CN114696769B - Quartz crystal frequency fine adjustment system and device - Google Patents
Quartz crystal frequency fine adjustment system and device Download PDFInfo
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- CN114696769B CN114696769B CN202210370573.8A CN202210370573A CN114696769B CN 114696769 B CN114696769 B CN 114696769B CN 202210370573 A CN202210370573 A CN 202210370573A CN 114696769 B CN114696769 B CN 114696769B
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- 239000013078 crystal Substances 0.000 title claims abstract description 78
- 239000010453 quartz Substances 0.000 title claims abstract description 72
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 72
- 230000007246 mechanism Effects 0.000 claims abstract description 30
- 238000005530 etching Methods 0.000 claims description 40
- 238000006243 chemical reaction Methods 0.000 claims description 35
- 238000004891 communication Methods 0.000 claims description 34
- 238000001514 detection method Methods 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000009966 trimming Methods 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 230000003028 elevating effect Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 5
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0478—Resonance frequency in a process for mass production
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- Crystals, And After-Treatments Of Crystals (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
The invention provides a quartz crystal frequency fine tuning system and a device, which comprises a base, a rotary hinged seat, a lifting rod, a sliding seat, a fixed frame, a fixed plate, a conduction bracket, a connection socket, a connection seat, a lifting mechanism and an angle adjusting mechanism.
Description
Technical Field
The invention relates to the technical field of quartz crystal processing, in particular to a system and a device for fine tuning of frequency of a quartz crystal.
Background
The quartz crystal resonator has the characteristics of excellent frequency stability, high Q value, high oscillation frequency, small volume and the like, and is widely applied to military affairs, communication, computers, household appliances and various industrial electronic devices, the frequency of the quartz crystal resonator is required to be adjusted more and more accurately along with the continuous development of scientific technology, the problem is a hot point in research and production at home and abroad, in order to improve the accuracy of the quartz crystal resonator, the quartz crystal needs to be adjusted finely in the production process, generally, the adopted modes comprise modes such as laser etching, ion etching, magnetron sputtering and the like, and the energy is transmitted to a film layer on the surface of the quartz crystal to be peeled from a bottom layer to realize the thinning and quality change of the film layer, so that the effect of finely adjusting the frequency of the quartz crystal is realized.
The disclosure number is CN207351546U provides a quartz crystal frequency piece quality detection device, it is through establishing the detection port of frequency pickup on last fixed splint and lower fixed splint, then place quartz crystal and detect on last fixed splint and lower fixed splint, thereby realize that frequency pickup detects quartz crystal frequency, be convenient for the fine setting in later stage, this is the conventional setting of present quartz crystal frequency fine tuning system, only can detect a fine setting quartz crystal every time, the quartz crystal that has adjusted all needs to be taken off after adjusting each time finishes, then install new, quartz crystal's size is less, so operate, the efficiency is very low, and very trouble when placing quartz crystal.
Disclosure of Invention
The present invention is directed to a system and a device for fine tuning the frequency of a quartz crystal, so as to solve the above problems.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides a quartz crystal frequency fine setting system, includes the base, rotates articulated seat, lifter, sliding seat, mount, fixed plate, switches on support, connect socket, connecting seat, elevating system and angle adjustment mechanism, wherein:
two rotary hinged seats are symmetrically fixed on two sides of the base, lifting rods which are oppositely arranged are fixed at the upper ends of the two rotary hinged seats respectively, sliding seats are slidably mounted on the lifting rods, a U-shaped fixing frame is fixed between the two sliding seats, a sliding groove is formed in the inner side of the fixing frame, a connecting seat is fixed at the bottom of the inner side of the fixing frame, a plurality of accommodating grooves are formed in the front end of the fixing plate, conducting supports which are used for fixing quartz crystals and conducting electricity are fixed in the accommodating grooves, connecting sockets are fixed at the bottom of the fixing plate, a connecting circuit is arranged in the fixing plate and used for electrically connecting the conducting supports in each accommodating groove with the connecting sockets independently, the fixing plate is detachably mounted in the fixing frame through the sliding grooves, the conducting supports correspond to the connecting sockets in position, and the conducting supports are inserted into the connecting sockets when the fixing plate is mounted in the fixing frame;
the lifting rod is fixedly provided with a lifting mechanism for driving the sliding seat to move along the lifting rod, the base is fixedly provided with an angle adjusting mechanism for driving the lifting rod to rotate around the rotating hinged seat to adjust the inclination angle, the rear end of the fixing frame is fixedly provided with a heat dissipation plate, the heat dissipation plate is fixedly provided with a relay group, a control box and a communication port, a motion control panel and a measurement circuit board are fixedly arranged in the control box, the motion control panel and the measurement circuit board are electrically connected with the communication port and used for communicating with a computer at a higher level through the communication port, the control ends of the motion control panel and the relay group are electrically connected and used for controlling the opening and closing of the relay group so as to select quartz crystals in corresponding accommodating grooves, the connecting seat is electrically connected with the measurement circuit board through the relay group, the measurement circuit board is used for measuring the selected resonance frequency of the quartz crystals, and the lifting mechanism, the angle adjusting mechanism and the motion control panel are electrically connected and used for working under the driving of the motion control panel;
the quartz crystal frequency fine tuning system also comprises frequency fine tuning etching equipment, and an etching port of the frequency fine tuning etching equipment faces to the accommodating groove.
Preferably, a protection plate is fixed at the front end of the lifting rod, and a transparent window corresponding to the accommodating groove is arranged on the protection plate.
Preferably, every the inside support that switches on of holding tank passes through connecting socket and connecting seat after, all is connected with the relay input in an independent relay group, the relay output in the relay group all connects in parallel on measuring circuit board.
Preferably, elevating system has elevator motor, lift lead screw, elevator and lifting encoder to constitute, be provided with the lift groove of fretwork on the lifter, the sliding seat outside is fixed with the elevator, the lifter upper end is fixed with elevator motor, the inside rotatable lift lead screw that is fixed with of lift inslot, the lift lead screw runs through the elevator and passes through the thread engagement with the elevator and be connected, elevator motor and lift lead screw coaxial coupling, elevator motor is last to be installed rather than coaxial coupling's lifting encoder, elevator motor and lifting encoder and motion control board electric connection.
Preferably, angle adjustment mechanism is by backup pad, slope motor, the articulated seat of adjustment, threaded sleeve, adjustment lead screw, slope encoder and slope sensor, the articulated seat of adjustment is fixed on the heating panel, the backup pad is fixed on the base, the slope motor is fixed in the backup pad, threaded sleeve one end is fixed on the articulated seat of adjustment, and the other end has the adjustment lead screw through threaded connection, the adjustment lead screw other end and slope motor shaft coaxial coupling, install on the slope motor rather than coaxial coupling's slope encoder, be fixed with the slope sensor on the heating panel, slope motor, slope encoder and slope sensor and motion control board electric connection.
Preferably, the measuring circuit board includes a first pi network, a second pi network, a signal source, a first phase discrimination circuit, a second phase discrimination circuit, a first a/D conversion module, and a second a/D conversion module, the relay output end in the relay set is inserted in the first pi network and the second pi network in parallel, the signal source, the communication port, the first pi network, and the second pi network are electrically connected, and are configured to output a signal with adjustable frequency and amplitude, and the signal is amplified and then input to the first pi network and the second pi network, respectively, the first phase discrimination circuit and the second phase discrimination circuit are electrically connected, respectively, to the first pi network and the second pi network, and are configured to detect a phase difference between the two pi networks, one end of the first a/D conversion module is electrically connected to the first phase discrimination circuit, the other end of the first a/D conversion module is electrically connected to the communication port, one end of the second a/D conversion module is electrically connected to the second phase discrimination circuit, and the other end of the second a/D conversion module is configured to convert the first phase discrimination circuit and the second phase difference to a digital phase difference measurement port.
The invention also provides a quartz crystal frequency fine-tuning device, wherein the frequency fine-tuning device comprises a frequency fine-tuning system, a computer and a two-dimensional moving platform, the frequency fine-tuning system adopts the quartz crystal frequency fine-tuning system, frequency fine-tuning etching equipment is fixed on the two-dimensional moving platform, the two-dimensional moving platform drives the frequency fine-tuning etching equipment to move under the control of the computer, so that an etching port of the frequency fine-tuning etching equipment faces towards the accommodating groove, the computer is electrically connected with the frequency fine-tuning etching equipment, the frequency fine-tuning etching equipment is used for working under the control of the computer, a communication port of the frequency fine-tuning system is electrically connected with the computer, and the frequency fine-tuning system works under the control of the computer.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the quartz crystals are placed in the holding tank of the fixing plate, the height of the fixing plate is adjusted through the lifting mechanism, the inclination angle of the fixing plate is adjusted through the angle adjusting mechanism, the quartz crystals can be conveniently adjusted and processed by using etching equipment, the corresponding quartz crystals can be selected through the relay set during processing, the vibration frequency of the quartz crystals can be measured in real time, and the processing fine-tuning equipment can be conveniently adjusted.
Drawings
FIG. 1 is a schematic view of the overall front exploded view of the present invention;
FIG. 2 is an exploded view of the entire back of the present invention;
FIG. 3 is a schematic structural view of the lifting mechanism of the present invention;
FIG. 4 is a schematic structural view of an angle adjustment mechanism according to the present invention;
FIG. 5 is a schematic view of the overall structure of the present invention;
FIG. 6 is a schematic diagram of a control system for the motion control panel of the present invention;
FIG. 7 is a schematic diagram of a system for measuring circuit boards according to the present invention;
fig. 8 is a schematic circuit diagram of the first pi network and the second pi network in the present invention.
In the figure: the device comprises a base 1, a rotary hinged seat 2, a lifting rod 3, a lifting groove 31, a sliding seat 4, a fixed frame 5, a sliding groove 51, a fixed plate 6, a containing groove 61, a conduction support 7, a connection socket 8, a connection seat 9, a lifting mechanism 10, a lifting motor 1001, a lifting lead screw 1002, a lifting block 1003, a lifting encoder 1004, an angle adjusting mechanism 11, a supporting plate 1101, a tilting motor 1102, a hinged seat 1103 adjusting, a threaded sleeve 1104, a lead screw 1105 adjusting, a tilting encoder 1106, a tilting sensor 1107, a protection plate 12, a transparent window 13, a heat dissipation plate 14, a relay group 15, a control box 16, a motion control plate 17, a measurement circuit board 18, a first pi network 1801, a second pi network 1802, a signal source 1803, a first phase discrimination circuit 1804, a second phase discrimination circuit 1805, a first A/D conversion module 1806, a second A/D conversion module 1807 and a communication port 19.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b):
referring to fig. 1 to 8, the present invention provides a technical solution:
the utility model provides a quartz crystal frequency fine setting system, includes base 1, rotates articulated seat 2, lifter 3, sliding seat 4, mount 5, fixed plate 6, switches on support 7, connect socket 8, connecting seat 9, elevating system 10, angle adjustment mechanism 11, guard plate 12, transparent window 13, heating panel 14, relay group 15, control box 16, motion control panel 17, measurement circuit board 18 and communication port 19, wherein:
1 bilateral symmetry of base is fixed with two and rotates articulated seat 2, two the upper end of rotating articulated seat 2 is fixed with the lifter 3 of relative setting respectively, lifter 3 can rotate round rotating articulated seat 2, slidable mounting has sliding seat 4 on the lifter 3, be fixed with the mount 5 of U-shaped between two sliding seats 4, sliding seat 4 can slide from top to bottom on lifter 3 to drive mount 5 up-and-down motion, 5 inboards of mount are provided with sliding tray 51, the inboard bottom of mount 5 is fixed with connecting seat 9.
Fixed plate 6 front end is provided with a plurality of holding tanks 61, and holding tank 61 is used for placing the quartz crystal of treating the fine setting, holding tank 61 is inside to be fixed with and to be used for fixed quartz crystal and carry out electrically conductive support 7 that switches on, fixed plate 6 bottom is fixed with connection socket 8, fixed plate 6 inside is provided with connecting circuit for with the inside independent and connection socket 8 electric connection of the support 7 that switches on of every holding tank 61, quartz crystal places behind holding tank 61, and switch on support 7 and contact, thereby realized and connection socket 8 electric connection, connection socket 8 internal integration has a plurality of contact pins, have the jack that corresponds with the contact pin in connecting seat 9, the inside support 7 that switches on of every holding tank 61 is all mutually independent, mutual noninterference, fixed plate 6 is installed in mount 5 through sliding tray 51 detachable, it is corresponding to switch on support 7 and connection socket 8 position, and switches on support 7 when fixed plate 6 is installed in mount 5 and inserts in connecting socket 8, fixed plate 6 can be free take off, then place behind quartz crystal in mount 5 in holding tank 61 to realize electric connection through the cooperation of connecting socket 8 and connecting seat 9, influence the service behavior of quartz crystal, be convenient for placing fixing plate 61 down.
The lifting mechanism 10 is fixed on the lifting rod 3 and used for driving the sliding seat 4 to move along the lifting rod 3, the lifting mechanism 10 is composed of a lifting motor 1001, a lifting screw rod 1002, a lifting block 1003 and a lifting encoder 1004, a hollowed lifting groove 31 is formed in the lifting rod 3, the lifting block 1003 is fixed on the outer side of the sliding seat 4, the lifting motor 1001 is fixed at the upper end of the lifting rod 3, the rotatable lifting screw rod 1002 is fixed inside the lifting groove 31, the lifting screw rod 1002 penetrates through the lifting block 1003 and is connected with the lifting block 1003 through threaded engagement, the lifting motor 1001 is coaxially connected with the lifting screw rod 1002, the lifting screw rod 1002 is driven to rotate when the lifting motor 1001 rotates, the lifting block 1003 is driven to move up and down along the lifting groove 31 under the effect of connecting threads between the lifting screw rod 1002 and the lifting block 1003 when the lifting screw rod 1002 rotates, so that the effect of driving the sliding seat 4 to move up and down along the lifting rod 3 is achieved, the lifting encoder 1004 coaxially connected with the lifting motor 1001 is installed on the lifting motor 1001, the lifting motor 1001 and the lifting encoder 1004 is electrically connected with the movement control panel 17, and the lifting encoder 1004 is used for collecting the working parameters of the lifting motor 1001 and controlling the lifting motor 17.
An angle adjusting mechanism 11 is fixed on the base 1 and used for driving the lifting rod 3 to rotate around the rotating hinge seat 2 to adjust the inclined angle, the angle adjusting mechanism 11 comprises a support plate 1101, an inclined motor 1102, an adjusting hinge seat 1103, a threaded sleeve 1104, an adjusting screw 1105, an inclined encoder 1106 and an inclined sensor 1107, the adjusting hinge seat 1103 is fixed on the heat dissipation plate 14, the support plate 1101 is fixed on the base 1, the inclined motor 1102 is fixed on the support plate 1101, one end of the threaded sleeve 1104 is fixed on the adjusting hinge seat 1103, the other end of the threaded sleeve 1105 is connected with the adjusting screw 1105 through a thread, the threaded sleeve 1104 can rotate around the adjusting hinge seat 1103, the other end of the adjusting screw 1105 is coaxially connected with the rotating shaft of the inclined motor 1102, the inclined motor 1102 drives the adjusting screw 1105 to rotate, and the adjusting screw 1105 rotates through the thread action of the threaded sleeve 1104 and the adjusting screw 1105, stretching the heat dissipating plate 14 to drive the lifting rod 3 to rotate around the rotary hinge base 2, installing a tilt encoder 1106 coaxially connected with the tilt motor 1102 on the tilt motor 1102, the tilt encoder 1106 acquiring rotation parameters of the tilt motor 1102 and sending the rotation parameters to the motion control plate 17, fixing a tilt sensor 1107 on the heat dissipating plate 14, the tilt sensor 1107 being formed based on an SCL3300-D01 tilt angle sensor and used for measuring the tilt angle of the lifting rod 3 and sending the tilt angle parameters to the motion control plate 17, the tilt motor 1102, the tilt encoder 1106 and the tilt sensor 1107 being electrically connected with the motion control plate 17, the motion control plate 17 controlling the tilt motor 1102 to work, because the lifting mechanism 10, the angle adjusting mechanism 11 and the motion control plate 17 are electrically connected, the lifting rod can work under the driving of the motion control plate 17, the height of the fixed plate 6 can be adjusted through the lifting mechanism 10, and the inclination angle of the fixed plate 6 is adjusted through the angle adjusting mechanism 11, so that the quartz crystal can be conveniently adjusted and processed by using etching equipment.
The rear end of mount 5 is fixed with heating panel 14, and heating panel 14 can dispel the heat from rear end face auxiliary fixed plate 6 when etching equipment etches the quartz crystal, be fixed with relay group 15, control box 16 and communication port 19 on heating panel 14, 16 inside motion control board 17 and the measuring circuit board 18 of being fixed with of control box, motion control board 17 constitutes based on the embedded development board of STM32, and the integration has communication interface, motor drive circuit and relay drive circuit on the development board, motion control board 17, measuring circuit board 18 all with communication port 19 electric connection, communication port 19 be communication protocol conversion equipment, and the embedded multiple communication protocol that has, the communication interface and the communication port 19 of the computer of higher order connect the back, can communicate with motion control board 17, measuring circuit board 18 to control motion control board 17 and measuring circuit board 18.
The control end electric connection of motion control board 17 and relay group 15 for thereby the quartz crystal in corresponding holding tank 61 is selected in the switching of control relay group 15, connecting seat 9 passes through relay group 15 and measuring circuit board 18 electric connection, every the inside support 7 that switches on of holding tank 61 is through connecting socket 8 and connecting seat 9 after, all is connected with the relay input in an independent relay group 15, relay output in relay group 15 all connects in parallel on measuring circuit board 18, and after corresponding relay closure in motion control board 17 control relay group 15, the quartz crystal in the holding tank 61 that is connected with corresponding relay inserts measuring circuit board 18 promptly, can select its vibration frequency of corresponding quartz crystal real-time measurement man-hour through relay group 15, is convenient for process the trimmer and adjusts, because relay group 15's selection function, can once only process the quartz crystal on a whole fixed plate 6 at every turn, realizes processing to quartz crystal in batches, improves the efficiency of processing.
The measurement circuit board 18 is used for measuring the resonant frequency of a selected quartz crystal, the measurement circuit board 18 comprises a first pi network 1801, a second pi network 1802, a signal source 1803, a first phase discrimination circuit 1804, a second phase discrimination circuit 1805, a first A/D conversion module 1806 and a second A/D conversion module 1807, the output end of a relay in the relay set 15 is inserted in the first pi network 1801 and the second pi network 1802 in parallel, the specific circuit is as shown in FIG. 8, the first pi network 1801 and the second pi network 1802 are the same pi network circuit, the signal source 1803 is electrically connected with a communication port 19, the first pi network 1801 and the second pi network 1802 and used for outputting signals with adjustable circuit frequency and amplitude, the signals are respectively input into the first pi network 1801 and the second pi network DDS 1802 after amplification, the signal source 1803 is designed with a chip 9912 as a core, and a constant temperature crystal oscillator is used as a reference clock.
The first phase discrimination circuit 1804 and the second phase discrimination circuit 1805 are electrically connected with the first pi network 1801 and the second pi network 1802 respectively and used for detecting phase differences of the two pi networks, the first phase discrimination circuit 1804 and the second phase discrimination circuit 1805 are both voltage phase comparison circuits, for example, the first phase discrimination circuit 1804 is used for calculating voltage phase differences of an input end and an output end of the first pi network 1801, one end of the first a/D conversion module 1806 is electrically connected with the first phase discrimination circuit 1804, the other end of the first a/D conversion module 1806 is electrically connected with the communication port 19, one end of the second a/D conversion module 1807 is electrically connected with the second phase discrimination circuit 1805, the other end of the second a/D conversion module is electrically connected with the communication port 19, the first a/D conversion module 1806 and the second a/D conversion module 1807 are used for converting the phase differences measured by the first phase discrimination circuit 1804 and the second phase discrimination circuit 1805 into digital quantities and sending the digital quantities to the communication port 19, the input and communication port 19 is electrically connected with a computer, the amplitude value 19 is used for connecting the computer, the crystal frequency conversion of the first crystal frequency signal source which controls the first pi network 1803 and the second crystal frequency conversion module 1803, the second crystal frequency conversion module 1806 is connected with the quartz frequency conversion module, and the quartz frequency conversion module which is convenient for calculating the second crystal frequency conversion module which is connected at the second crystal frequency conversion module 1803, and the second crystal frequency conversion module which is connected with the second crystal frequency conversion module 1806.
The measuring circuit board 18 adopts the same signal source 1803 as the basis, measures quartz crystal's actual frequency through two ways of independent pi networks, phase discrimination circuit and AD conversion module, has both guaranteed the measuring accuracy, has guaranteed test speed again, the fine setting in the later stage of being convenient for, the front end of lifter 3 is fixed with guard plate 12, be provided with transparent window 13 corresponding with holding tank 61 on the guard plate 12.
The quartz crystal frequency trimming system further comprises a frequency trimming etching device, and an etching port of the frequency trimming etching device faces the accommodating groove 61.
The invention also provides a quartz crystal frequency fine-tuning device, wherein the frequency fine-tuning device comprises a frequency fine-tuning system, a computer and a two-dimensional moving platform, the frequency fine-tuning system adopts the quartz crystal frequency fine-tuning system, frequency fine-tuning etching equipment is fixed on the two-dimensional moving platform, the two-dimensional moving platform drives the frequency fine-tuning etching equipment to move under the control of the computer, so that an etching port of the frequency fine-tuning etching equipment faces towards the accommodating groove 61, the computer is electrically connected with the frequency fine-tuning etching equipment, the frequency fine-tuning etching equipment is used for working under the control of the computer, a communication port 19 of the frequency fine-tuning system is electrically connected with the computer, and the frequency fine-tuning system works under the control of the computer.
The use principle of the invention is as follows:
before use, the frequency fine-tuning etching device is electrically connected with a computer through a communication port 19, the computer is electrically connected with the frequency fine-tuning etching device, the frequency fine-tuning etching device is fixed on a two-dimensional moving platform, the two-dimensional moving platform drives the frequency fine-tuning etching device to move, the etching port of the frequency fine-tuning etching device faces to a certain accommodating groove 61, a fixing plate 6 is taken down from a fixing frame 5, then quartz crystals are sequentially installed in the accommodating grooves 61, then the fixing plate 6 is installed in the fixing frame 5 through a sliding groove 51, and a connecting socket 8 is inserted into a connecting seat 9 to complete electrical connection;
the computer sends a control signal to the motion control board 17 through the communication port 19, the motion control board 17 controls the lifting mechanism 10 and the angle adjusting mechanism 11 to work, the height and the inclination angle of the fixing plate 6 are adjusted, the frequency fine-tuning etching equipment is convenient to work, the motion control board 17 controls the corresponding relay in the relay group 15 to be closed, the quartz crystal electrically connected with the relay is connected to the measuring circuit board 18, the measuring circuit board 18 measures the frequency of the corresponding quartz crystal under the control of the computer and sends the measuring signal to the computer, and the computer controls the frequency fine-tuning etching equipment to work, fine-tunes the corresponding quartz crystal and ensures that the frequency of the quartz crystal meets the requirement;
the motion device of the two-dimensional motion platform drives the frequency fine tuning etching device to move, so that the etching port faces to the accommodating groove 61 of the next quartz wafer to be fine tuned, the motion control board 17 controls the last corresponding relay in the relay group 15 to be switched off and the next corresponding relay to be switched on under the control of the computer, so that the quartz crystal electrically connected with the relay is switched into the measurement circuit board 18, and the steps are repeated.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a quartz crystal frequency fine setting system, includes base (1), rotates articulated seat (2), lifter (3), sliding seat (4), mount (5), fixed plate (6), switches on support (7), connect socket (8), connecting seat (9), elevating system (10) and angle adjustment mechanism (11), its characterized in that:
the quartz crystal connection device is characterized in that two rotary hinged seats (2) are symmetrically fixed on two sides of the base (1), the upper ends of the two rotary hinged seats (2) are respectively fixed with a lifting rod (3) which is oppositely arranged, sliding seats (4) are slidably mounted on the lifting rod (3), a U-shaped fixing frame (5) is fixed between the two sliding seats (4), a sliding groove (51) is formed in the inner side of the fixing frame (5), a connecting seat (9) is fixed at the bottom of the inner side of the fixing frame (5), a plurality of accommodating grooves (61) are formed in the front end of the fixing plate (6), a conduction bracket (7) which is used for fixing a quartz crystal and conducting electricity is fixed in the accommodating grooves (61), a connection socket (8) is fixed at the bottom of the fixing plate (6), a connection circuit is arranged in the fixing plate (6) and used for connecting the conduction bracket (7) in each accommodating groove (61) independently and electrically connecting with the connection socket (8), the fixing plate (6) is detachably mounted in the fixing frame (5) through the sliding groove (51), the connection bracket (7) corresponds to the connection socket (8), and is mounted in the fixing frame (6) and is electrically connected with the connection socket (8);
the utility model discloses a quartz crystal oscillator, including lifter (3), be fixed with elevating system (10) on lifter (3) for drive sliding seat (4) move along lifter (3), be fixed with angle adjustment mechanism (11) on base (1) for drive lifter (3) rotate around rotating articulated seat (2), the angle of adjustment slope, the rear end of mount (5) is fixed with heating panel (14), be fixed with relay group (15), control box (16) and communication port (19) on heating panel (14), control box (16) inside is fixed with motion control board (17) and measuring circuit board (18), motion control board (17), measuring circuit board (18) all with communication port (19) electric connection for communicate through communication port (19) and the computer of higher level, the control end electric connection of motion control board (17) and relay group (15) is used for the quartz crystal in corresponding holding tank (61) is selected in the switching of controller group relay group (15), thereby connecting seat (9) pass through relay group (15) and measuring circuit board (18), be used for quartz crystal oscillator electric connection of adjustment mechanism (11), measuring circuit board (17) and measuring circuit board (11) electric connection, is used for working under the drive of the motion control plate (17);
the quartz crystal frequency fine tuning system also comprises frequency fine tuning etching equipment, and an etching port of the frequency fine tuning etching equipment faces to the accommodating groove (61).
2. A quartz crystal frequency trimming system according to claim 1, wherein: the front end of lifter (3) is fixed with guard plate (12), be provided with transparent window (13) corresponding with holding tank (61) on guard plate (12).
3. A quartz crystal frequency trimming system according to claim 1, wherein: every inside switch on support (7) of holding tank (61) is through connecting socket (8) and connecting seat (9) back, all is connected with the relay input in independent relay group (15), the relay output in relay group (15) all connects in parallel on measuring circuit board (18).
4. A quartz crystal frequency trimming system according to claim 1, wherein: the lifting mechanism (10) comprises a lifting motor (1001), a lifting screw rod (1002), a lifting block (1003) and a lifting encoder (1004), a hollowed lifting groove (31) is formed in the lifting rod (3), the lifting block (1003) is fixed on the outer side of the sliding seat (4), the lifting motor (1001) is fixed at the upper end of the lifting rod (3), the rotatable lifting screw rod (1002) is fixed inside the lifting groove (31), the lifting screw rod (1002) penetrates through the lifting block (1003) and is connected with the lifting block (1003) in a threaded engagement mode, the lifting motor (1001) is coaxially connected with the lifting screw rod (1002), the lifting encoder (1004) is coaxially connected with the lifting motor (1001), and the lifting motor (1001) and the lifting encoder (1004) are electrically connected with the motion control panel (17).
5. A quartz crystal frequency trimming system according to claim 1, wherein: angle adjustment mechanism (11) is by backup pad (1101), tilt motor (1102), adjustment articulated seat (1103), threaded sleeve (1104), adjusting screw (1105), slope encoder (1106) and slope sensor (1107), adjustment articulated seat (1103) is fixed on heating panel (14), backup pad (1101) is fixed on base (1), tilt motor (1102) is fixed in backup pad (1101), threaded sleeve (1104) one end is fixed on adjustment articulated seat (1103), and the other end has adjusting screw (1105) through threaded connection, adjusting screw (1105) other end and tilt motor (1102) pivot coaxial coupling, install on tilt motor (1102) with its coaxial coupling's slope encoder (1106), be fixed with slope sensor (1107) on heating panel (14), tilt motor (1102), slope encoder (1106) and slope sensor (1107) and motion control board (17) electric connection.
6. A quartz crystal frequency trimming system according to claim 1, wherein: the measuring circuit board (18) comprises a first pi network (1801), a second pi network (1802), a signal source (1803), a first phase discrimination circuit (1804), a second phase discrimination circuit (1805), a first A/D conversion module (1806) and a second A/D conversion module (1807), the output end of a relay in the relay set (15) is inserted in the first pi network (1801) and the second pi network (1802) in parallel, the signal source (1803) is electrically connected with a communication port (19), the first pi network (1801) and the second pi network (1802) and used for outputting signals with adjustable frequency and amplitude, and the signals are amplified and then respectively input into the first pi network (1801) and the second pi network (1802), the phase detection circuit comprises a first phase detection circuit (1804) and a second phase detection circuit (1805), wherein the first phase detection circuit (1804) and the second phase detection circuit (1805) are electrically connected with a first pi network (1801) and a second pi network (1802) respectively and used for detecting the phase difference of the two pi networks respectively, one end of a first A/D conversion module (1806) is electrically connected with the first phase detection circuit (1804), the other end of the first A/D conversion module is electrically connected with a communication port (19), one end of a second A/D conversion module (1807) is electrically connected with the second phase detection circuit (1805), the other end of the second A/D conversion module is electrically connected with the communication port (19), and the first A/D conversion module (1806) and the second A/D conversion module (1807) are used for enabling the first phase detection circuit (1804) and the second phase detection circuit (1804) to be electrically connected with the communication port (19) respectively 1805 The measured phase difference is converted into a digital quantity and sent to the communication port (19).
7. A quartz crystal frequency fine-tuning device is characterized in that: the frequency fine-tuning device comprises a frequency fine-tuning system, a computer and a two-dimensional moving platform, wherein the frequency fine-tuning system adopts the quartz crystal frequency fine-tuning system of any one of claims 1 to 6, the frequency fine-tuning etching equipment is fixed on the two-dimensional moving platform, the two-dimensional moving platform drives the frequency fine-tuning etching equipment to move under the control of the computer, so that an etching port of the frequency fine-tuning etching equipment faces towards an accommodating groove (61), the computer is electrically connected with the frequency fine-tuning etching equipment, the frequency fine-tuning etching equipment is used for working under the control of the computer, a communication port (19) of the frequency fine-tuning system is electrically connected with the computer, and the frequency fine-tuning system works under the control of the computer.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004135357A (en) * | 2002-09-19 | 2004-04-30 | Piedekku Gijutsu Kenkyusho:Kk | Quartz resonator, quartz unit, crystal oscillator, and manufacturing method thereof |
| CN113054939A (en) * | 2021-03-23 | 2021-06-29 | 台晶(宁波)电子有限公司 | Quartz crystal vibrating body and manufacturing method thereof |
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| US6654659B1 (en) * | 2002-06-24 | 2003-11-25 | Advanced Micro Drvices, Inc. | Quartz crystal monitor wafer for lithography and etch process monitoring |
| JP2009088724A (en) * | 2007-09-28 | 2009-04-23 | Nippon Dempa Kogyo Co Ltd | Method of manufacturing piezoelectric vibration piece, and piezoelectric vibration device |
| CN207351546U (en) * | 2017-11-14 | 2018-05-11 | 万安县泰鑫电子有限责任公司 | A kind of quartz crystal frequency chip quality detection device |
| CN210585969U (en) * | 2019-09-09 | 2020-05-22 | 成都晶宝时频技术股份有限公司 | Quartz crystal resonator detection device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004135357A (en) * | 2002-09-19 | 2004-04-30 | Piedekku Gijutsu Kenkyusho:Kk | Quartz resonator, quartz unit, crystal oscillator, and manufacturing method thereof |
| CN113054939A (en) * | 2021-03-23 | 2021-06-29 | 台晶(宁波)电子有限公司 | Quartz crystal vibrating body and manufacturing method thereof |
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