying mechanism includes:

the device comprises a feeding conveying base, a connecting inlet and a connecting outlet, wherein the two end parts of the feeding conveying base are respectively provided with the connecting inlet and the connecting outlet;

the feeding clamping device is assembled on the feeding conveying base in a sliding mode along a first direction and used for clamping and fixing the substrate;

the feeding driving device is arranged on the feeding conveying base, connected to the feeding clamping device and used for driving the feeding clamping device to slide back along a first direction;

the two groups of blocking devices are arranged on the feeding conveying base along a first direction, are arranged along the first direction and are positioned on two sides of the feeding clamping device; and the number of the first and second groups,

and the auxiliary conveying device is arranged on the blocking device and used for contacting the side part of the substrate clamped by the feeding clamping device and assisting in conveying the substrate along a first direction.

In an implementable aspect of the present application, the material loading and clamping device includes:

the feeding sliding base is assembled on the feeding conveying base in a sliding mode;

the feeding clamping unit is assembled on the feeding sliding base in a sliding mode along the vertical direction and used for clamping and fixing the substrate; and the number of the first and second groups,

and the feeding lifting driving unit is arranged on the feeding sliding base, is connected to the feeding clamping unit and is used for driving the feeding clamping unit to lift.

In an implementable aspect of the present application, the carrier moving mechanism includes:

carrying and moving the supporting seat;

the carrying and moving platform is assembled on the carrying and moving support seat in a sliding manner along a first direction;

the first loading and moving driving unit is arranged on the loading and moving supporting seat, connected to the loading and moving platform and used for driving the loading and moving platform to slide back and forth along a first direction;

the carrying and moving clamping seat is assembled on the carrying and moving platform in a sliding mode along a second direction and used for clamping and fixing the substrate; and the number of the first and second groups,

and the second carrying and moving driving unit is arranged on the carrying and moving platform, connected to the carrying and moving clamping seat and used for driving the carrying and moving clamping seat to slide back and forth along a second direction.

In an implementable aspect of the present application, the load-and-shift chuck includes:

clamping the bottom plate;

the fixed baffle is fixedly arranged at one side part of the clamping bottom plate;

the movable baffle is assembled on the other side part of the clamping bottom plate in a sliding mode, the movable baffle and the fixed baffle are arranged in parallel, and a flexible plate is arranged on one side, close to the fixed baffle, of the movable baffle;

the carrying and clamping driving unit is arranged on the clamping bottom plate, connected to the movable baffle and used for driving the movable baffle to be close to or far away from the fixed baffle;

and the carrying and moving supporting plate is arranged on the clamping bottom plate and is used for carrying the substrate.

In an achievable technical solution of the present application, the blanking clamping and conveying mechanism includes:

a blanking supporting seat;

the blanking sliding seat is assembled on the blanking supporting seat in a sliding mode along a first direction;

the blanking driving device is arranged on the blanking supporting seat, connected to the blanking sliding seat and used for driving the blanking sliding seat to slide back along a first direction;

the blanking lifting driving unit is arranged on the blanking sliding seat; and the number of the first and second groups,

the blanking clamping unit is assembled on the blanking sliding seat in a sliding mode in the vertical direction and used for clamping and fixing the substrate, and the blanking lifting driving unit drives the blanking clamping unit to lift.

In an implementable technical solution of the present application, the recovery connection mechanism includes:

connecting the supporting seat;

the fixed mounting rack is fixedly mounted at one side part of the connection supporting seat;

the movable mounting frame is assembled on the other side part of the connection supporting seat in a sliding mode, and the movable mounting frame and the fixed mounting frame are arranged in parallel;

the connection driving unit is arranged on the connection supporting seat, connected to the movable mounting frame and used for driving the movable mounting frame to be close to or far away from the fixed mounting frame;

the two groups of the connection belt conveying units are respectively arranged on the fixed mounting frame and the movable mounting frame, and two side parts of the substrate are supported on the two groups of the connection belt conveying units and are used for transferring the substrate.

In an implementable aspect of the present application, the substrate accommodating mechanism includes:

receiving a support seat;

the accommodating platform is vertically assembled on the accommodating support seat in a sliding manner;

the first accommodating driving unit is arranged on the accommodating support seat, connected to the accommodating platform and used for driving the accommodating platform to intermittently lift;

the substrate storage device comprises a storage box, wherein a plurality of groups of slots which are arranged at intervals up and down and are used for inserting two sides of a substrate are arranged in the storage box, the slots are arranged along a first direction, the storage box is assembled on a storage platform in a sliding mode along a second direction, and the second direction is perpendicular to the first direction; and (c) a second step of,

and the second storage driving unit is arranged on the storage platform, connected to the storage box and used for driving the storage box to slide back and forth along the second direction.

In order to achieve the above object, in a second aspect, the present application adopts the following technical solutions:

a die bonder is provided, which comprises the substrate transportation module.

In summary, the present application includes at least the following beneficial technical effects:

after the substrate is conveyed out of the substrate output port by the substrate supply mechanism, the substrate is clamped, fixed and moved to the loading and moving mechanism by the loading and clamping conveying mechanism, the substrate is moved to the die bonding station by the loading and moving mechanism, the substrate becomes the substrate after die bonding operation, the substrate is conveyed to the blanking clamping conveying mechanism by the loading and moving mechanism, the substrate is clamped, fixed and moved to the recovery connection mechanism by the blanking clamping conveying mechanism, and the substrate is transferred into the substrate storage mechanism by the recovery connection mechanism;

the substrate transportation module of above-mentioned design has increased material loading centre gripping transport mechanism and unloading centre gripping transport mechanism, mainly transfers the base plate through the mode of centre gripping base plate, compares in the belt and transfers the base plate, simple structure, and the base plate is difficult for trembling and rocking in the base plate transfer process, has improved and has transported stability, and whole substrate transportation module is rectilinear structure simultaneously, has shortened the transport path length of base plate by a wide margin, has shortened the time of transferring the base plate, and the functioning speed is very fast, has improved solid brilliant efficiency and precision.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.

Fig. 1 is a schematic structural diagram of a substrate transport module according to an embodiment of the present application.

Fig. 2 is a schematic structural diagram of a substrate supply mechanism according to an embodiment of the present disclosure.

Fig. 3 is a schematic structural diagram of a feeding clamping and conveying mechanism according to an embodiment of the present application.

FIG. 4 is a schematic structural diagram of a middle loading clamping device according to an embodiment of the present application

Fig. 5 is a schematic structural diagram of a middle load-and-shift mechanism according to an embodiment of the present disclosure.

Fig. 6 is a schematic structural view of a middle-stage clamping seat according to an embodiment of the present disclosure.

Fig. 7 is a schematic structural view of a blanking clamping and conveying mechanism provided in an embodiment of the present application.

Fig. 8 is a schematic structural diagram of a recovery connection mechanism according to an embodiment of the present application.

Fig. 9 is a schematic structural diagram of a substrate receiving mechanism according to an embodiment of the present application.

Fig. 10 is a schematic structural diagram of a die bonder provided in an embodiment of the present application.

Wherein, in the figures, the respective reference numerals:

101. a frame;

102. a substrate supply mechanism; 21. a supply support seat; 22. a supply platform; 23. a first supply drive unit; 24. supplying a magazine; 25. a second supply drive unit; 26. a feeding and pushing unit;

103. a feeding clamping and conveying mechanism; 31. a feeding transfer base; 32. a feeding clamping device; 321. a feeding sliding base; 322. a feeding clamping unit; 3221. a feeding clamping base; 3222. a feeding fixing clamp; 3223. a movable clamp for feeding; 3224. feeding a telescopic power part; 323. a feeding lifting driving unit; 3231. a lifting screw rod; 3232. a first power member; 324. a first guide rail; 325. a first slider; 33. a feeding driving device; 331. a first driven pulley; 332. a first driving pulley; 333. a first synchronization belt; 334. a second power member; 34. a blocking device; 341. fixing the bottom plate; 342. an adjustable baffle; 35. an auxiliary conveying device; 351. a second driving pulley; 352. a second driven pulley; 353. a second synchronous belt; 354. a third power member; 36. a second guide rail; 37. a second slider;

104. a carrying and moving mechanism; 41. carrying and moving the supporting seat; 42. carrying and moving the platform; 43. a first carrying drive unit; 44. carrying and moving the clamping seat; 441. clamping the bottom plate; 442. fixing a baffle plate; 443. a movable baffle; 4431. a flexible board; 444. a carrying and clamping driving unit; 445. carrying and moving the supporting plate; 45. a second carrying drive unit;

105. a blanking clamping and conveying mechanism; 51. a blanking supporting seat; 52. a blanking sliding seat; 53. a blanking driving device; 54. a discharging lifting driving unit; 55. a blanking clamping unit; 551. a blanking clamping base; 552. blanking fixing clips; 553. blanking movable clips; 554. feeding a telescopic power part;

106. a recovery connection mechanism; 61. connecting the supporting seat; 62. fixing the mounting rack; 63. a movable mounting frame; 64. a driving unit is connected; 65. a belt conveying unit is connected;

107. a substrate storage mechanism; 71. a receiving support seat; 72. a storage platform; 73. a first storage drive unit; 74. storing a storage box; 75. a second storage drive unit.

Detailed Description

In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the application and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed in a particular orientation, and be constructed in operation as a limitation of the application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1 to 10, a substrate transportation module and a die bonder according to an embodiment of the present application will be described.

An embodiment of the present invention provides a substrate transportation module, please refer to fig. 1, which includes: a substrate supply mechanism 102, a loading clamping and conveying mechanism 103, a carrying and moving mechanism 104, a blanking clamping and conveying mechanism 105, a recovery and docking mechanism 106, and a substrate storage mechanism 107.

One side of the substrate supply mechanism 102 is provided with a substrate outlet.

The feeding clamping and conveying mechanism 103 is located on one side of the substrate supply mechanism 102 close to the substrate output port, and the feeding clamping and conveying mechanism 103 is used for clamping and fixing the substrate and transferring the substrate from one side of the feeding clamping and conveying mechanism 103 to the other side of the feeding clamping and conveying mechanism 103.

The loading and moving mechanism 104 is located on the side of the loading clamping and conveying mechanism 103 away from the substrate supply mechanism 102, and the loading and moving mechanism 104 is used for transferring the substrate to the die bonding station.

The blanking clamping and conveying mechanism 105 is located on the side of the carrying and moving mechanism 104 away from the loading clamping and conveying mechanism 103, and the blanking clamping and conveying mechanism 105 is used for clamping and fixing the substrate and transferring the substrate.

The recovery docking mechanism 106 is located at one side of the blanking clamping and conveying mechanism 105, and the recovery docking mechanism 106 is used for transferring the substrate from one side of the recovery docking mechanism 106 to the other side of the recovery docking mechanism 106.

A substrate input port is provided on a side of the substrate storage mechanism 107 close to the recovery and docking mechanism 106.

Referring to fig. 1 and 2, the substrate supplying mechanism 102 includes: the device comprises a supply support seat 21, a supply platform 22, a first supply driving unit 23, a supply storage box 24, a second supply driving unit 25 and a supply pushing unit 26.

The supply support seat 21 is of a cuboid structure and is vertically arranged; the supply platform 22 is vertically assembled on the supply support seat 21 in a sliding manner through a vertical slide block; the first supply driving unit 23 is installed on the supply support base 21 and connected to the supply platform 22, and the first supply driving unit 23 is used for driving the supply platform 22 to intermittently lift.

The supply storage box 24 is provided with a plurality of groups of slots which are arranged at intervals up and down and are used for inserting two sides of the substrate in the supply storage box 24, the slots are arranged along a first direction, the supply storage box 24 is assembled on the supply platform 22 in a sliding mode along a second direction, and the second direction is perpendicular to the first direction.

The second feeding driving unit 25 is installed on the feeding platform 22 and connected to the feeding magazine 24, and the second feeding driving unit 25 is configured to drive the feeding magazine 24 to slide back and forth along the second direction; the feeding and pushing unit 26 is mounted on a side of the feeding platform 22 away from the substrate output port, and the feeding and pushing unit 26 is used for pushing out the substrates one by one from the feeding magazine 24 in a first direction.

In this embodiment, the first supply driving unit 23 and the second supply driving unit 25 are linear screw rod sliding table modules driven by a servo motor, the supply pushing unit 26 is an air cylinder, and in other embodiments, the first supply driving unit 23 and the second supply driving unit 25 may also be in other structural forms, for example: the feeding and pushing unit 26 may also be in other structural forms, such as a belt wheel transmission structure, a rack and pinion transmission structure, or a cylinder transmission structure driven by a servo motor, for example: the servo motor driven linear screw rod sliding table module, the belt wheel transmission structure, the gear and rack transmission structure and the like.

Referring to fig. 1 and 3, the feeding clamping and conveying mechanism 103 includes: a feeding conveying base 31, a feeding clamping device 32, a feeding driving device 33, two groups of blocking devices 34 and an auxiliary conveying device 35.

Two ends of the feeding conveying base 31 are respectively provided with a connection inlet and a connection outlet; the feeding clamping device 32 is slidably assembled on the feeding conveying base 31 along a first direction and is used for clamping and fixing the substrate; the feeding driving device 33 is installed on the feeding conveying base 31 and connected to the feeding clamping device 32, and the feeding driving device 33 is used for driving the feeding clamping device 32 to slide back and forth along a first direction; two groups of blocking devices 34 are arranged on the feeding conveying base 31 along a first direction, the blocking devices 34 are arranged along the first direction, and the two groups of blocking devices 34 are arranged on two sides of the feeding clamping device 32; the auxiliary transfer device 35 is installed on the blocking device 34, and the auxiliary transfer device 35 is used for contacting the side portion of the substrate clamped by the loading clamping device 32 and assisting in conveying the substrate in the first direction.

After the base plate was carried the entry of plugging into of material loading conveying base 31, the one end of fixed base plate can be held to material loading clamping device 32, it has certain fender limiting displacement that separates to keep off 34 to the side of base plate, supplementary conveyer 35 also can contact the lateral part of base plate, under material loading drive arrangement 33 and supplementary conveyer 35's common drive, the base plate can be stable from the entry of plugging into and carried to the export of plugging into, whole material loading clamping transport mechanism 103 simple structure, light in weight, vibrations are little, carry stability height, and shorten the time of carrying the base plate by a wide margin, the functioning speed is very fast, solid brilliant efficiency and precision have been improved.

The feeding drive device 33 includes: a first driven pulley 331, a first driving pulley 332, a first timing belt 333, and a second power member 334.

The first driven pulley 331 is rotatably mounted on the feeding transfer base 31; the first driving pulley 332 is rotatably mounted on the feeding and conveying base 31; the first synchronous belt 333 is connected between the first driven pulley 331 and the first driving pulley 332, and part of the first synchronous belt 333 is fixedly connected with the feeding clamping device 32; the second power member 334 is installed on the feeding conveying base 31, an output end of the second power member 334 is connected to the first driving pulley 332, and the second power member 334 is used for driving the first driving pulley 332 to rotate forward and backward.

In this embodiment, the second power member 334 is a servo motor capable of being precisely controlled by a PLC program, when the second power member 334 works, the first driving wheel can drive the first synchronous belt 333 to rotate, and the first synchronous belt 333 drives the feeding clamping device 32 to reciprocate, and the feeding driving device 33 with the above design has a simple structure, is convenient to operate and control, has low manufacturing and maintenance costs, and can drive the feeding clamping device 32 to precisely move to a preset position.

The blocking device 34 includes: the feeding device comprises a fixed bottom plate 341, an adjustable baffle 342 and a plurality of locking pieces, wherein the fixed bottom plate 341 is horizontally arranged on the feeding conveying base 31; the adjustable baffle 342 is slidably mounted on the fixed base plate 341, the fixed base plate 341 and the adjustable baffle 342 are vertically arranged, and the sliding direction of the adjustable baffle 342 is perpendicular to the sliding direction of the feeding clamping device 32, for example, in this embodiment, the sliding direction of the feeding clamping device 32 is the Y-axis direction, that is, the sliding direction of the adjustable baffle 342 is the X-axis direction; the locking member is used to lock and fix the adjustable baffle 342 on the fixed bottom plate 341, which is not specifically shown in the drawing, and the locking member may be a screw or a latch.

The auxiliary conveying device 35 comprises: a second driving pulley 351, a plurality of second driven pulleys 352, a second timing belt 353, and a third power member 354. The second driving pulley 351 is rotatably mounted on one side of the adjustable baffle 342 close to the substrate; a second driven pulley 352 is rotatably assembled at one side part of the adjustable baffle 342 close to the base plate; a second timing belt 353 is connected between the plurality of second driven pulleys 352 and the second driving pulley 351, and the second timing belt 353 supports and conveys the side surface of the substrate held by the feeding holding device 32; the third power member 354 is mounted on a side portion of the adjustable baffle 342 away from the substrate, an output end of the third power member 354 is connected to the second driving pulley 351, and the third power member 354 is used for driving the second driving pulley 351 to rotate forward and backward.

In this embodiment, the third power piece 354 is the servo motor of the accurate control of accessible PLC procedure, and the during operation of third power piece 354 can drive the rotation of second hold-in range 353 through second driving pulley 351, and the motion of second hold-in range 353 rethread friction force auxiliary substrate, the supplementary conveyer 35 of above-mentioned design, simple structure, it is convenient to control, and preparation, cost of maintenance are than lower.

The feeding conveying base 31 is provided with a second guide rail 36, the feeding clamping device 32 is provided with a second slide block 37, and the second slide block 37 and the second guide rail 36 are assembled in a sliding mode. Through the cooperation of the second slider 37 and the second guide rail 36, the feeding clamping device 32 is more stable during the sliding process.

Referring to fig. 1 and 4, the feeding clamping device 32 includes: a loading slide base 321, a loading clamping unit 322 and a loading lifting driving unit 323.

The feeding slide base 321 is slidably assembled on the feeding conveying base 31; the feeding clamping unit 322 is assembled on the feeding sliding base 321 in a sliding manner along the vertical direction, and the feeding clamping unit 322 is used for clamping and fixing the substrate; the feeding lifting driving unit 323 is installed on the feeding sliding base 321 and connected to the feeding clamping unit 322, and the feeding lifting driving unit 323 is configured to drive the feeding clamping unit 322 to lift.

When the loading lifting driving unit 323 works, the loading clamping unit 322 can be driven to lift along the loading sliding base 321, so that the loading clamping unit 322 can be conveniently aligned to the position of the substrate, the substrate can be conveniently clamped smoothly and efficiently, and the conveying efficiency is improved.

The feeding clamping unit 322 includes: the feeding clamping device comprises a feeding clamping base 3221, a feeding fixing clamp 3222, a feeding movable clamp 3223 and a feeding telescopic power piece 3224, wherein the feeding fixing clamp 3222 is fixedly arranged on the feeding clamping base 3221; the feeding movable clamp 3223 is used for matching with the feeding fixing clamp 3222 to clamp and fix the substrate; the feeding telescopic power member 3224 is mounted on the feeding clamping base 3221, the feeding movable clamp 3223 is connected to an output end of the feeding telescopic power member 3224, and the feeding telescopic power member 3224 is used for driving the feeding movable clamp 3223 to approach or be far away from the feeding fixing clamp 3222.

The flexible power part 3224 during operation of material loading can drive the motion of material loading activity clamp 3223, and material loading activity clamp 3223 cooperates material loading fixation clamp 3222 again, firmly presss from both sides tightly together or unclamps the base plate, realizes pressing from both sides the purpose of getting the base plate and putting down the base plate, and structural design is relatively fairly simple, controls the maintenance more convenient, and the centre gripping operation is also relatively more stable, is favorable to the base plate to be stably carried. In this embodiment, the feeding telescopic power member 3224 is an air cylinder, and an output end of the air cylinder is disposed upward, in other embodiments, the feeding telescopic power member 3224 may also be an oil cylinder or an electric push rod.

The side of the loading sliding base 321 is provided with a first guide rail 324 arranged vertically, the side of the loading clamping base 3221 is provided with a first slider 325, and the first slider 325 and the first guide rail 324 are assembled in a sliding manner. Through the cooperation of the first sliding block 325 and the first guiding rail 324, the feeding clamping unit 322 is more stable in the lifting process.

The feeding lifting driving unit 323 includes: the feeding device comprises a lifting screw rod 3231 and a first power part 3232, wherein the lifting screw rod 3231 is rotatably assembled at the side part of a feeding sliding base 321, the rotating axis of the lifting screw rod 3231 is vertically arranged, and the lifting screw rod 3231 penetrates through a feeding clamping base 3221 and is in threaded transmission assembly with the feeding clamping base 3221; the first power member 3232 is installed on a side portion of the feeding sliding base 321, an output end of the first power member 3232 is connected to one end of the lifting screw rod 3231, and the first power member 3232 is used for driving the lifting screw rod 3231 to rotate forward and backward.

In this embodiment, the first power component 3232 is a servo motor capable of being precisely controlled by a PLC program, and when the first power component 3232 works, the lifting screw rod 3231 can be driven to rotate, so as to drive the feeding clamping base 3221 to stably lift.

The feeding movable clamp 3223 and the feeding fixing clamp 3222 are both strip-shaped plate-shaped, and the side surfaces of the feeding movable clamp 3223 and the feeding fixing clamp 3222, which are close to each other, are provided with anti-slip structures. The strip plate-shaped feeding movable clamp 3223 and the feeding fixing clamp 3222 can have a larger contact area with the end part of the substrate, and the anti-slip structure has a larger friction coefficient, so that the substrate is effectively prevented from shaking in the conveying process.

Referring to fig. 1 and 5, the carrying and moving mechanism 104 includes: a carrying support 41, a carrying platform 42, a first carrying driving unit 43, a carrying clamping seat 44 and a second carrying driving unit 45.

The carrying platform 42 is assembled on the carrying support 41 in a sliding way along the first direction; the first loading and moving driving unit 43 is installed on the loading and moving support base 41 and connected to the loading and moving platform 42, and the first loading and moving driving unit 43 is used for driving the loading and moving platform 42 to slide back and forth along a first direction; the carrying and moving clamping seat 44 is assembled on the carrying and moving platform 42 in a sliding manner along the second direction, and the carrying and moving clamping seat 44 is used for clamping and fixing the substrate; the second loading and moving driving unit 45 is installed on the loading and moving platform 42 and connected to the loading and moving clamping seat 44, and the second loading and moving driving unit 45 is used for driving the loading and moving clamping seat 44 to slide back and forth along the second direction.

In this embodiment, the first loading and moving driving unit 43 is a first flat linear motor, a rotor part of the first flat linear motor is mounted on the loading and moving platform 42, and a stator part of the first flat linear motor is mounted on the loading and moving support base 41; the second carrying and moving driving unit 45 is a second flat linear motor, a rotor part of the second flat linear motor is mounted on the carrying and moving clamping base 44, and a stator part of the second flat linear motor is mounted on the carrying and moving platform 42.

Referring to fig. 1 and 6, the carrying and clamping seat 44 includes: a clamping bottom plate 441, a fixed baffle 442, a movable baffle 443, a carrying and moving clamping driving unit 444 and a carrying and moving pallet 445.

The fixed baffle 442 is fixedly mounted on one side of the clamping bottom plate 441; the movable blocking plate 443 is slidably assembled at the other side portion of the clamping bottom plate 441, the movable blocking plate 443 and the fixed blocking plate 442 are arranged in parallel, a flexible plate 4431 is arranged at one side of the movable blocking plate 443 close to the fixed blocking plate 442, and the flexible plate 4431 has a deformable characteristic, so that the substrate can be protected from being damaged by clamping when the substrate is clamped.

The carrying and clamping driving unit 444 is mounted on the clamping base plate 441 and connected to the movable baffle 443, and the carrying and clamping driving unit 444 is used for driving the movable baffle 443 to approach or depart from the fixed baffle 442; the carrier plate 445 is mounted on the holding base plate 441, and the carrier plate 445 is used for carrying a substrate.

In this embodiment, the loading and moving clamping driving unit 444 is a plurality of sets of cylinders working synchronously, and in other embodiments, the loading and moving clamping driving unit 444 may also be a linear screw rod sliding table module driven by an oil cylinder, an electric push rod, or a servo motor.

Referring to fig. 1 and 7, the feeding clamping and conveying mechanism 105 includes: a blanking supporting seat 51, a blanking sliding seat 52, a blanking driving device 53, a blanking lifting driving unit 54 and a blanking clamping unit 55.

The blanking sliding seat 52 is assembled on the blanking supporting seat 51 in a sliding manner along a first direction; the blanking driving device 53 is installed on the blanking support seat 51 and connected to the blanking sliding seat 52, and the blanking driving device 53 is used for driving the blanking sliding seat 52 to slide back and forth along a first direction; the blanking lifting driving unit 54 is arranged on the blanking sliding seat 52; the blanking clamping unit 55 is slidably assembled on the blanking sliding seat 52 along the vertical direction, the blanking clamping unit 55 is used for clamping and fixing the substrate, and the blanking lifting driving unit 54 drives the blanking clamping unit 55 to lift.

In this embodiment, the blanking driving device 53 is a synchronous wheel synchronous belt transmission structure driven by a servo motor, and in other embodiments, the blanking driving device 53 may also be a linear screw rod sliding table module driven by the servo motor.

In this embodiment, the discharging lifting driving unit 54 is an air cylinder, and in other embodiments, the discharging lifting driving unit 54 may also be an oil cylinder, an electric push rod, or a linear screw rod sliding table module driven by a servo motor.

The blanking holding unit 55 includes: the blanking device comprises a blanking clamping base 551, a blanking fixing clamp 552, a blanking movable clamp 553 and a blanking telescopic power piece 554, wherein the blanking fixing clamp 552 is fixedly arranged on the blanking clamping base 551; the blanking movable clamp 553 is used to clamp and fix the substrate in cooperation with the blanking fixing clamp 552; the blanking telescopic power piece 554 is installed on the blanking clamping base 551, the blanking movable clamp 553 is connected to the output end of the blanking telescopic power piece 554, and the blanking telescopic power piece 554 is used for driving the blanking movable clamp 553 to be close to or far away from the blanking fixed clamp 552.

The flexible power part 554 during operation of unloading can drive the motion of unloading activity clamp 553, and unloading activity clamp 553 cooperates unloading fixation clamp 552 again, firmly presss from both sides the tight base plate or unclamps together, realizes pressing from both sides the purpose of getting the base plate and putting down the base plate, and structural design is fairly simple relatively, controls the maintenance more convenient, and the centre gripping operation is also relatively more stable, is favorable to the base plate to be stably carried. In this embodiment, the feeding telescopic power member 554 is an air cylinder, and an output end of the air cylinder is disposed upward, in other embodiments, the feeding telescopic power member 554 may also be an oil cylinder or an electric push rod.

The blanking movable clamp 553 and the blanking fixed clamp 552 are both in the shape of a long strip plate, and the side surfaces of the blanking movable clamp 553 and the blanking fixed clamp 552, which are close to each other, are provided with anti-skidding structures. The elongated plate-shaped blanking movable clamp 553 and the blanking fixing clamp 552 can have a larger contact area with the end of the substrate, and the anti-slip structure has a larger friction coefficient, so that the substrate is effectively prevented from shaking in the conveying process.

Referring to fig. 1 and 8, the recycling connection mechanism 106 includes: the device comprises a docking support 61, a fixed mounting frame 62, a movable mounting frame 63, a docking drive unit 64 and a docking belt conveying unit 65.

The fixed mounting frame 62 is fixedly mounted at one side part of the connection support seat 61; the movable mounting frame 63 is slidably assembled at the other side part of the connection supporting seat 61, and the movable mounting frame 63 and the fixed mounting frame 62 are arranged in parallel; the connection driving unit 64 is mounted on the connection supporting seat 61 and connected to the movable mounting frame 63, and the connection driving unit 64 is used for driving the movable mounting frame 63 to approach or depart from the fixed mounting frame 62; the two groups of connecting belt conveying units 65 are respectively installed on the fixed installation frame 62 and the movable installation frame 63, two side parts of the substrate are supported on the two groups of connecting belt conveying units 65, and the connecting belt conveying units 65 are used for conveying the substrate.

In this embodiment, the docking driving unit 64 is a linear screw sliding table module driven by a manual operation, the docking belt conveying unit 65 is a synchronous belt transmission structure of a synchronous wheel driven by a servo motor, and in other embodiments, the docking driving unit 64 and the docking belt conveying unit 65 may also be linear screw sliding table modules driven by a servo motor.

The recovery docking mechanism 106 configured as described above can stably transfer the substrate until the substrate is inserted into the substrate receiving mechanism 107 from the substrate input port.

Referring to fig. 1 and 9, the substrate receiving mechanism 107 includes: a storage support base 71, a storage platform 72, a first storage driving unit 73, a storage magazine 74, and a second storage driving unit 75.

The accommodating platform 72 is vertically assembled on the accommodating support seat 71 in a sliding manner; the first storage driving unit 73 is installed on the storage support base 71 and connected to the storage platform 72, and the first storage driving unit 73 is used for driving the storage platform 72 to intermittently ascend and descend.

The storage box 74 is provided with a plurality of groups of slots which are arranged at intervals up and down and are used for the two sides of the substrate to be spliced, the slots are arranged along a first direction, the storage box 74 is assembled on the storage platform 72 in a sliding mode along a second direction, and the second direction is perpendicular to the first direction.

The second storage driving unit 75 is mounted on the storage platform 72 and connected to the storage case 74, and the second storage driving unit 75 is configured to drive the storage case 74 to slide back and forth along the second direction.

In this embodiment, the first accommodating driving unit 73 and the second accommodating driving unit 75 are linear screw rod sliding table modules driven by a servo motor, and in other embodiments, the first accommodating driving unit 73 and the second accommodating driving unit 75 may also be in other structural forms, for example: a belt wheel transmission structure driven by a servo motor, a gear rack transmission structure, or a cylinder transmission structure and the like.

In summary, the working process of the substrate transportation module provided by the present application is substantially as follows:

after the substrate supply mechanism 102 delivers the substrate out of the substrate output port, the loading clamping and conveying mechanism 103 clamps, fixes and moves the substrate to the loading and moving mechanism 104, the loading and moving mechanism 104 then conveys the substrate to the die bonding station, the substrate becomes the substrate after the die bonding operation, the loading and moving mechanism 104 then conveys the substrate to the unloading clamping and conveying mechanism 105, the unloading clamping and conveying mechanism 105 clamps, fixes and moves the substrate to the recovery connection mechanism 106, and the recovery connection mechanism 106 then conveys the substrate into the substrate receiving mechanism 107.

The application provides a beneficial technological effect of base plate transportation module roughly as follows:

the feeding clamping and conveying mechanism 103 and the discharging clamping and conveying mechanism 105 are added, the substrate is mainly conveyed in a substrate clamping mode, compared with the mode that the substrate is conveyed by a belt, the structure is simple, the substrate is not easy to shake or rock in the conveying process, the conveying stability is improved, meanwhile, the whole substrate conveying module is of a linear structure, the conveying path length of the substrate is greatly shortened, the time for conveying the substrate is shortened, the running speed is high, and the die bonding efficiency and precision are improved.

The embodiment of the application further provides a die bonder, which comprises a rack 101, a substrate transportation module and a die bonder module, wherein the substrate transportation module and the die bonder module are designed conventionally, and the die bonder module comprises a die feeding mechanism, a die ring platform, an ejector pin mechanism, a camera unit and a die bonder mechanism. The die bonder with the design greatly shortens the length of the conveying path of the substrate, shortens the time for transferring the substrate, has higher running speed, and improves die bonding efficiency and precision.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A substrate transport module, comprising:

a substrate supply mechanism (102), wherein the substrate supply mechanism (102) is provided with a substrate output port;

the feeding clamping and conveying mechanism (103) is positioned on one side, close to the substrate output port, of the substrate supply mechanism (102) and used for clamping, fixing and conveying the substrate;

the carrying and moving mechanism (104) is positioned on one side, away from the substrate supply mechanism (102), of the feeding clamping and conveying mechanism (103) and is used for transferring the substrate to a die bonding station;

the blanking clamping and conveying mechanism (105) is positioned on one side, away from the feeding clamping and conveying mechanism (103), of the carrying and moving mechanism (104) and is used for clamping and fixing the substrate and transferring the substrate;

the recovery connection mechanism (106) is positioned on one side of the blanking clamping and conveying mechanism (105) and used for transferring the substrate from one side of the recovery connection mechanism (106) to the other side of the recovery connection mechanism (106); and the number of the first and second groups,

and the substrate receiving mechanism (107), wherein a substrate input port is arranged on the side part of the substrate receiving mechanism (107) close to the recovery connection mechanism (106).

2. The substrate transport module of claim 1, wherein the substrate feed mechanism (102) comprises:

a supply support base (21);

the supply platform (22) is vertically assembled on the supply support seat (21) in a sliding manner;

the first supply driving unit (23) is arranged on the supply supporting seat (21), connected to the supply platform (22) and used for driving the supply platform (22) to intermittently lift;

the supply storage box (24) is internally provided with a plurality of groups of slots which are arranged at intervals up and down and are used for inserting two sides of the substrate, the slots are arranged along a first direction, the supply storage box (24) is assembled on the supply platform (22) in a sliding mode along a second direction, and the second direction is perpendicular to the first direction;

the second supply driving unit (25) is arranged on the supply platform (22), connected to the supply storage box (24) and used for driving the supply storage box (24) to slide back and forth along a second direction; and the number of the first and second groups,

and the feeding and pushing unit (26) is arranged on the side part of the feeding platform (22) far away from the substrate output port and is used for pushing the substrates out of the feeding and storing box (24) along a first direction one by one.

3. The substrate transport module of claim 1, wherein the loading clamp transfer mechanism (103) comprises:

the device comprises a feeding conveying base (31), wherein two end parts of the feeding conveying base (31) are respectively provided with a connection inlet and a connection outlet;

the feeding clamping device (32) is assembled on the feeding conveying base (31) in a sliding mode along a first direction and used for clamping and fixing the substrate;

the feeding driving device (33) is arranged on the feeding conveying base (31), connected to the feeding clamping device (32) and used for driving the feeding clamping device (32) to slide back along a first direction;

the two groups of blocking devices (34) are arranged on the feeding conveying base (31) along a first direction, the blocking devices (34) are arranged along the first direction, and the two groups of blocking devices (34) are arranged on two sides of the feeding clamping device (32); and the number of the first and second groups,

and the auxiliary conveying device (35) is arranged on the blocking device (34) and is used for contacting the side part of the substrate clamped by the feeding clamping device (32) and assisting in conveying the substrate along the first direction.

4. The substrate transport module of claim 3, wherein the loading fixture (32) comprises:

a feeding sliding base (321) which is assembled on the feeding conveying base (31) in a sliding way;

a feeding clamping unit (322) which is assembled on the feeding sliding base (321) in a sliding manner along the vertical direction and is used for clamping and fixing the substrate; and the number of the first and second groups,

and the feeding lifting driving unit (323) is arranged on the feeding sliding base (321), is connected to the feeding clamping unit (322), and is used for driving the feeding clamping unit (322) to lift.

5. The substrate transport module of claim 1, wherein the load-and-move mechanism (104) comprises:

a carrying support base (41);

the carrying platform (42) is assembled on the carrying support seat (41) in a sliding mode along a first direction;

the first carrying and moving driving unit (43) is arranged on the carrying and moving supporting seat (41), connected to the carrying and moving platform (42) and used for driving the carrying and moving platform (42) to slide back and forth along a first direction;

the carrying and moving clamping seat (44) is assembled on the carrying and moving platform (42) in a sliding mode along a second direction and is used for clamping and fixing the substrate; and the number of the first and second groups,

and the second carrying and moving driving unit (45) is arranged on the carrying and moving platform (42), connected to the carrying and moving clamping seat (44) and used for driving the carrying and moving clamping seat (44) to slide back and forth along a second direction.

6. The substrate transport module of claim 5, wherein the load-and-unload chuck (44) comprises:

a clamping base plate (441);

a fixed baffle (442) fixedly mounted on one side of the clamping bottom plate (441);

a movable baffle (443) slidably mounted on the other side of the clamping bottom plate (441), the movable baffle (443) and the fixed baffle (442) being arranged in parallel, and a flexible plate (4431) being provided on the side of the movable baffle (443) close to the fixed baffle (442);

a carrying and clamping driving unit (444) mounted on the clamping base plate (441) and connected to the movable baffle (443) for driving the movable baffle (443) to approach or separate from the fixed baffle (442);

and the carrying and moving supporting plate (445) is arranged on the clamping bottom plate (441) and is used for carrying a substrate.

7. The substrate transport module of claim 1, wherein the blanking clamp conveyor (105) comprises:

a blanking support seat (51);

the blanking sliding seat (52) is assembled on the blanking supporting seat (51) in a sliding mode along a first direction;

the blanking driving device (53) is arranged on the blanking supporting seat (51), is connected to the blanking sliding seat (52), and is used for driving the blanking sliding seat (52) to slide back along a first direction;

a blanking lifting driving unit (54) which is arranged on the blanking sliding seat (52); and the number of the first and second groups,

and the blanking clamping unit (55) is assembled on the blanking sliding seat (52) in a sliding manner along the vertical direction and used for clamping and fixing the substrate, and the blanking lifting driving unit (54) drives the blanking clamping unit (55) to lift.

8. The substrate transport module of claim 1, wherein the recovery docking mechanism (106) comprises:

connecting the supporting seat (61);

the fixed mounting frame (62) is fixedly mounted on one side part of the connection supporting seat (61);

the movable mounting frame (63) is slidably assembled at the other side part of the connection supporting seat (61), and the movable mounting frame (63) and the fixed mounting frame (62) are arranged in parallel;

the connection driving unit (64) is mounted on the connection supporting seat (61) and connected to the movable mounting frame (63) and is used for driving the movable mounting frame (63) to be close to or far away from the fixed mounting frame (62);

the two groups of belt conveying units (65) are plugged, the two groups of belt conveying units (65) are respectively installed on the fixed mounting frame (62) and the movable mounting frame (63), and two side parts of the base plate are supported on the two groups of belt conveying units (65) for transferring the base plate.

9. The substrate transport module of claim 1, wherein the substrate receiving mechanism (107) comprises:

a receiving support base (71);

the storage platform (72) is vertically assembled on the storage support seat (71) in a sliding manner;

the first storage driving unit (73) is arranged on the storage supporting seat (71), is connected to the storage platform (72) and is used for driving the storage platform (72) to intermittently lift;

the substrate storage device comprises a storage box (74), wherein a plurality of groups of slots which are arranged at intervals up and down and are used for inserting two sides of a substrate are arranged in the storage box (74), the slots are arranged along a first direction, the storage box (74) is assembled on a storage platform (72) in a sliding mode along a second direction, and the second direction is perpendicular to the first direction; and the number of the first and second groups,

and the second storage driving unit (75) is arranged on the storage platform (72), connected to the storage box (74) and used for driving the storage box (74) to slide back and forth along a second direction.

10. A die bonder comprising the substrate transport module according to any one of claims 1 to 9.

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