CN114653520A - Coating device and coating method - Google Patents

Coating device and coating method Download PDF

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Publication number
CN114653520A
CN114653520A CN202111321190.3A CN202111321190A CN114653520A CN 114653520 A CN114653520 A CN 114653520A CN 202111321190 A CN202111321190 A CN 202111321190A CN 114653520 A CN114653520 A CN 114653520A
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CN
China
Prior art keywords
coating
substrate
film
forming liquid
edge portion
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Granted
Application number
CN202111321190.3A
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Chinese (zh)
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CN114653520B (en
Inventor
吉塚秀人
山本章仁
渡边翔
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Ena Technology Co ltd
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Ena Technology Co ltd
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Publication of CN114653520A publication Critical patent/CN114653520A/en
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Publication of CN114653520B publication Critical patent/CN114653520B/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/02—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles
    • B05C1/027—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)

Abstract

The invention aims to provide a coating device, which can accurately control the coating width of a film forming liquid coated on the upper surface and the lower surface of a substrate circumferential edge part including an end surface of a substrate to be extremely narrow, and can reliably form a thin coating film with uniform thickness on the substrate circumferential edge part; the coating apparatus 10 is a coating apparatus that coats a film-forming liquid on a peripheral edge portion of a substrate 2 while relatively moving the substrate 2 and a coating unit 20, and the coating unit 20 includes a coating section 30 that coats the film-forming liquid on at least an end surface of the peripheral edge portion of the substrate 2, and an extension section 40 that extends the film-forming liquid coated by the coating section 30 in a thin film shape on upper and lower surfaces of the peripheral edge portion of the substrate 2.

Description

Coating device and coating method
Technical Field
The present invention relates to a coating apparatus and a coating method, and more particularly, to a coating apparatus and a coating method capable of coating a liquid agent on a peripheral edge portion of a substrate.
Background
As a substrate for mounting electronic components, a printed wiring board using a glass epoxy material, a synthetic material, a paper phenol material, or the like is widely used. The glass epoxy material is a material obtained by impregnating a glass fiber cloth with an epoxy resin. The synthetic material is a material having a glass cloth as a surface and a cellulose paper or a nonwoven fabric as a core material. The paper phenol material is obtained by impregnating kraft paper with a phenol resin.
When these glass epoxy materials, synthetic materials, and paper phenol materials are cut, fine dust made of epoxy resin, glass fiber, or the like is generated in the cutting section. These fine dust particles cause poor contact between the substrate lines, low quality, and the like. Therefore, it is preferable to remove dust generated when cutting the substrate when manufacturing the printed wiring substrate. Further, even if dust is once removed from the end face of the cut portion of the printed wiring board, the end face portion of the printed wiring board is fragile, and therefore, the end face portion may be broken in the subsequent substrate manufacturing process such as an etching process, and more dust may be generated.
The present applicant has previously proposed a coating apparatus and a coating method that can prevent the end face portion from collapsing by coating a film-forming liquid on the end face of a substrate to form a film (patent document 1 below).
The coating apparatus described in patent document 1 is configured to apply a film-forming liquid to an end face of a substrate by moving a pair of coating rollers, which are disposed so as to face each other with an end of the substrate interposed therebetween, along a circumferential edge of the substrate.
In recent years, there has been an increasing demand for a thin copper-clad laminate substrate (also referred to as a package substrate) having a thickness of about several tens μm to several hundreds μm in order to cope with the reduction in thickness and size of various electronic devices. In such a thin substrate, it is difficult to apply the film-forming liquid only to the substrate end face, and for example, a frame-shaped coating is preferably applied to a peripheral edge portion including the substrate end face.
Therefore, the present applicant has previously proposed a coating apparatus and a coating method capable of preventing the edge face portion from collapsing by forming a film with a frame-like coating film forming liquid on the circumferential edge portion including the edge face of the substrate (patent document 2 below).
The coating apparatus described in patent document 2 includes a liquid reservoir for storing a film-forming liquid and a coating unit for coating the film-forming liquid adhering to an end portion of a substrate passing through the liquid reservoir in a thin film form, on opposing surfaces of a pair of upper and lower coating heads. Then, the pair of coating heads are moved along the peripheral edge portion of the substrate in a state where the end portion of the substrate is inserted into the gap between the opposing surfaces of the pair of coating heads, so that the film-forming liquid is applied in a frame shape to the peripheral edge portion including the end surface of the substrate.
Problems to be solved by the invention
Recently, the number of types of substrates to be coated has increased, and the manufacturing process of these substrates has also become diversified. Further, depending on the type of substrate, the difference in the manufacturing process thereof, and the like, the coating form for coating the film-forming liquid on the substrate is also diversified, and the coating apparatuses described in patent documents 1 and 2 described above may not be able to cope with the variation.
For example, in the coating apparatus described in patent document 2, when a substrate having a thickness of about 0.5mm or more is coated, a film-forming liquid deposited on the substrate end surfaces passing through the liquid reservoir portion and the coating portion of the pair of coating heads is vertically moved downward from the end surfaces and is turned to a corner portion below the end surfaces, and a small amount of liquid may be deposited. Therefore, the film thickness of the coating film may be partially increased in the corner portion of the lower portion of the end face of the substrate after drying, and the film thickness of the coating film formed on the 3 surfaces of the peripheral edge portion of the substrate may be uneven.
Further, after a film-forming liquid is applied to the peripheral edge portion of the substrate to form a coating film, a process of peeling the coating film from the substrate may be performed in a final step of the substrate manufacturing process. In the case of performing such a treatment for peeling off the coating film, there is a problem that if there is variation in the film thickness of the coating film, the coating film cannot be peeled off cleanly.
Further, in the coating apparatus described in patent document 2, since the substrate is inserted into the gap between the pair of coating heads having the liquid reservoir, when the edge width to be coated on the peripheral edge portion of the substrate is wide to a certain extent, the coating can be performed with relatively good accuracy at a desired edge width, but when the edge width to be coated is extremely narrow, there is a problem that it is difficult to perform the coating at the desired edge width.
Patent document
Patent document 1: international publication No. 2010/137418
Patent document 2: international publication No. 2016/072250
Disclosure of Invention
The present invention has been made in view of the above problems, and an object of the present invention is to provide a coating apparatus and a coating method capable of accurately controlling a coating width of a film forming liquid applied to an upper surface and a lower surface of a substrate circumferential edge portion including an end surface of the substrate to be extremely narrow and reliably forming a thin coating film having a uniform thickness on the substrate circumferential edge portion.
In order to achieve the above object, a coating apparatus (1) according to the present invention is a coating apparatus for coating a film-forming liquid on a peripheral edge portion of a substrate while relatively moving the substrate and a coating unit,
the coating unit is configured to include:
a coating section that coats the film-forming liquid on at least an end surface of a peripheral edge portion of the substrate,
and an expanding section that expands the film-forming liquid applied by the applying section into a thin film on upper and lower surfaces of a peripheral edge portion of the substrate.
According to the above coating apparatus (1), the film-forming liquid is applied to at least the end face of the peripheral edge portion of the substrate by the application section, and the applied film-forming liquid is stretched in a thin film shape over the entire peripheral edge portion of the substrate including the upper and lower surfaces of the peripheral edge portion by the stretching section. Therefore, the coating width of the upper and lower surfaces of the film-forming liquid coated on the substrate circumferential edge portion including the end face of the substrate can be accurately controlled to be extremely narrow, and a thin coating film having a uniform thickness can be surely formed entirely on the circumferential edge portion of the substrate.
In addition, the coating apparatus (2) according to the present invention is characterized in that, in the coating apparatus (1), the extension portion includes an upper surface extension member that contacts an upper surface of the peripheral edge portion of the substrate, an end surface extension member that contacts an end surface of the peripheral edge portion of the substrate, and a lower surface extension member that contacts a lower surface of the peripheral edge portion of the substrate;
the upper extension member and the lower extension member are disposed to face each other;
the end surface extension member is disposed facing a space between the upper surface extension member and the lower surface extension member.
According to the coating apparatus (2), since the upper surface stretching member, the end surface stretching member, and the lower surface stretching member are disposed so as to sandwich the peripheral edge portion of the substrate, the film forming liquid can be reliably stretched over the entire peripheral edge portion of the substrate including the upper and lower surfaces thereof.
In addition, since the end surface position of the substrate can be restricted by the end surface extension member, the coating width (frame width) of the upper and lower surfaces on the circumferential edge portion of the substrate can be adjusted by changing the width of the upper and lower surface extension members (i.e., the width in contact with the circumferential edge portion of the substrate). Furthermore, by narrowing the widths of the upper surface extension member and the lower surface extension member, the coating width of the upper surface and the lower surface of the peripheral edge portion of the substrate can be narrowed, and a thin coating film having an extremely narrow width and a uniform thickness can be formed on the peripheral edge portion of the substrate.
In the coating apparatus (3) according to the present invention, the upper surface stretching member, the end surface stretching member, and the lower surface stretching member include a plurality of micro grooves formed in the direction of the relative movement in the coating apparatus (2).
According to the coating apparatus (3), the plurality of micro grooves formed in the upper surface stretching member, the end surface stretching member, and the lower surface stretching member can remove an excess film-forming liquid and improve the effect of uniformly stretching the film-forming liquid in a thin manner over the entire peripheral edge portion of the substrate. Further, by changing the depth of the plurality of micro grooves, the film thickness of the stretched film-forming liquid can be finely adjusted.
Further, in the coating device (4) according to the present invention, the extension portion includes at least one of a 1 st urging mechanism, a 2 nd urging mechanism, and a 3 rd urging mechanism in the coating device (2) or (3),
the 1 st forcing mechanism forces the upper extension member in a direction toward the lower extension member,
the 2 nd forcing mechanism forces the lower extension member in a direction toward the upper extension member,
the 3 rd urging mechanism urges the end surface extension member in a direction toward a space between the upper surface extension member and the lower surface extension member.
According to the application device (4), the upper surface stretching member is urged in a direction toward the lower surface stretching member by the 1 st urging mechanism, and the lower surface stretching member is urged in a direction toward the upper surface stretching member by the 2 nd urging mechanism. Further, the end surface extension member is urged in a direction toward a space between the upper surface extension member and the lower surface extension member by the 3 rd urging mechanism.
Therefore, the upper surface stretching member can be pressed against the upper surface of the peripheral edge portion of the substrate, the lower surface stretching member can be pressed against the lower surface of the peripheral edge portion of the substrate, and the end surface stretching member can be pressed against the end surface of the peripheral edge portion of the substrate, whereby the effect of stretching the film-forming liquid into a uniform film shape over the entire peripheral edge portion of the substrate can be improved.
In addition, the coating device (5) according to the present invention is characterized in that, in any one of the coating devices (2) to (4), the extension portion includes:
a 1 st mounting part for mounting the upper extension part,
a 2 nd mounting member to which the lower extension member is mounted;
the end face extension member is mounted on the 1 st mounting member or the 2 nd mounting member;
the 1 st mounting member is mounted to the 2 nd mounting member so as to be movable in the vertical direction.
According to the coating apparatus (5), since the upper surface extension member is attached to the 1 st attaching member, the lower surface extension member is attached to the 2 nd attaching member, the end surface extension member is attached to the 1 st attaching member or the 2 nd attaching member, and the 1 st attaching member is attached to the 2 nd attaching member so as to be movable in the vertical direction, it is possible to flexibly cope with the difference in the thickness of the substrate.
In the coating apparatus (6) according to the present invention, the 2 nd mounting member includes a recovery path for recovering the film forming liquid, and the lower surface extension member is mounted in the recovery path in the coating apparatus (5).
According to the coating apparatus (6), the film-forming liquid removed from the substrate by the stretching operation of the upper stretching member, the end surface stretching member, and the lower stretching member is collected by the collecting passage, so that the film-forming liquid removed from the substrate can be prevented from contaminating the periphery of the stretching portion, and the periphery of the stretching portion can be kept in a clean state.
In addition, the coating apparatus (7) according to the present invention is characterized in that any one of the coating apparatuses (2) to (6) includes a scraping section for scraping a part of the film-forming liquid applied by the coating section, between the coating section and the upper surface stretching member, the end surface stretching member, and the lower surface stretching member.
According to the coating device (7), after the excess film-forming liquid adhering to the substrate is scraped off by the scraping section, the film-forming liquid is spread by the upper surface spreading member, the end surface spreading member, and the lower surface spreading member. Therefore, the amount of the film-forming liquid deposited can be fixed before the stretching treatment, and the quality of the coating film after the stretching treatment can be further stabilized.
In the coating device (8), the scraping portion is formed in a shape surrounding an upper surface of a peripheral edge portion, an end surface of the peripheral edge portion, and a lower surface of the peripheral edge portion of the substrate in the coating device (7).
According to the above coating device (8), the scraping portion is formed in a shape surrounding the upper surface of the peripheral edge portion, the end surface of the peripheral edge portion, and the lower surface of the peripheral edge portion of the substrate, so that the film-forming liquid can be scraped along the upper surface of the peripheral edge portion, the end surface of the peripheral edge portion, and the lower surface of the peripheral edge portion of the substrate. Therefore, before the stretching process is performed by the upper surface stretching member, the end surface stretching member, and the lower surface stretching member, the film forming liquid can be adjusted to a state in which the film forming liquid is easily stretched in a uniform thickness and thinness at the peripheral edge portion of the substrate.
In the coating device (9) according to the present invention, the scraping section is disposed adjacent to the upper surface extension member, the end surface extension member, and the lower surface extension member in the coating device (7) or (8).
According to the coating device (9), the scraping section, the upper surface extension member, the end surface extension member, and the lower surface extension member can be compactly arranged. For example, the scraping portion may be provided on the extending portion, and the function of the extending portion may be improved.
In addition, the coating device (10) according to the present invention is characterized in that, in any one of the coating devices (1) to (9), the coating unit includes a plurality of the stretching portions.
According to the coating device (10), since the coating unit includes the plurality of stretching portions, the film-forming liquid applied to the peripheral edge portion of the substrate can be stretched a plurality of times by the plurality of stretching portions. Therefore, the effect of spreading the film-forming liquid uniformly and thinly over the entire peripheral edge portion of the substrate can be further improved.
In addition, the coating device (11) according to the present invention is characterized in that, in any one of the coating devices (1) to (10), the coating section includes:
a coating roller having an annular groove formed on the outer peripheral surface thereof,
a liquid supply section disposed adjacent to an outer peripheral surface of the application roller and configured to supply the film forming liquid to the annular groove,
a recovery unit disposed below the coating roller and configured to recover the film-forming liquid that has dropped from the coating roller.
According to the coating apparatus (11), since the film-forming liquid is supplied from the liquid supply portion to the annular groove of the coating roller, the film-forming liquid can be reliably attached to at least the end surface of the circumferential edge portion of the substrate by rotating the coating roller in a state where the annular groove is brought into contact with the end surface of the circumferential edge portion of the substrate. Further, since the film-forming liquid hanging down from the coating roller is collected by the collection unit, the film-forming liquid can be collected and reused without contaminating the periphery of the coating roller.
In addition, in the coating device (12) according to the present invention, the liquid supply unit includes:
a liquid discharge portion formed on a surface of the coating roller facing the annular groove,
and a contact member disposed adjacent to the liquid discharge portion and contacting an outer peripheral surface of the application roller.
According to the coating device (12), the film forming liquid can be supplied from the liquid discharge portion directly to the annular groove. Further, by bringing the abutment member into abutment with the outer peripheral surface of the application roller, the effect of holding the film-forming liquid supplied to the annular groove in the annular groove can be improved. Therefore, the film-forming liquid can be stably applied to at least the peripheral edge end surface of the substrate by the application roller.
Further, the coating apparatus (13) according to the present invention is characterized in that any one of the coating apparatuses (1) to (12) includes a corner extension portion which comes into contact with a corner end face of the substrate and further extends the film-forming liquid extended by the extension portion.
According to the coating apparatus (13), since the film-forming liquid applied to the corner end face of the substrate is further spread by the corner spread portion, the coating unevenness of the film-forming liquid can be reduced at the corner of the substrate where the coating unevenness of the film-forming liquid is likely to occur, the film thickness of the coating film at the corner of the substrate can be made uniform and thin, and the coating film quality can be further improved.
The coating device (14) according to the present invention is characterized in that the coating device (13) includes a 4 th biasing mechanism for biasing the corner extending portion in a direction toward the corner end face of the substrate.
According to the coating apparatus (14), since the corner extending portion is biased in the direction toward the corner end face of the substrate by the 4 th biasing mechanism, the corner extending portion can be reliably pushed to the corner end face of the substrate, and for example, even when the corner end face of the substrate is coated plural times, the thickness of the corner end face of the substrate can be more reliably prevented from becoming thick.
Further, a coating device (15) according to the present invention is characterized in that any one of the coating devices (1) to (14) includes:
a support member for supporting the substrate,
a plurality of coating units are arranged around the support member, and a moving member moves each of the coating units along the side of the substrate supported by the support member,
a control unit for controlling the movement of the moving unit and the coating units;
the control means controls the moving means to move the coating units along the side of the substrate while spreading the film-forming liquid applied to the substrate in a thin film shape on the upper and lower surfaces of the peripheral edge portion of the substrate by the spreading section while applying the film-forming liquid to at least the peripheral edge portion end surface of the substrate by the application section of each of the coating units.
According to the coating apparatus (15), the circumferential edge portions of the respective sides of the substrate are simultaneously coated by the plurality of coating units, so that the time for coating the entire periphery of the substrate can be significantly shortened, and the coating efficiency can be improved.
Further, the coating device (16) according to the present invention is characterized in that, in any one of the coating devices (1) to (15),
the coating unit includes:
a liquid collecting part for collecting the film forming liquid,
a conveying member that conveys the film-forming liquid from the liquid collecting section to the coating section;
the liquid collecting section is configured to collect the film forming liquid collected from the coating section and the stretching section.
According to the coating apparatus (16), since the coating unit includes the liquid collecting section and the conveying member, the configuration of reusing the film forming liquid can be integrated into a compact structure in units of units, and the degree of freedom in design of the movement range and the arrangement place of the coating unit can be improved.
Further, a coating method (1) according to the present invention is a coating method for coating a film-forming liquid on a peripheral edge portion of a substrate, the coating method including:
a coating step of coating the film-forming liquid on at least an end surface of a peripheral edge portion of the substrate by a coating section included in the coating unit while relatively moving the substrate and the coating unit,
and an extending step of extending the film-forming liquid applied by the application step in a thin film shape on the upper and lower surfaces of the peripheral edge portion of the substrate by an extending section included in the application unit.
According to the above coating method (1), the film-forming liquid is applied to at least the peripheral edge end surface of the substrate by the coating step, and the applied film-forming liquid is stretched in a thin film shape over the entire peripheral edge portion including the upper and lower surfaces of the peripheral edge portion of the substrate by the stretching step. Therefore, the coating width of the upper and lower surfaces of the film-forming liquid applied to the substrate circumferential edge portion including the end face of the substrate can be accurately controlled to be extremely narrow, and a thin coating film having a uniform thickness can be reliably formed on the entire circumferential edge portion of the substrate.
In the coating method (2) according to the present invention, the stretching step is a step of stretching the film-forming liquid in a thin film shape while pressing the stretching portion in at least one direction of an upper surface of the peripheral edge portion, an end surface of the peripheral edge portion, and a lower surface of the peripheral edge portion of the substrate in the coating method (1).
According to the above coating method (2), in the stretching step, the film-forming liquid can be stretched in a state where the stretching portion is applied with a force in at least one direction of the upper surface of the peripheral edge portion, the end surface of the peripheral edge portion, and the lower surface of the peripheral edge portion of the substrate, and the step of stretching the film-forming liquid into a uniform film shape over the entire peripheral edge portion of the substrate can be stably performed.
Drawings
Fig. 1 is a plan view showing a main part of the general configuration of a coating apparatus according to embodiment (1) of the present invention.
Fig. 2 is a perspective view showing a main part of a coating unit of the coating device according to embodiment (1).
Fig. 3 is a sectional perspective view of the III-III line section in fig. 2 with omission.
Fig. 4 is a cut-away sectional view of the IV-IV line portion of fig. 2.
Fig. 5 is a partially omitted plan view showing a state in which the film-forming liquid is applied to the peripheral edge portion of the substrate by the application unit.
Fig. 6 is a cut-away sectional view of the VI-VI line portion of fig. 5.
Fig. 7 is a cut-away cross-sectional view of the VII-VII line portion of fig. 5.
Fig. 8 is a cut-away sectional view of a portion VIII-VIII line in fig. 7.
Fig. 9 is a cut-away sectional view of the portion of line IX-IX in fig. 5.
Fig. 10 is a partially enlarged sectional view showing the vicinity of the peripheral edge portion of the substrate coated by the coating unit, (a) is a sectional view of the substrate after the coating roller has passed therethrough, and (b) is a sectional view of the substrate after the extension portion has passed therethrough.
Fig. 11 is a perspective view showing a main part of a coating unit of the coating device according to embodiment (2).
Fig. 12 is a partially omitted perspective view showing a state in which the corner extension portion of the coating unit extends the film-forming liquid on the corner end face of the substrate.
Fig. 13 is a perspective view showing a main part of an extension portion constituting an application unit of an application device according to another embodiment.
Fig. 14 is a partially omitted front view of the extension portion.
Fig. 15 is an enlarged sectional view of a portion XV-XV in fig. 14.
Fig. 16 is an enlarged sectional view of a portion XVI-XVI in fig. 14.
Detailed Description
Hereinafter, embodiments of a coating apparatus and a coating method according to the present invention will be described with reference to the drawings. The embodiments described below show preferred embodiments of the present invention, and various technically preferable limitations are imposed on the present invention, and the scope of the present invention is not limited to these embodiments unless specifically described in the following description.
Fig. 1 is a plan view showing a main part of the general configuration of a coating apparatus according to embodiment (1) of the present invention.
The coating apparatus 10 according to embodiment (1) includes a support base 11 (an example of a support member) that supports the substrate 2, 4 coating units 20 arranged around the support base 11, and 4 moving units 12 (an example of a moving member) that move the coating units 20 along the sides of the substrate 2. The coating apparatus 10 includes a control unit 13 and an operation unit 14 for controlling operations of the respective units of these apparatuses.
The coating apparatus 10 is an apparatus for coating a film-forming liquid on a circumferential edge portion (also referred to as an outer peripheral edge portion) 2a of the substrate 2 while moving the coating unit 20 relative to the substrate 2. The coating apparatus 10 is configured to coat 4 sides of the substrate 2 simultaneously by 4 coating units 20, but in another configuration example, it may be configured to coat 4 sides of the substrate 2 sequentially by 1 coating unit 20, and 1 or more coating units 20 may be provided in the coating apparatus 10. In another example of the configuration, the coating apparatus 10 may be configured to move the substrate 2 relative to the coating unit 20.
Each coating unit 20 includes a coating section 30 for coating a film-forming liquid on at least an end surface of a peripheral edge portion of the substrate 2, and an extension section 40 for extending the film-forming liquid coated by the coating section 30 in a thin film shape on upper and lower surfaces of the peripheral edge portion of the substrate 2. The configuration of the coating section 30 and the stretching section 40 will be described in detail later.
The control unit 13 controls the coating operation of the coating unit 30 and the stretching operation of the stretching unit 40 of each coating unit 20, and controls each coating unit 20 to move along the side (in the direction of the arrow a) of the substrate 2 by each moving unit 12.
The control unit 13 may control the operations of the coating units 20 and the moving units 12, and may also have a function of controlling the operations of the respective units of the apparatus, such as controlling the operation (e.g., raising and lowering control) of the support base 11. The control unit 13 includes, for example, a microcomputer, a drive circuit, a storage unit, and a power supply unit (all not shown).
The support base 11 is supported by an elevating mechanism (not shown) so as to be able to be elevated from below. Further, a suction mechanism (not shown) may be provided on the support base 11, and in this case, the substrate 2 may be sucked on the upper surface of the support base 11. As the suction mechanism, for example, a structure in which a vacuum pump is connected to a plurality of suction holes provided on the support table 11 via a gas pipe or the like can be adopted. The substrate 2 is placed at a predetermined position on the support base 11 by a transfer mechanism (not shown).
The moving unit 12 is configured to include an X-axis linear motion mechanism 12a, a Y-axis linear motion mechanism 12b attached to the X-axis linear motion mechanism 12a, and a cable chain 12c attached to the X-axis linear motion mechanism 12a, and 4 stages are disposed so as to surround the support base 11.
The X-axis linear motion mechanism 12a is a device for moving the coating unit 20 along the side (X-axis direction) of the substrate 2, and includes an X-axis cylinder 12aa arranged parallel to each side of the support 11, and an X-axis slider 12ab that slides on the X-axis cylinder 12 aa.
The Y-axis linear motion mechanism 12b is a device for moving the coating unit 20 in a direction (Y-axis direction) orthogonal to the side of the substrate 2, the Y-axis linear motion mechanism 12b is attached to the X-axis slider 12ab, and the coating unit 20 is attached to the Y-axis linear motion mechanism 12 b.
The operation unit 14 can perform various inputs such as setting of operating conditions of each unit of the apparatus, operation instructions of each unit, and switching of an operation mode. The operation signal and the setting signal input via the operation unit 14 are output to the control unit 13. For example, in the operation unit 14, various operation conditions such as the initial position, the moving speed, and the supply speed of the film forming liquid of the coating unit 20 can be set.
Fig. 2 is a perspective view showing a main part of a coating unit of the coating device according to embodiment (1). Fig. 3 is a partially omitted sectional perspective view of the III-III line section in fig. 2, and is a partially omitted sectional perspective view of the coating section 30. Fig. 4 is a partially omitted sectional view of the IV-IV line portion in fig. 2, and is a partially omitted sectional view of the extension 40.
The coating unit 20 includes a coating section 30 that coats a film forming liquid on at least a circumferential edge end face of the substrate 2 (see fig. 1), and an extension section 40 that is disposed so as to be able to sandwich a circumferential edge upper face, a circumferential edge end face, and a circumferential edge lower face of the substrate 2, and that extends the film forming liquid coated by the coating section 30 into a thin film shape on the upper and lower faces of the circumferential edge of the substrate 2.
The coating unit 20 further includes a liquid collecting unit 50 for collecting the film-forming liquid, and a transfer pump 60 (an example of a transfer means) for transferring the film-forming liquid from the liquid collecting unit 50 to the coating unit 30 via a pipe (not shown).
The application unit 30, the extension unit 40, the liquid collection unit 50, and the transfer pump 60 are integrally assembled to the mounting member 21, and the mounting member 21 is attached to the Y-axis linear motion mechanism 12b (see fig. 1) of the moving unit 12.
The liquid collecting unit 50 is disposed below the application unit 30 and the stretching unit 40, and includes a cover 51, a lower tank 52, and a tank receiving table 53 on which the lower tank 52 is placed. The tank receiving table 53 is attached in a state in which the film forming liquid in the lower tank 52 can flow in the direction from the coating section 30 to the stretching section 40 and is slightly inclined. The cover 51 is provided with a tube attachment portion 51a, and a tube (not shown) connected to the transfer pump 60 is attached to the tube attachment portion 51 a. The liquid collecting unit 50 collects the film-forming liquid collected from the coating unit 30 and the stretching unit 40, and the film-forming liquid is configured to circulate in the coating unit 20.
The film-forming liquid is preferably a mixture in which a plurality of resin components are mixed, which has a property (resistance to acid and/or alkali) of being not peeled off in a substrate processing step (etching step, gold plating step, etc.), and which has excellent adhesion to a substrate surface, etc. For example, as the solvent of the aqueous medium, various liquid agents prepared in accordance with the intended use, such as a coating agent containing an aqueous urethane resin, an aqueous styrene resin, and an aqueous thickener, can be used. The viscosity of the film-forming liquid can be appropriately adjusted according to the film thickness and edge width to be coated. For example, when the film thickness is made thin, the viscosity is adjusted to be low.
As shown in fig. 2 and 3, the coating section 30 includes a coating roller 31, a liquid supply section 32, and a recovery section 33. The coating roller 31 is substantially disc-shaped, and an annular groove 31a is formed in the outer peripheral surface thereof. The annular groove 31a has a cross section of approximately コ characters, but is not limited to this shape. The coating roller 31 is connected to a rotary shaft 34a (see fig. 3) of a drive motor 34 and is configured to be rotationally driven at a predetermined speed. The specified speed is adjusted to, for example, a rotational speed that coincides with the relative movement speed of the substrate 2.
The liquid supply section 32 is disposed in close proximity to the outer peripheral surface of the application roller 31, and supplies the film-forming liquid to the annular groove 31 a. The liquid supply portion 32 includes a tube attachment portion 32a, a liquid discharge portion 32b, and a contact piece 32 c.
The pipe attachment portion 32a is formed of an L-shaped pipe to which a pipe (not shown) from the transfer pump 60 is attached. The liquid discharge portion 32b is provided with a discharge hole 32ba (see fig. 3). The discharge hole 32ba is a liquid flow path formed from the tube attachment portion 32a toward the surface facing the annular groove 31a of the application roller 31. The contact piece 32c is disposed adjacent to the liquid discharge portion 32b, and is attached in a state where its tip end portion contacts the outer peripheral surface of the application roller 31.
The recovery unit 33 is integrally attached to the lower side of the coating roller 31, and includes a receiving tray unit 33a for receiving the film-forming liquid hanging down from the coating roller 31, and a pipe unit 33b extending downward from the center hole of the receiving tray unit 33 a. The lower part of the pipe 33b is inserted into the liquid collecting section 50, and the film-forming liquid hanging down from the application roller 31 flows into the liquid collecting section 50 through the receiving tray section 33a and the pipe 33 b.
As shown in fig. 2 and 4, the extension portion 40 includes an upper surface extension member 41 that contacts the upper surface of the peripheral edge portion of the substrate 2, an end surface extension member 42 that contacts the end surface of the peripheral edge portion of the substrate 2, and a lower surface extension member 43 that contacts the lower surface of the peripheral edge portion of the substrate 2. The upper surface extension member 41 and the lower surface extension member 43 are disposed to face each other in the vertical direction, and the end surface extension member 42 is disposed to face a space between the upper surface extension member 41 and the lower surface extension member 43.
As shown in fig. 7, 8, and 9, which will be described later, a plurality of micro grooves 41a, 42a, and 43a are formed in the upper surface stretching member 41, the end surface stretching member 42, and the lower surface stretching member 43 on the surfaces facing the substrate 2, respectively, along the moving direction of the coating unit 20.
For example, the micro grooves 41a, 42a, 43a are formed of a cross-section wave-shaped groove or a cross-section V-shaped groove, and the intervals and depths of these micro grooves can be set as appropriate in accordance with the properties such as the viscosity of the film-forming liquid to be used, the thickness of the film to be formed, and the like. For example, when a coating film of about 10 μm to 50 μm is formed, it is preferable to use grooves having a center interval of about 0.2mm to 0.3mm and a depth of about 0.05mm to 0.1 mm.
The upper stretching member 41 and the lower stretching member 43 may be, for example, thin disk-shaped members obtained by slicing a circular rod-shaped coating rod having a diameter of about 5mm to 15mm in a width of several millimeters (e.g., 1mm to 5mm), or semicircular disk-shaped members, or may be formed of thin plate-shaped members having a curved surface.
The end surface extension member 42 may be configured by, for example, a short columnar member or a semi-columnar member obtained by cutting a circular rod-shaped coating rod having a diameter of about 5mm to 15mm in a width of several millimeters (e.g., 5mm to 10 mm).
As shown in fig. 2 and 4, the extension portion 40 includes a 1 st mounting member 44 and a 2 nd mounting member 45, wherein the upper extension member 41 and the end face extension member 42 are mounted on the 1 st mounting member 44, and the lower extension member 43 is mounted on the 2 nd mounting member 45.
The 1 st mounting member 44 is inserted into the shaft members 47a and 47b mounted substantially vertically on the upper surface of the 2 nd mounting member 45, and is mounted above the 2 nd mounting member 45 so as to be movable in the vertical direction. Insertion holes into which the shaft members 47a, 47b are inserted are formed in the 1 st mounting member 44. The end face extension member 42 may be attached to the 2 nd mounting member 45.
The 2 nd mounting member 45 is provided with a recovery passage 45a for recovering the film forming liquid, the lower surface extension member 43 is mounted in the recovery passage 45a, and a part of the end surface extension member 42 is disposed in the recovery passage 45a so as to be in contact with the lower surface extension member 43.
The stretching unit 40 further includes a recovery unit 46 for recovering the film-forming liquid.
The recovery section 46 is integrally attached to the second mounting member 45 below the recovery path 45a, and includes a receiving section 46a for receiving the film forming liquid hanging down from the upper surface stretching member 41, the end surface stretching member 42, and the lower surface stretching member 43, and a pipe section 46b extending downward from the center hole of the receiving section 46 a. The lower portion of the pipe portion 46b is inserted into the liquid collecting portion 50, and the film forming liquid hanging down from the lower extension member 43 flows to the liquid collecting portion 50 through the receiving tray portion 46a and the pipe portion 46 b.
Further, as shown in fig. 4, the stretching portion 40 includes a 1 st urging mechanism 47 for applying a force in a direction toward the lower stretching member 43 to the upper stretching member 41, a 2 nd urging mechanism 48 for applying a force in a direction toward the upper stretching member 41 to the lower stretching member 43, and a 3 rd urging mechanism 49 for applying a force in a direction of a space between the upper stretching member 41 and the lower stretching member 43 to the end surface stretching member 42.
The 1 st biasing mechanism 47 includes shaft members 47a and 47b and a 1 st spring member 47c attached to the shaft member 47a, and the 1 st attachment member 44 is in a state of being pressed downward by the first spring member 47 c. For example, a compression coil spring may be used as the first spring member 47c, but any elastic member that presses the 1 st mounting member 44 downward may be used.
The 2 nd urging mechanism 48 includes a linear motion rail member 48a, a linear motion block member 48b, a pressing member 48c, a 2 nd spring member 48d, and a spring mounting portion 48 e. The linear guide mechanism is constituted by the linear rail member 48a and the linear block member 48b so as to be slidable in the vertical direction. The linear motion rail member 48a is attached to the 2 nd mounting member 45, and the linear motion block member 48b is attached to the pressing member 48 c. Further, the linear motion guide mechanism is not limited to this type, and the linear motion rail member 48a and the linear motion block member 48b may be disposed alternately.
The pressing shaft 48ca is provided at the upper portion of the pressing member 48c, and the pressing shaft 48ca presses the upper end portion of the linear motion rail member 48 a. The pressing member 48c is attached to the linear motion rail member 49a of the 3 rd biasing mechanism 49.
The 2 nd spring member 48d is disposed so as to press the linear motion rail member 48a upward. The lower portion of the 2 nd spring member 48d is attached to the spring attachment portion 48e, the spring attachment portion 48e is attached to one end of the linearly moving rail member 49a of the 3 rd urging mechanism 49, and the upper portion of the 2 nd spring member 48d is attached to the lower portion of the linearly moving rail member 48 a. The 2 nd spring member 48d may be a compression coil spring, for example, but any elastic member that presses the linear motion rail member 48a attached to the 2 nd mounting member 45 upward may be used.
The 3 rd urging mechanism 49 is configured to include a linearly moving rail member 49a, a linearly moving block member 49b, a 3 rd spring member 49c, a spring mounting portion 49d, and a support member 49 e. The linear motion guide mechanism is constituted by a linear motion rail member 49a and a linear motion block member 49b which are slidable in the horizontal direction.
The spring mounting portion 49d and the support member 49e are mounted on the mounting member 21, the linear motion block member 49b is mounted above the support member 49e, and the linear motion rail member 49a is slidably mounted on the linear motion block member 49 b. The extension 40 is supported by the support member 49 e. Further, the linear motion guide mechanism is not limited to this type, and the linear motion rail member 49a and the linear motion block member 49b may be disposed alternately.
The 3 rd spring member 49c is disposed so as to press the linear motion rail member 49a in the direction of the 2 nd mounting member 45 (the direction from the right to the left in fig. 4). That is, one end of the 3 rd spring member 49c is attached to the other end of the translation rail member 49a, and the other end of the 3 rd spring member 49c is attached to the spring attachment portion 49 d. Further, the 3 rd spring member 49c may be a compression coil spring, for example, but any elastic member that presses the linear motion rail member 49a in the direction of the 2 nd mounting member 45 may be used.
Next, a method of applying the film forming liquid to the peripheral edge portion of the substrate 2 using the application device 10 according to embodiment (1) will be described with reference to fig. 1 and 5 to 10. The substrate 2 to be coated is a printed wiring board having a rectangular shape and a thickness of about 0.4 to 1.5mm, but the type and size (size and thickness) of the substrate to be coated are not limited thereto. As one step of the substrate manufacturing process, a coating method using the coating apparatus 10 according to embodiment (1) can be adopted.
Fig. 5 is a partially omitted plan view showing a state in which the coating unit 20 coats the film forming liquid on the circumferential edge portion of the substrate 2.
Fig. 6 is a sectional view of the VI-VI line in fig. 5, with the sectional view omitted, showing a state in which the coating roller 31 coats the film forming liquid on the end face of the substrate 2.
Fig. 7 is a partially omitted cross-sectional view of VII-VII in fig. 5, showing a state in which the film-forming liquid applied to the end face of the substrate 2 is stretched by the upper surface stretching member 41, the end face stretching member 42, and the lower surface stretching member 43 of the stretching unit 40.
Fig. 8 is a partially omitted sectional view of VIII-VIII line in fig. 7, showing a part of the bottom surface of the 1 st mounting member 44.
Fig. 9 is a partially omitted sectional view of the IX-IX ray in fig. 5, and is a sectional view including the upper extension member 41 and the lower extension member 43.
First, as shown in fig. 1, the position of each coating unit 20 is adjusted based on the data of the size (longitudinal and lateral length) of the substrate 2 supported on the support base 11. That is, when each coating unit 20 is moved along the edge of the substrate 2, the annular groove 31a of the coating roller 31 comes into contact with the end surface of the substrate 2, and the controller 13 controls the operation of the moving unit 12 (the X-axis linear motion mechanism 12a and the Y-axis linear motion mechanism 12b) to place the coating unit 20 at the initial position.
After the positions of the coating units 20 are adjusted, the controller 13 controls the operation of the moving unit 12 to move the coating units 20 along the sides of the substrate 2 (in the direction of arrow a in fig. 1 and 5), and starts coating the film-forming liquid on the peripheral edge of the substrate 2. In addition, in consideration of the shape (R shape, etc.) of the corner portion of the substrate 2, the movement of the moving unit 12 (the X-axis linear motion mechanism 12a and the Y-axis linear motion mechanism 12b) may be controlled so that the application roller 31 moves along the shape of the corner portion at the corner portion of the substrate 2.
The control unit 13 controls the operation of the moving unit 12, controls the driving of the driving motor 34 of the coating unit 30, rotates the coating roller 31 in the moving direction of the coating unit 20 at a predetermined rotational speed, controls the driving of the transfer pump 60, and controls the supply of the film-forming liquid to the liquid supply unit 32 of the coating roller 31 at a constant flow rate.
As shown in fig. 5 and 6, the coating unit 20 is controlled to move along the outer periphery of the substrate 2, and the film forming liquid is applied to at least the peripheral edge portion end face 2ab of the substrate 2 by the coating roller 31 of the coating section 30 (coating step).
That is, the coating roller 31 is rotationally driven while the liquid supply portion 32 supplies the film forming liquid to the annular groove 31a of the coating roller 31 and the annular groove 31a of the coating roller 31 is brought into abutment against the circumferential edge end face 2ab of the substrate 2, and the coating unit 20 is moved along the outer periphery of the substrate 2 (in the direction of arrow a).
After the above-described coating step, as shown in fig. 5 and 7, the coating unit 20 is moved along the outer periphery of the substrate 2 (in the direction of arrow a) while the film-forming liquid applied to the peripheral edge portion end face 2ab of the substrate 2 by the coating roller 31 is stretched in a thin film form on the peripheral edge portion upper face 2aa and the peripheral edge portion lower face 2ac of the substrate 2 in a state where the upper face stretching member 41, the end face stretching member 42, and the lower face stretching member 43 of the stretching portion 40 are pressed against the peripheral edge portion upper face 2aa, the peripheral edge portion end face 2ab, and the peripheral edge portion lower face 2ac of the substrate 2 (stretching step).
That is, the stretching unit 40 moves along the outer periphery of the substrate 2 while holding 3 surfaces of the substrate 2 with the peripheral edge portion 2a interposed therebetween by the upper surface stretching member 41, the end surface stretching member 42, and the lower surface stretching member 43, and stretches the film-forming liquid in a thin film shape.
Then, when the coating unit 20 moves from one end to the other end of the substrate 2 and the extension portion 40 passes through the corner portion of the other end of the substrate 2, the coating of the peripheral edge portion 2a of the substrate 2 is finished, and then the moving unit 12 is controlled to return the coating unit 20 to the initial position, thereby completing the coating of the substrate 2. Then, the substrate 2 to be coated is carried out by a transport mechanism (not shown), and the next substrate 2 is carried into the support table 11, and the coating step and the stretching step described above by the coating unit 20 are repeated. The substrate 2 to be coated may be carried into a drying apparatus (not shown), for example.
Fig. 10 is an enlarged sectional view showing the vicinity of the peripheral edge portion 2a of the substrate 2 coated by the coating unit 20, (a) is a sectional view of the substrate 2 after the coating roller 31 passes through, and (b) is a sectional view of the substrate 2 after the extension portion 40 passes through.
As shown in fig. 10(a), the state in which the film-forming liquid 3 is applied by the application roller 31 and then the film-forming liquid 3 is attached to at least the circumferential edge end face 2ab of the substrate 2 is a state in which the film-forming liquid 3 does not spread over the circumferential edge upper face 2aa and the circumferential edge lower face 2ac of the substrate 2 at this stage.
As shown in fig. 10(b), after the film-forming liquid 3 is spread by the upper surface spreading member 41, the end surface spreading member 42, and the lower surface spreading member 43 of the spreading portion 40, the film-forming liquid 3 is thinly applied to the peripheral edge portion upper surface 2aa, the peripheral edge portion end surface 2ab, and the peripheral edge portion lower surface 2ac of the substrate 2 in a uniform thickness.
The coating width (spread width) w on the upper surface 2aa of the peripheral edge portion of the substrate 2 can be made extremely narrow, on the order of 0.5mm to 1mm, by narrowing the width of the upper surface spreading member 41.
The coating width (extension width) on the lower surface 2ac of the peripheral edge portion of the substrate 2 may be made extremely narrow, on the order of 0.5mm to 1mm, by narrowing the width of the lower extension member 43. Further, the upper surface extension member 41 and the lower surface extension member 43 do not always need to have the same width, and by changing these widths, the coating width on the peripheral edge portion upper surface 2aa of the substrate 2 and the coating width on the peripheral edge portion lower surface 2ac of the substrate 2 can be changed in accordance with the kind of the substrate 2 and the use thereof.
The film thickness (film thickness of the coating film) of the film-forming liquid 3 after drying can be adjusted to about 10 μm to 60 μm by adjusting the configuration of the stretching part 40, specifically, by adjusting the groove shapes, the moving speeds, the viscosities of the film-forming liquid 3, and the like of the upper surface stretching member 41, the end surface stretching member 42, and the lower surface stretching member 43.
According to the coating apparatus 10 of the above-described embodiment (1), the coating section 30 coats the film-forming liquid on at least the peripheral edge end face of the substrate 2, and the coated film-forming liquid is stretched in a thin film shape over the entire peripheral edge portion of the substrate 2 including the upper and lower surfaces of the peripheral edge portion by the stretching section 40. Since the stretching portion 40 includes the upper surface stretching member 41, the end surface stretching member 42, and the lower surface stretching member 43, the film forming liquid can be stretched in a uniform thickness over the entire peripheral edge portion of the substrate 2 in a state where the 3 surfaces of the peripheral edge portion of the substrate 2 are sandwiched by these members.
In addition, since the end surface position of the substrate 2 is restricted by the end surface stretching member 42, the coating width (edge width) above and below the circumferential edge portion of the substrate 2 can be adjusted by changing the widths of the upper surface stretching member 41 and the lower surface stretching member 43. Further, by narrowing the widths of the upper surface extension member 41 and the lower surface extension member 43, the coating widths on the upper surface of the peripheral edge portion and the lower surface of the peripheral edge portion of the substrate 2 can be made extremely narrow, on the order of 0.5mm to 1mm, or can be made to be a width of 1mm or more.
Therefore, the application width of the film forming liquid applied to the substrate circumferential edge portion including the end face of the substrate 2 can be controlled to be extremely narrow, and a thin coating film having a uniform thickness can be reliably formed on the entire circumferential edge portion of the substrate 2, and the need for forming coating films of various shapes at the circumferential edge portion of the substrate can be widely met.
Further, since the plurality of micro grooves 41a, 42a, 43a are formed in the upper stretching member 41, the end surface stretching member 42, and the lower stretching member 43, the plurality of micro grooves 41a, 42a, 43a can remove the excessive film forming liquid, and at the same time, the effect of making the film forming liquid thin and uniformly stretched over the entire peripheral edge portion of the substrate 2 can be improved, and the film thickness of the film forming liquid after stretching can be finely adjusted by changing the depth of these micro grooves.
Further, since the extension portion 40 includes the 1 st urging mechanism 47, the 2 nd urging mechanism 48, and the 3 rd urging mechanism 49, the force in the direction of the lower extension member 43 is applied to the upper surface extension member 41 by the 1 st urging mechanism 47, the force in the direction of the upper surface extension member 41 is applied to the lower surface extension member 43 by the 2 nd urging mechanism 48, and the force in the direction of the space between the upper surface extension member 41 and the lower surface extension member 43 is applied to the end surface extension member 42 by the 3 rd urging mechanism 49.
Therefore, the upper surface extension member 41 can be pressed against the upper surface of the peripheral edge portion of the substrate 2, the lower surface extension member 43 can be pressed against the lower surface of the peripheral edge portion of the substrate 2, and the end surface extension member 42 can be pressed against the end surface of the peripheral edge portion of the substrate 2, whereby the effect of the film-forming liquid extending in a uniform film shape over the entire peripheral edge portion of the substrate 2 can be improved.
The stretcher 40 preferably includes the 1 st biasing mechanism 47, the 2 nd biasing mechanism 48, and the 3 rd biasing mechanism 49, but in another embodiment, the stretcher may include the 1 st biasing mechanism 47 and the 3 rd biasing mechanism 49 (in other words, the 2 nd biasing mechanism 48 may be configured by a fixing member that does not include the 2 nd spring member 48 d). Alternatively, the second biasing mechanism 48 and the third biasing mechanism 49 may be provided (in other words, the 1 st biasing mechanism 47 may be a fixing member without the 1 st spring member 47 c). Alternatively, the structure may be provided with the 1 st biasing mechanism 47 and the 2 nd biasing mechanism 48 (the 3 rd biasing mechanism 49 may be constituted by a fixing member without the 3 rd spring member 49 c), that is, the structure may be provided with at least one of the 1 st biasing mechanism 47, the 2 nd biasing mechanism 48, and the 3 rd biasing mechanism 49.
In the extending portion 40, the upper extending member 41 is attached to the 1 st mounting member 44, the lower extending member 43 is attached to the 2 nd mounting member 45, the end face extending member 42 is attached to the 1 st mounting member 44, and the 1 st mounting member 44 is attached to the 2 nd mounting member 45 so as to be movable in the vertical direction, so that the flexible response is possible even when the thickness of the substrate 2 is different.
Further, since the 2 nd mounting member 45 includes the recovery path 45a and the lower surface extension member 43 is mounted in the recovery path 45a, the film formation liquid removed from the substrate 2 by the extension operation of the lower surface extension member 43 is recovered to the liquid collection unit 50 through the recovery path 45 a. Therefore, the periphery of the extension portion 40 can be prevented from being contaminated by the film-forming liquid removed from the substrate 2, and the coating unit 20 can be kept in a clean state.
Further, since the coating section 30 includes the coating roller 31 in which the annular groove 31a is formed, the liquid supply section 32 having the liquid discharge section 32b and the contact piece 32c, and the recovery section 33, the film forming liquid can be supplied directly from the liquid discharge section 32b of the liquid supply section 32 to the annular groove 31a of the coating roller 31. Further, since the contact piece 32c contacts the outer peripheral surface of the application roller 31, the effect of holding the film forming liquid supplied to the annular groove 31a in the annular groove 31a can be improved. Then, by rotating the application roller 31 in a state where the annular groove 31a abuts against the end face of the substrate 2, the film forming liquid can be reliably and stably attached to at least the end face of the peripheral edge of the substrate 2. Further, since the film-forming liquid hanging down from the application roller 31 is collected in the liquid collecting unit 50 by the collecting unit 33, the film-forming liquid can be collected without contaminating the periphery of the application roller 31 and can be reused.
The coating unit 20 includes the coating section 30, the stretching section 40, the liquid collecting section 50, and the transfer pump 60, and the liquid collecting section 50 is disposed to collect the film-forming liquid recovered from the coating section 30 and the stretching section 40, so that the structure of reusing the film-forming liquid can be integrated into a compact structure in units of units, and the degree of freedom in device design such as the moving range and the arrangement position of the coating unit 20 can be increased.
The coating apparatus 10 includes a support table 11, 4 coating units 20, 4 moving units 12, and a control unit 13, and the control unit 13 controls the coating units 30 of the coating units 20 to apply the film forming liquid to at least the peripheral edge surface of the substrate 2, and controls the moving units 12 to move the coating units 20 along the edge of the substrate while bringing the upper surface stretching member 41, the end surface stretching member 42, and the lower surface stretching member 43 of the stretching unit 40 into contact with the peripheral edge upper surface, the peripheral edge surface, and the edge lower surface of the substrate 2. With this configuration, the time required to coat the entire periphery of the substrate 2 can be significantly reduced, and the coating efficiency can be improved.
By using the coating apparatus 10 according to the above-described embodiment (1), a coating film of good quality can be obtained, which can prevent dust and the like from being generated on the end surface of the substrate 2, and can improve the quality of a substrate product. In addition, the pollution of manufacturing equipment caused by dust can be prevented, and the incidence rate of defective products can be greatly reduced.
Fig. 11 is a perspective view showing a main part of a coating unit of the coating device according to embodiment (2). Components having the same functions as those of the coating apparatus 10 according to embodiment (1) shown in fig. 1 to 10 are denoted by the same reference numerals, and the components are not shown here.
The application device 10A according to embodiment (2) differs from the application device 10 according to embodiment (1) in that the application unit 20A includes a corner extending portion 70 in addition to the application portion 30 and the extending portion 40.
Fig. 12 is a partially omitted perspective view showing a state in which the corner extension portion 70 of the coating unit 20A extends the film formation liquid on the corner end face 2ad of the substrate 2.
The corner extending portion 70 is a member for contacting the corner end face 2ad of the substrate 2 when the peripheral edge portion of the substrate 2 is coated, and extending the film-forming liquid coated on the corner end face 2 ad.
The corner extending portion 70 includes an extending roller 70a, a linear motion block member 70b to which the extending roller 70a is attached, and a linear motion rail member 70c for sliding the linear motion block member 70b in the Y-axis direction. A plurality of microgrooves are formed in the outer peripheral surface of the stretching roller 70a, similarly to the end surface stretching member 42.
The linear motion rail member 70c is attached to the support member 49e of the extending portion 40, the linear motion block member 70b is connected to the linear motion block member 49b (see fig. 4) of the extending portion 40, and a pressing force for urging the extending roller 70a in the direction of the corner end surface 2ad of the substrate 2 is applied thereto by the 3 rd spring member 49c (see fig. 4) of the 3 rd urging mechanism 49. Further, a 4 th spring member (not shown) may be provided between the linear motion block member 70b and the mounting member 21, and a pressing force for urging the extension roller 70a in the direction of the corner end surface 2ad of the substrate 2 may be applied.
According to the coating apparatus 10A of the embodiment (2), since the coating unit 20A includes the corner stretching part 70 in addition to the coating part 30 and the stretching part 40, and the corner stretching part 70 includes the stretching roller 70A, it is possible to reduce coating unevenness of the film-forming liquid at the corner of the substrate 2 where the coating unevenness of the film-forming liquid is likely to occur. In particular, even if the corners of the substrate 2 are rounded, the coating film at the corners can be prevented from becoming thick, and the coating film at the corners of the substrate 2 can be made thin and uniform, thereby further improving the coating film quality.
In the coating unit 20A, the corner extension portion 70 includes a mechanism (4 th biasing mechanism) for biasing the extension roller 70A in a direction toward the corner end surface of the substrate 2. According to the above configuration, the stretching roller 70A can be reliably pressed against the corner end surface 2ad of the substrate, and even when the corner end surface of the substrate 2 is coated a plurality of times, for example, the thickness of the corner end surface of the substrate 2 can be prevented from increasing by the plurality of coating units 20A.
Further, although the coating devices 10 and 10A according to the embodiments (1) and (2) have one extension portion 40 in the coating units 20 and 20A, in other embodiments, a plurality of extension portions 40 may be arranged side by side. According to the above configuration, since the film-forming liquid applied to the peripheral edge portion of the substrate 2 can be spread plural times by the plurality of spreading portions 40, the effect of spreading the film-forming liquid in a uniform thickness and thinness on the 3 surfaces of the peripheral edge portion of the substrate 2 can be further improved. In this case, the upper extension member 41 and the lower extension member 43 of the extension portion 40 may be the same width (extension width) or different widths.
Further, the stretch unit 40 is not limited to the above configuration, and a stretch unit 40A such as shown in fig. 13 may be incorporated into the application unit 20B.
Fig. 13 is a perspective view showing a main part of an extension portion 40A of an application unit 20B constituting the application device according to embodiment (3). Fig. 14 is a partially omitted front view of the extension 40A shown in fig. 13, fig. 15 is a partially enlarged sectional view taken along XV-XV in fig. 14, and fig. 16 is a partially enlarged sectional view taken along XVI-XVI in fig. 14.
The extension portion 40A includes a 1 st mounting member 44A, a 2 nd mounting member 45A, and a collection portion 46A.
The inclined guide portion 44b, the upper surface scraping portion 81, the end surface scraping portion 82, and the upper surface extending member 41A are disposed adjacent to and in parallel with each other on the lower surface of the 1 st mounting member 44A, and the end surface extending member 42A extending from the 2 nd mounting member 45A is disposed so as to contact the upper surface extending member 41A.
Further, on the upper surface of the 2 nd mounting member 45A, the inclined guide portion 45b, the lower surface scraping portion 83, the lower surface extending member 43A, and the end surface extending member 42A are disposed adjacent to each other, and the end surface scraping portion 82 extending from the 1 st mounting member 44A is disposed so as to contact the lower surface scraping portion 83.
The scraping section 80 is constituted by an upper surface scraping section 81, an end surface scraping section 82, and a lower surface scraping section 83, the scraping section 80 scrapes a part of the film forming liquid applied to the coating section 30 (see fig. 2), and the scraping section 80 is formed in a shape surrounding 3 surfaces of the upper surface of the circumferential edge portion, the end surface of the circumferential edge portion, and the lower surface of the circumferential edge portion of the substrate 2 by the upper surface scraping section 81, the end surface scraping section 82, and the lower surface scraping section 83.
The 1 st mounting member 44A is mounted on the 2 nd mounting member 45A so as to be movable in the up-down direction, and is assembled in a state of being biased to the 2 nd mounting member 45A by a 1 st biasing mechanism 47A including a 1 st elastic member 47 c.
The 2 nd mounting member 45A includes a recovery path 45A (see fig. 16) for recovering the film forming liquid, the lower surface extension member 43A is mounted in the recovery path 45A, and the end surface extension member 42A is disposed in the recovery path 45A.
The 2 nd mounting member 45A is assembled in a state where a force is applied to the 1 st mounting member 44A by the 2 nd biasing mechanism 48A including a 2 nd spring member (not shown).
The 3 rd urging mechanism 49A is assembled to the 2 nd mounting member 45A, the 3 rd urging mechanism 49A is mounted to the mounting member 21 (see fig. 2), and the 2 nd mounting member 45A is assembled in a state of being urged in the end face direction (Y-axis direction) of the substrate 2 by the 3 rd urging mechanism 49A.
According to the coating unit 20B of the above-described embodiment (3), the scraping section 80, which is an additional function, can be compactly integrated with the upper surface extension member 41A, the end surface extension member 42A, and the lower surface extension member 43A in the extension section 40A.
Further, since the scraping section 80 is disposed between the coating section 30 and the upper surface stretching member 41A, the end surface stretching member 42A, and the lower surface stretching member 43A, the upper surface stretching member 41A, the end surface stretching member 42A, and the lower surface stretching member 43A stretch the film-forming liquid after the excess film-forming liquid adhering to the substrate 2 is scraped off by the scraping section 80. Therefore, the amount of film-forming liquid deposited before the stretching treatment can be made constant, and the quality of the coating film after the stretching treatment can be further stabilized.
Further, since the scraping portion 80 is formed in a shape surrounding the upper surface of the circumferential edge portion, the end surface of the circumferential edge portion, and the lower surface of the circumferential edge portion of the substrate 2, the film forming liquid can be scraped along the upper surface of the circumferential edge portion, the end surface of the circumferential edge portion, and the lower surface of the circumferential edge portion of the substrate 2. Therefore, before the stretching process by the upper stretching member 41A, the end surface stretching member 42A, and the lower stretching member 43A, the film forming liquid can be easily adjusted to a state of being stretched in a uniform thickness and thin at the peripheral edge portion of the substrate 2.
It is also possible to construct a coating apparatus including the coating apparatuses according to the embodiments (1) to (3) and a drying apparatus (not shown) for drying the substrate 2 coated with the film-forming liquid at the peripheral edge portion by the coating apparatus. The drying device may be a hot air drying device including a multistage collection rack capable of accommodating a plurality of substrates 2, a UV light drying device that irradiates UV light (ultraviolet rays) to dry the film forming liquid, or the like. The drying device may include a plurality of drying devices, and may be a system in which a hot air drying device and a UV light drying device are combined, for example.
The substrate 2 to be coated with the film-forming liquid by the coating apparatus according to embodiments (1) to (3) has a size of about 400 to 600mm in vertical and horizontal directions, for example. The time required for the coating unit 20, 20A, 20B to coat the film-forming liquid on the circumferential edge portion of one side of the substrate 2 may be set to, for example, about 10 seconds to 20 seconds. The size of the substrate 2 is not limited to the above size, and may be larger or smaller, and may be configured to be suitable for the size of the substrate 2.
The substrate 2 to be coated is not limited to a printed wiring board (including a single-sided, double-sided, multilayer, or buildup substrate), and an electronic circuit board on which various electronic components and the like are mounted, such as a metal substrate, a package substrate (copper-clad laminate substrate), a ceramic substrate, a flexible substrate, or a glass substrate, may be a target to be coated.
Description of the symbols
2 base plate
2a peripheral edge portion
2aa peripheral edge part upper face
2ab peripheral edge end face
2ac lower surface of peripheral edge portion
2ad corner face
3 film-forming liquid
10. 10A coating device
11 supporting table
12 mobile unit
12a X axle direct-acting mechanism
12aa X-axis cylinder
12ab X-axis slider
12b Y axle direct-acting mechanism
12c cable chain
13 control part
14 operating part
20. 20A, 20B coating unit
21 mounting member
30 coating part
31 coating roller
31a annular groove
32 liquid supply part
32a hose fitting part
32b liquid discharge part
32ba discharge hole
32c contact piece
33 recovery part
33a receiver disk section
33b pipe part
34 drive motor
34a rotating shaft
40. 40A stretch part
41. 41A upper surface extension part
42. 42A end face extension member
43. 43A lower extension part
41a, 42a, 43a microgrooves
44. 44A 1 st mounting member
44b inclined guide part
45. 45A 2 nd mounting member
45a recovery path
45b inclined guide part
46. 46A recovery part
46a receiver disk portion
46b pipe part
47. 47A 1 st force application mechanism
47a, 47b shaft member
47c 1 st spring member
48. 48A 2 nd force application mechanism
48a direct acting track member
48b linear motion block component
48c pressing member
48ca pressing shaft
48d 2 nd spring member
48e spring mounting portion
49. 49A No. 3 forcing mechanism
49a direct acting track component
49b translational block component
49c No. 3 spring member
49d spring mounting part
49e supporting member
50 liquid collecting part
51 cover
51a hose attachment part
52 lower box
53 case receiving table
60 transfer pump
70 corner extensions
70a extension roller
70b translational block component
70c direct acting rail component
80 scraping part
81 upper scraping part
82 end surface scraping part
83 lower scraping part

Claims (18)

1. A coating apparatus for coating a film-forming liquid on a peripheral edge portion of a substrate while relatively moving the substrate and a coating unit,
the coating unit includes:
a coating section for coating the film-forming liquid on at least an end surface of a peripheral edge portion of the substrate,
and a stretching unit that stretches the film-forming liquid applied by the application unit in a thin film form on the upper and lower surfaces of the peripheral edge portion of the substrate.
2. The coating apparatus according to claim 1, wherein the extension portion is constituted by an upper extension member which is in contact with an upper surface of the peripheral edge portion of the substrate, an end surface extension member which is in end surface contact with the peripheral edge portion of the substrate, and a lower extension member which is in contact with a lower surface of the peripheral edge portion of the substrate;
the upper extension member and the lower extension member are disposed to face each other;
the end face extension member is disposed in a space between the upper extension member and the lower extension member.
3. The coating apparatus according to claim 2, wherein the upper surface stretching member, the end surface stretching member, and the lower surface stretching member have a plurality of micro grooves formed in the direction of the relative movement.
4. The coating apparatus according to claim 2, wherein the extension portion is provided with at least one of a 1 st urging mechanism, a 2 nd urging mechanism, and a 3 rd urging mechanism,
the 1 st forcing mechanism forces the upper extension member in a direction toward the lower extension member,
the 2 nd forcing mechanism forces the lower extension member in a direction toward the upper extension member,
the 3 rd urging mechanism urges the end surface extension member in a direction toward a space between the upper surface extension member and the lower surface extension member.
5. The coating apparatus of any of claims 2-4, wherein the stretch comprises 1 st and 2 nd mounting components, wherein the upper stretch component is mounted on the 1 st mounting component and the lower stretch component is mounted on the 2 nd mounting component;
the end face extension member is mounted on the 1 st mounting member or the 2 nd mounting member;
the 1 st mounting member is mounted to the 2 nd mounting member so as to be movable in the vertical direction.
6. The coating apparatus according to claim 5, wherein the 2 nd mounting member includes a recovery path for recovering the film forming liquid, and the lower surface extension member is mounted in the recovery path.
7. A coating apparatus according to any one of claims 2 to 4, wherein a scraping section for scraping a part of the film-forming liquid applied by the coating section is provided between the coating section and the upper surface extension member, the end surface extension member, and the lower surface extension member.
8. The coating apparatus according to claim 7, wherein the scraping portion is formed in a shape surrounding a circumferential edge portion upper face, a circumferential edge portion end face, and a circumferential edge portion lower face of the substrate.
9. The coating apparatus according to claim 7, wherein said scraping portion is disposed adjacent to said upper extension member, said end face extension member, and said lower extension member.
10. A coating apparatus according to any one of claims 1 to 4, wherein said coating means is provided with a plurality of said spreading parts.
11. A coating apparatus according to any one of claims 1 to 4, wherein the coating section comprises:
a coating roller having an annular groove formed on the outer peripheral surface thereof,
a liquid supply section disposed adjacent to an outer peripheral surface of the application roller and configured to supply the film forming liquid to the annular groove,
a recovery unit disposed below the coating roller and configured to recover the film-forming liquid that has dropped from the coating roller.
12. The coating apparatus according to claim 11, wherein the liquid supply portion includes: a liquid discharge portion formed on a surface facing the annular groove of the application roller, and a contact member disposed adjacent to the liquid discharge portion and contacting an outer peripheral surface of the application roller.
13. A coating apparatus according to any one of claims 1 to 4, further comprising a corner extension portion which is brought into contact with a corner end face of the substrate and extends the film-forming liquid extended from the extension portion.
14. A coating apparatus according to claim 13, wherein said coating apparatus comprises a 4 th urging means, and said 4 th urging means urges said corner extended portion in a direction toward a corner end face of said substrate.
15. A coating apparatus according to any one of claims 1 to 4, wherein the coating apparatus comprises a support member for supporting the substrate, a plurality of coating units arranged around the support member, a moving member for moving the coating units along the side of the substrate supported by the support member, and a control member for controlling the movement of the moving member and the coating units;
the control means controls the moving means to move the coating units along the side of the substrate while applying the film-forming liquid to at least the end face of the peripheral edge portion of the substrate by the application sections of the coating units, and while stretching the applied film-forming liquid in a thin film shape on the upper and lower faces of the peripheral edge portion of the substrate by the stretching section.
16. The coating apparatus according to any one of claims 1 to 4, wherein the coating unit includes a liquid collecting portion that collects the film-forming liquid and a conveying member that conveys the film-forming liquid from the liquid collecting portion to the coating portion;
the liquid collecting section is configured to collect the film forming liquid collected from the coating section and the stretching section.
17. A coating method for coating a film-forming liquid on a peripheral edge portion of a substrate, the coating method comprising:
a coating step of coating the film-forming liquid on at least an end surface of a peripheral edge portion of the substrate by a coating section included in the coating unit while relatively moving the substrate and the coating unit,
and a stretching step of stretching the film-forming liquid applied in the coating step in a thin film shape on upper and lower surfaces of the peripheral edge portion of the substrate by a stretching portion included in the coating unit.
18. The coating method according to claim 17, wherein the stretching step is a step of stretching the film-forming liquid in a thin film shape while pressing the stretching portion in at least one direction of an upper surface of the peripheral edge portion, an end surface of the peripheral edge portion, and a lower surface of the peripheral edge portion of the substrate.
CN202111321190.3A 2020-12-22 2021-11-09 Coating device and coating method Active CN114653520B (en)

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JP7137239B2 (en) 2022-09-14
KR20220090396A (en) 2022-06-29

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