CN114597671A - Optical transparent broadband wave absorber and preparation method thereof - Google Patents

Optical transparent broadband wave absorber and preparation method thereof Download PDF

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Publication number
CN114597671A
CN114597671A CN202210283488.8A CN202210283488A CN114597671A CN 114597671 A CN114597671 A CN 114597671A CN 202210283488 A CN202210283488 A CN 202210283488A CN 114597671 A CN114597671 A CN 114597671A
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China
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transparent
conductive film
strip
layer
wave absorber
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CN202210283488.8A
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周张荣
唐先忠
毕美
翁小龙
李志明
雷雪
龙雪媛
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University of Electronic Science and Technology of China
Sichuan Aerospace System Engineering Research Institute
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University of Electronic Science and Technology of China
Sichuan Aerospace System Engineering Research Institute
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Priority to CN202210283488.8A priority Critical patent/CN114597671A/en
Publication of CN114597671A publication Critical patent/CN114597671A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q17/00Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
    • H01Q17/008Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems with a particular shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0086Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials

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  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Laminated Bodies (AREA)

Abstract

The invention provides an optical transparent broadband wave absorber and a preparation method thereof, which sequentially comprise the following steps from top to bottom: the transparent conductive film unit on the upper layer, the transparent dielectric layer and the transparent conductive film unit on the bottom layer; compared with the traditional reference wave absorber adopting a multilayer structure, the broadband transparent wave absorber does not need multilayer bonding, so that the broadband transparent wave absorber is easy to process, and the influence of an adhesive on the wave absorption performance is avoided. The invention has the advantages that: the structure unit is simple, the thickness is low, the polarization is stable, the wave-absorbing frequency band is wide, and the visible light transmittance is high. The material can be used as an electromagnetic shielding material which needs to be used under visible light, such as an aircraft cabin, an electronic toll collection system, a ship porthole and the like.

Description

Optical transparent broadband wave absorber and preparation method thereof
Technical Field
The invention belongs to the technical field of electromagnetic metamaterial wave absorbers, and relates to an optically transparent metamaterial wave absorber and a preparation method thereof, which are used for solving the problem of compatibility of high light transmission and broadband absorption.
Background
With the rapid development of modern wireless communication technology, the use of wireless communication equipment brings convenience to people's life, and electromagnetic wave leakage and electromagnetic wave interference brought by the use of wireless communication equipment are getting worse. The electromagnetic wave is used as an important carrier for information transmission, which may cause the leakage of confidential information, affect the stability of other electronic equipment and even cause harm to human health. The wider absorption frequency band has a wider application range, so the metamaterial wave absorber capable of realizing high-efficiency absorption of broadband incident electromagnetic waves becomes a popular research direction. Most of the existing broadband wave absorbers are opaque, so that the wave absorbers are limited to be applied to visible light transparent occasions in radio frequency identification, electronic toll collection systems, airplane cabins and the like, and the existing transparent wave absorbing structures have the problems of more layers, complex structure, difficulty in preparation, narrow absorption frequency band, large thickness and the like, and are difficult to solve the problem of compatibility of high light transmission and broadband.
Patent (CN208128766U) proposes a broadband transparent wave-absorbing structure composed of upper transparent glass, a dielectric layer, lower transparent glass, a transparent resistive film, a conductive copper foil and a transparent conductive film, which obtains a wider wave-absorbing bandwidth, but the whole thickness exceeds 10mm, and the structure is more complex, the preparation is more difficult, and the structure is not beneficial to practical application. The patent (CN111628297A) adopts the multilayer structure design, including three-layer transparent medium, in the five-layer design of two-layer transparent medium board, there are the number of piles more equally, and the bonding complex between each layer influences absorbing performance scheduling problem. In summary, the transparent broadband wave absorber disclosed at the present stage usually adopts a multilayer design to obtain a relatively wide wave-absorbing bandwidth at the cost of increasing the structural complexity and thickness, and mostly does not relate to the problem that the multilayer is compounded in the sample preparation, so that the optical transparent broadband wave absorber can realize an electromagnetic stealth effect in a wide frequency band, has a small number of layers, is simple in structure, is convenient to prepare, and has a good engineering application value.
Disclosure of Invention
The invention aims to provide an optically transparent metamaterial wave absorber and a preparation method thereof, aiming at the problems of multiple layers, complex structure, difficult preparation, narrow absorption band, large thickness and difficult solution of compatibility of high light transmission and broadband of the existing metamaterial transparent broadband wave absorber, the optically transparent metamaterial wave absorber can realize high-efficiency absorption and high light transmission rate of incident electromagnetic waves in a broadband range, and has the advantages of few layers, simple structure, convenient preparation and the like.
In order to realize the purpose of the invention, the technical scheme of the invention is as follows:
an optical transparent broadband wave absorber comprises an upper layer transparent conductive film unit 1, a transparent layer dielectric layer 2 and a bottom layer transparent conductive film unit 3 from top to bottom in sequence; the upper layer transparent conductive film and the bottom layer transparent conductive film are respectively attached to the upper surface and the lower surface of the transparent dielectric layer; the upper layer transparent conductive film unit 1, the transparent layer dielectric layer 2 and the bottom layer transparent conductive film unit 3 are centrosymmetric patterns;
the upper transparent conductive film unit 1 is a windmill-shaped conductive film pattern formed by etching a complete conductive film, and the windmill-shaped conductive film pattern comprises four same strips: a first strip 11, a second strip 12, a third strip 13 and a fourth strip 14, wherein the first strip 11 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the second strip 12, the second strip 12 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the third strip 13, and the third strip 13 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the fourth strip 14; the four strips 11-14 form a square shape in the middle;
the bottom layer transparent conductive film unit 3 is a complete conductive film.
Preferably, the upper transparent conductive film unit 1 and the bottom transparent conductive film unit 3 are selected from one of indium tin oxide, zinc oxide, gallium tin oxide, zinc tin oxide, or polymer-based transparent conductors.
Preferably, the material of the transparent medium layer 2 is selected from one of soda lime glass, high borosilicate glass, quartz glass, polyethylene terephthalate, polycarbonate, polydimethylsiloxane and polymethyl methacrylate.
Preferably, the sheet resistance of the upper transparent conductive film unit 1 is Rsq1, the sheet resistance of the bottom transparent conductive film unit 3 is Rsq2, and Rs1 is not more than 5 Ω/sq and not more than 300 Ω/sq, and Rs2 is not more than 0.1 Ω/sq and not more than 100 Ω/sq.
Preferably, the transparent dielectric layer 2 has a relative dielectric constant ε r and a thickness h, and ε r is 1.0 ≦ 10.0 and h is 0.1mm ≦ 20 mm.
The invention also provides a preparation method of the optical transparent broadband wave absorber, which comprises the following steps:
firstly, selecting a transparent medium layer material, and plating a conductive film on the surface and the bottom surface of the transparent medium layer material by using a magnetron sputtering method;
secondly, testing the sheet resistance of the conductive films on the surface and the bottom surface of the continuous transparent medium layer by adopting a four-probe tester, and respectively preparing a series of continuous conductive films with the resistance value of Rs1 which is more than or equal to 5 omega/sq and less than or equal to 300 omega/sq, and Rs2 which is more than or equal to 0.1 omega/sq and less than or equal to 100 omega/sq;
thirdly, etching the air-out vehicle-shaped conducting film pattern on the surface of the transparent medium layer material system by a laser etching technology to obtain an upper layer transparent conducting film unit 1, and obtaining the optical transparent broadband wave absorber.
The windmill-shaped conductive film pattern is obtained by continuously rotating the strip-shaped conductive film for 3 times in the same direction for 90 degrees at the center of the plane where the strip-shaped conductive film is located, and has the characteristic of central symmetry, and the sheet resistance of the conductive film is that Rs1 is not less than 5 omega/sq. Parallel long-strip-shaped conductive films in the conductive films with the windmill-shaped structures generate parallel current under the action of electromagnetic waves to provide electric resonance, and antiparallel current is generated between the upper transparent conductive film unit and the bottom transparent conductive film unit under the action of the electromagnetic waves to provide magnetic resonance. Under the combined action of electric resonance and magnetic resonance, the metamaterial wave absorber generates two resonance points, when the two resonance points are close, a broadband wave absorbing effect is formed, and the positions of the resonance points and a wave absorbing frequency band can be controlled by reasonably adjusting a plurality of sizes of the windmill structure.
The transparent layer dielectric layer 2 has a thickness h and plays a supporting role.
The bottom transparent conductive film unit 3 is a continuous conductive film with low square resistance, the property is similar to that of metal as a reflecting layer, electromagnetic waves are prevented from being transmitted out, the absorption efficiency is improved, and the square resistance of the conductive film is more than or equal to 0.1 omega/sq and less than or equal to Rs2 and less than or equal to 100 omega/sq.
The invention has the beneficial effects that: compared with a common transparent wave-absorbing structure, the main structure body of the wave-absorbing structure is composed of a transparent medium layer 2, an upper transparent conductive film unit 1 attached to the upper surface of the transparent medium layer 2 and a lower transparent conductive film unit 3 attached to the lower surface of the transparent medium layer, the whole wave-absorbing structure is of a single-layer structure, errors caused by complex processes of multi-layer design and multi-layer bonding are avoided, the whole wave-absorbing structure is simple in design structure and easy to prepare, has high light-transmitting and broadband wave-absorbing characteristics, and has a great application value in the field of transparent wave absorbers.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a side schematic view of the overall structure of the present invention;
FIG. 3 is a schematic structural diagram of an upper transparent conductive film unit;
FIG. 4 is a graph of reflectivity for different polarization modes in example 1 of the present invention;
FIG. 5 is a graph of reflectivity for different polarizations of example 2 of the present invention;
1 is an upper transparent conductive film unit, 2 is a transparent layer medium layer, 3 is a bottom transparent conductive film unit, 11 is a first strip, 12 is a second strip, 13 is a third strip, 14 is a fourth strip, p is a side length of a periodic unit structure, w1 is a distance between the first strip and a vertex of the periodic unit, w2 is a length of the first strip conductive film, and w3 is a width of the first strip conductive film.
Detailed Description
The following embodiments of the present invention are provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
The embodiment of the invention provides an optical transparent broadband wave absorber, which comprises an upper layer transparent conductive film unit 1, a transparent layer dielectric layer 2 and a bottom layer transparent conductive film unit 3 from top to bottom in sequence; the upper layer transparent conductive film and the bottom layer transparent conductive film are respectively attached to the upper surface and the lower surface of the transparent dielectric layer; the upper layer transparent conductive film unit 1, the transparent layer dielectric layer 2 and the bottom layer transparent conductive film unit 3 are centrosymmetric patterns;
the upper layer transparent conductive film unit 1 is a complete conductive film and is etched into a windmill-shaped conductive film pattern, and the windmill-shaped conductive film pattern comprises four same strips: a first strip 11, a second strip 12, a third strip 13 and a fourth strip 14, wherein the first strip 11 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the second strip 12, the second strip 12 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the third strip 13, and the third strip 13 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the fourth strip 14; the four strips 11-14 form a square shape in the middle;
the bottom layer transparent conductive film unit 3 is a complete conductive film.
The upper transparent conductive film unit 1 and the bottom transparent conductive film unit 3 are selected from one of indium tin oxide, zinc oxide, gallium tin oxide, zinc tin oxide or polymer-based transparent conductors.
The material of the transparent medium layer 2 is selected from one of soda lime glass, high borosilicate glass, quartz glass, polyethylene terephthalate, polycarbonate, polydimethylsiloxane and polymethyl methacrylate.
The square resistance of the upper transparent conductive film unit 1 is Rsq1, the square resistance of the bottom transparent conductive film unit 3 is Rsq2, Rs1 is not less than 5 omega/sq and not more than 300 omega/sq, and Rs2 is not less than 0.1 omega/sq and not more than 100 omega/sq.
The transparent layer dielectric layer 2 has a relative dielectric constant of ε r and a thickness of h, ε r is larger than or equal to 1.0 and smaller than or equal to 10.0, and h is larger than or equal to 0.1mm and smaller than or equal to 20 mm.
Example 1
This embodiment provides an optically transparent broadband wave absorber, from top to bottom is in proper order: the transparent conducting film comprises an upper windmill structure transparent conducting film 1, a transparent dielectric layer 2 and a bottom transparent conducting film layer 3, wherein each structural layer is in a central symmetry pattern.
As shown in fig. 3, the upper transparent conductive film unit 1 is a complete conductive film etched into a windmill-shaped conductive film pattern, and the windmill-shaped conductive film pattern includes four same strips: a first strip 11, a second strip 12, a third strip 13 and a fourth strip 14, wherein the first strip 11 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the second strip 12, the second strip 12 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the third strip 13, and the third strip 13 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the fourth strip 14; the four strips 11-14 form a square shape in the middle; the bottom layer transparent conductive film unit 3 is a complete conductive film.
The specific size parameters are that the perimeter p of the periodic unit structure is 20mm, the distance w1 between the first long conductive film and the top of the periodic unit is 4mm, the length w2 of the first long conductive film is 15.7mm, and the length w3 of the first long conductive film is 2.5 mm.
The transparent dielectric layer 2 is made of polymethyl methacrylate (PMMA), the dielectric constant is 2.25, and the thickness h is 7 mm.
Indium Tin Oxide (ITO) is selected as the upper transparent conductive film unit 1 and the bottom transparent conductive film unit 3, and the square resistance values are respectively 30 omega/sq and 20 omega/sq.
Under the condition of normal incidence of electromagnetic waves, the reflectivity curves of the electromagnetic waves in a TE mode and a TM mode are shown in figure 4, the reflectivity is less than-10 dB in the range of 3.34-9.74GHz, the relative bandwidth reaches 97.86%, two resonance points exist at 4.05GHz and 8.62GHz, and the reflectivity is-17.7 dB and-16 dB respectively. And the reflectivity curves coincide under different polarization modes (TE/TM), with polarization insensitivity.
Example 2
This embodiment provides an optically transparent broadband wave absorber, from top to bottom is in proper order: the transparent conducting film comprises an upper windmill structure transparent conducting film 1, a transparent dielectric layer 2 and a bottom transparent conducting film layer 3, wherein each structural layer is a centrosymmetric pattern;
as shown in fig. 3, the upper transparent conductive film unit 1 is a complete conductive film etched into a windmill-shaped conductive film pattern, which includes four identical strips: a first strip 11, a second strip 12, a third strip 13 and a fourth strip 14, wherein the first strip 11 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the second strip 12, the second strip 12 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the third strip 13, and the third strip 13 rotates clockwise 90 degrees around the center of the plane of the conductive film to obtain the fourth strip 14; the four strips 11-14 form a square shape in the middle; the bottom layer transparent conductive film unit 3 is a complete conductive film.
The specific size parameters are that the perimeter p of the periodic unit structure is 20mm, the distance w1 between the first strip and the top of the periodic unit is 5.75mm, the length w2 of the first strip conductive film is 15.7mm, and the length w3 of the first strip conductive film is 2.25 mm.
The transparent dielectric layer 2 is made of sodium calcium silicate glass, the dielectric constant is 5.5, and the thickness h is 5.4 mm.
Indium Tin Oxide (ITO) is selected as the upper transparent conductive film unit 1 and the bottom transparent conductive film unit 3, and the square resistance values are respectively 30 omega/sq and 5 omega/sq.
Under the condition of normal incidence of electromagnetic waves, the reflectivity curves of the electromagnetic waves in a TE mode and a TM mode are shown in figure 5, the reflectivity is less than-10 dB in the range of 3.83-11.12GHz, the relative bandwidth reaches 72.48%, two resonance points exist at 4.46GHz and 9.53GHz, and the reflectivity is-13.9 dB and-35 dB respectively. And the reflectivity curves coincide under different polarization modes (TE/TM), with polarization insensitivity.
Example 3
The embodiment provides a preparation method of the optical transparent broadband wave absorber, which comprises the following steps:
firstly, selecting a transparent medium layer material, and plating a conductive film on the surface and the bottom surface of the transparent medium layer material by using a magnetron sputtering method;
secondly, testing the sheet resistance of the conductive films on the surface and the bottom surface of the continuous transparent medium layer by adopting a four-probe tester, and respectively preparing a series of continuous conductive films with the resistance value of Rs1 which is more than or equal to 5 omega/sq and less than or equal to 300 omega/sq, and Rs2 which is more than or equal to 0.1 omega/sq and less than or equal to 100 omega/sq;
thirdly, etching the air-out vehicle-shaped conducting film pattern on the surface of the transparent medium layer material system by a laser etching technology to obtain an upper layer transparent conducting film unit 1, and obtaining the optical transparent broadband wave absorber.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (6)

1. An optically transparent broadband wave absorber, comprising: the transparent conductive film comprises an upper layer transparent conductive film unit (1), a transparent layer dielectric layer (2) and a bottom layer transparent conductive film unit (3) from top to bottom in sequence; the upper layer transparent conductive film and the bottom layer transparent conductive film are respectively attached to the upper surface and the lower surface of the transparent dielectric layer; the upper transparent conductive film unit (1), the transparent layer dielectric layer (2) and the bottom transparent conductive film unit (3) are centrosymmetric patterns;
the upper layer transparent conductive film unit (1) is a windmill-shaped conductive film pattern formed by etching a complete conductive film, and the windmill-shaped conductive film pattern comprises four same strips: the first strip (11), the second strip (12), the third strip (13) and the fourth strip (14), wherein the second strip (12) is obtained by clockwise rotating the first strip (11) around the center of the plane of the conductive film by 90 degrees, the third strip (13) is obtained by clockwise rotating the second strip (12) around the center of the plane of the conductive film by 90 degrees, and the fourth strip (14) is obtained by clockwise rotating the third strip (13) around the center of the plane of the conductive film by 90 degrees; the four strips (11-14) form a square shape in the middle;
the bottom layer transparent conductive film unit (3) is a complete conductive film.
2. An optically transparent broadband wave absorber according to claim 1, wherein: the upper layer transparent conductive film unit (1) and the bottom layer transparent conductive film unit (3) are selected from one of conductive indium tin oxide, zinc oxide, gallium tin oxide, zinc tin oxide or polymer-based transparent conductors.
3. An optically transparent broadband wave absorber according to claim 1, wherein: the material of the transparent medium layer (2) is selected from one of soda lime glass, high borosilicate glass, quartz glass, polyethylene terephthalate, polycarbonate, polydimethylsiloxane and polymethyl methacrylate.
4. An optically transparent broadband wave absorber according to claim 1, wherein: the square resistance of the upper transparent conductive film unit (1) is Rsq1, the square resistance of the bottom transparent conductive film unit (3) is Rsq2, Rs1 is not less than 5 omega/sq and not more than 300 omega/sq, and Rs2 is not less than 0.1 omega/sq and not more than 100 omega/sq.
5. An optically transparent broadband wave absorber according to claim 1, wherein: the transparent layer dielectric layer (2) has a relative dielectric constant of epsilon r and a thickness of h, wherein epsilon r is more than or equal to 1.0 and less than or equal to 10.0, and h is more than or equal to 0.1mm and less than or equal to 20 mm.
6. The method of making an optically transparent broadband wave absorber according to any one of claims 1 to 5, comprising the steps of:
firstly, selecting a transparent medium layer material, and plating a conductive film on the surface and the bottom surface of the transparent medium layer material by using a magnetron sputtering method;
secondly, testing the sheet resistance of the conductive films on the surface and the bottom surface of the continuous transparent medium layer by adopting a four-probe tester, and respectively preparing a series of continuous conductive films with the resistance value of Rs1 which is more than or equal to 5 omega/sq and less than or equal to 300 omega/sq, and Rs2 which is more than or equal to 0.1 omega/sq and less than or equal to 100 omega/sq;
thirdly, etching the air-out vehicle-shaped conducting film pattern on the surface of the transparent medium layer material system by a laser etching technology to obtain an upper layer transparent conducting film unit (1) and obtain the optical transparent broadband wave absorber.
CN202210283488.8A 2022-03-22 2022-03-22 Optical transparent broadband wave absorber and preparation method thereof Pending CN114597671A (en)

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CN103490169A (en) * 2013-10-14 2014-01-01 东南大学 Single-layered broadband random surface
CN106252897A (en) * 2016-08-24 2016-12-21 江苏赛博防务技术有限公司 Transparent broadband Meta Materials wave absorbing device
CN208128766U (en) * 2018-05-10 2018-11-20 西安海辰兴新材料科技有限公司 A kind of transparent wave absorbing device of ultra wide band based on electric-heating technology
CN109473769A (en) * 2018-10-19 2019-03-15 湖北航天技术研究院总体设计所 A kind of restructural conformal antenna of missile-borne Miniaturized multiband
CN109687162A (en) * 2018-11-19 2019-04-26 电子科技大学 A kind of adjustable three frequency ranges THz meta-material absorber based on dirac material
CN111628297A (en) * 2020-06-23 2020-09-04 航天科工武汉磁电有限责任公司 Broadband transparent wave-absorbing material based on double-layer conductive film
CN111817025A (en) * 2020-09-03 2020-10-23 浙江科技学院 Adjustable graphene terahertz frequency selector
CN113517569A (en) * 2021-04-29 2021-10-19 杭州光学精密机械研究所 Metamaterial optical window and preparation method thereof

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103490169A (en) * 2013-10-14 2014-01-01 东南大学 Single-layered broadband random surface
CN106252897A (en) * 2016-08-24 2016-12-21 江苏赛博防务技术有限公司 Transparent broadband Meta Materials wave absorbing device
CN208128766U (en) * 2018-05-10 2018-11-20 西安海辰兴新材料科技有限公司 A kind of transparent wave absorbing device of ultra wide band based on electric-heating technology
CN109473769A (en) * 2018-10-19 2019-03-15 湖北航天技术研究院总体设计所 A kind of restructural conformal antenna of missile-borne Miniaturized multiband
CN109687162A (en) * 2018-11-19 2019-04-26 电子科技大学 A kind of adjustable three frequency ranges THz meta-material absorber based on dirac material
CN111628297A (en) * 2020-06-23 2020-09-04 航天科工武汉磁电有限责任公司 Broadband transparent wave-absorbing material based on double-layer conductive film
CN111817025A (en) * 2020-09-03 2020-10-23 浙江科技学院 Adjustable graphene terahertz frequency selector
CN113517569A (en) * 2021-04-29 2021-10-19 杭州光学精密机械研究所 Metamaterial optical window and preparation method thereof

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