CN114688183B - Brake mechanism and angle modulation carrying platform adopting same - Google Patents
Brake mechanism and angle modulation carrying platform adopting same Download PDFInfo
- Publication number
- CN114688183B CN114688183B CN202210318975.3A CN202210318975A CN114688183B CN 114688183 B CN114688183 B CN 114688183B CN 202210318975 A CN202210318975 A CN 202210318975A CN 114688183 B CN114688183 B CN 114688183B
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- friction
- brake
- axis
- belt
- driving
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D49/00—Brakes with a braking member co-operating with the periphery of a drum, wheel-rim, or the like
- F16D49/08—Brakes with a braking member co-operating with the periphery of a drum, wheel-rim, or the like shaped as an encircling band extending over approximately 360 degrees
- F16D49/10—Brakes with a braking member co-operating with the periphery of a drum, wheel-rim, or the like shaped as an encircling band extending over approximately 360 degrees mechanically actuated
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D49/00—Brakes with a braking member co-operating with the periphery of a drum, wheel-rim, or the like
- F16D49/08—Brakes with a braking member co-operating with the periphery of a drum, wheel-rim, or the like shaped as an encircling band extending over approximately 360 degrees
- F16D49/12—Brakes with a braking member co-operating with the periphery of a drum, wheel-rim, or the like shaped as an encircling band extending over approximately 360 degrees fluid actuated
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D65/00—Parts or details
- F16D65/02—Braking members; Mounting thereof
- F16D65/04—Bands, shoes or pads; Pivots or supporting members therefor
- F16D65/06—Bands, shoes or pads; Pivots or supporting members therefor for externally-engaging brakes
- F16D65/065—Brake bands
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a braking mechanism and an angle modulation platform adopting the same, belonging to the field of high-precision driving platforms, wherein the braking mechanism comprises a friction driving belt, a friction driving belt supporting component, a brake driving sliding seat component, a brake, a friction roller and a Z-axis friction plate; the angle modulation carrying platform comprises a frame, a side beam, a wafer carrying platform, a friction transmission mechanism, an X-axis beam, a Y-axis driving set and an X-axis driving set; the X-axis driving group is arranged between the X-axis beam and the wafer carrying platform, drives the wafer carrying platform and the friction transmission mechanism to synchronously move transversely along the X-axis beam, and simultaneously enables the carrying disc of the wafer carrying platform to rotate through friction transmission of the friction transmission mechanism, so that the angle of the wafer is adjusted; the braking mechanism can provide braking force for the active or passive driving carrying platform, can provide corner adjustment, reduces the cost, improves the overall performance, and is convenient to popularize and apply in the fields of semiconductor quantity detection and high-precision processing with moving platforms or carrying platforms.
Description
Technical Field
The invention belongs to the field of high-precision driving carrying platforms, relates to the precise braking and angle adjusting technology of carrying platforms, and particularly relates to a braking mechanism and an angle adjusting carrying platform adopting the braking mechanism.
Background
In the detection and processing technology, a carrying platform for detecting or processing a material to be detected is generally needed, the carrying platform generally needs to be lifted and rotated, and when the carrying platform needs to stop rotating, driving and controlling active braking or passive damping braking is needed.
Secondly, during braking or braking, it is desirable to reduce the braking or braking distance or rotation angle as much as possible. To ensure stable detection or processing quality. This is particularly important in high precision inspection or machining. Conventional axle-hang brakes have not met with demand.
In the process of loading a wafer on a wafer carrier, the position of the wafer is generally required to be adjusted to an initial detection position, i.e., initial positioning, according to a notch or a notch of the wafer, and an angle of the wafer carrier is required to be adjusted.
The invention designs a carrying platform capable of adjusting the angle of the wafer according to a braking mechanism based on the braking mechanism.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a brake mechanism and an angle adjusting carrier adopting the brake mechanism, which can solve the problems.
A braking mechanism comprises a friction transmission belt, a friction transmission belt supporting assembly, a brake driving sliding seat assembly, a brake, a friction roller and a Z-axis friction plate;
wherein the friction drive belt is supported in tension by the friction drive belt support assembly;
the brake driving sliding seat assembly and the Z-axis friction plate are arranged on two sides of the friction transmission belt;
the brake and the friction roller are arranged at two ends of the brake driving sliding seat assembly, and the brake, the friction roller and the Z-axis friction plate are arranged on the same braking straight line;
the friction roller is used for being driven by the brake to slide towards the friction transmission belt and abut against the outer peripheral surface of the Z-axis friction plate, so that braking or friction force transmission is realized.
Furthermore, the friction transmission belt supporting assembly comprises two groups of friction transmission belt elastic end clamp units and a retaining column; the two groups of elastic end clamping units tension and fix the friction transmission belt from two ends, and the peripheral surfaces of the two stop columns abut against the friction transmission belt for guiding.
Furthermore, the brake driving sliding seat assembly comprises a brake base, a linear rail, a sliding block and a friction transmission belt roller push-pull piece; the brake base is a bent-90-degree type seat plate, a mounting hole for a brake is formed in a vertical plate of the bent-90-degree type seat plate, and the wire rail is fixed to the upper surface of a horizontal plate of the bent-90-degree type seat plate; the sliding block is inserted on the linear rail in a sliding mode; the friction driving belt roller pushing and pulling piece is fixed to the upper surface of the sliding block, the driving end of the brake is connected to one end of the friction driving belt roller pushing and pulling piece, the friction roller is connected to one end, close to the friction driving belt, of the friction driving belt roller pushing and pulling piece, and therefore the brake drives the friction roller to abut against the friction driving belt.
The invention also provides an angle modulation carrying platform which comprises a rack, a side beam, a wafer carrying platform, a friction transmission mechanism, an X-axis beam, a Y-axis driving group and an X-axis driving group;
the two side beams are oppositely and longitudinally arranged on the rack;
the X-axis cross beam is transversely arranged between the two side beams;
the wafer carrying platform and the friction transmission mechanism are oppositely arranged on two sides of the X-axis beam, and the friction transmission mechanism and the wafer carrying platform synchronously operate in the X-axis direction;
the friction transmission mechanism adopts the brake mechanism;
the two Y-axis driving groups are arranged between the side beam and the wafer carrying platform and drive the wafer carrying platform and the friction transmission mechanism to synchronously move longitudinally along the Y-axis driving groups;
the X-axis driving group is arranged between the X-axis beam and the wafer carrying platform, drives the wafer carrying platform and the friction transmission mechanism to synchronously and transversely move along the X-axis beam, and simultaneously, the friction transmission mechanism performs friction transmission to enable the carrying disc of the wafer carrying platform to rotate, so that the angle of the wafer is adjusted.
Compared with the prior art, the invention has the beneficial effects that: the braking mechanism can provide braking force for the active or passive driving carrying platform, and can provide rotation angle adjustment for the passive driving carrying platform, so that the cost is reduced, the overall performance is improved, and the semiconductor volume detection and high-precision processing method and device are convenient to popularize and apply in the fields of semiconductor volume detection and high-precision processing with moving platforms or carrying platforms.
Drawings
FIG. 1 is a schematic view of the braking mechanism of the present invention;
FIG. 2 is a schematic view of a brake actuating carriage assembly;
FIG. 3 is a schematic diagram of an angle of the angle adjusting stage;
FIG. 4 is a schematic view of another view angle of the angle adjusting stage;
FIG. 5 is a schematic diagram of wafer angle adjustment by the brake mechanism.
In the figure:
100. a brake mechanism;
101. a friction drive belt;
102. a friction drive belt support assembly; 1021. a spring end pull rod; 1022. a spring; 1023. a spring inner pull rod; 1024. a clamping block; 1025. layering; 1026. a bumping post; 1027. an eccentric wheel;
103. a brake actuation carriage assembly; 1031. a brake base; 1032. a linear rail; 1033. a slider; 1034. a friction drive belt roller push-pull member;
104. a brake;
105. rubbing the roller;
106. a Z-axis friction plate;
1. a frame;
2. a side beam;
3. a wafer carrier;
4. a friction drive mechanism;
5. an X-axis beam;
6. a Y-axis drive group;
7. and an X-axis drive group.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Brake mechanism
1-4, brake mechanism 100 includes friction drive belt 101, friction drive belt support assembly 102, brake drive slide assembly 103, brake 104, friction roller 105, and Z-axis friction plate 106.
In disposed relation, friction belt 101 is supported in tension by friction belt support assembly 102. The brake actuating carriage assembly 103 and the Z-axis friction plate 106 are disposed on either side of the friction drive belt 101. The brake 104 and the friction roller 105 are installed at both ends of the brake driving slider assembly 103, and the brake 104, the friction roller 105 and the Z-axis friction plate 106 are arranged on the same braking straight line. The friction roller 105 is used for sliding towards the friction transmission belt 101 and abutting against the outer peripheral surface of the Z-axis friction plate 106, driven by the brake 104, so as to realize braking or friction force transmission.
The friction drive belt support assembly 102 includes two sets of friction drive belt resilient end clamp units and a catch 1026. The friction transmission belt 101 is tensioned and fixed by two sets of elastic end clamp units of the friction transmission belt from two ends, and the outer peripheral surfaces of the two retaining columns 1026 abut against the friction transmission belt 101 for guiding.
The elastic end clamp unit of the friction transmission belt comprises a spring end pull rod 1021, a spring 1022, a spring inner pull rod 1023, a clamping block 1024 and a pressing strip 1025, wherein the spring end pull rod 1021 is vertically and fixedly arranged, the spring inner pull rod 1023 is inserted into an outer end hole of the clamping block 1024, two ends of the spring 1022 are connected between the spring end pull rod 1021 and the spring inner pull rod 1023, and the pressing strip 1025 clamps an end part of the friction transmission belt 101 onto the clamping block 1024 so as to position the friction transmission belt 101 into a straight shape or a square shape.
Further, the friction drive belt support assembly 102 further includes two eccentric wheels 1027, the eccentric wheels 1027 being disposed on the same side as the brake 104 for increased positioning effectiveness.
Wherein the brake actuation carriage assembly 103 includes a brake base 1031, wire rails 1032, a slide 1033, and a friction belt roller push-pull 1034.
Further, the brake base 1031 is a bent-over type seat plate bent at 90 °, a mounting hole for the brake 104 is opened on a vertical plate of the bent-over type seat plate, and the wire rail 1032 is fixed to an upper surface of a horizontal plate of the bent-over type seat plate. Wherein, the slide block 1033 is slidably inserted on the wire rail 1032.
Further, the friction belt roller pushing and pulling member 1034 is fixed to the upper surface of the slide block 1033, the driving end of the stopper 104 is connected to one end of the friction belt roller pushing and pulling member 1034, and the friction roller 105 is connected to one end of the friction belt roller pushing and pulling member 1034 close to the friction belt 101, so that the stopper 104 drives the friction roller 105 close to the friction belt 101.
The Z-axis friction plate 106 is fixed to the outer circumferential surface of the braked member, and has an arc-shaped surface as a whole.
The brake 104 is driven by an air cylinder or a motor, and the friction transmission belt 101 is a steel belt.
Angle modulation carrying platform
An angle modulation carrying platform, referring to fig. 3-5, comprises a frame 1, a side beam 2, a wafer carrying platform 3, a friction transmission mechanism 4, an X-axis beam 5, a Y-axis driving set 6 and an X-axis driving set 7; the friction transmission mechanism 4 adopts the aforementioned brake mechanism 100.
Arrangement relation: the two side beams 2 are oppositely and longitudinally arranged on the frame 1; the X-axis cross beam 5 is transversely arranged between the two side beams 2; the wafer carrying platform 3 and the friction transmission mechanism 4 are oppositely arranged on two sides of the X-axis beam 5, and the friction transmission mechanism 4 and the wafer carrying platform 3 synchronously run in the X-axis direction; the two Y-axis driving groups 6 are arranged between the side beam 2 and the wafer carrier 3; the X-axis driving group 7 is arranged between the X-axis beam 5 and the wafer stage 3.
Drive and Angle modulation description:
the Y-axis driving group 6 and the X-axis driving group 7 drive the wafer carrying platform 3 and the friction transmission mechanism 4 to integrally and synchronously move along the Y-axis direction and/or the X-axis direction, so that the carrying piece on the carrying platform, such as a wafer and a silicon wafer, is waited for to be detected or the workpiece is transversely and longitudinally moved.
When braking is required, the brake mechanism 100, i.e., the friction transmission mechanism 4, is driven to abut against the wafer stage 3, and the braking is performed.
When the angle needs to be adjusted, the brake mechanism 100, that is, the friction transmission mechanism 4, is driven to abut against the wafer stage 3, and simultaneously the X-axis drive set 7 drives the wafer stage 3 and the friction transmission mechanism 4 to integrally and synchronously move along the X-axis direction, so that the stage on the wafer stage 3 rotates under the action of friction force, and the angle adjustment is realized.
The brake mechanism can brake and can also drive the carrying disc of the carrying platform to rotate in a friction transmission mode. The braking mechanism and the carrying platform can be applied to high-precision detection and processing machines, such as machines of semiconductor wafers and photovoltaic wafers, high-precision measuring mechanisms, three-coordinate measuring machines and the like, so as to improve the stability and low-cost support, angle adjustment and transfer.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (7)
1. A brake mechanism characterized by: the brake mechanism (100) comprises a friction transmission belt (101), a friction transmission belt supporting component (102), a brake driving sliding seat component (103), a brake (104), a friction roller (105) and a Z-axis friction plate (106);
wherein the friction drive belt (101) is supported in tension by the friction drive belt support assembly (102);
the brake driving slide assembly (103) and the Z-axis friction plate (106) are arranged on two sides of the friction transmission belt (101);
the brake (104) and the friction roller (105) are arranged at two ends of the brake driving slide seat assembly (103), and the brake (104), the friction roller (105) and the Z-axis friction plate (106) are arranged on the same brake straight line;
wherein the brake actuation carriage assembly (103) comprises a brake base (1031), a wire rail (1032), a slider (1033), and a friction belt roller push-pull member (1034); the brake base (1031) is a vertical plate of a bent type seat plate with 90 degrees, a mounting hole for a brake (104) is formed in the vertical plate of the type seat plate, and the wire rail (1032) is fixed to the upper surface of a horizontal plate of the type seat plate; the sliding block (1033) is slidably inserted on the wire rail (1032); the friction belt roller push-pull piece (1034) is fixed to the upper surface of the sliding block (1033), the driving end of the brake (104) is connected to one end of the friction belt roller push-pull piece (1034), and the friction roller (105) is connected to one end, close to the friction belt (101), of the friction belt roller push-pull piece (1034), so that the brake (104) drives the friction roller (105) to abut against the friction belt (101);
the friction roller (105) is used for being driven by the brake (104) to slide towards the friction transmission belt (101) and abut against the outer peripheral surface of the Z-axis friction plate (106), so that braking or friction force transmission is realized.
2. The brake mechanism of claim 1, wherein: the friction transmission belt supporting component (102) comprises two groups of friction transmission belt elastic end clamping units and a blocking column (1026); the friction transmission belt (101) is tensioned and fixed by the two groups of elastic end clamping units of the friction transmission belt from two ends, and the peripheral surfaces of the two retaining columns (1026) abut against the friction transmission belt (101) for guiding.
3. The brake mechanism of claim 2, wherein: the friction driving belt elastic end clamp unit comprises a spring end pull rod (1021), a spring (1022), a spring inner pull rod (1023), a clamping block (1024) and a pressing strip (1025), wherein the spring end pull rod (1021) is vertically and fixedly arranged, the spring inner pull rod (1023) is inserted into an outer end hole of the clamping block (1024), two ends of the spring (1022) are connected between the spring end pull rod (1021) and the spring inner pull rod (1023), and the pressing strip (1025) fixedly clamps the end part of the friction driving belt (101) onto the clamping block (1024) so as to position the friction driving belt (101) into a straight shape or a [ shape ].
4. The brake mechanism of claim 3, wherein: the friction drive belt support assembly (102) further includes two eccentric wheels (1027), the eccentric wheels (1027) being disposed on the same side as the brake (104) for increased positioning effectiveness.
5. The brake mechanism of claim 3, wherein:
the Z-axis friction plate (106) is fixed to the outer peripheral surface of the braked member and is integrally arc-shaped.
6. The brake mechanism of claim 3, wherein:
the brake (104) is driven by a cylinder or a motor, and the friction transmission belt (101) is a steel belt.
7. An angle modulation microscope carrier, its characterized in that: the angle modulation carrying platform comprises a frame (1), a side beam (2), a wafer carrying platform (3), a friction transmission mechanism (4), an X-axis beam (5), a Y-axis driving set (6) and an X-axis driving set (7);
the two side beams (2) are oppositely and longitudinally arranged on the rack (1);
the X-axis cross beam (5) is transversely arranged between the two side beams (2);
the friction transmission mechanism (4) adopts the brake mechanism (100) of any one of claims 1 to 6;
the wafer carrying platform (3) and the friction transmission mechanism (4) are oppositely arranged on two sides of the X-axis beam (5), and the friction transmission mechanism (4) and the wafer carrying platform (3) synchronously operate in the X-axis direction;
the two Y-axis driving groups (6) are arranged between the side beam (2) and the wafer carrier (3) and drive the wafer carrier (3) and the friction transmission mechanism (4) to synchronously move longitudinally along the Y-axis driving groups (6);
the X-axis driving group (7) is arranged between the X-axis beam (5) and the wafer carrier (3) and drives the wafer carrier (3) and the friction transmission mechanism (4) to synchronously and transversely move along the X-axis beam (5), and meanwhile, the friction transmission mechanism (4) performs friction transmission to enable the carrying disc of the wafer carrier (3) to rotate, so that the angle of the wafer is adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210318975.3A CN114688183B (en) | 2022-03-29 | 2022-03-29 | Brake mechanism and angle modulation carrying platform adopting same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210318975.3A CN114688183B (en) | 2022-03-29 | 2022-03-29 | Brake mechanism and angle modulation carrying platform adopting same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114688183A CN114688183A (en) | 2022-07-01 |
| CN114688183B true CN114688183B (en) | 2022-11-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210318975.3A Active CN114688183B (en) | 2022-03-29 | 2022-03-29 | Brake mechanism and angle modulation carrying platform adopting same |
Country Status (1)
| Country | Link |
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| CN (1) | CN114688183B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4378709A (en) * | 1980-10-08 | 1983-04-05 | Anorad Corp. | Friction drive for positioning table |
| DE3925273A1 (en) * | 1988-08-12 | 1990-02-15 | Volkswagen Ag | Rolling track driven by flat belt - uses slide track for supporting belt without additional moving parts |
| JPH04210348A (en) * | 1990-12-12 | 1992-07-31 | Toshiba Corp | X-y table |
| JPH1026203A (en) * | 1996-07-12 | 1998-01-27 | Mitsutoyo Corp | Friction drive mechanism |
| CN103481254A (en) * | 2013-09-27 | 2014-01-01 | 苏州凯欧机械科技有限公司 | Novel workbench driven by friction pull rod |
| CN206123586U (en) * | 2016-10-14 | 2017-04-26 | 佛山市戈菲机电设备有限公司 | High efficiency heavy load tendency drive structure |
-
2022
- 2022-03-29 CN CN202210318975.3A patent/CN114688183B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4378709A (en) * | 1980-10-08 | 1983-04-05 | Anorad Corp. | Friction drive for positioning table |
| DE3925273A1 (en) * | 1988-08-12 | 1990-02-15 | Volkswagen Ag | Rolling track driven by flat belt - uses slide track for supporting belt without additional moving parts |
| JPH04210348A (en) * | 1990-12-12 | 1992-07-31 | Toshiba Corp | X-y table |
| JPH1026203A (en) * | 1996-07-12 | 1998-01-27 | Mitsutoyo Corp | Friction drive mechanism |
| CN103481254A (en) * | 2013-09-27 | 2014-01-01 | 苏州凯欧机械科技有限公司 | Novel workbench driven by friction pull rod |
| CN206123586U (en) * | 2016-10-14 | 2017-04-26 | 佛山市戈菲机电设备有限公司 | High efficiency heavy load tendency drive structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114688183A (en) | 2022-07-01 |
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