CN114646454B - Echelle grating diffraction efficiency testing device and method - Google Patents
Echelle grating diffraction efficiency testing device and method Download PDFInfo
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- CN114646454B CN114646454B CN202011522012.2A CN202011522012A CN114646454B CN 114646454 B CN114646454 B CN 114646454B CN 202011522012 A CN202011522012 A CN 202011522012A CN 114646454 B CN114646454 B CN 114646454B
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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Abstract
The present disclosure provides an echelle grating diffraction efficiency testing device, comprising: the laser light source module, the test module, the detection module, wherein, the test module includes the beam splitter, the collimating mirror, focusing mirror and revolving stage, test light beam divide into first light beam and second light beam by the beam splitter, first light beam becomes the collimated light and is incident to echelle grating or plane mirror to be measured through the collimating mirror, the reflection returns the collimating mirror and focuses to first photoelectric detector, as the measuring result of diffraction luminous flux and reference luminous flux, the second light beam is after the focusing mirror reflects back the spectroscope, focus to the second photoelectric detector, as the measuring result of synchronous measurement process, the detection module calculates the relative diffraction efficiency between echelle grating and the plane mirror to be measured according to the detection value of first photoelectric detector and second photoelectric detector, and can eliminate the measuring error that the light source undulant brought in the switching process.
Description
Technical Field
The disclosure relates to the technical field of optical measurement, in particular to an echelle grating diffraction efficiency testing device and method.
Background
The echelle grating is a special grating and is characterized by low reticle density, large diffraction angle and high diffraction order, so that the echelle grating has high dispersion and resolution. In recent years, echelle gratings are widely used in astronomy, medical treatment and various detection fields as core elements of echelle grating spectrometers.
The most important performance index of the echelle grating is grating diffraction efficiency, and the detection method of the grating diffraction efficiency in the prior art comprises the following steps: the diffracted light flux and the reference light flux are measured at specific angles, respectively. The patent CN108254161 provides an auto-collimation type echelle grating diffraction efficiency testing device, which comprises the steps of placing a grating to be tested and a plane mirror to be tested in a testing system in sequence, and respectively recording diffraction luminous flux and reference luminous flux to calculate relative diffraction efficiency. The testing process has the problem that the echelle grating to be tested is not synchronous with the switching of the plane mirror to be tested, and the measuring error caused by the fluctuation of the light source in the switching process can be introduced. The patent CN109269771 provides an echelle grating diffraction efficiency tester with adjustable offset angle, which can adjust the offset angle according to the actual working state of the echelle grating, and the measurement process still has the problem of asynchronous measurement of the diffracted light and the reference light, and can introduce measurement errors caused by fluctuation of the light source.
Disclosure of Invention
In view of the above problems, the present invention provides an echelle grating diffraction efficiency testing device and method, so as to solve the problem of measurement error caused by light source fluctuation in the process of switching an echelle grating to be measured and a plane mirror to be measured in the measurement process.
One aspect of the present disclosure provides an echelle grating diffraction efficiency testing apparatus, comprising: the laser light source module is used for generating a test beam; the testing module comprises a beam splitter, a collimating mirror, a focusing mirror and a turntable; the beam splitter is used for splitting the test beam into a first beam and a second beam; the collimating mirror is used for making the first light beam be incident to an echelle grating to be detected or a plane mirror to be detected which is arranged on the turntable after being collimated, and focusing the diffraction light of diffraction orders to be detected generated by diffraction of the echelle grating to be detected or the first light beam reflected by the plane mirror to be detected to the first photoelectric detector; the focusing mirror is used for focusing and reflecting the second light beam to the beam splitter and then to the second photoelectric detector; the turntable is used for setting and adjusting the angle of the echelle grating to be measured or the plane mirror to be measured; the detection module comprises the first photoelectric detector, the second photoelectric detector and a data processing unit, wherein the data processing unit is used for calculating diffraction efficiency of the echelle grating to be detected according to detection values of the first photoelectric detector and the second photoelectric detector.
Optionally, the test module has an aplanatic structure, so that optical paths of light detected by the first photodetector and the second photodetector are equal.
Optionally, the laser light source module includes: a laser for generating laser light; and the aperture diaphragm is used for adjusting the laser into the test beam.
Optionally, the beam splitter is a plane mirror with a semi-transparent semi-reflective coating on the surface; or the beam splitter is a grating beam splitting device, the first light beam is a first diffraction order light beam generated by the grating beam splitting device, and the second light beam is a second diffraction order light beam generated by the grating beam splitting device.
Optionally, the detection module further comprises: the stray light eliminating diaphragm is arranged in front of the first photoelectric detector probe and is used for shielding diffraction light of the grating non-to-be-measured order; and the reference diaphragm is arranged in front of the second photoelectric detector probe.
The present disclosure also provides an echelle grating diffraction efficiency testing method, comprising: starting a laser light source module to generate a test light beam, wherein the test light beam is divided into a first light beam and a second light beam by a beam splitter; setting an echelle grating to be measured on a rotary table, and adjusting the angle of the echelle grating to be measured to enable the first light beam to enter the echelle grating to be measured at a quasi-littrow angle (within the range of adding or subtracting 0.5 degrees from the littrow angle but not equal to the littrow angle) after being focused by a collimating lens; enabling a first photoelectric detector to detect diffraction order diffraction light to be detected, which is generated by diffraction of an echelle grating to be detected, enabling a second photoelectric detector to detect the second light beam focused and reflected by a focusing mirror, and simultaneously recording a first reading of the first photoelectric detector and a second reading of the second photoelectric detector at present; detaching the echelle grating to be tested, arranging the plane mirror to be tested on the turntable, and adjusting the angle of the plane mirror to be tested, wherein the light path of the first light beam is the same as the light path generated by diffraction of the echelle grating to be tested; the first photoelectric detector detects the first light beam reflected by the plane mirror to be detected, the second photoelectric detector detects the second light beam focused and reflected by the focusing mirror, and the current third reading of the first photoelectric detector and the current fourth reading of the second photoelectric detector are recorded at the same time; and calculating the diffraction efficiency of the echelle grating to be measured based on the first reading, the second reading, the third reading and the fourth reading.
Optionally, the formula for calculating the diffraction efficiency of the echelle grating to be measured by the data processing unit includes: let I 1 Representing the detection value of the first photoelectric detector when the echelle grating to be detected is arranged on the turntable, I 2 Representing the detection value of the second photoelectric detector when the echelle grating to be detected is arranged on the turntable, I 3 Indicating the detection value of the first photoelectric detector when the turntable is a plane mirror to be detected, I 4 When the turntable is a plane mirror to be measured, the detection value of the second photoelectric detector, η represents the diffraction efficiency of the echelle grating to be measured, and then:
another aspect of the present disclosure also provides an echelle grating diffraction efficiency testing apparatus including: the laser light source module is used for generating a test beam; the testing module comprises a beam splitter, a focusing mirror and a turntable; the beam splitter is a wedge prism with a semi-transparent and semi-reflective film plated on the front surface and a reflective film plated on the rear surface, and is used for splitting the test beam into a first beam and a second beam; the focusing mirror is used for reflecting the first light beam to an echelle grating to be detected or a plane mirror to be detected, which is arranged on the turntable, and diffracting diffraction order diffraction light generated by diffraction of the echelle grating to be detected, or focusing the first light beam reflected by the plane mirror to be detected to the light splitter and then reflecting the first light beam to the first photoelectric detector by the light splitter; the focusing mirror is also used for focusing and reflecting the second light beam to the beam splitter and then to the second photoelectric detector; the detection module comprises the first photoelectric detector, the second photoelectric detector and a data processing unit, wherein the data processing unit is used for calculating diffraction efficiency of the echelle grating to be detected according to detection values of the first photoelectric detector and the second photoelectric detector.
Optionally, the test module has an aplanatic structure, so that optical paths of light detected by the first photodetector and the second photodetector are equal.
Optionally, the laser light source module further includes: an aperture stop for adjusting the laser light to the test beam; the detection module further comprises: the stray light eliminating diaphragm is arranged in front of the first photoelectric detector probe and is used for shielding diffraction light of the grating non-to-be-measured order; and the reference diaphragm is arranged in front of the second photoelectric detector probe.
The above at least one technical scheme adopted in the embodiment of the disclosure can achieve the following beneficial effects:
the device comprises a laser light source, an aperture diaphragm, a spectroscope, a collimating mirror, a turntable, a focusing mirror, a first photoelectric detector, a second photoelectric detector, a data processing unit and the like, wherein the laser light source is incident to the spectroscope after passing through the aperture diaphragm and is divided into a first light beam and a second light beam by the spectroscope, the first light beam is changed into collimated light through the collimating mirror and is incident to an echelle grating to be measured or a plane mirror to be measured, the collimated light beam is reflected back to the collimating mirror and is focused to the first photoelectric detector, the first light beam is used as a measurement result of diffraction luminous flux and reference luminous flux, the second light beam is reflected back to the spectroscope through the focusing mirror and is focused to the second photoelectric detector, and the data processing unit calculates four measurement results of the first photoelectric detector and the second photoelectric detector to obtain relative diffraction efficiency between the echelle grating to be measured and the plane mirror to be measured. The device is in an equal optical path structure, and the optical path is transmitted in uniform nitrogen, so that measurement errors caused in the optical path transmission process are eliminated, and the problem that the measurement errors are caused by light source fluctuation in the process of testing the diffraction efficiency of the echelle grating is solved by switching the echelle grating to be tested with the plane mirror to be tested.
Drawings
For a more complete understanding of the present disclosure and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
fig. 1 schematically illustrates a schematic diagram of an echelle grating diffraction luminous flux to be tested of an echelle grating diffraction efficiency testing apparatus provided in an embodiment of the present disclosure;
fig. 2 schematically illustrates a schematic diagram of a test plane mirror reference luminous flux to be tested of an echelle grating diffraction efficiency test device according to an embodiment of the present disclosure;
FIG. 3 schematically illustrates a schematic diagram of another echelle grating diffraction efficiency testing apparatus provided by an embodiment of the present disclosure;
FIG. 4 schematically illustrates a schematic diagram of a grating light splitting device according to an embodiment of the disclosure;
FIG. 5 schematically illustrates a flow chart of an echelle grating diffraction efficiency test method provided by an embodiment of the present disclosure;
reference numerals illustrate:
the device comprises a 1-laser, a 2-aperture diaphragm, a 3-beam splitter, a 4-collimating mirror, a 501-echelle grating to be measured, a 502-plane mirror to be measured, a 601-air inlet pipe, a 602-air outlet pipe, a 7-turntable, an 8-focusing mirror, a 9-stray light eliminating diaphragm, a 10-reference diaphragm, a 11-first photoelectric detector, a 12-second photoelectric detector and a 13-data processing unit.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and/or the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
Some of the block diagrams and/or flowchart illustrations are shown in the figures. It will be understood that some blocks of the block diagrams and/or flowchart illustrations, or combinations of blocks in the block diagrams and/or flowchart illustrations, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus, such that the instructions, when executed by the processor, create means for implementing the functions/acts specified in the block diagrams and/or flowchart.
Fig. 1 schematically illustrates a schematic diagram of an echelle grating diffraction luminous flux to be tested of an echelle grating diffraction efficiency testing apparatus according to an embodiment of the present disclosure.
As shown in fig. 1, an echelle grating diffraction efficiency testing apparatus provided in an embodiment of the present disclosure includes: the device comprises a laser light source module, a testing module and a detection module.
And the laser light source module is used for generating a test light beam.
The testing module comprises a beam splitter 3, a collimating mirror 4, a focusing mirror 8 and a turntable 7.
Wherein the beam splitter 3 is configured to split the test beam into a first beam and a second beam; the collimating mirror 4 is used for collimating the first light beam, then making the first light beam enter the echelle grating 501 to be measured or the plane mirror 502 to be measured, which are arranged on the turntable 7, and diffracting the diffraction order diffraction light to be measured generated by the echelle grating 501 to be measured, or focusing the first light beam reflected by the plane mirror 502 to be measured to the first photodetector 11; the focusing mirror 8 is used to focus and reflect the second light beam to the beam splitter 3 and then to the second photodetector 12.
The detection module comprises a first photoelectric detector 11, a second photoelectric detector 12 and a data processing unit 13, wherein the data processing unit 13 is used for calculating the diffraction efficiency of the echelle grating 501 to be detected according to detection values of the first photoelectric detector 11 and the second photoelectric detector 12.
In the embodiment of the present disclosure, the test module is of an aplanatic structure, so that optical paths of light detected by the first photodetector 11 and the second photodetector 12 are equal, the test module is disposed in a sealed structure uniformly filled with nitrogen, and the sealed space is provided with an air inlet pipe 601 and an air outlet pipe 602 for conveying uniform nitrogen. The light beams are transmitted in uniform nitrogen and have the same optical path length so as to eliminate measurement errors caused by the transmission process of the optical path, and the problem of measurement errors caused by light source fluctuation in the switching process of the echelle grating 501 to be measured and the plane mirror 502 to be measured in the measurement process can be solved.
Referring to fig. 1, the laser light source module includes: a laser 1 for generating laser light; an aperture stop 2 for adjusting the laser light to a test beam. Wherein, the selection of the aperture diaphragm 2 is determined according to the size of the intermediate ladder grating to be detected, and the field of view range is determined according to the size.
The detection module further includes: the stray light eliminating diaphragm 9 is arranged in front of the probe of the first photoelectric detector 11 and is used for shielding diffraction light of the grating non-to-be-measured order; the reference diaphragm 10 is arranged in front of the probe of the second photodetector 12.
As shown in fig. 1, in one embodiment of the present disclosure, the beam splitter 3 is a planar mirror having a semi-transparent and semi-reflective coating film on a surface. The turntable 7 is provided with a corresponding fixing clamp for fixing the echelle grating 501 to be tested and the plane mirror 502 to be tested and realizing angle state adjustment. After the laser 1 is started, the test beam emitted by the laser 1 passes through the aperture diaphragm 2 to adjust the beam size, and then is split into a first beam and a second beam by the beam splitter 3, wherein the first beam is transmitted to the collimating mirror 4, and the second beam is reflected to the focusing mirror 8. The collimator lens 4 adjusts the collimated first light beam, and makes the first light beam incident on the surface of the echelle grating 501 to be measured at a near littrow angle (within the range of the littrow angle plus or minus 0.5 degrees, but not equal to the littrow angle) according to the parameters of the echelle grating 501 to be measured, wherein the angle is determined by the grating line density, the laser wavelength and the diffraction order of the echelle grating 501 to be measured and is equal to the grating blaze angle. The echelle grating 501 to be measured causes the first beam to produce a diffraction order diffraction beam to be measured. The collimator lens 4 focuses the diffraction order diffraction beam to be measured and then emits the focused diffraction order beam to the first photodetector 11. The reading of the first photodetector 11 is displayed by the data processing module. The focusing mirror 8 focuses and reflects the second light beam back to the beam splitter 3 and again to the second photodetector 12 by the beam splitter 3.
Fig. 2 schematically illustrates a schematic diagram of a test plane mirror 502 to be tested for reference luminous flux of an echelle grating diffraction efficiency testing device according to an embodiment of the present disclosure.
As shown in fig. 2, the plane mirror 502 to be tested is tested by holding the testing device stationary on the basis of the testing device shown in fig. 1. The echelle grating 501 to be measured is detached, the plane mirror 502 to be measured is arranged on the turntable 7, the angle of the plane mirror 502 to be measured is adjusted, the first light beam reflected by the collimating mirror 4 is incident to the plane mirror 502 to be measured and reflected by the plane mirror 502 to be measured, wherein the light path formed by the first light beam after being reflected by the plane mirror 502 to be measured is identical to the light path of the diffraction light beam of the diffraction order to be measured generated by the echelle grating 501 to be measured in fig. 1, and the first light beam is reflected back to the collimating mirror 4, reflected by the collimating mirror 4 and focused on the first photoelectric detector 11. The second light beam has the same optical path as that shown in fig. 1 and is detected by the second photodetector 12.
In the embodiment of the present disclosure, the data processing unit 13 records the data detected by the first photodetector 11 and the second photodetector 12 when the testing device tests the echelle grating 501 to be tested and the plane mirror 502 to be tested, respectively, and according to the data, the data processing unit 13 calculates the diffraction efficiency of the echelle grating 501 to be tested. Wherein the detection values of the first photodetector 11 and the second photodetector 12 represent the intensity values of the light detected by the first photodetector 11 and the second photodetector 12.
The formula of the data processing unit 13 for calculating the diffraction efficiency of the echelle grating 501 to be measured includes:
let I 1 Indicating the detection value of the first photodetector 11, I, when the echelle grating 501 to be detected is on the turntable 7 2 Indicating the detection value of the second photodetector 12 when the echelle grating 501 to be detected is on the turntable 7, I 3 Indicating the detection value of the first photodetector 11, I, when the turntable 7 is the plane mirror 502 to be measured 4 When the turntable 7 is the plane mirror 502 to be measured, the detection value of the second photodetector 12, η represents the diffraction efficiency of the echelle grating 501 to be measured, and then:
the relative diffraction efficiency between the echelle grating 501 to be measured and the plane mirror 502 to be measured, which is calculated according to the formula, can eliminate measurement errors caused by light source fluctuation in the switching process.
It should be noted that the material of the plane mirror 502 to be measured is the same as that of the echelle grating 501 to be measured.
Fig. 3 schematically illustrates a schematic diagram of another echelle grating diffraction efficiency testing apparatus provided by another embodiment of the present disclosure.
As shown in fig. 3, in another embodiment of the present disclosure, an echelle grating diffraction efficiency testing apparatus includes: the device comprises a laser light source module, a testing module and a detection module.
And the laser light source module is used for generating a test light beam.
The testing module comprises a beam splitter 3, a focusing mirror 8 and a turntable 7.
The beam splitter 3 is a wedge prism with a semi-transparent and semi-reflective film coated on the front surface and a reflective film coated on the rear surface, and is used for splitting a test beam into a first beam and a second beam; the focusing mirror 8 is used for reflecting the first light beam to the echelle grating 501 to be measured or the plane mirror 502 to be measured, which are arranged on the turntable 7, and diffracting the diffraction order diffraction light to be measured generated by diffraction of the echelle grating 501 to be measured, or focusing the first light beam reflected by the plane mirror 502 to be measured to the beam splitter 3, and then reflecting the first light beam to the first photoelectric detector 11 by the beam splitter 3; the focusing mirror 3 is also used to focus and reflect the second light beam to the beam splitter 3 and to the second photodetector 12.
The detection module comprises a first photoelectric detector 11, a second photoelectric detector 12 and a data processing unit 13, wherein the data processing unit 13 is used for calculating diffraction efficiency of the echelle grating to be detected according to detection values of the first photoelectric detector 11 and the second photoelectric detector 12.
The test module has an aplanatic structure, so that the optical paths of the light detected by the first photodetector 11 and the second photodetector 12 are equal.
The laser light source module further includes: an aperture stop 2 for adjusting the laser light to a test beam;
the detection module further includes: the stray light eliminating diaphragm 9 is arranged in front of the probe of the first photoelectric detector 11 and is used for shielding diffraction light of the grating non-to-be-measured order; the reference diaphragm 10 is arranged in front of the probe of the second photodetector 12.
The device shown in fig. 3 is the same as the device shown in fig. 1 in most of its components except that the beam splitter 3 is a wedge prism with a semi-transparent semi-reflective film coated on the front surface and a reflective film coated on the rear surface, and the focusing mirror 8 is also used to realize the function of the collimator mirror 4 in fig. 1. Specifically, a part of the test beam is reflected on the front surface of the beam splitter 3 to form a second beam, and the other part is transmitted through the front surface of the beam splitter 3 and then reflected on the rear surface of the beam splitter 3 to form a first beam. The second light beam is reflected to the focusing mirror 8, and is reflected by the focusing mirror 8 back to the front surface of the beam splitter 3, and is reflected by the front surface of the beam splitter 3 to the second photodetector 12. The first light beam is reflected to the focusing mirror 8, then reflected to the echelle grating 501 to be measured by the focusing mirror 8, and generates a diffraction order diffraction light beam to be measured, and the diffraction order diffraction light beam to be measured is focused and reflected to the beam splitter 3 by the focusing mirror 8 and then reflected to the first photodetector 11. Compared with fig. 1, the focusing lens 8 in the testing device can simultaneously realize the function of the collimating lens 4, and the sharing of the light paths can reduce the use of the collimating lens 4 and reduce errors brought by a system. The test apparatus shown in fig. 3 can also be used to test the plane mirror 502 to be tested, similar to the test principle illustrated in fig. 1 and 2.
Fig. 4 schematically illustrates a schematic diagram of a grating light splitting device according to another embodiment of the disclosure.
As shown in fig. 4, in another embodiment of the present disclosure, the beam splitter 3 is a grating beam-splitting device, and according to the beam splitter 3, the first light beam is a first diffraction order light beam generated by the grating beam-splitting device, and the second light beam is a second diffraction order light beam generated by the grating beam-splitting device. The other components of the testing device, except for the beam splitter 3, are unchanged, and the working principle is the same as the device shown in fig. 1-2.
Fig. 5 schematically shows a flowchart of an echelle grating diffraction efficiency test method provided by an embodiment of the present disclosure.
As shown in fig. 5, the embodiment of the present disclosure further provides an echelle grating diffraction efficiency testing method, which is applied to the testing device shown in fig. 1-2, and includes steps S510-S560.
S510, turning on the laser light source module to generate a test beam, wherein the test beam is divided into a first beam and a second beam by the beam splitter 3.
S520, the echelle grating 501 to be measured is arranged on the turntable 7, and the angle of the echelle grating 501 to be measured is adjusted, so that the first light beam enters the echelle grating 501 to be measured at a quasi-littrow angle (more or less than 0.5 degrees) after being focused by the collimating mirror 4.
S530, the first photodetector 11 detects the diffraction light of the diffraction order to be measured, which is generated by the diffraction of the echelle grating 501 to be measured, and the second photodetector 12 detects the second light beam focused and reflected by the focusing mirror 8, and simultaneously records the current first reading of the first photodetector 11 and the second reading of the second photodetector 12.
S540, the echelle grating 501 to be tested is disassembled, the plane mirror 502 to be tested is arranged on the turntable 7, and the angle of the plane mirror 502 to be tested is adjusted, so that the light path of the first light beam is identical with the light path generated by diffraction of the echelle grating 501 to be tested.
S550, the first photodetector 11 detects the first light beam reflected by the plane mirror 502 to be measured, the second photodetector 12 detects the second light beam focused and reflected by the focusing mirror 8, and the current third reading of the first photodetector 11 and the fourth reading of the second photodetector 12 are recorded at the same time.
S560, based on the first reading, the second reading, the third reading and the fourth reading, the diffraction efficiency of the echelle grating 501 to be measured is calculated.
The method is applied to the test device shown in fig. 1 to 2, and the data processing unit 13 calculates the diffraction efficiency of the echelle grating 501 to be tested according to the diffraction efficiency calculation formula based on the data detected by the first photodetector 11 and the second photodetector 12.
Those skilled in the art will appreciate that the features recited in the various embodiments of the disclosure and/or in the claims may be provided in a variety of combinations and/or combinations, even if such combinations or combinations are not explicitly recited in the disclosure. In particular, the features recited in the various embodiments of the present disclosure and/or the claims may be variously combined and/or combined without departing from the spirit and teachings of the present disclosure. All such combinations and/or combinations fall within the scope of the present disclosure.
While the present disclosure has been shown and described with reference to certain exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present disclosure as defined by the appended claims and their equivalents. The scope of the disclosure should, therefore, not be limited to the above-described embodiments, but should be determined not only by the following claims, but also by the equivalents of the following claims.
Claims (9)
1. An echelle grating diffraction efficiency testing device, comprising:
the laser light source module is used for generating a test beam;
the testing module comprises a beam splitter, a collimating mirror, a focusing mirror and a turntable;
the beam splitter is used for splitting the test beam into a first beam and a second beam; the collimating mirror is used for making the first light beam be incident to an echelle grating to be detected or a plane mirror to be detected which is arranged on the turntable after being collimated, and focusing the diffraction light of diffraction orders to be detected generated by diffraction of the echelle grating to be detected or the first light beam reflected by the plane mirror to be detected to the first photoelectric detector; the focusing mirror is used for focusing and reflecting the second light beam to the beam splitter and then to the second photoelectric detector;
the detection module comprises the first photoelectric detector, the second photoelectric detector and a data processing unit, wherein the data processing unit is used for calculating diffraction efficiency of the echelle grating to be detected according to detection values of the first photoelectric detector and the second photoelectric detector;
the test module is of an equal optical path structure, so that the optical paths of light detected by the first photoelectric detector and the second photoelectric detector are equal.
2. The apparatus of claim 1, wherein the laser light source module comprises:
a laser for generating laser light;
and the aperture diaphragm is used for adjusting the laser into the test beam.
3. The device according to claim 1, wherein the beam splitter is a planar mirror with a semi-transparent semi-reflective coating on the surface; or alternatively
The optical splitter is a grating optical splitting device, the first light beam is a first diffraction order light beam generated by the grating optical splitting device, and the second light beam is a second diffraction order light beam generated by the grating optical splitting device.
4. The apparatus of claim 1, wherein the detection module further comprises:
the stray light eliminating diaphragm is arranged in front of the first photoelectric detector probe and is used for shielding diffraction light of the grating non-to-be-measured order;
and the reference diaphragm is arranged in front of the second photoelectric detector probe.
5. An echelle grating diffraction efficiency testing method applied to an echelle grating diffraction efficiency testing apparatus as claimed in any one of claims 1 to 4, comprising:
starting a laser light source module to generate a test light beam, wherein the test light beam is divided into a first light beam and a second light beam by a beam splitter;
setting an echelle grating to be measured on a turntable, and adjusting the angle of the echelle grating to be measured to enable the first light beam to be incident to the echelle grating to be measured at a near littrow angle after being focused by a collimating lens;
enabling a first photoelectric detector to detect diffraction order diffraction light to be detected, which is generated by diffraction of an echelle grating to be detected, enabling a second photoelectric detector to detect the second light beam focused and reflected by a focusing mirror, and simultaneously recording a first reading of the first photoelectric detector and a second reading of the second photoelectric detector at present;
detaching the echelle grating to be tested, arranging the plane mirror to be tested on the turntable, and adjusting the angle of the plane mirror to be tested to enable the light path of the first light beam to be the same as the light path generated by diffraction of the echelle grating to be tested;
the first photoelectric detector detects the first light beam reflected by the plane mirror to be detected, the second photoelectric detector detects the second light beam focused and reflected by the focusing mirror, and the current third reading of the first photoelectric detector and the current fourth reading of the second photoelectric detector are recorded at the same time;
and calculating the diffraction efficiency of the echelle grating to be measured based on the first reading, the second reading, the third reading and the fourth reading.
6. The method of claim 5, wherein the formula for calculating the diffraction efficiency of the echelle grating under test comprises:
let I 1 Representing the detection value of the first photoelectric detector when the echelle grating to be detected is arranged on the turntable; i 2 Representing the detection value of the second photoelectric detector when the echelle grating to be detected is arranged on the turntable; i 3 Representing the detection value of the first photoelectric detector when the turntable is a plane mirror to be detected; i 4 Indicating the detection of the second photoelectric detector when the turntable is a plane mirror to be detectedA value; η represents the diffraction efficiency of the echelle grating to be measured, then:
7. an echelle grating diffraction efficiency testing device, comprising:
the laser light source module is used for generating a test beam;
the testing module comprises a beam splitter, a focusing mirror and a turntable;
the beam splitter is a wedge prism with a semi-transparent and semi-reflective film plated on the front surface and a reflective film plated on the rear surface, and is used for splitting the test beam into a first beam and a second beam; the focusing mirror is used for reflecting the first light beam to an echelle grating to be detected or a plane mirror to be detected, which is arranged on the turntable, and diffracting diffraction order diffraction light generated by diffraction of the echelle grating to be detected, or focusing the first light beam reflected by the plane mirror to be detected to the light splitter and then reflecting the first light beam to the first photoelectric detector by the light splitter; the focusing mirror is also used for focusing and reflecting the second light beam to the beam splitter and then to the second photoelectric detector;
the detection module comprises the first photoelectric detector, the second photoelectric detector and a data processing unit, wherein the data processing unit is used for calculating diffraction efficiency of the echelle grating to be detected according to detection values of the first photoelectric detector and the second photoelectric detector.
8. The apparatus of claim 7, wherein the test module is an aplanatic structure that equalizes optical paths of light detected by the first photodetector and the second photodetector.
9. The apparatus according to claim 7, wherein:
the laser light source module further includes: an aperture stop for adjusting the laser light to the test beam;
the detection module further comprises:
the stray light eliminating diaphragm is arranged in front of the first photoelectric detector probe and is used for shielding diffraction light of the grating non-to-be-measured order;
and the reference diaphragm is arranged in front of the second photoelectric detector probe.
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