CN219718687U - Control equipment - Google Patents

Control equipment Download PDF

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Publication number
CN219718687U
CN219718687U CN202223581882.4U CN202223581882U CN219718687U CN 219718687 U CN219718687 U CN 219718687U CN 202223581882 U CN202223581882 U CN 202223581882U CN 219718687 U CN219718687 U CN 219718687U
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China
Prior art keywords
control
cabinet body
pressure
fixedly connected
model
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CN202223581882.4U
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Chinese (zh)
Inventor
金成林
赵科新
王海涛
冯育强
王学峰
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Shenyang Tianke Heda Semiconductor Equipment Co ltd
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Shenyang Tianke Heda Semiconductor Equipment Co ltd
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Abstract

The utility model discloses control equipment, in particular to the field of circuit control, which comprises a lifting table, wherein a lifting mechanism is fixedly arranged above the lifting table, a vacuum chamber is fixedly connected to the side surface of the lifting mechanism, a cabinet body is fixedly connected to the lower part of the lifting table, and an alarm is fixedly arranged on the side surface of the cabinet body. According to the utility model, by redesigning the circuit, a new model inspection instrument is selected, and three digital display tables in the original waterway monitoring casing are completely replaced. In addition, the waterway monitoring data are stored in real time through digital communication, so that the safety and stability of the waterway monitoring system are improved. The space is saved, the cost is reduced, the monitoring stability is improved, the pressure full range can be covered by the pressure control range through reasonably designing the pressure control system, the pressure control precision is in the low vacuum range, and the pressure control precision can be controlled to be +/-0.2 Pa. The vacuum full range is displayed on the touch screen through secondary data acquisition and processing of the pressure signal, and the design also replaces a vacuum gauge. Not only saves space but also reduces cost.

Description

Control equipment
Technical Field
The present utility model relates to the field of circuit control, and more particularly, to a control apparatus.
Background
The control equipment is commonly a control system (equipment control cabinet) which is formed by intensively installing a power supply casing, a pressure control casing, a heating casing, a waterway monitoring casing and an electric control system circuit board into the control cabinet;
disadvantages of the prior art:
the cases are classified into various types, and each function uses one case, so that the design space and the processing cost are wasted. The control large plate has larger plane area and occupies larger cabinet space, so the control cabinet becomes necessary in design. The design of the middle box-separating function and the design of the circuit board are repeated, so that the control grading is more defme and is not concise, and the cost performance of the control cabinet is reduced.
The waterway part utilizes three meters to display three data indexes of water temperature, water flow and water pressure respectively, and the structure is that the three meters are arranged in a waterway detection casing to waste resources.
The original control board is double PLC to control master-slave PLC, the control logic is complex, the manufacturing cost is high, and the control board is not easy to maintain in later period.
Accordingly, a control apparatus is proposed for the above-described problems.
Disclosure of Invention
In order to overcome the above-mentioned drawbacks of the prior art, an embodiment of the present utility model provides a control apparatus to solve the above-mentioned problems set forth in the background art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a control equipment, includes the elevating platform, elevating system's top fixed mounting has elevating system, elevating system's side fixedly connected with vacuum chamber, the below fixedly connected with cabinet body of elevating system, the side fixed mounting of cabinet body has the alarm, the below fixedly connected with stabilizer blade of cabinet body.
Preferably, the outer wall of the other side of the cabinet body is fixedly connected with a bracket, and the other side of the bracket is fixedly provided with a touch screen.
Preferably, a second input terminal is fixedly connected to one side of the front end of the cabinet body, an output terminal is further arranged on one side of the second input terminal, and a first input terminal is arranged on one side of the output terminal.
Preferably, a relay is further arranged above the input terminal, a starting control panel is arranged above the relay, and a control unit is arranged on the side face of the starting control panel.
Preferably, the touch screen is fixedly arranged on the side face of the cabinet body through a bracket, and a partition plate is arranged in the middle of the cabinet body.
Preferably, the control unit comprises a heating meter, a frequency converter, a patrol instrument and a pressure control meter, and the control unit adopts 706M multipath patrol instrument to uniformly display the water temperature, water flow and water pressure in original waterway monitoring on one meter, thereby replacing the old mode of three display meters installed on the waterway monitoring machine box before. And the novel 706M inspection instrument has an alarm function. And the water channel monitoring data storage is realized by being provided with a standard 485 communication interface and transmitting data to the touch screen through digital communication.
Preferably, in the pressure control meter, when the 22J relay is powered off, the pressure in the pressure range of 50Torr is controllable, when the 22J relay is powered on, the pressure in the pressure range of 1000Torr is controllable, the full range control of the pressure is realized through the pressure regulating pump, and the pressure signal is fed back to the PLC through the pressure signal P+ of 1000Torr, and the pressure signal is displayed on the touch screen, so that the function of the conventional resistance gauge matched with the vacuum meter power supply is replaced. The pressure accuracy can be improved to +/-0.5 Pa by selecting a high-resolution pressure control gauge to be matched with a vacuum gauge.
The utility model has the technical effects and advantages that:
1. compared with the prior art, the circuit board is matched with the design of the start button and the emergency stop button to replace the original power supply casing, so that the space is saved, the cost is reduced, a new model inspection instrument is selected through a redesign circuit, and three digital display tables in the original waterway monitoring casing are completely replaced. In addition, the waterway monitoring data are stored in real time through digital communication, so that the safety and stability of the waterway monitoring system are improved. The space is saved, the cost is reduced, the monitoring stability is improved, the pressure full range can be covered by the pressure control range through reasonably designing the pressure control system, the pressure control precision is in the low vacuum range, and the pressure control precision can be controlled to be +/-0.5 Pa. The vacuum full range is displayed on the touch screen through secondary data acquisition and processing of the pressure signal, and the design also replaces a vacuum gauge. The space is saved, the cost is reduced, and the original master-slave PLC control system is improved and designed into a single PLC control system. The original analog quantity control element is changed into the digital communication control element, so that the area of a circuit board of a control system is reduced, the cost is reduced, the control precision and the stability are improved in a digital communication mode, the design is greatly tried, the original control cabinet is simplified, all cases are replaced by the control unit, the original control circuit board is redesigned, and the space is saved, the cost is reduced, and the stability and the equipment control precision are improved. And the higher requirements are put forward for the product again, and the quality and the cost performance of the product are improved to continuously meet the requirements of customers.
2. Compared with the prior art, the original power supply box is reasonably replaced through the ingenious design of the button and the circuit board, the starting and stopping buttons of the existing design are provided with the indicator lamps, and the current state of the equipment can be clearly seen. In order to better realize miniaturization of the control system, the original master-slave PLC is changed into a single PLC control system with the latest design in the current design. The peripheral devices of the control system are all in digital communication, so that the stability of the control of the peripheral devices can be improved, the installation space can be saved, the purchase cost of a PLC (programmable logic controller) can be saved, the appearance size and the stability are taken as starting points and the brand cost performance is combined as main points when the control assembly is selected, the design is also a great attempt structurally, the control unit is a split door design, and the control system circuit board is a left-hand side door design. The design is convenient for opening the door at any time to check the states of instruments and meters, is convenient for equipment to open the door to maintain, has wide space in front of the equipment and improves the working efficiency, the design is provided with a grating ruler detection stroke verification function in a PLC, the output pulse quantity of the PLC is converted into a theoretical stroke to be compared with an actual stroke, the actual stroke of the grating ruler is compared with an algorithm theoretical stroke, and when the difference value of the actual stroke of the grating ruler and the algorithm theoretical stroke is larger than +/-0.5 mm, the grating ruler sensor needs to be verified. The method improves the equipment quality and reduces the equipment instability factor caused by sensor failure.
Drawings
Fig. 1 is a schematic view of an improved apparatus structure according to the present utility model.
Fig. 2 is a schematic structural diagram of a conventional control cabinet according to the present utility model.
FIG. 3 is a schematic diagram of a control unit according to the present utility model.
Fig. 4 is a schematic view of the strong electric principle of the electric control system of the present utility model.
FIG. 5 is a schematic diagram of the power supply and protection portion for the control system start-up according to the present utility model.
Fig. 6 is a schematic diagram of a control unit.
FIG. 7 is a schematic view of waterway monitoring and inspection.
Fig. 8 is a schematic flow chart of the pressure control part.
Fig. 9 is a schematic block diagram of the circuit of the present utility model.
The reference numerals are: 1. a lifting mechanism; 2. a lifting table; 3. a touch screen; 4. a bracket; 5. a support leg; 6. a cabinet body; 7. an alarm; 8. a vacuum chamber; 9. a first input terminal; 10. an output terminal; 11. a second input terminal; 12. a relay; 13. starting a control panel; 14. and a control unit.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
The control equipment as shown in figures 1-8 comprises a lifting table 2, wherein a lifting mechanism 1 is fixedly arranged above the lifting table 2, a vacuum chamber 8 is fixedly connected to the side surface of the lifting mechanism 1, a cabinet 6 is fixedly connected to the lower side of the lifting table 2, an alarm 7 is fixedly arranged on the side surface of the cabinet 6, and a supporting leg 5 is fixedly connected to the lower side of the cabinet 6.
In this embodiment, the outer wall of the other side of the cabinet body 6 is fixedly connected with a support 4, the other side of the support 4 is fixedly provided with a touch screen 3, and the device can rapidly install and fix the whole touch screen 3 on one side through the support 4 during operation.
In this embodiment, the front end side of the cabinet body 6 is fixedly connected with a second input terminal 11, one side of the second input terminal 11 is also provided with an output terminal 10, one side of the output terminal 10 is provided with a first input terminal 9, and when in operation, the device continues the mechanism of the conventional control device, and adopts the output terminal 10 and the second input terminal 11 to output and input data.
In this embodiment, a relay 12 is further disposed above the second input terminal 11, a start control panel 13 is disposed above the relay 12, a control unit 14 is disposed on a side surface of the start control panel 13, and when the device is in operation, the start control panel 13 is used to control the whole device to perform start and close operations.
In this embodiment, the touch screen 3 is fixedly mounted on the side surface of the cabinet body 6 through the bracket 4, and the middle part of the cabinet body 6 is provided with the partition plate, so that the device integrally reduces and places the traditional control element on one side of the cabinet body 6, and the integral space is shortened.
In this embodiment, the control unit 14 includes a heating meter, a frequency converter, a patrol instrument and a pressure control meter, and the patrol instrument in the control unit 14 adopts a 706M multipath patrol instrument, so that the water temperature, water flow and water pressure in the original waterway monitoring are uniformly displayed on one meter, and the old mode of installing three display meters in the previous waterway monitoring casing is replaced. And the novel 706M inspection instrument has an alarm function. And the water channel monitoring data storage is realized by being provided with a standard 485 communication interface and transmitting data to the touch screen through digital communication.
The control circuit comprises a strong current part and a control unit, wherein the strong current part comprises a start power supply and protection part, a pressure regulating pump power supply part, a vacuum pump power supply part, a motor lifting power supply part and a 24V switching power supply part, and the control unit comprises a pressure control part, a frequency conversion part, a waterway monitoring part and a power meter heating part;
the starting power supply and protection part, the pressure regulating pump power supply part, the vacuum pump power supply part, the motor lifting power supply part and the 24V switching power supply are connected with three-phase power, and the pressure control part, the frequency conversion part, the waterway monitoring part and the power meter heating part are connected with the PLC.
The ports L1, L2 and L3 of a frequency converter (model G120 XA) F1 of the power supply part of the pressure regulating pump are connected with three-phase power through a controlled switch of a relay KM2 and a controlled switch QF2 in sequence, and the U, V, W port of F1 is connected with a pressure regulating pump M4;
the three-phase power is connected with a mechanical pump M1 (which is used for vacuumizing a vacuum chamber) through a switch QF3 of a power supply part of the vacuum pump, a controlled switch of a relay KM3 and a thermal protector FR1 in sequence;
the three-phase power is connected with the lifting motor of the lifting mechanism (1) sequentially through a switch QF4 of the lifting power supply part of the motor and a controlled switch of the relay KM4, and the controlled switch of the relay KM4 is connected with the controlled switch of the relay KM5 in parallel.
The three-phase power L1 phase is respectively connected with one end of a switch KM1-NC, one end of a switch KM1-NO and one end of a switch SB1 of the starting power supply and protection part, the other end of the KM1-NC is respectively connected with one end of an indicator lamp SB1, the N phase and one end of a control end of the KM1 through an indicator lamp SB2, the other end of the SB1 is connected with the other end of the KM1-NO, and the other end of the SB1 is sequentially connected with the other end of the control end of the KM1 through the switch SB2 and a scram switch.
The three-phase power L3 phase and the N phase are respectively connected with the input ends of the AC/DC voltage conversion modules DC 1-DC 3 through the switch QF6 of the 24V switching power supply part, the output end of the DC2 is connected with the alarm lamp, and the output end of the DC1 is contacted with the control screen.
The ports 202 and 203 of the pressure control meter (AI-8 series) of the pressure control part are respectively connected with a first pressure gauge and a second pressure gauge on the vacuum chamber through a controlled switch of a relay 22J (the pressure gauge is arranged above the vacuum chamber to detect the atmospheric pressure inside the vacuum chamber).
The inspection instrument of the waterway monitoring part is a 706M inspection instrument, a J5 module of the 706M inspection instrument is connected with a water pressure monitoring component MP (the inspection unit of a water pressure sensor is MP megapascals, the total backwater water pressure of circulating water is detected), J4 modules 14, 15 and 16 ports of the 706M inspection instrument are connected with water flow meters (for detecting backwater water flow of heating coil cooling water), and J4 modules of the 706M inspection instrument are connected with 17, 18 and 19 ports of the 706M inspection instrument are connected with water temperature meters (for detecting backwater water temperature of heating coil cooling water).
LN1, LN2 ports of the power meter (AIJ-E series) of the heating part of the power meter are connected with medium frequency input and output (the input end and the input end of the medium frequency heating power supply), AA and AB ports of the power meter are connected with medium frequency lower limit alarm (lower limit alarm value of heating power), HE and HF ports of the power meter are connected with heating communication (connected with a PLC communication port to feed back heating power data to the PLC), and a water-shortage medium frequency external control cut-off switch 21J is connected with an external medium frequency power supply (namely the medium frequency heating power supply).
In the embodiment, in the pressure control meter, when the 22J relay is powered off, the pressure in the pressure range of 50Torr is controllable, when the 22J relay is powered on, the pressure in the pressure range of 50-1000Torr is controllable, the full range control of the pressure is realized through the pressure regulating pump, and the pressure signal is fed back to the PLC through the pressure signal P+ and P-of 1000Torr, and is displayed on the touch screen, so that the function of the original resistance gauge matched with the vacuum meter power supply is replaced. The resolution of the pressure control gauge can reach 1/30000, and the pressure precision can be improved to +/-0.2 Pa by matching with a low vacuum 50torr film gauge.
The working process of the utility model is as follows:
firstly, the circuit design is integrated on a control system circuit big board, and the control function directly replaces the original power supply casing, and the control principle is as follows: and the QF1 is manually closed and is opened, at the moment, the SB2 red light is electrified, and the control system is in a standby electrifying state. Manually pressing the SB1 open button, powering on the coil of the KM1 alternating-current contactor, closing the main contact to start the air cooling system by the cooling fan, closing the SB1 green light by the normally open auxiliary contact, and turning off the SB2 red light by the normally closed auxiliary contact. At this point the control system is powered on. The manual QF8 is closed and opened, the control system provides 220V socket power supply, and the device places the vacuum chamber outside the device and adopts the lifting mechanism 1 to cooperate with the lifting platform 2, so that the regulation and control of the vacuum environment are realized, the device is improved and then replaces the original control cabinet, the circuit board is directly installed in the host frame in a miniaturized design, and the original heating casing, the pressure control casing and the waterway monitoring casing are integrated into the control unit shown in figure-2. The original power supply casing is skillfully designed into a control system circuit board. The following figure-3 shows the details of the control unit, the button pad, and the control circuit board.
The last points to be described are: first, in the description of the present utility model, it should be noted that, unless otherwise specified and defined, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be mechanical or electrical, or may be a direct connection between two elements, and "upper," "lower," "left," "right," etc. are merely used to indicate relative positional relationships, which may be changed when the absolute position of the object being described is changed;
secondly: in the drawings of the disclosed embodiments, only the structures related to the embodiments of the present disclosure are referred to, and other structures can refer to the common design, so that the same embodiment and different embodiments of the present disclosure can be combined with each other under the condition of no conflict;
finally: the foregoing description of the preferred embodiments of the utility model is not intended to limit the utility model to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and principles of the utility model are intended to be included within the scope of the utility model.

Claims (2)

1. Control equipment, including elevating platform (2), its characterized in that: the automatic lifting device is characterized in that a lifting mechanism (1) is fixedly arranged above the lifting table (2), a vacuum chamber (8) is fixedly connected to the side face of the lifting mechanism (1), a cabinet body (6) is fixedly connected to the lower side of the lifting table (2), an alarm (7) is fixedly arranged on the side face of the cabinet body (6), and a supporting foot (5) is fixedly connected to the lower side of the cabinet body (6); the outer wall of the other side of the cabinet body (6) is fixedly connected with a bracket (4), and the other side of the bracket (4) is fixedly provided with a touch screen (3); a second input terminal (11) is fixedly connected to one side of the front end of the cabinet body (6), an output terminal (10) is further arranged on one side of the second input terminal (11), and a first input terminal (9) is arranged on one side of the output terminal (10); a relay (12) is further arranged above the second input terminal (11), a starting control panel (13) is arranged above the relay (12), and a control unit (14) is arranged on the side face of the starting control panel (13); the control unit (14) comprises a heating meter, a frequency converter, a patrol instrument and a pressure control meter, and the patrol instrument in the control unit (14) adopts 706M multipath patrol instruments.
2. A control apparatus according to claim 1, characterized in that: the touch screen (3) is fixedly arranged on the side face of the cabinet body (6) through the support (4), and a partition plate is arranged in the middle of the cabinet body (6).
CN202223581882.4U 2022-12-30 2022-12-30 Control equipment Active CN219718687U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223581882.4U CN219718687U (en) 2022-12-30 2022-12-30 Control equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223581882.4U CN219718687U (en) 2022-12-30 2022-12-30 Control equipment

Publications (1)

Publication Number Publication Date
CN219718687U true CN219718687U (en) 2023-09-19

Family

ID=87998843

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223581882.4U Active CN219718687U (en) 2022-12-30 2022-12-30 Control equipment

Country Status (1)

Country Link
CN (1) CN219718687U (en)

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