CN112659074A

CN112659074A - Multi-axis positioning device

Info

Publication number: CN112659074A
Application number: CN202011524490.7A
Authority: CN
Inventors: 吴火亮; 江旭初; 袁嘉欣; 陈啸虎
Original assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Current assignee: Shanghai Yinguan Semiconductor Technology Co Ltd
Priority date: 2020-12-22
Filing date: 2020-12-22
Publication date: 2021-04-16

Abstract

The invention discloses a multi-axis positioning device. In the present invention, the multi-axis positioning device includes: a rotating table assembly; the supporting base is positioned below the rotating table assembly; the plurality of vertical driving devices are sequentially arranged on the supporting base at intervals along the circumferential direction of the rotating table component; each vertical driving device is used for driving the rotating platform assembly to move vertically; the floating gravity compensation devices are arranged between the rotating platform assembly and the supporting base and are used for performing gravity compensation on the rotating platform assembly; and the guide device is provided with a flexible piece, is arranged between the rotating platform assembly and the supporting base and is connected with the rotating platform assembly and the supporting base. Compared with the prior art, the multi-axis positioning device has the advantages of simple structure, less size chains and convenience in assembly.

Description

Multi-axis positioning device

Technical Field

The embodiment of the invention relates to the technical field of integrated circuit equipment manufacturing, in particular to a multi-axis positioning device.

Background

In recent years, with the increasing integration of large-scale integrated circuit devices, the precision requirement of the workpiece stage is increasing, especially the positioning precision of the vertical module, for example, in the fields of lithography equipment, film thickness detection equipment, and the like. In the semiconductor wafer detection, due to the fact that the conventional vertical module has the runout of Rx, Ry and Z, the wafer to be detected has corresponding runout.

In chinese patent CN1839348A and US2005012920a1, a multi-axis positioning mechanism solution is proposed. The positioning device is driven by three groups of voice coil motors with 120 degrees, and meanwhile, the springs and the air bearings are used for guiding, and the springs compensate the gravity of the moving mass, so that the vertical positioning is realized. The invention adopts the spring to carry out gravity compensation, the compression amount and the force of the spring are in direct proportion, and the power of the vertical driving motor can be increased along with the increasing compression amount of the spring, so that the heating of the motor is increased, and the vertical performance of the table is reduced.

In chinese patent CN201287328Y, the basic principle of the present invention is that three sets of 120 ° distributed driving systems are composed of a motor and a cam mechanism, the motor drives a roller to rotate, the roller drives the cam to rotate by friction, and the roller is guided by a reed, so as to drive the workbench to move vertically. The cam mechanism has the problems of complex structure, multiple middle-size chains and the like, and meanwhile, the vertical driving motor needs to bear the gravity of all driving parts, so that the motor generates heat seriously, and the vertical performance is reduced. And the cam mechanism drives the cam to rotate through the friction of the roller so as to realize vertical movement, and the mechanical abrasion and the generation of particle dust are difficult to avoid.

Therefore, a new multi-axis positioning device is needed at the present stage, and the problems of complex structure, multiple size chains, difficulty in assembly and the like of the traditional positioning device can be solved.

Disclosure of Invention

The embodiment of the invention aims to provide a multi-axis positioning device which is simple in structure, less in size chain and convenient to assemble.

To solve the above technical problem, an embodiment of the present invention provides a multi-axis positioning device, including:

a rotating table assembly;

a support base located below the rotating base;

the plurality of vertical driving devices are sequentially arranged on the supporting base at intervals along the circumferential direction of the rotating table assembly; each vertical driving device is used for driving the rotating platform assembly to move vertically;

at least one floating gravity compensation device, each floating gravity compensation device being disposed between the turntable assembly and the support base and being configured to perform gravity compensation on the turntable assembly;

a guide device having a flexible member, disposed between the turntable assembly and the support base, and connected to the turntable assembly and the support base.

In one embodiment, the vertical drive device and the floating gravity compensation device are integrated with each other.

In one embodiment, the structure in which the vertical drive device and the floating gravity compensation device are integrated with each other comprises:

the voice coil motor rotor comprises a magnet frame fixed relative to the support base, a magnet arranged on the magnet frame, a coil support sleeved on the periphery of the magnet at intervals, and a coil arranged on the coil support;

the voice coil motor stator comprises a magnetic ring seat fixed relative to the support base, and an outer magnetic ring and an inner magnetic ring which are arranged on the magnetic ring seat through spacing rings.

In one embodiment, the rotating table assembly includes:

a rotating table;

the rotating base is coaxially arranged with the rotating base, and the rotating base is connected with the guiding device; the vertical driving device drives the rotating base to move vertically;

the rotating motor comprises a rotating motor stator and a rotating motor rotor, the rotating motor stator is fixed relative to the rotating base, and the rotating motor rotor is fixed relative to the rotating table.

In one embodiment, a rotor mounting cavity for placing the voice coil motor rotor is configured on the rotary base, a stator mounting cavity coaxial with the rotor mounting cavity is configured on the support base, and the voice coil motor stator is configured in the stator mounting cavity.

In one embodiment, an annular cavity with an upward opening is formed in the rotary base, the rotary table and the annular cavity are coaxial, and the rotary electric mechanism is arranged in the annular cavity.

In one embodiment, projections of the annular concave cavity and the rotor assembly cavity in a projection direction perpendicular to the upper surface of the rotating base are mutually staggered.

In one embodiment, the guiding device has a stator fixing part and a rotor fixing part respectively connected with two ends of the flexible part;

the stator fixing part is positioned at the radial center of the supporting base and is connected with the supporting base; the rotor fixing part is located on the periphery of the stator fixing part and connected with the rotating table assembly.

In one embodiment, the flexure comprises two flexure bodies, the two flexure bodies are arranged at intervals, and the two flexure bodies are connected with the stator fixing part and the mover fixing part; the vertical driving device and/or the floating gravity compensation device penetrate through the accommodating part.

In one embodiment, the flexible body is a guide spring.

In an embodiment, the number of the flexible parts and the number of the mover fixing parts are the same, and the flexible parts and the mover fixing parts are connected in a one-to-one correspondence manner.

In one embodiment, the multi-axis positioning apparatus further comprises: a vertical measuring device for measuring the vertical position of the rotating table assembly, and a rotation measuring device for measuring the rotational position of the rotating table assembly.

Compared with the prior art, the embodiment of the invention has the advantages that the floating gravity compensation device is arranged, so that the power requirement on the vertical driving device is low, the performance of the positioning device can be improved according to the use requirement, and the vertical movement precision of the positioning device is obviously improved. And the floating gravity compensation device has simple structure, less size chains and convenient assembly.

Drawings

One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.

FIG. 1 is an isometric view of a multi-axis positioning apparatus in accordance with an embodiment of the invention;

FIG. 2 is a top view of a multi-axis positioning apparatus according to an embodiment of the present invention; wherein the carrier in fig. 1 is hidden;

FIG. 3 is a cross-sectional view of a multi-axis positioning apparatus in accordance with an embodiment of the present invention;

FIG. 4 is an isometric view of a voice coil motor with a magnetic levitation gravity compensation function in accordance with an embodiment of the present invention;

FIG. 5 is an isometric view of a guide assembly according to an embodiment of the present invention;

FIG. 6 is a three-point layout of a voice coil motor according to an embodiment of the present invention;

fig. 7 is a four-point layout diagram of a voice coil motor according to an embodiment of the present invention.

Wherein: 100-a multi-axis positioning device;

10-a carrier 20-a rotating table; 30-a rotating base; 300-a central top surface; 40-a rotating electrical machine; 50-a support base; 60-a voice coil motor; 70-a guide device; 80-a rotation measuring device; 90-a bearing; 110-bearing upper end cap; 120-bearing lower end cap; 130-a vertical measuring device;

301-annular cavity; 3011-outer annulus; 3012-inner annulus; 401-a rotary electric machine mover; 402-a rotating electrical machine stator; 501-a stator assembling cavity; 601-voice coil motor mover; 602-a voice coil motor stator; 701-a mover fixing part; 702-a stator fixing part; 703-a flexure; 704-a receptacle; 705-chamfer area;

6011-a magnet holder; 6012-a magnet; 6013-coil support; 6014-coil; 6021-magnetic ring seat; 6022 a-external magnetic ring; 6022 b-inner magnetic ring.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments.

In the following description, for the purposes of illustrating various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that the embodiments may be practiced without one or more of the specific details. In other instances, well-known devices, structures and techniques associated with this application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

Throughout the specification and claims, the word "comprise" and variations thereof, such as "comprises" and "comprising," are to be understood as an open, inclusive meaning, i.e., as being interpreted to mean "including, but not limited to," unless the context requires otherwise.

The embodiments of the present invention will be described in detail below with reference to the accompanying drawings in order to more clearly understand the objects, features and advantages of the present invention. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.

Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and/or" unless the context clearly dictates otherwise.

In the following description, for the purposes of clearly illustrating the structure and operation of the present invention, directional terms will be used, but terms such as "front", "rear", "left", "right", "outer", "inner", "outer", "inward", "upper", "lower", etc. should be construed as words of convenience and should not be construed as limiting terms.

Embodiments of the present invention are described below with reference to the drawings. A multi-axis positioning apparatus 100. As shown in fig. 1 to 5, the multi-axis positioning apparatus 100 includes: stage 10, turntable assembly, support base 50, vertical drive means, floating gravity compensation means and guide means 70. The carrier 10 is of a disc-shaped configuration for carrying a workpiece to be processed, such as a load wafer, and is attached to and above the turntable assembly. The support base 50 is located below the turntable assembly. The guide 70 has a flexible member, and is disposed between the turntable assembly and the support base 50 and connected to the turntable assembly and the support base 50. Vertical drive arrangement sets up on supporting base 50 along revolving stage subassembly's circumference interval in proper order, and each vertical drive arrangement is used for driving the vertical motion of revolving stage subassembly, and the gravity compensation device that floats sets up between revolving stage subassembly and supporting base 50, and carries out gravity compensation to the revolving stage subassembly.

Further, the vertical driving devices and the floating gravity compensation devices are the same in number and are integrated with each other in a one-to-one correspondence, and the number is three in this embodiment. As shown in fig. 3 and 4, a vertical driving means and a floating gravity compensation means are integrated with each other to form a voice coil motor 60, and the voice coil motor 60 includes: a voice coil motor stator 602 and a voice coil motor mover 601. The voice coil motor mover 601 includes a magnet frame 6011 fixed relative to the rotating base 30, a magnet 6012 disposed on the magnet frame 6011, a coil support 6013 disposed at an outer periphery of the magnet 6012 with a spacer, and a coil 6014 disposed on the coil support 6013. The voice coil motor stator 602 includes a magnet ring seat 6021 fixed with respect to the support base 50, and an outer magnet ring 6022a and an inner magnet ring 6022b with a spacer ring provided on the magnet ring seat 6021, wherein a coil 6014 is interposed between the outer magnet ring 6022a and the inner magnet ring 6022b, and the inner magnet ring 6022b surrounds the outer periphery of the magnet 6012. The magnet 6012 is axially magnetized, the outer magnetic ring 6022a and the inner magnetic ring 6022b are radially magnetized, and the magnetic field interaction between the magnet 6012 and the inner magnetic ring 6022b can generate vertical magnetic suspension force to compensate the vertical movement performance of gravity of the rotating platform assembly. And the external

magnetic rings

6022a and 6014 constitute a vertical driving device, and the coil 6014 and the external magnetic ring 6022a act by changing the direction and amplitude of the current input by the coil 6014, so that the voice coil motor rotor 601 can drive the compensation rotating platform assembly to move vertically.

Specifically, as shown in fig. 1 and 3, the magnetic pole direction of the magnet 6012 is upward in the axial direction (Z direction), and the magnetic pole direction of the inner magnet ring 6022b is outward in the radial direction. It is understood that the magnetic pole direction of the magnet 6012 may be axially downward, while the magnetic pole direction of the inner magnet ring 6022b is radially inward. The magnet holder 6011 can be maintained at a certain vertical height by the magnetic force between the magnet 6012 and the inner magnet ring 6022b, so that a stable and continuous upward magnetic force is applied to the turntable assembly, such that the magnetic force is substantially equal to the gravity of the turntable assembly, thereby suspending the turntable assembly at a set height.

Preferably, as shown in fig. 1 and 6, three voice coil motors 60 are arranged in the circumferential direction of the rotary base 30, preferably in an equiangular arrangement of 120 °. In another embodiment, there may be 4 vertical drives and four floating gravity compensation devices, and the 4-point layout shown in FIG. 7 may be used. It is understood that the number of voice coil motors 60 may be other, and the layout of the voice coil motors 60 may not be a uniform layout.

As shown in fig. 1, 2 and 3, the turntable assembly includes: the platform comprises a rotating platform 20, a rotating base 30 and a rotating motor 40, wherein the carrier 10 is arranged on the rotating platform 20, the rotating platform 20 and the rotating base 30 are coaxially arranged, the rotating base 30 is connected with a guiding device 70, and a vertical driving device is connected with the rotating base 30 and drives the rotating base 30 to vertically move. The rotary electric machine 40 includes a rotary electric machine stator 402 and a rotary electric machine mover 401, the rotary electric machine stator 402 is fixed to the rotary base 30, and the rotary electric machine mover 401 is fixed to the rotary table 20. Three rotor assembling cavities (not shown in the figure) penetrating through the rotating base 30 along the thickness direction of the rotating base 30 are configured on the rotating base 30, the rotor assembling cavities (not shown in the figure) are sequentially and uniformly spaced along the circumferential direction of the rotating base 30 and are used for accommodating a voice coil motor rotor 601 of a voice coil motor 60 with a magnetic levitation gravity compensation function, and the voice coil motor rotor 601 bears the rotating base 30 through a magnet frame 6011, namely the magnet frame 6011 is fixedly pressed on steps of the inner wall of the rotor assembling cavities (not shown in the figure). A stator fitting cavity 501 is configured on the support base 50 and is placed coaxially with the mover fitting cavity (not shown in the figure), and the voice coil motor stator 602 is configured in the stator fitting cavity 501 through the magnetic ring seat 6021, that is, the magnetic ring seat 6021 is fixedly installed in the stator fitting cavity 501. The voice coil motor rotor 601 is sleeved in the voice coil motor stator 602 and can vertically move relative to the voice coil motor stator 602, and the voice coil motor rotor 601 is fixedly connected with the rotating base 30 to drive the rotating base 30 to vertically move. Therefore, three sets of voice coil motors 60 with magnetic levitation gravity compensation function are respectively arranged in the three rotor assembling cavities (not shown) of the rotating base 30 and the three stator assembling cavities 501 of the supporting base 50, so as to provide gravity compensation while providing vertical driving force for the rotating base 30, thereby improving the vertical movement precision.

In addition, the rotating base 30 is an integrally formed structure, which is beneficial to simplifying the structure and reducing the cost. The upper surface of the rotating base 30 is further provided with an annular cavity 301 with an upward opening, the annular cavity 301 is used for accommodating a rotating motor stator 402, the rotating motor stator 402 is assembled and integrated in the rotating base 30, no additional space is occupied, the structure is simplified, meanwhile, the structure compactness is improved, and the rotating motor stator 402 is accommodated into the annular cavity 301 in the vertical direction, so that the vertical size is greatly reduced.

Specifically, as shown in fig. 3, the annular cavity 301 has an outer annular surface 3011 and an inner annular surface 3012 disposed opposite to the outer annular surface 3011, the outer annular surface 3011 and the inner annular surface 3012 are spaced apart from each other, and the rotating electric machine stator 402 is cylindrical with a certain thickness, is accommodated in and fixed to the annular cavity 301 of the rotating base 30, and is connected to the outer annular surface 3011. A rotary motor mover 401 is also received within the annular cavity 301 and is located within the inner periphery of the rotary motor stator 402. The rotary table 20 is of an annular structure, and is accommodated in the annular cavity 301 and connected to the rotary motor mover 401, and the rotary motor mover 401 can perform a rotary motion relative to the rotary motor stator 402, so that the rotary motor mover 401 drives the rotary table 20 and further drives the carrier 10 to perform a rotary motion. The bearing 90 is disposed between the inner annular surface 3012 and the turntable 20, and the bearing 90 is fixedly connected to the turntable 20, such that the bearing 90 provides a rotational guide for the turntable 20. The rotating base 30 has a central top surface 300 connected to the inner annular surface 3012, the upper surface of the rotating platform 20 is flush with or slightly higher than the central top surface 300, the bearing top cover 110 is located above the bearing 90, and the inner edge of the bearing top cover 110 is fixedly connected to the rotating base 30, the inner edge of the bearing top cover 110 simultaneously presses the inner ring of the bearing 90, and the outer edge of the bearing top cover 110 extends to the vicinity of the rotating platform and is spaced apart from the rotating platform. The bearing lower end cover 120 is located below the bearing 90, the area of the bearing lower end cover 120 close to the inner edge is connected with the outer ring of the bearing 90, the outer edge of the bearing lower end cover 120 is fixed with the rotating table, and the outer ring of the bearing 90 is pressed tightly. The connection in this section may be through bolt fastening connection, or may be tight abutment.

In addition, as shown in fig. 3, the multi-axis positioning apparatus further includes: the rotary measuring device 80, the rotary measuring device 80 includes a reading head disposed in the annular cavity 301, and an annular grating ruler disposed at the bottom of the bearing lower end cover 120, so that the reading head can obtain the annular grating ruler, and the rotary position signal of the rotary table can be obtained. Alternatively, the rotation measuring device 80 may be other structures such as a read head and a magnetic grid in combination.

In the preferred embodiment, as shown in fig. 3, in order to minimize the vertical dimension and reduce the size of the multi-axis positioning device 100, the projections of the annular cavity 301 and the mover fitting cavity (not shown) in the direction perpendicular to the upper surface of the rotating base 30 are offset from each other, so that the annular cavity 301 and the mover fitting cavity (not shown) can be disposed at the same vertical height, thereby significantly reducing the vertical dimension of the rotating base 30. The annular cavity 301 of the rotary base 30 and the rotor assembly cavity (not shown) effectively reduce the vertical height of the entire multi-axis positioning device 100. Of course, in other embodiments, the annular cavity 301 and the mover fitting cavity (not shown) may be spaced apart in the vertical direction, and the projections of the annular cavity 301 and the mover fitting cavity (not shown) in the direction perpendicular to the upper surface of the rotating base 30 may partially or completely overlap, but this arrangement reduces the vertical dimension less than the above-described preferred embodiment.

As can be seen from the above, the structure in which the vertical driving device and the floating gravity compensation device are integrated with each other serves as a driving force for providing vertical movement to the turntable 20 and the stage 10 moving in the Z direction by generating a levitation force to compensate for the gravity of the voice coil motor by the magnetic force between the magnet 6012 and the inner magnet ring 6022b, and generating a lorentz force by the coil cutting magnetic field.

In addition, as shown in fig. 1, 2 and 4, the multi-axis positioning apparatus 100 further includes: a vertical measuring device 130 for measuring the vertical position of the turntable 20. The vertical measuring device 130 includes a reading head disposed on the supporting base 50, and an annular grating ruler disposed at the bottom of the rotating base 30, so as to obtain the annular grating ruler through the reading head, obtain the vertical position of the rotating platform, and provide signal feedback of the position for the vertical movement of the rotating platform 20 and the carrying platform 10. In addition, the vertical measuring device 130 may also be other structures such as a read head and a magnetic grid. Three of the read heads of the vertical measuring device 130 may be provided, and one read head of the vertical measuring device 130 is provided between two voice coil motors 60. It will be appreciated that one, 2 or 4 readheads may be provided for the vertical measuring device 130.

Further, as shown in fig. 3 and 5, the guide device 70 is disposed between the rotating base 30 and the supporting base 50, the guide device 70 further includes a stator fixing portion 702 to which the flexible member 703 is connected and a mover fixing portion 701, the stator fixing portion 702 is fixed with respect to the supporting base 50, and the mover fixing portion 701 is fixed with respect to the rotating base 30. The stator fixing portion 702 is located at the radial center of the support base 50 and is fixedly connected to the central position of the support base 50. The mover fixing part 701 is located at an outer circumference of the stator fixing part 702 and is spaced apart from the stator fixing part 702 by a certain distance in a radial direction of the rotating base 30. In this embodiment, the stator fixing portion 702 and the mover fixing portion 701 of the guiding device 70 are spaced apart in the radial direction of the rotating base 30, the structure of the guiding device 70 is simplified, and on the basis of realizing the guiding function, the vertical movement with a larger stroke and the turning and tilting with a larger angle can be obtained.

Further, as shown in fig. 3 and 5, the flexible part 703 includes two flexible bodies, the two flexible bodies are disposed at an interval, and the two flexible bodies, one stator fixing part 702 and one mover fixing part 701 surround to form a receiving part 704, and the flexible bodies are guide reeds. The vertical drive and/or floating gravity compensation devices pass through the receptacle 704. in this embodiment, the voice coil motor 60 is disposed in the receptacle 704.

Specifically, as shown in fig. 3 and 5, the stator fixing portion 702 is a triangular structure having a central hole, the mover fixing portion 701 is a U-shaped structure having an opening facing the stator fixing portion 702, two first ends of two guide reeds are respectively connected to two ends of the U-shaped structure, and two second ends of the two guide reeds are connected to the same side of the triangular structure. The stator fixing portion 702, the mover fixing portion 701, and the two guide reeds collectively enclose the housing portion 704 described above. In this embodiment, the guiding device 70 includes 3 mover fixing portions 701 and 3 flexible members 703, and the 3 flexible members 703 are connected to the 3 mover fixing portions 701 in a one-to-one correspondence. The thickness of the guide spring is smaller than that of the stator fixing part 702 and the mover fixing part 701, so that the rigidity of the guide spring is reduced, the guide spring allows displacement in the Z direction and overturning and tilting, and the rigidity in the X, Y axis and the theta direction is higher, so that the voice coil motor 60 can be limited to drive the rotating platform assembly to maintain the movement in the vertical direction, and the movement precision of the rotating platform assembly is improved.

It is understood that the number of the mover fixing portions and the flexible members may be set according to the number of the voice coil motors 60, and when the number of the voice coil motors 60 is 4, and 4 receiving portions are required, the number of the mover fixing portions 701 is 4 and the number of the flexible members 703 is 4.

The voice coil motor 60 with magnetic levitation gravity compensation function is preferably disposed in the accommodating portion 704. It should be understood that the voice coil motor 60 with magnetic levitation gravity compensation function may be circumferentially arranged outside the receptacle 704, i.e. outside the guide 70, e.g. in a chamfered area 705 arranged between and adjacent two receptacles 704. Therefore, when the 3 voice coil motors perform vertical movement, the guiding device 70 provides a guiding function for the vertical movement of the stage 10, and can allow displacement in the Z direction and tilting, in other words, Rx and Ry decoupling can be simultaneously achieved.

The multi-axis positioning device provided by the embodiment of the invention is applied with the voice coil motor 60 with the magnetic suspension gravity compensation function, so that the performance is easily improved. And, overall structure is simple, middle size chain is few, and the mechanical wear that produces is minimum, is difficult to appear granule dust problem.

In another embodiment, the vertical drive device and the floating gravity compensation device may be independently configured. For example, the vertical drive means may be configured as an electric motor, or other linear movement means, such as hydraulic movement means, may be provided without departing from the scope of the invention. The floating gravity compensation device is configured as a magnetic suspension gravity compensation device or an air suspension gravity compensation device. Or, the floating gravity compensation device is separately configured into an integrated structure of the magnetic suspension gravity compensation device and the air suspension gravity compensation device. Wherein, the floating gravity compensation device can be a gas foot and the like.

While the preferred embodiments of the present invention have been described in detail above, it should be understood that aspects of the embodiments can be modified, if necessary, to employ aspects, features and concepts of the various patents, applications and publications to provide yet further embodiments.

These and other changes can be made to the embodiments in light of the above detailed description. In general, in the claims, the terms used should not be construed to be limited to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled.

It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.

Claims

1. A multi-axis positioning apparatus, comprising:

a rotating table assembly;

a support base located below the turntable assembly;

2. The multi-axis positioning device of claim 1 wherein the vertical drive device and the floating gravity compensation device are integrated with one another.

3. The multi-axis positioning device of claim 2 wherein the structure in which the vertical drive means and the floating gravity compensation means are integral with one another comprises:

4. The multi-axis positioning apparatus of claim 3 wherein the rotary stage assembly comprises:

a rotating table;

5. The multi-axis positioning device of claim 4, wherein the rotary base is provided with a mover fitting cavity in which the voice coil motor mover is placed, the support base is provided with a stator fitting cavity coaxial with the mover fitting cavity, and the voice coil motor stator is disposed in the stator fitting cavity.

6. The multi-axis positioning device as claimed in claim 5, wherein the rotary base is configured with an annular cavity with an upward opening, the rotary table and the annular cavity are coaxial, and the rotary electric mechanism is disposed in the annular cavity.

7. The multi-axis positioning device of claim 6, wherein projections of the annular cavity and the mover fitting cavity in a projection direction perpendicular to an upper surface of the rotary base are staggered from each other.

8. The multi-axis positioning device of claim 1, wherein the guide has a stator fixing portion and a mover fixing portion respectively connecting both ends of the flexure;

9. The multi-axis positioning device of claim 8, wherein the flexure comprises two flexure bodies, the two flexure bodies being spaced apart and forming a receptacle around the stator stationary portion and the mover stationary portion; the vertical driving device and/or the floating gravity compensation device penetrate through the accommodating part.

10. The multi-axis positioning device of claim 9 wherein the flexible body is a guide spring.

11. The multi-axis positioning device as claimed in claim 8, wherein the flexure and the mover fixing portion are provided in plural, equal numbers and connected in one-to-one correspondence.