CN114770777B - Swing mechanism with gas fluid sealing structure and multi-wire saw - Google Patents
Swing mechanism with gas fluid sealing structure and multi-wire saw Download PDFInfo
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- CN114770777B CN114770777B CN202210433878.9A CN202210433878A CN114770777B CN 114770777 B CN114770777 B CN 114770777B CN 202210433878 A CN202210433878 A CN 202210433878A CN 114770777 B CN114770777 B CN 114770777B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 38
- 239000012530 fluid Substances 0.000 title claims abstract description 32
- 238000007789 sealing Methods 0.000 title claims abstract description 32
- 230000000149 penetrating effect Effects 0.000 claims abstract description 5
- 238000003825 pressing Methods 0.000 claims description 28
- 230000004888 barrier function Effects 0.000 claims description 13
- 239000012535 impurity Substances 0.000 abstract description 23
- 238000005520 cutting process Methods 0.000 abstract description 21
- 239000000428 dust Substances 0.000 abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 11
- 235000012431 wafers Nutrition 0.000 abstract description 9
- 239000007789 gas Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 8
- 230000001012 protector Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention relates to the technical field of sealing protection, in particular to a swinging mechanism with an air fluid sealing structure and a multi-wire cutting machine. The swing mechanism with the gas fluid seal structure includes: the swinging part is formed with a swinging part for supporting the swinging platform, and can form a swinging inclination angle by taking any center line of a plane where the swinging part is positioned as an axis, so that the swinging part drives the swinging platform to incline; the bearing is arranged between the supporting seat and the swinging piece; the supporting seat is provided with an air flow channel penetrating the swinging piece, and air flow blown out by the air flow channel is formed between the swinging platform and the bearing, so that the bearing is isolated by the air flow. The invention can effectively avoid the situation that the bearing is corroded or damaged by impurities such as water vapor, dust and the like caused by poor sealing performance, thereby prolonging the service life of the bearing and improving the swinging precision of equipment and the cutting quality of wafers.
Description
Technical Field
The invention relates to the technical field of sealing protection, in particular to a swinging mechanism with an air fluid sealing structure and a multi-wire cutting machine.
Background
The multi-wire cutting machine is a cutting device which breaks down various hard and brittle materials such as silicon carbide (SiC), sapphire and the like into sheets through the high-speed reciprocating motion of diamond wires and a swinging wire mesh structure formed by the diamond wires. Silicon carbide and gallium nitride as third-generation semiconductor materials have excellent properties such as forbidden band, drift velocity, thermal conductivity, high temperature resistance and the like which are several times higher than those of traditional silicon materials, have excellent properties such as radiation resistance and the like, and have great application potential in the aspects of high-temperature, high-frequency and high-power electronic devices.
In the processing procedure of the third generation semiconductor material, the cutting technology of the crystal is particularly important, and the cutting mode of the crystal is mainly divided into material swing and wire mesh swing, wherein the substrate wafer cut by the wire mesh swing is better. The swinging wire net in the multi-wire cutting machine is one of the most critical parts, the swinging precision requirement is higher, but the control difficulty of swinging cutting of the wire net is high, the structure is complex, and cutting fluid is needed in the cutting process, so that the cutting equipment is in an environment containing water vapor, dust and other impurities, and core critical parts such as a bearing are extremely easy to corrode and damage due to poor sealing performance, thereby influencing the precision of cutting wafers and the service life of the multi-wire cutting machine.
Disclosure of Invention
In view of this, the present application aims to provide a swing mechanism with an air-fluid sealing structure and a multi-wire saw, so as to solve the problem that when the multi-wire saw is used for cutting wafers, because the cutting equipment is in an environment containing impurities such as water vapor and dust, the critical parts such as bearings are extremely easy to be corroded and damaged due to poor sealing performance, thereby affecting the accuracy of cutting wafers and the service life of the multi-wire saw.
The first aspect of the invention provides a swinging mechanism with a gas-fluid sealing structure, which comprises a bearing and a swinging platform, wherein the swinging mechanism with the gas-fluid sealing structure further comprises:
the swinging part is formed with a swinging part for supporting the swinging platform, and can form a swinging inclination angle by taking any center line of a plane where the swinging part is positioned as an axis, so that the swinging part drives the swinging platform to incline;
the bearing is arranged between the supporting seat and the swinging piece; the supporting seat is provided with an air flow channel penetrating the swinging piece, and air flow blown out by the air flow channel is formed between the swinging platform and the bearing, so that the bearing is isolated by the air flow.
Preferably, the air flow passage is formed as an air flow outlet toward one end of the swing member, the air flow passage is formed in plurality, the air flow outlets are communicated with each other, and the air flow directions in the air flow passages are the same, so that the air flow convexes to form an air flow protection barrier formed between the swing platform and the bearing.
Preferably, a first groove is formed on the side portion of the swinging member, a second groove corresponding to the first groove is formed on the side portion of the supporting seat, an air cavity is formed by surrounding the first groove and the second groove, and the air cavity is formed on the air flow channel communicated with the bearing through the swinging platform.
Preferably, the air chambers are formed in plurality, and the plurality of air chambers are respectively disposed at both sides of the air flow protection barrier.
Preferably, the swing mechanism with the gas-fluid sealing structure further comprises a protection piece respectively abutted against the swing piece and the supporting seat, so that the bearing is isolated from the external working environment.
Preferably, the guard includes a first guard abutting the swing member and a second guard abutting the support base;
the first guard abuts against the second guard, and the first guard and/or the second guard are/is formed with guard portions protruding toward the air flow passage.
Preferably, one end of the air flow channel is formed as an air flow inlet communicating with an air source device;
the swing mechanism with the air flow sealing structure further comprises a metering adjusting piece connected with the air source equipment, and the metering adjusting piece is arranged between the air flow inlet and the air source equipment.
Preferably, the swing member is formed in a disc-shaped structure, and the support base is formed with a connection portion connected to a circumferential side wall of the swing member; the bearing is formed into an annular structure, an inner ring of the annular structure is abutted with the side wall of the swinging piece, and an outer ring of the annular structure is abutted with the connecting part; the air flow channel is arranged annularly along the circumferential side wall of the swinging piece.
Preferably, the part of the connecting part corresponding to the bearing is recessed inwards, so that the connecting part is formed into a ladder-shaped structure, and one end of the bearing is abutted with the ladder-shaped structure of the connecting part;
the swing mechanism with the gas fluid sealing structure further comprises a pressing piece connected with the supporting seat, wherein the pressing piece is provided with a pressing part protruding towards the bearing, and the pressing part is abutted to the other end of the bearing.
The second aspect of the invention provides a multi-wire cutting machine, which comprises the swinging mechanism with the gas fluid sealing structure.
Compared with the prior art, the invention has the beneficial effects that:
according to the swing mechanism with the gas-fluid sealing structure, the bearing is isolated from impurities such as water vapor and dust by the gas flow, so that the condition that the bearing is corroded or damaged by the impurities such as the water vapor and the dust due to poor sealing performance is effectively avoided, the service life of the bearing is prolonged, and the swing precision and the cutting quality of wafers are improved.
In addition, the multi-wire saw with the swinging mechanism of the gas fluid sealing structure can ensure that the cutting quality of the wafer meets the product requirement, and has stable and reliable work and high efficiency, thereby prolonging the service life of the multi-wire saw and reducing the maintenance working hours.
In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural view of a swing mechanism with an air-fluid seal structure according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of the structure at A in FIG. 1;
FIG. 3 is a schematic diagram of the structure at B in FIG. 2;
fig. 4 is a schematic diagram of an airflow delivery process of a swing mechanism with an airflow seal structure according to an embodiment of the present invention.
Icon: 10-swinging member; 11-a swinging part; 12-a first groove; 20-supporting seats; 21-a second groove; 22-connecting part; 30-air flow channel; 31-an air flow inlet; 32-an air flow outlet; 33-air cavity; 41-a first guard; 42-a second guard; 43-guard; 50-pressing piece; 51-a pressing part; 60-air source equipment; 70-a metering adjustment; 80-bearing; 81-an outer ring; 82-an inner ring; 90-swinging platform.
Detailed Description
The following detailed description is provided to assist the reader in obtaining a thorough understanding of the methods, apparatus, and/or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatuses, and/or systems described herein will be apparent after an understanding of the present disclosure. For example, the order of operations described herein is merely an example, and is not limited to the order set forth herein, but rather, obvious variations may be made upon an understanding of the present disclosure, other than operations that must occur in a specific order. In addition, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.
The features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein have been provided solely to illustrate some of the many possible ways of implementing the methods, devices, and/or systems described herein that will be apparent after a review of the disclosure of the present application.
In the entire specification, when an element (such as a layer, region or substrate) is described as being "on", "connected to", "bonded to", "over" or "covering" another element, it may be directly "on", "connected to", "bonded to", "over" or "covering" another element or there may be one or more other elements interposed therebetween. In contrast, when an element is referred to as being "directly on," directly connected to, "or" directly coupled to, "another element, directly on," or "directly covering" the other element, there may be no other element intervening therebetween.
As used herein, the term "and/or" includes any one of the listed items of interest and any combination of any two or more.
Although terms such as "first," "second," and "third" may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections should not be limited by these terms. Rather, these terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first member, component, region, layer or section discussed in examples described herein could also be termed a second member, component, region, layer or section without departing from the teachings of the examples.
For ease of description, spatially relative terms such as "above … …," "upper," "below … …," and "lower" may be used herein to describe one element's relationship to another element as illustrated in the figures. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "upper" relative to another element would then be oriented "below" or "lower" relative to the other element. Thus, the term "above … …" includes both orientations "above … …" and "below … …" depending on the spatial orientation of the device. The device may also be otherwise positioned (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of the disclosure. Singular forms also are intended to include plural forms unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" are intended to specify the presence of stated features, integers, operations, elements, and/or groups thereof, but do not preclude the presence or addition of one or more other features, integers, operations, elements, and/or groups thereof.
Variations from the shapes of the illustrations as a result, of manufacturing techniques and/or tolerances, are to be expected. Accordingly, the examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shapes that occur during manufacture.
The features of the examples described herein may be combined in various ways that will be apparent after an understanding of the disclosure of the present application. Further, while the examples described herein have a variety of configurations, other configurations are possible as will be apparent after an understanding of the present disclosure.
According to a first aspect of the present invention, there is provided a swing mechanism having an air flow sealing structure, which includes a swing member 10, a support base 20, and an air flow passage 30.
Hereinafter, a specific structure of the above-described components of the swing mechanism having the gas-fluid seal structure according to the present embodiment will be described.
In the present embodiment, as shown in fig. 1 to 4, the swing mechanism having the gas-fluid sealing structure is used to protect the bearing 80 supporting the swing platform 90, so as to avoid the influence of moisture, dust and other impurities on the bearing 80, such as corrosion or damage. The swinging member 10 of the swinging mechanism having the gas fluid sealing structure is formed with a swinging part 11 for supporting the swinging platform 90, and the swinging platform 90 and the swinging part 11 can be connected by a fastener such as a bolt or a screw; the swinging part 11 can form a swinging inclination angle by taking any center line of a plane where the swinging part is positioned as an axis, so that the swinging piece 10 drives the swinging platform 90 to incline, wherein the inclination angle is preferably +/-12 degrees; the pivoting of the pivoting platform 90 is effected in successive and repeated tilting movements of the pivoting member 10.
It should be noted that the swinging motion may be formed to swing reciprocally with one center line of the plane in which the swinging portion 11 is located as an axis, or may be formed to form a swinging inclination angle with a plurality of center lines of the plane in which the swinging portion 11 is located as an axis, so that the swinging member 10 tilts in different directions, and the platform is driven to swing during the motion in which the tilting direction of the swinging member 10 is continuously and repeatedly changed.
In a preferred embodiment, as shown in fig. 1 and 2, the swinging member 10 is formed in a disc-shaped structure, for example, may be formed as a swinging wheel provided horizontally, and the swinging portion 11 is formed on top of the disc-shaped structure, that is, the swinging portion 11 is formed in a circular planar structure so that the swinging member 10 can swing around any center line of the swinging portion 11 as an axis. Further, the swing portion 11 is recessed toward the inside of the swing member 10, and the circumferential direction of the swing member 10 is formed as an annular limit boss, so that the swing platform 90 is disposed within the ring of the limit boss. However, the structure of the swinging member 10 is not limited thereto, and the swinging member 10 may be formed in a columnar or plate-like structure, as long as the swinging member 10 is capable of swinging the swinging platform 90.
Further, in the present embodiment, as shown in fig. 2, the bearing 80 is formed in a ring-shaped structure, the inner ring of the ring-shaped structure of the bearing 80 abuts against the circular side wall of the swing member 10, and the bearing 80 is preferably connected with the bottom of the side wall of the swing member 10, such that the swing platform 90 and the bearing 80 are respectively provided at both sides of the swing member 10, and the bearing 80 can give good support to the swing member 10, thereby improving the stability of the swing member 10 during swing. The positioning of the bearing 80 at the bottom of the side wall of the swinging member 10 merely means that the bearing 80 is positioned at a position below the side wall of the swinging member 10, and does not mean that the bearing 80 is positioned at the bottommost end of the swinging member 10.
In the embodiment, as shown in fig. 1 to 3, the bearing 80 is a cross cylindrical roller bearing, the bearing 80 includes an inner ring 82, an outer ring 81, and rolling bodies, the inner ring 82 and the outer ring 81 are each formed in a ring shape, the inner ring 82 is fitted in the outer ring 81, and the rolling bodies are provided between the inner ring 82 and the outer ring 81. The inner ring of the annular structure abutting the swinging member 10 as described above is the inner wall of the outer ring 81.
In the present embodiment, as shown in fig. 1 to 3, a support base 20 of a swing mechanism having a gas fluid seal structure is connected to a swing member 10, and the support base 20 may be formed in a plate-like or table-like structure; the supporting seat 20 is formed with a connecting portion 22 connected with the circumferential side wall of the disc-shaped swinging member 10, so that the side wall of the swinging member 10 and the connecting portion 22 form clearance fit, and the connecting portion 22 may be a through hole penetrating through the supporting seat 20 or a blind hole recessed along the top of the supporting seat 20.
The connecting portion 22 may be adapted to the shape of the swinging member 10, so that the supporting base 20 provides a certain supporting force to the swinging member 10, for example, when the swinging member 10 is formed into a rectangular structure, the connecting portion 22 is correspondingly formed into a rectangular groove.
Further, in the embodiment, as shown in fig. 1 to 3, the bearing 80 is provided between the support base 20 and the swing member 10; the outer ring of the bearing 80 abuts against the connecting portion 22, and as described above, the outer ring of the bearing 80 is a side wall of the outer ring 81 of the bearing 80. In a preferred embodiment, the connecting portion 22 is recessed inward corresponding to the position of the bearing 80, so that the connecting portion 22 is formed into a stepped structure, one end of the bearing 80 abuts against the stepped structure of the connecting portion 22, and both the inner ring 82 and the outer ring 81 on the side of the bearing 80 near the supporting seat 20 abut against the recessed stepped structure of the supporting seat 20, so that the bearing 80 is fixed on the supporting seat 20.
In order to facilitate the assembly and disassembly of the bearing 80 on the support base 20, in this embodiment, as shown in fig. 2 to 3, the swing mechanism with the gas fluid seal structure further includes a pressing member 50 connected to the support base 20, the pressing member 50 is disposed below the bearing 80, and the pressing member 50 and the support base 20 are preferably detachably connected, such as by a screw, so as to facilitate the assembly or disassembly of the bearing 80; the pressing member 50 is formed in a plate-like, block-like or rod-like structure; the pressing member 50 may be formed in one or more, and when the number of the pressing members 50 is one, the pressing members 50 are correspondingly formed in a ring-shaped plate-like structure such that the bearing 80 is stably fixed between the pressing members 50 and the support base 20, and when the number of the pressing members 50 is plural, the plurality of pressing members 50 may be formed in a block-like or rod-like structure uniformly distributed along the circumferential direction of the bearing 80.
Further, in order to further improve the connection stability of the bearing 80 and the support base 20, in the embodiment, as shown in fig. 2 and 3, the pressing member 50 is formed with the pressing portion 51 protruding toward the bearing 80, and as described above, when the pressing member 50 is formed in the annular plate-like structure, the pressing portion 51 is correspondingly formed in the annular convex structure; when the pressing member 50 is formed in a plurality of block-like or rod-like structures, the pressing portion 51 may be formed in a block-like or plate-like convex structure. The pressing part 51 is abutted against the outer ring 81 of the bearing 80 on the side close to the supporting seat 20, so that the pressing part 51 and the stepped structure of the supporting seat 20 press the bearing 80, and the bearing 80 and the supporting seat 20 are firmly connected.
In this embodiment, as shown in fig. 1 to 4, in order to avoid corrosion or damage to the bearing 80 caused by moisture, dust, or other impurities generated during operation of the swing platform 90, the bearing 80 is protected by air flow to isolate the bearing 80 from the working environment, specifically, the support base 20 is formed with an air flow channel 30 penetrating through the swing member 10, one end of the air flow channel 30 facing the swing member 10 is formed with an air flow outlet 32, the other end of the air flow channel 30 is formed with an air flow inlet 31 communicating with the air source device 60, the air flow inlet 31 may be formed with a circular or square hole structure, and the air flow outlet 32 has a structure similar to the air flow inlet 31; the gas source device 60 is formed as a positive pressure gas source device 60 to deliver compressed gas, which may be air or nitrogen, etc., to the gas flow channel 30. The air flow is blown to the swinging member 10 from the air flow outlet 32, and the air flow blown out from the air flow passage 30 is formed between the swinging platform 90 and the bearing 80, so that the bearing 80 is isolated from the air flow, and the bearing 80 is prevented from being corroded or damaged by moisture, dust or other impurities.
Further, in the present embodiment, as shown in fig. 1 to 4, as described above, the air flow passages 30 are provided in a ring shape along the circumferential side wall of the disc-shaped swing member 10, so that the air flow can completely isolate the bearing 80 from the working environment, the air flow inlets 31 on the ring-shaped air flow passages 30 may be provided in one or more, when the number of the air flow inlets 31 is plural, the plurality of air flow inlets 31 are respectively communicated with the plurality of air source devices 60, and the plurality of air flow inlets 31 are preferably uniformly distributed along the circumferential direction of the ring-shaped air flow passages 30, so that the air flow distribution in the air flow passages 30 is uniform, thereby effectively protecting the bearing 80.
It should be noted that, the air flow channel 30 is preferably disposed on the fixed support base 20 to ensure the stable conveying process of the air flow, and the support base 20 with the air flow channel 30 may be formed by casting; however, the installation position of the air flow channel 30 is not limited to the supporting seat 20, but may be disposed on the swinging member 10, when the air flow channel 30 is formed on the swinging member 10, the air flow is blown to the supporting seat 20 from the air flow outlet 32 and is formed between the swinging platform 90 and the bearing 80, so that the bearing 80 is isolated by the air flow, and corrosion or damage of the bearing 80 by moisture or dust and other impurities is avoided.
In a preferred embodiment, as shown in fig. 2 and 3, the air flow channels 30 are formed in a plurality, the air flow outlets 32 are communicated with each other, and the air flow directions in the air flow channels 30 are the same, so that a plurality of air flows convect above the bearing 80 to form an air flow protection barrier, which is formed between the swing platform 90 and the bearing 80, and the air flow protection barrier can completely close the gap between the swing member 10 and the support base 20, thereby achieving the purpose of protecting the bearing 80 from being corroded or damaged by moisture or dust and other impurities. The clearance between the swinging member 10 and the support base 20 is about 3mm to 4mm, and the clearance between the swinging member 10 and the support base 20 is formed with the assembly accuracy, which is unavoidable.
Further, in the embodiment, the plurality of air flow passages 30 may be a plurality of air flow outlets 32 provided with a plurality of air flow inlets 31 correspondingly, or the plurality of air flow outlets 32 may share one air flow inlet 31, as long as it is ensured that the air in the air source device 60 can be delivered from the air flow inlets 31 to the air flow outlets 32 and form protection for the bearing 80.
In an embodiment, as shown in fig. 3, the number of air flow channels 30 is preferably two, the two air flows forming a convection to facilitate control of the location of the air flow protective barrier.
In order to further protect the bearing 80 from being corroded and damaged by moisture, dust or other impurities, in this embodiment, as shown in fig. 2 and 3, a first groove 12 is formed on the side portion of the swinging member 10, a second groove 21 corresponding to the first groove 12 is formed on the side portion of the supporting seat 20, the first groove 12 and the second groove 21 enclose an air cavity 33, the air cavity 33 is formed on an air flow channel 30 communicating with the bearing 80 on the swinging platform 90, and if moisture or impurities enter the air flow channel 30, the moisture or impurities can be timely intercepted by the air cavity 33.
In the embodiment, the air chambers 33 are respectively disposed at two sides of the air flow protection barrier, so that even if impurities such as water vapor or dust break through the air flow protection barrier, the impurities such as water vapor or dust can be intercepted by the air chamber 33 between the air flow protection barrier and the bearing 80, thereby further preventing the impurities such as water vapor or dust from entering the bearing 80.
It should be noted that, the number of the air cavities 33 is preferably two, and the two air cavities 33 can not only protect the bearing 80, but also ensure the structural strength of the swinging member 10, so that the swinging member 10 cannot be damaged due to too many grooves in the swinging process, and thus the swinging precision of the swinging member 10 is ensured.
Further, in the embodiment, as shown in fig. 2 and 3, as described above, the first groove 12 is recessed inward along the circumferential side wall of the disc-shaped swing member 10 to form the first groove 12 of the annular structure, and similarly, the second groove 21 is recessed inward along the side wall of the connecting portion 22 of the supporting seat 20 to form the second groove 21 of the annular structure; the first groove 12 and the second groove 21 enclose an air cavity 33, which is correspondingly formed in a ring shape.
It should be noted that, since the first groove 12 is disposed on the swinging member 10, and the swinging member 10 needs to perform the swinging motion frequently, in the preferred embodiment, the groove wall of the first groove 12 is formed in an arc-shaped structure, so that stress concentration is avoided due to the corner structure of the groove wall of the first groove 12, thereby reducing the occurrence rate of fatigue crack or fracture of the swinging member 10. The wall of the second recess 21 may be formed in an arc shape or a rectangular shape or the like.
In this embodiment, as shown in fig. 1 to 3, the swing mechanism with the air-fluid sealing structure further includes a protection member respectively abutting against the swing member 10 and the support base 20, and as described above, the protection member is formed in a ring-shaped structure to close the gap between the swing member 10 and the support base 20 under the protection member, so that the bearing 80 is isolated from the external working environment, and most of the moisture and impurities are prevented from entering the air flow channel 30 (the air flow in the air flow channel 30, the air flow protection barrier or the air cavity 33 forms a reinforced protection for the bearing 80).
In addition, in order to enhance the protective effect of the protector, in the embodiment, as shown in fig. 1 to 3, the protector includes a first protector 41 abutting against the swing member 10 and a second protector 42 abutting against the support base 20, the first protector 41 abutting against the second protector 42, thus ensuring that the protector is horizontally disposed, thereby ensuring that the protector can be simultaneously closely attached to the swing member 10 and the support base 20 to enhance the sealing effect; further, in the embodiment, the first and/or second shields 41 and 42 are formed with the shield portions 43 protruding toward the air flow passage 30, and as described above, the shield portions 43 are correspondingly formed in an annular structure protruding toward the annular air flow passage 30 to enhance the sealability of the air flow passage 30.
It should be noted that, the first guard 41 and the second guard 42 are preferably connected by screws, but when actually installed, a gap may exist between the first guard 41 and the second guard 42, and the protruding guard 43 may prevent impurities such as water vapor or dust from directly entering the air flow channel 30, so as to further effectively protect the bearing 80.
In the present embodiment, any one of the plurality of air flow channels 30 extends to the side of the guard 43, so that when the impurities such as moisture or dust are located around the guard 43, the air flow in the air flow channel 30 can blow the impurities such as moisture or dust out of the guard.
In an embodiment, the guard 43 is preferably arranged on a different vertical line than the gap between the oscillating piece 10 and the support base 20 (i.e. the guard 43 is staggered from the gap between the oscillating piece 10 and the support base 20), avoiding that impurities directly enter the air cavity 33.
Further, in the present embodiment, as shown in fig. 1 to 4, in order to secure the effectiveness of the swing mechanism having the gas flow sealing structure, the swing mechanism having the gas flow sealing structure further includes a metering regulator 70 connected to the gas source device 60, the metering regulator 70 being disposed between the gas flow inlet 31 and the gas source device 60 to control the flow rate of the gas into the gas flow passage 30 so that a gas flow or a gas flow protection barrier is formed at a specifiable position, thereby effectively protecting the bearing 80. In an embodiment, the metering adjustment member 70 may be a gas flow control valve or a gas flow meter in combination with a regulating valve.
The swinging mechanism with the gas-fluid sealing structure has the advantages of simple structure, low cost and good sealing effect, and effectively avoids the condition that the bearing is corroded or damaged by impurities such as water vapor, dust and the like due to poor sealing performance in a mode that the bearing is isolated from impurities such as water vapor, dust and the like by air flow, so that the service life of the bearing is prolonged, and the swinging precision and the cutting quality of wafers are improved.
According to the second aspect of the invention, the multi-wire saw is provided, so that the cutting quality of a wafer can be ensured to meet the product requirement, the working stability and reliability of the multi-wire saw are ensured, the service life of the multi-wire saw is prolonged, the maintenance man-hour is reduced, and the working efficiency of the multi-wire saw is improved.
Finally, it should be noted that: the foregoing examples are merely specific embodiments of the present application, and are not intended to limit the scope of the present application, but the present application is not limited thereto, and those skilled in the art will appreciate that while the foregoing examples are described in detail, the present application is not limited thereto. Any person skilled in the art may modify or easily conceive of the technical solution described in the foregoing embodiments, or make equivalent substitutions for some of the technical features within the technical scope of the disclosure of the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application, and are intended to be included in the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (9)
1. The utility model provides a swing mechanism with gaseous fluid seal structure, includes bearing and swing platform, its characterized in that, swing mechanism with gaseous fluid seal structure still includes:
the swinging part is formed with a swinging part for supporting the swinging platform, and can form a swinging inclination angle by taking any center line of a plane where the swinging part is positioned as an axis, so that the swinging part drives the swinging platform to incline;
the bearing is arranged between the supporting seat and the swinging piece; the supporting seat is provided with an air flow channel penetrating the swinging piece, and air flow blown out by the air flow channel is formed between the swinging platform and the bearing so as to isolate the bearing from air flow;
the air flow channel is formed into an air flow outlet towards one end of the swinging piece, a plurality of air flow channels are formed, a plurality of air flow outlets are communicated with each other, and the air flow directions in the air flow channels are the same, so that a plurality of air flows are opposite to each other to form an air flow protection barrier, and the air flow protection barrier is formed between the swinging platform and the bearing.
2. The swing mechanism with an air-fluid sealing structure according to claim 1, wherein a first groove is formed in a side portion of the swing member, a second groove provided in correspondence with the first groove is formed in a side portion of the support seat, and an air cavity is defined by the first groove and the second groove, the air cavity being formed in the air flow passage through which the swing platform communicates with the bearing.
3. The swing mechanism with an air-fluid tight structure according to claim 2, wherein said air chambers are formed in plural, and a plurality of said air chambers are provided on both sides of said air-flow protection barrier, respectively.
4. The swing mechanism with an air-fluid seal structure according to claim 1, further comprising a guard member abutting against the swing member and the support base, respectively, to isolate the bearing from an external working environment.
5. The swing mechanism with an air-fluid seal according to claim 4, wherein said guard includes a first guard abutting said swing member and a second guard abutting said support base;
the first guard abuts against the second guard, and the first guard and/or the second guard are/is formed with guard portions protruding toward the air flow passage.
6. The swing mechanism with an air-fluid seal according to claim 1, wherein one end of said air flow passage is formed as an air flow inlet communicating with an air source device;
the swing mechanism with the air flow sealing structure further comprises a metering adjusting piece connected with the air source equipment, and the metering adjusting piece is arranged between the air flow inlet and the air source equipment.
7. The swing mechanism with a gas fluid seal structure according to claim 1, wherein the swing member is formed in a disc-like structure, and the support base is formed with a connecting portion connected to a circumferential side wall of the swing member; the bearing is formed into an annular structure, an inner ring of the annular structure is abutted with the side wall of the swinging piece, and an outer ring of the annular structure is abutted with the connecting part; the air flow channel is arranged annularly along the circumferential side wall of the swinging piece.
8. The swing mechanism with a gas fluid seal structure according to claim 7, wherein a portion of the connecting portion corresponding to the bearing is recessed inward so that the connecting portion is formed in a stepped structure, and one end of the bearing abuts against the stepped structure of the connecting portion;
the swing mechanism with the gas fluid sealing structure further comprises a pressing piece connected with the supporting seat, wherein the pressing piece is provided with a pressing part protruding towards the bearing, and the pressing part is abutted to the other end of the bearing.
9. A multi-wire saw comprising the swing mechanism having the gas fluid seal structure according to any one of claims 1 to 8.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210433878.9A CN114770777B (en) | 2022-04-24 | 2022-04-24 | Swing mechanism with gas fluid sealing structure and multi-wire saw |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210433878.9A CN114770777B (en) | 2022-04-24 | 2022-04-24 | Swing mechanism with gas fluid sealing structure and multi-wire saw |
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| CN114770777B true CN114770777B (en) | 2024-04-09 |
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| Publication number | Publication date |
|---|---|
| CN114770777A (en) | 2022-07-22 |
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