CN114807842A - Vacuum evaporation device and preparation method of display panel - Google Patents

Vacuum evaporation device and preparation method of display panel Download PDF

Info

Publication number
CN114807842A
CN114807842A CN202210351319.3A CN202210351319A CN114807842A CN 114807842 A CN114807842 A CN 114807842A CN 202210351319 A CN202210351319 A CN 202210351319A CN 114807842 A CN114807842 A CN 114807842A
Authority
CN
China
Prior art keywords
target substrate
magnetic
cooling plate
plate
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202210351319.3A
Other languages
Chinese (zh)
Other versions
CN114807842B (en
Inventor
张校士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to CN202210351319.3A priority Critical patent/CN114807842B/en
Publication of CN114807842A publication Critical patent/CN114807842A/en
Application granted granted Critical
Publication of CN114807842B publication Critical patent/CN114807842B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The embodiment of the application provides a vacuum evaporation device and a preparation method of a display panel; the vacuum evaporation device comprises a cooling plate, a plurality of first magnetic components and a plurality of distance measuring sensors, wherein the cooling plate is used for cooling a target substrate, the first magnetic components are used for magnetically attracting the target substrate, the distance measuring sensors are electrically connected with the first magnetic components, and the distance measuring sensors are used for acquiring the distance between the target substrate and the cooling plate, so that the distance between each distance measuring sensor and the target substrate is equal; according to the vacuum evaporation device, the magnetic field intensity generated by the first magnetic components is adjusted according to the distance difference between the different distance measuring sensors and the target substrate, so that the distance between each distance measuring sensor and the target substrate is equal, the relative displacement between the target substrate and the mask plate in the laminating process is avoided, the residual evaporation materials on the target substrate are prevented from being transferred to the mask plate, and the product yield of the display panel is effectively improved.

Description

Vacuum evaporation device and preparation method of display panel
Technical Field
The application relates to the field of display, in particular to a vacuum evaporation device and a preparation method of a display panel.
Background
Organic Light-Emitting Diode (OLED) displays are currently the key development field in the display industry due to their superior display characteristics, such as active Light emission, wide viewing angle, fast response speed, and gorgeous color. In the manufacture of the OLED display, an evaporation process is an essential process.
For a fully evaporated light emitting device, a metal Mask plate is required to be used for defining a pattern by evaporation, and an isolation pillar is designed on a target substrate as a support, but since the number of evaporation layers is large, a Common Mask plate (Common Mask) is used for full-surface evaporation of an organic transport layer, and a Fine Mask plate (Fine Mask) is usually used for evaporation of a light emitting material layer. However, when the evaporation is performed on the common mask, the isolation pillars on the target substrate accumulate the evaporation materials, and then the evaporation is performed on the fine mask, due to the self gravity of the glass target substrate or the thermal expansion, the glass target substrate may sag in the evaporation equipment, so that the target substrate is deformed (glass bonding), and therefore the target substrate and the fine mask generate alignment errors, the target substrate and the fine mask are in friction contact, and further the residual evaporation materials on the isolation pillars are transferred to the fine mask to form a defect point problem.
Therefore, a vacuum evaporation apparatus and a method for manufacturing a display panel are needed to solve the above-mentioned technical problems.
Disclosure of Invention
The embodiment of the application provides a vacuum evaporation device and a preparation method of a display panel, and the technical problem of poor color mixing of the prepared display panel caused by the fact that an evaporation material is left in a mask plate in the current evaporation process can be solved.
The embodiment of the application provides a vacuum evaporation device, which comprises a cooling plate, a plurality of first magnetic members and a plurality of distance measuring sensors, wherein the cooling plate is arranged on a target substrate, the first magnetic members are arranged on one side, away from the target substrate, of the cooling plate, and the distance measuring sensors are arranged in the cooling plate;
the cooling plate is used for cooling the target substrate, the first magnetic component is used for magnetically attracting the target substrate, the distance measuring sensor is electrically connected with the first magnetic component, and the distance measuring sensor is used for acquiring the distance between the target substrate and the cooling plate.
Optionally, in some embodiments of the present application, a plurality of vias are disposed on the cooling plate, and the vias are disposed along a diagonal direction of the cooling plate;
wherein, the ranging sensor is arranged in the through hole.
Optionally, in some embodiments of the present application, the vacuum evaporation apparatus further includes a plurality of second magnetic members, where the second magnetic members are disposed on a side of the target substrate close to the cooling plate and fixedly connected to the target substrate;
wherein the second magnetic member is disposed corresponding to a non-display region of the target substrate.
Optionally, in some embodiments of the present application, the second magnetic member includes a plurality of first magnetic units extending along a first direction and arranged along a second direction, and a plurality of second magnetic units extending along the second direction and arranged along the first direction, the first direction and the second direction are arranged at an included angle, and two adjacent first magnetic units and two adjacent second magnetic units form an overlapping region;
wherein an orthographic projection of the first magnetic member on the target substrate in a top view direction of the target substrate is located within the overlap region.
Optionally, in some embodiments of the present application, the first magnetic member comprises an electromagnetic material and the second magnetic member comprises a permanent magnetic material.
Optionally, in some embodiments of the present application, the vacuum evaporation apparatus further includes a magnetic plate, and the magnetic plate is disposed above the cooling plate;
the magnetic plate is a permanent magnetic plate or an electromagnetic plate, and the magnetic field intensity of the magnetic plate is greater than the magnetic field intensity of the plurality of first magnetic members after being electrified.
Optionally, in some embodiments of the present application, the magnetic plate is spaced from the cooling plate by a distance in a range of 5cm to 10 cm.
Correspondingly, the embodiment of the application also provides a preparation method of the display panel, and the method comprises the following steps:
providing a vacuum evaporation apparatus as described in any one of the above;
attaching a target substrate to the second magnetic member in the vacuum evaporation device, and preliminarily aligning the target substrate to the cooling plate;
adjusting a distance between the target substrate and the cooling plate by the first magnetic member and the ranging sensors to equalize a distance between each of the ranging sensors and the target substrate;
and attaching a mask plate to one side of the target substrate, which is far away from the cooling plate, and performing evaporation treatment on the target substrate to form an organic light-emitting layer.
Optionally, in some embodiments of the present application, the adjusting the distance between the target substrate and the cooling plate by the first magnetic member and the ranging sensors to equalize the distance between each of the ranging sensors and the target substrate further includes:
acquiring bending stress data of the target substrate;
performing energization processing on the plurality of first magnetic members on the cooling plate to bond the cooling plate to the target substrate;
acquiring a distance difference between each ranging sensor and the target substrate;
adjusting the magnetic field strength of the first magnetic member to equalize the distance between each of the ranging sensors and the target substrate.
Optionally, in some embodiments of the present application, the attaching a mask plate to a side of the target substrate far from the cooling plate, and performing evaporation treatment on the target substrate to form an organic light emitting layer further includes:
providing the magnetic plate, wherein the magnetic plate is arranged above the cooling plate;
electrifying the magnetic plate to enable the magnetic field intensity of the magnetic plate to be larger than that of the cooling plate;
and attaching a mask plate to one side of the target substrate, which is far away from the cooling plate, through the magnetic force generated between the magnetic plate and the target substrate.
The embodiment of the application provides a vacuum evaporation device and a preparation method of a display panel; the vacuum evaporation device comprises a cooling plate, a plurality of first magnetic members and a plurality of distance measuring sensors, wherein the cooling plate is used for cooling the target substrate, the first magnetic members are used for magnetically attracting the target substrate, the distance measuring sensors are electrically connected with the first magnetic members and used for acquiring the distance between the target substrate and the cooling plate, so that the distance between each distance measuring sensor and the target substrate is equal; according to the vacuum evaporation device, the cooling plate is provided with the plurality of first magnetic components and the plurality of distance measuring sensors, the first magnetic components are used for magnetically attracting the target substrate, the distance measuring sensors are used for acquiring the distance between the target substrate and the cooling plate, the vacuum drying device adjusts the magnetic field intensity generated by the plurality of first magnetic components according to the distance difference between the distance measuring sensors and the target substrate, so that the distance between each distance measuring sensor and the target substrate is equal, the relative displacement between the target substrate and a mask plate in the laminating process is avoided, the evaporation material remained on the target substrate is prevented from being transferred to the mask plate, and the product yield of the display panel is effectively improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a vacuum evaporation apparatus provided in an embodiment of the present application;
fig. 2 is a schematic plan view illustrating a second magnetic member in a vacuum evaporation apparatus according to an embodiment of the present disclosure;
fig. 3 is a flowchart of a method for manufacturing a display panel according to an embodiment of the present disclosure;
fig. 4A to 4F are structural diagrams of a method for manufacturing a display panel according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application. Furthermore, it should be understood that the detailed description and specific examples, while indicating exemplary embodiments of the invention, are given by way of illustration and explanation only, and are not intended to limit the scope of the invention. In the present application, unless indicated to the contrary, the use of the directional terms "upper" and "lower" generally refer to the upper and lower positions of the device in actual use or operation, and more particularly to the orientation of the figures of the drawings; while "inner" and "outer" are with respect to the outline of the device.
The technical problem that the color mixing of the prepared display panel is poor due to the fact that the evaporation materials are left on the mask plate in the existing evaporation process can be solved.
The technical solution of the present application will now be described with reference to specific embodiments.
Referring to fig. 1 to 2, an embodiment of the present application provides a vacuum evaporation apparatus 10, including a cooling plate 11, a plurality of first magnetic members 12, and a plurality of distance measuring sensors 15, wherein the cooling plate 11 is disposed on a target substrate 20, the first magnetic members 12 are disposed on a side of the cooling plate 11 away from the target substrate 20, and the distance measuring sensors 15 are disposed in the cooling plate 11;
the cooling plate 11 is configured to cool the target substrate 20, the first magnetic member 12 is configured to magnetically attract the target substrate 20, the distance measuring sensor 15 is electrically connected to the first magnetic member 12, and the distance measuring sensor 15 is configured to obtain a distance between the target substrate 20 and the cooling plate 11.
In the vacuum vapor deposition apparatus 10 according to the embodiment of the present application, the plurality of first magnetic members 12 and the plurality of distance measuring sensors 15 are provided on the cooling plate 11, the first magnetic member 12 is used for magnetically attracting the target substrate 20, the distance measuring sensor 15 is used for acquiring the distance between the target substrate 20 and the cooling plate 11, the vacuum drying apparatus adjusts the intensity of the magnetic field generated by the plurality of first magnetic members 12 according to the difference in the distance between the ranging sensor 15 and the target substrate 20, so that the distance between each of the ranging sensors 15 and the target substrate 20 is equal, thereby avoiding relative displacement between the target substrate 20 and the mask plate 30 during the attaching process, further, the evaporation material remaining on the target substrate 20 is prevented from being transferred to the mask plate 30, and the yield of the display panel is effectively improved.
The technical solution of the present application will now be described with reference to specific embodiments.
Fig. 1 is a schematic structural diagram of a vacuum evaporation apparatus 10 according to an embodiment of the present disclosure; the vacuum vapor deposition apparatus 10 performs vacuum vapor deposition on the target substrate 20 by being used in combination with the mask plate 30.
Specifically, the vacuum vapor deposition apparatus 10 includes a cooling plate 11, a plurality of first magnetic members 12, and a plurality of distance measuring sensors 15, wherein the cooling plate 11 is disposed on a target substrate 20, the first magnetic members 12 are disposed on a side of the cooling plate 11 away from the target substrate 20, and the distance measuring sensors 15 are disposed in the cooling plate 11;
the cooling plate 11 is configured to cool the target substrate 20 and the mask plate 30, the first magnetic member 12 is configured to magnetically attract the target substrate 20, the distance measuring sensor 15 is electrically connected to the first magnetic member 12, the distance measuring sensor 15 is configured to obtain a distance between the target substrate 20 and the cooling plate 11, and the mask plate 30 is disposed on the substrate carrying table 40.
In the embodiment of the present application, the first magnetic member 12 is disposed on a side of the cooling plate 11 away from the target substrate 20; wherein the first magnetic member 12 is preferably an electrified coil, the number of turns of the electrified coil is greater than or equal to 1000, and the magnetic force generated by each electrified coil is between 0 and 2000 gauss; when the first magnetic members 12 are energized, the cooling plate 11 may adjust the magnitude of the magnetic force generated by the first magnetic members 12 corresponding to different regions by adjusting the magnitude of the current of the first magnetic members 12 corresponding to different regions, so as to counteract the gravity of the target substrate 20 within a range from 0 to 30N.
In the embodiment of the present application, a plurality of through holes 111 are provided on the cooling plate 11, and the through holes 111 are arranged along a diagonal direction of the cooling plate 11; the distance measuring sensor 15 is disposed in the via hole 111, and the distance measuring sensor 15 is configured to obtain a distance between the target substrate 20 and the cooling plate 11 when the target substrate 20 is attached to the cooling plate 11. The design is that the cooling plate 11 is rectangular, four sides of the cooling plate are symmetrical, and the distance measuring sensor 15 arranged diagonally can utilize the least resources to obtain more complete data.
In the embodiment of the present application, the vacuum evaporation apparatus 10 further includes a plurality of second magnetic members 14, and the second magnetic members 14 are disposed on a side of the target substrate 20 close to the cooling plate 11 and are fixedly connected to the target substrate 20, so as to prevent the second magnetic members 14 from affecting the evaporation process;
wherein the second magnetic member 14 is disposed corresponding to a non-display region of the target substrate 20.
Preferably, the second magnetic member 14 is correspondingly disposed on a laser cutting area of the target substrate 20, and the target substrate 20 is laser cut to form a plurality of sub-target substrates 20.
As shown in fig. 2, a schematic plan view of a second magnetic member 14 in the vacuum evaporation apparatus 10 according to the embodiment of the present application; the second magnetic member 14 includes a plurality of first magnetic units 141 extending along a first direction D1 and arranged along a second direction D2, and a plurality of second magnetic units 142 extending along a second direction D2 and arranged along a first direction D1, the first direction D1 and the second direction D2 form an included angle, and two adjacent first magnetic units 141 and two adjacent second magnetic units 142 form an overlapping region;
wherein, in a top view direction of the target substrate 20, an orthogonal projection of the first magnetic member 12 on the target substrate 20 is located within the overlap region.
In the present embodiment, the second magnetic member 14 comprises a permanent magnetic material, which may comprise magnetic powder, iron, cobalt and/or nickel, and/or an alloy or oxide comprising at least one of magnetic powder, iron, cobalt and nickel.
Further, the first magnetic unit 141 or the second magnetic unit 142 is a magnetic strip or a magnetic film, the weight of the first magnetic unit 141 or the second magnetic unit 142 is 1/100 of the weight of the target substrate 20, and the first magnetic unit 141 or the second magnetic unit 142 is fixed to the side of the target substrate 20 close to the cooling plate 11 by a mechanical attachment or a coating process.
The second magnetic member 14 is disposed on the target substrate 20, so that the first magnetic member 12 in the cooling plate 11 can attract the second magnetic member 14, thereby preventing the target substrate 20 from sagging and causing alignment error or poor color mixing.
In the embodiment of the present application, the vacuum evaporation apparatus 10 further includes a magnetic plate 13, the magnetic plate 13 is disposed above the cooling plate 11, and the first magnetic member 12 is located on a side of the magnetic plate 13 close to the target substrate 20;
the magnetic plate 13 is a permanent magnetic plate or an electromagnetic plate, and the magnetic field intensity of the magnetic plate 13 is greater than the magnetic field intensity of the plurality of first magnetic members 12 after being electrified.
Further, the distance between the magnetic plate 13 and the cooling plate 11 ranges from 5cm to 10cm, so that the magnetic field intensity generated by the magnetic plate 13 ranges from 0T to 1T; wherein, the area magnetic force of the magnetic plate 13 can be adjusted according to the flatness of the mask plate 30 and the weight of the target substrate 20.
In the embodiment of the present invention, the vacuum deposition apparatus 10 further includes a deposition chamber in which the cooling plate 11, the magnetic plate 13, the first magnetic member 12, and the distance measuring sensor 15 are all disposed, and deposition on the target substrate 20 is performed.
In order to solve the problem that the contact between the target substrate 20 and the mask plate 30 is locally asynchronous and there is relative displacement, which causes the evaporation material remaining on the pillars on the target substrate 20 to be transferred to the mask plate 30 to form black dots, thereby causing poor product color mixing, in the embodiment of the present invention, a plurality of second magnetic members 14 are disposed in a non-display region on the target substrate 20, a plurality of first magnetic members 12 and a plurality of distance measuring sensors 15 are disposed on the cooling plate 11, the distance measuring sensors 15 are used to acquire local bending data of the target substrate 20 (i.e. the distance from the target substrate 20 to the cooling plate 11), the magnetic force of the cooling plate 11 corresponding to a local region of the target substrate 20 is controlled by current adjustment, and the first magnetic members 12 are energized to form a magnetic field, so that the cooling plate 11 attracts the target substrate 20, further eliminating the sagging phenomenon of the target substrate 20 caused by the bending stress, so that the target substrate 20 approaches the horizontal state. Further, when the mask plate 30 is attached, the friction between the mask plate and the mask plate is reduced, so that the black spot phenomenon caused by the friction is reduced.
As shown in fig. 3, it is a flowchart of a method for manufacturing a display panel provided in the embodiments of the present application; wherein the method comprises the following steps:
s10, providing the vacuum vapor deposition device 10 as described above.
Specifically, the S10 includes:
firstly, carrying out hole opening treatment on the cooling plate 11; preferably, a diagonal line of the cooling plate 11 is perforated to form a plurality of vias 111, and the number of the vias 111 is preferably 4 to 5, as shown in fig. 4A;
then, a plurality of first magnetic members 12 are arranged on the cooling plate 11, and the distance measuring sensor 15 is installed on the corresponding through hole 111, wherein the distance measuring sensor 15 is a laser fiber distance measuring sensor 15, as shown in fig. 4B;
finally, a plurality of second magnetic members 14 are disposed on the target substrate 20 by an attaching process or a plating process, and the second magnetic members 14 are correspondingly disposed in a non-display area of the target substrate 20, as shown in fig. 4C.
S20, bonding the target substrate 20 to the second magnetic member 14 in the vacuum evaporation apparatus 10, and preliminarily aligning the target substrate with the cooling plate 11.
Specifically, the S20 includes:
first, the target substrate 20 on which the second magnetic member 14 is provided is conveyed into a deposition chamber of the vacuum deposition apparatus 10 by a mechanical conveyor belt;
thereafter, the target substrate 20 is placed on the substrate stage 40 of the vacuum evaporation apparatus 10, and the target substrate 20 and the cooling plate 11 are initially aligned, wherein the second magnetic member 14 is disposed on a side of the target substrate 20 close to the cooling plate 11, as shown in fig. 4D.
S30, the distance between the target substrate 20 and the cooling plate 11 is adjusted by the first magnetic member 12 and the distance measuring sensor 15 so that the distance between each distance measuring sensor 15 and the target substrate 20 is equal.
Specifically, the S30 further includes:
first, the driving mechanism in the vacuum vapor deposition apparatus 10 drives the cooling plate 11 to move in a direction to approach the target substrate 20;
then, the bending stress data of the target substrate 20 is acquired by the distance measuring sensor 15, the distance measuring sensor 15 transmits a signal to a current driving mechanism of the vacuum evaporation device 10, and the current driving mechanism drives the first magnetic member 12 to generate a corresponding pre-magnetic force after being electrified;
simultaneously, conducting an electrical current to the plurality of first magnetic members 12 on the cooling plate 11 to generate a magnetic field in the first magnetic members 12, thereby generating a magnetic force between the first magnetic members 12 and the second magnetic members 14; wherein different first magnetic members 12 can pass different currents, so as to generate different magnetic field strengths.
When the initial magnetic force generated between the first magnetic member 12 and the second magnetic member 14 is greater than the gravity of the target substrate 20, the cooling plate 11 is preliminarily attached to the target substrate 20, as shown in fig. 4E;
at this time, the target substrate 20 has a bending sag phenomenon due to the bending stress, because the peripheral edge of the target substrate 20 is in contact with the cooling plate 11 when the target substrate 20 is preliminarily adsorbed to the cooling plate 11, and the central region of the target substrate 20 is hollowed out; due to the gravity acting on the target substrate 20, the periphery of the target substrate 20 is subjected to magnetic force, and the central area is subjected to gravity, so that there is a moment, resulting in a bending and sagging phenomenon of the target substrate 20 due to the bending stress.
Further, the cross-sectional maximum bending stress of the target substrate 20 is: f 1 ＝3*mg*a/2*b*d 2 (ii) a Where a is a length of the target substrate 20, b is a width of the target substrate 20, d is a thickness of the target substrate 20, m is a mass of the target substrate 20, and g is a gravitational acceleration of the target substrate 20.
Further, a magnetic force F is generated between the first magnetic member 12 and the second magnetic member 14 2 Comprises the following steps: f 2 ＝B 2 S/2μ 0 (ii) a Wherein, mu 0 The magnetic permeability is vacuum magnetic permeability, S is the magnetic field surface area, and B is the magnetic induction intensity.
Then, after the target substrate 20 is preliminarily attached to the cooling plate 11, obtaining a distance difference between each distance measuring sensor 15 and the target substrate 20 through laser distance measurement, and further calculating a deviation degree of the target substrate 20 in a direction parallel to the cooling plate 11;
finally, the current driving mechanism of the vacuum evaporation apparatus 10 adjusts the magnitude of the current flowing through the different first magnetic members 12 to adjust the magnetic field strength of the different first magnetic members 12, so that the distance between each distance measuring sensor 15 and the target substrate 20 is equal, thereby eliminating the bending and sagging phenomena of the target substrate 20.
S40, bonding the mask plate 30 to the side of the target substrate 20 away from the cooling plate 11, and performing vapor deposition treatment on the target substrate 20 to form an organic light-emitting layer.
Specifically, the S40 includes:
firstly, a mask plate 30 and the target substrate 20 are precisely aligned, so that the alignment error between the mask plate 30 and the target substrate 20 is less than 1.5um, the mask plate 30 is arranged on one side of the target substrate 20 far away from the cooling plate 11, and the mask plate 30 is made of metal;
then, the mask plate 30 is moved to the side close to the target substrate 20, and the mask plate 30 is bonded to the target substrate 20 when the mask plate 30 generates a magnetic force on the first magnetic member 12;
finally, the target substrate 20 is subjected to vapor deposition to form an organic light-emitting layer, as shown in fig. 4F.
Further, the magnetic plate 13 above the cooling plate 11 is provided as a strong electromagnetic device, the magnetic field intensity generated by the magnetic plate 13 is larger than that generated by the first magnetic member 12, and the distance between the magnetic plate 13 and the cooling plate 11 ranges from 5cm to 10 cm; wherein, the magnetic field generated by the magnetic plate 13 is used for closely attaching the target substrate 20 and the mask plate 30. This is designed because when the electromagnetic force is integrated on the cooling plate 11, the magnetic force generated by the first magnetic member 12 cannot overcome the large-sized target substrate 20, and the large-sized target substrate 20 still has the phenomenon of bending and sagging even if only the first magnetic member 12 exists; the magnetic plate 13 of the strong electromagnetic device is further arranged above the cooling plate 11, so that the technical problem of poor color mixing of the prepared display panel caused by residual vapor deposition materials of the mask plate 30 in the current vapor deposition process can be further solved.
The embodiment of the application provides a vacuum evaporation device 10 and a preparation method of a display panel; the vacuum evaporation device 10 comprises a cooling plate 11, a plurality of first magnetic members 12 and a plurality of distance measuring sensors 15, wherein the cooling plate 11 is used for cooling the target substrate 20, the first magnetic members 12 are used for magnetically attracting the target substrate 20, the distance measuring sensors 15 are electrically connected with the first magnetic members 12, and the distance measuring sensors 15 are used for acquiring the distance between the target substrate 20 and the cooling plate 11 so as to enable the distance between each distance measuring sensor 15 and the target substrate 20 to be equal; in the vacuum evaporation device 10, the plurality of first magnetic members 12 and the plurality of distance measuring sensors 15 are arranged on the cooling plate 11, the first magnetic members 12 are used for magnetically attracting the target substrate 20, the distance measuring sensors 15 are used for acquiring the distance between the target substrate 20 and the cooling plate 11, and the vacuum drying device adjusts the magnetic field strength generated by the plurality of first magnetic members 12 according to the distance difference between the different distance measuring sensors 15 and the target substrate 20, so that the distance between each distance measuring sensor 15 and the target substrate 20 is equal, thereby preventing the target substrate 20 and the mask plate 30 from being relatively displaced in the bonding process, further preventing evaporation materials remaining on the target substrate 20 from being transferred onto the mask plate 30, and effectively improving the product yield of the display panel.
The vacuum evaporation apparatus 10 and the method for manufacturing a display panel provided in the embodiments of the present application are described in detail above, and the principles and embodiments of the present application are explained herein by applying specific examples, and the description of the above embodiments is only used to help understand the method and the core concept of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

Claims (10)

1. A vacuum evaporation apparatus is characterized by comprising:
a cooling plate disposed on a target substrate to cool the target substrate;
the first magnetic members are arranged on one side of the cooling plate, which is far away from the target substrate, and are used for magnetically attracting the target substrate; and
the distance measuring sensors are arranged in the cooling plate and electrically connected with the first magnetic component, and the distance measuring sensors are used for acquiring the distance between the target substrate and the cooling plate.
2. The vacuum evaporation device according to claim 1, wherein the cooling plate is provided with a plurality of through holes, and the through holes are arranged along a diagonal direction of the cooling plate;
wherein, the ranging sensor is arranged in the through hole.
3. The vacuum evaporation apparatus according to claim 1, further comprising a plurality of second magnetic members, the second magnetic members being disposed on a side of the target substrate close to the cooling plate and fixedly connected to the target substrate;
wherein the second magnetic member is disposed corresponding to a non-display region of the target substrate.
4. The vacuum evaporation device according to claim 3, wherein the second magnetic member comprises a plurality of first magnetic units extending along a first direction and arranged along a second direction, and a plurality of second magnetic units extending along the second direction and arranged along the first direction, the first direction and the second direction are arranged at an included angle, and two adjacent first magnetic units and two adjacent second magnetic units form an overlapping region;
wherein an orthographic projection of the first magnetic member on the target substrate in a top view direction of the target substrate is located within the overlap region.
5. The vacuum evaporation device according to claim 3, wherein the first magnetic member comprises an electromagnetic material, and the second magnetic member comprises a permanent magnetic material.
6. The vacuum evaporation device according to claim 5, further comprising a magnetic plate disposed above the cooling plate;
the magnetic plate is a permanent magnetic plate or an electromagnetic plate, and the magnetic field intensity of the magnetic plate is greater than the magnetic field intensity of the plurality of first magnetic members after being electrified.
7. A vacuum evaporation device according to claim 6, wherein the magnetic plate is spaced from the cooling plate by a distance in the range of 5cm to 10 cm.
8. A method for manufacturing a display panel, the method comprising:
providing a vacuum evaporation apparatus according to any one of claims 1 to 7;
attaching a target substrate to the second magnetic member in the vacuum evaporation device, and preliminarily aligning the target substrate to the cooling plate;
adjusting a distance between the target substrate and the cooling plate by the first magnetic member and the ranging sensors to equalize a distance between each of the ranging sensors and the target substrate;
and attaching a mask plate to one side of the target substrate, which is far away from the cooling plate, and performing evaporation treatment on the target substrate to form an organic light-emitting layer.
9. The method of manufacturing a display panel according to claim 8, wherein the step of adjusting the distance between the target substrate and the cooling plate by the first magnetic member and the distance measuring sensors to equalize the distance between each of the distance measuring sensors and the target substrate further comprises:
acquiring bending stress data of the target substrate;
performing energization processing on the plurality of first magnetic members on the cooling plate to bond the cooling plate to the target substrate;
acquiring a distance difference between each ranging sensor and the target substrate;
adjusting the magnetic field strength of the first magnetic member to equalize the distance between each of the ranging sensors and the target substrate.
10. The method according to claim 8, wherein the step of attaching a mask to a side of the target substrate away from the cooling plate and performing evaporation treatment on the target substrate to form an organic light-emitting layer further comprises:
providing the magnetic plate, wherein the magnetic plate is arranged above the cooling plate;
electrifying the magnetic plate to enable the magnetic field intensity of the magnetic plate to be larger than that of the cooling plate;
and attaching a mask plate to one side of the target substrate, which is far away from the cooling plate, through the magnetic force generated between the magnetic plate and the target substrate.
CN202210351319.3A 2022-04-02 2022-04-02 Vacuum evaporation device and preparation method of display panel Active CN114807842B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210351319.3A CN114807842B (en) 2022-04-02 2022-04-02 Vacuum evaporation device and preparation method of display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210351319.3A CN114807842B (en) 2022-04-02 2022-04-02 Vacuum evaporation device and preparation method of display panel

Publications (2)

Publication Number Publication Date
CN114807842A true CN114807842A (en) 2022-07-29
CN114807842B CN114807842B (en) 2024-02-27

Family

ID=82532270

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210351319.3A Active CN114807842B (en) 2022-04-02 2022-04-02 Vacuum evaporation device and preparation method of display panel

Country Status (1)

Country Link
CN (1) CN114807842B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN205420529U (en) * 2016-03-16 2016-08-03 鄂尔多斯市源盛光电有限责任公司 Evaporating plating device
CN106978585A (en) * 2017-04-25 2017-07-25 昆山国显光电有限公司 Fixing device and evaporation coating device
CN106978584A (en) * 2017-03-27 2017-07-25 武汉华星光电技术有限公司 A kind of magnetic sheet and a kind of evaporated device for evaporated device
CN112981317A (en) * 2021-02-09 2021-06-18 京东方科技集团股份有限公司 Evaporation mask, evaporation device and evaporation method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN205420529U (en) * 2016-03-16 2016-08-03 鄂尔多斯市源盛光电有限责任公司 Evaporating plating device
CN106978584A (en) * 2017-03-27 2017-07-25 武汉华星光电技术有限公司 A kind of magnetic sheet and a kind of evaporated device for evaporated device
CN106978585A (en) * 2017-04-25 2017-07-25 昆山国显光电有限公司 Fixing device and evaporation coating device
CN112981317A (en) * 2021-02-09 2021-06-18 京东方科技集团股份有限公司 Evaporation mask, evaporation device and evaporation method

Also Published As

Publication number Publication date
CN114807842B (en) 2024-02-27

Similar Documents

Publication Publication Date Title
CN109837504B (en) Film forming apparatus, film forming method, and electronic device manufacturing method
US10581025B2 (en) Deposition apparatus for organic light-emitting diodes
US20060148114A1 (en) Method of forming mask and mask
JP7288336B2 (en) Alignment system, deposition apparatus, alignment method, deposition method, and electronic device manufacturing method
KR20180114888A (en) Positioning arrangement for substrate carrier and mask carrier, transfer system for substrate carrier and mask carrier, and methods therefor
KR101963982B1 (en) Film forming apparatus, film forming method and manufacturing method of electronic device
KR20190054033A (en) Method and apparatus for non-contact alignment
KR102630778B1 (en) Substrate carrier, film forming apparatus, and film forming method
JP7241048B2 (en) Substrate support device and deposition device
KR101108012B1 (en) Aligner for Large Size Substrate
CN113637948B (en) Alignment device, film forming device, alignment method, method for manufacturing electronic device, and storage medium
KR102017626B1 (en) Film formation apparatus, film formation method and manufacturing method of electronic device
KR102530431B1 (en) Mask attaching device, film forming apparatus, mask attaching method, film forming method, manufacturing method of electronic device, mask, substrate carrier, and set of substrate carrier and mask
CN114807842A (en) Vacuum evaporation device and preparation method of display panel
KR102459872B1 (en) Electrostatic chuk system, film formation apparatus, suction method, film formation method, and manufacturing method of electronic device
KR20220107970A (en) Film forming apparatus
KR102195796B1 (en) Method for non-contact floating masking device
JP2002105622A (en) Vapor deposition tool and vapor deposition method
CN112779503B (en) Film forming apparatus and method for controlling film forming apparatus
JP7202168B2 (en) Film forming apparatus, organic EL panel manufacturing system, and film forming method
KR20200049379A (en) Alignment apparatus, film forming apparatus, alignment method, film forming method, and manufacturing method of electronic device
KR102650613B1 (en) Electrostatic chuk system, apparatus for forming film, adsorption method, method for forming film, and manufacturing method of electronic device
KR20200014103A (en) Electrostatic chuk system, film formation apparatus, suction method, film formation method, and manufacturing method of electronic device
KR102501609B1 (en) Film forming apparatus, film forming method and manufacturing method of electronic device
WO2023210464A1 (en) Film deposition device, film deposition method, electronic device manufacturing method, and computer program recording medium

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant