CN219511562U - Precision detection platform - Google Patents

Abstract

The embodiment of the utility model relates to the technical field of mechanical equipment, and discloses a precision detection platform. It comprises the following steps: platform base, testing platform body, first actuating mechanism, second actuating mechanism, third actuating mechanism, fourth actuating mechanism. The testing platform body includes: the base, locate a pair of stand of base and connect the crossbeam between a pair of stand; the first driving mechanism is arranged in the base and used for driving the objective table to move along a first direction on the target plane; the second driving mechanism is arranged in the base and used for driving the objective table to move along a second direction on the target plane; the third driving mechanism is arranged on the cross beam and used for driving the detection equipment to move along a third direction; the fourth driving mechanism is arranged on the cross beam and used for driving the detection equipment to move along the fourth direction; an air floatation vibration isolator is arranged between the platform base and the base. According to the structural design, the motion precision of each shaft can be effectively improved by using the second air floatation vibration isolator, and accurate detection and processing are realized.

Description

Precision detection platform

Technical Field

The utility model relates to the technical field of mechanical equipment, in particular to a precision detection platform.

Background

The high-precision detection platform is mainly applied to detection, test, measurement and scanning of various precision 3C electronic products, and realizes high-efficiency and high-precision automatic detection of the 3C electronic products.

In the implementation process of the embodiment of the utility model, the inventor finds that: in the high-speed operation of each shaft driving mechanism, the traditional 3C detection platform cannot guarantee the precision of each shaft, and accurate detection is realized.

Disclosure of Invention

The technical problem to be solved mainly by the embodiment of the utility model is to provide the precise detection platform, which can effectively improve the motion precision of the detection platform, thereby improving the detection effect.

The implementation of the utility model provides a precision detection platform, which comprises the following components: a platform base; a detection platform body; the detection platform body includes: the device comprises a base, a pair of upright posts extending from the upper surface of the base to a preset height and a cross beam connected between the pair of upright posts; a first driving mechanism; the first driving mechanism is arranged in the base and used for driving the objective table to move along a first direction on the target plane; the target plane is a plane parallel to the upper surface of the base; a second driving mechanism; the second drive is arranged in the base and used for driving the objective table to move along a second direction on the target plane; the second direction is perpendicular to the first direction; a third driving mechanism; the third driving mechanism is arranged on the cross beam and used for driving the detection equipment to move along a third direction; the third direction is parallel to the first direction; a fourth driving mechanism; the fourth driving mechanism is arranged on the cross beam and used for driving the detection equipment to move along a fourth direction; the fourth direction is a direction perpendicular to the target plane; a gap with a preset height is arranged between the platform base and the lower surface of the base; an air floatation vibration isolator is arranged between the platform base and the base.

In some embodiments, the first drive mechanism comprises: a first mechanism body; the first mechanism body is provided with a first guide rail extending along the first direction; a first sliding table; the lower surface of the first sliding table is provided with a first sliding block, and the upper surface of the first sliding table is rigidly connected with the objective table; the first sliding block is sleeved on the first guide rail so that the first sliding table moves back and forth along the first direction; a first linear motor; the first linear motor is arranged in the first mechanism body and used for driving the first sliding table to move; a first detection device; the first detection device is assembled on the first mechanism body and the first sliding table and used for detecting and acquiring the position information of the first sliding table.

In some embodiments, further comprising: a first organ cover separable into a first portion and a second portion; wherein, both ends of the first part are respectively fixed at the first end of the first mechanism body and one side of the first sliding table; the two ends of the second part are respectively fixed at the second end of the first mechanism body and the other side of the first sliding table.

In some embodiments, the second drive mechanism comprises: a second mechanism body; the second mechanism body is provided with a second guide rail extending along the second direction; a second slider; the second sliding block is rigidly connected to the bottom of the first mechanism body, and is sleeved on the second guide rail so as to enable the first mechanism body to reciprocate along the second direction; a second linear motor; the second linear motor is arranged in the second mechanism body and used for driving the first mechanism body to move; a second detection device; the second detection device is assembled on the second mechanism body and the first mechanism body and is used for detecting and acquiring the position information of the first mechanism body.

In some embodiments, further comprising: a second organ cover separable into a third portion and a fourth portion; wherein, both ends of the third part are respectively fixed at the first end of the second mechanism body and one side of the first mechanism body; the two ends of the fourth part are respectively fixed at the second end of the second mechanism body and the other side of the first mechanism body.

In some embodiments, the fourth drive mechanism comprises: a fourth mechanism body; the fourth mechanism body is provided with a fourth guide rail extending in the fourth direction; a fourth sliding table; the lower surface of the fourth sliding table is provided with a fourth sliding block, and the upper surface of the fourth sliding table forms a connecting part for connecting detection equipment; the fourth sliding block is sleeved on the fourth guide rail so that the fourth sliding table moves back and forth along the fourth direction; a fourth linear motor; the fourth linear motor is arranged in the fourth mechanism body and used for driving the fourth sliding table to move; fourth detection means; the fourth detection device is assembled on the fourth mechanism body and the fourth sliding table and used for detecting and acquiring the position information of the fourth sliding table.

In some embodiments, the fourth drive mechanism further comprises: a balancing cylinder; the rod body of the balance cylinder is fixedly arranged on one side of the fourth mechanism body and is arranged along the fourth direction; and the tail end of a piston rod of the balance cylinder is connected to the fourth sliding table.

In some embodiments, the fourth drive mechanism further comprises: the clamp is arranged on the fourth sliding table; the clamp is triggered when the balance cylinder fails and is used for limiting and locking the movement of the fourth sliding table.

In some embodiments, the fourth drive mechanism further comprises: a mechanism cover; the mechanism cover body is arranged on the surface of the fourth mechanism body in a covering mode and is used for covering the fourth mechanism body and the fourth sliding table.

In some embodiments, the third drive mechanism is disposed on the cross beam for driving the fourth drive mechanism body to move in the third direction.

The high-precision detection platform comprises a platform base, a detection platform body, a first driving mechanism, a second driving mechanism, a third driving mechanism and a fourth driving mechanism; wherein, the testing platform body includes: the base, a pair of stand columns extending from the upper surface of the base to a preset height and a cross beam connected between the pair of stand columns; the first driving mechanism is arranged in the base and used for driving the objective table to move along a first direction on the target plane; the target plane is a plane parallel to the upper surface of the base; the second driving mechanism is arranged in the base and used for driving the objective table to move along a second direction on the target plane; the second direction is perpendicular to the first direction; the third driving mechanism is arranged on the cross beam and used for driving the detection equipment to move along a third direction; the third direction is parallel to the first direction; the fourth driving mechanism is arranged on the cross beam and used for driving the detection equipment to move along the fourth direction; the fourth direction is a direction perpendicular to the target plane; the air-floating vibration isolator is arranged between the platform base and the base. By using the air floatation vibration isolator, the motion precision of each shaft can be effectively improved, and accurate detection and processing are realized.

Drawings

One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which the figures of the drawings are not to scale, unless expressly stated otherwise.

FIG. 1 is an exploded view of a high-precision inspection platform according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a high-precision detection platform provided by an embodiment of the present utility model, showing a structural condition in one direction;

FIG. 3 is a schematic diagram of a high-precision detection platform according to an embodiment of the present utility model, illustrating a structural situation in another direction;

FIG. 4 is an exploded view of a first drive mechanism according to an embodiment of the present utility model;

FIG. 5 is an exploded view of a second drive mechanism according to an embodiment of the present utility model;

FIG. 6 is an exploded view of a third drive mechanism according to an embodiment of the present utility model;

FIG. 7 is an exploded view of a fourth drive mechanism according to an embodiment of the present utility model, showing the configuration in one direction;

fig. 8 is an exploded view of the high-precision inspection platform according to the embodiment of the present utility model, showing a structure in another direction.

Reference numerals illustrate:

100. a precision detection platform; x1. first direction; y. second direction; x2, third direction; z. fourth direction; 10. a platform base; 21. a base; 22. a column; 23. a cross beam; 30. a first driving mechanism; 31. a first mechanism body; 311. a first guide rail; 32. a first sliding table; 321. a first slider; 33. a first linear motor; 351. a first portion; 352. a second portion; 36. a first tow chain; 40. a second driving mechanism; 21. a second mechanism body; 411. a second guide rail; 42. a second slider; 43. a second linear motor; 451. a third section; 452. a fourth section; 46. a second tow chain; 50. a third driving mechanism; 23. a third mechanism body; 511. a third guide rail; 52. a third sliding table; 521. a third slider; 53. a third linear motor; 55. a third tow chain; 56. a third mechanism cover; 60. a fourth driving mechanism; 61. a fourth mechanism body; 611. a fourth guide rail; 62. a fourth sliding table; 621. a fourth slider; 63. a fourth linear motor; 65. a balancing cylinder; 66. a clamp; 67. a fourth mechanism cover; 68. a fourth drag chain; 70. an air floatation vibration isolator.

Detailed Description

The utility model will now be described in detail with reference to specific embodiments, it being emphasized that the following description is merely exemplary in nature and is in no way intended to limit the scope of the utility model or its applications.

It is noted that unless explicitly specified and limited otherwise, the terms "center", "longitudinal", "transverse", "upper", "lower", "vertical", "horizontal", "inner", "outer", etc., used in this specification are directional or positional relationships indicated based on the drawings, and are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. The terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated; thus, a feature defining "a first", "a second" may include one or more such features, either explicitly or implicitly; the meaning of "plurality" is two or more; "and/or" includes any and all combinations of one or more of the associated listed items. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

As shown in fig. 1 to 3, the precision detection platform 100 provided by the embodiment of the present utility model includes: the platform base 10, the detection platform body, the first driving mechanism 30, the second driving mechanism 40, the third driving mechanism 50 and the fourth driving mechanism 60.

Wherein, the testing platform body includes: a base 21, a pair of columns 22 extending from an upper surface of the base 21 by a predetermined height, and a cross member 23 connected between the pair of columns 22.

A first drive mechanism 30 is disposed within the base 21 for driving the stage in a first direction x1 in the target plane. The target plane is a plane parallel to the upper surface of the base 21.

A second drive mechanism 40 is provided within the base 21 for driving the stage to move in the second direction y at the target plane. The second direction y is perpendicular to the first direction x1.

A third drive mechanism 50 is provided on the cross beam 23 for driving a detection device (not shown in the figures) to move in a third direction x2. The third direction x2 is parallel to the first direction x1.

A fourth drive mechanism 60 is provided on the cross beam 23 for driving a detection device (not shown in the figures) to move in a fourth direction z. The fourth direction z is a direction perpendicular to the target plane.

Wherein, a gap with a preset height is arranged between the lower surfaces of the platform base 10 and the base 21, and an air-float vibration isolator 70 is arranged between the platform base 10 and the base 21.

The air-floating vibration isolator is also called an air spring, and is provided with a horizontal adjusting system, so that the supported load can be quickly leveled after the load changes and the gravity center is transferred, and the vibration isolation effect is good.

The platform base 10 includes: the device comprises an installation base frame, an industrial personal computer (Industrial Personal Computer, IPC) and an electric control cabinet. The industrial personal computer and the electric control cabinet are assembled and fixed in the installation base frame, and are electrically connected with the first driving mechanism 30, the second driving mechanism 40, the third driving mechanism 50 and the fourth driving mechanism 60, wherein the industrial personal computer is used for detecting and controlling the movement of the first driving mechanism 30, the second driving mechanism 40, the third driving mechanism 50 and the fourth driving mechanism 60, and the electric control cabinet is used for adjusting certain electrical parameters, prompting or sending out signals deviating from the normal working state and ensuring the stable operation of the precision detection platform 100.

As shown in fig. 4, the first driving mechanism 30 includes: the first mechanism body 31, the first sliding table 32, the first linear motor 33 and the first detection device. Among them, the first mechanism body 31 may be made of marble, which may alleviate its own weight by being processed with a plurality of through holes, and the surface is provided with a first rail 311 extending in the first direction x1. The first sliding table 32 may be used as an objective table for carrying a product to be detected; alternatively, the first slide table 32 and the stage may be provided as two separate members, and the stage may be rigidly connected to the upper surface of the first slide table 32. The lower surface of the first sliding table 32 is provided with a first sliding block 321, and the first sliding block 321 is sleeved on the first guide rail 311, so that the first sliding table 32 can reciprocate along the first direction x1. A first linear motor 33 is installed in the first mechanism body 31 for driving the first slide table 32 to move along the first guide rail 311. The first detection device is assembled on the first mechanism body 31 and the first sliding table 32, and is used for detecting and acquiring the position information of the first sliding table 32.

In the embodiment of the present utility model, at least two first guide rails 311 may be disposed on the surface of the first mechanism body 31, at least two pairs of first sliding blocks 321 are disposed on the first sliding table 32 correspondingly, and at least one pair of first linear motors 33 and first detection devices 34 are disposed. In actual assembly, the two first guide rails 311 are respectively distributed on two sides of the surface of the first mechanism body 31, the stator of the first linear motor 33 is fixed on the surface of the first mechanism body 31, the mover is rigidly connected to the lower surface of the first sliding table 32, the first detection device can adopt a high resolution grating measurement system, the first detection device comprises a first reading head 341 and a first optical ruler 342, the first reading head 341 can be arranged on the lower surface of the first sliding table 32, the first optical ruler 342 can be adhered on the upper surface of the first mechanism body 31 opposite to the lower surface of the first sliding table 32, or the first optical ruler 342 can be adhered on the lower surface of the first sliding table 32, and the first reading head 341 can be arranged on the upper surface of the first mechanism body 31 opposite to the lower surface of the first sliding table 32. After the first linear motor 33 is powered on and started, the first linear motor 33 can convert the electric energy into kinetic energy for driving the first sliding block 321 or the first sliding table 32 to do linear motion along the first guide rail 311, and meanwhile, the first detection device can detect and acquire the position information of the first sliding table 32 in real time.

The first driving mechanism 30 further includes two first travel limiting devices respectively assembled at two ends of the movement travel of the first sliding table 32.

The first travel limiting device comprises a first limiting sensor and a first baffle. Two first limit sensors may be disposed on the upper surface of the first mechanism body 31, where one first limit sensor is disposed near the first end of the first rail 311, and the other first limit sensor is disposed near the second end of the first rail 311. Correspondingly, two first blocking pieces can be arranged on the lower surface of the first sliding table 32, wherein one first blocking piece is arranged near the first end of the first guide rail 311, and the other first blocking piece is arranged near the second end of the first guide rail 311. The first slide table 32 can be controlled to stop and reverse at both ends of the stroke by the first stroke limiting device.

As in fig. 2, a first organ cover is also included, which is separable into a first portion 351 and a second portion 352. Wherein, two ends of the first portion 351 are respectively fixed at the first end of the first mechanism body 31 and one side of the first sliding table 32, and two ends of the second portion 352 are respectively fixed at the second end of the first mechanism body 31 and the other side of the first sliding table 32. By the first organ cover, some surfaces of the first driving mechanism 30 can be shielded, dust adhesion and some foreign matters falling into the surfaces are reduced, and stable operation of the first driving mechanism 30 is ensured.

As shown in fig. 3, the first drag chain 36 is further disposed along the first direction x1, one end of the first drag chain 36 is connected to a side of the first sliding table 32 parallel to the first direction x1, and the other end is connected to the second organ cover or base 21.

As shown in fig. 5, the second driving mechanism 40 includes: the second mechanism body 21, the second slider 42, the second linear motor 43, and the second detection device. The second mechanism body 21 may be made of marble, and may also be made of marble with a plurality of through holes formed therein to reduce its own weight, and the surface thereof is provided with a second rail 411 extending in the second direction y. In the embodiment of the present utility model, the second mechanism body 21 and the base 21 may be the same components, and for convenience of description, the second mechanism body 21 will be given the same reference numerals as the base 21. The second slider 42 is rigidly connected to the bottom of the first mechanism body 31, and the second slider 42 is sleeved on the second guide rail 411, so that the first mechanism body 31 can reciprocate along the second direction y. The second linear motor 43 is installed in the second mechanism body 21 for driving the first mechanism body 31 to move along the second guide rail 411. The second detecting means is assembled on the second mechanism body 21 and the first mechanism body 31 for detecting and acquiring the positional information of the first mechanism body 31.

In the embodiment of the present utility model, at least two second guide rails 411 may be disposed on the surface of the second mechanism body 21, at least two pairs of second sliders 42 are correspondingly disposed on the bottom of the first mechanism body 31, and at least one pair of second linear motors 43 and second detection devices are correspondingly disposed. In actual assembly, the two second guide rails 411 are respectively distributed on two sides of the surface of the second mechanism body 21, the stator of the second linear motor 43 is fixed on the surface of the second mechanism body 21, the mover is rigidly connected to the lower surface of the first mechanism body 31, the second detection device can also adopt a high resolution grating measurement system, the second detection device comprises a second reading head 441 and a second optical ruler 442, wherein the second reading head 441 can be disposed on the lower surface of the first mechanism body 31, the second optical ruler 442 can be adhered on the upper surface of the second mechanism body 21 opposite to the lower surface of the first mechanism body 31, or the second optical ruler 442 can be adhered on the lower surface of the first mechanism body 31, and the second reading head 442 can be disposed on the upper surface of the second mechanism body 21 opposite to the lower surface of the first mechanism body 31. When the second linear motor 43 is powered on, the second linear motor 43 can convert the electric energy into kinetic energy for driving the second slider 42 or the first mechanism body 31 to linearly move along the second guide rail 411, and meanwhile, the second detection device can detect and acquire the position information of the first mechanism body 31 in real time and control the position of the first mechanism body 31.

The second driving mechanism 40 further includes two second stroke limiting devices respectively assembled at two ends of the movement stroke of the first mechanism body 31.

The second stroke limiting device comprises a second limiting sensor and a second baffle. Two second limit sensors may be disposed on the upper surface of the second mechanism body 21, where one of the second limit sensors is disposed near the first end of the second rail 411, and the other second limit sensor is disposed near the second end of the second rail 411. Correspondingly, two second blocking pieces can be arranged on the lower surface of the first mechanism body 31, wherein one second blocking piece is arranged near the first end of the second guide rail 411, and the other second blocking piece is arranged near the second end of the second guide rail 411. The second stroke limiting device can control the first mechanism body 31 to stop and reverse at the two ends of the stroke.

As in fig. 2 and 3, a second organ cover is also included, which is separable into a third portion 451 and a fourth portion 452. Wherein both ends of the third portion 451 are respectively fixed to the first end of the second mechanism body 21 and one side of the first mechanism body 31; both ends of the fourth portion 452 are respectively fixed to the second end of the second mechanism body 21 and the other side of the first mechanism body 31. By the second organ cover, some surfaces of the second driving mechanism 40 can be shielded, dust adhesion and some foreign matters falling into are reduced, and stable operation of the second driving mechanism 40 is ensured.

And a second drag chain 46 arranged along the second direction y, wherein one end of the second drag chain 46 is connected with the side edge of the second mechanism body 21 parallel to the second direction y, and the other end is connected with the base 21.

As shown in fig. 6, the third driving mechanism 50 includes: the third mechanism body 23, the third sliding table 52, the third linear motor 53 and the third detection device. The third driving mechanism 50 is used for driving the fourth driving mechanism body to move along the third direction x2. Wherein the third mechanism body 23 may be made of marble, and the surface thereof is provided with a third guide rail 511 extending in the third direction x2, in the embodiment of the present utility model, the third mechanism body 23 and the cross member 23 may be the same component, and for convenience of description of the present utility model, the third mechanism body 23 will be along with the same reference numerals as the cross member 23. The lower surface of the third sliding table 52 is provided with a third sliding block 521, the third sliding block 521 is sleeved on the third guide rail 511, so that the third sliding table 52 can reciprocate along the third direction x2, and the upper surface of the third sliding table 52 is used for connecting the fourth driving mechanism 60. The third linear motor 53 is mounted on the third mechanism body 23, and is used for driving the third slider 521 or the third sliding table 52 to move along the third guide rail 511. The third detecting device is assembled on the third mechanism body 23 and the third sliding table 52, and is used for detecting and acquiring the position information of the third sliding table 52.

In the embodiment of the present utility model, at least two third guide rails 511 may be disposed on the surface of the third mechanism body 23, at least two pairs of third sliders 521 are correspondingly disposed on the lower surface of the third sliding table 52, and at least one pair of third linear motors 53 and third detection devices are provided. In actual assembly, the two third guide rails 511 are distributed on two sides of the surface of the third mechanism body 23, the stator of the third linear motor 53 is fixed on the surface of the third mechanism body 23, the mover is rigidly connected to the lower surface of the third sliding table 52, the third detection device may also adopt a high resolution grating measurement system, and the third detection device includes a third reading head 541 and a third optical ruler 542, where the third reading head 541 may be disposed on the side surface of the third sliding table 52, the third optical ruler 542 may be adhered on the side surface of the third mechanism body 23, or the third optical ruler 542 may be adhered on the side surface of the third sliding table 52, and the third reading head 541 may be disposed on the side surface of the third mechanism body 23. When the third linear motor 53 is powered on and started, the third linear motor 53 can convert the electric energy into kinetic energy for driving the third slider 521 or the third sliding table 52 to perform linear motion along the third guide rail 511, and meanwhile, the position information of the third sliding table 52 can be detected and acquired in real time through the third detection device.

The third driving mechanism 50 further includes two third stroke limiting devices respectively assembled at two ends of the movement stroke of the third sliding table 52.

The third stroke limiting device comprises a third limiting sensor and a third baffle. Two third limit sensors may be disposed on the side of the three-mechanism body 23, where one third limit sensor is disposed near the first end of the third rail and the other third limit sensor is disposed near the second end of the third rail. Correspondingly, two third blocking pieces can be arranged on the side surface of the third sliding table 52, wherein one third blocking piece is arranged near the first end of the third guide rail 511, and the other third blocking piece is arranged near the second end of the third guide rail 511. The third sliding table 52 can be controlled to stop and reverse at the two ends of the travel by the third travel limiting device.

The third drive mechanism 50 also includes a third mechanism cover 56. The third mechanism cover 56 is arranged on the surface of the third mechanism body 23 in a covering manner and is used for covering the third mechanism body 23 and the third sliding table 52. The third mechanism cover 56 can shield some surfaces of the third driving mechanism 50, reduce dust adhesion and some foreign matters from falling into, and ensure stable operation of the third driving mechanism 50.

As shown in fig. 2 and 3, the device further includes a third drag chain 55 disposed along a third direction x2, wherein one end of the third drag chain 55 is connected to a side of the third slider 521 parallel to the third direction x2, and the other end is connected to the third mechanism body 23.

As shown in fig. 7, the fourth driving mechanism 60 includes: a fourth mechanism body 61, a fourth sliding table 62, a fourth linear motor 63, and a fourth detection device. The fourth mechanism body 61 may be made of marble, and the surface thereof is provided with a fourth guide rail 611 extending in the fourth direction z, and the fourth mechanism body 61 is rigidly connected to the upper surface of the third sliding table 52. The lower surface of the fourth slide table 62 is provided with a fourth slider 621, and the fourth slider 621 is sleeved on the fourth guide rail 611 so that the fourth slide table 62 reciprocates in the fourth direction z, and the upper surface of the fourth slide table 62 forms a connection member (not shown in the figure) for connecting the detecting apparatus. The fourth linear motor 63 is installed in the fourth mechanism body 61 for driving the fourth slider 621 or the fourth slide table 62 to move along the fourth guide rail 611. The fourth detecting means is assembled on the fourth mechanism body 61 and the fourth slide table 62 for detecting and acquiring the positional information of the fourth slide table 62.

In the embodiment of the present utility model, at least two fourth guide rails 611 may be disposed on the surface of the fourth mechanism body 61, at least two pairs of fourth sliding blocks 621 are correspondingly disposed on the lower surface of the fourth sliding table 62, and at least one pair of fourth linear motors 63 and fourth detection devices are provided. In actual assembly, the two fourth guide rails 611 are distributed on two sides of the surface of the fourth mechanism body 61, the stator of the fourth linear motor 63 is fixed on the surface of the fourth mechanism body 61, the mover is rigidly connected to the lower surface of the fourth sliding table 62, the fourth detection device may also adopt a high resolution grating measurement system, the fourth detection device includes a fourth reading head 641 and a fourth optical ruler 642, where the fourth reading head 641 may be disposed on the side surface of the fourth sliding table 62, the fourth optical ruler 642 may be adhered on the side surface of the fourth mechanism body 61, or the fourth optical ruler 642 may be adhered on the side surface of the fourth sliding table 62, and the fourth reading head 641 may be disposed on the side surface of the fourth mechanism body 61. When the fourth linear motor 63 is energized and started, the fourth linear motor 63 can convert the electric energy into kinetic energy for driving the fourth slider 621 or the fourth sliding table 62 to linearly move along the fourth guide rail 611, and meanwhile, the position information of the fourth sliding table 62 can be detected and acquired in real time through the fourth detection device.

The fourth drive mechanism 60 further includes: the two fourth stroke limiting devices are respectively assembled at the two ends of the movement stroke of the fourth sliding table 62.

The fourth stroke limiting device comprises a fourth limiting sensor and a fourth baffle, wherein the two fourth limiting sensors can be arranged on the side surface of the fourth mechanism body 63, one fourth limiting sensor is arranged close to the first end of the fourth guide rail 611, and the other fourth limiting sensor is arranged close to the second end of the fourth guide rail 611. Correspondingly, two fourth baffle plates can be arranged on the side surface of the fourth sliding table 62, wherein one fourth baffle plate is arranged near the first end of the fourth guide rail 611, and the other fourth baffle plate is arranged near the second end of the second guide rail 611. The fourth sliding table 62 can be controlled to stop and reverse at the two ends of the travel by the fourth travel limiting device.

The fourth drive mechanism 60 further includes: balancing cylinder 65. The rod body of the balancing cylinder 65 is fixedly installed at one side of the fourth mechanism body 61, and is disposed along the fourth direction z. The piston rod end of the balancing cylinder 65 is connected to the fourth slide table 62. The balance cylinder 65 can counteract the gravity generated by the load of the fourth linear motor 63, ensure that the fourth linear motor 63 operates smoothly in the up-and-down reciprocating motion, and avoid the occurrence of a fault stop due to overload.

As shown in fig. 8, the fourth driving mechanism 60 further includes: and a clamp 65 provided on the fourth slide 62. Wherein the clamp 65 is triggered when the balancing cylinder 65 fails for restricting the movement of the locking fourth slide 62. The clamp 65 can play a role in protecting the balance cylinder 65 from failure, and can rapidly lock the fourth guide rail 611 to prevent accidents caused by falling.

The fourth drive mechanism 60 further includes: a mechanism cover 66. Wherein, the mechanism cover 66 is arranged on the surface of the fourth mechanism body 61 in a covering way and is used for covering the fourth mechanism body 61 and the fourth sliding table 62. The mechanism cover 66 can shield some surfaces of the fourth driving mechanism 60, reduce dust adhesion and some foreign matters from falling into, and ensure stable operation of the fourth driving mechanism 60.

As shown in fig. 2 and 3, the device further comprises a fourth drag chain 67 arranged along the fourth direction z, one end of the fourth drag chain 67 is connected with a side edge of the fourth sliding table 62 parallel to the fourth direction z, and the other end is connected with the third mechanism body 23.

In order to better understand the technical solution of the present utility model, the following schematic description is made on the precision detection platform 100 provided by the embodiment of the present utility model in conjunction with the process steps.

And (5) a preparation stage. First, the product to be inspected and the inspection apparatus are installed, specifically, the inspection product is placed on a first slide/stage driven by a first linear motor to position and assemble the product to be inspected, and the inspection apparatus is installed on a fourth slide 62 driven by a fourth linear motor 63.

The device parameters are checked. Checking the initial positions of the first, second, third and fourth linear motors 33, 43, 53 and 63 (or the initial positions of the first, second, third and fourth sliding tables 32, 21, 52, 62), checking whether the air pressure of the balancing cylinder 65 matches the load (which can be detected by the smoothness of the first run of the fourth linear motor 63), adjusting the air pressure of each air-floating vibration isolator 70 to meet the accuracy requirement, and checking the parameters of the industrial personal computer and the electronic control cabinet, etc.

An initial run-in phase (or break-in phase). After the initial position of each linear motor is returned, each linear motor starts to move to a specified point to drive the fourth linear motor 63 to move downwards towards the base 21 after the detected product reaches the specified position, whether the detection is met or not is judged, the movement is stopped, the detection equipment starts to work, and detected information is fed back to a background system to realize real-time detection and recording.

The working phase is continued. After the functions and the states of all the devices are checked to be good, continuous work can be carried out according to the working condition requirements.

The first linear motor 33 and the second linear motor 43 cooperate to move the product to be inspected to the target position. When the first linear motor 33 is electrified, the first linear motor 33 converts electric energy into kinetic energy, and the first sliding table 32/objective table reciprocates along the first guide rail 311 and realizes accurate positioning under the action of the first detection device; when the second linear motor 43 is energized, the second linear motor 43 converts the electric energy into kinetic energy, and cooperates with the second detection device to make the first mechanism body 31 reciprocate along the second guide rail 411 and achieve precise positioning. During the movement, the first organ cover 35 and the second organ cover 45 play a role in blocking adhesion of dust and falling of some foreign matters, so that stable operation of the first linear motor 33 and the second linear motor 43 is ensured respectively, and noise generated during the movement of the linear motor is effectively reduced by the mute dust-free drag chain.

The third linear motor 53 and the fourth linear motor 63 cooperate to transfer the detection device to the above of the product to be detected, so as to realize the detection of the product to be detected by the detection device. When the third linear motor 53 is electrified, the third linear motor 53 converts electric energy into kinetic energy, and the third sliding table 52 reciprocates along the third guide rail 511 under the action of the third detection device, so that accurate positioning is realized; when the fourth linear motor 63 is energized, the fourth linear motor 63 converts the electric energy into kinetic energy, and the fourth sliding table 62 reciprocates along the fourth guide rail 611 and realizes accurate positioning in cooperation with the function of the fourth detection device.

In the fourth driving mechanism 60, the balancing cylinder 65 is used for counteracting the gravity generated by the load on the fourth linear motor 63, so as to ensure that the fourth linear motor 63 operates smoothly in the up-and-down reciprocating motion, and the fault halt caused by overload is avoided; the clamp 65 can rapidly lock the fourth guide rail 611 under the condition that the balance cylinder 65 fails, so as to protect the fourth guide rail 611 from falling down to cause accidents. Because the third linear motor 53 and the fourth linear motor 63 are installed in a side-mounted/vertical manner, the working environment is not too much dust, and the grating measuring system is less affected by the dust, the mechanism cover plate can be used for shielding, and the operation is simple.

According to the shaft driving mechanism of the high-precision detection platform, provided by the embodiment of the utility model, the linear motor capable of directly generating linear motion without an intermediate conversion mechanism is adopted, so that the structure of the high-precision detection platform is greatly simplified, the motion inertia is reduced, the dynamic response performance and the positioning precision are greatly improved, meanwhile, the reliability is improved, the cost is saved, and the manufacturing and maintenance are simpler. Moreover, the adoption of the air floatation vibration isolator greatly reduces the vibration generated during the movement of the whole platform, is far superior to other forms of shock absorbers, reduces vibration fatigue and noise, and ensures the movement precision of each shaft.

The high-precision detection platform comprises a platform base, a detection platform body, a first driving mechanism, a second driving mechanism, a third driving mechanism and a fourth driving mechanism. Wherein, the testing platform body includes: the base, a pair of stand columns that extend from the upper surface of base to a predetermined height and a cross beam that connects between the pair of stand columns. The first driving mechanism is arranged in the base and used for driving the objective table to move along a first direction on the target plane. The target plane is a plane parallel to the upper surface of the base. The second driving mechanism is arranged in the base and used for driving the objective table to move along a second direction on the target plane. The second direction is perpendicular to the first direction. A third drive mechanism is provided on the cross beam for driving the detection device (not shown in the figures) to move in a third direction. The third direction is parallel to the first direction. The fourth driving mechanism is arranged on the cross beam and is used for driving the detection equipment to move along the fourth direction. The fourth direction is a direction perpendicular to the target plane. The air-floating vibration isolator is arranged between the platform base and the base. By using the air floatation vibration isolator, the machining precision of the high-precision detection platform can be effectively improved.

The foregoing is a further detailed description of the utility model in connection with specific/preferred embodiments, and it is not intended that the utility model be limited to such description. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit of the utility model, and these are all within the scope of the utility model.

Claims (10)

1. The utility model provides a precision detection platform which characterized in that includes:

a platform base;

a detection platform body; the detection platform body includes: the device comprises a base, a pair of upright posts extending from the upper surface of the base to a preset height and a cross beam connected between the pair of upright posts;

a first driving mechanism; the first driving mechanism is arranged in the base and used for driving the objective table to move along a first direction on the target plane; the target plane is a plane parallel to the upper surface of the base;

a second driving mechanism; the second driving mechanism is arranged in the base and is used for driving the objective table to move along a second direction on the target plane; the second direction is perpendicular to the first direction;

a third driving mechanism; the third driving mechanism is arranged on the cross beam and used for driving the detection equipment to move along a third direction; the third direction is parallel to the first direction;

a fourth driving mechanism; the fourth driving mechanism is arranged on the cross beam and used for driving the detection equipment to move along a fourth direction; the fourth direction is a direction perpendicular to the target plane;

a gap with a preset height is arranged between the platform base and the lower surface of the base; an air floatation vibration isolator is arranged between the platform base and the base.

2. The precision detection platform of claim 1, wherein the first drive mechanism comprises:

a first mechanism body; the first mechanism body is provided with a first guide rail extending along the first direction;

a first sliding table; the lower surface of the first sliding table is provided with a first sliding block, and the upper surface of the first sliding table is rigidly connected with the objective table; the first sliding block is sleeved on the first guide rail so that the first sliding table moves back and forth along the first direction;

a first linear motor; the first linear motor is arranged in the first mechanism body and used for driving the first sliding table to move;

a first detection device; the first detection device is assembled on the first mechanism body and the first sliding table and used for detecting and acquiring the position information of the first sliding table.

3. The precision detection platform of claim 2, further comprising: a first organ cover separable into a first portion and a second portion;

wherein, both ends of the first part are respectively fixed at the first end of the first mechanism body and one side of the first sliding table; the two ends of the second part are respectively fixed at the second end of the first mechanism body and the other side of the first sliding table.

4. The precision detection platform of claim 2, wherein the second drive mechanism comprises:

a second mechanism body; the second mechanism body is provided with a second guide rail extending along the second direction;

a second slider; the second sliding block is rigidly connected to the bottom of the first mechanism body, and is sleeved on the second guide rail so as to enable the first mechanism body to reciprocate along the second direction;

a second linear motor; the second linear motor is arranged in the second mechanism body and used for driving the first mechanism body to move;

a second detection device; the second detection device is assembled on the second mechanism body and the first mechanism body and is used for detecting and acquiring the position information of the first mechanism body.

5. The precision detection platform of claim 4, further comprising: a second organ cover separable into a third portion and a fourth portion;

wherein, both ends of the third part are respectively fixed at the first end of the second mechanism body and one side of the first mechanism body; the two ends of the fourth part are respectively fixed at the second end of the second mechanism body and the other side of the first mechanism body.

6. The precision detection platform of claim 1, wherein the fourth drive mechanism comprises:

a fourth mechanism body; the fourth mechanism body is provided with a fourth guide rail extending in the fourth direction;

a fourth sliding table; the lower surface of the fourth sliding table is provided with a fourth sliding block, and the upper surface of the fourth sliding table forms a connecting part for connecting detection equipment; the fourth sliding block is sleeved on the fourth guide rail so that the fourth sliding table moves back and forth along the fourth direction;

a fourth linear motor; the fourth linear motor is arranged in the fourth mechanism body and used for driving the fourth sliding table to move;

fourth detection means; the fourth detection device is assembled on the fourth mechanism body and the fourth sliding table and used for detecting and acquiring the position information of the fourth sliding table.

7. The precision detection platform of claim 6, wherein the fourth drive mechanism further comprises: a balancing cylinder;

the rod body of the balance cylinder is fixedly arranged on one side of the fourth mechanism body and is arranged along the fourth direction; and the tail end of a piston rod of the balance cylinder is connected to the fourth sliding table.

8. The precision detection platform of claim 7, wherein the fourth drive mechanism further comprises: the clamp is arranged on the fourth sliding table;

the clamp is triggered when the balance cylinder fails and is used for limiting and locking the movement of the fourth sliding table.

9. The precision detection platform of claim 6, wherein the fourth drive mechanism further comprises: a mechanism cover;

the mechanism cover body is arranged on the surface of the fourth mechanism body in a covering mode and is used for covering the fourth mechanism body and the fourth sliding table.

10. The precision detection platform of claim 6, wherein the third drive mechanism is disposed on the cross beam for driving the fourth drive mechanism body to move in the third direction.