CN114746820B - 推论装置、推论方法以及推论程序 - Google Patents

推论装置、推论方法以及推论程序 Download PDF

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Publication number
CN114746820B
CN114746820B CN202080082402.4A CN202080082402A CN114746820B CN 114746820 B CN114746820 B CN 114746820B CN 202080082402 A CN202080082402 A CN 202080082402A CN 114746820 B CN114746820 B CN 114746820B
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processing
series data
unit
inference
data group
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CN114746820A (zh
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筒井拓郎
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/04—Inference or reasoning models
    • G06N5/045—Explanation of inference; Explainable artificial intelligence [XAI]; Interpretable artificial intelligence
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0243—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults model based detection method, e.g. first-principles knowledge model
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/04—Inference or reasoning models
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/0464—Convolutional networks [CNN, ConvNet]

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Software Systems (AREA)
  • Evolutionary Computation (AREA)
  • Data Mining & Analysis (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Artificial Intelligence (AREA)
  • Automation & Control Theory (AREA)
  • Medical Informatics (AREA)
  • Computational Linguistics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • General Factory Administration (AREA)
CN202080082402.4A 2019-11-29 2020-11-16 推论装置、推论方法以及推论程序 Active CN114746820B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019217439 2019-11-29
JP2019-217439 2019-11-29
PCT/JP2020/042564 WO2021106646A1 (ja) 2019-11-29 2020-11-16 推論装置、推論方法及び推論プログラム

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CN114746820A CN114746820A (zh) 2022-07-12
CN114746820B true CN114746820B (zh) 2025-06-03

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US (1) US20230004837A1 (https=)
JP (1) JP7224492B2 (https=)
KR (1) KR20220106999A (https=)
CN (1) CN114746820B (https=)
TW (1) TWI867094B (https=)
WO (1) WO2021106646A1 (https=)

Families Citing this family (2)

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Publication number Priority date Publication date Assignee Title
KR102539835B1 (ko) * 2023-01-10 2023-06-02 (재) 한국건설품질연구원 3d 카메라를 이용한 디지털 트윈 생성 및 손상 분석 시스템
WO2025249225A1 (ja) * 2024-05-29 2025-12-04 東京エレクトロン株式会社 コンピュータプログラム、学習モデルの生成方法、情報処理方法及び情報処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101622688A (zh) * 2007-09-11 2010-01-06 东京毅力科创株式会社 信息处理装置、信息处理方法以及程序
KR20190046018A (ko) * 2017-10-25 2019-05-07 한국전자통신연구원 네트워크에 대한 이상행위 탐지 방법 및 이를 이용한 장치

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0736505A (ja) * 1993-07-21 1995-02-07 Nkk Corp 制御対象の同定・制御方法
JPH10260718A (ja) * 1997-03-19 1998-09-29 Fuji Electric Co Ltd ダムにおける水量予測方法
JP4635194B2 (ja) 2004-12-02 2011-02-16 財団法人石油産業活性化センター 異常検知装置
US7359759B2 (en) * 2005-10-31 2008-04-15 Taiwan Semiconductor Manufacturing Company Method and system for virtual metrology in semiconductor manufacturing
JP4568790B1 (ja) * 2009-04-14 2010-10-27 シャープ株式会社 出来映え予測装置、出来映え予測方法、出来映え予測プログラム、及び、プログラム記録媒体
JP6143667B2 (ja) * 2013-12-27 2017-06-07 三菱重工業株式会社 予測システム、監視システム、運転支援システム、ガスタービン設備及び予測方法
KR102084930B1 (ko) * 2015-06-03 2020-03-05 미쓰비시덴키 가부시키가이샤 추론 장치 및 추론 방법
US10304154B2 (en) * 2017-04-24 2019-05-28 Intel Corporation Coordination and increased utilization of graphics processors during inference
US11131989B2 (en) * 2017-08-02 2021-09-28 Strong Force Iot Portfolio 2016, Llc Systems and methods for data collection including pattern recognition
US11187992B2 (en) * 2017-10-23 2021-11-30 Applied Materials, Inc. Predictive modeling of metrology in semiconductor processes
JP6481787B1 (ja) * 2018-02-14 2019-03-13 オムロン株式会社 デバイス選択装置、データセット選択装置、デバイス選択方法及びプログラム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101622688A (zh) * 2007-09-11 2010-01-06 东京毅力科创株式会社 信息处理装置、信息处理方法以及程序
KR20190046018A (ko) * 2017-10-25 2019-05-07 한국전자통신연구원 네트워크에 대한 이상행위 탐지 방법 및 이를 이용한 장치

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Publication number Publication date
JP7224492B2 (ja) 2023-02-17
KR20220106999A (ko) 2022-08-01
CN114746820A (zh) 2022-07-12
US20230004837A1 (en) 2023-01-05
JPWO2021106646A1 (https=) 2021-06-03
TW202123057A (zh) 2021-06-16
WO2021106646A1 (ja) 2021-06-03
TWI867094B (zh) 2024-12-21

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