CN114905371B - Flexible device for processing side surface of rectangular optical element and processing method - Google Patents

Flexible device for processing side surface of rectangular optical element and processing method Download PDF

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Publication number
CN114905371B
CN114905371B CN202210627907.5A CN202210627907A CN114905371B CN 114905371 B CN114905371 B CN 114905371B CN 202210627907 A CN202210627907 A CN 202210627907A CN 114905371 B CN114905371 B CN 114905371B
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China
Prior art keywords
processed
optical element
rectangular optical
rectangular
processing
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CN114905371A (en
Inventor
顿爱欢
侯瑞
嵇文超
曹俊
杨扬
刘斌
徐学科
吴福林
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005Blocking means, chucks or the like; Alignment devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

A flexible device for processing the side surface of rectangular optical element is composed of flexible fixture and high-precision fixture seat. The processing method comprises the steps of clamping a rectangular optical element to be processed, rough polishing, fine polishing and corresponding measurement. The invention is suitable for processing rectangular sheet-like optical elements. The one-time clamping of rough polishing and fine polishing of the element is realized, and the processing efficiency and precision are effectively ensured; double-station simultaneous processing greatly shortens the processing period; the flexible clamp can realize quick mold changing according to the wedge angle of the element to be processed; the precise marble and the accompanying and polishing sheets are adopted, and the accompanying and polishing sheets are the same as the rectangular optical element to be processed in material, so that the stability of the processing process is effectively ensured. The invention is suitable for optical polishing of rectangular sheet optical elements with high efficiency, stability, high precision and low cost, and is especially suitable for rough polishing and fine polishing of the side surfaces or small planes of the optical elements with a certain wedge angle.

Description

Flexible device for processing side surface of rectangular optical element and processing method
Technical Field
The invention relates to optical element processing, in particular to a flexible device for processing a side surface of a rectangular optical element and a processing method.
Background
The optical element has the characteristics of fragile material, various shapes, precise processing and the like, and has high requirements on optical processing. In particular, for rectangular sheet-like elements with wedge angles, which have a high aspect ratio, large dimensions, facets, there are a number of difficulties in processing: the rough grinding and the fine grinding cannot be considered, and the element is clamped for many times, so that the machining precision is poor; the sheet-shaped element with the wedge angle is difficult to fix, the element is swayed in the machining process due to slight carelessness, and the machining quality is seriously affected; the existing clamp is poor in stability, and the clamp is expanded or corroded under the influence of a processing environment; rough grinding to fine grinding, the elements are repeatedly disassembled and assembled, resulting in low processing efficiency and high cost.
Disclosure of Invention
The invention provides a flexible device and a processing method for processing the side surface of a rectangular optical element, which are suitable for the rectangular sheet-shaped optical element to realize the optical polishing of the rectangular sheet-shaped optical element with high efficiency, stability, high precision and low cost, and are particularly suitable for rough polishing and fine polishing processing of the side surface or the small plane of the optical element with a certain wedge angle.
The invention is realized by the following technical scheme:
the flexible device for processing the side surface of the rectangular optical element is characterized by comprising a flexible clamp and a clamp seat, wherein the flexible clamp comprises a back plate, a back plate seat, a reference plate seat, a hand wheel, a pressing plate, a counter-force spring, a threaded ball head rod, a self-lubricating nut, a ball head cover plate, a conical seat and a clamping plate, and the reference plate is arranged on the reference plate seat; the backboard is arranged on the backboard seat; the self-lubricating nut and the threaded ball head rod are matched and mounted on the back plate; the counterforce spring is sleeved outside the threaded ball head rod and is arranged between the back plate and the hand wheel after being compressed; the ball head of the threaded ball head rod is arranged in the conical groove of the conical seat and is covered by the ball head cover plate; the conical seat is arranged on the clamping plate; the fixture seat is composed of more than 3 lifting rings, a marble and a accompanying polished wafer; the more than 3 lifting rings are uniformly distributed on the periphery of the top surface of the marble; the accompanying throwing piece is attached to the bottom surface of the marble;
the precise marble is provided with more than two rectangular grooves with upper and lower end surfaces penetrating completely, the size of the rectangular grooves is consistent with that of a rectangular optical element to be processed, and the precise marble is used for installing the rectangular optical element to be processed;
the reference plane of the reference plate, namely the angle of the surface closely contacted with the rectangular optical element and the angle of the wedge angle theta of the rectangular optical element are kept the same; the clamping surface of the clamping plate is parallel to the reference surface of the reference plate, namely, the upper surface angle of the clamping plate and the wedge angle theta of the rectangular optical element are complementary angles.
The material of the accompanying and polishing sheet is the same as that of the rectangular optical element to be processed.
The method for processing the side surface of the rectangular optical element by using the flexible device for processing the side surface of the rectangular optical element comprises the following steps:
1) Clamping a rectangular optical element to be processed: placing the flexible device for processing the side surface of the rectangular optical element to be processed on a workbench, wherein the rectangular optical element to be processed comprises an upper surface, a lower surface and more than one side surface or small plane to be processed, inserting one end of one side surface or small plane to be processed of the rectangular optical element to be processed into the rectangular groove, abutting the lower surface of the rectangular optical element to be processed against the reference surface of the reference plate, contacting the side surface or small plane to be processed on the workbench, slowly rotating the hand wheel, clamping the contact surface of the clamping plate with the upper surface of the rectangular optical element to be processed to achieve a specified pretightening force, and enabling the friction force between the contact surface of the clamping plate and the upper surface of the rectangular optical element to be processed, and the friction force between the reference surface of the reference plate and the lower surface of the rectangular optical element to be processed to be greater than the gravity of the rectangular optical element to be processed, completing the clamping of another rectangular optical element to be processed, and then completing the clamping of the rectangular optical element to be processed, and clamping the rectangular optical element to be processed;
2) Rough polishing: lifting the device to be processed onto a rough polishing table by utilizing a lifting hook of a lifting ring device, starting rough polishing of the rectangular optical element to be processed according to the process, measuring the surface shape precision of the rectangular optical element by using a stripe interferometer until the rough polishing requirement is met, and finishing rough polishing;
3) Fine polishing: lifting the device to be processed after rough polishing to a fine polishing table by utilizing a lifting hook of a lifting ring device, starting fine polishing of the rectangular optical element to be processed according to the process, measuring the surface shape precision of the rectangular optical element by using a digital interferometer until the fine polishing requirement is met, and finishing the processing of the side surface or the small plane to be processed;
4) If the rectangular optical element to be processed has a side or a facet to be processed, entering the next step; if all sides or facets of the rectangular optical element to be processed have been processed, step 6 is entered
5) Firstly, taking out the rectangular optical element to be processed from the rectangular groove, and returning to the step 1);
6) And taking the rectangular optical element to be processed out of the flexible device for processing the side surface of the rectangular optical element to be processed, and finishing the processing of the rectangular optical element to be processed.
Compared with the prior art, the invention has the following technical effects:
the invention is suitable for precisely polishing rectangular flaky optical elements with a certain wedge angle, realizes the one-time clamping of rough polishing and precise polishing of the elements, and effectively ensures the efficiency and precision of the processing;
the invention processes at the same time at multiple stations, thus greatly shortening the processing period; the flexible clamp can realize quick mold change according to the wedge angle of the element to be processed: the standard plate with the same wedge angle with the element to be processed and the clamping plates with complementary angles are replaced, so that modularization and flexible model change are realized.
The invention adopts precise marble and float glass to accompany the polishing sheet, thereby effectively ensuring the stability of the processing process.
The invention is suitable for optical polishing of rectangular sheet optical elements with high efficiency, stability, high precision and low cost, and is especially suitable for rough polishing and fine polishing of the side surfaces or small planes of the optical elements with a certain wedge angle.
Drawings
FIG. 1 is a schematic illustration of the general structure of an embodiment of a flexible device for side processing of rectangular optical elements of the present invention;
fig. 2 is a schematic perspective view of a set of flexible jigs 1 according to an embodiment of the present invention;
FIG. 3 is a cross-sectional view of a set of flexible fixtures 1 according to an embodiment of the present invention;
fig. 4 is a schematic perspective view of the high precision clamp seat 2 of the present invention;
FIG. 5 is a front view of a rectangular optical element 20 as installed during processing in accordance with an embodiment of the present invention;
fig. 6 is a cross-sectional view of the rectangular optical element 20 after installation during processing in accordance with an embodiment of the present invention.
Detailed Description
The invention is further illustrated in the following examples and figures, which should not be taken to limit the scope of the invention.
Examples
Referring to fig. 1, 2, 3 and 4, it can be seen that the flexible device for processing the side surface of the rectangular optical element of the present invention is composed of two sets of flexible clamps 1 and a circular clamp base 2, the flexible clamp 1 is composed of a back plate 3, a back plate base 4, a reference plate 5, a reference plate base 6, a hand wheel 7, a pressing plate 8, a counter spring 9, a threaded ball rod 10, a self-lubricating nut 11, a ball cover plate 12, a conical base 13 and a clamping plate 14, and the reference plate 5 is mounted on the reference plate base 6; the backboard 3 is arranged on the backboard seat 4; the self-lubricating nut 11 and the threaded ball rod 10 are matched and mounted on the back plate 3; the counterforce spring 9 is sleeved outside the threaded ball rod 10 and is arranged between the back plate 3 and the hand wheel 7 after being compressed; the ball head of the threaded ball head rod 10 is arranged in a conical groove of the conical seat 13 and is covered by the ball head cover plate 12; the conical seat 13 is arranged on the clamping plate 14; the fixture seat 2 consists of 4 lifting rings 15, a round marble 16 and a round accompanying and throwing piece 17; the 4 lifting rings 15 are uniformly distributed and installed around the top surface of the precise marble 16; the accompanying and throwing piece 17 is attached to the bottom surface of the marble 16;
the precise marble 16 is provided with two rectangular grooves 18 with upper and lower end surfaces penetrating completely, the size of the rectangular grooves 18 is consistent with that of a rectangular optical element 20 to be processed, and the precise marble is used for installing the rectangular optical element 20 to be processed;
the reference surface 51 of the reference plate 5, i.e., the angle of the surface in close contact with the rectangular optical element and the angle of the wedge angle of the rectangular optical element 20 remain the same; the clamping surface of the clamping plate 14 is parallel to the reference surface 51 of the reference plate 5, i.e. the upper surface angle of the clamping plate 14 and the wedge angle θ of the rectangular optical element 20 are complementary.
The material of the accompanying and polishing sheet 17 is the same as that of the rectangular optical element 20 to be processed.
Referring to fig. 5 and 6, a method for processing a side of a rectangular optical element using the flexible device embodiment for processing a side of a rectangular optical element includes the following steps:
1) Clamping the rectangular optical element 20 to be processed: placing the flexible device for side processing of the rectangular optical element to be processed on a workbench, wherein the rectangular optical element to be processed 20 comprises an upper surface 201, a lower surface 202 and more than one side or small plane 203 to be processed, inserting one end of one side or small plane 203 to be processed of the rectangular optical element to be processed 20 into the rectangular groove 18, abutting the lower surface 202 of the rectangular optical element to be processed 20 against the datum plane 51 of the datum plate 5, contacting the side or small plane to be processed on the workbench, slowly rotating the hand wheel 7, clamping the contact surface 141 of the clamping plate 14 with the upper surface 201 of the rectangular optical element to be processed 20 to achieve a specified pretightening force, enabling the friction force between the contact surface 141 of the clamping plate 14 and the upper surface 201 of the rectangular optical element to be processed, the friction force between the datum plane 51 of the datum plate 5 and the lower surface 202 of the rectangular optical element to be processed to be greater than that of the rectangular optical element to be processed 20 to be processed to be greater than that of the rectangular optical element to be processed, and installing the rectangular optical element to be processed 20, and installing the rectangular optical element to be processed;
2) Rough polishing: lifting the device to be processed onto a rough polishing table by utilizing a lifting ring 15 hooked by a lifting ring device, starting rough polishing of the rectangular optical element 20 to be processed according to the process, measuring the surface shape precision of the rectangular optical element by a stripe interferometer until the rough polishing requirement is met, and finishing rough polishing;
3) Fine polishing: lifting the device to be processed after rough polishing to a fine polishing table by utilizing a lifting hook 15 of a lifting ring device, starting fine polishing of the rectangular optical element 20 to be processed according to the process, measuring the surface shape precision of the rectangular optical element by a digital interferometer until the fine polishing requirement is met, and finishing the processing of the side surface or the small plane to be processed;
4) If the rectangular optical element 20 to be processed has a side or facet to be processed, then go to the next step; if all sides or facets of the rectangular optical element 20 to be processed have been processed, step 6 is entered
5) Firstly, taking the rectangular optical element 20 to be processed out of the rectangular groove 18, and returning to the step 1);
6) And taking the rectangular optical element 20 to be processed out of the flexible device for processing the side surface of the rectangular optical element to be processed, and finishing the processing of the rectangular optical element 20 to be processed.
Experiments show that the invention is suitable for precisely polishing rectangular flaky optical elements with a certain wedge angle, realizes the one-time clamping of rough polishing and precise polishing of the elements, and effectively ensures the efficiency and precision of the processing;
the invention processes at the same time at multiple stations, thus greatly shortening the processing period; the flexible clamp can realize quick mold change according to the wedge angle of the element to be processed: the standard plate with the same wedge angle with the element to be processed and the clamping plates with complementary angles are replaced, so that modularization and flexible model change are realized.
The invention adopts precise marble and float glass to accompany the polishing sheet, thereby effectively ensuring the stability of the processing process.
The invention is suitable for optical polishing of rectangular sheet optical elements with high efficiency, stability, high precision and low cost, and is especially suitable for rough polishing and fine polishing of the side surfaces or small planes of the optical elements with a certain wedge angle.
The foregoing embodiments may be partially modified in numerous ways by those skilled in the art without departing from the principles and spirit of the invention, the scope of which is defined in the claims and not by the foregoing embodiments, and all such implementations are within the scope of the invention.

Claims (3)

1. The flexible device for processing the side surface of the rectangular optical element is characterized by comprising a flexible clamp (1) and a clamp seat (2), wherein the flexible clamp (1) comprises a back plate (3), a back plate seat (4), a reference plate (5), a reference plate seat (6), a hand wheel (7), a pressing plate (8), a counter spring (9), a threaded ball rod (10), a self-lubricating nut (11), a ball cover plate (12), a conical seat (13) and a clamping plate (14), and the reference plate (5) is arranged on the reference plate seat (6); the backboard (3) is arranged on the backboard seat (4); the self-lubricating nut (11) is matched with the threaded ball head rod (10) and is arranged on the back plate (3); the counterforce spring (9) is sleeved outside the threaded ball head rod (10), and is arranged between the back plate (3) and the hand wheel (7) after being compressed; the ball head of the threaded ball head rod (10) is arranged in a conical groove of the conical seat (13) and is covered by the ball head cover plate (12); the conical seat (13) is arranged on the clamping plate (14); the fixture seat (2) is composed of more than 3 lifting rings (15), a marble (16) and a accompanying throwing piece (17); the more than 3 lifting rings (15) are uniformly distributed around the top surface of the marble (16); the accompanying throwing piece (17) is attached to the bottom surface of the marble (16);
the marble (16) is provided with more than two rectangular grooves (18) with upper and lower end surfaces penetrating completely, the size of the rectangular grooves (18) is consistent with that of a rectangular optical element (20) to be processed, and the rectangular optical element (20) to be processed is installed;
the reference plane (51) of the reference plate (5), i.e. the angle of the surface in close contact with the rectangular optical element, and the angle of the wedge angle θ of the rectangular optical element (20) remain the same; the clamping surface of the clamping plate (14) is parallel to the reference surface (51) of the reference plate (5), namely the upper surface angle of the clamping plate (14) and the wedge angle theta of the rectangular optical element (20) are complementary angles.
2. A flexible device for side processing of rectangular optical elements according to claim 1, characterized in that the material of the co-polished piece (17) is the same as the material of the rectangular optical element (20) to be processed.
3. A method of side-processing a rectangular optical element using the flexible device for side-processing a rectangular optical element according to claim 1 or 2, characterized in that the processing method comprises the steps of:
1) Clamping a rectangular optical element (20) to be processed: placing the flexible device for side processing of the rectangular optical element to be processed on a workbench, wherein the rectangular optical element to be processed (20) comprises an upper surface (201), a lower surface (202) and more than one side or facet (203) to be processed, inserting one end of one side or facet (203) to be processed of the rectangular optical element to be processed (20) into the rectangular groove (18), abutting the lower surface (202) of the rectangular optical element to be processed (20) against the datum plane (51) of the datum plate (5), contacting the side or facet to be processed on the workbench, slowly rotating the hand wheel (7), clamping the contact surface (141) of the clamping plate (14) with the upper surface (201) of the rectangular optical element to be processed (20) to achieve a specified pre-tightening force, clamping the contact surface (141) of the clamping plate (14) with the upper surface (201) of the rectangular optical element to be processed, clamping the same optical element to be processed (20) with the datum plane (51) of the rectangular optical element to be processed, and clamping the same optical element to be processed (20) with the datum plane (20) of the rectangular optical element to be processed, and clamping the optical element to be processed (20) with a large friction force, until clamping of a plurality of rectangular optical elements (20) to be processed is completed, forming a device to be processed;
2) Rough polishing: lifting the device to be processed onto a rough polishing table by utilizing a lifting ring (15) hooked by a lifting ring device, starting rough polishing of the rectangular optical element (20) to be processed according to the process, measuring the surface shape precision of the rectangular optical element through a stripe interferometer until the rough polishing requirement is met, and finishing rough polishing;
3) Fine polishing: lifting the device to be processed after rough polishing to a fine polishing table by utilizing a lifting hook of a lifting ring device (15), starting fine polishing of a rectangular optical element (20) to be processed according to the process, measuring the surface shape precision of the rectangular optical element by a digital interferometer until the fine polishing requirement is met, and finishing the processing of the side surface or the small plane to be processed;
4) If the rectangular optical element (20) to be processed has a side or facet to be processed, proceeding to the next step; if all sides or facets of the rectangular optical element (20) to be processed have been processed, step 6 is entered
5) Firstly, taking out a rectangular optical element (20) to be processed from the rectangular groove (18), and returning to the step 1);
6) And taking the rectangular optical element (20) to be processed out of the flexible device for processing the side surface of the rectangular optical element to be processed, and finishing the processing of the rectangular optical element (20) to be processed.
CN202210627907.5A 2022-05-26 2022-05-26 Flexible device for processing side surface of rectangular optical element and processing method Active CN114905371B (en)

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CN202210627907.5A CN114905371B (en) 2022-05-26 2022-05-26 Flexible device for processing side surface of rectangular optical element and processing method

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CN202210627907.5A CN114905371B (en) 2022-05-26 2022-05-26 Flexible device for processing side surface of rectangular optical element and processing method

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CN114905371B true CN114905371B (en) 2024-04-12

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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828069A1 (en) * 1987-09-07 1989-03-30 Ernst Hans Hellmut Self-sensing clamping device
DE10000330A1 (en) * 2000-01-07 2001-07-19 Hapro Holzbearbeitungs Werkzeu Adjustable cutter plate clamping in milling cutter for timber processing uses wedge body to clamp cutter plate between support plate and cutter head support surface
US6855036B1 (en) * 2003-08-05 2005-02-15 Corning Incorporated Part-holding fixture for grinding wedged optical flats
CN102233545A (en) * 2010-04-20 2011-11-09 宝山钢铁股份有限公司 Fixture for processing continuous curved surface
CN102672605A (en) * 2012-05-28 2012-09-19 镇江市铸造阀门厂有限公司 General accurate grinding clamp with adjustable sluice valve flashboard
CN202640138U (en) * 2012-05-28 2013-01-02 镇江市铸造阀门厂有限公司 Adjustable and general accurate grinding fixture for gate valve flashboard
CN104330314A (en) * 2014-11-24 2015-02-04 重庆大学 Clamping mechanism for device for testing high-temperature direct tensile strength of ultrahigh-temperature ceramics
CN104526553A (en) * 2015-01-12 2015-04-22 成都精密光学工程研究中心 Clamping device for large-caliber optical element edge polishing and polishing method for large-caliber optical element edges
CN109571186A (en) * 2019-01-02 2019-04-05 中国科学院上海光学精密机械研究所 Batten member end face fixer for machining
CN208880492U (en) * 2018-09-19 2019-05-21 南京格奥光电科技有限公司 Optical articles milling clamping device
CN111650710A (en) * 2020-06-24 2020-09-11 嘉兴旭锐电子科技有限公司 Fine adjustment structure using wedge, pressing member thereof, and optical component using the fine adjustment structure

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828069A1 (en) * 1987-09-07 1989-03-30 Ernst Hans Hellmut Self-sensing clamping device
DE10000330A1 (en) * 2000-01-07 2001-07-19 Hapro Holzbearbeitungs Werkzeu Adjustable cutter plate clamping in milling cutter for timber processing uses wedge body to clamp cutter plate between support plate and cutter head support surface
US6855036B1 (en) * 2003-08-05 2005-02-15 Corning Incorporated Part-holding fixture for grinding wedged optical flats
CN102233545A (en) * 2010-04-20 2011-11-09 宝山钢铁股份有限公司 Fixture for processing continuous curved surface
CN102672605A (en) * 2012-05-28 2012-09-19 镇江市铸造阀门厂有限公司 General accurate grinding clamp with adjustable sluice valve flashboard
CN202640138U (en) * 2012-05-28 2013-01-02 镇江市铸造阀门厂有限公司 Adjustable and general accurate grinding fixture for gate valve flashboard
CN104330314A (en) * 2014-11-24 2015-02-04 重庆大学 Clamping mechanism for device for testing high-temperature direct tensile strength of ultrahigh-temperature ceramics
CN104526553A (en) * 2015-01-12 2015-04-22 成都精密光学工程研究中心 Clamping device for large-caliber optical element edge polishing and polishing method for large-caliber optical element edges
CN208880492U (en) * 2018-09-19 2019-05-21 南京格奥光电科技有限公司 Optical articles milling clamping device
CN109571186A (en) * 2019-01-02 2019-04-05 中国科学院上海光学精密机械研究所 Batten member end face fixer for machining
CN111650710A (en) * 2020-06-24 2020-09-11 嘉兴旭锐电子科技有限公司 Fine adjustment structure using wedge, pressing member thereof, and optical component using the fine adjustment structure

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