CN214152601U

CN214152601U - Gravity compensation device

Info

Publication number: CN214152601U
Application number: CN202022371327.3U
Authority: CN
Inventors: 田丽; 张利
Original assignee: Beijing U Precision Tech Co Ltd
Current assignee: Beijing Youwei Precision Measurement And Control Technology Research Co ltd; Beijing U Precision Tech Co Ltd
Priority date: 2020-10-22
Filing date: 2020-10-22
Publication date: 2021-09-07
Anticipated expiration: 2030-10-22

Abstract

The utility model provides a gravity compensation device relates to ultra-precision machining and measures technical field. The gravity compensation device comprises a rotor module and a stator module, wherein the rotor module comprises a plurality of annular rotor permanent magnets which are stacked and arranged along the axial direction of the rotor module, every two adjacent rotor permanent magnets form a group, an adjusting stopper is clamped between at least two stator permanent magnets in a group, and the adjusting stopper is used for adjusting the distance between the two corresponding rotor permanent magnets; the stator module comprises a stator permanent magnet which is arranged around the rotor module, and the stator permanent magnet and the rotor permanent magnet are arranged along the radial direction in a clearance mode; the stator permanent magnet and the rotor permanent magnet interact to form gravity compensation force which is upward along the axial direction. The gravity compensation device realizes the adjustment of the gravity compensation force by adjusting the number of the rotor permanent magnets and the adjusting blocking pieces and adjusting the thickness of the blocking pieces, so that the gravity compensation device has the advantages of wide application range, convenience and quickness in adjustment and low cost.

Description

Gravity compensation device

Technical Field

The utility model relates to an ultra-precision machining and measurement technical field particularly, relate to a gravity compensation device.

Background

Along with the continuous improvement of the integration level of integrated circuit devices, the precision requirement on a workbench is continuously improved, such as photoetching equipment, film thickness detection equipment and the like, in order to reduce the adverse effects of vibration and the like caused by mechanical contact of the workbench, the conventional workbench can carry out non-contact supporting through a magnetic suspension gravity compensation device, but the conventional magnetic suspension gravity compensation device can only be suitable for bearing objects with specific specifications, and has small bearing range and poor applicability.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a gravity compensation device to solve current magnetism and float gravity compensation device and only can be applicable to the thing that bears of specific specification, bear the weight of the scope little, the technical problem that the suitability is poor.

In order to solve the above problems, the present invention provides a gravity compensation device, which includes a rotor module and a stator module, wherein the rotor module includes a plurality of annular rotor permanent magnets, the plurality of rotor permanent magnets are stacked and arranged along an axial direction thereof, each two adjacent rotor permanent magnets are a group, an adjusting stopper is clamped between at least one group of two rotor permanent magnets, and the adjusting stopper is used for adjusting a distance between the corresponding two rotor permanent magnets; the stator module comprises a stator permanent magnet which is arranged around the rotor module, and the stator permanent magnet and the rotor permanent magnet are arranged along the radial direction with a gap; the stator permanent magnet and the rotor permanent magnet interact to form gravity compensation force which is upward along the axial direction.

Optionally, the magnetizing directions of the stator permanent magnets are axial magnetizing and consistent, the magnetizing directions of the stator permanent magnets are radial magnetizing, and the magnetic poles of the inner side walls of the stator permanent magnets are the same as the magnetic poles of the top walls of the rotor permanent magnets.

Optionally, the mover module further includes a mandrel and a bearing table, the adjusting stopper includes an adjusting washer, the mover permanent magnet and the adjusting washer are both sleeved on the mandrel to form a driving body, and a top end of the driving body is connected to the bearing table; the bottom end of the mandrel is provided with a blocking piece, and the radial size of the blocking piece is larger than the inner diameter of the ring of the rotor permanent magnet.

Optionally, at least one of the bearing table and the barrier is detachably and fixedly connected with the mandrel.

Optionally, the stator module further includes a base, an annular protection cylinder is fixedly arranged on the top surface of the base, an accommodating cavity is formed in the ring of the protection cylinder, and the mover permanent magnet is located in the accommodating cavity; an annular cavity is formed in the inner portion of the wall of the protection barrel along the circumferential direction of the protection barrel, and the stator permanent magnet is accommodated in the cavity along the circumferential direction.

Optionally, the protection cylinder includes an inner periphery blocking piece and an outer periphery blocking piece arranged around the outer side of the inner periphery blocking piece, the inner periphery blocking piece includes an inner periphery part and a bottom periphery part arranged around the outer side of the inner periphery part, the outer periphery blocking piece includes an outer periphery part and a top periphery part arranged around the inner side of the outer periphery part, the inner side wall of the top periphery part is connected with the inner periphery part, the bottom end of the outer periphery part is connected with the bottom periphery part, and the inner periphery blocking piece and the outer periphery blocking piece jointly enclose the cavity.

Optionally, the gravity compensation device further comprises an actuation coil circumferentially housed within the cavity.

Optionally, at least one of the inner side wall portion, the bottom wall portion, the outer side wall portion and the top wall portion is provided with a cooling liquid channel along a circumferential direction thereof, and the cooling liquid channel is used for circulating cooling liquid to cool the actuating coil.

Optionally, the inner side wall portion includes an inner cylinder and a first side wall plate body surrounding the outer side of the inner cylinder, the first side wall plate body and the bottom wall portion are integrally formed, one of the outer side wall of the inner cylinder and the inner side wall of the first side wall plate body is provided with a communication groove along the circumferential direction thereof, and the communication groove and the other one together form the coolant channel;

and/or, the outer side wall part comprises an outer barrel and a second side wall plate body arranged outside the outer barrel in a surrounding manner, the outer barrel and the top wall part are integrally formed, one of the outer side wall of the outer barrel and the inner side wall of the second side wall plate body is provided with a communicating groove along the circumferential direction, and the communicating groove and the other one jointly form the cooling liquid channel.

Optionally, the active cell module still includes the plummer, the stator module still includes the base, the active cell permanent magnet with the magnetism compensation structure that the stator permanent magnet formed is the multiunit, the multiunit magnetism compensation structure dispersion arrange in the plummer with between the base, and the multiunit the active cell permanent magnet of magnetism compensation structure all set firmly in the bottom of plummer, the stator permanent magnet all set firmly in the top of base.

The utility model provides a gravity compensation device, when needing to treat that the support carries out gravity compensation to different weight, can adjust the figure of active cell permanent magnet, adjust the figure of keeping off the piece and adjust the thickness that keeps off the piece, through the first magnetic field that changes active cell module for the gravity compensation power that first magnetic field and second magnetic field coupling produced equals the weight of treating the support after changing, thereby increase gravity compensation device's application scope, the realization is to the gravity compensation of treating the support to different specifications. The gravity compensation device has the advantages of wide application range, convenience and quickness in adjustment and low cost.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

Fig. 1 is a schematic view of a gravity compensation device provided by the present invention;

fig. 2 is an exploded view of the gravity compensation device provided by the present invention;

fig. 3 is a partial axial cross-sectional view of the gravity compensation device provided by the present invention, wherein the number of the rotor permanent magnets is two;

fig. 4 is a schematic view of the distribution of the first magnetic poles of the rotor permanent magnet and the stator permanent magnet in the gravity compensation device provided by the present invention;

fig. 5 is a schematic diagram of the distribution of the second magnetic poles of the rotor permanent magnet and the stator permanent magnet in the gravity compensation device provided by the present invention;

fig. 6 is a magnetic force line distribution diagram when the electric coil in the gravity compensation device provided by the present invention is energized.

Description of reference numerals:

10-a mover module; 20-a stator module; 100-mover permanent magnets; 200-an adjusting washer; 300-a mandrel; 310-a barrier; 400-a carrier table; 500-stator permanent magnet; 600-a base; 700-a protective cylinder; 711-inner periphery; 711 a-inner cylinder; 711 b-a first side gusset panel; 712-a bottom wall portion; 721-the outer skirt; 721 a-outer cylinder; 721 b-a second side gusset panel; 721 c-stationary edge; 722-top wall portion; 730-a containment chamber; 740-a cavity; 750-coolant channels; 800-actuating a coil.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

The embodiment provides a gravity compensation device, as shown in fig. 1 to fig. 3, which includes a mover module 10 and a stator module 20, where the mover module 10 includes a plurality of annular mover permanent magnets 100, the plurality of mover permanent magnets 100 are stacked and arranged along an axial direction thereof, every two adjacent mover permanent magnets 100 are in a group, an adjusting stopper is interposed between at least two stator/mover permanent magnets 100 in the group, and the adjusting stopper is used to adjust a distance between two corresponding mover permanent magnets 100; the stator module 20 includes a stator permanent magnet 500 enclosed in the mover module 10, and the stator permanent magnet 500 and the mover permanent magnet 100 are disposed with a gap in a radial direction; the stator permanent magnet 500 and the mover permanent magnet 100 interact to form a gravity compensation force upward in the axial direction.

The gravity compensation device provided by the embodiment comprises a mover module 10 capable of generating a first magnetic field and moving, and a stator module 20 capable of generating a second magnetic field and fixed, wherein the first magnetic field and the second magnetic field interact in the same space to generate an acting force with approximately constant magnitude and upward axial direction on the mover module 10, and the acting force can be used as a gravity compensation force for supporting a member to be supported by the mover module 10; among the plurality of mover permanent magnets 100 of the mover module 10, an adjusting stopper is disposed between one or more groups of two adjacent mover permanent magnets 100, and the adjusting stopper adjusts the distribution of magnetic lines of force in the first magnetic field formed by the plurality of mover permanent magnets 100 by adjusting the distance between the mover permanent magnets 100, thereby changing the magnitude of the gravity compensation force generated by the interaction between the first magnetic field and the second magnetic field.

When the magnetic field adjusting device is used, the number of the rotor permanent magnets 100 can be selected according to the magnetic field property (magnetic field intensity, magnetic line distribution and the like) of the rotor permanent magnets 100, the magnetic field property of the rotor permanent magnets 100 and the weight grade of a to-be-supported member, then the number of the adjusting stoppers is determined according to the weight of the to-be-supported member, the thickness of the adjusting stoppers between the rotor permanent magnets 100 is determined, the distance between the rotor permanent magnets 100 is correspondingly determined, and then the first magnetic field generated by the rotor module 10 formed by the rotor permanent magnets 100 and the adjusting stoppers is determined; the method comprises the steps of sleeving a rotor module 10 and a stator module 20, coupling a first magnetic field generated by the rotor module 10 and a second magnetic field generated by the stator module 20 to form an axially upward gravity compensation force for the rotor module 10, placing a to-be-supported member on the top of the rotor module 10, wherein the gravity compensation force is equal to the gravity of the to-be-supported member, so that the to-be-supported member is supported by a gravity compensation device, the rotor module 10 and the stator module 20 are in a suspended state, and are not rigidly connected with each other, and accordingly, the axially upward rigidity formed between the rotor module 10 and the stator module is approximately zero, so that the influence of vibration and the like transmitted to the to-be-supported member by a workbench and the like for fixing the stator module 20 can be effectively reduced, the stability of the to-be-supported member by the rotor module 10 is correspondingly ensured, and the position accuracy of the to-be-supported member is ensured.

When the gravity compensation needs to be performed on the objects to be supported with different weights, the number of the adjusting blocking pieces and the thickness of the adjusting blocking pieces can be adjusted, and the gravity compensation force generated by coupling the first magnetic field and the second magnetic field is equal to the weight of the changed object to be supported by changing the first magnetic field of the rotor module 10, so that the application range of the gravity compensation device is enlarged, and the gravity compensation on the objects to be supported with different specifications is realized. Of course, when the weight of the object to be supported changes greatly, the number of the mover permanent magnets 100 with the same specification can be increased or decreased to realize large-range adjustment of the gravity compensation force, and then the adjustment stoppers with proper number and thickness are selected to adjust the distance between the mover permanent magnets 100 to realize small-range adjustment of the gravity compensation force. Compared with the prior art, when the weight of the to-be-supported member changes, the gravity compensation devices with different specifications need to be selected, and the application range of the gravity compensation device is single; or when the weight of the supporting member changes in a small range, the rotor permanent magnets 100 with different specifications need to be selected to be matched to realize the small-range adjustment of the gravity compensation force, the replaced rotor permanent magnets 100 can only be discarded and cannot be reused after being repaired, the time and the cost are increased simultaneously due to the re-processing, and the waste is also caused. The gravity compensation device can select the rotor permanent magnet 100 with the same specification to realize large-range adjustment of gravity compensation force, and can realize small-range adjustment of gravity compensation force through selection of the number and the thickness of the adjusting stopper, so that the application range of the gravity compensation device is wide, and the adjustment is convenient and low in cost.

Of course, the mover permanent magnet 100 in the gravity compensation device may also be of different specifications, and the small-range adjustment of the gravity compensation force may also be realized by adjusting the number and thickness of the adjustment stoppers. Specifically, in the mover module 10, the number of the mover permanent magnets 100 may be two, three, four, or the like as needed.

Specifically, in this embodiment, as shown in fig. 4 and 5, the magnetization directions of the rotor permanent magnets 100 may be axial magnetization and the magnetization directions are the same, the magnetization direction of the stator permanent magnet 500 is radial magnetization, and the magnetic poles of the inner wall of the ring of the stator permanent magnet 500 are the same as the magnetic poles of the top wall of the rotor permanent magnet 100. When the magnetizing directions of the plurality of mover permanent magnets 100 in the mover module 10 are the same, the magnetic field coupling formed by the plurality of mover permanent magnets 100 is enhanced, and a first magnetic field with higher consistency and magnetic field strength is formed; the second magnetic field generated by the stator permanent magnet 500 of the stator module 20 interacts with the first magnetic field to form a gravity compensation force for the mover module 10 to move upward in the axial direction, and the rigid acting force between the stator permanent magnet 500 and the mover permanent magnet 100 in the radial direction and the tangential direction is approximately zero, and accordingly, the vibration force transmitted to the mover permanent magnet 100 through the stator permanent magnet 500 and further to the worktable and the support member to be supported thereon is approximately zero, so that the stability of the support member to be supported is ensured, and the position accuracy of the support member to be supported is ensured.

Specifically, as shown in fig. 4, the number of the mover permanent magnets 100 in the mover module 10 is two, two mover permanent magnets 100 are stacked and spaced along the axial direction (the adjusting stopper between the two mover permanent magnets 100 is not shown), the top ends of the two mover permanent magnets 100 are both S poles, and the bottom ends thereof are both N poles; the inner wall of the stator permanent magnet 500 of the stator module 20 is an S pole, and the outer wall of the stator permanent magnet 500 is an N pole. Or, as shown in fig. 5, the top ends of the two mover permanent magnets 100 are both N poles, and the bottom ends thereof are both S poles; the inner wall of the stator permanent magnet 500 of the stator module 20 is an N pole, and the outer wall of the stator permanent magnet 500 is an S pole.

Optionally, in this embodiment, as shown in fig. 3, the mover module 10 may further include a mandrel 300 and a bearing table 400, the adjusting stopper includes an adjusting washer 200, the mover permanent magnet 100 and the adjusting washer 200 are both sleeved on the mandrel 300 to form a driving body, and a top end of the driving body is connected to the bearing table 400; the bottom end of the core shaft 300 is provided with a barrier 310, and the radial dimension of the barrier 310 is larger than the ring inner diameter of the mover permanent magnet 100. Here is a specific arrangement form of the mover permanent magnet 100 and the adjusting stopper in the mover module 10, the mandrel 300 is used as an installation base body to fix the axially stacked mover permanent magnet 100 and the adjusting washer 200, and the spacer 310 limits the mover permanent magnet 100 on the mandrel at the bottom to prevent the mover permanent magnet 100 from falling off from the bottom end of the mandrel 300; the rotor permanent magnet 100, the adjusting washer 200 and the mandrel 300 jointly form a driving body, the top end of the driving body is connected with the bearing table 400, the bearing table 400 is used for bearing a to-be-supported member, and the second magnetic field and the first magnetic field are coupled to generate an axially upward gravity compensation force for the driving body and the bearing table 400, so that the gravity compensation for the to-be-supported member is realized; the arrangement of the mandrel 300 and the bearing table 400 can limit and fix the stacking position of the rotor permanent magnet 100 and the adjusting washer 200, and the bearing table 400 has higher stability for bearing the to-be-supported member.

In this embodiment, for the adjustable replacement of the adjusting washer 200, the following form may be adopted: at least one of the susceptor 400 and the barrier member 310 is detachably fixed to the mandrel 300, which includes three cases: firstly, the top end of the mandrel 300 is detachably and fixedly connected with the bearing table 400, when the number of the rotor permanent magnets 100, the number of the adjusting washers 200 and the thickness of the adjusting washers 200 need to be adjusted, the mandrel 300 can be detached from the bearing table 400, the length of the mandrel 300 can be adjusted or the mandrel 300 with the corresponding length can be replaced according to the required length of the mandrel 300, then the determined rotor permanent magnets 100 and the adjusting washers 200 are sleeved, and the top end of the mandrel 300 is connected to the bearing table 400 again; secondly, the blocking piece 310 is detachably and fixedly connected with the mandrel 300, when the adjustment is needed, the blocking piece 310 can be detached, the length of the mandrel 300 is adjusted, the determined rotor permanent magnet 100 and the adjusting washer 200 are sleeved in the mandrel 300, and then the blocking piece 310 is connected with the mandrel 300 again; thirdly, the top end of the mandrel 300 is detachably and fixedly connected with the bearing platform 400, and the bottom end of the mandrel 300 is detachably and fixedly connected with the barrier member 310. Wherein, for the length adjustment of the mandrel 300, the mandrel 300 can be replaced; or the length of the shaft body of the mandrel 300 can be adjusted, and the length of the shaft body is adjusted; or the connection position of the barrier member 310 to the bottom end of the mandrel 300 can be adjusted to achieve length adjustment of the mandrel 300, such as the barrier member 310 being screwed to the bottom end of the mandrel 300.

Wherein, for the second form, the top end of the mandrel 300 can be fixedly connected with the bearing table 400 or integrally formed; as shown in fig. 3, the following form may also be adopted: the top rotor permanent magnet 100 is fixedly connected to the mandrel 300 and detachably connected to the bearing table 400, and specifically, the top rotor permanent magnet 100 may be fixedly connected to the mandrel 300 and the bearing table 400 by gluing.

In this embodiment, as shown in fig. 2 and 3, the stator module 20 may further include a base 600, an annular protection cylinder 700 is fixedly disposed on a top surface of the base 600, an accommodating cavity 730 is formed in an inner ring of the protection cylinder 700, and the mover permanent magnet 100 is located in the accommodating cavity 730; an annular cavity 740 is formed in the wall of the protection casing 700 along the circumferential direction thereof, and the stator permanent magnet 500 is received in the cavity 740 along the circumferential direction. The base 600 may be used as a bottom mounting table for mounting the stator permanent magnet 500 and the like, and for connection with a table or the like; the protection barrel 700 fixedly arranged on the top surface of the base 600 is used for fixing the stator permanent magnet 500 therein to improve the matching position precision of the stator permanent magnet 500 and the mover module 10, and the stator permanent magnet 500 is located in the cavity 740 inside the protection barrel 700, so that the protection barrel 700 can perform blocking protection on the stator permanent magnet 500 to reduce the damage to the stator permanent magnet 500 caused by external factors.

Specifically, in this embodiment, as shown in fig. 3, the protection cylinder 700 may include an inner periphery blocking member and an outer periphery blocking member disposed outside the inner periphery blocking member, the inner periphery blocking member includes an inner periphery portion 711 and a bottom periphery portion 712 disposed outside the inner periphery portion 711, the outer periphery blocking member includes an outer periphery portion 721 and a top periphery portion 722 disposed inside the outer periphery portion 721, an inner side wall of the top periphery portion 722 is connected to the inner periphery portion 711, a bottom end of the outer periphery portion 721 is connected to the bottom periphery portion 712, and the inner periphery blocking member and the outer periphery blocking member together enclose the cavity 740. Here is a specific form of the protection cylinder 700, the protection cylinder 700 includes two relatively independent inner peripheral blocking parts and outer peripheral blocking parts, wherein the inner peripheral blocking parts are approximately "L" shaped, the outer peripheral blocking parts are approximately "right-angled", when in installation, the inner peripheral parts 711 of the inner peripheral blocking parts are cylindrical, the stator permanent magnet 500 can be sleeved outside the inner peripheral parts 711, then the outer peripheral blocking parts and the inner peripheral blocking parts are assembled in a matching manner, the stator permanent magnet 500 is enclosed in a cavity 740 formed by the two parts, in the installation process, the inner peripheral parts 711 can guide and limit the installation of the stator permanent magnet 500, and the two parts of the inner peripheral blocking parts and the outer peripheral blocking parts are assembled, so that the installation accuracy and the operation convenience of the stator permanent magnet 500 are high.

In this embodiment, as shown in fig. 3, the gravity compensation device may further include an actuating coil 800, and the actuating coil 800 is circumferentially received in the cavity 740. When the actuating coil 800 is in the power-off state, the mover module 10 and the stator module 20 together form a stable magnetic field, and accordingly form a stable gravity compensation force; as shown in fig. 6, when the axial supporting position of the mover module 10 needs to be adjusted, the actuator coil 800 may be powered on, a third magnetic field generated by the actuator coil 800 is coupled with the first magnetic field, so as to generate an axially upward or downward acting force on the mover module 10 (it can also be understood that after the first magnetic field, the second magnetic field and the third magnetic field are coupled, the formed axially acting force on the mover module 10 is greater than or less than a gravity compensation force formed by coupling the first magnetic field and the second magnetic field), the mover module 10 moves axially upward or downward under the action of the acting force, the gravity compensation force and its own gravity until reaching a target position, and stops powering on the actuator coil 800, and the mover module 10 is in a stable state again under the action of the stator module 20, so as to achieve the adjustment of the axial position of the support to be supported, and further improve the applicability of the gravity compensation apparatus; preferably, the initial position of the mover module 10 and the stator module 20 may be determined when the central horizontal cross-section of the cylinder formed by the plurality of mover permanent magnets 100 and the cylinder formed by the stator permanent magnets 500 are coplanar. The protection cylinder 700 can position and protect the actuation coil 800 therein.

In this embodiment, at least one of the inner peripheral portion 711, the bottom peripheral portion 712, the outer peripheral portion 721 and the top peripheral portion 722 is provided with a cooling liquid channel 750 along the circumferential direction thereof, and the cooling liquid channel 750 is used for flowing a cooling liquid to cool the actuator coil 800. The actuating coil 800 can generate heat in the electrifying process, the cooling liquid channel 750 is provided with a water inlet and a water outlet, an external water supply device can be communicated with the water inlet to fill cooling liquid into the cooling liquid channel 750, the heat generated by the actuating coil 800 is taken away in the flowing process of the cooling liquid in the cooling liquid channel 750, and the actuating coil 800 is cooled, so that the normal use of the actuating coil 800 is ensured, and the adverse effect on the position precision of a to-be-supported object caused by a high-temperature environment is reduced. Specifically, the cooling liquid channel 750 may be spirally wound around the protection cylinder 700 along the circumferential direction, or a plurality of annular channels communicated with the water inlet and the water outlet; preferably, the cooling liquid channel 750 may be provided in all of the inner peripheral portion 711, the bottom peripheral portion 712, the outer peripheral portion 721 and the top peripheral portion 722.

Specifically, in the present embodiment, as shown in fig. 3, the inner peripheral portion 711 may include an inner cylinder 711a and a first side wall 711b surrounding the inner cylinder 711a, and the first side wall 711b is integrally formed with the bottom peripheral portion 712, and one of an outer side wall of the inner cylinder 711a and an inner side wall of the first side wall 711b is provided with a communication groove along a circumferential direction thereof, and the communication groove and the other together form the coolant passage 750. Here, a specific assembly form of the inner side wall 711 is that an accommodating cavity 730 for accommodating the mover module 10 is formed inside the inner cylinder 711a, and when processing, a communicating groove may be processed on the outer side wall of the exposed inner cylinder 711a or the inner side wall of the first side wall 711b, and then the inner cylinder 711a and the first side wall 711b are adhered or screwed to form the inner side wall 711; the first side wall plate 711b and the bottom wall portion 712 are integrally formed, so that the operation convenience of assembling the inner wall stopper can be improved, and the connection firmness between the bottom wall portion 712 and the inner wall portion 711 can be improved.

Alternatively, in this embodiment, as shown in fig. 3, the outer surrounding portion 721 may include an outer cylinder 721a and a second side surrounding plate 721b surrounding the outer cylinder 721a, the outer cylinder 721a and the top surrounding portion 722 are integrally formed, one of the outer side wall of the outer cylinder 721a and the inner side wall of the second side surrounding plate 721b is provided with a communication groove along the circumferential direction thereof, and the communication groove and the other surround the cooling liquid channel 750 together. Here, a specific assembly form of the outer side surrounding part 721 is that, during processing, a communicating groove may be processed on the outer side wall of the outer cylinder 721a or the inner side wall of the second side surrounding plate 721b in an exposed state, and then the outer cylinder 721a and the second side surrounding plate 721b are glued or screwed to form the outer side surrounding part 721; the outer cylinder 721a and the top surrounding portion 722 are integrally formed, which not only improves the operation convenience of assembling the peripheral stopper, but also improves the connection firmness between the top surrounding portion 722 and the outer surrounding portion 721.

Preferably, as shown in fig. 1 and fig. 3, the bottom surrounding portion 712 may extend out of the outer cylinder 721a along the radial direction thereof, and the bottom end outside of the second side surrounding plate 721b may further be surrounded by a fixing edge 721c along the circumferential direction thereof, and the fixing edge 721c may be connected to the portion of the bottom surrounding portion 712 extending out of the outer cylinder 721a, so as to improve the connection firmness of the two portions; in addition, the fixing edge 721c and the portion of the bottom portion 712 extending out of the outer cylinder 721a may increase the area of the base of the protection cylinder 700 to improve the stability of the protection cylinder 700 mounted on the base 600.

In this embodiment, the mover module 10 may further include a bearing platform 400, the stator module 20 may further include a base 600, the magnetic compensation structures formed by the mover permanent magnets 100 and the stator permanent magnets 500 may be multiple sets, the multiple sets of magnetic compensation structures are dispersedly arranged between the bearing platform 400 and the base 600, the mover permanent magnets 100 of the multiple sets of magnetic compensation structures are all fixedly disposed at the bottom of the bearing platform 400, and the stator permanent magnets 500 are all fixedly disposed at the top of the base 600. When a plurality of groups of magnetic compensation structures are arranged, the resultant force of the upward axial supporting forces formed by the plurality of groups of magnetic compensation structures is used as the gravity compensation force, the plurality of supporting forces support different positions of the bearing table 400, the supporting stability is higher, and the gravity compensation stability of the corresponding to-be-supported member is higher; in addition, when one part of the magnetic compensation structures in the multiple groups of magnetic compensation structures are used for axial position adjustment, or when the multiple groups of magnetic compensation structures are all used for axial position adjustment but the position adjustments are inconsistent, the multiple groups of magnetic compensation structures can drive the bearing table 400 to deflect in the direction, so that the adjustment range of the gravity compensation device is expanded, and the applicability of the gravity compensation device is improved; in addition, the multiple groups of magnetic compensation structures act together, so that the adjustment range of the gravity compensation force can be further expanded, and the application range of the gravity compensation device is further expanded. Specifically, as shown in fig. 1 and fig. 2, the magnetic compensation structures may be three groups, the three groups of magnetic compensation structures are arranged between the carrier 400 and the base 600 in a regular triangle, when the axial positions of two groups of magnetic compensation structures are adjusted upward or unchanged, and the axial position of the other group of magnetic compensation structures is adjusted downward, the carrier 400 correspondingly generates an angular deflection, of course, the above operations are only examples, and the axial positions of the multiple groups of magnetic compensation structures may be adjusted according to actual requirements to realize the angular deflection adjustment of the carrier 400; in addition, the magnetic compensation structures can be two groups, four groups and the like.

Specifically, the gravity compensation device can be used for gravity compensation of optical elements, masks and the like in a lithography machine or other elements with higher requirements on position accuracy and vibration influence.

Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The gravity compensation device is characterized by comprising a rotor module (10) and a stator module (20), wherein the rotor module (10) comprises a plurality of annular rotor permanent magnets (100), the rotor permanent magnets (100) are stacked and arranged along the axial direction of the rotor module, every two adjacent rotor permanent magnets (100) form a group, an adjusting stopper is clamped between at least two rotor permanent magnets (100) in at least one group, and the adjusting stopper is used for adjusting the distance between the corresponding two rotor permanent magnets (100); the stator module (20) comprises a stator permanent magnet (500) which is arranged around the rotor module (10), and the stator permanent magnet (500) and the rotor permanent magnet (100) are arranged along the radial direction in a clearance mode; the stator permanent magnet (500) and the rotor permanent magnet (100) interact to form gravity compensation force upwards along the axial direction.

2. The gravity compensation device according to claim 1, wherein each rotor permanent magnet (100) is magnetized in an axial direction and in a same direction, the stator permanent magnet (500) is magnetized in a radial direction, and the magnetic poles of the inner wall of the stator permanent magnet (500) ring are the same as the magnetic poles of the top wall of the rotor permanent magnet (100).

3. The gravity compensation device according to claim 1, wherein the mover module (10) further comprises a mandrel (300) and a bearing table (400), the adjusting stopper comprises an adjusting washer (200), the mover permanent magnet (100) and the adjusting washer (200) are sleeved on the mandrel (300) to form a driving body, and the top end of the driving body is connected with the bearing table (400); the bottom end of the mandrel (300) is provided with a blocking piece (310), and the radial size of the blocking piece (310) is larger than the inner diameter of the rotor permanent magnet (100).

4. Gravity compensation device according to claim 3, wherein at least one of the carrier table (400) and the barrier (310) is detachably affixed to the mandrel (300).

5. Gravity compensation device according to any of claims 1-4, wherein the stator module (20) further comprises a base (600), an annular protection cylinder (700) is fixed on the top surface of the base (600), an accommodation cavity (730) is formed in the ring of the protection cylinder (700), and the mover permanent magnet (100) is located in the accommodation cavity (730); an annular cavity (740) is formed in the inner portion of the wall of the protection barrel (700) along the circumferential direction of the protection barrel, and the stator permanent magnet (500) is accommodated in the cavity (740) along the circumferential direction.

6. The gravity compensation device according to claim 5, wherein the protection cylinder (700) comprises an inner periphery blocking member and an outer periphery blocking member arranged around the outer side of the inner periphery blocking member, the inner periphery blocking member comprises an inner periphery portion (711) and a bottom periphery portion (712) arranged around the outer side of the inner periphery portion (711), the outer periphery blocking member comprises an outer periphery portion (721) and a top periphery portion (722) arranged around the inner side of the outer periphery portion (721), the inner side wall of the top periphery portion (722) is connected with the inner periphery portion (711), the bottom end of the outer periphery portion (721) is connected with the bottom periphery portion (712), and the inner periphery blocking member and the outer periphery blocking member together form the cavity (740).

7. Gravity compensation device according to claim 6, further comprising an actuation coil (800), wherein the actuation coil (800) is circumferentially housed within the cavity (740).

8. Gravity compensation device according to claim 7, wherein at least one of the inner side surrounding portion (711), the bottom surrounding portion (712), the outer side surrounding portion (721) and the top surrounding portion (722) is provided with a cooling liquid channel (750) along its circumference inside, and the cooling liquid channel (750) is used for circulating cooling liquid to cool down the actuating coil (800).

9. The gravity compensation device according to claim 8, wherein the inner side wall part (711) comprises an inner cylinder (711a) and a first side wall body (711b) surrounding the inner cylinder (711a), and the first side wall body (711b) is integrally formed with the bottom wall part (712), one of the outer side wall of the inner cylinder (711a) and the inner side wall of the first side wall body (711b) is provided with a communication groove along the circumferential direction thereof, and the communication groove and the other together form the cooling liquid channel (750);

and/or the outer side wall part (721) comprises an outer cylinder body (721a) and a second side wall plate body (721b) surrounding the outer side of the outer cylinder body (721a), the outer cylinder body (721a) and the top wall part (722) are integrally formed, one of the outer side wall of the outer cylinder body (721a) and the inner side wall of the second side wall plate body (721b) is provided with a communication groove along the circumferential direction of the outer side wall, and the communication groove and the other one form the cooling liquid channel (750) in a surrounding mode.

10. The gravity compensation device according to claim 1 or 2, wherein the rotor module (10) further comprises a bearing table (400), the stator module (20) further comprises a base (600), the magnetic compensation structures formed by the rotor permanent magnets (100) and the stator permanent magnets (500) are a plurality of groups, the plurality of groups of magnetic compensation structures are dispersedly arranged between the bearing table (400) and the base (600), the rotor permanent magnets (100) of the plurality of groups of magnetic compensation structures are all fixedly arranged at the bottom of the bearing table (400), and the stator permanent magnets (500) are all fixedly arranged at the top of the base (600).