CN114602875A

CN114602875A - Organic cleaning equipment for MEMS (micro-electromechanical systems) process

Info

Publication number: CN114602875A
Application number: CN202210140575.8A
Authority: CN
Inventors: 吴汉涛; 薛殿友; 孙珏
Original assignee: Wuxi Evergrand Electronic Scientific Technology Co ltd
Current assignee: Wuxi Evergrand Electronic Scientific Technology Co ltd
Priority date: 2022-02-16
Filing date: 2022-02-16
Publication date: 2022-06-10
Anticipated expiration: 2042-02-16
Also published as: CN114602875B

Abstract

The invention discloses an organic cleaning device for MEMS (micro electro mechanical System) process, which belongs to the technical field of chip cleaning and comprises a cleaning box body, wherein a feed inlet and a discharge outlet are respectively arranged at two sides of the cleaning box body, an organic cleaning pool is arranged in the cleaning box body and is communicated with the feed inlet, the feed inlet is communicated with the organic cleaning pool through an input track, a blowing cylinder is arranged on the input track, an output track is arranged at one side of the organic cleaning pool, which is far away from the input track, an inspection box is arranged at one side of the output track, which is far away from the organic cleaning pool, a packaging assembly is arranged in the inspection box, the discharge outlet is communicated with the packaging assembly through a chute, a control panel is arranged on the cleaning box body and is connected with the organic cleaning pool, the output track, the inspection box and the packaging assembly through wires, the invention has the advantages of organic cleaning and packaging aiming at the MEMS process, and avoids the problem of secondary pollution, the invention can effectively improve the cleaning effect while saving the organic solvent.

Description

Organic cleaning equipment for MEMS (micro-electromechanical systems) process

Technical Field

The invention relates to the technical field of chip cleaning, in particular to organic cleaning equipment for an MEMS (micro-electromechanical systems) process.

Background

MEMS, i.e. micro-electro-mechanical system, is a leading-edge research field of multidisciplinary intersection developed on the basis of microelectronic technology, has become one of the major scientific and technological fields of world attention after more than forty years of development, relates to various subjects and technologies such as electronics, machinery, materials, physics, chemistry, biology, medicine and the like, has wide application prospect, however, in the manufacturing process and the installation process of the MEMS, the situation that welding is not firm due to impurities often occurs, the MEMS sensor is fragile, the internal structure of the MEMS sensor is damaged by the conventional cleaning method, thereby leading the MEMS sensor to fail and causing certain economic loss, and the traditional cleaning method can not clean the MEMS sensor step by step and also can cause the damage of the sensor, therefore, people focus the sunlight on the organic cleaning, and the organic solvent cleans the MEMS sensor or the chip, so that the internal structure of the MEMS sensor or the chip can be prevented from being damaged.

Conventional organic cleaning equipment such as: the Chinese invention patent specification CN202010336726.8 discloses a full-automatic organic cleaning device, which comprises a cleaning table top provided with a feeding table, a station groove, a first blowing platform, a second blowing platform and a discharging table, wherein the cleaning table top is provided with a movable manipulator, one side of the manipulator is provided with a movable connecting plate, an operation cavity is arranged below the cleaning table top, the movable connecting plate is positioned in the operation cavity, a first moving mechanism is arranged in the operation cavity, the station groove comprises an ultrasonic cleaning groove, an ultrasonic overflow groove and an organic soaking groove, the manipulator is provided with a rotating mechanism, and the rotating mechanism drives a flower basket to rotate. The invention can realize the functions of automatic deoiling, rinsing, spraying, dewatering, turning, positioning and blowing and the like of the special-shaped part, can liberate people from a severe and dangerous working environment, reduces pollution brought by manpower, avoids the influence of noise on a human body, but has obvious use of an organic solvent in the production process and wastes resources, and meanwhile, the conventional cleaning means is not suitable for cleaning micro parts such as a sensor and the like, is easy to cause damage, and the cleaning equipment lacks of an inspection function and is easy to cause secondary pollution and other problems in the conveying process.

Disclosure of Invention

The present invention is directed to an organic cleaning apparatus for MEMS process to solve the above problems.

In order to solve the technical problems, the invention provides the following technical scheme:

the cleaning equipment comprises a cleaning box body, wherein a feed inlet and a discharge outlet are respectively arranged on two sides of the cleaning box body, an organic cleaning pool is arranged in the cleaning box body, the organic cleaning pool is communicated with the feed inlet, the feed inlet is communicated with the organic cleaning pool through an input track, a blowing cylinder is arranged on the input track, an output track is arranged on one side of the organic cleaning pool, which is far away from the input track, an inspection box is arranged on one side of the output track, which is far away from the organic cleaning pool, a packaging assembly is arranged in the inspection box, the discharge outlet is communicated with the packaging assembly through a chute, a control panel is arranged on the cleaning box body, the control panel is connected with the organic cleaning pool, the output track, the inspection box and the packaging assembly through wires, collected MEMS sensors enter the cleaning box body from the feed inlet one by one, then enter the organic cleaning pool through the input track, the organic cleaning agent is filled in the organic cleaning pool, and the MEMS sensors can be immersed in the organic cleaning agent, after a period, oil stain and impurity on the MEMS sensor will be dissolved in organic sanitizer, and the MEMS sensor that the clearance was accomplished will be transmitted to the inspection box under orbital effect of output in, is examined by the inspection box, and the unqualified MEMS sensor of inspection will be rinsed once more in being conveyed back to organic cleaning tank, and qualified product will be packed and deliver to discharge gate department through the spout.

Be provided with in the organic cleaning pond and catch the claw down, go up to catch the claw and include: the device comprises a trigger catching tooth, a clamping catching tooth and a cleaning cylinder, wherein the trigger catching tooth and a plurality of clamping catching teeth are arranged on a catching disc, the trigger catching tooth is rotationally connected with the catching disc, a slide way is arranged in the catching disc, the clamping catching tooth is arranged in the slide way and is in sliding connection with the slide way, the part of the trigger catching tooth, which is positioned in the catching disc, is respectively abutted against each clamping catching tooth, a spring is arranged between the part of the trigger catching tooth, which is positioned in the catching disc, and the catching disc, a cleaning cylinder is arranged on the catching disc, the cleaning cylinder is arranged at the top end of an organic cleaning pool, the trigger catching tooth is positioned at one end of an input track, a sucker is arranged on a lower catching claw, the lower catching claw is positioned below an upper catching claw, the lower catching claw is positioned at one side of an output track, the lower catching claw is connected with the organic cleaning pool through a connecting support, the connecting support is rotationally connected with the organic cleaning pool, and the lower catching claw is rotationally connected with the connecting support, the input rail inputs the MEMS sensor, the MEMS sensor supports against the trigger capture tooth, the trigger capture tooth is separated from the clamping capture tooth, the trigger capture tooth moves downwards and grasps the MEMS sensor, the cleaning cylinder moves downwards until the MEMS sensor is completely immersed into the organic cleaning agent, after a period of time of soaking, the cleaning cylinder continues to move downwards and finally supports against the lower capture claw, the upper capture claw can absorb the input rail input MEMS sensor, the MEMS sensor supports against the trigger capture tooth, the trigger capture tooth is separated from the clamping capture tooth, a sucker on the trigger capture tooth absorbs the MEMS sensor and jacks up the MEMS sensor, the jacked sensor can enable the clamping capture tooth to move upwards and finally separate from the trigger capture tooth, and finally the MEMS sensor can be fixed on the lower capture claw, so that the part of the MEMS sensor, which is not contacted with the organic cleaning agent, is contacted with the organic cleaning agent, the cleaning in all aspects is achieved, and the cleaned MEMS sensor is conveyed to an output rail without any margin.

A filter box is arranged on one side of the organic cleaning pool, the filter box is communicated with the organic cleaning pool through an input pipe and a return pipe, the return pipe is arranged at the bottom end of the organic cleaning pool, the input pipe is arranged on one side of the organic cleaning pool, the filter box is arranged in the cleaning box body, an output motor is arranged in the input pipe and is connected with the inner wall of the input pipe through a bracket, the organic cleaning pool is a funnel-shaped cleaning pool, a spiral guide plate is arranged on the inner wall of the bottom end of the organic cleaning pool, the spiral direction of the spiral guide plate is the same as the earth rotation direction, a return motor is arranged in the return pipe and is connected with the inner wall of the return pipe through a bracket, a return impeller is arranged at the output end of the return motor, a blade on the return impeller is rotatably connected with a return impeller shaft through a spring shaft, a filter screen is arranged in the filter box, the filter box is adjacent to the organic cleaning pool, and the filter screen is rotatably connected with the filter box, the edge of the filter screen is in sliding contact with the filter box, a heating plate is arranged in the filter box, an oil discharge plate is arranged on the filter box, the oil discharge plate is positioned above the heating plate, an included angle alpha between the heating plate and the oil discharge plate is more than or equal to 45 degrees and less than or equal to 60 degrees, an organic cleaning solvent in the organic cleaning pool cleans the MEMS sensor and dissolves oil stains and dust on the MEMS sensor, after a period of time, a backflow motor in a backflow pipe is started to start to rotate, a backflow impeller is opened in the rotating process, the organic cleaning agent in the organic cleaning pool flows into the backflow pipe and generates certain suction force, the flow is guided by a spiral guide plate in the organic cleaning pool, the organic cleaning agent flows out in a vortex shape and drives surrounding air, the flow rate of the organic cleaning agent is accelerated at the moment, vortex air is formed on an upper catching claw or a lower catching claw, and the adhesive force of an oil film on the MEMS sensor is weakened, the impurities such as dust and the like on the MEMS sensor are dried and can be cleaned more easily, the cleaning method is selected according to the actual situation that the MEMS sensor is arranged in a northern hemisphere, when the MEMS sensor is arranged in a northern hemisphere, an object moving in the southern and northern direction can deflect to the right due to the influence of the rotating deflection force, the spiral guide plate is arranged anticlockwise, when the MEMS sensor is arranged in the southern hemisphere, the object moving in the southern and northern direction can deflect to the left, the spiral guide plate is arranged clockwise to conform to the autorotation of the earth, the flow rate and the formation speed of vortices can be increased, the phenomenon that dirty organic cleaning solvent is remained on the MEMS sensor due to the reduction of cyclone formed by reversely mounting the guide plate and cannot be cleaned and the burden of repeated cleaning is caused can be avoided, at the moment, the organic cleaning agent passing through the filter box can be filtered by the filter screen to remove insoluble substances in the organic cleaning solvent, and can be attached to the filter screen, and the heating plate can heat the organic cleaning solvent, evaporating oil substances in the oil discharge plate, condensing the oil substances again on the oil discharge plate, enabling the oil substances to flow into the garbage recycling box along the oil discharge plate, finishing temperature rise of a filtered organic cleaning agent, enhancing decontamination capability, simultaneously increasing the utilization rate of a heating plate in the filtering box due to adjacent structural design, starting an output motor, sending the organic cleaning agent into the organic cleaning pool again, cleaning the MEMS sensor again, easily cleaning pollutants on the MEMS sensor due to vortex air, influencing the impurity discharge effect of the evaporated impurities due to an included angle between the heating plate and the oil discharge plate, and enabling the formed oily substances to fall back into the filtering box due to gravity when the oil discharge plate is not discharged on the oil discharge plate and enabling the discharge speed of the oil pollutants to be too slow when the included angle is larger than 60 degrees, the oil substances are still condensed in the discharging process, the gravity is increased, the oil substances fall into the filter box again and pollute the evaporated organic cleaning agent, and when the angle is between 45 degrees and 60 degrees, the moving speed of the oil substances is matched with the condensing speed, so that the oil substances cannot fall off to pollute the organic cleaning solvent.

The output track comprises a transportation track, a plurality of consignment sliding blocks are arranged on the transportation track, the consignment sliding blocks are fixedly connected with the transportation track through connecting rods, a transportation housing is arranged on the transportation track, two ends of the transportation housing are respectively communicated with the inspection box and the organic cleaning pool, the transportation housing is respectively and vertically arranged with the inspection box and the organic cleaning pool, a spray head is arranged on the transportation housing, the spray head is communicated with the filter box, two ends of the consignment sliding blocks are respectively provided with a water collecting tank, the spray range of the spray head is the part of the transportation track in the organic cleaning pool, the part of the transportation track in the organic cleaning pool is close to the lower catching claw, the input end of the transportation track is a stepping motor and is connected with the control panel through a wire, and the vertically arranged setting mechanism can increase the structural stability and simultaneously enable the water collecting tank to stably keep the polymerization degree of the water film and match the tension of the organic cleaning agent, make the water film can not take place to rock and spill over, the output track drives the delivery slider and removes, move to in the organic cleaning pool, and catch the MEMS sensor on the claw under coming from, the shower head will spray the delivery slider, at the in-process that sprays, will persist some organic cleaner in the collection basin, these organic cleaner will be under the tension of the organic cleaner in the collection basin, form one water film on the MEMS sensor surface, and spray the in-process and also can rinse the delivery slider, avoid appearing secondary pollution's problem, this water film will no longer take place the outflow, and finally move to the inspection box steadily, it can make the conveying success rate promote greatly to be close to lower catching claw, reduce because the influence of the flow of organic cleaner to MEMS sensor conveying.

The side of the transportation track, which is far away from the organic cleaning pool, is provided with an inspection box, the inspection box comprises an inspection box body and a detection probe, the detection probe is connected with the inspection box body in a sliding way, the transportation track passes through the inspection box body, the inspection box body is fixedly connected with the cleaning box body, the inspection box body is communicated with the organic cleaning pool through a transportation cover shell, the detection probe is provided with an ultrasonic device, the inspection box body is provided with a pressure sensing film, the pressure sensing film is sleeved on the detection probe, the pressure sensing film and the detection probe are positioned above a consignment slide block, the pressure sensing film is arranged in parallel with the consignment slide block, one end of the pressure sensing film is fixedly connected with the inspection box body, one end of the pressure sensing film, which is far away from the inspection box body, is provided with a magnetic stripe, the magnetic stripe is positioned in a pressure sensing coil, the output end of the pressure sensing coil is connected with a current detection assembly, the ultrasonic device is connected with a control panel through a wire, when the consignment slide block moves into the inspection box, at the moment, a water film of an organic cleaning agent is attached to a carrying sliding block, an ultrasonic device on a detection probe is started, the ultrasonic device generates ultrasonic waves, the ultrasonic waves vibrate on an MEMS sensor and the water film, impurities which are not removed on the MEMS sensor flow under the action of the ultrasonic waves, the ultrasonic waves rebound and act on a pressure sensing film, the pressure sensing film vibrates to drive a magnetic strip to slide, the magnetic strip moves in a pressure sensing coil to generate induction current, the induction current is transmitted into a current detection assembly, the current detection assembly transmits the current to a control panel, the control panel displays specific current values, when the MEMS sensor and the water film are clean, the pressure sensing film vibrates regularly and does not change after the current values are displayed on the control panel, when the MEMS sensor and the water film are not clean, because the migration of pollutant, the direction and the frequency of sound wave bounce-back will change, the vibrations of irregularity will take place for pressure sensing film, the last electric current numerical value that will change of control panel, and deduce the size and the state of pollutant according to numerical value change frequency and numerical value change size, control panel will regulate and control the transportation track according to specific numerical value, when clean, prepare to send to on the packing subassembly, when unclean, loopback to in the organic cleaning pool, wash once more, pressure sensing film can improve current variation's stability with the structure of consignment slider parallel arrangement, thereby make to detect more stably.

A rotary motor is arranged in each supporting slide block, a supporting groove is arranged on the output end of the rotary motor, the supporting groove is rotationally connected with the supporting slide block, a plurality of calipers are arranged on the supporting groove, each caliper is rotationally connected with the supporting groove, the plane where the supporting groove is located and the plane where the supporting slide block is located are on the same plane, so that the calipers clamp the MEMS sensor more stably and do not fall off, a movable connecting rod is arranged at the part of each caliper located in the supporting groove and is slidably connected with the supporting groove, the movable connecting rod is rotationally connected with the calipers, one end, away from the calipers, of the movable connecting rod is connected with the supporting groove through a spring, the highest end of the supporting groove is lower than the upper surface of the supporting slide block, a packing assembly is arranged below the supporting groove, a detection probe is located above the supporting groove, the rotary motor is connected with a control panel through a wire, and when the MEMS sensor is qualified, the supporting slide block drives the supporting groove to move, in the moving process, the rotating motor rotates, the movable connecting rod in the supporting groove drives the calipers to move under the action of centrifugal force, the position of the MEMS sensor is firmly limited, the MEMS sensor is prevented from being thrown away, under the high-speed rotation of the rotating motor, an organic cleaning agent in the MEMS sensor is dried by spin, the rotating motor continuously works in the process of moving the conveying track, after the rotating motor continuously works for a period of time, the rotating motor stops, and the MEMS sensor is arranged on the packaging assembly.

The packaging assembly is arranged in the inspection box body and comprises a film placing frame, a breathing air gun and a heating rod, the film placing frame is arranged in the inspection box body, the heating rod is arranged on the film placing frame, the film placing frame is positioned below a supporting slide block on a conveying track, the film placing frame 901 is arranged in parallel with the conveying track, the heating rod is in sliding connection with the film placing frame, the breathing air gun is arranged on the film placing frame and is connected with an air pump, the output end of the breathing air gun is positioned between the heating rods, a film inlet roller is arranged in the film placing frame and is rotationally connected with the film placing frame, one side of the film placing frame, which is far away from the film inlet roller, is provided with a film inlet cylinder, the film inlet cylinder is connected with the film inlet roller through a plastic film, the film inlet cylinder is fixedly connected with the inspection box body, the film placing frame is of a sandwich type structure, the plastic film flows through the interlayer of the film placing frame, a sliding groove is arranged below the film placing frame, the heating rod is connected with the breathing air gun and a control panel through a lead wire, the MEMS sensor which is spun dry loses the restriction of calipers and drops downwards, and finally drops on a plastic film on a film placing frame, the parallel arrangement can also ensure that the MEMS sensor does not slide off when dropping, the packaging error rate is greatly reduced, a breathing air gun blows air to the plastic film, so that the plastic film deforms downwards, meanwhile, the blowing process can blow away turbid air near the MEMS sensor to achieve the purification effect after drying, the blowing inert gas can also achieve the effect of preventing oxidation, the internal structure is protected from being corroded and damaged, meanwhile, the blown air can also dry the MEMS sensor again, the phenomenon that the MEMS sensor is adhered with substances such as dust again due to water vapor can be avoided, after the fixed time, the heating rod moves towards the middle, at the moment, the plastic film is also gathered towards the middle, the breathing air gun starts to perform air suction operation, so that the plastic film is in a vacuum state, the heating rod finally fuses the plastic film to finish the packaging operation, flows out of the cleaning box body along with the sliding groove, finishes one-time packaging, and then the film feeding roller rotates to transmit a new plastic film.

Still be provided with the rubbish collection box in the cleaning box body, be provided with on the rubbish collection box and wash and drench the head, the rubbish collection box sets up in the filter screen below, wash and drench the head setting in the filter screen top, be provided with the visual window on the cleaning box body, it can wash the filter screen to wash the head, the water that has washed the filter screen will take impurity and other materials to enter into the rubbish collection box in, the filter screen of clearing up afterwards will be sent into the filter box in, prepare to carry out filtering operation once more.

Compared with the prior art, the invention has the following beneficial effects: 1. the invention uses the organic solvent to soak the MEMS sensor, oil stains and other impurities on the soaked sensor are dissolved by the organic solvent and fall off the MEMS sensor, and meanwhile, the organic solvent can be recycled, thereby greatly saving the use of the organic solvent,

2. the device for repeatedly filtering and using the organic cleaning agent is adopted, the filtered organic cleaning agent can continuously and repeatedly clean the MEMS sensor, the cleaning effect of the heated organic cleaning agent on the sensor is better, eddy air can also appear in the backflow process, the eddy air weakens and takes away oil stains which are not easy to fall off from the MEMS sensor, and when the heated organic cleaning solvent is cleaned again, some oil substances can be thoroughly removed.

3. The invention adopts a closed transportation method, can greatly avoid the problem of secondary pollution in the transmission process, and meanwhile, a stable cleaning agent film is attached to the MEMS sensor in the transportation process, so that the detection of qualification is more convenient while pollution is avoided.

4. The invention adopts an integrated packaging device, directly packages after cleaning, adopts a vacuum packaging mode, avoids the problem of secondary pollution in the taking-out or conveying process and realizes the final cleaning effect.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic three-dimensional structure of the present invention;

FIG. 2 is a schematic view of the internal structure of the cleaning tank of the present invention;

FIG. 3 is a schematic view of the internal structure of the organic cleaning tank of the present invention;

FIG. 4 is a schematic view of the upper catch pawl of the present invention;

FIG. 5 is a schematic view of the internal structure of the inspection cabinet of the present invention;

FIG. 6 is a schematic view of the internal structure of the filtration tank of the present invention;

FIG. 7 is a schematic view of the structure of the invention showing the fit relationship between the transportation rail and the consignment slide;

FIG. 8 is a schematic view of the enlarged partial structure A of FIG. 5 in accordance with the present invention;

FIG. 9 is a schematic view of the internal structure of the shipping slide of the present invention;

FIG. 10 is a schematic view of the construction of the garbage collection bin of the present invention;

in the figure: 1. cleaning the box body; 2. a feed inlet; 3. a discharge port; 4. an organic cleaning tank; 5. inputting a track; 6. a blowing cylinder; 7. an output track; 701. a transportation track; 702. a consignment slide block; 703. a transport housing; 704. a shower head; 705. a water collecting tank; 706. a rotating electric machine; 707. a carrying groove; 708. a caliper; 710. a movable connecting rod; 8. an inspection box; 801. inspecting the box body; 802. detecting a probe; 803. an ultrasonic device; 804. a pressure-sensitive film; 805. a magnetic strip; 806. a pressure sensing coil; 9. a packaging component; 901. placing a membrane frame; 902. a breathing air gun; 903. heating the roller; 904. a film feeding roller; 905. a film feeding cylinder; 10. a chute; 11. a control panel; 12. an upper catch pawl; 1201. triggering the catching teeth; 1202. clamping the catching teeth; 1203. cleaning the air cylinder; 1204. a catch tray; 13. a lower catch claw; 14. connecting the supporting columns; 15. a filter box; 1501. an input tube; 1502. a return pipe; 1503. an output motor; 1504. a reflux motor; 1505. a return impeller; 1506. heating plates; 1507. an oil draining plate; 1508. a filter screen; 16. a garbage recycling bin; 17. and (5) cleaning shower heads.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-8, the present invention provides the following technical solutions: the cleaning equipment comprises a cleaning box body 1, wherein a feed inlet 2 and a discharge outlet 3 are respectively arranged on two sides of the cleaning box body 1, an organic cleaning pool 4 is arranged in the cleaning box body 1, the organic cleaning pool 4 is communicated with the feed inlet 2, the feed inlet 2 is communicated with the organic cleaning pool 4 through an input track 5, a blowing barrel 6 is arranged on the input track 5, an output track 7 is arranged on one side of the organic cleaning pool 4, which is far away from the input track 5, an inspection box 8 is arranged on one side of the output track 7, which is far away from the organic cleaning pool 4, a packing assembly 9 is arranged in the inspection box 8, the discharge outlet 3 is communicated with the packing assembly 9 through a chute 10, a control panel 11 is arranged on the cleaning box body 1, the control panel 11 is connected with the organic cleaning pool 4, the output track 7, the inspection box 8 and the packing assembly 9 through wires, collected MEMS sensors enter the cleaning box body 1 from the feed inlet 2 one by one, subsequently entered into in organic washing pond 4 by input track 5, be equipped with organic cleaner in the organic washing pond 4, the MEMS sensor will be soaked in organic cleaner, a period of time later, oil stain and impurity on the MEMS sensor will be dissolved in organic cleaner, the MEMS sensor that the clearance was accomplished will be transmitted to in inspection box 8 under output track 7's effect, examine by inspection box 8, the unqualified MEMS sensor of inspection will be conveyed back to and wash in the organic washing pond 4 once more, qualified product will be packed and deliver to discharge gate 3 department through spout 10.

An upper catching claw 12 and a lower catching claw 13 are arranged in the organic cleaning pool 4, and the upper catching claw 12 comprises: the device comprises a trigger catching tooth 1201, clamping catching teeth 1202 and a cleaning cylinder 1203, wherein the trigger catching tooth 1201 and a plurality of clamping catching teeth 1202 are arranged on a catching disc 1204, the trigger catching tooth 1201 is rotationally connected with the catching disc 1204, a slide way is arranged in the catching disc 1204, the clamping catching teeth 1202 are arranged in the slide way and are in sliding connection with the slide way, the part, located in the catching disc 1204, of the trigger catching tooth 1201 abuts against each clamping catching tooth 1202 respectively, a spring is arranged between the part, located in the catching disc 1204, of the trigger catching tooth 1201 and the catching disc 1204, the cleaning cylinder 1203 is arranged on the catching disc 1204, the cleaning cylinder 1203 is arranged at the top end of an organic cleaning pool 4, the trigger catching tooth 1201 is located at one end of an input rail 5, a sucker is arranged on a lower catching claw 13, the lower catching claw 13 is located below an upper catching claw 12, the lower catching claw 13 is located at one side of an output rail 7, and the lower catching claw 13 is connected with the organic cleaning pool 4 through a connecting support 14, the connecting support 14 is rotatably connected with the organic cleaning pool 4, the lower capturing claw 13 is rotatably connected with the connecting support 14, the input rail 5 inputs the MEMS sensor, the MEMS sensor supports against the trigger capturing tooth 1201, the trigger capturing tooth 1201 is separated from the clamping capturing tooth 1202, the trigger capturing tooth 1201 moves downwards and grabs the MEMS sensor, the cleaning cylinder 1203 moves downwards until the MEMS sensor is completely immersed in the organic cleaning agent, after a period of soaking, the cleaning cylinder 1203 continues to move downwards and finally supports against the lower capturing claw 13, the lower capturing claw 13 supports against the input rail 5 to input the MEMS sensor, the MEMS sensor supports against the trigger capturing tooth 1201, the trigger capturing tooth 1201 is separated from the clamping capturing tooth 1202, a sucker on the trigger capturing tooth 1201 supports against the MEMS sensor and supports the MEMS sensor upwards, the lifted sensor enables the clamping capturing tooth 1202 to move upwards and finally separates from the trigger capturing tooth 1201, finally, the MEMS sensor is fixed on the lower capturing claw 13, so that the part of the MEMS sensor which is not contacted with the organic cleaning agent is contacted with the organic cleaning agent, the full-aspect cleaning is achieved, no margin is left, and the cleaned MEMS sensor is conveyed to the output rail 7.

A filter box 15 is arranged on one side of an organic cleaning pool 4, the filter box 15 is communicated with the organic cleaning pool 4 through an input pipe 1501 and a return pipe 1502, the return pipe 1502 is arranged at the bottom end of the organic cleaning pool 4, the input pipe 1501 is arranged on one side of the organic cleaning pool 4, the filter box 15 is arranged in a cleaning box body 1, an output motor 1503 is arranged in the input pipe 1501, the output motor 1503 is connected with the inner wall of the input pipe 1501 through a bracket, the organic cleaning pool 4 is a funnel-shaped cleaning pool, a spiral guide plate 401 is arranged on the inner wall of the bottom end of the organic cleaning pool 4, the spiral direction of the spiral guide plate 401 is the same as the earth rotation direction, a return motor 1504 is arranged in the return pipe 1502, the return motor 1504 is connected with the inner wall of the return pipe 1502 through a bracket, a return impeller 1505 is arranged at the output end of the return motor 1504, blades on the return impeller are rotationally connected with the return impeller shaft 1505 through a spring shaft, a filter screen 1508 is arranged in the filter box 15, the filter box 15 is adjacent to the organic cleaning pool 4, the filter screen 1508 is rotatably connected with the filter box 15, the edge of the filter screen 1508 is in sliding contact with the filter box 15, a heating plate 1506 is arranged in the filter box 15, an oil discharge plate 1507 is arranged on the filter box 15, the oil discharge plate 1507 is positioned above the heating plate 1506, an included angle alpha between the heating plate 1506 and the oil discharge plate 1507 is not less than 45 degrees and not more than 60 degrees, the organic cleaning solvent in the organic cleaning pool 4 cleans the MEMS sensor and dissolves oil stains and dust on the MEMS sensor, after a period of time, the reflux motor 1504 in the reflux pipe 1502 is started to rotate, in the rotating process, the reflux impeller 1505 is opened, the organic cleaning agent in the organic cleaning pool 4 flows into the reflux pipe 1502 and generates a certain suction force, the flow is guided by the spiral guide plate in the organic cleaning pool 4, the organic cleaning agent flows out in a vortex shape, and drives the surrounding air, the flow rate of the organic cleaning agent is accelerated at the moment, and eddy air is formed on the upper catching claw 12 or the lower catching claw 13, so that the adhesive force of an oil film on the MEMS sensor is weakened, some dust and other impurities on the organic cleaning agent are dried and are more easily cleaned, the organic cleaning agent is selected according to the actual situation of being arranged in the south and north hemispheres, when the MEMS sensor is arranged in the north hemispheres, an object moving along the south and north directions can deflect to the right due to the influence of the rotational deflection force, the spiral guide plate is arranged anticlockwise, when the organic cleaning agent is arranged in the south hemispheres, an object moving along the south and north directions can deflect to the left, the spiral guide plate is arranged clockwise, the guide plate is arranged by following the rotation of the earth, the flow rate and the forming speed of the eddy can be increased, and the phenomenon that the air flow formed by reversely arranging the guide plate is reduced, the wind force received by the MEMS sensor is reduced, and dirty organic cleaning solvent is remained on the MEMS sensor can be avoided, the organic cleaning agent passing through the filter box 15 can be filtered by the filter screen 1508 to remove insoluble substances and can be attached to the filter screen 1508, the heating plate 1506 heats the organic cleaning solvent to evaporate oil substances therein, the oil substances can be condensed on the oil discharge plate 1507 again and flow into the garbage recycling box 16 along the oil discharge plate 1507, the temperature of the filtered organic cleaning agent is increased, the decontamination capability is enhanced, meanwhile, the utilization rate of the heating plate 1506 in the filter box 15 can be increased due to the adjacent structural design, the output motor 1503 is started, the organic cleaning agent can be sent into the organic cleaning pool 4 again and cleaned again for the MEMS sensor, due to the effect of vortex air, the organic cleaning agent can more easily clean pollutants on the MEMS sensor, and the angle between the heating plate 1506 and the oil discharge plate 1507 can influence the evaporated impurity discharge effect, when the included angle is less than 45 degrees, the oily substance formed is caused by gravity, so that the oily substance falls back into the filter box 15 when the oil drain plate 1507 is not drained on the oil drain plate 1507, when the included angle is greater than 60 degrees, the oil pollutant discharge speed is too low, the oily substance can be continuously condensed in the discharge process, the gravity is increased, the oily substance can fall into the filter box 15 again, the evaporated organic cleaning agent is polluted, and when the included angle is between 45 degrees and 60 degrees, the moving speed and the condensation speed of the oily substance are matched, so that the oily substance cannot fall off to pollute the organic cleaning solvent.

The output track 7 comprises a transportation track 701, a plurality of consignment sliding blocks 702 are arranged on the transportation track 701, the consignment sliding blocks 702 are fixedly connected with the transportation track 701 through connecting rods, a transportation cover housing 703 is arranged on the transportation track 701, two ends of the transportation cover housing 703 are respectively communicated with the inspection box 8 and the organic cleaning pool 4, the transportation cover housing 703 is respectively and vertically arranged with the inspection box 8 and the organic cleaning pool 4, a spray head 704 is arranged on the transportation cover housing 703, the spray head 704 is communicated with a filter box 15, two ends of the consignment sliding blocks 702 are respectively provided with a water collecting groove 705, the spray range of the spray head 704 is the part of the transportation track 701 in the organic cleaning pool 4, the part of the transportation track 701 in the organic cleaning pool 4 is close to a lower catching claw 13, the input end of the transportation track 701 is a stepping motor and is connected with a control panel 11 through a lead, the vertically arranged setting mechanism increases the structural stability, the water collecting tank 705 can stably keep the polymerization degree of the water film and is matched with the tension of the organic cleaning agent, so that the water film cannot shake and overflow, the output rail 7 drives the carrying sliding block 702 to move to the organic cleaning pool 4 and to catch the MEMS sensor from the lower catching claw 13, the spraying head 704 sprays the carrying sliding block 702, some organic cleaning agent is remained in the water collecting tank 705 in the spraying process, the organic cleaning agent forms a water film on the surface of the MEMS sensor under the tension of the organic cleaning agent in the water collecting tank 705, the carrying sliding block 702 is also cleaned in the spraying process, the problem of secondary pollution is avoided, the water film does not flow outwards any more and is finally stably operated to the inspection box 8, when the lower catching claw is close to the lower catching claw 13, the falling point of the MEMS sensor is increased, the moving distance is reduced, and the influence of the flow of the organic cleaning agent on the transmission of the MEMS sensor is reduced by matching with the sensor mounting position on the carrying groove.

An inspection box 8 is arranged on one side of a transportation rail 701, which is far away from an organic cleaning pool 4, the inspection box 8 comprises an inspection box body 801 and a detection probe 802, the detection probe 802 is in sliding connection with the inspection box body 801, the transportation rail 701 penetrates through the inspection box body 801, the inspection box body 801 is fixedly connected with a cleaning box body 1, the inspection box body 801 is communicated with the organic cleaning pool 4 through a transportation cover 703, an ultrasonic device 803 is arranged on the detection probe 802, a pressure-sensitive film 804 is arranged on the inspection box body 801, the pressure-sensitive film 804 is sleeved on the detection probe 802, the pressure-sensitive film 804 and the detection probe 802 are positioned above a shipping slide block 702, the pressure-sensitive film 804 is arranged in parallel with the shipping slide block 702, one end of the pressure-sensitive film 804 is fixedly connected with the inspection box body 801, a magnetic strip 805 is arranged on one end of the pressure-sensitive film 804, which is far away from the inspection box body 801, the magnetic strip is positioned in the pressure-sensitive coil 806, and the output end of the pressure-sensitive coil 806 is connected with a current detection component, the current detection component and the ultrasonic device 803 are connected with the control panel 11 through wires, when the shipping slide block 702 moves into the inspection box 8, a water film of organic cleaning agent is attached to the shipping slide block 702 at the moment, the ultrasonic device 803 on the detection probe 802 is started, the ultrasonic device 803 generates ultrasonic waves, the ultrasonic waves vibrate on the MEMS sensor and the water film, and under the action of the ultrasonic waves, impurities on the MEMS sensor which are not removed flow, the ultrasonic waves bounce and act on the pressure sensing film 804 in the flowing process, the pressure sensing film 804 vibrates to drive the magnetic strip 805 to slide, the magnetic strip 805 moves in the pressure sensing coil 806 to generate induction current, the induction current is transmitted into the current detection component, the current detection component transmits the current to the control panel 11, the control panel 11 displays specific current values, when the MEMS sensor and the water film are clean, the pressure sensing film 804 will generate regular vibration, and no change will occur after the current value is displayed on the control panel 11, when the MEMS sensor and the water film are not clean, the direction and frequency of the sound wave bounce will change due to the migration of the pollutant, the irregular vibration will occur on the pressure sensing film 804, the changed current value will occur on the control panel 11, and the size and state of the pollutant will be deduced according to the value change frequency and the value change size, the control panel 11 will regulate and control the transportation track 701 according to the specific value, when clean, the pressure sensing film is ready to be sent to the packing component 9, when not clean, the pressure sensing film is sent back to the organic cleaning pool 4 for cleaning again, the structure that the pressure sensing film 804 and the consignment slide block 702 are arranged in parallel can make the impact of the ultrasonic wave on the pressure sensing film more uniform, the moving speed of the magnetic stripe is more smooth, so that the induced current variation generated is not too rapid.

A rotating motor 706 is arranged in each carrying sliding block 702, a carrying groove 707 is arranged at the output end of the rotating motor 706, the carrying groove 707 is rotatably connected with the carrying sliding block 702, a plurality of calipers 708 are arranged on the carrying groove 707, each calipers 708 is rotatably connected with the carrying groove 707, the plane of the carrying groove 707 and the plane of the carrying sliding block 702 are on the same plane, so that the centrifugal force applied to the movable connecting rod in each direction is consistent, the force applied to the MEMS sensor by the calipers 708 is consistent, the phenomenon of falling off is avoided, a movable connecting rod 710 is arranged at the part of each calipers 708 in the carrying groove 707, the movable connecting rod 710 is slidably connected with the carrying groove 707, the movable connecting rod 710 is rotatably connected with the calipers 708, one end of the movable connecting rod 710, far away from the calipers 708, is connected with the carrying groove 707 through a spring, the highest end of the carrying groove 707 is lower than the upper surface of the carrying sliding block 702, a packing assembly 9 is arranged below the carrying groove 707, the detection probe 802 is located above the supporting groove 707, the rotating motor 706 is connected with the control panel 11 through a wire, when the MEMS sensor is qualified, the supporting sliding block 702 drives the supporting groove 707 to move, in the moving process, the rotating motor 706 rotates, the movable connecting rod 710 in the supporting groove 707 drives the caliper 708 to move under the action of centrifugal force, the position of the MEMS sensor is firmly limited, the MEMS sensor is prevented from being thrown away, under the high-speed rotation of the rotating motor 706, the organic cleaning agent in the MEMS sensor is dried, in the moving process of the transportation track 701, the rotating motor 706 continuously works, after a period of time, the rotating motor 706 stops, and the MEMS sensor appears on the packing component 9.

The packaging assembly 9 is arranged in an inspection box body 801, the packaging assembly 9 comprises a film placing frame 901, a breathing air gun 902 and a heating rod 903, the film placing frame 901 is arranged in the inspection box body 801, the heating rod 903 is arranged on the film placing frame 901, the film placing frame 901 is positioned below a carrying slide block 702 on a conveying track 701, the film placing frame 901 and the conveying track 701 are arranged in parallel, the heating rod 903 is connected with the film placing frame 901 in a sliding manner, the breathing air gun 902 is arranged on the film placing frame 901, the breathing air gun 902 is connected with an air pump, the output end of the breathing air gun 902 is positioned between the heating rods 903, a film feeding roller 904 is arranged in the film placing frame 901, the film feeding roller 904 is rotatably connected with the film placing frame 901, a film feeding cylinder 905 is arranged on one side of the film placing frame 901, which is far away from the film feeding roller 904, the film feeding cylinder 905 is connected with the film feeding roller 904 through a plastic film, the film feeding cylinder 905 is fixedly connected with the inspection box body 801, the film placing frame 901 is of a sandwich type structure, the plastic film flows through the sandwich layer 901 of the film placing frame, the slide groove 10 is arranged below the membrane placing frame 901, the heating rod 903 is connected with the breathing air gun 902 and the control panel 11 through a lead, the MEMS sensor which is dried loses the limitation of the caliper 708 and falls downwards, and finally falls on the plastic membrane on the membrane placing frame 901, the parallel arrangement can ensure that the MEMS sensor can not deviate when falling on the plastic membrane, stably falls on the center of the plastic membrane, and is matched with the blowing action of the breathing air gun, the plastic membrane stably moves downwards without piercing the plastic membrane, the packaging error rate is greatly reduced, the breathing air gun 902 blows air to the plastic membrane, so that the plastic membrane deforms downwards, and meanwhile, turbid air near the MEMS sensor can be blown away in the blowing process, the purification effect after drying is achieved, the inert gas can also achieve the effect of preventing oxidation, the internal structure is protected from corrosion damage, and meanwhile, the blown gas can also dry the MEMS sensor again, can avoid it because substances such as steam adhesion dust once more, fixed time back, heating rod 903 removes to the centre, and the plastic film also gathers to the centre this moment, breathes air gun 902 and begins to carry out the operation of breathing in for present vacuum state in the plastic film, the plastic film of heating rod 903 final fusing, accomplish the packing operation, and outside the cleaning box 1 that flows out along with spout 10, accomplish once the packing back, advance membrane gyro wheel 904 and rotate, transmit new plastic film.

The cleaning box body 1 is also internally provided with a garbage recycling box 16, the garbage recycling box 16 is provided with a cleaning shower head 17, the garbage recycling box 16 is arranged below the filter screen 1508, the cleaning shower head 17 is arranged above the filter screen 1508, the cleaning box body 1 is provided with a visible window, the cleaning shower head 17 can wash the filter screen 1508, water which has washed the filter screen 1508 carries impurities and other substances to enter the garbage recycling box 16, and then the cleaned filter screen 1508 is sent into the filter box 15 to be prepared for filtering operation again.

The working principle of the invention is as follows: collected MEMS sensors enter a cleaning box body 1 from a feeding hole 2 one by one, an input rail 5 inputs the MEMS sensors, the MEMS sensors abut against a trigger catching tooth 1201, the trigger catching tooth 1201 is separated from a clamping catching tooth 1202, the trigger catching tooth 1201 moves downwards and grasps the MEMS sensors, an upper catching claw 12 transmits the MEMS sensors to a lower catching claw 13, an organic cleaning agent is filled in an organic cleaning pool 4, the MEMS sensors are immersed in the organic cleaning agent, after a period of time, oil stains and impurities on the MEMS sensors are dissolved in the organic cleaning agent, the organic cleaning agent in the organic cleaning pool 4 is filtered and heated under the action of a filter box 15 and finally flows back to the organic cleaning pool 4, the organic cleaning agent flows out in a vortex shape in the flowing process and drives surrounding air, the flow rate of the organic cleaning agent is accelerated, and vortex air is formed on the upper catching claw 12 or the lower catching claw 13, the adhesion of the oil film on the MEMS sensor is weakened, some dust and other impurities on the MEMS sensor are dried and are more easily cleaned, the cleaned MEMS sensor is transmitted into the inspection box 8 under the action of the output rail 7, the output rail 7 drives the carrying slider 702 to move and move into the organic cleaning pool 4, the carrying slider 702 is sprayed by the spray head 704, some organic cleaning agent is remained under the action of the water collecting groove 705 in the spraying process, a water film is formed on the surface of the MEMS sensor, the water film does not flow outwards any more and is stably operated into the inspection box 8 to be inspected by the inspection box 8 finally, when the carrying slider 702 moves into the inspection box 8, ultrasonic waves vibrate on the MEMS sensor and the water film, when the MEMS sensor and the water film are clean, the pressure sensing film 804 can vibrate regularly and does not change after the current value is displayed on the control panel 11, when the MEMS sensor and the water film are not clean, the rebound direction and frequency of the sound wave are changed, irregular vibration of the pressure sensing film 804 is generated, the MEMS sensor which is unqualified in inspection is conveyed back to the organic cleaning pool 4 for cleaning again, and qualified products are packaged and conveyed to the discharge port 3 through the chute 10.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An organic cleaning equipment for MEMS process is characterized in that: the cleaning equipment comprises a cleaning box body (1), wherein a feed inlet (2) and a discharge outlet (3) are respectively arranged on two sides of the cleaning box body (1), an organic cleaning pool (4) is arranged in the cleaning box body (1), the organic cleaning pool (4) is communicated with the feed inlet (2), the feed inlet (2) is communicated with the organic cleaning pool (4) through an input track (5), a blowing barrel (6) is arranged on the input track (5), an output track (7) is arranged on one side, away from the input track (5), of the organic cleaning pool (4), an inspection box (8) is arranged on one side, away from the organic cleaning pool (4), of the output track (7), a packaging assembly (9) is arranged in the inspection box (8), the discharge outlet (3) is communicated with the packaging assembly (9) through a chute (10), a control panel (11) is arranged on the cleaning box body (1), the control panel (11) is connected with the organic cleaning pool (4), the output track (7), the inspection box (8) and the packing assembly (9) through wires.

2. The organic cleaning apparatus of claim 1, wherein: be provided with in organic cleaning pond (4) and catch claw (12) and catch claw (13) down, it includes to catch claw (12) on going up: the device comprises a trigger catching tooth (1201), a clamping catching tooth (1202) and a cleaning cylinder (1203), wherein the trigger catching tooth (1201) and a plurality of clamping catching teeth (1202) are arranged on a catching disc (1204), the trigger catching tooth (1201) is rotationally connected with the catching disc (1204), a slide way is arranged in the catching disc (1204), the clamping catching tooth (1202) is arranged in the slide way and is in sliding connection with the slide way, the part, located in the catching disc (1204), of the trigger catching tooth (1201) abuts against each clamping catching tooth (1202) respectively, a spring is arranged between the part, located in the catching disc (1204), of the trigger catching tooth (1201) and the catching disc (1204), the cleaning cylinder (1203) is arranged on the top end of an organic cleaning pool (4), the trigger catching tooth (1201) is located at one end of an input rail (5), the lower capturing claw (13) is provided with a sucker, the lower capturing claw (13) is positioned below the upper capturing claw (12), the lower capturing claw (13) is positioned on one side of the output track (7), the lower capturing claw (13) is connected with the organic cleaning pool (4) through a connecting support column (14), the connecting support column (14) is rotatably connected with the organic cleaning pool (4), and the lower capturing claw (13) is rotatably connected with the connecting support column (14).

3. The organic cleaning apparatus of claim 1, wherein: the organic cleaning tank (4) is characterized in that a filter box (15) is arranged on one side of the organic cleaning tank (4), the filter box (15) is communicated with the organic cleaning tank (4) through an input pipe (1501) and a return pipe (1502), the return pipe (1502) is arranged at the bottom end of the organic cleaning tank (4), the input pipe (1501) is arranged on one side of the organic cleaning tank (4), the filter box (15) is arranged in a cleaning box body (1), an output motor (1503) is arranged in the input pipe (1501), the output motor (1503) is connected with the inner wall of the input pipe (1501) through a support, the organic cleaning tank (4) is a funnel-shaped cleaning tank, a spiral guide plate (401) is arranged on the inner wall of the bottom end of the organic cleaning tank (4), the spiral direction of the spiral guide plate (401) is the same as the autorotation direction of the earth, a return motor (1504) is arranged in the return pipe (1502), and the return motor (1502) is connected with the inner wall of the return pipe (1502) through a support, the output end of the backflow motor (1504) is provided with a backflow impeller (1505), blades on the backflow impeller (1505) are rotatably connected with a backflow impeller shaft through a spring shaft, a filter screen (1508) is arranged in the filter box (15), the filter box (15) is adjacent to the organic cleaning pool (4), the filter screen (1508) is rotatably connected with the filter box (15), the edge of the filter screen (1508) is in sliding contact with the filter box (15), a heating plate (1506) is arranged in the filter box (15), an oil discharge plate (1507) is arranged on the filter box (15), the oil discharge plate (1507) is positioned above the heating plate (1506), and an included angle of 45 degrees and alpha degrees between the heating plate (1506) and the oil discharge plate (1507) is not less than 60 degrees.

4. The organic cleaning apparatus of claim 1, wherein: the output track (7) comprises a conveying track (701), a plurality of consignment sliding blocks (702) are arranged on the conveying track (701), the consignment sliding blocks (702) are fixedly connected with the conveying track (701) through connecting rods, a conveying cover shell (703) is arranged on the conveying track (701), two ends of the conveying cover shell (703) are respectively communicated with the inspection box (8) and the organic cleaning pool (4), the conveying cover shell (703) is respectively vertically arranged with the inspection box (8) and the organic cleaning pool (4), a spray head (704) is arranged on the conveying cover shell (703), the spray head (704) is communicated with the filter box (15), water collecting grooves (705) are respectively arranged at two ends of the consignment sliding blocks (702), the spray range of the spray head (704) is the part of the conveying track (701) located in the organic cleaning pool (4), the part of the conveying track (701) located in the organic cleaning pool (4) is close to the lower catching claw (13), the input end of the transportation track (701) is a stepping motor and is connected with the control panel (11) through a lead.

5. The organic cleaning apparatus of claim 4, wherein: the device is characterized in that an inspection box (8) is arranged on one side, away from an organic cleaning pool (4), of a conveying track (701), the inspection box (8) comprises an inspection box body (801) and a detection probe (802), the detection probe (802) is in sliding connection with the inspection box body (801), the conveying track (701) penetrates through the inspection box body (801), the inspection box body (801) is communicated with the organic cleaning pool (4) through a conveying cover (703), the inspection box body (801) is fixedly connected with a cleaning box body (1), an ultrasonic device (803) is arranged on the detection probe (802), a pressure sensing film (804) is arranged on the inspection box body (801), the pressure sensing film (804) is sleeved on the detection probe (802), the pressure sensing film (804) is arranged in parallel with the shipping slide block (702), and the pressure sensing film (804) and the detection probe (802) are positioned above the shipping slide block (702), one end of the pressure sensing film (804) is fixedly connected with the inspection box body (801), one end, far away from the inspection box body (801), of the pressure sensing film (804) is provided with a magnetic strip (805), the magnetic strip (805) is located in a pressure sensing coil (806), the output end of the pressure sensing coil (806) is connected with a current detection assembly, and the current detection assembly and the ultrasonic device (803) are connected with the control panel (11) through wires.

6. The organic cleaning apparatus of claim 5, wherein: a rotating motor (706) is arranged in each consignment sliding block (702), a consignment groove (707) is arranged at the output end of the rotating motor (706), the consignment groove (707) is rotatably connected with the consignment sliding block (702), the plane where the consignment groove (707) is located and the plane where the consignment sliding block (702) is located are on the same plane, a plurality of calipers (708) are arranged on the consignment groove (707), each calipers (708) is rotatably connected with the consignment groove (707), a movable connecting rod (710) is arranged at the part of each calipers (708) located in the consignment groove (707), the movable connecting rod (710) is slidably connected with the consignment groove (707), the movable connecting rod (710) is rotatably connected with the calipers (708), one end of the movable connecting rod (710) far away from the calipers (708) is connected with the consignment groove (707) through a spring, and the highest end of the consignment groove (707) is lower than the upper surface of the consignment sliding block (702), a packing assembly (9) is arranged below the supporting groove (707), the detection probe (802) is positioned above the supporting groove (707), and the rotating motor (706) is connected with the control panel (11) through a lead.

7. The organic cleaning apparatus of claim 5, wherein: the packaging assembly (9) is arranged in an inspection box body (801), the packaging assembly (9) comprises a film placing frame (901), a breathing air gun (902) and a heating stick (903), the film placing frame (901) is arranged in the inspection box body (801), the heating stick (903) is arranged on the film placing frame (901), the film placing frame (901) is positioned below a supporting and transporting slide block (702) on a transporting track (701), the film placing frame (901) is arranged in parallel with the transporting track (701), the heating stick (903) is connected with the film placing frame (901) in a sliding manner, the breathing air gun (902) is arranged on the film placing frame (901), the breathing air gun (902) is connected with an air pump, the output end of the breathing air gun (902) is positioned between the heating sticks (903), a film feeding roller (904) is arranged in the film placing frame (901), and the film feeding roller (904) is connected with the film placing frame (901) in a rotating manner, the film placing frame (901) is provided with a film feeding cylinder (905) at one side far away from a film feeding roller (904), the film feeding cylinder (905) is connected with the film feeding roller (904) through a plastic film, the film feeding cylinder (905) is fixedly connected with an inspection box body (801), the film placing frame (901) is of a sandwich type structure, the plastic film flows through an interlayer of the film placing frame (901), a sliding groove (10) is arranged below the film placing frame (901), and the heating rod (903) is connected with a breathing air gun (902) and a control panel (11) through a wire.

8. The organic cleaning apparatus of claim 3, wherein: still be provided with rubbish collection box (16) in washing box (1), be provided with on rubbish collection box (16) and wash shower head (17), rubbish collection box (16) set up in filter screen (1508) below, it sets up in filter screen (1508) top to wash shower head (17), be provided with the visual window on the washing box (1).