CN114563123B - External excitation type vibration cylinder pressure sensor and pressure calculation method thereof - Google Patents
External excitation type vibration cylinder pressure sensor and pressure calculation method thereof Download PDFInfo
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- CN114563123B CN114563123B CN202210457151.4A CN202210457151A CN114563123B CN 114563123 B CN114563123 B CN 114563123B CN 202210457151 A CN202210457151 A CN 202210457151A CN 114563123 B CN114563123 B CN 114563123B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0046—Fluidic connecting means using isolation membranes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
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Abstract
The invention discloses an external excitation type vibration cylinder pressure sensor and a pressure calculation method thereof, wherein the external excitation type vibration cylinder pressure sensor comprises a vibration cylinder module, a temperature diode, a coil combination and a demodulation circuit, and an isolation diaphragm is added in the vibration cylinder module to well isolate a test medium and a sensitive element, so that the medium sensitivity problem of the traditional pressure sensor is solved; and an isolation diaphragm and a guide rod are added, and the characteristic that the resonance frequency of the sensitive element can be changed by the axial deformation of the sensitive element is utilized to realize the measurement of the large pressure of the vibration cylinder sensor. The measuring requirements of the vibration cylinder sensor on different media and large pressure range are met, the inner cylinder in the sensitive element is in a radial free state, and the inner cavity and the outer cavity of the inner cylinder are in vacuum conditions, so that the external excitation type vibration cylinder pressure sensor has the advantages of lower power consumption and better long-term stability.
Description
Technical Field
The invention relates to the technical field of pressure sensors, in particular to an external excitation type vibration cylinder pressure sensor and a pressure calculation method thereof.
Background
The existing vibrating cylinder pressure sensor has the advantages of short response time, high precision, high stability, wide temperature range, low power consumption and the like, and is widely used for testing aviation and aerospace atmospheric parameter data.
Due to the working principle of the vibration cylinder sensor, a sensitive element of the sensor is in direct contact with a tested medium, and when the sensitive element resonates, the nearby tested medium can vibrate together, so that the medium sensitivity of the sensor is determined.
According to the design idea of the existing vibrating cylinder sensor, the larger the pressure value of a full-scale test is, the thicker the wall thickness of the thin-wall section of the sensitive element with the same inner diameter is, the larger the energy required for starting and maintaining vibration is, and the larger the power consumption is, the more difficult the realization is. Therefore, the vibrating cylinder sensor with the existing structure is difficult to be applied to measurement with a large pressure range, and the maximum pressure which can be tested is known to be 5 MPa.
Disclosure of Invention
In view of the above-mentioned deficiencies of the prior art, the present invention provides a vibrating cylinder pressure sensor having an isolation diaphragm and configured to measure high pressures.
In order to achieve the purpose of the invention, the invention adopts the technical scheme that:
the externally excited vibrating cylinder pressure sensor comprises a vibrating cylinder module, a temperature diode, a coil combination and a demodulation circuit;
the vibrating cylinder module comprises an outer cylinder, an opening of the outer cylinder is connected with a flange plate, and the middle part of the flange plate is provided with a gas circuit interface;
a sensing element is arranged between the outer cylinder and the flange plate, the sensing element comprises an inner cylinder and a connecting piece fixed with the end part of the inner cylinder, the connecting piece is of a hollow cylindrical structure, steps are arranged at the top and inside of the connecting piece, the top of the connecting piece is in contact with the end face of the opening of the outer cylinder, and the bottom of the connecting piece is in contact with the end face of the flange plate;
an isolation diaphragm is arranged in the connecting piece, the upper end face of the isolation diaphragm is contacted with the step end face in the connecting piece, and the lower end face of the isolation diaphragm is contacted with the upper end face of the flange and is opposite to the air channel interface;
an inner cylinder is arranged in the outer cylinder, one end of the inner cylinder is fixedly connected with the upper end face of the connecting piece, an end cover is arranged at the other end of the inner cylinder, a guide rod is arranged in the inner cylinder, and two ends of the guide rod are fixedly connected with the end face of the isolation diaphragm and the end face of the end cover respectively;
the temperature diode is arranged on the circumferential outer wall of the connecting piece and used for acquiring a temperature signal of the sensitive element;
the coil combination includes excitation coil combination and the coil combination of picking up the vibration of symmetry setting on urceolus circumference outer wall, all is provided with the interval between the circumference outer wall of excitation coil combination and the coil combination of picking up the vibration and inner tube, and the interval is 0.2mm, and excitation coil combination can produce pulsating force to inner tube section of thick bamboo wall for inner tube resonant frequency vibrates, and inner tube resonant frequency vibration is felt by the coil combination of picking up the vibration.
The demodulation circuit comprises a resonant period circuit and a temperature voltage circuit; the excitation coil combination and the vibration pickup coil combination are connected into a resonant period circuit to form a resonant period compensation loop; the temperature diode is connected to the temperature voltage circuit to form a temperature voltage compensation circuit.
The basic principle of the external excitation type vibration cylinder pressure sensor in the scheme is as follows: the vibrating cylinder module, the coil combination and the demodulation circuit form a positive feedback closed loop system meeting the self-excited oscillation, when the power supply is not switched on, the inner cylinder is in a static state, once the power supply is switched on, the inherent noise of the conditioning circuit generates weak random pulses in the exciting coil combination, the pulse signals cause the magnetic field to change through the exciting coil combination to form pulsating force, and therefore the cylinder wall of the thin-wall inner cylinder is deformed, and the inner cylinder vibrates at the low-amplitude resonance frequency. The displacement of the cylinder wall is sensed by the vibration pickup coil combination, induced electromotive force is generated in the vibration pickup coil combination, in order to maintain the vibration of the inner cylinder, the conditioning circuit amplifies the induced electromotive force output by the vibration pickup coil combination and then feeds the amplified electromotive force back to the excitation coil combination to generate excitation force, and then the inner cylinder rapidly enters a resonance state and maintains the vibration with certain amplitude. When a test medium acts on the inner barrel through the gas circuit interface and the isolation diaphragm and the guide rod, the equivalent rigidity of the inner barrel is changed, the output resonant frequency of the inner barrel is further changed, meanwhile, the temperature diode is arranged on the circumferential outer wall of the connecting piece, the ambient temperature can be converted into a temperature voltage signal for precision compensation of the sensor, and the current test medium pressure is resolved by the back-end system through the output frequency of the inner barrel and the temperature voltage signal in combination with a calculation formula.
In the scheme, the isolation diaphragm is arranged in the connecting piece and isolates the test medium and the sensitive element, so that the test medium cannot vibrate along with the sensitive element, and the medium sensitivity of the sensor is reduced; the pressure value of the test medium acts on the end cover of the inner cylinder through the isolation diaphragm and the guide rod, the pressure causes the axial tension of the inner cylinder to change the resonant frequency, and the pressure value indirectly acts on the inner cylinder through the isolation diaphragm and the guide rod.
Furthermore, as a specific setting mode of the isolation diaphragm, the diameter of the isolation diaphragm is the same as the outer diameter of the upper end face of the flange plate, and is phi 12mm, and the thickness of the isolation diaphragm is 0.02-0.04 mm.
Furthermore, the connection modes between the isolation diaphragm and the connecting piece and between the outer cylinder and the connecting piece are vacuum electron beam welding; the cavity between inside, inner tube and the urceolus of inner tube is vacuum state, compares current vibration section of thick bamboo pressure sensor, and the inner tube is easier to start vibrating and maintain the resonance state for whole external excitation formula vibration section of thick bamboo pressure sensor has the lower and better advantage of long-term stability of consumption.
Furthermore, the diameter of the guide rod is 2mm, the pressure value of the test medium transferred by the guide rod is more sensitive, the test precision of the whole pressure sensor is improved, and the isolation diaphragm, the inner cylinder and the guide rod are made of constant-elasticity alloy. The constant elasticity alloy, namely the alloy with the elasticity modulus almost not changing along with the temperature in a certain temperature range, ensures that the resonance frequency of the inner cylinder is more standard, reduces the influence of the environment temperature on the resonance frequency, has good repeatability and stability, and enlarges the applicability of the whole external excitation type vibration cylinder pressure sensor.
Further, the axis of the inner cylinder, the axis of the end cover, the axis of the guide rod and the axis of the isolated diaphragm are all coaxial. The pressure of a test medium can be uniformly transmitted to the inner cylinder through the isolation diaphragm, the guide rod and the end cover, so that the inner cylinder generates axial deformation, and the measurement accuracy of the pressure sensor of the external excitation type vibration cylinder is improved.
The scheme also provides a pressure calculation method of the external excitation type vibration cylinder pressure sensor, which comprises the following steps:
s1, enabling a test medium to act on the isolation diaphragm through the air path interface, and obtaining an output period value of the resonance period compensation circuit and a temperature voltage value of the temperature voltage compensation circuit;
s2, normalizing the output period value and the temperature voltage value to obtain a processed output period value and a processed temperature voltage value;
wherein, the first and the second end of the pipe are connected with each other,Xthe temperature voltage value is normalized;Ythe output period value after normalization processing is obtained;VTthe actual temperature voltage value is output by the temperature voltage compensation circuit;VRthe output temperature voltage value of the temperature voltage compensation circuit under the condition of 35 ℃;SKis a debugging coefficient;TMthe output period value of the resonance period compensation loop under the vacuum condition;TPcompensating the actual output period value of the loop for the resonance period;
s3, calculating the pressure value of the current test medium according to the temperature voltage value and the output period value after normalization treatment, wherein the calculation formula is as follows:
wherein the content of the first and second substances,Pfor the pressure value of the current test medium,k00~k24 is a characteristic coefficient;Sis the full scale pressure coefficient of the sensor.
The invention has the beneficial effects that: compared with the traditional pressure sensor, the externally excited vibration cylinder pressure sensor in the scheme can well isolate a test medium and a sensitive element by adding the isolation diaphragm, so that the medium sensitivity problem of the traditional pressure sensor is solved; and an isolation diaphragm and a guide rod are added, and the characteristic that the axial deformation of a sensitive element can change the resonance frequency of the sensitive element is utilized to realize the measurement of the large pressure of the vibrating cylinder sensor. The measuring requirements of the vibration cylinder sensor on different media and large pressure range are met, the inner cylinder in the sensitive element is in a radial free state, and the inner cavity and the outer cavity of the inner cylinder are in vacuum conditions, so that the external excitation type vibration cylinder pressure sensor has the advantages of lower power consumption and better long-term stability.
Drawings
Fig. 1 is a schematic structural diagram of an external excitation type vibration cylinder pressure sensor.
Fig. 2 is a schematic view of an internal sectional structure of the vibration cylinder module.
Fig. 3 is a circuit schematic of a resonant period compensation loop.
Fig. 4 is a schematic circuit diagram of the temperature-voltage compensation circuit.
Wherein, 1, vibrating the cylinder module; 2. a temperature diode; 3. combining coils; 301. combining exciting coils; 302. a vibration pick-up coil assembly; 4. an outer cylinder; 5. a flange plate; 6. a gas path interface; 7. an inner barrel; 8. a connecting member; 9. an isolation diaphragm; 10. an end cap; 11. a guide bar; 12. a demodulation circuit.
Detailed Description
The following description of the embodiments of the present invention is provided to facilitate the understanding of the present invention by those skilled in the art, but it should be understood that the present invention is not limited to the scope of the embodiments, and it will be apparent to those skilled in the art that various changes may be made without departing from the spirit and scope of the invention as defined and defined in the appended claims, and all matters produced by the invention using the inventive concept are protected.
As shown in fig. 1 to 4, the present invention provides an external excitation type vibration cylinder pressure sensor, which includes a vibration cylinder module 1, a temperature diode 2, a coil assembly 3 and a demodulation circuit 12.
The vibration cylinder module 1 comprises an outer cylinder 4, a flange 5 is connected to an opening of the outer cylinder 4, and an air path interface 6 is arranged in the middle of the flange 5.
Be provided with sensing element between urceolus 4 and the ring flange 5, sensing element include inner tube 7 and with inner tube 7 end fixing's connecting piece 8, connecting piece 8 is hollow circular cylinder structure, the top and the inside of connecting piece 8 all are provided with the step, the terminal surface contact of 8 tops of connecting piece and the 4 openings of urceolus, the terminal surface contact of 8 bottoms of connecting piece and ring flange 5.
An isolation diaphragm 9 is arranged inside the connecting piece 8, the upper end face of the isolation diaphragm 9 is in contact with the step end face inside the connecting piece 8, and the lower end face of the isolation diaphragm 9 is in contact with the upper end face of the flange plate 5 and is just opposite to the air path interface 6.
An inner cylinder 7 is arranged in the outer cylinder 4, one end of the inner cylinder 7 is fixedly connected with the upper end face of the connecting piece 8, an end cover 10 is arranged at the other end of the inner cylinder 7, a guide rod 11 is arranged in the inner cylinder 7, and two ends of the guide rod 11 are fixedly connected with the end face of the isolation diaphragm 9 and the end face of the end cover 10 respectively.
By arranging the isolation diaphragm 9 in the connecting piece 8 and isolating the test medium and the sensitive element by the isolation diaphragm 9, the test medium cannot vibrate along with the sensitive element, so that the medium sensitivity of the sensor is reduced; the pressure value of the test medium acts on the end cover 10 of the inner cylinder 7 through the isolation diaphragm 9 and the guide rod 11, the pressure causes the axial stretching of the inner cylinder 7 to change the resonant frequency, and the pressure value indirectly acts on the inner cylinder 7 through the isolation diaphragm 9 and the guide rod 11, so that the pressure value of the full-scale test of the external excitation type vibration cylinder pressure sensor is larger under the condition of the inner cylinder 7 with the same thickness, and the external excitation type vibration cylinder pressure sensor is suitable for the measurement of a large pressure range.
The axis of the inner cylinder 7, the axis of the end cover 10, the axis of the guide rod 11 and the axis of the isolating diaphragm 9 are all coaxial. The pressure of a test medium can be uniformly transmitted to the inner cylinder 7 through the isolation diaphragm 9, the guide rod 11 and the end cover 10, so that the inner cylinder 7 generates axial deformation, and the measurement accuracy of the external excitation type vibration cylinder pressure sensor is improved.
Under the condition that the external excitation type vibration cylinder pressure sensor meets the requirement of measuring strength, the isolation diaphragm 9 is required to be as thin as possible, as a specific arrangement mode of the isolation diaphragm 9, the diameter of the isolation diaphragm 9 is the same as the outer diameter of the upper end face of the flange plate 5, the diameter of the isolation diaphragm is phi 12mm, and the thickness of the isolation diaphragm 9 is 0.02-0.04 mm.
The diameter of the guide rod 11 is 2mm, the pressure value of the test medium transmitted by the guide rod 11 is more sensitive, the test precision of the whole pressure sensor is improved, and the isolation diaphragm 9, the inner cylinder 7 and the guide rod 11 are made of constant-elasticity alloy. The constant elasticity alloy is an alloy with the elasticity modulus almost not changing along with the temperature within a certain temperature range, so that the resonance frequency of the inner cylinder 7 is more standard, the influence of the environment temperature on the resonance frequency is reduced, the repeatability and the stability are good, and the applicability of the whole external excitation type vibration cylinder pressure sensor is enlarged.
The connection modes between the isolation diaphragm 9 and the connecting piece 8 and between the outer barrel 4 and the connecting piece 8 are vacuum electron beam welding; the cavity inside the inner cylinder 7 and between the inner cylinder 7 and the outer cylinder 4 is in a vacuum state, and compared with the existing vibration cylinder pressure sensor, the inner cylinder 7 is more easy to start vibrating and maintain a resonance state, so that the whole external excitation type vibration cylinder pressure sensor has the advantages of lower power consumption and better long-term stability.
The temperature diode 2 is arranged on the circumferential outer wall of the connecting piece 8, and the temperature diode 2 is used for acquiring a temperature signal of the sensitive element.
The coil assembly 3 comprises an excitation coil assembly 301 and a vibration pickup coil assembly 302 which are symmetrically arranged on the circumferential outer wall of the outer cylinder 4, and a space is arranged between the excitation coil assembly 301 and the vibration pickup coil assembly 302 and the circumferential outer wall of the inner cylinder 7, and the space is preferably but not limited to 0.2 mm.
The demodulation circuit 12 includes a resonance period circuit and a temperature voltage circuit; the excitation coil combination 301 and the vibration pickup coil combination 302 are connected to a resonant period circuit to form a resonant period compensation loop; the temperature diode 2 is connected to a temperature voltage circuit to form a temperature voltage compensation circuit.
As shown in fig. 3, the resonant period compensation loop is a positive feedback closed loop system that satisfies self-oscillation. When the power supply is not switched on, the inner cylinder 7 is in a static state, once the power supply is switched on, the inherent noise of the demodulation circuit 12 generates weak random pulses in the excitation coil assembly 301, the pulse signals cause the change of a magnetic field through the excitation coil assembly 301, and a pulsating force is formed, so that the deformation of the cylinder wall of the inner cylinder 7 is caused, and the inner cylinder 7 vibrates at a low-amplitude resonant frequency. The displacement of the wall of the inner cylinder 7 is sensed by the vibration pickup coil, and an induced electromotive force is generated in the vibration pickup coil. C1, R1, C2, R2, C3, R3 and U1 in the resonance period compensation loop form a first-stage filtering, amplifying and phase adjusting circuit, and the first-stage filtering, amplifying and phase adjusting circuit is used for filtering, amplifying and phase adjusting the induced voltage of the vibration pickup coil assembly 302; the R4, the R5 and the U2 form a second-stage proportional amplification circuit, and the output voltage of the previous-stage circuit is amplified in proportion; the output voltage signal of the second-stage proportional amplifying circuit is divided into two paths, one path of output signal is input into a clipping circuit consisting of C5, R6, R7, R8, R9, R10, R11, R12, R13, V1, V2, V3 and U3 to clip the circuit voltage, the other path of output signal is input into a proportional amplifying circuit consisting of C4, R16, R17 and U4 to carry out proportional amplification on the voltage signal, and the amplified voltage signal passes through a comparator D1 to output a standard TTL square wave signal. One part of the TTL square wave signals are used as periodic signals output by the sensor, and the other part of the TTL square wave signals are used as sensor excitation signals and input into the exciting coil to maintain the resonance state of the inner cylinder 7.
As shown in fig. 4, the +15V power supply in the temperature-voltage compensation circuit supplies power to the temperature diode 2 through a voltage dividing circuit composed of R20, R21, and V4, and the voltage of the temperature diode 2 is output as a temperature-voltage signal of the sensor through a proportional amplifying circuit composed of R22, C7, R23, R24, and U5. When the external excitation type vibration cylinder pressure sensor is used for carrying out pressure test on a test medium, a power supply is switched on, the inherent noise of the conditioning circuit generates weak random pulses in the excitation coil combination 301, the pulse signals cause the change of a magnetic field through the excitation coil combination 301 to form pulsating force, and therefore the deformation of the cylinder wall of the thin-wall inner cylinder 7 is caused, and the inner cylinder 7 vibrates at a low-amplitude resonant frequency. The displacement of the cylinder wall is sensed by the vibration pickup coil assembly 302, induced electromotive force is generated in the vibration pickup coil assembly 302, in order to maintain the vibration of the inner cylinder 7, the conditioning circuit amplifies the induced electromotive force output by the vibration pickup coil assembly 302 and then feeds the amplified electromotive force back to the excitation coil assembly 301 to generate excitation force, so that the inner cylinder 7 rapidly enters a resonance state and maintains the vibration with certain amplitude. Then the test medium is communicated with the gas circuit interface 6, when the test medium acts on the inner cylinder 7 through the isolation diaphragm 9 and the guide rod 11, the equivalent rigidity of the inner cylinder 7 is changed, the output resonance frequency of the inner cylinder 7 is further changed, meanwhile, the temperature diode 2 is arranged on the circumferential outer wall of the connecting piece 8, the ambient temperature can be converted into a temperature voltage signal for precision compensation of the sensor, and the current test medium pressure is calculated by the back-end system through the output frequency and the temperature voltage signal of the inner cylinder 7 and combining a calculation formula.
The scheme also provides a pressure calculation method of the external excitation type vibration cylinder pressure sensor, which comprises the following steps:
the method comprises the following steps:
s1, enabling a test medium to act on the isolation diaphragm 9 through the air path interface 6, and obtaining an output period value of the resonance period compensation circuit and a temperature voltage value of the temperature voltage compensation circuit;
s2, normalizing the output period value and the temperature voltage value to obtain a processed output period value and a processed temperature voltage value;
wherein the content of the first and second substances,Xthe temperature voltage value is normalized;Ythe output period value after normalization processing is obtained;VTthe actual temperature voltage value is output by the temperature voltage compensation circuit;VRthe output temperature voltage value of the temperature voltage compensation circuit under the condition of 35 ℃;SKis a debugging coefficient;TMthe output period value of the resonance period compensation loop under the vacuum condition;TPcompensating the actual output period value of the loop for the resonance period;
s3, calculating the pressure value of the current test medium according to the temperature voltage value and the output period value after normalization treatment, wherein the calculation formula is as follows:
wherein the content of the first and second substances,Pfor the pressure value of the current test medium,k00~k24 is a characteristic coefficient;Sis the full scale pressure coefficient of the sensor.
In summary, compared with the existing traditional pressure sensor, the external excitation type vibration cylinder pressure sensor in the scheme can well isolate the test medium and the sensitive element by adding the isolation diaphragm 9, and the medium sensitivity problem of the existing traditional pressure sensor is solved; the isolation diaphragm 9 and the guide rod 11 are added, and the characteristic that the resonance frequency of the vibration cylinder sensor can be changed by the axial deformation of the inner cylinder is utilized to realize the measurement of the large pressure of the vibration cylinder sensor. The measuring requirements of the vibration cylinder sensor on different media and large-pressure range are met, the inner cylinder 7 in the sensitive element is in a radial free state, and the inner cavity and the outer cavity of the inner cylinder 7 are both in a vacuum condition, so that the external excitation type vibration cylinder pressure sensor has the advantages of lower power consumption and better long-term stability.
Claims (6)
1. An external excitation type vibration cylinder pressure sensor is characterized by comprising a vibration cylinder module, a temperature diode, a coil combination and a demodulation circuit;
the vibration cylinder module comprises an outer cylinder, an opening of the outer cylinder is connected with a flange, and the middle part of the flange is provided with a gas circuit interface;
a sensing element is arranged between the outer cylinder and the flange plate, the sensing element comprises an inner cylinder and a connecting piece fixed with the end part of the inner cylinder, the connecting piece is of a hollow cylindrical structure, steps are arranged at the top and inside of the connecting piece, the top of the connecting piece is contacted with the end face of the opening of the outer cylinder, and the bottom of the connecting piece is contacted with the end face of the flange plate;
an isolation diaphragm is arranged in the connecting piece, the upper end face of the isolation diaphragm is in contact with the end face of the step in the connecting piece, and the lower end face of the isolation diaphragm is in contact with the upper end face of the flange and is opposite to the air path interface;
the inner cylinder is arranged in the outer cylinder, one end of the inner cylinder is fixedly connected with the upper end face of the connecting piece, the other end of the inner cylinder is provided with an end cover, a guide rod is arranged in the inner cylinder, and two ends of the guide rod are respectively and fixedly connected with the end face of the isolation diaphragm and the end face of the end cover;
the temperature diode is arranged on the circumferential outer wall of the connecting piece and used for collecting temperature signals of the sensitive element;
the coil combination comprises an excitation coil combination and a vibration pickup coil combination which are symmetrically arranged on the outer circumferential wall of the outer barrel, and a space is arranged between the excitation coil combination and the vibration pickup coil combination and the outer circumferential wall of the inner barrel;
the demodulation circuit comprises a resonant period circuit and a temperature voltage circuit; the excitation coil combination and the vibration pickup coil combination are connected into a resonant period circuit to form a resonant period compensation loop; the temperature diode is connected to the temperature voltage circuit to form a temperature voltage compensation circuit;
the resonance period compensation loop is a positive feedback closed loop system meeting self-oscillation; when the power supply is not switched on, the inner cylinder is in a static state, once the power supply is switched on, the inherent noise of the demodulation circuit generates weak random pulses in the excitation coil combination, the pulses cause the change of a magnetic field through the excitation coil combination to form pulse force, so that the deformation of the cylinder wall of the inner cylinder is caused, the inner cylinder vibrates at the low-amplitude resonance frequency, and induced electromotive force is generated in the vibration pickup coil combination; the conditioning circuit amplifies the induced electromotive force output by the vibration pickup coil combination and then feeds the amplified electromotive force back to the excitation coil combination to generate an excitation force, so that the inner cylinder enters a resonance state and keeps vibrating with a certain amplitude; the test medium is communicated with the gas circuit interface, and when the test medium acts on the inner cylinder through the isolation diaphragm and the guide rod, the equivalent rigidity of the inner cylinder is changed, and further the output resonant frequency of the inner cylinder is changed.
2. The pressure sensor of claim 1, wherein the diameter of the isolation diaphragm is the same as the outer diameter of the upper end surface of the flange plate, and the diameter of the isolation diaphragm is phi 12mm, and the thickness of the isolation diaphragm is 0.02-0.04 mm.
3. The externally excited vibratory cylinder pressure sensor of claim 2 in which the isolation diaphragms and the connecting members and the outer cylinders and the connecting members are all connected by vacuum electron beam welding; the inner part of the inner cylinder and the cavities between the inner cylinder and the outer cylinder are all in a vacuum state.
4. The externally excited vibratory cylinder pressure sensor of claim 2 in which the guide rod is 2mm in diameter and the isolation diaphragm, inner cylinder and guide rod are all of a constant elasticity alloy.
5. The externally excited vibratory cartridge pressure sensor of claim 4 wherein the axis of the inner cartridge, the axis of the end cap, the axis of the guide rod, and the axis of the isolation diaphragm are all coaxial.
6. A pressure calculation method of the externally excited vibration cylinder pressure sensor according to any one of claims 1 to 5, comprising the steps of:
s1, enabling a test medium to act on the isolation diaphragm through the air path interface, and obtaining an output period value of the resonance period compensation circuit and a temperature voltage value of the temperature voltage compensation circuit;
s2, normalizing the output period value and the temperature voltage value to obtain a processed output period value and a processed temperature voltage value;
wherein, the first and the second end of the pipe are connected with each other,Xthe temperature voltage value is normalized;Ythe output period value after normalization processing is obtained;VTthe actual temperature voltage value is output by the temperature voltage compensation circuit;VRoutputting a temperature voltage value of the temperature voltage compensation circuit under the condition of 35 ℃;SKis a debugging coefficient;TMthe output period value of the resonance period compensation loop under the vacuum condition;TPcompensating the actual output period value of the loop for the resonance period;
s3, calculating the pressure value of the current test medium according to the temperature voltage value and the output period value after normalization treatment, wherein the calculation formula is as follows:
wherein the content of the first and second substances,Pfor the pressure value of the current test medium,k00~k24 is a characteristic coefficient;Sbeing sensorsA full scale pressure coefficient.
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