CN114696769A - Quartz crystal frequency fine adjustment system and device - Google Patents

Quartz crystal frequency fine adjustment system and device Download PDF

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Publication number
CN114696769A
CN114696769A CN202210370573.8A CN202210370573A CN114696769A CN 114696769 A CN114696769 A CN 114696769A CN 202210370573 A CN202210370573 A CN 202210370573A CN 114696769 A CN114696769 A CN 114696769A
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China
Prior art keywords
fixed
quartz crystal
tuning
frequency
frequency fine
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CN202210370573.8A
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CN114696769B (en
Inventor
王跃明
赵建锋
王东平
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Hefei Tongjing Electronics Co ltd
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Hefei Tongjing Electronics Co ltd
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Publication of CN114696769A publication Critical patent/CN114696769A/en
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414Resonance frequency
    • H03H2003/0478Resonance frequency in a process for mass production

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The invention provides a quartz crystal frequency fine tuning system and a device, which comprises a base, a rotary hinged seat, a lifting rod, a sliding seat, a fixed frame, a fixed plate, a conduction bracket, a connection socket, a connection seat, a lifting mechanism and an angle adjusting mechanism, wherein a plurality of quartz crystals are placed in a holding tank of the fixed plate, the height of the fixed plate is adjusted through the lifting mechanism, the inclination angle of the fixed plate is adjusted through the angle adjusting mechanism, the quartz crystals can be conveniently adjusted and processed by etching equipment, a relay group can select corresponding quartz crystals to measure the vibration frequency of the quartz crystals in real time during processing, the processing fine tuning equipment can be conveniently adjusted, due to the selection function of the relay group, the quartz crystals on the whole fixed plate can be processed at one time each time to realize the batch processing of the quartz crystals, the fixed plate is detachably arranged on the fixed frame, and realize electric connection through the cooperation of connecting socket and connecting seat, be convenient for place quartz crystal in the holding tank of toward the fixed plate.

Description

Quartz crystal frequency fine adjustment system and device
Technical Field
The invention relates to the technical field of quartz crystal processing, in particular to a system and a device for fine tuning of frequency of a quartz crystal.
Background
The quartz crystal resonator has the characteristics of excellent frequency stability, high Q value, high oscillation frequency, small volume and the like, and is widely applied to military affairs, communication, computers, household appliances and various industrial electronic devices, the frequency of the quartz crystal resonator is adjusted with higher and higher precision along with the continuous development of scientific technology, which is a hot point problem in research and production at home and abroad, in order to improve the precision of the quartz crystal resonator, the quartz crystal needs to be finely adjusted in the production process, and generally adopted modes comprise modes such as laser etching, ion etching, magnetron sputtering and the like, and the energy is transmitted to a film layer on the surface of the quartz crystal, so that the film layer is thinned and the quality is changed by peeling the film layer from a bottom layer, and the effect of finely adjusting the frequency of the quartz crystal is realized.
The utility model provides a quartz crystal frequency piece quality detection device that publication number is CN207351546U, it establishes on last solid fixed splint and lower solid fixed splint through the detection port who will pick up the frequency ware, then place quartz crystal and detect on last solid fixed splint and lower solid fixed splint, thereby realize picking up the frequency ware and detecting quartz crystal frequency, the fine setting in the later stage of being convenient for, this also is present quartz crystal frequency fine setting system's conventional setting, only can detect fine setting a quartz crystal at every turn, the quartz crystal that has adjusted all will be taken off after the adjustment finishes at every turn, then install newly, quartz crystal's size is less, so operate, the low of efficiency ten minutes, and very trouble when placing quartz crystal.
Disclosure of Invention
The present invention is directed to a system and a device for fine tuning the frequency of a quartz crystal, so as to solve the above problems.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides a quartz crystal frequency fine setting system, includes the base, rotates articulated seat, lifter, sliding seat, mount, fixed plate, switches on support, connect socket, connecting seat, elevating system and angle adjustment mechanism, wherein:
two rotary hinged seats are symmetrically fixed on two sides of the base, lifting rods which are oppositely arranged are respectively fixed at the upper ends of the two rotary hinged seats, a sliding seat is arranged on the lifting rod in a sliding way, a U-shaped fixed frame is fixed between the two sliding seats, the inner side of the fixing frame is provided with a sliding groove, the bottom of the inner side of the fixing frame is fixed with a connecting seat, the front end of the fixing plate is provided with a plurality of holding tanks, the holding tanks are internally fixed with a conducting bracket for fixing the quartz crystal and conducting electricity, the bottom of the fixed plate is fixed with a connecting socket, a connecting circuit is arranged in the fixed plate, the connecting bracket is used for electrically connecting the conducting bracket in each accommodating groove with the connecting socket independently, the fixing plate is detachably arranged in the fixing frame through the sliding groove, the conducting bracket corresponds to the connecting socket in position, and is inserted into the connecting socket when the fixing plate is installed in the fixing frame;
the lifting rod is fixed with a lifting mechanism for driving the sliding seat to move along the lifting rod, the base is fixed with an angle adjusting mechanism for driving the lifting rod to rotate around the rotating hinged seat to adjust the inclination angle, the rear end of the fixing frame is fixed with a heating panel, the heating panel is fixed with a relay group, a control box and a communication port, a motion control panel and a measuring circuit board are fixed in the control box, the motion control panel and the measuring circuit board are electrically connected with the communication port and are used for communicating with a computer on the upper level through the communication port, the control ends of the motion control panel and the relay group are electrically connected and are used for controlling the opening and closing of the relay group to select quartz crystals in corresponding accommodating grooves, the connecting seat is electrically connected with the measuring circuit board through the relay group, and the measuring circuit board is used for measuring the selected resonant frequency of the quartz crystals, the lifting mechanism, the angle adjusting mechanism and the motion control plate are electrically connected and are used for working under the driving of the motion control plate.
Preferably, a protection plate is fixed at the front end of the lifting rod, and a transparent window corresponding to the accommodating groove is arranged on the protection plate.
Preferably, every the inside support that switches on of holding tank passes through connecting socket and connecting seat after, all is connected with the relay input in an independent relay group, the relay output in the relay group all connects in parallel on measuring circuit board.
Preferably, elevating system has elevator motor, lift lead screw, elevator and lifting encoder to constitute, be provided with the lift groove of fretwork on the lifter, the sliding seat outside is fixed with the elevator, the lifter upper end is fixed with elevator motor, the inside rotatable lift lead screw that is fixed with of lift inslot, the lift lead screw runs through the elevator and passes through the thread engagement with the elevator and be connected, elevator motor and lift lead screw coaxial coupling, elevator motor is last to be installed rather than coaxial coupling's lifting encoder, elevator motor and lifting encoder and motion control board electric connection.
Preferably, angle adjustment mechanism is by backup pad, slope motor, the articulated seat of adjustment, threaded sleeve, adjustment lead screw, slope encoder and slope sensor, the articulated seat of adjustment is fixed on the heating panel, the backup pad is fixed on the base, the slope motor is fixed in the backup pad, threaded sleeve one end is fixed on the articulated seat of adjustment, and the other end has the adjustment lead screw through threaded connection, the adjustment lead screw other end and slope motor shaft coaxial coupling, install on the slope motor rather than coaxial coupling's slope encoder, be fixed with the slope sensor on the heating panel, slope motor, slope encoder and slope sensor and motion control board electric connection.
Preferably, the measuring circuit board comprises a first pi network, a second pi network, a signal source, a first phase discrimination circuit, a second phase discrimination circuit, a first a/D conversion module and a second a/D conversion module, the output end of a relay in the relay set is inserted in the first pi network and the second pi network in parallel, the signal source is electrically connected with the communication port, the first pi network and the second pi network, and is used for outputting a signal with adjustable frequency and amplitude, the signal is amplified and then is respectively input into the first pi network and the second pi network, the first phase discrimination circuit and the second phase discrimination circuit are respectively electrically connected with the first pi network and the second pi network, and are respectively used for detecting the phase difference between the two pi networks, one end of the first a/D conversion module is electrically connected with the first phase discrimination circuit, the other end of the first a/D conversion module is electrically connected with the communication port, one end of the second a/D conversion module is electrically connected with the second phase discrimination circuit, the other end is electrically connected with the communication port, and the first A/D conversion module and the second A/D conversion module are respectively used for converting the phase difference measured by the first phase discrimination circuit and the second phase discrimination circuit into digital quantity and sending the digital quantity to the communication port.
The invention also provides a quartz crystal frequency fine-tuning device, wherein the frequency fine-tuning device comprises a frequency fine-tuning system, a computer, frequency fine-tuning etching equipment and a two-dimensional moving platform, the frequency fine-tuning system adopts the quartz crystal frequency fine-tuning system, the frequency fine-tuning etching equipment is fixed on the two-dimensional moving platform, the two-dimensional moving platform drives the frequency fine-tuning etching equipment to move under the control of the computer, so that an etching port of the frequency fine-tuning etching equipment faces towards the accommodating groove, the computer is electrically connected with the frequency fine-tuning etching equipment, the frequency fine-tuning etching equipment is used for working under the control of the computer, a communication port of the frequency fine-tuning system is electrically connected with the computer, and the frequency fine-tuning system works under the control of the computer.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the plurality of quartz crystals are placed in the accommodating groove of the fixed plate, the height of the fixed plate is adjusted through the lifting mechanism, the inclination angle of the fixed plate is adjusted through the angle adjusting mechanism, the quartz crystals can be conveniently adjusted and processed by using etching equipment, the corresponding quartz crystals can be selected through the relay group to measure the vibration frequency of the quartz crystals in real time during processing, and the processing fine-tuning equipment can be conveniently adjusted.
Drawings
FIG. 1 is a schematic view of the overall front exploded view of the present invention;
FIG. 2 is an exploded view of the entire back of the present invention;
FIG. 3 is a schematic structural view of the lifting mechanism of the present invention;
FIG. 4 is a schematic structural view of an angle adjustment mechanism according to the present invention;
FIG. 5 is a schematic view of the overall structure of the present invention;
FIG. 6 is a schematic diagram of a control system for the motion control panel of the present invention;
FIG. 7 is a schematic diagram of a system for measuring circuit boards according to the present invention;
fig. 8 is a schematic circuit diagram of the first pi network and the second pi network in the present invention.
In the figure: the device comprises a base 1, a rotary hinged seat 2, a lifting rod 3, a lifting groove 31, a sliding seat 4, a fixed frame 5, a sliding groove 51, a fixed plate 6, a containing groove 61, a conduction support 7, a connection socket 8, a connection seat 9, a lifting mechanism 10, a lifting motor 1001, a lifting lead screw 1002, a lifting block 1003, a lifting encoder 1004, an angle adjusting mechanism 11, a supporting plate 1101, a tilting motor 1102, a hinged seat 1103 adjusting, a threaded sleeve 1104, a lead screw 1105 adjusting, a tilting encoder 1106, a tilting sensor 1107, a protection plate 12, a transparent window 13, a heat dissipation plate 14, a relay group 15, a control box 16, a motion control plate 17, a measurement circuit board 18, a first pi network 1801, a second pi network 1802, a signal source 1803, a first phase discrimination circuit 1804, a second phase discrimination circuit 1805, a first A/D conversion module 1806, a second A/D conversion module 1807 and a communication port 19.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b):
referring to fig. 1 to 8, the present invention provides a technical solution:
the utility model provides a quartz crystal frequency fine setting system, includes base 1, rotates articulated seat 2, lifter 3, sliding seat 4, mount 5, fixed plate 6, switches on support 7, connection socket 8, connecting seat 9, elevating system 10, angle adjustment mechanism 11, guard plate 12, transparent window 13, heating panel 14, relay group 15, control box 16, motion control panel 17, measurement circuit board 18 and communication port 19, wherein:
1 bilateral symmetry of base is fixed with two and rotates articulated seat 2, two the upper end of rotating articulated seat 2 is fixed with the lifter 3 of relative setting respectively, lifter 3 can rotate round rotating articulated seat 2, slidable mounting has sliding seat 4 on the lifter 3, be fixed with the mount 5 of U-shaped between two sliding seats 4, sliding seat 4 can slide from top to bottom on lifter 3 to drive mount 5 up-and-down motion, 5 inboards of mount are provided with sliding tray 51, the inboard bottom of mount 5 is fixed with connecting seat 9.
The front end of the fixing plate 6 is provided with a plurality of holding grooves 61, the holding grooves 61 are used for placing quartz crystals to be finely adjusted, the holding grooves 61 are internally fixed with conducting supports 7 for fixing the quartz crystals and conducting electricity, the bottom of the fixing plate 6 is fixed with a connecting socket 8, the fixing plate 6 is internally provided with a connecting circuit for electrically connecting the conducting supports 7 in each holding groove 61 with the connecting socket 8 independently, the quartz crystals are placed behind the holding grooves 61 and are in contact with the conducting supports 7, so that the quartz crystals are electrically connected with the connecting socket 8, the connecting socket 8 is internally integrated with a plurality of contact pins, the connecting seat 9 is internally provided with jacks corresponding to the contact pins, the conducting supports 7 in each holding groove 61 are mutually independent and do not interfere with each other, the fixing plate 6 is detachably arranged in the fixing frame 5 through a sliding groove 51, the conducting supports 7 correspond to the connecting socket 8, and switch on support 7 and insert in connecting socket 8 when fixed plate 6 is installed in mount 5, take off that fixed plate 6 can be free, then place in mount 5 after placing quartz crystal in holding tank 61 to realize electric connection through the cooperation of connecting socket 8 and connecting seat 9, under the condition that does not influence the service function, be convenient for place quartz crystal in holding tank 61 of fixed plate 6.
The lifting rod 3 is fixed with a lifting mechanism 10 for driving the sliding seat 4 to move along the lifting rod 3, the lifting mechanism 10 comprises a lifting motor 1001, a lifting screw rod 1002, a lifting block 1003 and a lifting encoder 1004, the lifting rod 3 is provided with a hollowed lifting groove 31, the outer side of the sliding seat 4 is fixed with the lifting block 1003, the upper end of the lifting rod 3 is fixed with the lifting motor 1001, the lifting groove 31 is internally fixed with a rotatable lifting screw rod 1002, the lifting screw rod 1002 penetrates through the lifting block 1003 and is connected with the lifting block 1003 through thread engagement, the lifting motor 1001 is coaxially connected with the lifting screw rod 1002, the lifting screw rod 1002 is driven to rotate when the lifting motor 1001 rotates, and the lifting block 1003 is driven to move up and down along the lifting groove 31 under the action of connecting threads between the lifting screw rod 1002 when the lifting screw rod 1002 rotates, so as to realize the effect of driving the sliding seat 4 to move up and down along the lifting rod 3, install on the lift motor 1001 rather than coaxial coupling's lift encoder 1004, lift motor 1001 and lift encoder 1004 and motion control panel 17 electric connection, lift encoder 1004 gathers lift motor 1001's rotation parameter to with rotation parameter transmission to motion control panel 17, motion control panel 17 control lift motor 1001 carries out work.
An angle adjusting mechanism 11 is fixed on the base 1 and used for driving the lifting rod 3 to rotate around the rotating hinge base 2 to adjust the inclination angle, the angle adjusting mechanism 11 comprises a support plate 1101, an inclination motor 1102, an adjusting hinge base 1103, a threaded sleeve 1104, an adjusting screw 1105, an inclination encoder 1106 and an inclination sensor 1107, the adjusting hinge base 1103 is fixed on the heat dissipation plate 14, the support plate 1101 is fixed on the base 1, the inclination motor 1102 is fixed on the support plate 1101, one end of the threaded sleeve 1104 is fixed on the adjusting hinge base 1103, the other end of the threaded sleeve 1104 is connected with an adjusting screw 1105 through threads, the threaded sleeve 1104 can rotate around the adjusting hinge base 1103, the other end of the adjusting screw 1105 is coaxially connected with the rotating shaft of the inclination motor 1102, the inclination motor 1102 drives the adjusting screw 1105 to rotate, and the adjusting screw 1105 rotates through the threaded action of the threaded sleeve 1104 and the adjusting screw 1105, stretching the heat dissipating plate 14 to drive the lifting rod 3 to rotate around the rotary hinge base 2, installing a tilt encoder 1106 coaxially connected with the tilt motor 1102 on the tilt motor 1102, the tilt encoder 1106 acquiring rotation parameters of the tilt motor 1102 and sending the rotation parameters to the motion control plate 17, fixing a tilt sensor 1107 on the heat dissipating plate 14, wherein the tilt sensor 1107 is formed based on an SCL3300-D01 tilt angle sensor and is used for measuring the tilt angle of the lifting rod 3 and sending the tilt angle parameters to the motion control plate 17, the tilt motor 1102, the tilt encoder 1106 and the tilt sensor 1107 are electrically connected with the motion control plate 17, the motion control plate 17 controls the tilt motor 1102 to work, and the lifting mechanism 10, the angle adjusting mechanism 11 and the motion control plate 17 are electrically connected and can work under the driving of the motion control plate 17, the height of the fixed plate 6 can be adjusted through the lifting mechanism 10, and the inclination angle of the fixed plate 6 is adjusted through the angle adjusting mechanism 11, so that the quartz crystal can be conveniently adjusted and processed by using etching equipment.
The rear end of the fixing frame 5 is fixed with a heat dissipation plate 14, the heat dissipation plate 14 can dissipate heat from the rear end face auxiliary fixing plate 6 when the etching equipment etches the quartz crystal, a relay set 15, a control box 16 and a communication port 19 are fixed on the heat dissipation plate 14, a motion control board 17 and a measuring circuit board 18 are fixed in the control box 16, the motion control board 17 is formed based on an STM32 embedded development board, a communication interface, a motor driving circuit and a relay driving circuit are integrated on the development board, the motion control board 17 and the measuring circuit board 18 are both electrically connected with a communication port 19, the communication port 19 is a communication protocol conversion device which is embedded with a plurality of communication protocols, after the communication interface of the superior computer is connected with the communication port 19, can communicate with the motion control board 17 and the measurement circuit board 18 to control the motion control board 17 and the measurement circuit board 18.
The control end electric connection of motion control board 17 and relay group 15 for thereby the quartz crystal in corresponding holding tank 61 is selected in the switching of control relay group 15, connecting seat 9 passes through relay group 15 and measuring circuit board 18 electric connection, every the inside switch-on support 7 of holding tank 61 is through connecting socket 8 and connecting seat 9 back, all is connected with the relay input in an independent relay group 15, the relay output in relay group 15 all connects in parallel on measuring circuit board 18, after corresponding relay closure in motion control board 17 control relay group 15, the quartz crystal in holding tank 61 that is connected with corresponding relay inserts measuring circuit board 18 promptly, can select its vibration frequency of corresponding quartz crystal real-time measurement through relay group 15 during processing, and the fine setting equipment of being convenient for processing is adjusted, because relay group 15's selection function, the quartz crystal on the whole fixing plate 6 can be processed once at a time, batch processing of the quartz crystal is realized, and processing efficiency is improved.
The measurement circuit board 18 is used for measuring the resonant frequency of the selected quartz crystal, the measurement circuit board 18 includes a first pi network 1801, a second pi network 1802, a signal source 1803, a first phase discrimination circuit 1804, a second phase discrimination circuit 1805, a first a/D conversion module 1806 and a second a/D conversion module 1807, the relay output ends in the relay group 15 are inserted in the first pi network 1801 and the second pi network 1802 in parallel, the specific circuit is shown in fig. 8, the first pi network 1801 and the second pi network 1802 are both the same pi network circuit, the signal source 1803 is electrically connected to the communication port 19, the first pi-network 1801 and the second pi-network 1802, is used for outputting signals with adjustable frequency and amplitude, respectively inputting the amplified signals into a first pi network 1801 and a second pi network 1802, the signal source 1803 is designed by taking a DDS chip AD9912 as a core, and a constant temperature crystal oscillator is used as a reference clock.
The first phase discriminating circuit 1804 and the second phase discriminating circuit 1805 are electrically connected to the first pi network 1801 and the second pi network 1802, respectively, and are used for detecting a phase difference between the two pi networks, the first phase discriminating circuit 1804 and the second phase discriminating circuit 1805 are both voltage phase comparing circuits, for example, the first phase discriminating circuit 1804 calculates a voltage phase difference between an input end and an output end of the first pi network 1801, one end of the first a/D converting module 1806 is electrically connected to the first phase discriminating circuit 1804, the other end of the first a/D converting module 1806 is electrically connected to the communication port 19, one end of the second a/D converting module 1807 is electrically connected to the second phase discriminating circuit 1805, the other end of the second a/D converting module 1806 is electrically connected to the communication port 19, the first a/D converting module 1806 and the second a/D converting module 1807 are used for converting the phase difference measured by the first phase discriminating circuit 1804 and the second phase discriminating circuit 1805 into a digital quantity and sending the digital quantity to the communication port 19, the input of the signal source 1803 is electrically connected with the communication port 19, the communication port 19 is used for being connected with a computer, the computer controls the signal source 1803 to output a frequency signal with a proper amplitude to excite the first pi network 1801 and the second pi network 1802, the frequency changes from low to high near the resonance frequency of the quartz crystal, meanwhile, the phase difference change at two ends of the two pi networks is measured through the first phase discrimination circuit 1804, the second phase discrimination circuit 1805, the first A/D conversion module 1806 and the second A/D conversion module 1807 conversion circuit, the maximum value of the phase difference signal is the series resonance frequency of the quartz crystal, and the measurement circuit board 18 calculates the actual vibration frequency of the connected quartz crystal according to the phase difference signal, so that the later-stage processing is facilitated.
The measuring circuit board 18 adopts the same signal source 1803 as the basis, measures quartz crystal's actual frequency through two ways of independent pi networks, phase discrimination circuit and AD conversion module, has both guaranteed the measuring accuracy, has guaranteed test speed again, the fine setting in the later stage of being convenient for, the front end of lifter 3 is fixed with guard plate 12, be provided with transparent window 13 corresponding with holding tank 61 on the guard plate 12.
The invention also provides a quartz crystal frequency fine-tuning device, wherein the frequency fine-tuning device comprises a frequency fine-tuning system, a computer, frequency fine-tuning etching equipment and a two-dimensional moving platform, the frequency fine-tuning system adopts the quartz crystal frequency fine-tuning system, the frequency fine-tuning etching equipment is fixed on the two-dimensional moving platform, the two-dimensional moving platform drives the frequency fine-tuning etching equipment to move under the control of the computer, so that an etching port of the frequency fine-tuning etching equipment faces towards the accommodating groove 61, the computer is electrically connected with the frequency fine-tuning etching equipment, the frequency fine-tuning etching equipment is used for working under the control of the computer, a communication port 19 of the frequency fine-tuning system is electrically connected with the computer, and the frequency fine-tuning system works under the control of the computer.
The use principle of the invention is as follows:
before use, the frequency fine-tuning etching device is electrically connected with a computer through a communication port 19, the computer is electrically connected with a frequency fine-tuning etching device, the frequency fine-tuning etching device is fixed on a two-dimensional moving platform, the two-dimensional moving platform drives the frequency fine-tuning etching device to move, the etching port of the frequency fine-tuning etching device faces to a certain accommodating groove 61, a fixing plate 6 is taken down from a fixing frame 5, then quartz crystals are sequentially installed in the accommodating grooves 61, then the fixing plate 6 is installed in the fixing frame 5 through a sliding groove 51, and a connecting socket 8 is inserted into a connecting seat 9 to complete electrical connection;
the computer sends a control signal to the motion control board 17 through the communication port 19, the motion control board 17 controls the lifting mechanism 10 and the angle adjusting mechanism 11 to work, the height and the inclination angle of the fixing plate 6 are adjusted, the frequency fine-tuning etching equipment is convenient to work, the motion control board 17 controls the corresponding relay in the relay group 15 to be closed, the quartz crystal electrically connected with the relay is connected to the measuring circuit board 18, the measuring circuit board 18 measures the frequency of the corresponding quartz crystal under the control of the computer and sends the measuring signal to the computer, and the computer controls the frequency fine-tuning etching equipment to work, fine-tunes the corresponding quartz crystal and ensures that the frequency of the quartz crystal meets the requirement;
the motion device of the two-dimensional motion platform drives the frequency fine tuning etching device to move, so that the etching port faces to the accommodating groove 61 of the next quartz wafer to be fine tuned, the motion control board 17 controls the last corresponding relay in the relay group 15 to be switched off and the next corresponding relay to be switched on under the control of the computer, so that the quartz crystal electrically connected with the relay is switched into the measurement circuit board 18, and the steps are repeated.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a quartz crystal frequency fine setting system, includes base (1), rotates articulated seat (2), lifter (3), sliding seat (4), mount (5), fixed plate (6), switches on support (7), connect socket (8), connecting seat (9), elevating system (10) and angle adjustment mechanism (11), its characterized in that:
the quartz crystal fixing device is characterized in that two rotary hinged seats (2) are symmetrically fixed on two sides of the base (1), two lifting rods (3) which are oppositely arranged are fixed at the upper ends of the rotary hinged seats (2) respectively, sliding seats (4) are arranged on the lifting rods (3), a U-shaped fixing frame (5) is fixed between the two sliding seats (4), a sliding groove (51) is formed in the inner side of the fixing frame (5), a connecting seat (9) is fixed at the bottom of the inner side of the fixing frame (5), a plurality of accommodating grooves (61) are formed in the front end of the fixing plate (6), a conducting bracket (7) which is used for fixing a quartz crystal and conducting electricity is fixed in the accommodating grooves (61), a connecting socket (8) is fixed at the bottom of the fixing plate (6), a connecting circuit is arranged in the fixing plate (6) and is used for electrically connecting the conducting bracket (7) in each accommodating groove (61) independently and electrically connected with the connecting socket (8), the fixing plate (6) is detachably arranged in the fixing frame (5) through the sliding groove (51), the conducting support (7) corresponds to the connecting socket (8) in position, and the conducting support (7) is inserted into the connecting socket (8) when the fixing plate (6) is arranged in the fixing frame (5);
the lifting rod (3) is fixed with a lifting mechanism (10) for driving a sliding seat (4) to move along the lifting rod (3), the base (1) is fixed with an angle adjusting mechanism (11) for driving the lifting rod (3) to rotate around a rotating hinged seat (2) to adjust the inclined angle, the rear end of the fixing frame (5) is fixed with a heat dissipation plate (14), the heat dissipation plate (14) is fixed with a relay group (15), a control box (16) and a communication port (19), the control box (16) is internally fixed with a motion control plate (17) and a measurement circuit board (18), the motion control plate (17) and the measurement circuit board (18) are electrically connected with the communication port (19) and are used for communicating with a computer on the upper level through the communication port (19), and the motion control plate (17) is electrically connected with the control end of the relay group (15), thereby the quartz crystal in corresponding holding tank (61) is selected to the switching for controlling relay group (15), connecting seat (9) are through relay group (15) and measuring circuit board (18) electric connection, measuring circuit board (18) are used for measuring the resonant frequency of the quartz crystal of choosing, elevating system (10), angle adjustment mechanism (11) and motion control board (17) electric connection for work under the drive of motion control board (17).
2. A quartz crystal frequency trimming system according to claim 1, wherein: the front end of lifter (3) is fixed with guard plate (12), be provided with transparent window (13) corresponding with holding tank (61) on guard plate (12).
3. A quartz crystal frequency trimming system according to claim 1, wherein: every inside switch on support (7) of holding tank (61) is through connecting socket (8) and connecting seat (9) back, all is connected with the relay input in independent relay group (15), the relay output in relay group (15) all connects in parallel on measuring circuit board (18).
4. A quartz crystal frequency trimming system according to claim 1, wherein: elevating system (10) have elevator motor (1001), lift lead screw (1002), elevator (1003) and lift encoder (1004) to constitute, be provided with lift groove (31) of fretwork on lifter (3), sliding seat (4) outside is fixed with elevator (1003), lifter (3) upper end is fixed with elevator motor (1001), lift groove (31) inside is fixed with rotatable lift lead screw (1002), elevator (1002) run through elevator (1003) and be connected through the thread engagement with elevator (1003), elevator motor (1001) and elevator lead screw (1002) coaxial coupling, install on elevator motor (1001) rather than coaxial coupling's lift encoder (1004), elevator motor (1001) and lift encoder (1004) and motion control board (17) electric connection.
5. A quartz crystal frequency trimming system according to claim 1, wherein: angle adjustment mechanism (11) is by backup pad (1101), tilt motor (1102), adjustment articulated seat (1103), threaded sleeve (1104), adjusting screw (1105), slope encoder (1106) and slope sensor (1107), adjustment articulated seat (1103) is fixed on heating panel (14), backup pad (1101) is fixed on base (1), tilt motor (1102) is fixed on backup pad (1101), threaded sleeve (1104) one end is fixed on adjustment articulated seat (1103), and the other end has adjusting screw (1105) through threaded connection, adjusting screw (1105) other end and tilt motor (1102) pivot coaxial coupling, install on tilt motor (1102) rather than coaxial coupling's slope encoder (1106), be fixed with slope sensor (1107) on heating panel (14), tilt motor (1102) The tilt encoder (1106) and the tilt sensor (1107) are electrically connected to the motion control board (17).
6. A quartz crystal frequency trimming system according to claim 1, wherein: the measuring circuit board (18) comprises a first pi network (1801), a second pi network (1802), a signal source (1803), a first phase discrimination circuit (1804), a second phase discrimination circuit (1805), a first A/D conversion module (1806) and a second A/D conversion module (1807), the output end of a relay in the relay set (15) is inserted in the first pi network (1801) and the second pi network (1802) in parallel, the signal source (1803), a communication port (19), the first pi network (1801) and the second pi network (1802) are electrically connected, signals with adjustable circuit frequency and amplitude are output and input to the first pi network (1801) and the second pi network (1802) after being amplified, the first phase discrimination circuit (1803) and the second phase discrimination circuit (1805) are electrically connected with the first pi network (1801) and the second pi network (1802) respectively, and are used for detecting the phase difference of the two pi networks, first AD conversion module (1806) one end and first phase discrimination circuit (1804) electric connection, the other end and communication port (19) electric connection, second AD conversion module (1807) one end and second phase discrimination circuit (1805) electric connection, the other end and communication port (19) electric connection, first AD conversion module (1806) and second AD conversion module (1807) are used for respectively turning into digital quantity with first phase discrimination circuit (1804) and second phase discrimination circuit (1805) measuring phase difference and send to communication port (19).
7. A quartz crystal frequency fine-tuning device is characterized in that: the frequency fine-tuning device comprises a frequency fine-tuning system, a computer, a frequency fine-tuning etching device and a two-dimensional moving platform, wherein the frequency fine-tuning system adopts the quartz crystal frequency fine-tuning system of any one of claims 1 to 6, the frequency fine-tuning etching device is fixed on the two-dimensional moving platform, the two-dimensional moving platform drives the frequency fine-tuning etching device to move under the control of the computer, so that an etching port of the frequency fine-tuning etching device faces towards an accommodating groove (61), the computer is electrically connected with the frequency fine-tuning etching device, the frequency fine-tuning etching device is used for working under the control of the computer, a communication port (19) of the frequency fine-tuning system is electrically connected with the computer, and the frequency fine-tuning system works under the control of the computer.
CN202210370573.8A 2022-04-10 2022-04-10 Quartz crystal frequency fine adjustment system and device Active CN114696769B (en)

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