CN113517569A - Metamaterial optical window and preparation method thereof - Google Patents
Metamaterial optical window and preparation method thereof Download PDFInfo
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
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- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
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- 229910052596 spinel Inorganic materials 0.000 claims description 3
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 3
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q17/00—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
- H01Q17/008—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems with a particular shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a metamaterial optical window and a preparation method thereof, wherein the metamaterial optical window comprises a plurality of periodically arranged structural units, and each structural unit consists of a transparent medium substrate, a grid transparent resonant structure embedded in the deep surface of the transparent medium substrate and a transparent metal grid layer embedded in the deep surface of the transparent medium substrate. The transparent grid resonant structure and the transparent metal grid layer are buried and embedded in the deep surface of the optical window body (the transparent medium substrate), so that the transparent grid resonant structure and the transparent metal grid layer are difficult to scratch in practical application, and have excellent firmness, wear resistance, durability, laser damage resistance, thermal shock resistance and other harsh environment applicability, and the embedded transparent grid resonant structure can realize high permeability in visible and middle and far infrared bands. The metamaterial optical window provided by the invention can realize broadband absorption at a 1-18GHz radar microwave band, and the absorptivity can reach more than 90%.
Description
Technical Field
The invention relates to the technical field of metamaterial wave absorbers, in particular to a metamaterial optical window and a preparation method thereof.
Background
Electromagnetic pollution caused by microwaves and radio technology not only causes interference to precision electronic instruments, but also causes non-negligible negative effects on human health. These negative effects can be eliminated by electromagnetic shielding technology, and in many electromagnetic shielding fields, the electromagnetic shielding material is required to have not only excellent electromagnetic shielding performance, but also high transparency for visible and infrared light, such as high-end medical equipment observation windows, shielding elements for precise communication equipment, ultra-fine monitoring equipment observation windows, aircraft and aerospace weapon optical windows, advanced optical instrument windows, and the like. However, most of the existing electromagnetic shielding materials adopt a skin-attached metal net gate structure or a transparent conductive film, which not only reflects electromagnetic waves into the space to cause secondary electromagnetic pollution and complicate the electromagnetic environment of the space, but also has the difficult problems of harsh environmental applicability such as firmness, wear resistance, durability, laser damage resistance, thermal shock resistance and the like in practical use. The best solution to this problem is to load a special material on the transparent optical material, so that it can absorb microwave and radio wave, transmit visible light and infrared light, and have excellent environmental durability.
In recent years, the appearance of metamaterial wave absorbers brings new design ideas to transparent electromagnetic wave absorbing materials. The metamaterial wave absorber is a novel composite material capable of responding to incident electromagnetic waves, and comprises a medium substrate and a periodic artificial microstructure attached to the medium substrate, wherein the structural unit of the metamaterial wave absorber can be designed manually to tune electromagnetic parameters such as equivalent dielectric constant, equivalent magnetic conductivity and refractive index of the material, and the electromagnetic resonance realizes impedance matching with free space so that almost objects of incident waves are reflected into the metamaterial and are lost, and perfect wave absorbing performance is realized.
At present, the metamaterial wave absorber adopts a mode of combining a transparent dielectric substrate and tin oxide to realize optical transparency and microwave wave absorbing functions, such as patents (CN106252897A), (CN102480006A), (CN103675956B) and (CN 108832309A). However, these transparent metamaterial absorbers use indium tin oxide as the upper resonant layer and the lower reflective layer, which limits their application in the field of infrared optical windows because indium tin oxide is opaque in the infrared band. In addition, the resonant layer, the dielectric substrate and the bottom reflection layer of the transparent metamaterial wave absorber are formed by hot pressing through optical transparent adhesive, and due to the existence of optical interference effect and the transparent adhesive, the optical transmittance of the multilayer structure is further reduced, so that the high optical transmittance in visible and infrared bands is difficult to realize; in addition, the resonance layer of the transparent metamaterial wave absorber is attached to the surface of the medium substrate only by means of common laser processing and the like, and the resonance layer is inevitably eroded by wind, rain, sand and stone and the like to fall off in practical application, so that the electromagnetic wave absorption performance of the wave absorber is influenced, and the wave absorber cannot be effectively applied and popularized in practice.
Accordingly, the prior art is yet to be improved and developed.
Disclosure of Invention
In view of the defects of the prior art, the invention aims to provide a metamaterial optical window and a preparation method thereof, and aims to solve the problem that the existing metamaterial wave absorber cannot simultaneously have microwave broadband absorptivity, high optical permeability in visible and infrared bands and environmental durability.
The technical scheme of the invention is as follows:
a metamaterial optical window comprises a plurality of periodically arranged structural units, wherein each structural unit is composed of a transparent dielectric substrate, a net gate transparent resonant structure embedded in the deep surface of the transparent dielectric substrate, and a transparent metal net gate layer embedded in the deep surface of the transparent dielectric substrate.
The metamaterial optical window is characterized in that the grid transparent resonant structure, the transparent dielectric substrate and the transparent metal grid layer are integrally formed.
The metamaterial optical window is characterized in that the transparent mesh grid resonant structure is composed of a cross ring formed by first micro metal mesh grids connected with each other and a cross frame formed by second micro metal mesh grids connected with each other, and the cross frame is located in the middle of the cross ring.
The metamaterial optical window is characterized in that the shapes of the first micro metal net gate and the second micro metal net gate are independently selected from one or more of a grid shape, a circular ring shape and a diamond shape.
The metamaterial optical window is characterized in that the first and second metal nets are made of materials selected from one or more of gold, silver, copper, aluminum and indium tin oxide.
In the metamaterial optical window, the transparent metal net gate layer is composed of mutually connected third micro metal net gates.
The metamaterial optical window is characterized in that the shape of the third micro metal net gate is one or more of a square grid shape, a circular ring shape and a diamond shape.
The metamaterial optical window is characterized in that the material of the third micro metal net is selected from one or more of gold, silver, copper, aluminum and indium tin oxide.
The metamaterial optical window is characterized in that the transparent medium substrate is made of one or more of quartz glass, fluoride infrared glass, zinc sulfide, organic glass, transparent polymer, sapphire and spinel.
A method for preparing a metamaterial optical window comprises the following steps:
providing a transparent medium substrate;
and respectively etching and embedding the periodically arranged transparent net gate resonance structure and the transparent metal net gate layer on the upper surface and the lower surface of the transparent medium substrate by adopting a femtosecond laser processing technology or an excimer processing technology to obtain the metamaterial optical window.
Has the advantages that: compared with the existing transparent metamaterial wave absorber which is prepared by using indium tin oxide as a resonance layer in a simple superposition mode, the metamaterial optical window provided by the invention comprises a plurality of periodically arranged structure units, and each structure unit consists of a transparent medium substrate, a net grid transparent resonance structure embedded in the upper deep surface of the transparent medium substrate and a transparent metal net grid layer embedded in the lower deep surface of the transparent medium substrate. The transparent grid resonant structure and the transparent metal grid layer are buried and embedded in the deep surface of the optical window body (the transparent medium substrate), so that the transparent grid resonant structure and the transparent metal grid layer are difficult to scratch in practical application, and have excellent firmness, wear resistance, durability, laser damage resistance, thermal shock resistance and other harsh environment applicability, and the embedded transparent grid resonant structure can realize high permeability in visible and middle and far infrared bands. The metamaterial optical window provided by the invention can realize broadband absorption at a 1-18GHz radar microwave band, and the absorptivity can reach more than 90%.
Drawings
Fig. 1 is a perspective view of a metamaterial optical window according to the present invention.
FIG. 2 is a side view of a metamaterial optical window in accordance with the present invention.
FIG. 3 is a top view of a metamaterial optical window in accordance with the present invention.
FIG. 4 is a schematic diagram of a transparent net gate resonant structure in a metamaterial optical window in accordance with the present invention.
FIG. 5 is a schematic diagram of a metal net gate layer in a metamaterial optical window in accordance with the present invention.
FIG. 6 is a flowchart illustrating a method for manufacturing a metamaterial optical window according to a preferred embodiment of the present invention.
Fig. 7 is a graph of a simulation result of the absorption rate of the metamaterial optical window in embodiment 1 of the present invention when an incident electromagnetic wave is incident normally.
Fig. 8 is a graph showing the transmittance test result of the metamaterial optical window in the mid-infrared region according to embodiment 1 of the present invention.
Fig. 9 is a graph showing the transmittance test result of the metamaterial optical window in the visible-near infrared region according to example 1 of the present invention.
FIG. 10 is a graph showing the results of testing the wear resistance of the micro metal mesh grid structure fabricated by femtosecond laser and the micro metal mesh grid structure fabricated by conventional photolithography.
Detailed Description
The invention provides a metamaterial optical window and a preparation method thereof, and the invention is further described in detail below in order to make the purpose, technical scheme and effect of the invention clearer and clearer. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In order to solve the problem that the existing transparent metamaterial wave absorber cannot simultaneously realize microwave broadband absorption, high optical permeability of visible and infrared bands and excellent environmental durability, the invention provides a metamaterial optical window, which comprises a plurality of periodically arranged structural units as shown in fig. 1-3, wherein each structural unit consists of a transparent medium substrate 2, a net gate transparent resonant structure 1 embedded in the deep surface of the transparent medium substrate 2 and a transparent metal net gate layer 3 embedded in the deep surface of the transparent medium substrate 2.
In this embodiment, the transparent resonant structure 1 and the transparent metal mesh layer 3 are both embedded and buried in the deep surface of the optical window body (the transparent dielectric substrate 2), so that they are hard to be scratched off in practical application, and have excellent robustness, wear resistance, durability, laser damage resistance, thermal shock resistance and other harsh environment applicability; in addition, as the grid transparent resonant structure and the transparent metal grid layer 3 are buried and embedded in the deep surface of the transparent dielectric substrate 2, the embodiment avoids using transparent adhesive to perform hot press molding on each layer, and further improves the high permeability of the metamaterial optical window in visible and middle and far infrared bands; furthermore, the metamaterial optical window provided by the embodiment can realize broadband absorption at the 1-18GHz radar microwave band, and the absorption rate can reach more than 90%.
In some embodiments, since the resonant layer, the dielectric substrate and the bottom reflective layer of the conventional transparent metamaterial absorber are hot-pressed and formed by an optically transparent adhesive, the optical transmittance of the stacked structure is further reduced due to an optical interference effect and the presence of the transparent adhesive, and it is difficult to achieve high optical transmittance in visible and infrared bands. The metamaterial optical window provided by this embodiment is an integrated structure, that is, the mesh transparent resonant structure, the transparent dielectric substrate, and the transparent metal mesh gate layer are integrally formed. This embodiment has avoided using the transparent adhesive tape to carry out hot briquetting to each layer for its optical transmittance improves greatly, thereby has promoted metamaterial optical window is in the high permeability of visible and well far infrared wave band.
In some embodiments, as shown in fig. 1, 3 and 4, the mesh transparent resonant structure 1 is composed of a cross ring 11 composed of interconnected first micro metal meshes and a cross 12 composed of interconnected second micro metal meshes, and the cross 12 is located in the middle of the cross ring 11.
In this embodiment, the shapes of the first and second micro metal nets are independently selected from one or more of a grid shape, a circular ring shape and a diamond shape, but not limited thereto, and the shapes of the first and second micro metal nets may be the same or different. In this embodiment, the materials of the first and second micro metal nets are independently selected from one or more of gold, silver, copper, aluminum, and indium tin oxide, but not limited thereto, the materials of the first and second micro metal nets may be the same or different. By reasonably adjusting the structural parameters such as the material, the shape, the thickness and the like of the grid transparent resonant structure 1, the metamaterial optical window prepared can meet the absorption performance of electromagnetic waves of different wave bands.
In some embodiments, as shown in FIGS. 1 and 5, the transparent metal net gate layer 3 is composed of interconnected third micro metal net gates. In this embodiment, the shape of the third micro metal net is selected from one or more of a square grid, a circular ring and a diamond, but is not limited thereto, and the shape of the third micro metal net is the same as or different from the shape of the first micro metal net and the shape of the second micro metal net. In this embodiment, the material of the third micro metal net is selected from one or more of gold, silver, copper, aluminum and indium tin oxide, but is not limited thereto, and the material of the third micro metal net may be the same as or different from the material of the first micro metal net and the material of the second micro metal net. By reasonably adjusting the structural parameters such as the material, shape, thickness and the like of the transparent metal net gate layer 3, the metamaterial optical window prepared can meet the absorption performance of electromagnetic waves of different wave bands.
In some embodiments, the material of the transparent dielectric substrate is selected from one or more of quartz glass, fluoride infrared glass, zinc sulfide, organic glass, transparent polymer, sapphire and spinel, but is not limited thereto.
In some embodiments, the present invention further provides a method for manufacturing a metamaterial optical window, as shown in fig. 6, which includes the steps of:
s10, providing a transparent medium substrate;
s20, respectively etching and embedding the periodically arranged transparent net gate resonance structure and the transparent metal net gate layer on the upper surface and the lower surface of the transparent medium substrate by adopting a femtosecond laser processing technology or an excimer processing technology, and obtaining the metamaterial optical window.
The preparation method provided by the embodiment does not need hot press molding and multi-structure compounding, has a mature processing technology, and is easy to prepare the metamaterial optical window with a simple structure. The metamaterial optical window manufactured by the method in the embodiment is an integrated structure, that is, the transparent resonant structure of the net gate, the transparent dielectric substrate and the transparent metal net gate layer are integrally formed. The transparent resonant structure with the mesh grid and the transparent metal mesh layer manufactured by the embodiment are buried and embedded in the deep surface of the optical window body (transparent medium substrate), so that the transparent resonant structure with the mesh grid and the transparent metal mesh layer are difficult to scratch and rub in practical application, and have harsh environment applicability such as excellent firmness, wear resistance, durability, laser damage resistance, thermal shock resistance and the like, and the embedded transparent resonant structure with the mesh grid can also realize high permeability in visible and middle and far infrared bands. The metamaterial optical window provided by the invention can realize broadband absorption at a 1-18GHz radar microwave band, and the absorptivity can reach more than 90%.
The metamaterial optical window and its performance of the present invention are further explained by the following specific examples:
example 1
A metamaterial optical window is shown in fig. 1-4, and comprises a plurality of periodically arranged structural units, wherein each structural unit is composed of a transparent dielectric substrate 2, a grid transparent resonant structure 1 embedded in the deep surface of the transparent dielectric substrate 2, and a transparent metal grid layer 3 embedded in the deep surface of the transparent dielectric substrate 2. The thickness of the transparent dielectric substrate 2 is h, the schematic view of the periodically arranged grid transparent resonant structure 1 is shown in fig. 3, the grid transparent resonant structure 1 in a single structural unit is square, as shown in fig. 4, the periodic side length of the grid transparent resonant structure 1 is P, and the length and width of the cross ring 11 are l1And d1The length and width of the inner cross are respectively set to l2And d2The period of the grid is p1Line width of w1. The schematic diagram of the transparent metal mesh grid layer is shown in FIG. 5, a grid-shaped metal mesh grid is adopted, and the period is p2Line width of w2. The mesh grid transparent resonant structure 1 is made of aluminum, the conductivity of the mesh grid transparent resonant structure is 38000000S/m, and the thickness of the mesh grid transparent resonant structure is h1. The transparent metal mesh grid layer 3 is made of aluminum and has a thickness h2。
Full-wave simulation is performed on the metamaterial optical window in example 1 by electromagnetic simulation software, and as a result, as shown in fig. 7, under a normal incidence condition, the metamaterial optical window realizes broadband absorption at 5.8-14.1GHz, and the absorption rate reaches over 90%. In addition, the prepared material is optically transparent, and is etched on the deep surface of the optical window material body by using the femtosecond laser processing technology by adopting the integrated molding technology, so that the metamaterial optical window can maintain high optical transmittance in visible light and even near-mid-infrared bands, as shown in fig. 8 and 9, the transmittance of the metamaterial optical window in the mid-infrared band can reach more than 70% as shown in fig. 8, and the transmittance of the metamaterial optical window in the visible-near infrared region can reach more than 80% as shown in fig. 9.
In addition, the transparent resonant structure of the mesh grid and the transparent metal mesh layer manufactured by the femtosecond laser technology in this embodiment are both a "deep surface-embedded" micro metal mesh grid structure, and compared with the mesh grid layer manufactured by the conventional photolithography technology, the micro metal mesh grid structure manufactured by this embodiment has excellent wear resistance, durability and severe environment adaptability, and can meet practical application, the wear resistance test result is shown in fig. 10, and it can be seen from fig. 10 that the mesh grid manufactured by the femtosecond laser technology has better wear resistance.
In summary, the metamaterial optical window provided by the present invention includes a plurality of structure units arranged periodically, and each structure unit is composed of a transparent dielectric substrate, a net transparent resonant structure embedded in a deep surface of the transparent dielectric substrate, and a transparent metal net gate layer embedded in a deep surface of the transparent dielectric substrate. The transparent grid resonant structure and the transparent metal grid layer are buried and embedded in the deep surface of the optical window body (the transparent medium substrate), so that the transparent grid resonant structure and the transparent metal grid layer are difficult to scratch in practical application, and have excellent firmness, wear resistance, durability, laser damage resistance, thermal shock resistance and other harsh environment applicability, and the embedded transparent grid resonant structure can realize high permeability in visible and middle and far infrared bands. The metamaterial optical window provided by the invention can realize broadband absorption at a 1-18GHz radar microwave band, and the absorptivity can reach more than 90%.
It is to be understood that the foregoing describes and explains the principal features and basic principles of the invention, together with advantages thereof. It should be understood by those skilled in the art that the present invention is not limited by the examples, and the first example and the description only illustrate the principle of the present invention, and the broadband absorption of electromagnetic waves in different bands and the high transmittance in different optical bands can be realized by scaling up or down the size of the present invention, or forming the upper grid transparent resonant layer by using different materials and dielectric substrates and grids with different grid shapes. Without departing from the spirit and scope of the invention, it is intended that all changes and modifications within the spirit and scope of the invention be embraced by the appended claims, e.g., by enabling a skilled person to modify the parameters set forth above to accommodate different operating bands or to modify the parameters involved to make them different in structure and performance from the examples set forth herein. The scope of the invention is defined by the claims and their equivalents.
Claims (10)
1. A metamaterial optical window is characterized by comprising a plurality of periodically arranged structural units, wherein each structural unit is composed of a transparent dielectric substrate, a net gate transparent resonant structure embedded in the deep surface of the transparent dielectric substrate, and a transparent metal net gate layer embedded in the deep surface of the transparent dielectric substrate.
2. The metamaterial optical window of claim 1, wherein the net transparent resonant structure is integrally formed with the transparent dielectric substrate and the transparent metal net gate layer.
3. The metamaterial optical window as in claim 1, wherein the mesh transparent resonant structure is composed of a cross ring formed by interconnected first micro metal mesh gates and a cross frame formed by interconnected second micro metal mesh gates, and the cross frame is located in the middle of the cross ring.
4. The metamaterial optical window of claim 3, wherein the first and second micro metal nets are independently shaped as one or more of a grid, a ring, and a diamond.
5. The metamaterial optical window of claim 3, wherein the materials of the first and second micro metal nets are independently selected from one or more of gold, silver, copper, aluminum, and indium tin oxide.
6. The metamaterial optical window of claim 1, wherein the transparent metal net gate layer is comprised of interconnected third micro-metal net gates.
7. The metamaterial optical window of claim 6, wherein the third micro-metal mesh gate has a shape selected from one or more of a grid, a ring, and a diamond.
8. The metamaterial optical window of claim 6, wherein the material of the third micro metal mesh gate is selected from one or more of gold, silver, copper, aluminum, and indium tin oxide.
9. The metamaterial optical window of claim 1, wherein the transparent dielectric substrate is made of one or more materials selected from the group consisting of quartz glass, fluoride infrared glass, zinc sulfide, plexiglass, transparent polymers, sapphire, and spinel.
10. A method of manufacturing a metamaterial optical window as claimed in any one of claims 1 to 9, comprising the steps of:
providing a transparent medium substrate;
and respectively etching and embedding the periodically arranged transparent net gate resonance structure and the transparent metal net gate layer on the upper surface and the lower surface of the transparent medium substrate by adopting a femtosecond laser processing technology or an excimer processing technology to obtain the metamaterial optical window.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114597671A (en) * | 2022-03-22 | 2022-06-07 | 电子科技大学 | Optical transparent broadband wave absorber and preparation method thereof |
| CN116632553A (en) * | 2023-07-26 | 2023-08-22 | 国科大杭州高等研究院 | Metamaterial optical window with low-frequency absorption shielding and high-frequency bandpass |
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