CN114906617A - Multi-sheet large-size glass substrate ion implantation linear conveying device - Google Patents
Multi-sheet large-size glass substrate ion implantation linear conveying device Download PDFInfo
- Publication number
- CN114906617A CN114906617A CN202210485796.9A CN202210485796A CN114906617A CN 114906617 A CN114906617 A CN 114906617A CN 202210485796 A CN202210485796 A CN 202210485796A CN 114906617 A CN114906617 A CN 114906617A
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- Prior art keywords
- glass substrate
- ion implantation
- size glass
- driving
- conveying
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011521 glass Substances 0.000 title claims abstract description 79
- 239000000758 substrate Substances 0.000 title claims abstract description 78
- 238000005468 ion implantation Methods 0.000 title claims abstract description 43
- 230000005540 biological transmission Effects 0.000 claims description 21
- 230000000875 corresponding effect Effects 0.000 claims description 9
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 abstract description 17
- 238000005070 sampling Methods 0.000 abstract description 7
- 238000005086 pumping Methods 0.000 abstract description 4
- 239000007924 injection Substances 0.000 abstract 2
- 238000002347 injection Methods 0.000 abstract 1
- 239000011343 solid material Substances 0.000 description 9
- 238000010884 ion-beam technique Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 5
- 239000007943 implant Substances 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses an ion implantation linear conveying device for a plurality of large-size glass substrates, which has the technical scheme that: a multi-sheet large-size glass substrate ion implantation linear conveying device is characterized in that: the device comprises a plurality of driving conveying shaft tubes which are sequentially nested, a plurality of driven conveying shaft tubes which are sequentially nested, a plurality of driving wheels which are respectively fixed at two end positions of the driving conveying shaft tubes, a plurality of driven wheels which are respectively fixed on the driven conveying shaft tubes, conveying chains which are arranged between the corresponding driving wheels and the driven wheels and used for loading large-size glass substrates, and a driving mechanism for driving the conveying chains to synchronously move, wherein the conveying chains are arranged in parallel. The invention can continuously inject ions into a plurality of large-size glass substrates in the vacuum sampling chamber, avoid repeated vacuum pumping of the vacuum sampling chamber, improve the ion injection efficiency and reduce the energy loss.
Description
Technical Field
The invention relates to the field of ion implantation equipment, in particular to a multi-sheet large-size glass substrate ion implantation linear conveying device.
Background
Ion implantation refers to a phenomenon that when an ion beam in a vacuum is emitted to a solid material, the ion beam knocks atoms or molecules of the solid material out of the surface of the solid material, which is called sputtering; when the ion beam strikes the solid material, the ion beam bounces back from the surface of the solid material or passes through the solid material, and the phenomenon is called scattering; another phenomenon is that after the ion beam is irradiated to the solid material, the ion beam is resisted by the solid material to slowly decrease in speed, and finally stays in the solid material, which is called ion implantation.
When ion implantation is performed on a large-size glass substrate, only one glass substrate can be implanted in the same batch due to the large size, after the implantation is completed, the glass substrate needs to be taken out through a low-vacuum sampling chamber, then the next glass substrate is loaded into an ion implantation cavity, and then the vacuum pumping is performed.
In addition, a broad-band beam ion implanter is generally used for ion implantation of large glass substrates, which requires that the loaded glass substrates can move linearly at a constant speed along the width direction of the substrates, and high uniformity of implantation of the glass substrates can be achieved by one implantation. At present, no device for realizing the linear motion of a plurality of glass substrates in a vacuum chamber simultaneously exists.
Therefore, there is a need for an improved structure that overcomes the above-mentioned deficiencies.
Disclosure of Invention
The invention aims to provide an ion implantation linear conveying device for a plurality of large-size glass substrates, which can continuously implant ions into the large-size glass substrates in a vacuum sampling chamber, avoid repeated vacuumizing of the vacuum sampling chamber, improve the ion implantation efficiency and reduce the energy loss.
The technical purpose of the invention is realized by the following technical scheme: a multi-sheet large-size glass substrate ion implantation linear conveying device is characterized in that: including a plurality of initiative conveying central siphon that are the nested setting in proper order, a plurality of driven conveying central siphon that are the nested setting in proper order, a plurality of action wheels that are fixed in the both ends position of initiative conveying central siphon respectively, a plurality of follow driving wheels that are fixed in the driven conveying central siphon respectively, set up in corresponding action wheel and follow the driving chain that is used for loading jumbo size glass substrate between the driving wheel, the actuating mechanism of a plurality of conveying chain synchronous motion of drive, a plurality of conveying chains are parallel arrangement, the action wheel diameter that the initiative conveying central siphon that is located the outside is fixed is greater than the action wheel diameter that is located inboard initiative conveying central siphon, and the difference in height is greater than jumbo size glass substrate thickness between two adjacent conveying chains, the interval is less than the interval between two action wheels that are located inboard initiative conveying central siphon that is fixed between two action wheels that are located the initiative conveying central siphon that is fixed.
The invention is further configured to: and a mechanical arm for grabbing and carrying the large-size glass substrate is arranged in the multi-sheet large-size glass substrate ion implantation linear conveying device.
The invention is further configured to: and a base station for the large-size glass substrate device is arranged between the two symmetrically arranged conveying chains, and the base stations are positioned on the same plane.
The invention is further configured to: the base station is provided with an electric clamping jaw for clamping and fixing the large-size glass substrate.
The invention is further configured to: the multi-piece large-size glass substrate ion implantation linear conveying device is provided with an incoming sensor used for sensing that the base station enters an ion implantation area and an outgoing sensor used for sensing that the front end of the base station leaves the ion implantation area.
The invention is further configured to: the driving mechanism comprises a plurality of servo motors which respectively drive the corresponding driving transmission shaft tubes to rotate.
The invention is further configured to: the driving mechanism comprises connecting blocks fixed with the plurality of conveying chains and a pushing structure for driving the connecting blocks to move in a reciprocating mode, and the part, away from one side of the large-size glass substrate, of each conveying chain is fixedly connected with the connecting blocks.
The invention is further configured to: the pushing structure comprises a lead screw nut, a lead screw and a driving motor, wherein the lead screw nut is arranged on the connecting block, the lead screw is in threaded connection with the lead screw nut, the driving motor drives the lead screw to rotate, and the length direction of the lead screw is parallel to the moving direction of the conveying chain.
In conclusion, the invention has the following beneficial effects:
the plurality of conveying chains are arranged in a certain staggered mode, namely the conveying chains at different height positions can respectively place one large-size glass substrate, the driving mechanism drives the plurality of large-size glass substrates to move synchronously, the plurality of large-size glass substrates are relatively static, when the large-size glass substrate at the outermost side passes through the ion implantation area, the large-size glass substrate is implanted with ions, the large-size glass substrate at the outermost side is transported to the innermost side through the mechanical arm, the large-size glass substrate can rotate for a certain angle during transportation, the large-size glass can be conveniently basically moved, in addition, when the large-size glass substrate is transported, the conveying chains can be driven to move back, so that ions can be conveniently implanted into the next large-size glass substrate, a low-vacuum sampling chamber is inefficiently opened, repeated vacuum pumping is not needed, and the ion implantation efficiency of the large-size glass substrate is improved, and energy is saved.
When the large-size glass substrate fixing device is used, a large-size glass substrate is placed on the base station in advance, the large-size glass substrate is fixed through the electric clamping jaw, the position of the large-size glass substrate is accurately fixed, and the large-size glass substrate can be accurately implanted with ions.
When the ion implantation device is used, after the conveyor belt drives the large-size glass substrate to move to the position of the ion implantation area and the large-size glass substrate is sensed by the incoming sensor, the control computer in the device controls the corresponding ion implanter to prepare, and when the outgoing sensor senses that the front end of the base station leaves, the control computer controls the ion implanter to implant ions, so that the large-size glass substrate is implanted with the ions, and the high-precision ion implantation is realized.
The screw rod is driven to rotate by the driving motor, the screw rod drives the screw rod nut and the connecting block to move, and the connecting block drives the plurality of conveying chains to move synchronously, so that the moving speeds of the conveying chains are kept consistent, the plurality of base stations are relatively static, and the plurality of base stations are ensured to move in an overlapped state.
Drawings
FIG. 1 is a schematic structural view of example 1;
FIG. 2 is a sectional view of embodiment 1;
FIG. 3 is a schematic structural view of embodiment 2.
The corresponding part names indicated by the numbers in the figures: 1. a driving transmission shaft tube; 2. a driven transmission shaft tube; 3. a driving wheel; 4. a driven wheel; 5. a conveyor chain; 6. a base station; 7. an electric jaw; 8. an incoming sensor; 9. an outgoing sensor; 10. a servo motor; 11. connecting blocks; 12. a lead screw; 13. a lead screw nut; 14. the motor is driven.
Detailed Description
In order to make the technical means, the original characteristics, the achieved purposes and the effects of the invention easy to understand, the invention is further described with reference to the figures and the specific embodiments.
Example 1: as shown in fig. 1 and 2, the multi-sheet large-size glass substrate ion implantation linear transporter provided by the present invention includes a plurality of driving transmission shaft tubes 1 sequentially nested, a plurality of driven transmission shaft tubes 2 sequentially nested, a plurality of driving wheels 3 respectively fixed at two ends of the driving transmission shaft tubes 1, a plurality of driven wheels 4 respectively fixed at the driven transmission shaft tubes 2, a transmission chain 5 arranged between the corresponding driving wheels 3 and the driven wheels 4 and used for loading large-size glass substrates, and a driving mechanism for driving the transmission chains 5 to move synchronously. The plurality of conveyor chains 5 are arranged in parallel, and the conveyor chains 5 connected to the same driving conveyor shaft tube 1 are symmetrically arranged. The diameter of the driving wheel 3 fixed by the driving transmission shaft tube 1 positioned at the outer side is smaller than the diameter of the driving wheel 3 fixed by the driving transmission shaft tube 1 positioned at the inner side, the height difference between two adjacent transmission chains 5 is larger than the thickness of the large-size glass substrate, and the distance between the two driving wheels 3 fixed by the driving transmission shaft tube 1 positioned at the outer side is smaller than the distance between the two driving wheels 3 fixed by the driving transmission shaft tube 1 positioned at the inner side. In addition, in this embodiment, a mechanical arm (not labeled in the figures) for grabbing and transporting the large-sized glass substrate is further provided, and the mechanical arm is the prior art and is not described herein again. Namely, a plurality of conveying chains 5 are arranged in a certain staggered manner, namely, the conveying chains 5 at different height positions can respectively place a large-size glass substrate, a driving mechanism is used for driving a plurality of large-size glass substrates to move synchronously, the plurality of large-size glass substrates are relatively static, when the large-size glass substrate at the outermost side passes through an ion implantation area, the large-size glass substrate is implanted with ions, then the large-size glass substrate at the outermost side is transported to the innermost side through a mechanical arm, and the large-size glass substrate can be rotated by a certain angle during transportation, so that the large-size glass is conveniently moved basically, in addition, when the large-size glass substrate is transported, the conveying chains 5 can be driven to move back, thereby the next large-size glass substrate is conveniently implanted with ions, a low vacuum sampling chamber is inefficiently opened, repeated vacuum pumping is not needed, and the ion implantation efficiency of the large-size glass substrate is improved, and energy is saved.
In this embodiment, a base 6 for a large-sized glass substrate device is disposed between two symmetrically disposed conveyor chains 5, and the plurality of base 6 are located on the same plane, that is, the base 6 is fixed between the two symmetrically disposed conveyor chains 5, so that the plurality of base 6 are arranged at intervals. Each base 6 may be further provided with an electric chuck 7 for holding and fixing a large-sized glass substrate. When the device is used, a large-size glass substrate is placed on the base station 6 in advance, the large-size glass substrate is fixed through the electric clamping jaw 7, the position of the large-size glass substrate is accurately fixed, and the large-size glass substrate can be accurately implanted with ions.
The linear transporter is further provided with an incoming sensor 8 for the base 6 entering the ion implantation zone, and an outgoing sensor 9 for sensing the ion implantation zone of the base 6. The incoming sensor 8 and the outgoing sensor 9 are respectively disposed at two ends of the ion implantation region, and the incoming sensor 8 and the outgoing sensor 9 may be infrared sensors, etc., which are conventional technologies. When the ion implantation device is used, after the conveying chain 5 drives the large-size glass substrate to move to the position of an ion implantation area and the large-size glass substrate is sensed by the incoming sensor 8, the control computer in the device controls the corresponding ion implanter to prepare, and when the outgoing sensor 9 senses that the front end of the base station 6 leaves, the control computer controls the ion implanter to implant ions, so that the purpose of implanting ions into the large-size glass substrate is achieved, and high-precision ion implantation is achieved.
The driving mechanism comprises a plurality of driving transmission shaft tubes (1) and a rotating servo motor (10), the servo motor (10) and the corresponding driving transmission shaft tubes (1) are in chain wheel transmission, the radius of a driving gear fixed by the driving transmission shaft tubes (1) is reduced from outside to inside in sequence, and the driving transmission shaft tubes (1) are controlled to rotate respectively through the servo motors (10), so that the linear speed between the plurality of chain wheels is ensured to be consistent, a plurality of base stations (6) are relatively static, and the base stations (6) are ensured to be moved in an overlapped state.
Example 2, the difference from the example is: as shown in fig. 3, the driving mechanism includes a connecting block 11 fixed to the plurality of conveyor chains 5, and a pushing structure for driving the connecting block 11 to reciprocate, and a portion of the conveyor chain 5 away from the large-size glass substrate is fixedly connected to the connecting block 11. The pushing structure comprises a lead screw nut 13 arranged on the connecting block 11, a lead screw 12 in threaded connection with the lead screw nut 13, and a driving motor 14 for driving the lead screw 12 to rotate, wherein the length direction of the lead screw 12 is parallel to the moving direction of the conveying chain 5. That is, the driving motor 14 drives the screw rod 12 to rotate, the screw rod 12 drives the screw rod nut 13 and the connecting block 11 to move, and the connecting block 11 drives the plurality of conveying chains 5 to move synchronously, so that the moving speeds of the conveying chains 5 are kept consistent, the plurality of base stations 6 are relatively static, and the plurality of base stations 6 are ensured to move in an overlapped state.
In this document, the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "vertical", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the purpose of clarity and convenience of description of the technical solutions, and thus, should not be construed as limiting the present invention.
As used herein, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, including not only those elements listed, but also other elements not expressly listed.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are given by way of illustration of the principles of the present invention, and that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (8)
1. A multi-sheet large-size glass substrate ion implantation linear conveying device is characterized in that: including a plurality of initiative conveying central siphon (1) that are the nested setting in proper order, a plurality of driven conveying central siphon (2) that are the nested setting in proper order, a plurality of action wheels (3) that are fixed in the both ends position of initiative conveying central siphon (1) respectively, a plurality of follow driving wheel (4) that are fixed in driven conveying central siphon (2) respectively, set up in corresponding action wheel (3) and follow driving wheel (4) between and be used for loading transfer chain (5) of jumbo size glass substrate, drive mechanism of driving a plurality of transfer chain (5) synchronous motion, a plurality of transfer chain (5) are parallel arrangement, action wheel (3) diameter that initiative conveying central siphon (1) that is located the outside was fixed is greater than action wheel (3) diameter that initiative conveying central siphon (1) that is located the inboard was fixed, and the difference in height is greater than jumbo size glass substrate thickness between two adjacent transfer chain (5), the interval is less than and is located the inboard between two action wheels (3) that initiative conveying central siphon (1) that the outside is fixed The distance between two driving wheels (3) fixed on the driving transmission shaft tube (1).
2. The apparatus of claim 1, wherein the linear ion implantation conveyor comprises: and a mechanical arm for grabbing and carrying the large-size glass substrate is arranged in the multi-sheet large-size glass substrate ion implantation linear conveying device.
3. The apparatus of claim 1, wherein the linear ion implantation conveyor comprises: base stations (6) for large-size glass substrate devices are arranged between the two symmetrically arranged conveying chains (5), and the base stations (6) are located on the same plane.
4. The apparatus of claim 3, wherein the linear conveyor comprises: the base station (6) is provided with an electric clamping jaw (7) for clamping and fixing the large-size glass substrate.
5. The apparatus of claim 4, wherein the linear ion implantation conveyor comprises: the multi-sheet large-size glass substrate ion implantation linear conveying device is provided with an incoming sensor (8) used for sensing that the base station (6) enters an ion implantation area and an outgoing sensor (9) used for sensing that the front end of the base station (6) leaves the ion implantation area.
6. The apparatus of claim 1, wherein the linear ion implantation conveyor comprises: the driving mechanism comprises a plurality of servo motors (10) which respectively drive the corresponding driving transmission shaft tubes (1) to rotate.
7. The apparatus of claim 1, wherein the linear ion implantation conveyor comprises: the driving mechanism comprises a connecting block (11) fixed with a plurality of conveying chains (5) and a pushing structure for driving the connecting block (11) to move in a reciprocating mode, and the part, far away from one side of the large-size glass substrate, of each conveying chain (5) is fixedly connected to the connecting block (11).
8. The apparatus of claim 5, wherein the linear ion implantation conveyor comprises: the pushing structure comprises a lead screw nut (13) arranged on the connecting block (11), a lead screw (12) in threaded connection with the lead screw nut (13), and a driving motor (14) for driving the lead screw (12) to rotate, wherein the length direction of the lead screw (12) is parallel to the moving direction of the conveying chain (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210485796.9A CN114906617B (en) | 2022-05-06 | 2022-05-06 | Ion implantation linear conveying device for multiple large-size glass substrates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210485796.9A CN114906617B (en) | 2022-05-06 | 2022-05-06 | Ion implantation linear conveying device for multiple large-size glass substrates |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114906617A true CN114906617A (en) | 2022-08-16 |
| CN114906617B CN114906617B (en) | 2024-03-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210485796.9A Active CN114906617B (en) | 2022-05-06 | 2022-05-06 | Ion implantation linear conveying device for multiple large-size glass substrates |
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| CN212874427U (en) * | 2020-10-12 | 2021-04-02 | 锐捷芯盛（天津）电子科技有限公司 | Silicon wafer revolution disc of ion implanter |
| CN214778081U (en) * | 2021-04-21 | 2021-11-19 | 威海广泰空港设备股份有限公司 | Pipeline transportation container |
| CN216377928U (en) * | 2021-11-18 | 2022-04-26 | 秦皇岛铭晶源安全技术玻璃有限公司 | Super thick glass plate cutting machine convenient to piece from top to bottom |
-
2022
- 2022-05-06 CN CN202210485796.9A patent/CN114906617B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006310336A (en) * | 2005-04-26 | 2006-11-09 | Central Glass Co Ltd | Apparatus for adjusting position of box-like container for housing glass board |
| JP2007076810A (en) * | 2005-09-14 | 2007-03-29 | Matsushita Electric Ind Co Ltd | Conveyance method for plasma display panel |
| US20070132178A1 (en) * | 2005-12-14 | 2007-06-14 | Pitney Bowes Incorporated | Transport and alignment system |
| CN101093767A (en) * | 2006-06-20 | 2007-12-26 | Lg电子株式会社 | Plasma display apparatus |
| CN103283011A (en) * | 2011-04-11 | 2013-09-04 | 株式会社爱发科 | Deposition apparatus |
| CN211652600U (en) * | 2020-02-28 | 2020-10-09 | 厦门福信光电集成有限公司 | Large-size LCD glass substrate multi-vision defect AOI inspection machine |
| CN212874427U (en) * | 2020-10-12 | 2021-04-02 | 锐捷芯盛（天津）电子科技有限公司 | Silicon wafer revolution disc of ion implanter |
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|---|---|
| CN114906617B (en) | 2024-03-12 |
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