CN1148804C - Highly integrated chip-on-chip packaging - Google Patents
Highly integrated chip-on-chip packaging Download PDFInfo
- Publication number
- CN1148804C CN1148804C CNB991070917A CN99107091A CN1148804C CN 1148804 C CN1148804 C CN 1148804C CN B991070917 A CNB991070917 A CN B991070917A CN 99107091 A CN99107091 A CN 99107091A CN 1148804 C CN1148804 C CN 1148804C
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
- H01L2924/1533—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate
- H01L2924/15331—Connection portion the connection portion being formed on the die mounting surface of the substrate the connection portion being formed both on the die mounting surface of the substrate and outside the die mounting surface of the substrate being a ball array, e.g. BGA
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
Abstract
The advantages of the invention are realized by a chip-on-chip module having at least two fully functional chips, electrically connected together, and a chip-on-chip component connection/interconnection for electrically connecting the fully functional chips to external circuitry.
Description
The application relates to the U. S. application No.09/105477 that being entitled as of people such as two people's such as common pending application: Bertin U. S. application No.09/105382 that is entitled as " the microbend technology in the semiconductor package part " and Ference " changes chip interconnect on the chip of characteristic ".Relevant application is transferred the possession of in the assignee of record, thereby files an application simultaneously, is listed as reference herein.
Technical field
Present invention generally relates to semiconductor device, more particularly relate to Chip Packaging on the chip in the semiconductor device.
Background technology
In electronic development and encapsulation, great advance took place in nearest 50 years.Integrated circuit density has also continued to improve at a high speed.But before the eighties, the corresponding raising that is produced on the interconnection circuit density of the circuit outside in the chip does not catch up with the raising of integrated circuit density.Many new packaging technologies have appearred.A specific technology is called " chip assembly on the chip " technology.The present invention relates to the concrete technical field of chip assembly on the chip.
Under many situations, than the new substrate integrated circuit of design, can be quicker and make chip assembly on the chip cheaply.Chip assembly technology is owing to the raising of density shows advantage on the chip.Because the raising of density, install in signal velocity with other and to have obtained same improvement aspect inharmonic device total weight.The chip assembly structure is made up of the printed circuit board substrate that is directly bonded to a series of integrated circuit components usually on the present chip.
Also have many different technical fields, with how that the substrate that is bonded with chip assembly on the chip is relevant from the circuit that external electric is connected on the substrate.These technical fields comprise lead-in wire bonding, tape automated bonding (TAB), upside-down mounting TAB and flip-chip.Can find some examples in following United States Patent (USP): the U.S. Patent No. 5323060 of authorizing people such as Fogal in June, 1994 " has the multi-chip module that laminated chips distributes ", the U.S. Patent No. 5600541 of authorizing people such as B0ne in February, 1997 " has the vertical IC chip-stack by the separate chip carrier of medium carrier tape production ", authorize people's such as Korneld U.S. Patent No. 5495394 " the three-dimensional die encapsulation in the multi-chip module " in February, 1996, and the U.S. Patent No. 5399898 of authorizing people such as Rostoker March nineteen ninety-five " adopts the multi-chip semiconductor of flip chip tube core to distribute ".
Unfortunately, these technology are very expensive, and the constituent element of (that is removing and the replacement) packaging part of in most of the cases can't doing over again, thereby reduced rate of finished products and increased cost.The personalized design of chip size also is severely limited.At present, chip can carry out personalized design at wafer scale or package level.Because before encapsulation, can not the personalized design chip in the manufacturing process behind wafer, and can't obtain the obvious flexibility that product uses and the advantage of manufacturing cost.
Summary of the invention
Therefore, advantage of the present invention provides chip component, interconnection and manufacture method thereof on the chip of eliminating above-mentioned and other restriction.
The invention provides Chip Packaging on a kind of highly integrated chip, it comprises: chip assembly at least two stacked chips, wherein chip assembly has the individual chips that two active areas are electrically connected at least on each chip, and the described active area of wherein said two chips faces with each other; And being used for described chip is electrically connected to the interconnect substrate of external circuit, this interconnect substrate comprises: the first group of Connection Element that is connected in the active area of chip; Be used for being connected to second group of Connection Element of described external circuit; And substrate with conductive line, described conductive line is connected to described second group of Connection Element with described first group of Connection Element, and wherein said second group of Connection Element comprises: the first group of connector that flushes with one lateral surface in the chip assembly on described at least two chips; And with described at least two chips on another lateral surface flushes in the chip assembly second group of connector.
On said chip among Chip Packaging embodiment, the technology difference of these at least two chips.
Among Chip Packaging embodiment, described external circuit is plug-in connection on said chip.
On said chip among Chip Packaging embodiment, one height on described interconnect substrate and the described chip in described at least two chips of chip assembly is identical.
Among Chip Packaging embodiment, chip assembly piles up placement mutually on a plurality of chips on said chip.
Among Chip Packaging embodiment, first group of connector comprises solder ball on said chip.
Among Chip Packaging embodiment, second group of connector comprises the metal solder joint on said chip.
By means of having fully independently chip assembly and be used for chip is electrically connected to chip component connection/interconnection on the chip of external circuit on chip and the chip that is electrically connected of at least two functions, realized advantage of the present invention.
From the more definite description of most preferred embodiment of the present invention as shown in drawings, of the present invention above-mentioned and other advantage and specific will be more obvious.
Description of drawings
Describe best illustration embodiment of the present invention below in conjunction with accompanying drawing, in these accompanying drawings, similar reference number is represented similar element.
Fig. 1 is the profile with chip component on the chip that chip component connects on the first demonstration chip of the most preferred embodiment according to the present invention;
Fig. 2,3 and 4 be according to the present invention most preferred embodiment have second, third with the 4th demonstration chip on the profile of chip component on the chip that is connected of chip component;
Fig. 5 is the profile that adopts chip package on the chip that chip component connects on the demonstration chip of Fig. 4;
Fig. 6 is the profile with chip component on the chip of Fig. 1 that chip component connects on the 5th demonstration chip;
Fig. 7 is the profile that adopts chip package on the chip that chip component connects on the demonstration chip of Fig. 6;
Fig. 8,9,10,11,12 and 13 profiles have illustrated the manufacturing sequence according to chip component on the chip of second embodiment of the invention;
Figure 14 is the profile according to chip component on the chip of third embodiment of the invention;
Figure 15 is the profile that adopts chip package on the chip of chip component on the chip of Figure 14;
Figure 16 is the profile according to chip component on the chip of fourth embodiment of the invention;
Figure 17 is the profile according to chip component on the chip of fifth embodiment of the invention;
Figure 18 is the profile that adopts chip package on the chip of chip component on the chip of Figure 17.
Embodiment
With reference to Fig. 1, show chip component 10 on the first demonstration chip of most preferred embodiment according to the present invention.Chip component 10 comprises that chip component is connected 20 on first chip 30, second chip 40 and the chip on the chip.The active area 35 of first chip 30 connects or photonic interconnections by the chip chamber that connects 50 such as C4 (the control collapse chip connects) solder ball, is electrically connected to the active area 45 of second chip 40.The 50 high-performance electric pathways that provide chip chamber to get in touch are provided solder ball.This interconnection is with the intrinsic high-performance of chip electricity wiring, reduced the two the size and the power of Ocd driver (not shown) of first chip 30 and second chip 40 widely.Though this example and later example have specifically illustrated solder ball and solder post, should be appreciated that, other interconnection that also can adopt the different component such as the interconnection of polymer metal compound, electro-coppering post, the connection of little lock or the like to constitute.
In this specific examples, chip component connection 20 is the solder posts 22 that are connected in first chip 30 on the chip.Solder post 22 makes it possible to chip component on the chip 10 generally is connected to external circuit by substrate.
Fig. 2 shows chip component on the second demonstration chip, and chip component connects 20 and comprises solder ball on its chips.In Fig. 1 and 2,, in the related application of No.BU9-98-011, can find the exemplary method of making solder post and solder ball at IBM Dkt.Also can make solder post and solder ball through the following steps:
1) makes first chip with solderable metal solder joint.The diameter that can be used as the external zones solder joint of solder post solder joint can be for example 125 microns, and spacing is 250 microns.The diameter of center solder joint can be 50 microns, and spacing is 100 microns.
2) make second chip with C4 array of solder balls.The component of C4 can be Pb: Sn=97: 3, and C4 should be consistent with the spacing of first chip center's district's solder joint.
3) first chip is fixed to second chip.By the chip pick-and-place technology (CPP) of standard, or the technology by combining with the stove backflow such as the flux that need not remove, PADS, rosin flux, this point can be accomplished.
4) solder post or solder ball are fixed to second chip.Inject mold by scolder, can accomplish this point.
5) chip component on the chip is connected to substrate.Quick solder is attached on the substrate TSM solder joint with linking technology by means of placement, can accomplishes this point by standard.
Fig. 3 and 4 shows third and fourth example of chip component on the chip, and chip component links 20 and comprises solder ball 26 and wiring 25 (Fig. 3) or wire bond 28 (Fig. 4) on the chip wherein.In Fig. 3, in substrate 57, make cavity 55, make the top of second chip 40 identical with the height at the top of substrate 57.26 of solder balls can be measure-alike with the solder ball 50 that is connected, thereby chip component on the chip is connected to substrate 57.
Fig. 5 shows chip package on the chip of chip component 10A on the chip that adopts Fig. 4.Wire bond 28 is connected in the top side of substrate 72.The bottom side of substrate 72 comprises and is used for chip package on the chip is connected in the solder ball 76 of different package levels.Adhesive 71 is mechanically connected to substrate 72 with chip component 10A on the chip.Resin blend stop 66 and encapsulation agent 64 are being protected chip 30 and 40, and provide intensity for wire bond and chip structure 60.That crown cap 62 provides is compact, chip package on the chip of durable and hot enhancing.
As Fig. 6 and 7 as seen, on the chip on the chip of chip component 10B chip component link 20 and comprise solder ball plug-in unit 32.Solder ball plug-in unit 32 provides the electrical interconnection of substrate and the required height of size of second chip 40.Solder ball plug-in unit 32 is made up of the first assembly welding pellet of the active area that is connected in a chip 40, the conductive channel that is connected between the second assembly welding pellet of external circuit and first group and the second assembly welding pellet.This passage is surrounded by non electrically conductive material.Fig. 7 shows chip package on the chip of chip component 10B on the chip that adopts Fig. 6.The solder ball plug-in unit is connected to the top side of substrate 72.The bottom side of substrate 72 comprises and is used for chip package on the chip is connected in the not solder ball 76 of packaging part at the same level.Radiator 74 is connected to first chip 30 by adhesive 78.Radiator makes that chip component 10B is dispelled the heat on the chip.
Some advantages of chip component comprise on the chip of Fig. 1-7 and back example: can make chip 30 and 40 with different semiconductor technologies, and they are coupled together and when not being subjected to these technologies to be used for one chip intrinsic restriction.For example, chip 30 can be a logic chip, and chip 40 can be a dram chip, produces logic/DRAM combination on chip component level on the chip.The second, than the single chip that all functions and circuit are provided on each chip, chip 30 and 40 is said so less and more uncomplicated individually.The 3rd, a large amount of memories can be positioned at the next-door neighbour of processor.The 4th, because the very smooth metallic character of chip component on the chip, and have bigger interconnection density.At last, chip component provides the cost lower than the simple high integrated chip that said function is provided, lower power and the performance of Geng Gao on the chip of the present invention.
Fig. 8-13 profile has illustrated the manufacturing sequence according to chip component on the chip of second embodiment of the invention.In Fig. 8, show chip wafer 140 with active circuit and interconnection layer 145.Wafer 140 can be for example silicon wafer, GaAs wafer, SiGe wafer etc.Active circuit and interconnection layer 145 comprise required structure of external interconnect and figure.In Fig. 9, two class components are fixed to wafer 140: integrated circuit (IC) chip 130 and solder ball plug-in unit (being also referred to as spacing body) 32.IC chip 130 is electrically connected to the active circuit in the wafer 140, and the integrate circuit function of higher level is provided.Can use the solder ball sealed such as band and the electrical connection the wire bond.Solder ball plug-in unit 32 provides the electric pathway between the plane that active circuit layer 145 and IC chip 130 active circuit layer side form on the wafer 140.Though specifically illustrated solder ball plug-in unit 32 in the present example, also can use other interval such as the silicon wafer with access opening, multi-layer ceramics and organic PCB interval.Simultaneously, though with solder ball IC chip 130 and solder ball plug-in unit 32 are connected to wafer 140 in the present example, also can adopt other interconnecting method such as conductive epoxy resin, PMC glue, anisotropic-electroconductive adhesive and transition liquid phase bonding.Can surround solder ball with solder ball encapsulated member (not shown).
As Figure 10 finding, deposit conformal coating 34 on whole surface (for example paraxylene).Then as shown in figure 11, flatten this coating with machinery and/or chemical method.An example of leveling can be with the wafer polishing method of standard mechanical polishing to be carried out on the surface.This leveling makes in the structure interconnecting channel hole in the solder ball plug-in unit 32 occur from the teeth outwards.These access openings are formed into the connection of external circuit.Figure 12 shows and make the solder ball 36 that is used for outside circuit interconnection on solder ball plug-in unit 32.Chip component on predetermined point 38 place's diced chips forms " super chip " that the enough solder balls 36 of energy are connected to external circuit.Figure 13 shows the super chip that is connected in carrier/substrate 72.Make super chip shown in Figure 13 some advantages are arranged.These advantages comprise: with the very high integrated level of the different semiconductor technologies of multilayer; The superior function of the outer speed aspect of element speeds, bandwidth requirement and chip; The constituent element chip is physically very little and do not need complicated circuit or manufacturing process, causes rate of finished products height and cost low; And, can reach customizations by means of connect several constituent element elements with various forms.
Figure 14 and 15 is the profiles according to chip component 80 on the chip of third embodiment of the invention.Chip component 80 comprises and is made of two groups of one group two chips on the chip, and each group has first chip 30 that is electrically connected on second chip and 40 and 30A and 40A (for example chip component 10 on the chip among Fig. 1).In this example, the dorsal part of chip 30 and 30A toward each other.Two core assembly sheets connect 20A (being interconnect substrate 88 in this example) by chip component on the chip and are electrically connected to together.Interconnect substrate 88 also by connect 86 electrical connections that are connected with the metal solder joint 82 such as wire bond 84, C4, is connected to external devices with chip component on the chip 80.Though for illustrative purposes, on Figure 14 and 15 chip, show dissimilar being connected on the chip component 80, only use one type connection (that is connecting 82,84 can all be that for example C4 is connected with 86) usually for a kind of application.Figure 15 shows chip package on the chip of chip component 80 on the chip that adopts Figure 14.Two radiators 92 are connected to chip 30 and 30A by adhesive 94.Radiator makes that chip component 80 is dispelled the heat on the chip.In substrate 57, make cavity 55, make the top of second chip 40 identical with the height at the top of substrate 57.26 of solder balls can be measure-alike with the solder ball 50 that is connected, thereby chip component on the chip is connected to substrate 57.Like this, as described in this embodiment according to the present invention, can be together with several chips incorporate that respectively have discrete and specific function and may make with different semiconductor technologies.
Figure 16 is the profile according to chip package on the plug-in chip that comprises chip component 80A on the chip of fourth embodiment of the invention.Chip component 80A comprises chip 30,30A, 40,40A, interconnect substrate 88A and coupling substrate 88B on the chip.In this example, chip component 80A seals for encapsulated dose 96 on the chip, thereby a solid element is provided.Interconnect substrate 88A makes it possible to be electrically connected to external circuit by the interface of can pegging graft.
Figure 17 is the profile according to chip component 80B on the chip of fifth embodiment of the invention.Chip component connects 20A and comprises the stackable interconnect substrate 88C that extends chip component 80B upper and lower surface on the chip on chip, on the chip on chip component 80B and the chip chip component 80 (Figure 14) be similar.The upper surface of chip component connection 20A comprises meltability metal solder joint 82 on the chip, and the lower surface of chip component connection 20A comprises solder ball 86 on the chip.But chip component structure 80B is the exemplary cell structure of three-dimensional stack assemblies on the chip.Another kind of exemplary cell structure can comprise cancellation chip 40 and 40A, and makes on the chip chip component connect 20A to extend across chip 30 and 30A.Figure 18 shows the assembly that piles up of chip component cellular construction 80B on the chip that contains two Figure 17.
Some advantages of assembly that piles up and cellular construction are: at first, can easily adapt to the chip of different size and thickness.The second, structure can be done over again.The 3rd, the structure of various sizes all is possible and do not have tangible prerequisite.The 4th, might arrange the heat problem between the cellular construction.
So, according to chip component on the chip of the present invention be connected, make it possible to obtain high integration technology and reliable and compact semiconductor package part.Chip package also provides the electric property, mechanical performance and the hot property that strengthen on the chip.
Though described the present invention particularly with reference to most preferred embodiment, the one skilled in the art can understand, can make the above-mentioned form and the change of details and do not surmount design of the present invention and scope with other.
Claims (7)
1. Chip Packaging on the highly integrated chip, it comprises:
Chip assembly at least two stacked chips, wherein chip assembly has the individual chips that two active areas are electrically connected at least on each chip, and the described active area of wherein said two chips faces with each other; And
Be used for described chip is electrically connected to the interconnect substrate of external circuit, this interconnect substrate comprises: the first group of Connection Element that is connected in the active area of chip; Be used for being connected to second group of Connection Element of described external circuit; And the substrate with conductive line, described conductive line is connected to described second group of Connection Element with described first group of Connection Element,
Wherein said second group of Connection Element comprises: the first group of connector that flushes with one lateral surface in the chip assembly on described at least two chips; And with described at least two chips on another lateral surface flushes in the chip assembly second group of connector.
2. Chip Packaging on the chip of claim 1, wherein the technology difference of these at least two chips.
3. Chip Packaging on the chip of claim 1, wherein said external circuit is plug-in connection.
4. one height on the Chip Packaging on the chip of claim 1, wherein said interconnect substrate and described chip in described at least two chips of chip assembly is identical.
5. Chip Packaging on the chip of claim 1, chip assembly piles up placement mutually on wherein a plurality of chips.
6. Chip Packaging on the chip of claim 1, wherein first group of connector comprises solder ball.
7. Chip Packaging on the chip of claim 1, wherein second group of connector comprises the metal solder joint.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/105,419 US5977640A (en) | 1998-06-26 | 1998-06-26 | Highly integrated chip-on-chip packaging |
US105419 | 1998-06-26 |
Publications (2)
Publication Number | Publication Date |
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CN1241032A CN1241032A (en) | 2000-01-12 |
CN1148804C true CN1148804C (en) | 2004-05-05 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB991070917A Expired - Fee Related CN1148804C (en) | 1998-06-26 | 1999-05-27 | Highly integrated chip-on-chip packaging |
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US (2) | US5977640A (en) |
JP (1) | JP3096459B2 (en) |
KR (1) | KR100404373B1 (en) |
CN (1) | CN1148804C (en) |
TW (1) | TW423082B (en) |
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1998
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-
1999
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- 1999-05-17 KR KR10-1999-0017553A patent/KR100404373B1/en not_active IP Right Cessation
- 1999-05-27 CN CNB991070917A patent/CN1148804C/en not_active Expired - Fee Related
- 1999-05-31 JP JP11151409A patent/JP3096459B2/en not_active Expired - Fee Related
- 1999-07-06 US US09/350,274 patent/US6294406B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100404373B1 (en) | 2003-11-05 |
US5977640A (en) | 1999-11-02 |
JP3096459B2 (en) | 2000-10-10 |
TW423082B (en) | 2001-02-21 |
US6294406B1 (en) | 2001-09-25 |
KR20000005670A (en) | 2000-01-25 |
JP2000156461A (en) | 2000-06-06 |
CN1241032A (en) | 2000-01-12 |
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