CN114906617B - Ion implantation linear conveying device for multiple large-size glass substrates - Google Patents
Ion implantation linear conveying device for multiple large-size glass substrates Download PDFInfo
- Publication number
- CN114906617B CN114906617B CN202210485796.9A CN202210485796A CN114906617B CN 114906617 B CN114906617 B CN 114906617B CN 202210485796 A CN202210485796 A CN 202210485796A CN 114906617 B CN114906617 B CN 114906617B
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- Prior art keywords
- driving
- size glass
- ion implantation
- glass substrates
- transmission shaft
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011521 glass Substances 0.000 title claims abstract description 80
- 239000000758 substrate Substances 0.000 title claims abstract description 79
- 238000005468 ion implantation Methods 0.000 title claims abstract description 47
- 230000007246 mechanism Effects 0.000 claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims description 38
- 150000002500 ions Chemical class 0.000 abstract description 14
- 238000005070 sampling Methods 0.000 abstract description 7
- 239000007943 implant Substances 0.000 abstract description 3
- 239000011343 solid material Substances 0.000 description 9
- 230000003068 static effect Effects 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 4
- 238000002513 implantation Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses an ion implantation linear conveying device for a plurality of large-size glass substrates, which has the technical scheme that: an ion implantation linear conveying device for a plurality of large-size glass substrates is characterized in that: the driving conveying device comprises a plurality of driving conveying shaft pipes which are sequentially nested, a plurality of driven conveying shaft pipes which are sequentially nested, a plurality of driving wheels which are respectively fixed at two ends of the driving conveying shaft pipes, a plurality of driven wheels which are respectively fixed on the driven conveying shaft pipes, conveying chains which are arranged between the corresponding driving wheels and the driven wheels and are used for loading large-size glass substrates, and a driving mechanism which drives the conveying chains to synchronously move, wherein the conveying chains are arranged in parallel. The invention can continuously implant ions into a plurality of large-size glass substrates in the vacuum sampling chamber, avoids repeated vacuumizing of the vacuum sampling chamber, improves ion implantation efficiency and reduces energy loss.
Description
Technical Field
The invention relates to the field of ion implantation equipment, in particular to an ion implantation linear conveying device for a plurality of large-size glass substrates.
Background
Ion implantation refers to the phenomenon that when an ion beam irradiates a piece of solid material in vacuum, the ion beam impacts atoms or molecules of the solid material out of the surface of the solid material, and this phenomenon is called sputtering; when the ion beam strikes the solid material, it bounces back from the surface of the solid material or passes out of the solid material, which is called scattering; another phenomenon is that the ion beam, after striking the solid material, is slowly reduced in velocity by being resisted by the solid material, and finally stays in the solid material, which is called ion implantation.
When large-size glass substrates are subjected to ion implantation, due to the large size, only one glass substrate can be implanted in the same batch of glass substrates, after the implantation is completed, the glass substrates are taken out through the low-vacuum sampling chamber, the next glass substrate is loaded into the ion implantation chamber, and then the ion implantation chamber is subjected to vacuumizing treatment, so that a large amount of time is wasted due to repeated vacuumizing operation, and the ion implantation efficiency is poor.
In addition, a wide-band beam ion implanter is generally used for large glass substrate ion implantation, which requires that the loaded glass substrate can perform linear uniform motion along the width direction of the substrate, and high uniformity glass substrate implantation is achieved by one implantation. At present, no linear motion device capable of simultaneously realizing a plurality of glass substrates in a vacuum cavity exists.
Therefore, there is a need for an improvement in such a structure to overcome the above-mentioned drawbacks.
Disclosure of Invention
The invention aims to provide an ion implantation linear conveying device for a plurality of large-size glass substrates, which can be used for continuously implanting ions into the large-size glass substrates in a vacuum sampling chamber, so that the repeated vacuumizing of the vacuum sampling chamber is avoided, the ion implantation efficiency is improved, and the energy loss is reduced.
The technical aim of the invention is realized by the following technical scheme: an ion implantation linear conveying device for a plurality of large-size glass substrates is characterized in that: the driving transmission shaft tube is arranged in a nested manner, the driven transmission shaft tube is arranged in a nested manner, the driving wheels are respectively fixed at two ends of the driving transmission shaft tube, the driven wheels are respectively fixed on the driven transmission shaft tube, the transmission chains are arranged between the corresponding driving wheels and the driven wheels and used for loading large-size glass substrates, the driving mechanisms are used for driving the transmission chains to synchronously move, the transmission chains are arranged in parallel, the diameter of the driving wheel fixed by the driving transmission shaft tube positioned at the outer side is larger than that of the driving wheel fixed by the driving transmission shaft tube positioned at the inner side, the height difference between the two adjacent transmission chains is larger than the thickness of the large-size glass substrates, and the distance between the two driving wheels fixed by the driving transmission shaft tube positioned at the outer side is smaller than that between the two driving wheels fixed by the driving transmission shaft tube positioned at the inner side.
The invention is further provided with: and a mechanical arm for grabbing and carrying the large-size glass substrates is arranged in the ion implantation linear conveying device for the large-size glass substrates.
The invention is further provided with: a base station for a large-size glass substrate device is arranged between two symmetrically arranged conveying chains, and a plurality of base stations are positioned on the same plane.
The invention is further provided with: the base is provided with an electric clamping jaw for clamping and fixing a large-size glass substrate.
The invention is further provided with: the multi-large-size glass substrate ion implantation linear conveying device is provided with an incoming sensor for sensing that the base station enters the ion implantation area and an outgoing sensor for sensing that the front end of the base station leaves the ion implantation area.
The invention is further provided with: the driving mechanism comprises a plurality of servo motors which respectively drive the corresponding driving transmission shaft tubes to rotate.
The invention is further provided with: the driving mechanism comprises a connecting block fixed with a plurality of conveying chains and a pushing structure for driving the connecting block to reciprocate, and the part, far away from one side of the large-size glass substrate, of the conveying chains is fixedly connected with the connecting block.
The invention is further provided with: the pushing structure comprises a screw nut arranged on the connecting block, a screw connected with the screw nut in a threaded manner, and a driving motor for driving the screw to rotate, and the length direction of the screw is parallel to the moving direction of the conveying chain.
In summary, the invention has the following beneficial effects:
the plurality of conveying chains are arranged in a certain dislocation mode, namely, one large-size glass substrate can be placed on the conveying chains at different height positions respectively, the driving mechanism is used for driving a plurality of large-size glass substrates to synchronously move, the large-size glass substrates are relatively static, when the outermost large-size glass substrates pass through an ion implantation area, ion implantation of the large-size glass substrates is achieved, then the outermost large-size glass substrates are conveyed to the innermost side through a mechanical arm, and when the large-size glass substrates are conveyed, the large-size glass substrates can be rotated by a certain angle, the large-size glass is convenient to basically move, in addition, when the large-size glass substrates are conveyed, the conveying chains can be driven to move back, so that ion implantation of the next large-size glass substrates is facilitated, a low vacuum sampling chamber is not required to be opened in an invalid mode, ion implantation efficiency of the large-size glass substrates is improved, and energy sources are saved.
When the ion implantation device is used, the large-size glass substrate is placed on the base station in advance, the large-size glass substrate is fixed through the electric clamping jaw, the position of the large-size glass substrate is ensured to be accurately fixed, and the large-size glass substrate can be accurately implanted with ions.
When the ion implantation device is used, after the conveying chain drives the large-size glass substrate to move to the ion implantation area position and is sensed by the sensor, the control computer in the device controls the corresponding ion implanter to prepare work, and when the sensor senses that the front end of the base station leaves, the control computer controls the ion implanter to implant ions, so that ions are implanted into the large-size glass substrate, and high-precision ion implantation is realized.
The screw rod is driven by the driving motor to rotate, the screw rod drives the screw rod nut and the connecting block to move, and the connecting block drives the plurality of conveying chains to synchronously move, so that the moving speed of the conveying chains is ensured to be consistent, the plurality of base stations are relatively static, and the plurality of base stations are ensured to move in an overlapped state.
Drawings
Fig. 1 is a schematic structural view of embodiment 1;
FIG. 2 is a cross-sectional view of example 1;
fig. 3 is a schematic structural diagram of embodiment 2.
Corresponding part names indicated by numerals in the drawings: 1. a drive transmission shaft tube; 2. a driven transmission shaft tube; 3. a driving wheel; 4. driven wheel; 5. a conveyor chain; 6. a base station; 7. an electric clamping jaw; 8. an incoming sensor; 9. an outgoing sensor; 10. a servo motor; 11. a connecting block; 12. a screw rod; 13. a lead screw nut; 14. and driving the motor.
Detailed Description
In order that the manner in which the above-recited features, advantages, objects and advantages of the invention are obtained, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
Example 1: as shown in fig. 1 and fig. 2, the ion implantation linear conveying device for multiple large-size glass substrates provided by the invention comprises a plurality of driving conveying shaft pipes 1 which are sequentially nested, a plurality of driven conveying shaft pipes 2 which are sequentially nested, a plurality of driving wheels 3 which are respectively fixed at two ends of the driving conveying shaft pipes 1, a plurality of driven wheels 4 which are respectively fixed at the driven conveying shaft pipes 2, conveying chains 5 which are arranged between the corresponding driving wheels 3 and the driven wheels 4 and are used for loading the large-size glass substrates, and a driving mechanism for driving the plurality of conveying chains 5 to synchronously move. The conveyor chains 5 are arranged in parallel, and the conveyor chains 5 connected to the same active conveyor shaft tube 1 are symmetrically arranged. The diameter of the driving wheel 3 fixed by the driving transmission shaft tube 1 positioned at the outer side is smaller than that of the driving wheel 3 fixed by the driving transmission shaft tube 1 positioned at the inner side, the height difference between the two adjacent transmission chains 5 is larger than the thickness of the large-size glass substrate, and the distance between the two driving wheels 3 fixed by the driving transmission shaft tube 1 positioned at the outer side is smaller than that between the two driving wheels 3 fixed by the driving transmission shaft tube 1 positioned at the inner side. In this embodiment, a mechanical arm (not labeled in the figure) for grabbing and carrying the large-size glass substrate is further provided, and the mechanical arm is in the prior art and is not described herein. The plurality of conveying chains 5 are arranged in a certain dislocation way, namely, the conveying chains 5 at different height positions can respectively place one large-size glass substrate, the driving mechanism is used for driving a plurality of large-size glass substrates to synchronously move, the large-size glass substrates are relatively static, when the outermost large-size glass substrates pass through an ion implantation area, ions are implanted into the large-size glass substrates, the outermost large-size glass substrates are conveyed to the innermost side through a mechanical arm, the large-size glass substrates can be rotated for a certain angle during conveying, large-size glass is convenient to basically move, in addition, the conveying chains 5 can be driven to move backwards during conveying of the large-size glass substrates, so that ions are conveniently implanted into the next large-size glass substrates, a low vacuum sampling chamber is not required to be opened in an ineffective way, the ion implantation efficiency of the large-size glass substrates is improved, and energy sources are saved.
In this embodiment, a base table 6 for a large-size glass substrate device is arranged between two symmetrically arranged conveying chains 5, and a plurality of base tables 6 are located at the same plane position, namely, the base tables 6 are fixed between the two symmetrically arranged conveying chains 5, so that a plurality of base tables 6 are arranged at intervals. Each base 6 may also be provided with an electrically operated clamping jaw 7 for clamping and fixing a large-sized glass substrate. When the ion implantation device is used, a large-size glass substrate is placed on the base 6 in advance, the large-size glass substrate is fixed through the electric clamping jaw 7, the position of the large-size glass substrate is ensured to be accurately fixed, and the large-size glass substrate can be accurately implanted with ions.
The linear transport device is further provided with an in-coming sensor 8 for the entrance of the abutment 6 into the ion implantation zone, and an out-coming sensor 9 for sensing the ion implantation zone of the abutment 6. The incoming sensor 8 and the outgoing sensor 9 are separately disposed at two ends of the ion implantation region, and the incoming sensor 8 and the outgoing sensor 9 may be infrared sensors, etc., which are known in the art. When the ion implantation device is used, after the conveying chain 5 drives the large-size glass substrate to move to the ion implantation area position and is sensed by the incoming sensor 8, the control computer in the device controls the corresponding ion implanter to prepare for working, and when the outgoing sensor 9 senses that the front end of the base station 6 is away, the control computer controls the ion implanter to implant ions, so that the ion implantation of the large-size glass substrate is achieved, and the ion implantation with high precision is realized.
The driving mechanism comprises a plurality of servo motors 10 which respectively drive the corresponding driving transmission shaft pipes 1 to rotate, the servo motors 10 and the corresponding driving transmission shaft pipes 1 are in chain wheel transmission, the radius of a driving gear fixed by the driving transmission shaft pipes 1 is sequentially reduced from outside to inside, the driving transmission shaft pipes 1 are respectively controlled to rotate by the plurality of servo motors 10, the aim of ensuring the consistent linear speed among a plurality of chain wheels is achieved, the plurality of base stations 6 are relatively static, and the plurality of base stations 6 are ensured to move in an overlapped state.
Example 2 differs from the example in that: as shown in fig. 3, the driving mechanism comprises a connection block 11 fixed with a plurality of conveying chains 5 and a pushing structure for driving the connection block 11 to reciprocate, and the part of the conveying chain 5 far away from one side of the large-size glass substrate is fixedly connected with the connection block 11. The pushing structure comprises a screw nut 13 arranged on the connecting block 11, a screw 12 in threaded connection with the screw nut 13, and a driving motor 14 for driving the screw 12 to rotate, and the length direction of the screw 12 is parallel to the moving direction of the conveying chain 5. Namely, the driving motor 14 drives the screw rod 12 to rotate, the screw rod 12 drives the screw rod nut 13 and the connecting block 11 to move, and the connecting block 11 drives the plurality of conveying chains 5 to synchronously move, so that the moving speed of the conveying chains 5 is ensured to be consistent, the plurality of base stations 6 are relatively static, and the plurality of base stations 6 are ensured to move in an overlapped state.
In this document, the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "vertical", "horizontal", etc. refer to the directions or positional relationships based on those shown in the drawings, and are merely for clarity and convenience of description of the expression technical solution, and thus should not be construed as limiting the present invention.
In this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a list of elements is included, and may include other elements not expressly listed.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (3)
1. An ion implantation linear conveying device for a plurality of large-size glass substrates is characterized in that: the driving transmission shaft tube (1) is arranged in a nested manner in sequence, the driven transmission shaft tube (2) is arranged in a nested manner in sequence, the driving wheels (3) are respectively fixed at two ends of the driving transmission shaft tube (1), the driven wheels (4) are respectively fixed on the driven transmission shaft tube (2), the transmission chains (5) are arranged between the corresponding driving wheels (3) and the driven wheels (4) and used for loading large-size glass substrates, the driving mechanism is used for driving the transmission chains (5) to synchronously move, the transmission chains (5) are arranged in parallel, the diameter of the driving wheel (3) fixed on the driving transmission shaft tube (1) positioned on the outer side is larger than the diameter of the driving wheel (3) fixed on the driving transmission shaft tube (1) positioned on the inner side, the height difference between the two adjacent transmission chains (5) is larger than the thickness of the large-size glass substrates, and the distance between the two driving wheels (3) fixed on the driving transmission shaft tube (1) positioned on the outer side is smaller than the distance between the two driving wheels (3) fixed on the driving transmission shaft tube (1) positioned on the inner side;
a base table (6) for a large-size glass substrate device is arranged between two symmetrically arranged conveying chains (5), and a plurality of base tables (6) are positioned on the same plane;
the base (6) is provided with an electric clamping jaw (7) for clamping and fixing a large-size glass substrate;
the multi-large-size glass substrate ion implantation linear conveying device is provided with an incoming sensor (8) for sensing that the base station (6) enters an ion implantation area and an outgoing sensor (9) for sensing that the front end of the base station (6) leaves the ion implantation area;
the driving mechanism comprises a plurality of servo motors (10) which respectively drive the corresponding driving transmission shaft tubes (1) to rotate;
the driving mechanism comprises a connecting block (11) fixed with a plurality of conveying chains (5) and a pushing structure for driving the connecting block (11) to reciprocate, and the part, far away from one side of the large-size glass substrate, of the conveying chains (5) is fixedly connected with the connecting block (11).
2. The ion implantation linear transfer apparatus for large-sized glass substrates according to claim 1, wherein: and a mechanical arm for grabbing and carrying the large-size glass substrates is arranged in the ion implantation linear conveying device for the large-size glass substrates.
3. The ion implantation linear transfer apparatus for large-sized glass substrates according to claim 1, wherein: the pushing structure comprises a screw nut (13) arranged on the connecting block (11), a screw (12) in threaded connection with the screw nut (13) and a driving motor (14) for driving the screw (12) to rotate, and the length direction of the screw (12) is parallel to the moving direction of the conveying chain (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210485796.9A CN114906617B (en) | 2022-05-06 | 2022-05-06 | Ion implantation linear conveying device for multiple large-size glass substrates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210485796.9A CN114906617B (en) | 2022-05-06 | 2022-05-06 | Ion implantation linear conveying device for multiple large-size glass substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114906617A CN114906617A (en) | 2022-08-16 |
| CN114906617B true CN114906617B (en) | 2024-03-12 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210485796.9A Active CN114906617B (en) | 2022-05-06 | 2022-05-06 | Ion implantation linear conveying device for multiple large-size glass substrates |
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| Country | Link |
|---|---|
| CN (1) | CN114906617B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006310336A (en) * | 2005-04-26 | 2006-11-09 | Central Glass Co Ltd | Apparatus for adjusting position of box-like container for housing glass board |
| JP2007076810A (en) * | 2005-09-14 | 2007-03-29 | Matsushita Electric Ind Co Ltd | Conveyance method for plasma display panel |
| CN101093767A (en) * | 2006-06-20 | 2007-12-26 | Lg电子株式会社 | Plasma display apparatus |
| CN103283011A (en) * | 2011-04-11 | 2013-09-04 | 株式会社爱发科 | Deposition apparatus |
| CN211652600U (en) * | 2020-02-28 | 2020-10-09 | 厦门福信光电集成有限公司 | Large-size LCD glass substrate multi-vision defect AOI inspection machine |
| CN212874427U (en) * | 2020-10-12 | 2021-04-02 | 锐捷芯盛（天津）电子科技有限公司 | Silicon wafer revolution disc of ion implanter |
| CN214778081U (en) * | 2021-04-21 | 2021-11-19 | 威海广泰空港设备股份有限公司 | Pipeline transportation container |
| CN216377928U (en) * | 2021-11-18 | 2022-04-26 | 秦皇岛铭晶源安全技术玻璃有限公司 | Super thick glass plate cutting machine convenient to piece from top to bottom |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7588239B2 (en) * | 2005-12-14 | 2009-09-15 | Pitney Bowes Inc. | Transport and alignment system |
-
2022
- 2022-05-06 CN CN202210485796.9A patent/CN114906617B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006310336A (en) * | 2005-04-26 | 2006-11-09 | Central Glass Co Ltd | Apparatus for adjusting position of box-like container for housing glass board |
| JP2007076810A (en) * | 2005-09-14 | 2007-03-29 | Matsushita Electric Ind Co Ltd | Conveyance method for plasma display panel |
| CN101093767A (en) * | 2006-06-20 | 2007-12-26 | Lg电子株式会社 | Plasma display apparatus |
| CN103283011A (en) * | 2011-04-11 | 2013-09-04 | 株式会社爱发科 | Deposition apparatus |
| CN211652600U (en) * | 2020-02-28 | 2020-10-09 | 厦门福信光电集成有限公司 | Large-size LCD glass substrate multi-vision defect AOI inspection machine |
| CN212874427U (en) * | 2020-10-12 | 2021-04-02 | 锐捷芯盛（天津）电子科技有限公司 | Silicon wafer revolution disc of ion implanter |
| CN214778081U (en) * | 2021-04-21 | 2021-11-19 | 威海广泰空港设备股份有限公司 | Pipeline transportation container |
| CN216377928U (en) * | 2021-11-18 | 2022-04-26 | 秦皇岛铭晶源安全技术玻璃有限公司 | Super thick glass plate cutting machine convenient to piece from top to bottom |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114906617A (en) | 2022-08-16 |
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