CN114690367A - Thermal control device for ground optical facility reflector - Google Patents
Thermal control device for ground optical facility reflector Download PDFInfo
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- CN114690367A CN114690367A CN202011617572.6A CN202011617572A CN114690367A CN 114690367 A CN114690367 A CN 114690367A CN 202011617572 A CN202011617572 A CN 202011617572A CN 114690367 A CN114690367 A CN 114690367A
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- thermal control
- heat dissipation
- reflector
- peripheral
- heat
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- 230000003287 optical effect Effects 0.000 title claims abstract description 29
- 230000017525 heat dissipation Effects 0.000 claims abstract description 98
- 230000002093 peripheral effect Effects 0.000 claims abstract description 77
- 239000000758 substrate Substances 0.000 claims abstract description 44
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 30
- 230000005855 radiation Effects 0.000 claims description 19
- 229910000851 Alloy steel Inorganic materials 0.000 claims description 13
- 239000002826 coolant Substances 0.000 claims description 9
- 229910000838 Al alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000004891 communication Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention discloses a thermal control device for a reflector of a ground optical facility, which comprises a central heat dissipation groove, a substrate, a gasket, a thermal control pipe, a mirror base, a peripheral heat dissipation plate, a heat dissipation plate support, a temperature sensor, a controller and a thermal control water tank, wherein the central heat dissipation groove is arranged on the central heat dissipation groove; the bottom of the lens base is fixedly provided with a substrate; the base plate is fixedly provided with a central heat dissipation groove at one side away from the mirror base, and is circumferentially and fixedly provided with three peripheral heat dissipation plates at one side towards the mirror base; a heat dissipation plate support is fixedly arranged between the peripheral heat dissipation plate and the substrate; temperature sensors are arranged on the back of the reflector, the inner surface of the central heat dissipation groove and the inner surface of the peripheral heat dissipation plate; a heat control pipe is fixedly arranged on each peripheral heat dissipation plate and is communicated with the heat control water tank; the controller is connected with each temperature sensor and the thermal control water tank. The thermal control device has the advantages of simple operation, uniform temperature and good stability.
Description
Technical Field
The invention relates to the technical field of thermal control of ground optical facilities, in particular to a thermal control device for a reflector of a ground optical facility.
Background
With the continuous development of optical engineering technology, higher requirements are put on the temperature control of ground optical facilities, especially laser communication terminals. Because the laser communication technology works near the diffraction limit and the received energy is weak, the laser communication technology is sensitive to the stability and uniformity of the ambient temperature. The traditional ground optical facility heat control mainly adopts technical means such as heat conduction components, heat insulation plates and the like, has the technical advantages of economy, simple operation, uniform temperature and the like, but has the defects of small temperature control range, slow temperature control speed and the like. And partial ground optical facilities adopt heating sheets and bonding temperature sensors, have the technical advantages of rapid temperature control, wide temperature control range and the like, but have the defects of complex operation, uneven temperature, poor stability and the like.
Disclosure of Invention
In view of this, the invention provides a thermal control device for a reflector of a ground optical facility, which has the advantages of simple operation, uniform temperature and good stability.
The invention adopts the following specific technical scheme:
a thermal control device for a reflector of a ground optical facility is positioned between the reflector and a base and comprises a central heat dissipation groove, a substrate, a gasket, a thermal control pipe, a mirror base, a peripheral heat dissipation plate, a heat dissipation plate support, a temperature sensor, a controller and a thermal control water tank;
the top of the mirror base is used for mounting the reflector, and the bottom of the mirror base is fixedly provided with the substrate;
the central heat dissipation groove is fixedly arranged on one side of the substrate, which is far away from the mirror base, and the three peripheral heat dissipation plates are circumferentially and fixedly arranged on one side of the substrate, which is far towards the mirror base;
the heat dissipation plate support is fixedly arranged between the peripheral heat dissipation plate and the substrate;
the reflector and the central heat dissipation groove and the peripheral heat dissipation plate are all kept at heat radiation intervals, and heat exchange is carried out between the reflector and the central heat dissipation groove and between the reflector and the peripheral heat dissipation plate through heat radiation;
the back of the reflector, the inner surface of the central heat dissipation groove and the inner surface of the peripheral heat dissipation plate are provided with the temperature sensors;
each peripheral heat dissipation plate is fixedly provided with one heat control tube, the heat control tubes and the peripheral heat dissipation plates exchange heat through convection, and the heat control tubes and the reflectors exchange heat through heat radiation;
the heat control pipe is communicated with the heat control water tank and is used for enabling a cooling medium to circularly flow between the heat control pipe and the heat control water tank;
the controller is connected with each temperature sensor and the thermal control water tank and is used for controlling the temperature of the cooling medium in the thermal control water tank according to the temperature signal of the temperature sensor;
the gasket is a closed annular structure sleeved on the periphery of the mirror base, is provided with a groove for the inlet and the outlet of the thermal control pipe to penetrate through and is used for connecting the front system and the reflector shell;
the central heat dissipation groove, the substrate and the temperature sensor form a central thermal control structure;
the substrate, the peripheral heat dissipation plate, the heat dissipation plate support and the temperature sensor form a peripheral thermal control structure;
the thermal control pipe, the thermal control water tank, the temperature sensor and the controller form a pipeline thermal control structure.
Further, three peripheral heat dissipation plates are uniformly distributed along the circumferential direction of the substrate.
Further, the temperature sensors are disposed at the center of the back and at the periphery of the back of the mirror.
Furthermore, the distance between the central heat dissipation groove and the reflector is less than or equal to 20 mm;
the distance between the peripheral heat dissipation plate and the reflector is less than or equal to 5 mm;
the distance between the thermal control tube and the reflector is more than or equal to 5 mm.
Further, the central heat dissipation groove is fixedly mounted on the substrate through alloy steel screws.
Furthermore, the peripheral heat dissipation plate is fixedly arranged on the heat dissipation plate support through alloy steel screws;
the heat dissipation plate support is fixedly mounted on the substrate through alloy steel screws.
Furthermore, the central heat dissipation groove, the substrate, the peripheral heat dissipation plate and the heat dissipation plate support are all made of 2A12 aluminum alloy material and are treated by an oxidation and blackening process.
Furthermore, the heat control tube is fixedly arranged on the peripheral heat dissipation plate through a tube clamp;
the distance between the pipe clamp and the reflector is larger than or equal to 5 mm.
Further, the pipe clamp is fixedly arranged on the peripheral heat dissipation plate through alloy steel screws.
Furthermore, an inlet and an outlet of the thermal control pipe are connected with the thermal control water tank through a hose.
Has the advantages that:
the thermal control device is used for a ground optical facility reflector and comprises a central thermal control structure formed by a central heat dissipation groove, a substrate and a temperature sensor, a peripheral thermal control structure formed by the substrate, a peripheral heat dissipation plate, a heat dissipation plate support and the temperature sensor, and a pipeline thermal control structure formed by a thermal control pipe, a thermal control water tank, the temperature sensor and a controller; the heat of the central area of the reflector of the ground optical facility is subjected to radiation heat exchange by the central thermal control structure; heat of the peripheral area of the reflector of the ground optical facility is subjected to radiation heat exchange by a peripheral thermal control structure; the bottom of the reflector of the ground optical facility and the peripheral heat dissipation plate exchange heat through convection and radiation by a pipeline thermal control structure; the temperature of the central thermal control structure is indirectly adjusted by taking the temperature sensor as a feedback element and directly contacting the thermal control pipe with the peripheral thermal control structure; by utilizing the central thermal control structure, the peripheral thermal control structures and the pipeline thermal control structure, the operability of the thermal control device is improved, and the temperature consistency of ground optical facilities such as a laser communication terminal and the like is effectively ensured; therefore, the thermal control device adopting the structure can effectively reduce the influence on the ground optical facility reflector due to the change of the environmental temperature, can make the temperature distribution of the reflector more uniform, solves the technical problems of complex operation, uneven temperature and poor stability in the prior art, and obviously reduces the change of the wavefront difference of the optical system caused by the change of the environmental temperature and the uneven heating of the reflector; the reliability of the technologies of capturing and tracking the target, receiving and converting the signal and the like of the laser communication system is improved.
Drawings
FIG. 1 is a schematic top view of the thermal control apparatus for a mirror of a terrestrial optical installation of the present invention;
FIG. 2 is a schematic bottom view of the thermal control device of FIG. 1;
FIG. 3 is a schematic structural view of the thermal control device of FIG. 2 when the lens barrel is mounted;
FIG. 4 is a schematic view of the cross-sectional structure A-A of the thermal control device of FIG. 3;
fig. 5 is a schematic diagram illustrating a thermal control principle of a laser communication terminal using a thermal control device.
Wherein, 1-a central radiating groove, 2-a substrate, 3-a gasket, 4-a thermal control tube, 5-a lens seat, 6-a peripheral radiating plate, 7-a radiating plate support, 8-a reflector, 9-a pipe clamp, 10-a reflector shell, 11-a lens cone, 12-a temperature sensor, 13-a controller and 14-a thermal control water tank
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The embodiment of the invention provides a thermal control device for a reflector 8 of a ground optical facility, wherein the ground optical facility can be a laser communication terminal and other similar facilities; the thermal control device is positioned between the reflector 8 and the base, and the base is an installation foundation of the thermal control device and the reflector 8;
referring to fig. 1, 2, 3 and 4, fig. 1 is a bottom view of the structure of fig. 2, fig. 2 is a state when the reflecting mirror 8 is in operation, fig. 3 is a structural schematic view of a thermal control device equipped with a lens barrel 11, and fig. 4 is a sectional structural schematic view of a section a-a of fig. 3; the thermal control device comprises a central heat dissipation groove 1, a substrate 2, a gasket 3, a thermal control pipe 4, a lens base 5, a peripheral heat dissipation plate 6, a heat dissipation plate support 7, a temperature sensor 12, a controller 13 and a thermal control water tank 14;
as shown in the structure of fig. 4, the top of the mirror base 5 is used for mounting the reflector 8, and the bottom is fixedly mounted with the substrate 2; the substrate 2 can be fixedly arranged on the mirror base 5 through alloy steel screws; the surface of one side of the reflector 8 for reflecting light is a reflecting surface, the surface of the side opposite to the reflecting surface is the back of the reflector 8, and the back of the reflector 8 faces the base;
as shown in the structure of fig. 4, the substrate 2 is fixedly provided with a central heat sink 1 on the side away from the mirror base 5, and is circumferentially and fixedly provided with three peripheral heat sinks 6 on the side toward the mirror base 5; the substrate 2 is provided with a central through hole, one end of the central heat dissipation groove 1 can be supported on the base, and the other end of the central heat dissipation groove extends into the central through hole of the substrate 2 and is arranged opposite to the back of the reflector 8; the central heat dissipation groove 1 is of a cap-shaped structure and is fixedly arranged on the substrate 2 through alloy steel screws; the three peripheral heat dissipation plates 6 are uniformly distributed along the circumferential direction of the substrate 2, that is, the three peripheral heat dissipation plates 6 are uniformly distributed at 120 ° in the same plane;
as shown in the structure of fig. 1, a heat sink support 7 is fixedly installed between the peripheral heat sink 6 and the substrate 2, that is, the heat sink supports 7 corresponding to the three peripheral heat sinks 6 are provided on the substrate 2; the peripheral heat dissipation plate 6 can be fixedly arranged on the heat dissipation plate support 7 through alloy steel screws; the heat radiation plate support 7 can be fixedly arranged on the substrate 2 through alloy steel screws; the heat radiation plate support 7 can be a support block, a support plate or a support strip;
as shown in the structure of fig. 4, the reflector 8 and the central heat sink 1 and the peripheral heat sink 6 are all kept at thermal radiation intervals, and the reflector 8 exchanges heat with the central heat sink 1 and the peripheral heat sink 6 through thermal radiation to take away heat generated by the reflector 8, so that the self temperature and the ambient temperature of the reflector 8 are reduced; the distance between the central heat sink 1 and the reflector 8 is less than or equal to 20mm, such as: 5mm, 10mm, 15mm, 20 mm; the distance between the peripheral radiating plate 6 and the reflector 8 is less than or equal to 5mm, such as: 2mm, 3mm, 4mm, 5 mm;
each peripheral heat dissipation plate 6 is fixedly provided with one heat control tube 4, namely, three heat control tubes 4 which are in one-to-one correspondence with the peripheral heat dissipation plates 6 are arranged, and the three heat control tubes 4 are uniformly distributed in 120 degrees in the same plane; the heat control tube 4 is in contact with the peripheral heat dissipation plate 6 to exchange heat through convection, and the heat control tube 4 and the reflector 8 exchange heat through heat radiation; the heat control pipe 4 is fixedly arranged on the peripheral heat dissipation plate 6 through a pipe clamp 9; the pipe clamp 9 is fixedly arranged on the peripheral heat dissipation plate 6 through alloy steel screws; in the actual production and manufacturing process, the length and the angle of the extending pipeline of the thermal control pipe 4 can be properly adjusted according to different placement positions of the pipe clamp 9;
the thermal control pipe 4 is communicated with the thermal control water tank 14 and is used for enabling a cooling medium to circularly flow between the thermal control pipe 4 and the thermal control water tank 14; the inlet and outlet of the thermal control pipe 4 are connected with a thermal control water tank 14 through a hose; the thermal control water tank 14 stores a cooling medium therein, and can cool or heat the cooling medium under the control of the controller 13 to keep the cooling medium at a constant temperature;
the controller 13 is connected with each temperature sensor 12 and the thermal control water tank 14 and is used for controlling the temperature of the cooling medium in the thermal control water tank 14 according to the temperature signal of the temperature sensor 12;
the gasket 3 is a closed annular structure sleeved on the periphery of the mirror base 5, is provided with a groove for the inlet and the outlet of the thermal control tube 4 to penetrate through, and is used for connecting the front-end system and the reflector shell 10; the two ends of the thermal control pipe 4 can extend out of the ground optical facility through the groove arranged on the gasket 3, and are connected with the thermal control water tank 14 through a hose;
the central heat dissipation groove 1, the substrate 2 and the temperature sensor 12 form a central thermal control structure;
the substrate 2, the peripheral heat dissipation plate 6, the heat dissipation plate support 7 and the temperature sensor 12 form a peripheral thermal control structure;
the thermal control pipe 4, the thermal control water tank 14, the temperature sensor 12, and the controller 13 form a pipe thermal control structure.
The thermal control device performs heat dissipation and cooling on the reflector 8 through a central thermal control structure, a peripheral thermal control structure and a pipeline thermal control structure, and the thermal control principle of the reflector 8 can refer to fig. 5, wherein a thermal control pipe 4, a temperature sensor 12, a controller 13 and a thermal control water tank 14 form a driving thermal control part of the reflector 8, and a substrate 2, a peripheral heat dissipation plate 6, a central heat dissipation groove 1 and a mirror base 5 form a driven thermal control part of the reflector 8; the central thermal control structure is formed by a central heat dissipation groove 1, a substrate 2 and a temperature sensor 12; the peripheral thermal control structure is formed by a substrate 2, a peripheral heat dissipation plate 6, a heat dissipation plate support 7 and a temperature sensor 12; the pipeline thermal control structure is formed by a thermal control pipe 4, a thermal control water tank 14, a temperature sensor 12 and a controller 13; the heat of the central area of the ground optical facility reflector 8 is exchanged by the central thermal control structure through thermal radiation; heat in the peripheral area of the ground optical facility reflector 8 is exchanged by a peripheral thermal control structure through thermal radiation; the bottom of the ground optical facility reflector 8 and the peripheral heat dissipation plate 6 exchange heat through heat conduction, convection and heat radiation by the pipeline heat control structure; the temperature of the central thermal control structure is indirectly adjusted by taking the temperature sensor 12 as a feedback element through the direct contact between the thermal control tube 4 and the peripheral thermal control structure; by utilizing the central thermal control structure, the peripheral thermal control structures and the pipeline thermal control structure, the operability of the thermal control device is improved, and the temperature consistency of ground optical facilities such as a laser communication terminal and the like is effectively ensured; therefore, the thermal control device adopting the structure can reduce the influence on the reflector 8 of the ground optical facility caused by the change of the environmental temperature, can make the temperature distribution of the reflector 8 more uniform, solves the technical problems of complex operation, uneven temperature and poor stability in the prior art, and obviously reduces the change of the wavefront difference of the optical system caused by the change of the environmental temperature and the uneven heating of the reflector 8; the reliability of the technologies of capturing and tracking the target, receiving and converting the signal and the like of the laser communication system is improved.
In the above thermal control device, the central heat sink 1, the substrate 2, the peripheral heat sink 6, and the heat sink support 7 are made of 2a12 aluminum alloy material and are treated by an oxidation and blackening process.
Because the 2A12 aluminum alloy material has the characteristic of good heat conduction effect, the central heat dissipation groove 1, the substrate 2, the peripheral heat dissipation plate 6 and the heat dissipation plate support 7 are all made of 2A12 aluminum alloy material and are treated by adopting an oxidation and black dyeing process, so that the thermal control device has the characteristics of high heat conduction speed, high heat exchange efficiency and good heat dissipation effect.
Meanwhile, the distance between the thermal control tube 4 and the reflector 8 is more than or equal to 5 mm; the distance between the pipe clamp 9 and the reflector 8 is more than or equal to 5 mm.
In the thermal control device, the pipeline thermal control structure effectively reduces the influence of the environment temperature change on the surface type change of the ground facility reflector 8 by using a convection heat exchange and radiation heat exchange mode; the temperature sensor 12 is used as a feedback element, a certain heat radiation interval is reserved, and the adverse effect of poor active heat control homogenization is improved; the temperature of the central thermal control structure is indirectly adjusted by directly contacting with the peripheral thermal control structure; by utilizing the central thermal control structure, the peripheral thermal control structures and the pipeline thermal control structure, the operability of the thermal control device is improved, and the temperature consistency of the laser communication terminal is effectively ensured.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A thermal control device for a reflector of a ground optical facility is positioned between the reflector and a base, and is characterized in that the thermal control device comprises a central radiating groove, a substrate, a gasket, a thermal control tube, a reflector base, a peripheral radiating plate, a radiating plate support, a temperature sensor, a controller and a thermal control water tank;
the top of the mirror base is used for mounting the reflector, and the bottom of the mirror base is fixedly provided with the substrate;
the central heat dissipation groove is fixedly arranged on one side of the substrate, which is far away from the mirror base, and the three peripheral heat dissipation plates are circumferentially and fixedly arranged on one side, which is far towards the mirror base;
the heat dissipation plate support is fixedly arranged between the peripheral heat dissipation plate and the substrate;
the reflector and the central heat dissipation groove and the peripheral heat dissipation plate are all kept at heat radiation intervals, and heat exchange is carried out between the reflector and the central heat dissipation groove and between the reflector and the peripheral heat dissipation plate through heat radiation;
the back of the reflector, the inner surface of the central heat dissipation groove and the inner surface of the peripheral heat dissipation plate are provided with the temperature sensors;
each peripheral heat dissipation plate is fixedly provided with one heat control tube, the heat control tubes and the peripheral heat dissipation plates exchange heat through convection, and the heat control tubes and the reflecting mirrors exchange heat through heat radiation;
the heat control pipe is communicated with the heat control water tank and is used for enabling a cooling medium to circularly flow between the heat control pipe and the heat control water tank;
the controller is connected with each temperature sensor and the thermal control water tank and is used for controlling the temperature of the cooling medium in the thermal control water tank according to the temperature signal of the temperature sensor;
the gasket is a closed annular structure sleeved on the periphery of the mirror base, is provided with a groove for the inlet and the outlet of the thermal control pipe to penetrate through and is used for connecting the front system and the reflector shell;
the central heat dissipation groove, the substrate and the temperature sensor form a central thermal control structure;
the substrate, the peripheral heat dissipation plate, the heat dissipation plate support and the temperature sensor form a peripheral thermal control structure;
the thermal control pipe, the thermal control water tank, the temperature sensor and the controller form a pipeline thermal control structure.
2. The thermal control device according to claim 1, wherein three of said peripheral heat dissipation plates are uniformly distributed along a circumferential direction of said substrate.
3. The thermal control device of claim 1, wherein said temperature sensors are disposed in both the center of the back and the periphery of the back of said mirror.
4. The thermal control device of claim 1, wherein the distance between the central heat sink and the reflector is less than or equal to 20 mm;
the distance between the peripheral heat dissipation plate and the reflector is less than or equal to 5 mm;
the distance between the thermal control tube and the reflector is more than or equal to 5 mm.
5. The thermal control device of claim 1, wherein said central heat sink is fixedly mounted to said substrate by alloy steel screws.
6. The thermal control device according to claim 1, wherein the peripheral heat dissipation plate is fixedly mounted to the heat dissipation plate support by alloy steel screws;
the heat dissipation plate support is fixedly mounted on the substrate through alloy steel screws.
7. The thermal control device according to any of claims 1-6, wherein said central heat sink, said base plate, said peripheral heat sink plate, and said heat sink plate supports are made of 2A12 aluminum alloy material and treated by an oxidation blackening process.
8. The thermal control apparatus according to any one of claims 1 to 6, wherein the thermal control tube is fixedly mounted to the peripheral heat dissipation plate by a pipe clip;
the distance between the pipe clamp and the reflector is larger than or equal to 5 mm.
9. The thermal control device of claim 8, wherein said tube clamp is fixedly attached to said perimeter heat sink by alloy steel screws.
10. The thermal control device of claim 8, wherein the inlet and outlet of the thermal control tube are connected to the thermal control water tank by a hose.
Priority Applications (1)
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CN202011617572.6A CN114690367A (en) | 2020-12-30 | 2020-12-30 | Thermal control device for ground optical facility reflector |
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CN202011617572.6A CN114690367A (en) | 2020-12-30 | 2020-12-30 | Thermal control device for ground optical facility reflector |
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---|---|---|---|---|
CN1618114A (en) * | 2002-06-28 | 2005-05-18 | 佳能株式会社 | Reflection mirror apparatus, exposure apparatus and device manufacturing method |
CN102159979A (en) * | 2008-09-19 | 2011-08-17 | 卡尔蔡司Smt有限责任公司 | Optical assembly with temperature-control device |
CN104516087A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Sandwich precision thermal controller for spatial optical remote sensor reflector |
CN207442175U (en) * | 2017-09-30 | 2018-06-01 | 合肥正阳光电科技有限责任公司 | A kind of cooling adjustment structure of high power laser light metallic mirror |
CN208969263U (en) * | 2018-11-22 | 2019-06-11 | 扬州霞光光电有限公司 | A kind of optical mirror |
CN110376704A (en) * | 2019-06-25 | 2019-10-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of temperature control shield of space optical reflectors |
-
2020
- 2020-12-30 CN CN202011617572.6A patent/CN114690367A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1618114A (en) * | 2002-06-28 | 2005-05-18 | 佳能株式会社 | Reflection mirror apparatus, exposure apparatus and device manufacturing method |
CN102159979A (en) * | 2008-09-19 | 2011-08-17 | 卡尔蔡司Smt有限责任公司 | Optical assembly with temperature-control device |
CN104516087A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Sandwich precision thermal controller for spatial optical remote sensor reflector |
CN207442175U (en) * | 2017-09-30 | 2018-06-01 | 合肥正阳光电科技有限责任公司 | A kind of cooling adjustment structure of high power laser light metallic mirror |
CN208969263U (en) * | 2018-11-22 | 2019-06-11 | 扬州霞光光电有限公司 | A kind of optical mirror |
CN110376704A (en) * | 2019-06-25 | 2019-10-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of temperature control shield of space optical reflectors |
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