CN114608483A - Device and method for measuring tool nose angle of grating tool - Google Patents
Device and method for measuring tool nose angle of grating tool Download PDFInfo
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- CN114608483A CN114608483A CN202210241246.2A CN202210241246A CN114608483A CN 114608483 A CN114608483 A CN 114608483A CN 202210241246 A CN202210241246 A CN 202210241246A CN 114608483 A CN114608483 A CN 114608483A
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention provides a device and a method for measuring the tool nose angle of a grating tool, wherein the measuring device comprises a substrate; the tool rest adjusting mechanism is fixed on one side of the substrate and is used for adjusting and fixing the position of the grating tool; the light source is fixed on the same side of the substrate as the tool rest adjusting mechanism and is used for emitting measuring beams to the grating tool; the optical signal receiving system is rotationally connected with the substrate and is used for receiving reflected light of the oriented surface and the non-oriented surface of the grating cutter in a rotating mode; a circular grating measuring system fixed on the other side of the substrate for measuring the angular displacement theta generated by the optical signal receiving system from the reflected light of the receiving directional surface to the reflected light of the receiving non-directional surface, so that the knife point angle of the grating tool is
The invention can directly measure the sharp corner of the grating cutter, improves the measurement precision of the sharp corner, ensures the extrusion effect of the grating cutter on the aluminum film, and improves the manufacturing efficiency of large-size echelle gratings.
Description
Technical Field
The invention relates to the technical field of grating ruling, in particular to a device and a method for measuring a tool nose angle of a grating tool.
Background
The large and medium echelle gratings with mechanical etching as a manufacturing method are applied to the field of photoetching by virtue of the advantages of the large and medium echelle gratings in the aspects of diffraction efficiency, resolution, use wave band and the like, and are core unit devices of an immersion type photoetching light source of a high-end photoetching machine.
The main design parameters of the grating groove are the groove apex angle α, the blaze angle β and the groove depth H (see fig. 1). In the actual scribing process, based on a general model of high diffraction efficiency of the grating provided by researchers, the blaze angle β and the groove depth H are considered to be two main parameters influencing the diffraction efficiency of the grating. Therefore, the key point for ensuring the high diffraction efficiency of the echelle grating is to control the extrusion effect of the grating cutter on the aluminum film in the etching process so that the blaze angle beta and the groove depth H meet the design requirements. The blaze angle beta can be accurately adjusted through a grating cutter directional angle measuring device, and the groove depth H mainly depends on the extrusion effect of the grating cutter on the aluminum film, so that the cutter angle of the grating cutter needs to meet the design requirement. In addition, because the echelle grating has a large size, the tool sharp corner needs to be polished after the echelle grating in the single master plate is manufactured, how to accurately measure the tool sharp corner in the process and ensure that the polished tool sharp corner meets the design requirements are the key for realizing the high diffraction efficiency of the large-size echelle grating.
The existing method for measuring the tool nose angle carries out indirect measurement through a carved groove shape, the method comprises the steps of measuring the groove shape carved by a grating by using an atomic force microscope, further obtaining an oriented angle and a non-oriented angle of the grating, and then calculating the numerical value of the tool nose angle by using a formula.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, and provides a device and a method for measuring the tool tip angle of a grating tool, which can directly measure the tool tip angle of the grating tool, improve the measurement precision of the tool tip angle, ensure the extrusion effect of the grating tool on an aluminum film, and improve the manufacturing efficiency of large-size echelle gratings.
In order to achieve the purpose, the invention adopts the following specific technical scheme:
the invention provides a device for measuring the sharp angle of a grating tool, which comprises: a substrate; the tool rest adjusting mechanism is fixed on one side of the substrate and is used for adjusting and fixing the position of the grating tool; the light source is fixed on the same side of the substrate as the tool rest adjusting mechanism and is used for emitting measuring beams to the grating tool; an optical signal receiving system rotatably connected with the substrate for receiving the orientation surface and the non-orientation surface of the grating tool in a rotating mannerReflected light of the surface; a circular grating measuring system fixed on the other side of the substrate for measuring the angular displacement generated by the optical signal receiving system from the reflected light of the receiving oriented surface to the reflected light of the receiving non-oriented surface, wherein the knife-edge angle of the grating tool is
Preferably, the blade holder adjustment mechanism comprises: a base; the X-direction adjusting assembly is fixed on the base and used for adjusting and fixing the grating cutter in the X-axis direction; the Y-direction adjusting component is fixed on the X-direction adjusting component and is used for adjusting and fixing the grating tool in the Y-axis direction; and the Z-direction adjusting component is fixed on the Y-direction adjusting component and is used for adjusting and fixing the grating cutter in the Z-axis direction.
Preferably, the X-direction adjustment assembly comprises: the X-direction guide rail, the X-direction sliding block and the X-direction adjusting screw are arranged on the X-direction guide rail; when the number of the X-direction guide rails is two, a dovetail groove is formed between the two X-direction guide rails, the X-direction sliding block is of a dovetail structure and slides in the dovetail groove, a threaded hole is formed in one of the X-direction guide rails, and the X-direction adjusting screw penetrates through the threaded hole and then pushes the X-direction sliding block tightly; when the number of the X-direction guide rails is one, the X-direction guide rails are dovetail-shaped guide rails, dovetail grooves matched with the dovetail-shaped guide rails are formed in the bottoms of the X-direction sliding blocks, the X-direction sliding blocks slide on the X-direction guide rails, threaded holes are formed in the X-direction sliding blocks, and the X-direction adjusting screws penetrate through the threaded holes to tightly push the dovetail-shaped guide rails.
Preferably, the Y-direction adjustment assembly comprises: the Y-direction adjusting rod slides up and down in the Y-direction sleeve, a threaded hole is formed in the Y-direction sleeve, and the Y-direction adjusting screw penetrates through the threaded hole and then tightly pushes the Y-direction adjusting rod.
Preferably, the Z-direction adjustment assembly comprises: the grating cutting tool comprises a U-shaped block, a tool rest mounting seat and a Z-direction adjusting screw, wherein the grating cutting tool is mounted on the tool rest mounting seat, the bottom of the tool rest mounting seat slides in a U-shaped groove of the U-shaped block, the bottom of the U-shaped block is fixed at the top end of the Y-direction adjusting rod, a threaded hole is formed in the U-shaped block at a position corresponding to the U-shaped groove, and the Z-direction adjusting screw penetrates through the threaded hole to clamp the bottom of the tool rest mounting seat.
Preferably, the optical signal receiving system comprises a rotating shaft, a rocker arm and a receiver, wherein a through hole is formed in the substrate, the rotating shaft is sleeved with a bearing and mounted on the through hole, the rocker arm is fixedly connected with the rotating shaft, the receiver is fixed on the rocker arm, and the receiver is used for receiving reflected light of the oriented surface and the non-oriented surface.
Preferably, the circular grating measuring system comprises a circular grating and a reading head, the circular grating is fixed on the rotating shaft and synchronously rotates along with the rotating shaft, the reading head is fixed on the substrate, and the reading head is used for measuring the rotating angular displacement of the circular grating.
The invention provides a measuring method using a device for measuring the tool nose angle of a grating tool, which comprises the following steps:
s1, mounting the grating cutter on the cutter rest adjusting mechanism, and adjusting the grating cutter to a preset position through the cutter rest adjusting mechanism;
s2, emitting a measuring beam through a light source, wherein the measuring beam is incident on the grating cutter;
s3, receiving the reflected light of the oriented surface and the non-oriented surface of the grating cutter in sequence by rotating the optical signal receiving system, and measuring the angular displacement theta generated from the reflected light of the oriented surface to the reflected light of the non-oriented surface by the optical signal receiving system by the circular grating measuring system, wherein the tool sharp angle of the grating cutter is
Preferably, in step S1, the adjustment of the raster tool by the tool rest adjustment mechanism includes the following three aspects:
adjusting in the X direction: the position of the grating cutter in the X direction is adjusted through the sliding of the X-direction sliding block along the X-direction guide rail, and the grating cutter is locked through the X-direction adjusting screw;
adjusting in the Y direction: the position of the grating cutter in the Y direction is adjusted by the up-and-down sliding of the Y-direction adjusting rod in the Y-direction sleeve, and the grating cutter is locked by the Y-direction adjusting screw;
adjusting in the Z direction: the position of the grating tool in the Z direction is adjusted through the sliding of the tool rest mounting seat along the U-shaped block, and the grating tool is locked through a Z-direction adjusting screw.
Preferably, step S3 specifically includes the following steps:
s31, rotating the receiver fixed with the rocker arm from the oriented surface to the non-oriented surface of the grating cutter by rotating the rocker arm, and stopping rotating when the receiver receives the reflected light of the non-oriented surface;
s32, measuring the angular displacement theta of the rotation of the circular grating from the reflected light of the receiving directional surface to the reflected light of the receiving non-directional surface by the reading head, wherein the knife-edge angle of the grating tool is
Compared with the existing indirect measurement method of the sharp corner, the method can directly measure the sharp corner, so that the sharpened sharp corner meets the design requirements, the surface of the aluminum film extruded and polished by the grating cutter is ensured to deform as expected, a high-quality grating groove shape is formed, and a foundation is laid for finally realizing the technical indexes of high diffraction efficiency and low stray light of the large-size medium-step grating.
Drawings
FIG. 1 is a schematic diagram of a structure of a echelle grating groove;
FIG. 2 is a schematic front view of a device for measuring the nose angle of a grating tool provided in an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a back surface of a device for measuring a tool nose angle of a grating tool provided by an embodiment of the invention.
Wherein the reference numerals include: the device comprises a base plate 1, a tool rest adjusting mechanism 2, a base 201, an X-direction guide rail 202, an X-direction sliding block 203, an X-direction adjusting screw 204, a Y-direction sleeve 205, a Y-direction adjusting rod 206, a Y-direction adjusting screw 207, a U-shaped block 208, a tool rest mounting seat 209, a Z-direction adjusting screw 210, a light source 3, an optical signal receiving system 4, a rotating shaft 401, a rocker arm 402, a receiver 403, a circular grating measuring system 5, a circular grating 501 and a reading head 502.
Detailed Description
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, the same reference numerals are used for the same blocks. In the case of the same reference numerals, their names and functions are also the same. Therefore, detailed description thereof will not be repeated.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
Fig. 2 and 3 show the structure of the device for measuring the nose angle of the grating tool provided by the embodiment of the invention from two angles of the front surface and the back surface.
As shown in fig. 2 and 3, the device for measuring the tool nose angle of the grating tool provided by the embodiment of the invention comprises: the device comprises a substrate 1, a tool rest adjusting mechanism 2, a light source 3, an optical signal receiving system 4 and a circular grating measuring system 5, wherein the tool rest adjusting mechanism 2 and the light source 3 are fixed on the same side of the substrate 1, the tool rest adjusting mechanism 2 is close to the bottom end of the substrate 1, the light source 3 is close to the top end of the substrate 1, namely, the tool rest adjusting mechanism 2 is positioned below the light source 3, the tool rest adjusting mechanism 2 is used for adjusting and fixing the position of a grating tool, the light source 3 is used for emitting measuring beams to the grating tool, and the measuring beams are respectively reflected when entering an oriented surface and a non-oriented surface of the grating tool; the optical signal receiving system 4 is rotatably connected with the substrate 1 and used for receiving reflected light of an oriented surface and a non-oriented surface of the grating tool in a rotating mode, the circular grating measuring system 5 is fixed on the other side of the substrate 1 and used for measuring the angular displacement generated by the optical signal receiving system from the reflected light of the oriented surface to the reflected light of the non-oriented surface, and the measured angular displacement is the tool sharp angle of the grating tool.
The tool rest adjusting mechanism 2 comprises a base 201, an X-direction adjusting assembly, a Y-direction adjusting assembly and a Z-direction adjusting assembly, the X-direction adjusting assembly is fixed on the base 201, the Y-direction adjusting assembly is fixed on the X-direction adjusting assembly, the Z-direction adjusting assembly is fixed on the Y-direction adjusting assembly, and the X-direction adjusting assembly, the Y-direction adjusting assembly and the Z-direction adjusting assembly are respectively used for adjusting and fixing the grating tool along the X-axis direction, the Y-axis direction and the Z-axis direction. The X-axis direction refers to the width direction of the base 201, the Y-axis direction refers to the height direction of the base 201, and the Z-axis direction refers to the length direction of the base 201.
The X-direction adjusting assembly comprises: the X-direction slider 203 is also a trapezoid, the lower bottoms of the two X-direction sliders 203 are upward, so that the X-direction sliders 203 slide in the dovetail grooves formed between the two X-direction sliders 202, one of the X-direction sliders 202 is provided with a threaded through hole matched with the X-direction adjusting screw 204, after the X-direction sliders 203 are adjusted, the X-direction adjusting screw 204 penetrates through the threaded through hole to tightly push the X-direction slider 203, and the X-direction slider 203 is locked.
The above is one structure of the X-direction adjusting assembly, and the X-direction adjusting assembly can be another structure (not shown): the X-direction guide rail is provided with one dovetail groove matched with the dovetail guide rail, the X-direction slide block slides on the dovetail guide rail, the X-direction slide block is provided with a threaded through hole, and the X-direction adjusting screw penetrates through the threaded through hole and then abuts against the dovetail guide rail.
The Y-direction adjusting assembly comprises: the Y-direction adjusting device comprises a Y-direction sleeve 205, a Y-direction adjusting rod 206 and a Y-direction adjusting screw 207, wherein the bottom of the Y-direction sleeve 205 is fixed on an X-direction sliding block 203, the Y-direction adjusting rod 206 is inserted into the Y-direction sleeve 205 and slides up and down in the Y-direction sleeve 205, a threaded through hole is formed in the Y-direction sleeve 205, and the Y-direction adjusting screw 207 penetrates through the threaded through hole and then tightly pushes the Y-direction adjusting rod 206.
Of course, the invention can also replace the Y-direction sleeve 205 and the Y-direction adjusting rod 206 with other structures which can complete up-and-down sliding through cooperation.
The Z-direction adjusting component comprises: the grating adjusting rod comprises a U-shaped block 208, a tool rest mounting seat 209 and a Z-direction adjusting screw 210, wherein the U-shaped block 208 is fixed at the top end of the Y-direction adjusting rod 206, a U-shaped groove is formed in the Z-axis direction of the U-shaped block 208, the bottom of the tool rest mounting seat 209 can slide in the U-shaped groove, a threaded through hole is formed in the U-shaped block 208, and the Z-direction adjusting screw 210 penetrates through the threaded through hole and clamps the bottom of the tool rest mounting seat 209 in the U-shaped groove.
The optical signal receiving system comprises a rotating shaft 401, a rocker arm 402 and a receiver 403, wherein a through hole is formed in a substrate 201, the rotating shaft 401 is mounted on the through hole through a bearing, the rocker arm 402 is fixedly connected with the rotating shaft 401, the rotating shaft 401 is used for achieving rotation of the rocker arm 402, the receiver 403 is fixed on the rocker arm 402, and along with synchronous rotation of the rocker arm 402, the receiver 403 is used for receiving reflected light of an oriented surface and a non-oriented surface of a grating cutter.
The circular grating measuring system comprises a circular grating 501 and a reading head 502, wherein the circular grating 501 is fixed on a rotating shaft 401 and synchronously rotates along with the rotating shaft 401, the reading head 502 is fixed on a substrate 201, and the reading head 502 is used for measuring the rotating angular displacement of the circular grating 501.
The above details describe the structure of the device for measuring the corner of the knife of the grating tool provided in the embodiments of the present invention, and the embodiment of the present invention further provides a method for measuring the corner by using the device for measuring the corner of the knife of the grating tool.
The measuring method of the device for measuring the tool nose angle of the grating tool provided by the embodiment of the invention comprises the following steps:
and S1, mounting the grating cutter on the cutter frame adjusting mechanism, and adjusting the grating cutter to a preset position through the cutter frame adjusting mechanism.
In step S1, the adjustment of the raster tool by the tool rest adjustment mechanism includes three aspects:
adjusting in the X direction: the position of the grating cutter in the X direction is adjusted through the sliding of the X-direction sliding block along the X-direction guide rail, and the grating cutter is locked through the X-direction adjusting screw;
adjusting in the Y direction: the position of the grating cutter in the Y direction is adjusted by the up-and-down sliding of the Y-direction adjusting rod in the Y-direction sleeve, and the grating cutter is locked by the Y-direction adjusting screw;
adjusting in the Z direction: the position of the grating tool in the Z direction is adjusted through the sliding of the tool rest mounting seat along the U-shaped block, and the grating tool is locked through a Z-direction adjusting screw.
The purpose of the tool rest adjusting mechanism for realizing three-direction adjustment of the grating tool is to adjust the grating tool to the center of the extension line of the cutting edge passing through the rotating shaft 401.
And S2, emitting a measuring beam by the light source, wherein the measuring beam is incident on the grating cutter.
The positioning surface and the non-positioning surface of the grating cutter respectively reflect the measuring beams and are received by the optical signal receiving system.
S3, receiving the reflected light of the oriented surface and the non-oriented surface of the grating cutter in sequence by rotating the optical signal receiving system, and measuring the angular displacement theta generated from the reflected light of the oriented surface to the reflected light of the non-oriented surface by the optical signal receiving system by the circular grating measuring system, wherein the tool sharp angle of the grating cutter is
Step S3 specifically includes the following steps:
and S31, rotating the rocker arm to enable the receiver fixed with the rocker arm to rotate from the oriented surface to the non-oriented surface of the grating cutter, and stopping rotating when the receiver receives the reflected light of the non-oriented surface.
S32, measuring the angular displacement theta of the rotation of the circular grating from the reflected light of the receiving directional surface to the reflected light of the receiving non-directional surface by the reading head, wherein the knife-edge angle of the grating tool is
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A kind of grating tool nose angle measuring device, characterized by that, comprising:
a substrate;
the tool rest adjusting mechanism is fixed on one side of the substrate and is used for adjusting and fixing the position of the grating tool;
the light source is fixed on the same side of the substrate as the tool rest adjusting mechanism and is used for emitting measuring beams to the grating tool;
the optical signal receiving system is rotationally connected with the substrate and is used for receiving reflected light of the oriented surface and the non-oriented surface of the grating cutter in a rotating mode;
a circular grating measuring system fixed on the other side of the substrate for measuring the angular displacement generated from the light signal receiving system receiving the reflected light of the oriented surface to the reflected light of the non-oriented surface, so that the sharp angle of the grating tool is
2. The grating tool tip angle measuring device of claim 1, wherein the tool post adjustment mechanism comprises:
a base;
the X-direction adjusting assembly is fixed on the base and used for adjusting and fixing the grating cutter in the X-axis direction;
the Y-direction adjusting component is fixed on the X-direction adjusting component and is used for adjusting and fixing the grating cutter in the Y-axis direction;
and the Z-direction adjusting component is fixed on the Y-direction adjusting component and is used for adjusting and fixing the grating cutter in the Z-axis direction.
3. The grating tool tip angle measuring device of claim 2, wherein the X-direction adjustment assembly comprises: the X-direction guide rail, the X-direction sliding block and the X-direction adjusting screw are arranged on the X-direction guide rail; wherein, the first and the second end of the pipe are connected with each other,
when the number of the X-direction guide rails is two, a dovetail groove is formed between the two X-direction guide rails, the X-direction sliding block is of a dovetail structure and slides in the dovetail groove, a threaded hole is formed in one of the X-direction guide rails, and the X-direction adjusting screw penetrates through the threaded hole and then tightly pushes the X-direction sliding block;
when the number of the X-direction guide rails is one, the X-direction guide rails are dovetail-shaped guide rails, dovetail grooves matched with the dovetail-shaped guide rails are formed in the bottoms of the X-direction sliding blocks, the X-direction sliding blocks slide on the X-direction guide rails, threaded holes are formed in the X-direction sliding blocks, and the X-direction adjusting screws penetrate through the threaded holes and then prop against the dovetail-shaped guide rails tightly.
4. The grating tool nose angle measurement device of claim 3, wherein the Y-direction adjustment assembly comprises: the Y-direction adjusting rod slides up and down in the Y-direction sleeve, a threaded hole is formed in the Y-direction sleeve, and the Y-direction adjusting screw penetrates through the threaded hole and then tightly pushes the Y-direction adjusting rod.
5. The grating tool nose angle measurement device of claim 4, wherein the Z-direction adjustment assembly comprises: the grating tool is installed on the tool rest installation seat, the bottom of the tool rest installation seat is arranged in a U-shaped groove of the U-shaped block in a sliding mode, the bottom of the U-shaped block is fixed to the top end of the Y-direction adjusting rod, a threaded hole is formed in the U-shaped block corresponding to the U-shaped groove, and the Z-direction adjusting screw penetrates through the threaded hole and then clamps the bottom of the tool rest installation seat tightly.
6. The apparatus according to claim 5, wherein the optical signal receiving system comprises a shaft, a rocker arm and a receiver, the shaft is disposed on the substrate, the shaft is mounted on the shaft via a bearing, the rocker arm is fixedly connected to the shaft, the receiver is fixed to the rocker arm, and the receiver is configured to receive the reflected light from the directional surface and the non-directional surface.
7. The apparatus according to claim 6, wherein the circular grating measuring system comprises a circular grating fixed on the rotating shaft and rotating synchronously with the rotating shaft, and a reading head fixed on the substrate for measuring the angular displacement of the circular grating.
8. A measuring method using the device for measuring the nose angle of the grating tool according to claim 7, comprising the steps of:
s1, mounting the grating cutter on a cutter rest adjusting mechanism, and adjusting the grating cutter to a preset position through the cutter rest adjusting mechanism;
s2, emitting a measuring beam by a light source, wherein the measuring beam is incident on the grating cutter;
s3, sequentially receiving the reflected light of the oriented surface and the non-oriented surface of the grating tool by rotating the optical signal receiving system, and simultaneously measuring the angular displacement generated from the receiving of the reflected light of the oriented surface to the receiving of the reflected light of the non-oriented surface by the optical signal receiving system through the circular grating measuring system, namely the tool point angle of the grating tool.
9. The method for measuring the tool tip angle of a grating tool according to claim 8, wherein the adjustment of the grating tool by the tool rest adjustment mechanism in step S1 includes the following three aspects:
adjusting in the X direction: the position of the grating cutter in the X direction is adjusted through the sliding of the X-direction sliding block along the X-direction guide rail, and the grating cutter is locked through an X-direction adjusting screw;
adjusting in the Y direction: the position of the grating cutter in the Y direction is adjusted by the up-and-down sliding of the Y-direction adjusting rod in the Y-direction sleeve, and the grating cutter is locked by the Y-direction adjusting screw;
adjusting in the Z direction: the position of the grating tool in the Z direction is adjusted through the sliding of the tool rest mounting seat along the U-shaped block, and the grating tool is locked through a Z-direction adjusting screw.
10. The method for measuring the tool tip angle of the grating tool according to claim 8, wherein the step S3 comprises the following steps:
s31, rotating a receiver fixed with the rocker arm from the oriented surface to the non-oriented surface of the grating cutter by rotating the rocker arm, and stopping rotating when the receiver receives the reflected light of the non-oriented surface;
s32, measuring the angular displacement theta of the circular grating when the receiver receives the reflected light of the oriented surface and the reflected light of the non-oriented surface through the reading head, wherein the angle of the knife point of the grating tool is
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|---|---|---|---|---|
| CN116449475A (en) * | 2023-06-16 | 2023-07-18 | 中国科学院长春光学精密机械与物理研究所 | Scribing depth adjusting device, tool rest system and adjusting method |
| CN116449475B (en) * | 2023-06-16 | 2023-09-01 | 中国科学院长春光学精密机械与物理研究所 | Scribing depth adjusting device, tool rest system and adjusting method |
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| CN114608483B (en) | 2023-03-10 |
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