CN114613721B - Motion platform and motion device - Google Patents

Motion platform and motion device Download PDF

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Publication number
CN114613721B
CN114613721B CN202210500556.1A CN202210500556A CN114613721B CN 114613721 B CN114613721 B CN 114613721B CN 202210500556 A CN202210500556 A CN 202210500556A CN 114613721 B CN114613721 B CN 114613721B
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Prior art keywords
flexible
sub
motion
seat
slider
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CN114613721A (en
Inventor
吴火亮
江旭初
禹洪亮
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Suzhou Yinguan Semiconductor Technology Co ltd
Shanghai Yinguan Semiconductor Technology Co Ltd
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Suzhou Yinguan Semiconductor Technology Co ltd
Shanghai Yinguan Semiconductor Technology Co Ltd
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Publication of CN114613721A publication Critical patent/CN114613721A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

The invention belongs to the field of integrated circuit preparation, and particularly discloses a motion table and a motion device. The motion platform includes the base, Y is to the guide rail subassembly, X moves the platform, X is to the guide rail subassembly, X is to linear electric motor, Y is to drive arrangement, the mount pad, gas is enough to reach first flexible piece, first flexible piece includes the sufficient connecting portion of gas, seat connecting portion and slider connecting portion, be connected with first flexible portion between the sufficient connecting portion of gas and the seat connecting portion, be connected with second flexible portion between seat connecting portion and the slider connecting portion, second flexible portion has the flexibility in the Z direction, have the rigidity in X direction and Y direction, first flexible portion has the flexibility in the Rz direction, have the rigidity in all the other directions, the sufficient connecting portion of gas is connected with the gas foot, seat connecting portion are connected with the mount pad, the slider connecting portion is connected with X to the slider. The movement device comprises the movement table. The motion table and the motion device disclosed by the invention not only can realize the motion in the X and Y directions, but also allow the small-angle rotation motion in the Rz direction.

Description

Motion platform and motion device
Technical Field
The invention belongs to the technical field of integrated circuit preparation, and particularly relates to a motion table and a motion device.
Background
In the field of semiconductor film thickness detection, the workbench device is required to be capable of completing the handover of silicon wafers with a silicon wafer transmission system, and meanwhile, the workbench device is required to carry 12-inch or 8-inch silicon wafers to complete 360-degree rotation and vertical movement, so that the film thickness detection is completed. For the worktable device applied to film thickness detection, the two-dimensional motion table generally provides X, Y two-direction motions and is a core component in the worktable device, and as the requirement for yield is continuously improved, the detection requirement for film thickness detection precision is continuously improved, which requires the two-dimensional motion table to have higher running speed and higher acceleration, and the requirement for the motion performance of the two-dimensional motion table is also improved.
The existing two-dimensional motion table generally comprises a marble base, an X-direction linear motor, a Y-direction linear motor, an X-direction platform and the like. Two groups of Y-direction linear motors are arranged at intervals along the X direction, stators of the Y-direction linear motors are arranged on the marble base, and the power of the two Y-direction linear motors is respectively connected with two ends of the X-direction platform; the stator of the X-direction linear motor is arranged on the X-direction platform along the X direction, and the rotor is used for being connected with the micro-motion platform. Meanwhile, the X-direction platform realizes motion guide along the Y direction through a mechanical guide rail extending along the Y direction, and the micro-motion platform realizes motion guide along the X direction through a mechanical guide rail extending along the X direction.
The motion guide of an X platform along the Y direction and the motion guide of a micro-motion platform along the X direction are realized by mechanical guide rails in the conventional two-dimensional motion platform, so that the problem of poor plane dynamic performance of the two-dimensional motion platform is caused; meanwhile, the existing two-dimensional motion platform can only realize the motion of the micro-motion platform along the X direction and the Y direction, and is difficult to realize the small-angle rotation in the Rz direction.
Disclosure of Invention
One object of the present invention is to provide a motion stage, which can improve the dynamic characteristics of the motion stage and realize small-angle rotation in Rz direction.
Another object of the present invention is to provide a motion device, so as to improve the dynamic characteristics of the motion device and realize small-angle rotation of the motion device in Rz direction.
In order to realize the purpose, the invention adopts the following technical scheme:
a motion stage, comprising:
a base;
the Y-direction guide rail assemblies are arranged at intervals along the X direction and comprise Y-direction guide rails laid on the base along the Y direction and Y-direction sliding blocks in sliding fit with the Y-direction guide rails;
the X-direction moving table extends along the X direction, and two ends of the X-direction moving table are respectively connected with the two Y-direction sliding blocks;
the X-direction guide rail assemblies are arranged at intervals along the Y direction and comprise X-direction guide rails laid on the X-direction moving table along the X direction and X-direction sliding blocks matched with the X-direction guide rails in a sliding mode;
the X-direction linear motors comprise X-direction stators laid on the X-direction moving table along the X direction and X-direction movers in driving fit with the X-direction stators, and the X-direction linear motors are arranged at intervals along the Y direction;
the Y-direction driving device is arranged on the base and is used for driving the X-direction moving table to move along the Y direction;
each X-direction rotor is connected with the corresponding mounting seat;
the air foot has a first state of being adsorbed on the surface of the base and a second state of being supported on the surface of the base in an air floating mode;
first flexible piece, with the mount pad one-to-one sets up, first flexible piece includes sufficient connecting portion of gas, seat connecting portion and slider connecting portion, sufficient connecting portion of gas with be connected with first flexible portion between the seat connecting portion, seat connecting portion with be connected with the flexible portion of second between the slider connecting portion, the flexible portion of second has the flexibility in the Z direction, has the rigidity in X direction and Y direction, first flexible portion has the flexibility in the Rz direction, has the rigidity in all the other directions, sufficient connecting portion of gas with the gas is sufficient to be connected, seat connecting portion with the mount pad is connected, slider connecting portion with correspond the side X is connected to the slider.
As an optional technical solution of the motion table, the first flexible portion includes:
a first sub flexible portion having rigidity in the Y direction and the Z direction and flexibility in the X direction and the Rz direction, both ends of the first sub flexible portion along the Y direction being connected to the seat connection portion and the air foot connection portion, respectively;
a second sub-flexible portion having rigidity in the X-direction and the Z-direction and flexibility in the Y-direction and the Rz-direction, the second sub-flexible portion connecting the air foot connecting portion and the seat connecting portion at both ends of the X-direction, respectively.
As an optional technical solution of the motion table, the seat connection part and the air foot connection part both extend along the X direction and are arranged at intervals in the Y direction;
the middle part of the seat connecting part along the X direction is connected with the middle part of the air foot connecting part along the X direction through the first sub flexible part, and two ends of the air foot connecting part along the X direction are respectively connected with two corresponding ends of the seat connecting part through the second sub flexible parts;
the air foot connecting part, the seat connecting part and the two second sub-flexible parts are symmetrical relative to the first sub-flexible part.
As an alternative solution to the motion stage, the first sub-flexible portion includes a first leaf perpendicular to the X direction; the second sub flexible portion includes a second leaf perpendicular to the Y direction.
As an optional technical solution of the motion table, the second sub-flexible portion includes two second reeds arranged at intervals along the X direction, one of the second reeds is connected with the air foot connecting portion, and the other second reed is connected with the seat connecting portion;
the second sub-flexible portion further comprises a reed connecting portion connected between the two second reeds along the X direction, and the thickness of the reed connecting portion in the Y direction is larger than that of the second reed in the Y direction.
As an alternative solution of the motion platform, all the second reeds are positioned on the same ZX-direction plane perpendicular to the Y direction.
As an optional technical scheme of the exercise table, a first mounting groove is formed in one side, facing the seat connecting part, of the air foot connecting part, and a first end of the first sub-flexible part is connected with the bottom of the first mounting groove;
and/or a second mounting groove is formed in one side, facing the air foot connecting part, of the seat connecting part, and the second end of the first sub-flexible part is connected with the groove bottom of the second mounting groove.
As an optional technical solution of the exercise table, a side of the seat connecting part facing the air foot connecting part is provided with a first groove, and the air foot connecting part and the first flexible part are at least partially located in the first groove;
and/or one side of the seat connecting part, which is deviated from the air foot connecting part, is provided with a second groove, the second groove and the second flexible part are arranged in a one-to-one correspondence manner, and the second flexible part and the slide block connecting part are at least partially positioned in the second groove.
As an alternative to the motion stage, the first groove includes a main groove portion extending in the X direction and an extension groove portion provided on the main groove portion toward the seat connection portion side, a groove length of the extension groove portion in the X direction is smaller than a groove length of the main groove portion in the X direction, the second sub-flexible portion and the air foot connection portion are located in the main groove portion, and the air foot connection portion at least partially protrudes into the extension groove portion.
As an optional technical solution of the motion stage, two second grooves are provided at intervals along the X direction, and the extending groove portion is located between the two second grooves.
As an optional technical scheme of the motion table, the second flexible parts and the slide block connecting parts are arranged in a one-to-one correspondence manner;
the number of the second flexible parts and the number of the sliding block connecting parts are two, and the two second flexible parts and the two sliding block connecting parts are symmetrically arranged relative to the first sub-flexible part;
or the number of the second flexible parts is three, the second flexible part and the slider connecting parts which are positioned in the middle are symmetrical structures which are opposite to the first sub-flexible parts, and the number of the second flexible parts and the number of the slider connecting parts which are positioned on two sides are respectively opposite to the first sub-flexible parts and are symmetrically arranged.
As an optional technical solution of the motion table, the slider connecting part is in a plate-shaped structure in an XZ direction perpendicular to the Y direction, the second flexible part is a horizontal reed perpendicular to the Z direction, and the thickness of the slider connecting part in the Y direction is greater than that of the horizontal reed;
and/or, the first flexible portion with the material of second flexible portion is spring steel and is the lamellar structure, the thickness of first flexible portion with the second flexible portion is 0.8mm ~1.5 mm.
As an optional technical solution of the motion stage, the motion stage further includes a second flexible member, wherein one end of the X-motion stage is directly connected to the Y-direction slider, and the other end of the X-motion stage is connected to the Y-direction slider through the second flexible member, and the second flexible member has flexibility in the Rz direction and rigidity in the Y direction and the Z direction.
As an optional technical solution of the motion stage, the second flexible portion includes a stage connecting portion, a flexible piece portion and a connecting plate portion which are connected in sequence along the Z direction, the connecting plate portion is perpendicular to the Z direction and connected to the Y-direction slider, the flexible piece portion is perpendicular to the X direction, and the thickness of the flexible piece portion along the X direction is smaller than the connecting plate portion and the thickness of the stage connecting portion, and the stage connecting portion is connected to the X-motion stage.
As an optional technical scheme of the motion table, the X-moving table comprises two longitudinal beam portions and two transverse beam portions, the longitudinal beam portions extend along the Y direction and are arranged at intervals in the X direction, the transverse beam portions are connected between the two longitudinal beam portions and are arranged at intervals in the Y direction, each longitudinal beam portion is connected with the Y-direction sliding block on the corresponding side, each transverse beam portion is provided with the X-direction guide rail assembly and the X-direction linear motor, and the air foot is located between the two transverse beam portions.
A motion device comprises the motion platform and a micropositioner, wherein the micropositioner is arranged on the air foot and can at least realize motion adjustment along the Z direction.
The invention has the beneficial effects that:
according to the motion table provided by the invention, the first flexible part is arranged to be connected with the air foot and the mounting seat, the second flexible part is arranged to be connected with the mounting seat and the X-direction sliding block, the first flexible part has flexibility in the Rz direction and rigidity in the other directions, when two X-direction linear motors are in differential motion, the X-direction sliding blocks on two sides can be allowed to be staggered in the X direction, namely the air foot connected between the two first flexible parts is allowed to deflect in the Rz direction, namely the Rz-direction motion of a structure arranged on the air foot is realized, and the application range of the motion table is enlarged; meanwhile, the arrangement of the first flexible part can also eliminate the problems of motion clamping stagnation and guide rail deformation caused by asynchronous drive of the bilateral X-direction linear motor, is favorable for realizing large acceleration motion in the X direction and improves the dynamic performance of the motion platform; because the second flexible part has flexibility in the Z direction and rigidity in the X direction and the Y direction, the over-constraint problem when the air foot and the X-direction guide rail assembly provide guidance at the same time can be eliminated, the movement smoothness of the mounting seat and the air foot in the X direction is improved, and the service life of the movement table is prolonged.
The motion device provided by the invention can realize the motion of the micro-motion stage in the X direction, the Y direction, the Z direction and the Rz direction by adopting the motion stage and installing the micro-motion stage on the air foot, thereby improving the application range of the motion device and improving the motion characteristics of the motion device.
Drawings
Fig. 1 is a schematic structural diagram of a motion stage according to a first embodiment of the present invention;
FIG. 2 is a front view of a motion stage according to an embodiment of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2 at I;
FIG. 4 is an enlarged view of a portion of FIG. 2 at J;
FIG. 5 is a schematic structural diagram of a second flexible member according to an embodiment of the present invention;
FIG. 6 is a cross-sectional view of a motion stage provided in accordance with one embodiment of the present invention;
FIG. 7 is an enlarged view of a portion of FIG. 6 at K;
FIG. 8 is a schematic view of a first flexible member according to an embodiment of the present invention;
FIG. 9 is a top view of a first flexible member according to one embodiment of the present invention;
FIG. 10 is a schematic view of a gas foot and a base according to an embodiment of the present invention;
fig. 11 is a schematic structural diagram of a sports apparatus according to a second embodiment of the present invention;
fig. 12 is a schematic structural view of a micropositioner according to a second embodiment of the present invention.
The figures are labeled as follows:
100. a motion stage; 200. a micro-motion stage; 201. a micro-motion base; 202. a suction cup; 203. a vertical drive device; 204. a vertical base; 205. a vertical detection assembly;
1. a first flexible member; 11. a first flexible portion; 111. a first sub-flexible portion; 112. a second sub-flexible portion; 1121. a second reed; 1122. a reed connecting part; 12. a second flexible portion; 13. a gas foot connecting part; 131. a first mounting groove; 14. a seat connecting portion; 141. a first groove; 1411. a main slot portion; 1412. an extension groove portion; 142. a second groove; 143. a second mounting groove; 15. a slider connecting portion;
2. a base; 21. installing a groove; 22. a boss portion; 3. a Y-direction guide rail assembly; 31. a Y-direction guide rail; 32. a Y-direction sliding block; 4. an X moving table; 41. a beam section; 411. a bottom beam portion; 412. a divider beam section; 42. a stringer section; 5. an X-direction guide rail assembly; 51. an X-direction guide rail; 52. an X-direction sliding block; 6. a Y-direction linear motor; 61. a Y-direction mover; 62. a Y-direction stator; 7. an X-direction linear motor; 71. an X-direction mover; 72. an X-direction stator; 8. a second flexible member; 81. a stage connecting portion; 82. a flexible sheet portion; 83. a connecting plate portion; 9. a mounting seat; 10. sufficient qi; 101. a gas foot body; 102. an air flotation section; 103. a preload chamber; 20. an adaptor; 30. an X-direction grating detection component; 301. an X-direction grating ruler; 302. an X-direction detection head; 40. a Y-direction grating detection component; 401. y-direction grating ruler; 402. a Y-direction detection head; 50. and (5) a high-pressure air film.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
In the description of the present invention, unless otherwise explicitly specified or limited, the terms "connected," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. "beneath," "under" and "beneath" a first feature includes the first feature being directly beneath and obliquely beneath the second feature, or simply indicating that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to be limiting.
Example one
As shown in fig. 1, the embodiment provides a motion stage 100, which can be applied to the field of integrated circuit manufacturing, such as an exposure stage of a lithography system or a workpiece stage for detecting a semiconductor film thickness, and is configured to drive a substrate, such as a silicon wafer, to move in the X direction and the Y direction, and to realize small-angle rotation in the Rz direction. It should be noted that the motion stage 100 provided in this embodiment may also be applied to other scenes and fields that need to perform X-direction motion and Y-direction motion, which is not limited by this embodiment.
The motion stage 100 is described in detail by taking the coordinate system shown in fig. 1 as an example, wherein the X direction and the Y direction are both horizontally arranged and perpendicular to each other, the Y direction is the large-stroke scanning direction of the motion stage 100, the Z direction is vertically arranged, and the X direction, the Y direction and the Z direction satisfy the right-hand coordinate rule.
As shown in fig. 1, 6 to 8, the motion stage 100 includes: a base 2; two sets of Y-direction guide rail assemblies 3 are arranged at intervals along the X direction, and each Y-direction guide rail assembly 3 comprises a Y-direction guide rail 31 laid on the base 2 along the Y direction and a Y-direction sliding block 32 in sliding fit with the Y-direction guide rail 31; an X-direction moving table 4 extending along the X direction, and two ends of the X direction moving table are respectively connected with the two Y-direction sliding blocks 32; two sets of X-direction guide rail assemblies 5 are arranged at intervals along the Y direction, and each X-direction guide rail assembly 5 comprises an X-direction guide rail 51 laid on the X-direction moving table 4 along the X direction and an X-direction slide block 52 in sliding fit with the X-direction guide rail 51; the X-direction linear motor 7 comprises an X-direction stator 72 laid on the X-direction moving table 4 along the X direction and an X-direction mover 71 in driving fit with the X-direction stator 72, and two X-direction linear motors 7 are arranged at intervals along the Y direction; the Y-direction driving device is arranged on the base 2 and is used for driving the X-direction moving table 4 to move along the Y direction; each X-direction mover 71 is connected with a corresponding mount 9; an air foot 10, wherein the air foot 10 has a first state of being adsorbed on the surface of the base 2 and a second state of being supported on the surface of the base 2 in an air floating manner; first flexible member 1, set up with mount pad 9 one-to-one, first flexible member 1 includes gas foot connecting portion 13, seat connecting portion 14 and slider connecting portion 15, be connected with first flexible portion 11 between gas foot connecting portion 13 and the seat connecting portion 14, be connected with second flexible portion 12 between seat connecting portion 14 and the slider connecting portion 15, second flexible portion 12 has the flexibility in the Z direction, have the rigidity in X direction and Y direction, first flexible portion 11 has the flexibility in the Rz direction, have the rigidity in other directions, gas foot connecting portion 13 is connected with gas foot 10, seat connecting portion 14 is connected with mount pad 9, slider connecting portion 15 is connected to slider 52 with the X that corresponds the side.
In the moving table 100 provided in this embodiment, the Y-direction guide rail assembly 3 is arranged to provide mechanical guide for the X-direction moving table 4 to move in the Y direction, and the Y-direction driving device is matched to realize high-speed and high-acceleration movement of the X-direction moving table 4 in the Y direction; the X-direction guide rail assembly 5 is arranged to realize mechanical guide of the movement of the mounting seat 9 and the air foot 10 along the X direction, the air foot 10 is arranged to realize air floatation guide of the movement of the mounting seat 9 along the X direction, and the two X-direction linear motors 7 are matched to realize high-speed and high-acceleration movement of the X movable table 4 along the X direction, so that the non-uniformity of Z-direction positions of the X movable table 4 and the X-direction guide rail assembly 5 caused by self gravity deformation can be prevented, and the service lives of the X movable table 4 and the X-direction guide rail assembly 5 are prolonged; meanwhile, when the air foot 10 is in the second state, the high-pressure air film 50 between the base 2 and the air foot 10 can homogenize the surface shape error between the air foot 10 and the surface of the base 2, so that the motion table 100 has excellent plane dynamic performance, the subsequent surface shape compensation workload is reduced, and the yield is improved.
Meanwhile, in the moving table 100 provided by the present embodiment, the first flexible portion 11 is provided to connect the air foot 10 and the mounting base 9, and the second flexible portion 12 is provided to connect the mounting base 9 and the X-direction slider 52, since the first flexible portion 11 has flexibility in the Rz direction and rigidity in the other directions, when the two X-direction linear motors 7 are in differential motion, the X-direction sliders 52 on both sides can be allowed to be displaced in the X direction, that is, the air foot 10 connected between the two first flexible members 1 is allowed to deflect in the Rz direction, that is, the Rz-direction movement of the structure mounted on the air foot 10 is realized, and the application range of the moving table 100 is increased; meanwhile, the arrangement of the first flexible part 11 can also eliminate the problems of motion clamping stagnation and guide rail deformation caused by asynchronous drive of the bilateral X-direction linear motor 7, thereby being beneficial to realizing large acceleration motion in the X direction and improving the dynamic performance of the motion platform 100; since the second flexible portion 12 is flexible in the Z direction and rigid in the X direction and the Y direction, the problem of over-constraint when the air foot 10 and the X-guide rail assembly 5 provide guidance at the same time can be eliminated, the smoothness of movement of the mount 9 and the air foot 10 in the X direction can be improved, and the service life of the motion stage 100 can be prolonged.
As shown in fig. 1 to 4, the Y-direction driving device is preferably a Y-direction linear motor 6, two Y-direction linear motors 6 are arranged at intervals along the X-direction, each Y-direction linear motor 6 includes a Y-direction stator 62 laid on the base 2 along the Y-direction and a Y-direction mover 61 in driving engagement with the Y-direction stator 62, and two ends of the X-direction mover 4 are respectively connected to the two Y-direction movers 61.
In the present embodiment, the base 2 is preferably a rectangular block structure, and two sides of the base 2 are parallel to the X direction and the other two sides are parallel to the Y direction, so as to improve the arrangement convenience of the X-guide rail assembly 5 and the Y-guide rail assembly 3. The base 2 is preferably made of marble to increase the rigidity of the base 2 and to enhance the supporting performance of the structures thereon.
In order to reduce the dimension of the motion stage 100 along the Z direction and improve the flattening design of the motion stage 100, it is preferable that the upper surface of the base 2 is provided with a mounting groove 21, the mounting groove 21 penetrates through two opposite sides of the base 2 along the Y direction, the base 2 is provided with boss portions 22 on two sides of the mounting groove 21 in the X direction, the two Y-direction linear motors 6 and the Y-direction rail assemblies 3 are both disposed on the boss portions 22 on the corresponding sides, a portion of the X-direction moving stage 4 and the air foot 10 extend into the mounting groove 21, the X-direction moving stage 4 and the groove bottom surface of the mounting groove 21 are disposed at an interval, and the air foot 10 can be supported on the groove bottom surface in an air floating manner.
Further, a positioning groove is formed in one side, close to the mounting groove 21, of the upper surface of the boss portion 22, the positioning groove penetrates through two opposite sides of the boss portion 22 in the Y direction, and the Y-guide rail 31 is laid at the bottom of the positioning groove, so that the Y-guide rail 31 is lower than the Y-stator 62, interference between the Y-guide rail 31 and the Y-linear motor 6 is reduced, and space layout rationality and regularity of the moving table 100 are improved. Preferably, the positioning groove penetrates through a corresponding side groove wall of the mounting groove 21 to improve the convenience of processing of the base 2.
In order to detect the stroke of the X-motion stage 4 moving in the Y direction, the motion stage 100 further includes two sets of Y-direction displacement detection devices, and the two sets of Y-direction displacement detection devices are provided in one-to-one correspondence with the two Y-direction linear motors 6. Preferably, the Y-direction displacement detecting device comprises a Y-direction grating detecting assembly 40, the Y-direction grating detecting assembly 40 comprises a Y-direction grating scale 401 laid on the base 2 along the Y-direction and a Y-direction detecting head 402 connected to the X-moving table 4, and the Y-direction detecting head 402 is arranged opposite to the Y-direction grating scale 401.
Preferably, the Y-directional grating scale 401 is disposed on a groove wall on one side of the positioning groove to further improve the compactness of the motion table 100 and the layout rationality. In other embodiments, the Y-direction grating scale 401 may also be disposed on the upper surface of the boss portion 22 or at the groove bottom of the positioning groove, or may also be disposed at the corresponding side groove wall of the mounting groove 21.
In order to improve the installation convenience of the Y-direction sliding block 32 and the X-direction moving table 4, avoidance grooves corresponding to the positioning grooves are arranged at two ends of the bottom of the X-direction moving table 4 in the X direction, the avoidance grooves preferably penetrate through two opposite sides of the X-direction moving table 4, the bottom surface of the X-direction moving table 4 and corresponding side surfaces of the X-direction moving table 4 in the Y direction, and the Y-direction sliding block 32 is located in the avoidance grooves and connected with the bottoms of the avoidance grooves. Preferably, the Y-directional grating ruler 401 is disposed on the side wall of the positioning groove, and the Y-directional detection head 402 is disposed on the side of the Y-directional linear motor 6 facing the corresponding side of the Y-directional slider 32, so as to shorten the distance between the Y-directional detection head 402 and the Y-directional grating ruler 401, and further improve the compactness of the structure.
As shown in fig. 2 to 5, in order to further improve the dynamic performance of the motion stage 100, the motion stage 100 further includes a second flexible member 8, one end of the X motion stage 4 in the X direction is directly connected to the Y-direction slider 32, the other end of the X motion stage 4 is connected to the Y-direction slider 32 through the second flexible member 8, and the second flexible member 8 has flexibility in the Rz direction and rigidity in the Y direction and the Z direction. Through setting up second flexible piece 8 for X moves platform 4 and can have the small-angle deflection in the Rz direction, and can solve the Y that X moved platform 4 both ends and move the problem of motion jamming and Y to the deformation of guide rail 31 that the asynchronous motion caused to active cell 61, realizes the high-speed operation that X moved platform 4, improves the motion speed and the acceleration of X moved platform 4 in the Y direction.
Preferably, the second flexure 8 includes a stage connecting portion 81, a flexure strip portion 82, and a connecting plate portion 83 connected in sequence along the Z direction, the connecting plate portion 83 is perpendicular to the Z direction and connected to the Y-direction slider 32, and the flexure strip portion 82 is perpendicular to the X direction. In the X direction, the thickness of the flexible sheet portion 82 is smaller than the thickness of the connecting plate portion 83 and the table connecting portion 81, and the table connecting portion 81 is connected to the X moving table 4. The provision of the second flexible portion 12 can improve the convenience of connection between the second flexible member 8 and the Y-direction slider 32 and the X-direction movable stage 4 on the basis of the Rz flexibility.
In the present embodiment, the connecting plate portion 83 and the stage connecting portion 81 are preferably arranged symmetrically with respect to the ZY-direction plane in which the flexible sheet portion 82 is located, so as to better ensure the rigidity of the second flexible piece 8 in the Z direction and the rigidity in the Y direction. The second flexible member 8 is preferably integrally formed by spring steel, so as to improve the processing convenience of the second flexible member 8. And preferably, the thickness of the flexible sheet part 82 in the X direction is 0.5mm to 2.2mm, and most preferably 0.8mm to 1.5 mm.
As shown in fig. 1 and 2, in order to reduce the overall weight of the motion stage 100, preferably, the X motion stage 4 includes two longitudinal beam portions 42 and two cross beam portions 41, the two longitudinal beam portions 42 extend in the Y direction and are spaced apart in the X direction, the two cross beam portions 41 are connected between the two longitudinal beam portions 42 and are spaced apart in the Y direction, each longitudinal beam portion 42 is connected to the Y-direction slider 32 on the corresponding side, the X-direction rail assembly 5 and the X-direction linear motor 7 are provided on each cross beam portion 41, and the air foot 10 is located between the two cross beam portions 41. With this arrangement, the convenience of mounting the X-direction rail assembly 5 and the X-direction linear motor 7 on the X-direction moving stage 4 can be improved, and the X-direction moving stage 4 can be made to have a hollow structure, so that the overall weight of the X-direction moving stage 4 can be reduced, and the mounting compactness of each part structure can be improved.
In other embodiments, the air foot 10 may be located below the X-stage 4, that is, the air foot 10 may extend along the Y direction to both outer sides of the X-stage 4 in the Y direction, and the first flexible member 1 is disposed on the outer side of the beam portion 41.
As shown in fig. 1, 6 and 7, the cross section of the beam portion 41 is preferably in an inverted "T" shape, and includes a bottom beam portion 411 and a separating beam portion 412 which are vertically connected, the separating beam portion 412 is connected to an upper end surface of the bottom beam portion 411, the X-direction stator 72 is mounted on an upper surface of the bottom beam portion 411 and located outside the separating beam portion 412, and the X-direction rail 51 is connected to an inner side of the separating beam portion 412, thereby enabling the separating beam portion 412 to separate the X-direction stator 72 and the X-direction rail 51, avoiding interference between structures, and improving layout rationality. In another embodiment, the beam portion 41 may not be provided with the partition beam portion 412, and only the X-direction stator 72 and the X-direction rail 51 may be provided on the base beam portion 411 at an interval in the Y direction.
In this embodiment, the X-direction guide rail 51 is preferably mounted on the partition beam portion 412 and is parallel to and spaced from the bottom beam portion 411, so as to improve the convenience of connection between the X-direction slider 52 and the mount 9 and the slider connecting portion 15, and also to reduce the dimensions of the X-direction slider 52 and the X-direction guide rail 51 in the Z direction, simplify the structural arrangement of the mount 9, and improve the structural compactness. In other embodiments, the X-guide rail 51 may be provided directly on the base beam portion 411.
The mounting seat 9 is preferably a horizontally disposed plate-shaped structure, the mounting seat 9 is located above the first flexible member 1, the beam portion 41 and the X-direction slider 52, and the upper surface of the X-direction slider 52 and the lower surface of the mounting seat 9 are spaced apart from each other to avoid interference or over-constraint. The outer end of the mount 9 is connected to the X-direction mover 71, the lower surface of the inner end of the mount 9 is connected to the mount connecting portion 14, and the side of the X-direction slider 52 away from the partition beam portion 412 is connected to the slider connecting portion 15.
In order to detect the displacement of the mounting base 9 along the X direction, the motion stage 100 further includes X-direction displacement detection devices, which are provided in one-to-one correspondence with the mounting base 9. The X-direction detection device is preferably an X-direction grating detection unit 30, the X-direction grating detection unit 30 includes an X-direction grating scale 301 laid on the beam portion 41 along the X-direction and an X-direction detection head 302 connected to the mounting base 9, and the X-direction detection head 302 is disposed opposite to the X-direction grating scale 301.
Preferably, the X-direction grating scale 301 is laid on the upper end surface of the separation beam portion 412 to reduce interference between the structures and improve the layout rationality of each structure on the beam portion 41. In order to facilitate the installation of the X-direction detection head 302, the mounting seat 9 is provided with a mounting opening through towards one end of the X-direction mover 71 along the X-direction, and the X-direction detection head 302 is installed at the mounting opening, so that the X-direction detection head 302 can be prevented from occupying other spaces, and the structural compactness of the motion table 100 is further improved. Preferably, the upper surface of X-direction detection head 302 is lower than the upper surface of mounting base 9, so as to avoid collision of X-direction detection head 302 with other structures above mounting base 9.
As shown in fig. 6 to 9, the first flexible portion 11 includes: a first sub flexible portion 111 having rigidity in the Y direction and the Z direction and flexibility in the X direction and the Rz direction, both ends of the first sub flexible portion 111 in the Y direction respectively connecting the seat connecting portion 14 and the air foot connecting portion 13; and a second sub flexible portion 112, the second sub flexible portion 112 having rigidity in the X direction and the Z direction and flexibility in the Y direction and the Rz direction, both ends of the second sub flexible portion 112 in the X direction being connected to the air foot connecting portion 13 and the seat connecting portion 14, respectively.
The first sub-flexible part 111 has rigidity in the Y direction and the Z direction and connects the seat connecting part 14 and the air foot connecting part 13 along the Y direction, so that the X moving table 4 can not deform when driving the air foot 10 to move in the Y direction, and has better speed and acceleration; and because the second sub-flexible portion 112 has rigidity in the X direction and the Z direction and connects the seat connecting portion 14 and the air foot connecting portion 13 in the Y direction, the air foot 10 does not deform when moving in the X direction, and has better speed and acceleration. In addition, since the first sub flexible portion 111 and the second sub flexible portion 112 have flexibility in the Rz direction, the air foot 10 can generate deflection around the Z direction with respect to the mount 9 while maintaining good speed and acceleration in the X direction and the Y direction. The arrangement has the advantages that the displacement difference generated by the X-direction linear motors 7 on the two sides can be manually controlled so as to adjust the posture of the air foot 10 around the Z direction, and the problem of movement clamping stagnation of the mounting seat 9 caused by incomplete synchronization of the movement of the air foot 10 and the movement of the mounting seat 9 in the X direction can be solved.
In this embodiment, the seat connecting portion 14 and the air foot connecting portion 13 extend along the X direction and are disposed at intervals in the Y direction, the middle portion of the seat connecting portion 14 along the X direction is connected to the middle portion of the air foot connecting portion 13 along the X direction through the first sub-flexible portion 111, and two ends of the air foot connecting portion 13 along the X direction are connected to two corresponding ends of the seat connecting portion 14 through the second sub-flexible portions 112 respectively. The structural arrangement of the first flexible part 1 can enhance the flexibility of the first flexible part 1 in the Rz direction, and can avoid the air foot connecting part 13 from swinging along the Y direction or the X direction in the process that the X moving table 4 moves along the Y direction or the X direction, so that the movement resistance and the movement noise of the X moving table 4 in the movement along the Y direction and the X direction are reduced, and the movement characteristics of the moving table 100 are improved; meanwhile, the arrangement can increase the connection area of the first flexible part 1, the air foot 10, the mounting seat 9 and the X-direction sliding block 52, and improve the connection stability.
In other embodiments, the first flexible portion 11 may have other structures as long as it has flexibility in the Rz direction and rigidity in the other directions.
Preferably, the gas foot connection portion 13, the seat connection portion 14, and the two second sub-flexible portions 112 are all symmetrical with respect to the first sub-flexible portion 111. This kind of setting can guarantee that sufficient connecting portion 13 of gas, seat connecting portion 14 and the sub-flexible portion 112 of second all use first sub-flexible portion 111 as rotation center, guarantees that the rotation center of sufficient connecting portion 13 of gas and seat connecting portion 14 when rotating is fixed, can not take place to deflect to be favorable to the angle that accurate calculation gas is sufficient 10 to deflect in the Rz direction, thereby be favorable to realizing the accurate control to gas is sufficient 10 at Rz direction deflection angle
To simplify the processing of the first sub flexible portion 111, the first sub flexible portion 111 preferably includes a first spring perpendicular to the X direction, and both ends of the first spring are perpendicularly connected to the seat connection portion 14 and the air foot connection portion 13, respectively. The first reed is preferably made of spring steel, and the thickness of the first reed is preferably 0.5 mm-2.2 mm, and most preferably 0.8 mm-1.5 mm.
The second sub flexible portion 112 preferably includes two second springs 1121 arranged at intervals in the X direction, wherein one of the second springs 1121 is connected to the air foot connecting portion 13, and the other second spring 1121 is connected to the seat connecting portion 14; the second sub flexible portion 112 further includes a spring connecting portion 1122 connected between the two second springs 1121 in the X direction, and the thickness of the spring connecting portion 1122 in the Y direction is larger than the thickness of the second springs 1121 in the Y direction. This kind of structure setting of sub-flexible portion 112 of second can improve the rigidity of sub-flexible portion 112 in X direction and Z direction, and can be on the unchangeable basis of the length of keeping gas foot connecting portion 13 in X direction, increase the length of seat connecting portion 14, thereby make things convenient for slider connecting portion 15 and gas foot connecting portion 13 to set up on seat connecting portion 14, in addition, every sub-flexible portion 112 of second all includes two second reeds 1121, make the holistic wobbling range of first flexible 1 bigger, more be favorable to around the adjustment of Z direction rotation angle. In other embodiments, the second sub-flexible portion 112 may also include only the second reed 1121.
Preferably, all the second spring pieces 1121 have the same thickness in the Y direction and the same length in the X direction, that is, all the second spring pieces 1121 have the same structure, and all the second spring pieces 1121 are located on the same ZX plane. This kind of setting is favorable to guaranteeing that the setting of second reed 1121 is symmetrical relative to first sub-flexible portion 111 to guarantee seat connecting portion 14 and air foot connecting portion 13 better to rotate with first sub-flexible portion 111 as the center of rotation, avoid eccentric rotation, be favorable to realizing accurate control and the location around Z direction rotation angle to motion platform 100. More preferably, the spring connecting portion 1122 is symmetrical with respect to the ZX-direction middle longitudinal plane of the second spring 1121.
The second spring piece 1121 is preferably made of spring steel, and the thickness of the second spring piece 1121 in the Y direction is preferably 0.5mm to 2mm, and most preferably 0.8mm to 1.5 mm. The thickness of the spring connecting part 1122 is preferably larger than twice the thickness of the second spring 1121, and the length of the spring connecting part 1122 in the X direction is preferably larger than the length of the second spring 1121 in the X direction.
To reduce the dimension of the first flexure 1 in the Y direction, the seat connecting portion 14 preferably has a first recess 141 on the side facing the air foot connecting portion 13, and the air foot connecting portion 13 and the first flexure 11 are at least partially located in the first recess 141. Further, the first groove 141 includes a main groove portion 1411 extending in the X direction and an extension groove portion 1412 provided on the main groove portion 1411 on a side toward the seat connection portion 14, a groove length of the extension groove portion 1412 in the X direction is smaller than a groove length of the main groove portion 1411 in the X direction, the second sub flexible portion 112 and the gas foot connection portion 13 are located in the main groove portion 1411, and the gas foot connection portion 13 at least partially protrudes into the extension groove portion 1412. The arrangement of the extension groove portion 1412 and the main groove portion 1411 can ensure that the thickness of the air foot connecting portion 13 in the Y direction is greater than that of the second sub flexible portion 112 in the Y direction, while achieving complete accommodation of the air foot connecting portion 13 and the second sub flexible portion 112 in the first groove 141, and reducing the groove depth of the main groove portion 1411, thereby further reducing the overall size of the first sub flexible portion 111 in the Y direction.
Further, the side surfaces of the air foot connecting portion 13 and the second sub-flexible portion 112 away from the slider connecting portion 15 are flush with the side surfaces of the seat connecting portion 14 away from the slider connecting portion 15, so as to improve the structural beauty of the first flexible member 1 and reduce the size of the first flexible member 1 in the Y direction.
The seat connecting portion 14 preferably has a second groove 142 on a side away from the air foot connecting portion 13, the second groove 142 is disposed in one-to-one correspondence with the second flexible portion 12, and the second flexible portion 12 and the slider connecting portion 15 are at least partially disposed in the second groove 142. The second groove 142 is beneficial to avoiding the slider connecting portion 15 from protruding out of the seat connecting portion 14 along the Y direction to be too large in size, further reducing the size of the first flexible member 1 in the Y direction, and improving the rigidity of the first flexible member 1 in the Y direction.
The second grooves 142 are preferably provided at intervals in the X direction, and the extension groove portion 1412 is located between the two second grooves 142. With such an arrangement, the projection portions of the second groove 142 and the extension groove portion 1412 on the YZ plane are overlapped, so that the spatial layout of the second groove 142 and the first groove 141 is more facilitated, and the size of the first flexible element 1 in the Y direction is further reduced. More preferably, the second grooves 142 extend through opposite sides of the seat attachment portion 14 in the Z-direction and corresponding sides of the seat attachment portion 14 in the X-direction to facilitate reducing the weight of the seat attachment portion 14.
Preferably, the seat connecting portion 14 includes a main connecting portion, the main connecting portion is a U-shaped structure with an opening facing the air foot connecting portion 13, a bottom of the U-shaped structure extends along the X-direction, each side portion of the U-shaped structure is vertically connected with an extending arm portion extending along the X-direction, one end of the extending arm portion away from the main connecting portion is vertically connected with a side connecting portion, and the main connecting portion, the two side connecting portions and the two extending arm portions are symmetrical with respect to the first sub-flexible portion 111. The U-shaped groove of the U-shaped structure forms an extension groove portion 1412, a main groove portion 1411 is formed between the two side connecting portions and the two extension arm portions, and a second groove 142 is formed by surrounding the main connecting portion and one surface of the extension arm portion, which faces away from the air foot connecting portion 13 and the second sub-flexible portion 112. One end of the second sub flexible portion 112 away from the air foot connecting portion 13 is connected perpendicularly to the side connecting portion of the corresponding side, one end of the first sub flexible portion 111 toward the seat connecting portion 14 is connected to the middle portion of the main connecting portion, and the second flexible portion 12 is connected to the extension arm portion. The seat connecting portion 14 is advantageous in forming the second concave groove 142, the extension groove portion 1412 and the main groove portion 1411, and is easy and convenient to process.
In order to further reduce the gap between the air foot connecting portion 13 and the seat connecting portion 14 in the Y direction, preferably, a first mounting groove 131 is opened on one side of the air foot connecting portion 13 facing the seat connecting portion 14, and a first end of the first sub flexible portion 111 is connected to the groove bottom of the first mounting groove 131; and/or a second mounting groove 143 is formed in one side of the seat connecting portion 14 facing the gas foot connecting portion 13, and a second end of the first sub-flexible portion 111 is connected with the bottom of the second mounting groove 143. The first and second mounting grooves 131 and 143 may receive corresponding ends of the first sub-flexible portion 111, so that a gap between the air foot connecting portion 13 and the seat connecting portion 14 in the Y direction may be reduced while ensuring a length of the first sub-flexible portion 111 in the Y direction, thereby reducing an overall size of the first flexible member 1 in the Y direction and improving compactness.
The second flexible portions 12 and the slider connecting portions 15 are disposed in a one-to-one correspondence manner, in this embodiment, the second flexible portions 12 and the slider connecting portions 15 are disposed in two, and the two second flexible portions 12 and the two slider connecting portions 15 are disposed symmetrically with respect to the first sub-flexible portion 111. Thereby avoiding eccentric rotation and being more beneficial to realizing the angle positioning and the angle control of the rotation around the Z direction.
In other embodiments, three second flexible portions 12 may be provided, the second flexible portion 12 and the slider connecting portion 15 located in the middle are both symmetrical structures symmetrical with respect to the first sub-flexible portion 111, and the two second flexible portions 12 and the two slider connecting portions 15 located at the two sides are respectively symmetrically provided with respect to the first sub-flexible portion 111.
In other embodiments, the second flexible portions 12 and the slider connecting portions 15 may not be in a one-to-one correspondence, for example, one slider connecting portion 15 with a sufficient length may connect two or three second flexible portions 12 in the X direction.
Preferably, the second flexible portion 12 is a horizontal spring perpendicular to the Z direction, the slider connecting portion 15 has a ZX-direction plate-like structure perpendicular to the Y direction, and the thickness of the slider connecting portion 15 in the Y direction is greater than that of the horizontal spring. This kind of structural arrangement can simplify the overall structure of first flexible piece 1, and is favorable to improving slider connecting portion 15 and X to the convenience of being connected of slider 52. More preferably, the slider connection 15 is arranged symmetrically with respect to the XY plane in which the horizontal spring lies, to better ensure the deflection of the slider connection 15 around the second flexible part 12.
The second flexible portion 12 is preferably located entirely within the second recess 142 to reduce the height of the slider connection portion 15 protruding above the surface of the seat connection portion 14, reducing the overall dimension of the first flexible member 1 in the Y-direction. The surface of the slider connecting portion 15 away from the second flexible portion 12 protrudes the seat connecting portion 14 away from the surface of the air foot connecting portion 13 to improve the convenience of connecting the slider connecting portion 15 with the X-direction slider 52. The height of the slider connecting portion 15 protruding from the surface of the seat connecting portion 14 is preferably more than 0 and less than 1 mm.
The second flexible portion 12 is preferably made of spring steel, and the thickness of the second flexible portion 12 is preferably 0.5mm ~2mm, and more preferably 0.8mm ~1.5 mm. Preferably, the length of the slider connecting portion 15 in the Z direction is equal to the height of the X-direction slider 52 in the Z direction, so as to increase the connecting area of the slider connecting portion 15 and the X-direction slider 52 and improve the convenience of connection.
It is understood that the thicknesses of the first spring piece, the second spring piece 1121, and the second flexible portion 12 can be adaptively selected according to the selected materials, and the invention is not particularly limited thereto.
In order to reduce the overall dimension of the first flexible member 1 in the Z direction, an adapter 20 is connected between the first flexible member 1 and the air foot 10, the upper surface of the adapter 20 is connected with the lower end of the air foot connecting part 13, and the lower surface of the adapter 20 is connected with the upper surface of the air foot 10. The adaptor 20 is preferably an elongated block-shaped structure extending in the X direction, and both ends of the adaptor 20 in the X direction are preferably approximately flush with both ends of the first flexible member 1 in the X direction, so as to increase the connection area of the adaptor 20 with the air foot connection portion 13 and the air foot 10. Further, a side of the adapter 20 facing the cross beam 41 is preferably flush with a side of the air foot 10 facing the cross beam 41 to better achieve the connection positioning of the air foot 10 and the adapter 20.
In the present embodiment, the projection of the gas foot 10 on the XY plane is a rectangle, and the center of the gas foot 10 and the centers of the two first sub-flexible portions 111 on both sides are located on the same YZ plane. When the center of the air foot 10 and the first reeds on the two sides are located on the same YZ plane, the rotation radian of the air foot 10 can be calculated by the following formula:
rad=∆d/L
wherein, d is the displacement difference of the two X-directional movers 71, L is the distance between the two X-directional movers 71, and rad is the rotation radian of the foot 10.
As shown in fig. 10, a preload cavity 103 is formed in the lower surface of the air foot 10, the air foot 10 includes an air foot body 101 located at the upper portion of the preload cavity 103 and an air floating portion 102 enclosed around the preload cavity 103, an air floating hole is formed in the bottom surface of the air floating portion 102, the air foot body 101 is provided with an air floating airway communicated with the air floating hole, an air inlet of the air floating airway is communicated with an air source assembly, the air source assembly is used for filling positive pressure air into the air floating airway, so that the positive pressure air is filled between the air foot 10 and the base 2 through the air floating hole, a high pressure air film 50 is formed between the air foot 10 and the base 2, the air foot 10 is supported on the base 2 in an air floating manner, and the air foot 10 can be in the second state.
The preloading cavity 103 is used for forming preloading force of the air foot 10 adsorbed on the base 2 so as to realize preloading between the air foot 10 and the base 2, thereby ensuring that the air foot 10 can be adsorbed on the base 2 so as to enable the air foot 10 to be in a first state when the mounting seat 9 does not need to move, ensuring the bidirectional rigidity of the air foot 10, and keeping the position stability of the mounting seat 9 relative to the base 2.
In this embodiment, the preload chamber 103 is fixed to the base 2 by vacuum preload, and the preload force is a vacuum preload force. Specifically, evacuation holes have been seted up to preloading chamber 103's cavity, be provided with the vacuum air flue with evacuation hole intercommunication on the gas foot 10 body, vacuum air flue and air supply subassembly intercommunication, carry out the evacuation through vacuum pump or other evacuating device to preloading chamber 103, realize the preloading of gas foot 10 on base 2.
In other embodiments, the preload force may also be a magnetically attractive preload force. Specifically, a magnetic element, such as a magnet, is disposed in the preload cavity 103, and the base 2 is made of a magnetic material, or a magnetic element is attached to a position of the base 2 corresponding to the preload cavity 103, so that the magnetic attraction between the magnetic element and the magnetic element is achieved, and the preload between the air foot 10 and the base 2 is achieved.
Example two
As shown in fig. 11 and 12, an embodiment of the present invention provides a motion device, which includes a micropositioner 200 and a motion stage 100 according to the first embodiment, wherein the micropositioner 200 is mounted on the upper surface of an air foot 10, so that the motion of the micropositioner 200 in the X direction and the Y direction is realized by the motion of the air foot 10 in the X direction and the Y direction, and at the same time, the rotation of the micropositioner 200 in the Z direction can be realized because the air foot 10 can rotate around the Z direction.
The micropositioner 200 comprises a sucker 202, a micropositioner base 201, a vertical base 204, a vertical driving device 203, a vertical detection assembly 205 and a rotary driving device, wherein the micropositioner base 201 is arranged on the upper surface of the gas foot 10 and is fixed relative to the gas foot 10, and the installation mode can be threaded connection or other detachable connection modes; the vertical base 204 can be slidably mounted on the micro-motion base 201 along the Z direction, and the vertical driving device 203 is used for driving the vertical base 204 to move along the Z direction; the suction cup 202 is mounted on the vertical base 204, the suction cup 202 is a disc-shaped structure, and the rotation driving device is used for driving the suction cup 202 to move around the Z direction relative to the vertical base 204, and the rotation axis of the suction cup 202 passes through the center thereof. That is, the micropositioner 200 itself can achieve vertical elevation in the Z direction and precision motion in the Rz direction. The structure of the micro-motion stage 200 can be referred to in the prior art, and is not described in detail here.
In this embodiment, the motion stage 100 can drive the micro stage 200 to perform a coarse adjustment around the Z direction, and the rotation driving device of the micro stage 200 drives the suction cup 202 to perform a fine adjustment around the Z direction. Preferably, the centerline of the suction cup 202 coincides with the centerline of the air foot 10.
The motion device provided by the embodiment can realize large-stroke motion of the micropositioner 200 in the X direction, the Y direction and the Rz direction, and can also realize precise motion in the Z direction and the Rz direction.
Further, in the present embodiment, the micro-motion stage 200 includes a plurality of sets of vertical driving devices 203, and the plurality of sets of vertical driving devices 203 are uniformly spaced along the circumferential direction of the suction cup 202. With the arrangement, when the plurality of groups of vertical driving devices 203 are in differential motion, the micro-motion platform 200 can deflect around the X direction and around the Y direction, so that the motion device can also realize the precision motion and precision positioning in the Rx direction and the Ry direction.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in some detail by the above embodiments, the invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the invention, and the scope of the invention is determined by the scope of the appended claims.

Claims (16)

1. A motion stage, comprising:
a base (2);
the Y-direction guide rail assemblies (3) are arranged at intervals in the X direction, and each Y-direction guide rail assembly (3) comprises a Y-direction guide rail (31) laid on the base (2) in the Y direction and a Y-direction sliding block (32) in sliding fit with the Y-direction guide rail (31);
the X-direction moving table (4) extends along the X direction, and two ends of the X-direction moving table are respectively connected with the two Y-direction sliding blocks (32);
the X-direction guide rail assemblies (5) are arranged at intervals along the Y direction, and each X-direction guide rail assembly (5) comprises an X-direction guide rail (51) laid on the X-direction moving table (4) along the X direction and an X-direction sliding block (52) in sliding fit with the X-direction guide rail (51);
the X-direction linear motors (7) comprise X-direction stators (72) laid on the X-direction moving table (4) along the X direction and X-direction movers (71) in driving fit with the X-direction stators (72), and two X-direction linear motors (7) are arranged at intervals along the Y direction;
the Y-direction driving device is arranged on the base (2) and is used for driving the X-direction moving table (4) to move along the Y direction;
each X-direction rotor (71) is connected with the corresponding mounting seat (9);
an air foot (10), wherein the air foot (10) has a first state of being adsorbed on the surface of the base (2) and a second state of being supported on the surface of the base (2) in an air floating mode;
the first flexible parts (1) are arranged in one-to-one correspondence with the mounting seats (9), each first flexible part (1) comprises an air foot connecting part (13), a seat connecting part (14) and a sliding block connecting part (15), a first flexible part (11) is connected between the air foot connecting part (13) and the seat connecting part (14), a second flexible part (12) is connected between the seat connecting part (14) and the slider connecting part (15), the second flexible part (12) has flexibility in the Z direction, has rigidity in the X-direction and the Y-direction, and the first flexible section (11) has flexibility in the Rz-direction, rigid in the other directions, the air foot connecting part (13) is connected with the air foot (10), the seat connecting part (14) is connected with the mounting seat (9), and the sliding block connecting part (15) is connected with the X-direction sliding block (52) on the corresponding side.
2. Motion table according to claim 1, characterized in that the first flexible portion (11) comprises:
a first sub flexible portion (111) having rigidity in the Y direction and the Z direction and flexibility in the X direction and the Rz direction, both ends of the first sub flexible portion (111) in the Y direction connecting the seat connection portion (14) and the air foot connection portion (13), respectively;
a second sub-flexible portion (112), the second sub-flexible portion (112) having rigidity in the X-direction and the Z-direction and flexibility in the Y-direction and the Rz-direction, the second sub-flexible portion (112) connecting the air foot connecting portion (13) and the seat connecting portion (14) at both ends in the X-direction, respectively.
3. Motion table according to claim 2, wherein the seat connection (14) and the air foot connection (13) each extend in the X-direction and are arranged at intervals in the Y-direction;
the middle part of the seat connecting part (14) along the X direction is connected with the middle part of the air foot connecting part (13) along the X direction through the first sub-flexible part (111), and two ends of the air foot connecting part (13) along the X direction are respectively connected with two corresponding ends of the seat connecting part (14) through the second sub-flexible parts (112);
the air foot connection portion (13), the seat connection portion (14) and the two second sub-flexible portions (112) are all symmetrical with respect to the first sub-flexible portion (111).
4. Motion table according to claim 3, wherein the first sub-flexible part (111) comprises a first leaf perpendicular to the X-direction; the second sub flexible portion (112) includes a second reed (1121) perpendicular to the Y direction.
5. The motion table according to claim 4, wherein the second sub-flexible portion (112) comprises two second springs (1121) spaced apart along the X-direction, one of the second springs (1121) being connected to the gas foot connecting portion (13), and the other second spring (1121) being connected to the seat connecting portion (14);
the second sub flexible portion (112) further includes a reed connection portion (1122) connected between the two second reeds (1121) in the X direction, and a thickness of the reed connection portion (1122) in the Y direction is larger than a thickness of the second reed (1121) in the Y direction.
6. Motion table according to claim 5, characterised in that all the second reeds (1121) are located on the same ZX-direction plane perpendicular to the Y-direction.
7. Motion table according to any of claims 2-6, characterized in that the air foot connection part (13) has a first mounting groove (131) cut on the side facing the seat connection part (14), the first end of the first sub-flexible part (111) being connected to the bottom of the first mounting groove (131);
and/or a second mounting groove (143) is formed in one side, facing the air foot connecting part (13), of the seat connecting part (14), and the second end of the first sub-flexible part (111) is connected with the bottom of the second mounting groove (143).
8. Motion table according to any one of claims 2-6, characterized in that the seat connection (14) has a first recess (141) on the side facing the gas foot connection (13), the gas foot connection (13) and the first flexible part (11) being at least partially located in the first recess (141);
and/or one side of the seat connecting part (14) departing from the air foot connecting part (13) is provided with a second groove (142), the second grooves (142) and the second flexible parts (12) are arranged in a one-to-one correspondence manner, and the second flexible parts (12) and the slider connecting part (15) are at least partially positioned in the second grooves (142).
9. The motion table of claim 8, wherein the first groove (141) includes a main groove portion (1411) extending in the X direction and an extension groove portion (1412) provided on the main groove portion (1411) toward the seat connection portion (14) side, a groove length of the extension groove portion (1412) in the X direction is smaller than a groove length of the main groove portion (1411) in the X direction, the second sub-flexible portion (112) and the air foot connection portion (13) are located in the main groove portion (1411), and the air foot connection portion (13) at least partially protrudes into the extension groove portion (1412).
10. The motion table of claim 9, wherein the second grooves (142) are spaced apart in the X-direction by two, and the extension groove portion (1412) is located between the two second grooves (142).
11. Motion table according to any one of claims 2 to 6, characterised in that the second flexible portions (12) are arranged in a one-to-one correspondence with the slider connections (15);
the number of the second flexible portions (12) and the number of the slider connecting portions (15) are two, and the two second flexible portions (12) and the two slider connecting portions (15) are symmetrically arranged relative to the first sub-flexible portion (111); or the number of the second flexible parts (12) is three, the second flexible parts (12) and the slider connecting parts (15) which are positioned in the middle are symmetrical structures which are symmetrical relative to the first sub-flexible parts (111), and the number of the second flexible parts (12) and the number of the slider connecting parts (15) which are positioned on two sides are respectively symmetrical relative to the first sub-flexible parts (111).
12. Motion table according to any one of claims 1 to 6, characterized in that the slider connection (15) is of a plate-like structure in the XZ direction perpendicular to the Y direction, the second flexible portion (12) is a horizontal leaf perpendicular to the Z direction, the thickness of the slider connection (15) in the Y direction being greater than the thickness of the horizontal leaf;
and/or the first flexible part (11) and the second flexible part (12) are made of spring steel and are of sheet-like structures, and the thickness of the first flexible part (11) and the second flexible part (12) is 0.8-1.5 mm.
13. The motion table according to any one of claims 1 to 6, further comprising a second flexible member (8), wherein one end of the X-motion table (4) is directly connected to the Y-direction slider (32), the other end of the X-motion table (4) is connected to the Y-direction slider (32) through the second flexible member (8), and the second flexible member (8) has flexibility in the Rz direction and rigidity in the Y direction and the Z direction.
14. The motion table according to claim 13, wherein the second flexible member (8) comprises a table connecting portion (81), a flexible sheet portion (82) and a connecting plate portion (83) connected in sequence along the Z direction, the connecting plate portion (83) is perpendicular to the Z direction and connected to the Y-direction slider (32), the flexible sheet portion (82) is perpendicular to the X direction, the thickness of the flexible sheet portion (82) along the X direction is smaller than the thickness of the connecting plate portion (83) and the table connecting portion (81), and the table connecting portion (81) is connected to the X moving table (4).
15. Motion table according to any one of claims 1 to 6, characterized in that the X-motion table (4) comprises two beams (42) and two beams (41), the beams (42) extending along the Y-direction and being spaced apart in the X-direction, the beams (41) being connected between the two beams (42) and being spaced apart in the Y-direction, each beam (42) being connected to the Y-direction slider (32) on the corresponding side, the X-direction rail assembly (5) and the X-direction linear motor (7) being arranged on each beam (41), and the air foot (10) being located between the two beams (41).
16. A movement device, characterized in that it comprises a movement table according to any of claims 1-15, and a micropositioner, which is arranged on the gas foot (10), said micropositioner being able to perform at least a movement adjustment in the Z direction.
CN202210500556.1A 2022-05-10 2022-05-10 Motion platform and motion device Active CN114613721B (en)

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