CN220650819U

CN220650819U - Wafer detection platform

Info

Publication number: CN220650819U
Application number: CN202322080587.9U
Authority: CN
Inventors: 黄国豪
Original assignee: Shenzhen Hannuo Precision Technology Co ltd
Current assignee: Shenzhen Hannuo Precision Technology Co ltd
Priority date: 2023-08-02
Filing date: 2023-08-02
Publication date: 2024-03-22
Anticipated expiration: 2033-08-02

Abstract

The application relates to the technical field of wafer detection and discloses a wafer detection platform, which comprises a platform base, a material storage module, a material taking module, a material calibration module and a material detection module; the material storage module, the material taking module, the material calibration module and the material detection module are arranged on the platform base; wherein, a material storage space is arranged in the material storage module and used for storing and placing materials to be detected; the material taking module is assembled on the platform base and comprises a first material taking arm and a second material taking arm; the material calibration module is provided with a material calibration area for placing the material to be detected and calibrating the placing coordinates of the material to be detected; the material detection module comprises a detection unit and is used for detecting materials; the first material taking arm takes out the material of the material storage module and then places the material in the material calibration module, and the second material taking arm takes out the material placed in the material calibration module and then places the material in the material detection module. The full-automatic detection device has the beneficial effects that full-automatic detection of materials can be realized.

Description

Wafer detection platform

Technical Field

The embodiment of the utility model relates to the technical field of wafer detection, in particular to a wafer detection platform.

Background

Chips are a generic term for semiconductor device products, which are carriers of integrated circuits, and are divided from wafers, which are important components of computers or other electronic devices. In short, electronic components such as resistors and capacitors and circuits formed by them are packaged integrally into a very small particle, known as a chip.

Typically, a series of inspection and test flows are required to produce Die structures (Die) on the resulting Wafer (Wafer) to ensure the quality of the chip product. The existing wafer detection and test cannot realize complete automatic detection, and a plurality of operation steps still depend on manual operation, so that the wafer detection efficiency is low.

Disclosure of Invention

The embodiment of the utility model mainly solves the technical problem of low detection efficiency caused by the fact that full-automatic detection cannot be realized by providing the wafer detection platform.

In order to solve the technical problems, the utility model adopts the following technical scheme: providing a wafer detection platform, which comprises a platform base, at least one material storage module, a material taking module, a material calibration module and a material detection module; the material storage module, the material taking module, the material calibration module and the material detection module are arranged on the platform base; wherein, a material storage space is arranged in the material storage module and is used for storing and placing materials to be detected; the material taking module is movably assembled on the platform base and comprises a first material taking arm and a second material taking arm; the material calibration module is provided with a material calibration area for placing the material to be detected and calibrating the placement coordinates of the material to be detected; the material detection module comprises a detection unit and is used for detecting the material to be detected; the first material taking arm is used for taking out materials of the material storage module and then placing the materials in the material calibration module, and the second material taking arm is used for taking out the materials placed in the material calibration module and then placing the materials in the material detection module.

Optionally, the platform base includes first installation region and second installation region, the module is stored to the material the get the material module and the module is calibrated to the material install in first installation region, the material detect module install in second installation region.

Optionally, the material taking module further includes a material taking body, and a first driving mechanism installed in the first installation area; the first material taking arm and the second material taking arm are arranged at one end of the material taking body, and the other end of the material taking body is assembled on the first driving mechanism; the first driving mechanism comprises a first mounting base, a first driving body, a first guide assembly and a first sliding table; the first mounting base, the first driving body and the first guide assembly are all arranged along a first direction; the first mounting base is fixed in the first mounting area, and the first driving body and the first guide assembly are both arranged on the first mounting base; the material taking body is fixedly arranged on the first sliding table, the first sliding table is provided with a first sliding block, and the first sliding table is assembled on the first guide assembly through the first sliding block; the first driving body is connected with the first sliding table, and the first sliding table can slide along the first guide assembly under the driving of the first driving body.

Optionally, the material storage module is located at one end of the first installation area in the first direction, and the material detection module is located at the other end of the first installation area in the first direction; when the first driving body is electrified and started, the material taking body is driven by the first driving body to move from one end of the first direction to the other end of the first direction along the first guide assembly.

Optionally, the material detection module comprises a mounting support, at least one material placement base and at least one detection unit; the mounting support comprises a base body and a cross beam which is arranged above the base body and is supported by a pair of opposite columns, the material placing base is mounted on the base body, and the detection unit is mounted on the cross beam; the material placing base table can move along a first direction, a second direction and a third direction which are perpendicular to each other, so that the material moves to a target position for detection by the detection unit.

Optionally, the material detection module further includes a second driving mechanism and at least one third driving mechanism, the second driving mechanism is disposed on the base body, the third driving mechanism is disposed on the second driving mechanism, and the material placement base is disposed on the third driving mechanism; the second driving mechanism drives the material placement base table to move along the first direction, and the third driving mechanism drives the material placement base table to move along the second direction; the first direction and the second direction are perpendicular to each other and parallel to the two directions of the base body.

Optionally, the second driving mechanism includes a second driving body, a second guiding assembly and at least one second sliding table; the second driving body and the second guiding assembly are both arranged on the base body along the first direction, the second sliding table is provided with a second sliding block, the second sliding table is assembled on the second guiding assembly through the second sliding block, the second sliding table is rigidly connected with the second driving body, and the second sliding table can move along the second guiding assembly under the driving of the second driving body; the third driving mechanism is fixedly assembled on the second sliding table.

Optionally, the third driving mechanism includes a third mounting base, a third driving body, a third guiding component and a third sliding table; the third installation base is fixedly assembled on the second sliding table, and the third driving body and the third guide assembly are both installed on the third installation base along the second direction; the third sliding table is provided with a third sliding block, and the third sliding table is assembled on the third guide assembly in a sliding way through the third sliding block; the third sliding table is rigidly connected to the third driving body, and the third sliding table can slide along the third guiding assembly under the driving of the third driving body.

Optionally, the material detection module further comprises a fourth driving mechanism, the fourth driving mechanism is installed on the third sliding table, and the material placement base is arranged on the fourth driving mechanism; the fourth driving mechanism drives the material placement base table to move in the third direction perpendicular to the base body, so that the material placement base table can be close to or far away from the detection unit in the third direction.

Optionally, the material detection module further comprises a fifth driving mechanism, and the fifth driving mechanism is arranged on the cross beam; the fifth driving mechanism comprises a fifth mounting base, a fifth driving body, a fifth guiding assembly and a fifth sliding table, wherein the fifth mounting base, the fifth driving body and the fifth guiding assembly are all arranged on the cross beam along the third direction, the fifth sliding table is provided with a fifth sliding block, the detecting unit is arranged on the fifth sliding table, the fifth sliding table is assembled on the fifth guiding assembly through the fifth sliding block, the fifth sliding table is rigidly connected with the fifth driving body, and the fifth sliding table can slide along the fifth guiding assembly under the driving of the fifth driving body.

The wafer detection platform provided by the embodiment of the application comprises a platform base, at least one material storage module, a material taking module, a material calibration module and a material detection module; the material storage module, the material taking module, the material calibration module and the material detection module are arranged on the platform base; wherein, a material storage space is arranged in the material storage module and used for storing and placing materials to be detected; the material taking module is movably assembled on the platform base and comprises a first material taking arm and a second material taking arm; the material calibration module is provided with a material calibration area for placing the material to be detected and calibrating the placing coordinates of the material to be detected; the material detection module comprises a detection unit and a detection unit, wherein the detection unit is used for detecting the material to be detected; the first material taking arm is used for taking out the material of the material storage module and then placing the material in the material calibration module, and the second material taking arm is used for taking out the material placed in the material calibration module and then placing the material in the material detection module. The full-automatic detection device has the beneficial effects that full-automatic detection of materials can be realized, labor cost is saved, and detection efficiency is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and that other drawings may be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is an exploded view of a wafer inspection platform according to an embodiment of the present disclosure;

fig. 2 is a schematic structural diagram of a wafer inspection platform according to an embodiment of the present disclosure;

FIG. 3 is a schematic structural view of a platform base according to an embodiment of the present disclosure;

fig. 4 is a schematic structural diagram of a material taking module provided in an embodiment of the present application;

FIG. 5 is an exploded view of a first drive mechanism provided in an embodiment of the present application, showing the configuration in one direction;

FIG. 6 is an exploded view of a first drive mechanism according to an embodiment of the present application, showing the structure in another direction;

fig. 7 is a schematic structural diagram of a material detection module provided in an embodiment of the present application, which illustrates a structural situation in one direction;

FIG. 8 is an enlarged schematic view of portion A of FIG. 7;

FIG. 9 is an enlarged schematic view of portion B of FIG. 7;

fig. 10 is a schematic structural diagram of a material detection module provided in an embodiment of the present application, which illustrates a structural situation in another direction;

FIG. 11 is an enlarged schematic view of portion C of FIG. 10;

fig. 12 is a schematic structural diagram of a material detection module provided in an embodiment of the present application, illustrating a structural situation in still another direction;

FIG. 13 is an enlarged schematic view of portion D of FIG. 12;

Fig. 14 is an exploded view of a fourth drive mechanism provided in an embodiment of the present application, showing the configuration in one of the directions;

fig. 15 is an exploded view of a fourth driving mechanism provided in the embodiment of the present application, showing the structure in another direction;

fig. 16 is an exploded view of a fourth drive mechanism provided in an embodiment of the present application, showing the structure in yet another direction;

FIG. 17 is a schematic view of an assembly of a support and a rolling element provided in an embodiment of the present application;

fig. 18 is an exploded view of a fourth drive mechanism provided in an embodiment of the present application, showing the structure in yet another direction;

fig. 19 is an exploded view of a fifth drive mechanism provided in an embodiment of the present application, showing the configuration in one of the directions;

FIG. 20 is an enlarged schematic view of portion E of FIG. 19;

fig. 21 is an exploded view of a fifth drive mechanism provided in an embodiment of the present application, showing the construction in another direction;

fig. 22 is an enlarged schematic view of the portion F in fig. 21.

Reference numerals illustrate:

1. a wafer inspection platform; x, a first direction; y, the second direction; z, third direction; 10. a platform base; s11, a first installation area; s12, a second installation area; 20. a material storage module; 30. a material taking module; 31. a first take-out arm; 32. a second take-out arm; 33. a material taking body; 34. a first driving mechanism; 341. a first mounting base; 342. a first driving body; 3421. a first stator; 3422. a first mover; 343. a first guide assembly; 3431. a first guide rail; 344. a first sliding table; 3441. a first slider; 3442. a first baffle; 345. a first travel limiting device; 3461. a first reader; 3462. a first optical ruler; 40. a material calibration module; 50. a material detection module; 51. a mounting support; 511. a base body; 512. a column; 513. a cross beam; 52. a material placement base; 521. a load transfer board; 522. a rotating assembly; 53. a detection unit; 542. a second guide assembly; 5421. a second guide rail; 543. a second sliding table; 5431. a second slider; 5432. a second baffle; 544. a second stroke limiter; 5451. a second readhead; 55. a third driving mechanism; 551. a third mounting base; 553. a third guide assembly; 5531. a third guide rail; 554. a third sliding table; 5541. a third slider; 5542. a third baffle; 555. a third stroke limiter; 5561. a third read header; 5562. a third optical ruler; 56. a fourth driving mechanism; 561. a fourth mounting base; 562. a fourth driving body; 563. an active support; 5631. a fourth baffle; 5632. a first inclined groove; 564. a driven bracket; 5641. a second inclined groove; 565. a support frame; 566. a rolling member; 567. an encoder; 568. a fourth stroke limiter; 5691. a fourth read head; 5692. a fourth optical ruler; 57. a fifth driving mechanism; 571. a fifth mounting base; 572. a fifth driving body; 573. a fifth guide assembly; 5731. a fifth guide rail; 574. a fifth sliding table; 5741. a fifth slider; 5742. a fifth baffle; 575. a fifth stroke limiting device; 5761. a fifth read head; 5762. a fifth optical ruler; 58. an air-float shock absorbing device; 60. and controlling the device.

Detailed Description

In order that the utility model may be readily understood, a more particular description thereof will be rendered by reference to specific embodiments that are illustrated in the appended drawings. It will be understood that when an element is referred to as being "fixed" to another element, it can be directly on the other element or one or more intervening elements may be present therebetween. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or one or more intervening elements may be present therebetween. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used in this specification includes any and all combinations of one or more of the associated listed items.

As shown in fig. 1 and 2, there are shown an exploded view and a structural view of a wafer inspection stage 1, respectively, the wafer inspection stage 1 comprising: the platform base 10, at least one material storage module 20, a material taking module 30, a material calibration module 40 and a material detection module 50 are arranged on the platform base 10, and the material storage module 20, the material taking module 30, the material calibration module 40 and the material detection module 50 are arranged on the platform base 10.

Wherein, a material storage space is arranged in the material storage module 20 for storing and placing materials to be detected; the material taking module 30 is movably assembled on the platform base 10, and the material taking module 30 comprises a first material taking arm 31 and a second material taking arm 32; the material calibration module 40 is provided with a material calibration area for placing the material to be detected and calibrating the placement coordinates of the material to be detected; the material detection module 50 comprises a detection unit 53 for detecting a material to be detected; the first material taking arm 31 is used for taking out the material of the material storage module 20 and then placing the material in the material calibration module 40, and the second material taking arm 32 is used for taking out the material placed in the material calibration module 40 and then placing the material in the material detection module 50.

As in fig. 3, the structure of the platform base is shown. The platform base 10 may be formed by a plurality of struts and/or support plates fixedly connected. The platform base 10 includes a first installation area S11 and a second installation area S12, the first installation area S11 and the second installation area S12 are respectively disposed on two sides of the platform base 10, the material storage module 20, the material taking module 30 and the material calibration module 40 are installed in the first installation area S11, and the material detection module 50 is installed in the second installation area S12.

As shown in fig. 4, the structure of the take out module 30 is shown. The material taking module 30 further includes a material taking body 33, and a first driving mechanism 34 installed in the first installation area S11, where the first material taking arm 31 and the second material taking arm 32 are disposed at one end of the material taking body 33, and the other end of the material taking body 33 is assembled on the first driving mechanism 34.

As in fig. 5 and 6, exploded views of the first drive mechanism are shown. The first driving mechanism 34 includes a first mounting base 341, a first driving body 342, a first guiding component 343 and a first sliding table 344, where the first mounting base 341, the first driving body 342 and the first guiding component 343 are all disposed along a first direction x, the first mounting base 341 is fixed in a first mounting area S11, the first driving body 342 and the first guiding component 343 are both disposed on the first mounting base 341, the material taking body 33 is fixedly mounted on the first sliding table 344, the first sliding table 344 is provided with a first sliding block 3441, the first sliding table 344 is assembled on the first guiding component 343 through the first sliding block 3441, the first driving body 342 is connected with the first sliding table 344, and the first sliding table 344 can slide along the first guiding component 343 under the driving of the first driving body 342.

In some embodiments, as shown in fig. 5, the first driving body 342 may be a linear motor, a pneumatic valve, a hydraulic valve, or other suitable power element.

For convenience of description, the linear motor used as the first driving body 342 will be referred to as a first linear motor in this application by taking the linear motor as an example. The first linear motor includes a first stator 3421 and a first mover 3422, wherein the first stator 3421 is fixedly assembled to the first mounting base 341, and the first mover 3422 is rigidly connected to the first sliding table 344 and slidably assembled to the first stator 3421. The first mover 3422 may drive the first sliding table 344 to move along the first guiding assembly 343 after the first linear motor is energized.

In some embodiments, the first guide assembly 343 may include two first guide rails 3431 parallel to each other, and the first linear motor is disposed between the two first guide rails 3431 parallel to each other.

The material taking body 33 is fixedly assembled on the first sliding table 344, the first sliding table 344 is rigidly connected to the first runner 3422, the first sliding block 3441 is slidingly assembled on the first guide rail 3431, and when the first linear motor is powered on, the first sliding table 344 is driven by the first runner 3422 to slide along the first guide rail 3431.

As shown in fig. 6, the first driving mechanism 34 further includes two first travel limiting devices 345 fixedly mounted on one side of the first mounting base 341 along the first direction x, and respectively disposed at two ends of the movement travel of the first sliding table 344.

Of the two first travel limiting devices 345, one first travel limiting device 345 is disposed near a first end of the first rail 3431 and the other first travel limiting device 345 is disposed near a second end of the first rail 3431. Correspondingly, the first sliding table 344 may be provided with a first blocking piece 3442, and when the first travel limiting device 345 senses the first blocking piece 3442, the first sliding table 344 can be controlled to stop and reverse at the end of the sliding travel.

Referring to fig. 5, the first driving mechanism 34 further includes a first detecting device disposed on the first mounting base 341 and the first sliding table 344, for detecting and acquiring position information of the first sliding table 344. The first detection device may employ a high resolution grating measurement system, and for convenience of description, the grating measurement system used as the first detection device will be referred to as a first grating measurement system.

The first grating measuring system includes a first reading head 3461 and a first optical ruler 3462, where the first reading head 3461 may be disposed on a side surface of the first sliding table 344, the first optical ruler 3462 may be adhered on a side surface of the first mounting base 341, and when the first linear motor is powered on, the first linear motor drives the first sliding block 3441 or the first sliding table 344 to perform linear motion along the first guide rail 3431, and through the first grating measuring system, position information of the first sliding table 344 may be detected and obtained in real time.

As shown in fig. 2, the material storage module 20 is located at one end of the first mounting area S11 in the first direction x, and is used for storing materials; the material calibration module 40 is located at the other end of the first installation area S11 in the first direction x, and is used for calibrating the installation coordinates of the material taken out from the material storage module.

When the first driving body 342 is powered on, the material taking body 33 is driven by the first driving body 342 to move from one end (e.g. the first end) of the first direction x to the other end (e.g. the second end) of the first direction x along the first guiding component 343, so that the material taking body 33 can take out the material from the material storage module 20 and place the material on the material calibration module 40, or the material taking body 33 can return from one end of the material calibration module 40 to pick up the material again and place the material on the material calibration module 40.

As shown in fig. 7, the structure of the material detection module is shown. The material detection module 50 comprises a mounting support 51, at least one material placement base 52 and at least one detection unit 53. The mounting support 51 includes a base body 511, and a beam 513 disposed above the base body 511 and supported by a pair of columns 512, the material placement base 52 is mounted on the base body 511, and the detection unit 53 is mounted on the beam 513. The material placement base 52 is movable in a first direction x, a second direction y, and a third direction z perpendicular to each other to move the material to a target position for detection by the detection unit 53.

The material detection module 50 further includes a second drive mechanism and at least one third drive mechanism 55 (e.g., two). The second driving mechanism is arranged on the base body 511, the third driving mechanism 55 is arranged on the second driving mechanism, and the material placing base 52 is arranged on the third driving mechanism 55.

The second driving mechanism drives the material placement base 52 to move in the first direction x, and the third driving mechanism 55 drives the material placement base 52 to move in the second direction y. Wherein the first direction x and the second direction y are perpendicular to each other and parallel to the two directions of the base body 511.

As shown in fig. 8 and 9, the structure of the second driving mechanism is shown. The second driving mechanism includes a second driving body (not shown in the drawings), a second guide assembly 542, and at least one second sliding table 543, and two second sliding tables 543 may be provided in this application.

The second driving body (not shown in the figure) and the second guiding component 542 are both installed on the base body 511 along the first direction x, the second sliding table 543 is provided with a second sliding block 5431, the second sliding table 543 is assembled on the second guiding component 542 through the second sliding block 5431, the second sliding table 543 is rigidly connected with the second driving body, and the second sliding table 543 can slide along the second guiding component 542 under the driving of the second driving body.

In some embodiments, the second drive body may be a linear motor, a pneumatic valve, or a hydraulic valve, among other suitable power elements.

For convenience of description, taking the linear motor as an example, the linear motor used as the second driving body will be referred to as a second linear motor. The second linear motor includes a second stator fixedly assembled to the surface of the base body 511, and a second mover rigidly connected to the second sliding table 543 and slidably assembled to the second stator. The second mover may drive the second sliding table 543 to move along the second guide assembly 542 after the second linear motor is energized.

In some embodiments, the second guide assembly 542 may include two second guide rails 5421 parallel to each other, and the second linear motor is disposed between the two second guide rails 5421 parallel to each other.

The third driving mechanism 55 is fixedly assembled on the second sliding table 543, the second sliding table 543 is rigidly connected to the second mover, the second sliding block 5431 is slidingly assembled on the second guide rail 5421, and when the second linear motor is powered on, the second sliding table 543 can be driven by the second mover to slide along the second guide rail 5421.

As shown in fig. 9, the second drive mechanism further includes a second travel limiter 544. For each second sliding table 543, two second travel limiting devices 544 may be correspondingly provided, and the second sliding table 543 is fixedly mounted on one side of the base body 511 along the first direction x, and is respectively provided at two ends of the movement travel of the second sliding table 543. Correspondingly, the second sliding table 543 may be provided with a second blocking piece 5432 (as shown in fig. 8), and when the second stroke limiting device 544 senses the second blocking piece 5432, the second sliding table 543 can be controlled to stop and reverse at the end of the sliding stroke.

As shown in fig. 8, the second driving mechanism further includes a second detecting device, which is disposed on the base body 511 and the second sliding table 543, and is configured to detect and acquire position information of the second sliding table 543.

The second detection device may employ a high resolution grating measurement system, and for convenience of description, the grating measurement system used as the second detection device will be referred to herein as a second grating measurement system. The second grating measurement system includes a second reading head 5451 and a second optical ruler (not shown in the figure), where the second reading head 5451 may be disposed on a side surface of the second sliding table 543, the second optical ruler may be adhered to a corresponding surface of the base body 511, and when the second linear motor is powered on, the second linear motor drives the second sliding block 5431 or the second sliding table 543 to perform linear motion along the second guide rail 5421, and through the second grating measurement system, position information of the second sliding table 543 may be detected and obtained in real time.

As shown in fig. 9, the structure of the third driving mechanism in one direction is shown. The third driving mechanism 55 includes a third mounting base 551, a third driving body (not shown in the drawing), a third guiding component 553 and a third sliding table 554, where the third mounting base 551 is fixedly assembled on the second sliding table 543, the third driving body and the third guiding component 553 are both mounted on the third mounting base 551 along a second direction y perpendicular to the first direction x, the third sliding table 554 is provided with a third sliding block 5541, the third sliding table 554 is slidably assembled on the third guiding component 553 through the third sliding block 5541, the third sliding table 554 is rigidly connected to the third driving body, and the third sliding table 554 can slide along the third guiding component 553 under the driving of the third driving body.

In some embodiments, the third drive body may be a linear motor, a pneumatic valve, or a hydraulic valve, among other suitable power elements.

For convenience of description, taking the linear motor as an example, the linear motor used as the third driving body will be referred to as a third linear motor. The third linear motor includes a third stator fixedly assembled to the surface of the third mounting base 551, and a third mover rigidly connected to the third sliding table 554 and slidably assembled to the third stator. The third mover may drive the third sliding table 554 to move along the second guide assembly 542 after the third linear motor is energized.

In some embodiments, the third guide assembly 553 may include two third guide rails 5531 that are parallel to each other, and the second linear motor is disposed between the two third guide rails 5531 that are parallel to each other.

The material placing base 52 is fixedly assembled on the third sliding table 554, the third sliding table 554 is rigidly connected to the third rotor, the third sliding block 5541 is slidingly assembled on the third guide rail 5531, and when the third linear motor is electrified, the third sliding table 554 is driven by the third rotor to slide along the third guide rail 5531.

Fig. 11 shows the structure of the third driving mechanism in the other direction. Each third drive mechanism 55 further includes two third travel limit devices 555. For each third sliding table 554, two third stroke limiting devices 555 are fixedly mounted on one side of the third mounting base 551 along the second direction y, and are respectively arranged at two ends of the movement stroke of the third sliding table 554. Correspondingly, the third sliding table 554 may be provided with a third baffle 5542, and when the third stroke limiting device 555 senses the third baffle 5542, the third sliding table 554 can be controlled to stop and reverse at the end of the sliding stroke.

Referring to fig. 9, the third driving mechanism 55 further includes a third detecting device, which is disposed on the third mounting base 551 and the third sliding table 554, and is configured to detect and acquire position information of the third sliding table 554.

The third detection device may also employ a high resolution grating measurement system, and for convenience of description, the grating measurement system used as the third detection device will be referred to as a third grating measurement system. The third grating measuring system includes a third reading head 5561 and a third optical ruler 5562, where the third reading head 5561 may be disposed on a side surface of the third sliding table 554, and the third optical ruler 5562 may be adhered to a side surface of the third mounting base 551. When the third linear motor is powered on and started, the third linear motor drives the third slider 5541 or the third sliding table 554 to do linear motion along the third guide rail 5531, and the position information of the third sliding table 554 can be detected and acquired in real time through the third grating measuring system.

As shown in fig. 9 and 11, the material detecting module 50 further includes a fourth driving mechanism 56, the fourth driving mechanism 56 is mounted on the third sliding table 554, and the material placing base 52 is disposed on the fourth driving mechanism 56. The fourth driving mechanism 56 is used to drive the material placement base 52 to move in a third direction z perpendicular to the base body 511, so that the material placement base 52 can be moved closer to or farther from the detection unit 53 in the third direction z.

As in fig. 12 and 13, schematic views of the fourth drive mechanism in two different directions are shown, respectively. The fourth driving mechanism 56 may be a lift motor module including a fourth mounting base 561, a fourth driving body 562, a driving bracket 563, and a driven bracket 564.

The fourth mounting base 561 is disposed on the third sliding table 554, the driven support 564 is disposed on the fourth mounting base 561, and the driven support 564 can reciprocate on the fourth mounting base 561 along a third direction z perpendicular to the surface of the third sliding table 554 relative to the fourth mounting base 561.

The fourth driving body 562 is disposed on the third sliding table 554, and the driving bracket 563 is connected to the driven bracket 564. The fourth driving body 562 is used for driving the driving bracket 563 to move, so as to drive the driven bracket 564 to reciprocate on the fourth mounting base 561.

It will be appreciated that in some embodiments, the fourth mounting base 561 may include a motor and a screw that is threadably coupled to the active support 563, the motor driving the screw to rotate, thereby moving the active support 563. Alternatively, the fourth mounting base 561 may be a driving structure such as a stepping motor, a rack and pinion, a worm gear, or the like.

As shown in fig. 14, the driving bracket 563 is provided with a first inclined groove 5632, and the driven bracket 564 is provided with a second inclined groove 5641. As shown in fig. 15, the lift motor module further includes a support frame 565 and a plurality of rollers 566, and the plurality of rollers 566 are disposed on the support frame 565, so that the movement of the plurality of rollers 566 is smoother and more uniform.

The supporting frame 565 is provided between the first inclined groove 5632 and the second inclined groove 5641, and the rolling member 566 is in contact with and connected to the first inclined groove 5632 and the second inclined groove 5641, respectively. When the fourth driving body 562 drives the driving bracket 563 to move, the driving bracket 563 drives the driven bracket 564 to move through the rolling member 566, so that the driven bracket 564 performs the elevating movement on the fourth mounting base 561.

By providing the plurality of rolling members 566 between the first inclined groove 5632 and the second inclined groove 5641, the movement between the driving bracket 563 and the driven bracket 564 can be changed from sliding to rolling, the abrasion between the driving bracket 563 and the driven bracket 564 is greatly reduced, the service lives of the driving bracket 563 and the driven bracket 564 can be prolonged, and the lifting precision of the lifting motor module can be improved. It will be appreciated that the rolling members 566 may be spherical balls or cylindrical rollers.

Referring to fig. 14, a material placement base 52 is provided on the fourth driving mechanism 56, and the material placement base 52 includes a load adapter plate 521 and a rotating assembly 522. The load adapter plate 521 is disposed on the rotating assembly 522, and the load adapter plate 521 is used for mounting a material to be detected; the rotating assembly 522 is disposed on the driven bracket 564. The rotating assembly 522 can drive the load adapter plate 521 to rotate relative to the driven bracket 564, so that the to-be-processed detection member clamped on the load adapter plate 521 can complete the rotation movement, and the processing and the detection are facilitated. It is understood that the rotating assembly 522 may be a rotary motor.

As shown in fig. 12, the fourth drive mechanism 56 further includes a fourth travel stop 568. For each driving bracket 563 of the fourth driving mechanism 56, at least one fourth travel limiting device 568 may be correspondingly provided, and fixedly installed on one side of the fourth installation base along the second direction y, and disposed in the moving direction of the driving bracket 563. Correspondingly, the driving support 563 may be provided with a fourth blocking piece 5631, and when the fourth stroke limiter 568 senses the fourth blocking piece 5631, the driving support 563 can be controlled to stop and reverse at the end of the sliding stroke.

As shown in fig. 13, the fourth driving mechanism 56 further includes a fourth detecting device provided on the fourth mounting base and the driven bracket 564 for detecting and acquiring the position information of the driven bracket 564.

The fourth detection device may employ a high resolution grating measurement system, and for convenience of description, the grating measurement system used as the fourth detection device will be referred to as a fourth grating measurement system. The fourth grating measuring system includes a fourth reading head 5691 and a fourth optical ruler 5692, where the fourth reading head 5691 may be disposed on the driving support 563, the fourth optical ruler 5692 may be adhered to a corresponding surface of the fourth mounting base, and when the fourth linear motor is powered on, the fourth linear motor drives the driving support 563 to perform linear motion along the second direction y, and the driven support 564 performs linear motion along the third direction z, so that the position information of the driven support 564 may be detected and obtained in real time through the fourth grating measuring system.

As shown in fig. 18 and 20, the material detecting module 50 further includes a fifth driving mechanism 57, and the fifth driving mechanism 57 is disposed on the cross beam 513. The fifth driving mechanism 57 includes a fifth mounting base 571, a fifth driving body 572, a fifth guiding assembly 573, and a fifth sliding table 574, where the fifth mounting base 571, the fifth driving body 572, and the fifth guiding assembly 573 are all mounted on the cross beam 513 along the third direction z, the fifth sliding table 574 is provided with a fifth sliding block 5741, the detecting unit 53 is mounted on the fifth sliding table 574, the fifth sliding table 574 is assembled on the fifth guiding assembly 573 through the fifth sliding block 5741, the fifth sliding table 574 is rigidly connected to the fifth driving body 572, and the fifth sliding table 574 can slide along the fifth guiding assembly 573/the third direction z under the driving of the fifth driving body 572.

In some embodiments, the fifth drive body 572 may be a suitable power element such as a linear motor, a pneumatic valve, or a hydraulic valve.

For convenience of description, the linear motor used as the fifth driving body 572 will be referred to herein as a fifth linear motor, taking the linear motor as an example. The fifth linear motor includes a fifth stator fixedly mounted on the surface of the fifth mounting base 571 and a fifth mover rigidly connected to the fifth sliding table 574 and slidably mounted on the fifth stator. The fifth mover may drive the fifth sliding table 574 to move along the fifth guiding assembly 573 after the fifth linear motor is energized.

In some embodiments, the fifth guide assembly 573 may include two fifth guide rails 5731 parallel to each other, and the fifth linear motor is disposed between the two fifth guide rails 5731 parallel to each other.

The detection unit 53 is fixedly assembled on the fifth sliding table 574, the fifth sliding table 574 is rigidly connected to the fifth rotor, the fifth sliding block 5741 is slidingly assembled on the fifth guide rail 5731, and when the fifth linear motor is electrified, the fifth sliding table 574 is driven by the fifth rotor to slide along the fifth guide rail 5731.

As shown in fig. 20, the fifth driving mechanism 57 further includes two fifth stroke limiting devices 575 fixedly mounted on one side of the fifth mounting base 571 along the third direction z, and respectively disposed at two ends of the movement stroke of the fifth sliding table 574. Of the two fifth travel limiting devices 575, one fifth travel limiting device 575 is disposed proximate a first end of the fifth rail 5731 and the other fifth travel limiting device 575 is disposed proximate a second end of the fifth rail 5731. Correspondingly, the fifth sliding table 574 may be provided with a fifth baffle 5742, and when the fifth stroke limiting device 575 senses the fifth baffle 5742, the fifth sliding table 574 can be controlled to stop and reverse at the end of the sliding stroke.

As shown in fig. 18, the fifth driving mechanism 57 further includes fifth detecting means provided on the fifth mounting base 571 and the fifth slide table 574 for detecting and acquiring positional information of the fifth slide table 574. The fifth detection device may employ a high resolution grating measurement system, and for convenience of description, the grating measurement system used as the fifth detection device will be referred to as a fifth grating measurement system. The fifth grating measuring system includes a fifth reading head 5761 and a fifth optical ruler 5762, where the fifth reading head 5761 may be disposed on a side surface of the fifth sliding table 574, the fifth optical ruler 5762 may be adhered to a corresponding surface of the fifth mounting base 571, and when the fifth linear motor is powered on, the fifth linear motor drives the fifth slider 5741 or the fifth sliding table 574 to perform linear motion along the fifth guide rail 5731, and through a fifth detection device, position information of the fifth sliding table 574 may be detected and obtained in real time.

The wafer inspection platform 1 may further include a plurality of air-floating shock absorbing devices, wherein an assembly gap with a preset size is provided between the base body 511 and the platform base 10, and the air-floating shock absorbing devices are assembled in the assembly gap; and the control device 60 is electrically connected to the material taking module 30, the material calibration module 40 and the material detection module 50, and is used for controlling the movement of the material taking module 30, the material calibration module 40 and the material detection module 50.

In order to better understand the technical solutions of the present application, the following schematic description is made on the wafer inspection platform 100 provided in the embodiments of the present application in conjunction with the process steps.

The material taking window of the material storage module is opened, the first material taking arm of the material taking module takes out materials from the material taking window, the material calibration module is placed to identify the position coordinates of the materials, and the second material taking arm of the material taking module takes down the materials on the material calibration module and is placed in the material detection module for detection.

The first material taking arm continues to take out materials from the material storage module, and after the second material taking arm takes away materials from the material calibration module to enable the material calibration module to be free, the first material taking arm places the materials.

In the wafer testing platform that this application provided, the module is stored to the material, the material is placed the base and the detecting element is equipped with two respectively, constitutes two detection mechanism, that is, every detection mechanism all includes a material and stores the module, a material is placed the base and a detecting element, and two detection mechanism use in turn to raise the efficiency. In the process of alternately using the two detection mechanisms, if the material taking module cannot reach a preset target position, the first material taking arm or the second material taking arm can be stretched to reach a working position to complete target actions.

According to the wafer detection platform, the linear motor capable of directly generating linear motion without passing through the intermediate conversion mechanism is adopted, so that the structure of the high-precision wafer detection platform is greatly simplified, the motion inertia is reduced, the dynamic response performance and the positioning accuracy are greatly improved, meanwhile, the reliability is improved, the cost is saved, and the manufacturing and maintenance are simpler and more convenient. Moreover, the adoption of the air floatation vibration isolator greatly reduces the vibration generated during the movement of the whole platform, is far superior to other forms of shock absorbers, reduces vibration fatigue and noise, and ensures the movement precision of each shaft.

It should be noted that the description of the present utility model and the accompanying drawings illustrate preferred embodiments of the present utility model, but the present utility model may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, which are not to be construed as additional limitations of the utility model, but are provided for a more thorough understanding of the present utility model.

The above-described features are further combined with each other to form various embodiments not listed above, and are considered to be the scope of the present utility model described in the specification; further, modifications and variations of the present utility model may be apparent to those skilled in the art in light of the foregoing teachings, and all such modifications and variations are intended to be included within the scope of this utility model as defined in the appended claims.

Claims

1. The wafer detection platform is characterized by comprising a platform base, at least one material storage module, a material taking module, a material calibration module and a material detection module;

the material storage module, the material taking module, the material calibration module and the material detection module are arranged on the platform base;

Wherein, a material storage space is arranged in the material storage module and is used for storing and placing materials to be detected; the material taking module is movably assembled on the platform base and comprises a first material taking arm and a second material taking arm; the material calibration module is provided with a material calibration area for placing the material to be detected and calibrating the placement coordinates of the material to be detected; the material detection module comprises a detection unit and is used for detecting the material to be detected;

the first material taking arm is used for taking out materials of the material storage module and then placing the materials in the material calibration module, and the second material taking arm is used for taking out the materials placed in the material calibration module and then placing the materials in the material detection module.

2. The wafer inspection platform of claim 1, wherein the platform base includes a first mounting region and a second mounting region,

the material storage module, the material taking module and the material calibration module are installed in the first installation area, and the material detection module is installed in the second installation area.

3. The wafer inspection platform of claim 2, wherein the pick-up module further comprises a pick-up body and a first drive mechanism mounted to the first mounting area; the first material taking arm and the second material taking arm are arranged at one end of the material taking body, and the other end of the material taking body is assembled on the first driving mechanism;

The first driving mechanism comprises a first mounting base, a first driving body, a first guide assembly and a first sliding table; the first mounting base, the first driving body and the first guide assembly are all arranged along a first direction; the first mounting base is fixed in the first mounting area, and the first driving body and the first guide assembly are both arranged on the first mounting base; the material taking body is fixedly arranged on the first sliding table, the first sliding table is provided with a first sliding block, and the first sliding table is assembled on the first guide assembly through the first sliding block; the first driving body is connected with the first sliding table, and the first sliding table can slide along the first guide assembly under the driving of the first driving body.

4. The wafer inspection platform of claim 3, wherein the material storage module is located at one end of the first mounting area in the first direction, and the material inspection module is located at the other end of the first mounting area in the first direction;

when the first driving body is electrified and started, the material taking body is driven by the first driving body to move from one end of the first direction to the other end of the first direction along the first guide assembly.

5. The wafer inspection platform of claim 4, wherein the material inspection module comprises a mounting support, at least one material placement base, and at least one inspection unit;

the mounting support comprises a base body and a cross beam which is arranged above the base body and is supported by a pair of opposite columns, the material placing base is mounted on the base body, and the detection unit is mounted on the cross beam;

the material placing base table can move along a first direction, a second direction and a third direction which are perpendicular to each other, so that the material moves to a target position for detection by the detection unit.

6. The wafer inspection platform of claim 5, wherein the material inspection module further comprises a second drive mechanism and at least one third drive mechanism,

the second driving mechanism is arranged on the base body, the third driving mechanism is arranged on the second driving mechanism, and the material placing base is arranged on the third driving mechanism;

the second driving mechanism drives the material placement base table to move along the first direction, and the third driving mechanism drives the material placement base table to move along the second direction;

The first direction and the second direction are perpendicular to each other and parallel to the two directions of the base body.

7. The wafer inspection platform of claim 6, wherein the second drive mechanism comprises a second drive body, a second guide assembly, and at least one second slide table;

the second driving body and the second guiding assembly are both arranged on the base body along the first direction, the second sliding table is provided with a second sliding block, the second sliding table is assembled on the second guiding assembly through the second sliding block, the second sliding table is rigidly connected with the second driving body, and the second sliding table can move along the second guiding assembly under the driving of the second driving body; the third driving mechanism is fixedly assembled on the second sliding table.

8. The wafer inspection platform of claim 7, wherein the third drive mechanism comprises a third mounting base, a third drive body, a third guide assembly, and a third slide table;

the third installation base is fixedly assembled on the second sliding table, and the third driving body and the third guide assembly are both installed on the third installation base along the second direction;

The third sliding table is provided with a third sliding block, and the third sliding table is assembled on the third guide assembly in a sliding way through the third sliding block;

the third sliding table is rigidly connected to the third driving body, and the third sliding table can slide along the third guiding assembly under the driving of the third driving body.

9. The wafer inspection platform of claim 8, wherein the material inspection module further comprises a fourth driving mechanism, the fourth driving mechanism is mounted on the third sliding table, and the material placement base is disposed on the fourth driving mechanism; the fourth driving mechanism drives the material placement base table to move in the third direction perpendicular to the base body, so that the material placement base table can be close to or far away from the detection unit in the third direction.

10. The wafer inspection platform of claim 5, wherein the material inspection module further comprises a fifth drive mechanism, the fifth drive mechanism being disposed on the cross beam;

the fifth driving mechanism comprises a fifth mounting base, a fifth driving body, a fifth guiding component and a fifth sliding table, wherein the fifth mounting base, the fifth driving body and the fifth guiding component are all arranged on the cross beam along the third direction,

The detection unit is mounted on the fifth sliding table, the fifth sliding table is assembled on the fifth guide assembly through the fifth sliding block, the fifth sliding table is rigidly connected with the fifth driving body, and the fifth sliding table can slide along the fifth guide assembly under the driving of the fifth driving body.