CN114905371A - Flexible device and method for processing side surface of rectangular optical element - Google Patents

Flexible device and method for processing side surface of rectangular optical element Download PDF

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Publication number
CN114905371A
CN114905371A CN202210627907.5A CN202210627907A CN114905371A CN 114905371 A CN114905371 A CN 114905371A CN 202210627907 A CN202210627907 A CN 202210627907A CN 114905371 A CN114905371 A CN 114905371A
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China
Prior art keywords
optical element
processed
rectangular optical
rectangular
polishing
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CN202210627907.5A
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Chinese (zh)
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CN114905371B (en
Inventor
顿爱欢
侯瑞
嵇文超
曹俊
杨扬
刘斌
徐学科
吴福林
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005Blocking means, chucks or the like; Alignment devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

A flexible device for processing the side surface of a rectangular optical element is composed of a flexible clamp and a high-precision clamp seat. The processing method comprises the steps of clamping, rough polishing, fine polishing and corresponding measurement of the rectangular optical element to be processed. The invention is suitable for processing the rectangular sheet-shaped optical element. The one-time clamping of rough polishing and fine polishing of the element is realized, and the processing efficiency and precision are effectively ensured; the double stations are processed simultaneously, so that the processing period is greatly shortened; the flexible clamp can realize rapid model change according to the wedge angle of the element to be processed; adopt accurate marble and accompany the throwing piece, accompany the throwing piece with treat that rectangular optical element's material is the same, effectively guaranteed the stability of course of working. The invention is suitable for the high-efficiency, stable, high-precision and low-cost optical polishing of rectangular sheet optical elements, and is particularly suitable for the rough polishing and the fine polishing of the side surfaces or the facets of the optical elements with certain wedge angles.

Description

Flexible device and method for processing side surface of rectangular optical element
Technical Field
The invention relates to optical element processing, in particular to a flexible device for processing the side surface of a rectangular optical element and a processing method.
Background
The optical element has the characteristics of fragile material, various shapes, precise processing and the like, and has high requirements on optical processing. Especially for rectangular sheet-like elements with high radial-to-thickness ratio, large size, small planes and wedge angles, the processing has many difficulties: rough grinding and accurate grinding cannot be both considered, and the machining precision is poor due to the fact that the elements are clamped for multiple times; the sheet element with the wedge angle is difficult to fix, which causes the element to shake in the processing process and seriously affects the processing quality; the existing clamp has poor stability, and the clamp is affected by the processing environment to expand or rust; rough grinding to accurate grinding, and elements are repeatedly disassembled and assembled, so that the machining efficiency is low and the cost is high.
Disclosure of Invention
The invention provides a flexible device and a processing method for processing the side surface of a rectangular optical element, aiming at the defects in the prior art, the device is suitable for realizing the high-efficiency, stable, high-precision and low-cost optical polishing and polishing of the rectangular sheet-shaped optical element by the rectangular sheet-shaped optical element, and is particularly suitable for the rough polishing and the fine polishing of the side surface or the facet of the optical element with a certain wedge angle.
The invention is realized by the following technical scheme:
a flexible device for processing the side surface of a rectangular optical element is characterized by comprising a flexible clamp and a clamp seat, wherein the flexible clamp comprises a back plate, a back plate seat, a reference plate seat, a hand wheel, a pressing plate, a reaction spring, a threaded ball head rod, a self-lubricating nut, a ball head cover plate, a conical seat and a clamping plate, and the reference plate is arranged on the reference plate seat; the back plate is arranged on the back plate seat; the self-lubricating nut is matched with the threaded ball head rod and is arranged on the back plate; the counterforce spring is sleeved outside the threaded ball head rod and is arranged between the back plate and the hand wheel after being compressed; the ball head of the threaded ball head rod is arranged in the conical groove of the conical seat and is covered by the ball head cover plate; the conical seat is arranged on the clamping plate; the clamp seat is composed of more than 3 hoisting rings, a marble and a polishing piece; the more than 3 hoisting rings are uniformly distributed and installed on the periphery of the top surface of the marble; the polishing assistant sheet is attached to the bottom surface of the marble;
the precision marble is provided with more than two rectangular grooves with upper and lower end surfaces completely penetrating through, the size of each rectangular groove is consistent with that of the rectangular optical element to be processed, and the rectangular grooves are used for mounting the rectangular optical element to be processed;
the angle of the reference plane of the reference plate, i.e., the plane in close contact with the rectangular optical element, and the angle of the wedge angle θ of the rectangular optical element remain the same; the clamping surface of the clamping plate is parallel to the reference surface of the reference plate, namely the angle of the upper surface of the clamping plate and the wedge angle 8 of the rectangular optical element are complementary angles with each other.
The material of the polishing assisting sheet is the same as that of the rectangular optical element to be processed.
The method for processing the side surface of the rectangular optical element by using the flexible device for processing the side surface of the rectangular optical element comprises the following steps:
1) clamping a rectangular optical element to be processed: placing the flexible device for processing the side surface of the rectangular optical element to be processed on a working table, wherein the rectangular optical element to be processed comprises an upper surface, a lower surface and more than one side surface or small plane to be processed, inserting one end of one side surface or small plane to be processed of the rectangular optical element to be processed into the rectangular groove, the lower surface of the rectangular optical element to be processed is close to the reference surface of the reference plate, the side surface or small plane to be processed is in contact with the working table, slowly rotating the hand wheel to enable the contact surface of the clamping plate and the upper surface of the rectangular optical element to be processed to be clamped and reach a specified pre-tightening force, and enabling the friction force between the contact surface of the clamping plate and the upper surface of the rectangular optical element to be processed and the friction force between the reference surface of the reference plate and the lower surface of the rectangular optical element to be processed to be larger than that of the rectangular optical element to be processed The device comprises a plurality of rectangular optical elements to be processed, a plurality of optical elements to be processed, and a plurality of optical elements to be processed;
2) rough polishing: hooking the hoisting ring by using a lifting hook of the hoisting ring device to hoist the device to be processed to the rough polishing table surface, starting rough polishing of the rectangular optical element to be processed according to the process, measuring the surface shape precision of the rectangular optical element by using a fringe interferometer until the rough polishing requirement is met, and finishing the rough polishing;
3) fine polishing: hooking the hoisting ring by using a lifting hook of the hoisting ring device to hoist the device to be processed after rough polishing to a finish polishing table surface, starting finish polishing of the rectangular optical element to be processed according to the process, measuring the surface shape precision of the rectangular optical element by using a digital interferometer until the finish polishing requirement is met, and finishing the processing of the side surface or the facet to be processed;
4) if the rectangular optical element to be processed has the side surface or the small plane to be processed, the next step is carried out; if all the side surfaces or small planes to be processed of the rectangular optical element to be processed are processed, the step 6)
5) Taking out the rectangular optical element to be processed from the rectangular groove, and returning to the step 1);
6) and taking the rectangular optical element to be processed out of the flexible device for processing the side surface of the rectangular optical element to be processed, and finishing the processing of the rectangular optical element to be processed.
Compared with the prior art, the invention has the following technical effects:
the invention is suitable for the precise polishing and processing of rectangular sheet optical elements with certain wedge angles, realizes the one-time clamping of rough polishing and precise polishing of the elements and effectively ensures the processing efficiency and precision;
the invention processes simultaneously in multiple stations, thus greatly shortening the processing period; the flexible clamp can realize rapid model change according to the wedge angle of an element to be processed: the standard plate with the same wedge angle as the element to be processed and the clamping plates with the same residual angles are replaced, so that modularization and flexible model change are achieved.
The invention adopts the precision marble and float glass polishing pieces, thereby effectively ensuring the stability of the processing process.
The invention is suitable for the high-efficiency, stable, high-precision and low-cost optical polishing of rectangular sheet optical elements, and is particularly suitable for the rough polishing and the fine polishing of the side surfaces or the facets of the optical elements with certain wedge angles.
Drawings
FIG. 1 is a schematic diagram of the general structure of an embodiment of a flexible device for side processing of rectangular optical elements according to the present invention;
FIG. 2 is a schematic perspective view of a set of flexible fixtures 1 according to an embodiment of the present invention;
FIG. 3 is a cross-sectional view of a set of flexible fixtures 1 according to an embodiment of the present invention;
FIG. 4 is a perspective view of the high precision fixture base 2 of the present invention;
FIG. 5 is a front view of a rectangular optical element 20 after installation during processing of an embodiment of the present invention;
FIG. 6 is a cross-sectional view of a rectangular optical element 20 after installation during processing according to an embodiment of the present invention.
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the scope of the present invention should not be limited thereto.
Examples
Referring to fig. 1, 2, 3 and 4, it can be seen that the flexible device for processing the side surface of the rectangular optical element of the present invention is composed of two sets of flexible fixtures 1 and a circular fixture seat 2, wherein the flexible fixtures 1 are composed of a back plate 3, a back plate seat 4, a reference plate 5, a reference plate seat 6, a hand wheel 7, a pressing plate 8, a counterforce spring 9, a threaded ball rod 10, a self-lubricating nut 11, a ball cover plate 12, a conical seat 13 and a clamping plate 14, and the reference plate 5 is installed on the reference plate seat 6; the back plate 3 is arranged on the back plate seat 4; the self-lubricating nut 11 is matched with the threaded ball-head rod 10 and is arranged on the back plate 3; the counterforce spring 9 is sleeved outside the threaded ball head rod 10 and is arranged between the back plate 3 and the hand wheel 7 after being compressed; the ball head of the threaded ball head rod 10 is arranged in the tapered groove of the tapered seat 13 and is covered by the ball head cover plate 12; the conical seat 13 is arranged on the clamping plate 14; the clamp seat 2 consists of 4 hoisting rings 15, a round marble 16 and a round polishing piece 17; the 4 hoisting rings 15 are uniformly distributed and arranged around the top surface of the precision marble 16; the polishing assisting sheet 17 is attached to the bottom surface of the marble 16;
the precision marble 16 is provided with two rectangular grooves 18 with upper and lower end surfaces completely penetrating, the size of the rectangular groove 18 is matched with that of a rectangular optical element 20 to be processed, and the rectangular optical element 20 to be processed is installed;
the angle of the reference plane 51 of the reference plate 5, i.e., the plane in close contact with the rectangular optical element, and the angle of the wedge angle of the rectangular optical element 20 remain the same; the clamping surface of the clamping plate 14 is parallel to the reference surface 51 of the reference plate 5, i.e. the upper surface angle of the clamping plate 14 and the wedge angle θ of the rectangular optical element 20 are complementary angles.
The material of the polishing piece 17 is the same as that of the rectangular optical element 20 to be processed.
Referring to fig. 5 and 6, the method for processing the side surface of the rectangular optical element by using the flexible device embodiment for processing the side surface of the rectangular optical element comprises the following steps:
1) clamping of the rectangular optical element 20 to be processed: placing the flexible device for processing the side surface of the rectangular optical element to be processed on a workbench surface, wherein the rectangular optical element to be processed 20 comprises an upper surface 201, a lower surface 202 and more than one side surface or small plane 203 to be processed, inserting one end of one side surface or small plane 203 to be processed of the rectangular optical element to be processed 20 into the rectangular groove 18, the lower surface 202 of the rectangular optical element to be processed 20 abuts against the reference surface 51 of the reference plate 5, contacting the side surface or small plane to be processed on the workbench surface, slowly rotating the hand wheel 7 to clamp the contact surface 141 of the clamping plate 14 and the upper surface 201 of the rectangular optical element to be processed 20 and reach a specified pre-tightening force, and causing the friction force between the contact surface 141 of the clamping plate 14 and the upper surface 201 of the rectangular optical element to be processed 20, The friction force between the reference surface 51 of the reference plate 5 and the lower surface 202 of the rectangular optical element 20 to be processed is greater than the gravity of the rectangular optical element 20 to be processed, so that the clamping of one rectangular optical element 20 to be processed is completed, and another rectangular optical element 20 to be processed is also installed to form a device to be processed;
2) rough polishing: hooking the hoisting ring 15 by using a lifting hook of the hoisting ring device to hoist the device to be processed to the rough polishing table surface, starting rough polishing of the rectangular optical element 20 to be processed according to the process, measuring the surface shape precision of the rectangular optical element by using a fringe interferometer until the rough polishing requirement is met, and finishing the rough polishing;
3) fine polishing: hooking the hoisting ring 15 by using a lifting hook of the hoisting ring device to hoist the device to be processed after rough polishing to a finish polishing table surface, starting finish polishing of the rectangular optical element 20 to be processed according to the process, measuring the surface shape precision of the rectangular optical element by using a digital interferometer until the finish polishing requirement is met, and finishing the processing of the side surface or the facet to be processed;
4) if the rectangular optical element 20 to be processed has a side or a facet to be processed, the next step is performed; if all the sides or facets to be processed of the rectangular optical element 20 to be processed are finished, proceed to step 6)
5) Taking out the rectangular optical element 20 to be processed from the rectangular groove 18, and returning to the step 1);
6) and taking the rectangular optical element 20 to be processed out of the flexible device for processing the side surface of the rectangular optical element to be processed, and finishing the processing of the rectangular optical element 20 to be processed.
Experiments show that the invention is suitable for precision polishing of rectangular sheet optical elements with certain wedge angles, realizes one-time clamping of rough polishing and precision polishing of the elements, and effectively ensures the efficiency and precision of processing;
the invention processes simultaneously in multiple stations, thus greatly shortening the processing period; the flexible clamp can realize rapid model change according to the wedge angle of an element to be processed: the standard plate with the same wedge angle as the element to be processed and the clamping plates with the same residual angles are replaced, so that modularization and flexible model change are achieved.
The invention adopts the precision marble and float glass polishing pieces, thereby effectively ensuring the stability of the processing process.
The invention is suitable for the high-efficiency, stable, high-precision and low-cost optical polishing of rectangular sheet optical elements, and is particularly suitable for the rough polishing and the fine polishing of the side surfaces or the facets of the optical elements with certain wedge angles.
The foregoing embodiments may be modified in many different ways by those skilled in the art without departing from the spirit and scope of the invention, which is defined by the appended claims and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims (3)

1. The flexible device for processing the side surface of the rectangular optical element is characterized by comprising a flexible clamp (1) and a clamp seat (2), wherein the flexible clamp (1) comprises a back plate (3), a back plate seat (4), a reference plate (5), a reference plate seat (6), a hand wheel (7), a pressing plate (8), a counter-force spring (9), a threaded ball head rod (10), a self-lubricating nut (11), a ball head cover plate (12), a conical seat (13) and a clamping plate (14), and the reference plate (5) is installed on the reference plate seat (6); the backboard (3) is arranged on the backboard seat (4); the self-lubricating nut (11) is matched with the threaded ball head rod (10) and is arranged on the back plate (3); the counterforce spring (9) is sleeved outside the threaded ball head rod (10) and is arranged between the back plate (3) and the hand wheel (7) after being compressed; the ball head of the threaded ball head rod (10) is arranged in a conical groove of the conical seat (13) and is covered by the ball head cover plate (12); the conical seat (13) is arranged on the clamping plate (14); the clamp seat (2) is composed of more than 3 hoisting rings (15), a marble (16) and a polishing piece (17); more than 3 hoisting rings (15) are uniformly arranged on the periphery of the top surface of the marble (16); the polishing sheets (17) are attached to the bottom surface of the marble (16);
the precision marble (16) is provided with more than two rectangular grooves (18) with upper and lower end surfaces completely penetrating, the size of each rectangular groove (18) is consistent with that of the rectangular optical element (20) to be processed, and the rectangular optical elements (20) to be processed are installed;
the angle of the reference plane (51) of the reference plate (5), i.e. the plane in close contact with the rectangular optical element, and the angle of the wedge angle theta of the rectangular optical element (20) remain the same; the clamping surface of the clamping plate (14) is parallel to the reference surface (51) of the reference plate (5), namely the upper surface angle of the clamping plate (14) and the wedge angle theta of the rectangular optical element (20) are complementary angles.
2. The flexible device for side processing of rectangular optical element according to claim 1, wherein the material of the polishing sheet (17) is the same as the material of the rectangular optical element (20) to be processed.
3. A method for processing a side surface of a rectangular optical element using a flexible device for processing a side surface of a rectangular optical element according to claim 1 or 2, the method comprising the steps of:
1) clamping of a rectangular optical element (20) to be processed: placing the flexible device for processing the side surface of the rectangular optical element to be processed on a working table, wherein the rectangular optical element (20) to be processed comprises an upper surface (201), a lower surface (202) and more than one side surface or small plane (203) to be processed, inserting one end of one side surface or small plane (203) to be processed of the rectangular optical element (20) to be processed into the rectangular groove (18), enabling the lower surface (202) of the rectangular optical element (20) to be processed to be close to a reference surface (51) of the reference plate (5), enabling the side surface or small plane to be processed to be in contact with the working table, slowly rotating the hand wheel (7), and enabling a contact surface (141) of the clamping plate (14) and the upper surface (201) of the rectangular optical element (20) to be processed to clamp and reach a specified pre-tightening force, the friction force between the contact surface (141) of the clamping plate (14) and the upper surface (201) of the rectangular optical element (20) to be processed, and the friction force between the reference surface (51) of the reference plate (5) and the lower surface (202) of the rectangular optical element (20) to be processed are all larger than the gravity of the rectangular optical element (20) to be processed, so that the rectangular optical element (20) to be processed is clamped, and then another rectangular optical element (20) to be processed is clamped in the same way until the clamping of a plurality of rectangular optical elements (20) to be processed is completed, and a device to be processed is formed;
2) rough polishing: hooking the hoisting ring (15) by using a hoisting hook of the hoisting ring device to hoist the device to be processed to the rough polishing table surface, starting rough polishing of the rectangular optical element (20) to be processed according to the process, measuring the surface shape precision of the rectangular optical element by a fringe interferometer until the rough polishing requirement is met, and finishing the rough polishing;
3) fine polishing: hooking the hoisting ring (15) by using a lifting hook of the hoisting ring device to hoist the to-be-processed device after rough polishing to a finish polishing table surface, starting finish polishing of a rectangular optical element (20) to be processed according to the process, measuring the surface shape precision of the rectangular optical element by a digital interferometer until the finish polishing requirement is met, and finishing the processing of the side surface or the facet to be processed;
4) if the rectangular optical element (20) to be processed has a side surface or a small plane to be processed, the next step is carried out; if all the sides or facets to be machined of the rectangular optical element (20) to be machined are finished, step 6)
5) Taking out the rectangular optical element (20) to be processed from the rectangular groove (18), and returning to the step 1);
6) and taking the rectangular optical element (20) to be processed out of the flexible device for processing the side surface of the rectangular optical element to be processed, and finishing the processing of the rectangular optical element (20) to be processed.
CN202210627907.5A 2022-05-26 2022-05-26 Flexible device for processing side surface of rectangular optical element and processing method Active CN114905371B (en)

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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828069A1 (en) * 1987-09-07 1989-03-30 Ernst Hans Hellmut Self-sensing clamping device
DE10000330A1 (en) * 2000-01-07 2001-07-19 Hapro Holzbearbeitungs Werkzeu Adjustable cutter plate clamping in milling cutter for timber processing uses wedge body to clamp cutter plate between support plate and cutter head support surface
US6855036B1 (en) * 2003-08-05 2005-02-15 Corning Incorporated Part-holding fixture for grinding wedged optical flats
CN102233545A (en) * 2010-04-20 2011-11-09 宝山钢铁股份有限公司 Fixture for processing continuous curved surface
CN102672605A (en) * 2012-05-28 2012-09-19 镇江市铸造阀门厂有限公司 General accurate grinding clamp with adjustable sluice valve flashboard
CN202640138U (en) * 2012-05-28 2013-01-02 镇江市铸造阀门厂有限公司 Adjustable and general accurate grinding fixture for gate valve flashboard
CN104330314A (en) * 2014-11-24 2015-02-04 重庆大学 Clamping mechanism for device for testing high-temperature direct tensile strength of ultrahigh-temperature ceramics
CN104526553A (en) * 2015-01-12 2015-04-22 成都精密光学工程研究中心 Clamping device for large-caliber optical element edge polishing and polishing method for large-caliber optical element edges
CN109571186A (en) * 2019-01-02 2019-04-05 中国科学院上海光学精密机械研究所 Batten member end face fixer for machining
CN208880492U (en) * 2018-09-19 2019-05-21 南京格奥光电科技有限公司 Optical articles milling clamping device
CN111650710A (en) * 2020-06-24 2020-09-11 嘉兴旭锐电子科技有限公司 Fine adjustment structure using wedge, pressing member thereof, and optical component using the fine adjustment structure

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828069A1 (en) * 1987-09-07 1989-03-30 Ernst Hans Hellmut Self-sensing clamping device
DE10000330A1 (en) * 2000-01-07 2001-07-19 Hapro Holzbearbeitungs Werkzeu Adjustable cutter plate clamping in milling cutter for timber processing uses wedge body to clamp cutter plate between support plate and cutter head support surface
US6855036B1 (en) * 2003-08-05 2005-02-15 Corning Incorporated Part-holding fixture for grinding wedged optical flats
CN102233545A (en) * 2010-04-20 2011-11-09 宝山钢铁股份有限公司 Fixture for processing continuous curved surface
CN102672605A (en) * 2012-05-28 2012-09-19 镇江市铸造阀门厂有限公司 General accurate grinding clamp with adjustable sluice valve flashboard
CN202640138U (en) * 2012-05-28 2013-01-02 镇江市铸造阀门厂有限公司 Adjustable and general accurate grinding fixture for gate valve flashboard
CN104330314A (en) * 2014-11-24 2015-02-04 重庆大学 Clamping mechanism for device for testing high-temperature direct tensile strength of ultrahigh-temperature ceramics
CN104526553A (en) * 2015-01-12 2015-04-22 成都精密光学工程研究中心 Clamping device for large-caliber optical element edge polishing and polishing method for large-caliber optical element edges
CN208880492U (en) * 2018-09-19 2019-05-21 南京格奥光电科技有限公司 Optical articles milling clamping device
CN109571186A (en) * 2019-01-02 2019-04-05 中国科学院上海光学精密机械研究所 Batten member end face fixer for machining
CN111650710A (en) * 2020-06-24 2020-09-11 嘉兴旭锐电子科技有限公司 Fine adjustment structure using wedge, pressing member thereof, and optical component using the fine adjustment structure

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