CN110567573A - Method for outputting measured exciting force signal of piezoelectric vibration sensor with high sensitivity - Google Patents
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- 238000005452 bending Methods 0.000 claims description 8
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- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
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- 239000002131 composite material Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
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- G—PHYSICS
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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Abstract
The invention discloses a method for outputting a measured exciting force signal of a piezoelectric vibration sensor with high sensitivity, and aims to solve the problem that the traditional cantilever beam type piezoelectric vibration sensor cannot accurately measure a vibration signal with higher frequency at present. The invention is realized by the following technical scheme: the piezoelectric sensing element is overlapped to form a piezoelectric cantilever beam serving as the sensing element, vibration to be measured of the mass block acts on the sensing element, a damping block is fixed at a position close to the base of the cantilever beam formed by the piezoelectric cantilever beam, the cantilever beam piezoelectric body vibrates under the action of the mass block, when the vibration frequency is close to the first-order resonance frequency of the cantilever beam piezoelectric body, the condition that the amplitude near the first-order resonance frequency point is increased sharply due to resonance is effectively inhibited under the damping action of the damping block, the formed effect is that the increase of the cantilever beam vibration and the increase of the measured exciting force are in a corresponding linear relation in a frequency band lower than the second-order resonance frequency, and the requirement of the upper limit of frequency monitoring to reach the high-sensitive upper limit of high frequency can be obtained.
Description
Technical Field
The invention relates to a piezoelectric vibration sensor in the field of vibration monitoring, in particular to a cantilever beam type piezoelectric vibration sensor with high damping, high frequency upper limit and high sensitivity output.
Background
The cantilever beam type piezoelectric vibration sensor has the advantages of high sensitivity, good signal-to-noise ratio, strong output signal and the like, and plays an important role in some special application fields (such as nuclear energy industry). The sensing unit of the sensor is mainly a cantilever beam formed by two piezoelectric sheets fastened together. When excited by external vibrations, the cantilever beam bends, producing a high output signal due to changes in its dimensions. However, the lower limit of the frequency at which the cantilever structure can be accurately measured is due to its low resonant frequency. It is understood that the upper limit of the frequency of the cantilever beam type vibration sensor currently on the market is usually 500Hz or less. In the current vibration monitoring field, the upper limit of vibration frequency monitoring is generally required to reach 1000Hz (even more than 2000 Hz). As the cantilever beam type piezoelectric vibration sensor cannot meet most vibration monitoring requirements on the upper limit index of frequency, users have to adopt a shear type (or compression type) piezoelectric vibration sensor with relatively low sensitivity. Therefore, how to improve the upper limit of the frequency of the cantilever beam type piezoelectric vibration sensor to meet the application requirement of vibration monitoring and make the cantilever beam type piezoelectric vibration sensor with the advantage of high sensitivity widely applied is a problem to be solved urgently at present.
At present, similar to cantilever beam type vibration sensors, such as vibration sensors with optical fiber cantilever beam type structures, optical fiber cantilever beam type acceleration sensors, silicon cantilever beam type vibration sensors and the like proposed by the prior art documents, but the sensor structures all have many defects, the structures are complex, the sensitivity is low, the sensing precision is easily influenced by external interference factors because the optical fiber cantilever beam type vibration sensor adopts a single light path sensing structure, and the single light path scheme adopted in the documents has the defect that the vibration direction cannot be judged. The structure of the optical fiber cantilever beam type acceleration sensor is improved in sensitivity and simple in structure, but the sensing precision is also easily influenced by external interference due to the fact that a single-light-path scheme is adopted. A further emphasis on the sensor is the practical packaging problem. The sensor is difficult to process and package because the sensing element is relatively small and the relative fixing position is very strict. There is a need to address the problem of aligning and fixing the positions of the hermetically sealed optical fibers with respect to each other. In some occasions requiring that the sensor can be used for a long time and cannot be easily replaced or calibrated, the stability requirement of the selected sensor is stricter and the selected sensor can withstand the test for a long time.
The commonly used piezoelectric cantilever 3 has two structures of a unimorph and a bimorph. The single piezoelectric sheet structure is formed by bonding a thin piezoelectric ceramic sheet and a metal sheet with similar area; the piezoelectric ceramic is polarized along the thickness direction, one end of the composite long sheet is fixed on the base, and the stress in the piezoelectric sheet comes from the change of the length of the curved surface when the cantilever beam bends and vibrates. The double piezoelectric sheet structure is formed by bonding two thin piezoelectric ceramic sheets with the same size, and one end of the superposed sheet is fixed on the base 5 to form a cantilever beam.
Because the impedance of the piezoelectric plate in the cantilever beam is very high at the working frequency, the load resistor and the piezoelectric plate are connected in series, and the total voltage shared by the resistors with larger resistance values is also larger. The output voltage increases with increasing load resistance. Meanwhile, the corresponding linear relationship between the amplitude of the output voltage and the amplitude of the measured exciting force is lower than that of the piezoelectric cantilever beam 3 near the resonance frequency point in the frequency band near the non-resonance frequency point, which is mainly because the bending vibration amplitude of the piezoelectric cantilever beam 3 near the resonance frequency point is sharply increased due to resonance, so that the internal stress of the piezoelectric cantilever beam 3 is sharply increased, and the charge amount generated by the stress sensed in the piezoelectric sheet is also sharply increased. The bending vibration of the cantilever beam piezoelectric layer forms compression and stretching of the upper surface and the lower surface, the electric quantity of the upper surface and the electric quantity of the lower surface of the cantilever beam piezoelectric layer are equal, and positive and negative charges with opposite signs are formed on the upper surface and the lower surface of the cantilever beam piezoelectric layer to generate voltage. Therefore, both the output voltage and the power in the vicinity of the resonance frequency point increase sharply. Generally speaking, these quantities of electricity are not directly acceptable to subsequent display, recording and analysis instruments. Therefore, a dedicated measuring line must be attached to the sensors for different electromechanical transformation principles. The measuring circuit is used for changing the output electric quantity of the sensor into a general voltage signal which can be accepted by a subsequent display and analysis instrument.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a cantilever beam type high-damping piezoelectric vibration sensor which has high damping, high frequency upper limit and high sensitivity output and meets most of vibration monitoring requirements, so as to solve the problem that the traditional cantilever beam type piezoelectric vibration sensor cannot accurately measure a high-frequency vibration signal.
The invention solves the problems through the following technical scheme. A method for outputting a measured exciting force signal of a piezoelectric vibration sensor with high sensitivity has the following technical characteristics: the piezoelectric cantilever beam 3 is fixed by a base 5, one end of the piezoelectric cantilever beam is fixed on the base 5, and the other end of the piezoelectric cantilever beam is suspended in the air to fix the mass block 1; the piezoelectric cantilever 3 is used as a sensitive element and formed by overlapping at least two piezoelectric sensitive elements, the vibration to be measured of the mass block 1 acts on the sensitive element, and a damping block 4 is fixed at the position, close to the base 5, of the formed cantilever; the cantilever beam piezoelectric body vibrates under the action of the mass block 1, when the vibration frequency is close to the first-order resonance frequency of the cantilever beam piezoelectric body, the damping of the damping block 4 acts on the piezoelectric cantilever beam 3 to inhibit the rapid increase of the vibration amplitude resonance near the first-order resonance frequency point of the cantilever beam bending vibration mode, so as to obtain a measurement excitation force signal with higher upper frequency limit and low measurement error, output signal lines 2 respectively led out from the upper surface and the lower surface of the excitation force signal output end of the piezoelectric cantilever beam 3 output the measurement excitation force signal, measure an electric signal obtained by converting the excitation force signal through the piezoelectric effect, and output a response signal corresponding to the vibration to be measured.
Compared with the prior art, the invention has the following beneficial effects. .
High damping, high frequency upper limit. One end of the piezoelectric cantilever 3 is fixed on a base 5, the other end of the piezoelectric cantilever is suspended to fix a mass block 1, a damping block 4 is fixed at one end of the piezoelectric cantilever 3 close to the base 5, and a cantilever piezoelectric body vibrates under the action of the mass block 1. When the vibration frequency is close to the first-order resonance frequency of the cantilever piezoelectric body, the situation that the amplitude near the first-order resonance frequency point is sharply increased due to resonance is effectively inhibited under the damping action of the damping block 4, the formed effect is that the amplitude of the cantilever vibration and the amplitude of the measured exciting force are in a corresponding linear relation in a frequency band lower than the second-order resonance frequency, the high-frequency upper limit of 1000Hz and even more than 2000Hz with high sensitivity required by the upper limit of frequency monitoring can be obtained, and most vibration monitoring requirements can be met. When the vibration frequency of the piezoelectric cantilever 3 is lower than the second-order resonance frequency, the mass block 1 continuously reacts when being vibrated, so that the cantilever part of the piezoelectric cantilever 3 is deformed, and very high voltage sensitivity (about 1V/g) is generated. Experimental results show that the damping force generated by the damping block 4 fixed close to the base 5 can suppress the amplitude of the cantilever beam in the vicinity of the first-order resonance frequency point from being increased rapidly due to resonance, thereby improving the linearity of the output signal.
The invention adopts the damping blocks 4 with different damping parameters, and the damping ratio of the sensor is different, thereby inhibiting the amplitude of the piezoelectric cantilever beam 3 near the resonance point to different degrees, when the cantilever beam bends and vibrates, the stress vectors applied to the upper surface and the lower surface of the piezoelectric sheet are just opposite, and the larger the damping ratio zeta of the sensor is, the smaller the resonance amplitude A (omega) is under the damping action of the damping blocks 4 of the piezoelectric cantilever beam 3. Therefore, under the action of damping, the condition that the amplitude of the piezoelectric cantilever 3 sharply increases near the resonant frequency point can be effectively inhibited, and the amplitude-frequency characteristic linearity of the piezoelectric cantilever 3 can be remarkably optimized, so that the high-frequency measurement error of the sensor is reduced, and the upper limit of the measurement frequency is improved.
Drawings
Fig. 1 is a sectional view of an embodiment of a method for outputting a measured excitation force signal of a piezoelectric vibration sensor with high sensitivity according to the present invention.
In the figure: 1 mass block, 2 output signal lines, 3 piezoelectric cantilever beams, 4 damping blocks and 5 bases.
The present invention will be described in further detail with reference to examples.
Detailed Description
See fig. 1. According to the invention, the piezoelectric cantilever beam 3 is fixed by the base 5, one end is fixed on the base 5, and the other end is suspended to fix the mass block 1; the piezoelectric cantilever 3 is used as a sensitive element and formed by overlapping at least two piezoelectric sensitive elements, the vibration to be measured of the mass block 1 acts on the sensitive element, and a damping block 4 is fixed at the position, close to the base 5, of the formed cantilever; the cantilever beam piezoelectric body vibrates under the action of the mass block 1, when the vibration frequency is close to the first-order resonance frequency of the cantilever beam piezoelectric body, the damping of the damping block 4 acts on the piezoelectric cantilever beam 3 to inhibit the rapid increase of the vibration amplitude resonance near the first-order resonance frequency point of the cantilever beam bending vibration mode, so as to obtain a measurement excitation force signal with higher upper frequency limit and low measurement error, output signal lines 2 respectively led out from the upper surface and the lower surface of the excitation force signal output end of the piezoelectric cantilever beam 3 output the measurement excitation force signal, measure an electric signal obtained by converting the excitation force signal through the piezoelectric effect, and output a response signal corresponding to the vibration to be measured. Wherein: and output signal wires 2 are respectively led out from the upper surface and the lower surface of the piezoelectric cantilever beam 3 and are used for outputting measurement signals of the sensor. The mass block 1 is fixedly arranged at the tail end of the suspension end of the piezoelectric cantilever beam 3. The mass block 1 is made of metal materials, and the weight of the mass block 1 can be adjusted through the size of the mass block to ensure that the sensor reaches the designed sensitivity index. Under the damping action of the damping block 4, the situation that the amplitude of the cantilever beam is sharply increased due to resonance near the first-order resonance frequency point is effectively inhibited, and the formed effect is that the amplitude of the cantilever beam vibration and the amplitude of the measured excitation force are in a corresponding linear relation in a frequency band lower than the second-order resonance frequency, so that a measured excitation force signal with higher frequency upper limit and low measurement error is obtained.
The damping block 4 is fixedly arranged on the upper surface and the lower surface of the piezoelectric cantilever beam 3, is close to the base and has a larger damping coefficient. The damping block 4 is fixedly bonded with the piezoelectric cantilever beam 3 in a glue bonding mode and is also fixedly bonded with the base. The damping block 4 is made of different materials, and different damping parameters can be obtained.
Preferably, the base 5 may be made of a metal material having sufficient rigidity to support the piezoelectric cantilever 3, or a ceramic or cast stone glass made of a non-metal material such as an insulating material having high overload resistance, fatigue resistance, and unbalance load resistance may be used as the base 5.
The piezoelectric cantilever 3 as a sensing element is formed by overlapping at least two piezoelectric sensing elements, the piezoelectric sensing elements are piezoelectric sheets made of piezoelectric ceramic materials, the piezoelectric sheets are formed by bonding thin piezoelectric ceramic sheets with the same size and the same polarization direction, one end of each overlapping sheet is fixed on the base 5 to form the cantilever, the upper surface of each overlapping sheet serves as one electrode, and the lower surface of each overlapping sheet serves as the other electrode. The piezoelectric sheet can be adhered on a brass sheet with the thickness of 1mm-2mm, the length of 60mm-80mm and the width of 8mm-12mm by epoxy resin to form a laminated structure, one end of the laminated sheet has the length of 6mm-10mm and is clamped in the rigid glass base and fixed on the glass base to form the cantilever. The formants are regular and clean.
The vibration of the piezoelectric cantilever beam 3 follows Hooke's law, the end part of the piezoelectric beam is subjected to bending deformation caused by external force, the stress in the piezoelectric sheet comes from the change of the length of a curved surface when the cantilever beam bends and vibrates, the vibration to be detected of the mass block 1 acts on the sensitive element, the first-order resonance frequency of the bending vibration mode of the cantilever beam is about 800Hz, the second-order resonance frequency is about 1400Hz, under the damping action of the damping block 4, when the vibration frequency of the piezoelectric cantilever beam 3 is lower than the second-order resonance frequency, the amplitude of the vibration of the cantilever beam and the amplitude of the exciting force to be detected are in corresponding linear relation, the mass block 1 continuously reacts when being subjected to vibration, the cantilever part of the piezoelectric cantilever beam 3 deforms to form a cantilever beam which is fixed at the position of the damping block 4.
The cantilever piezoelectric body vibrates under the action of the mass block 1, and charges are generated on the surface of the cantilever piezoelectric body. When the vibration frequency is close to the first-order resonance frequency of the cantilever piezoelectric body, the rapid increase of the amplitude near the first-order resonance frequency point due to resonance is effectively suppressed, and the vibration frequency is brought into a frequency band lower than the second-order resonance frequency. When the cantilever beam bends and vibrates, the stress vectors applied to the upper surface and the lower surface of the piezoelectric sheet are just opposite, the piezoelectric cantilever beam 3 obtains vibration under the damping action of the damping block 4, the vibration belongs to second-order system response, the upper limit of frequency monitoring is required to reach the high-sensitivity high-frequency upper limit of more than 1000Hz, and when the measured vibration frequency omega is equal to the resonance frequency omega of the sensornAnd then, according to a second-order system amplitude-frequency characteristic formula:The amplitude A (omega) of the piezoelectric cantilever beam (3) near the resonance point is suppressed by increasing the relative damping coefficient zeta, and finally the sensor with higher upper frequency limit and low measurement error is obtained.
The foregoing is directed to the preferred embodiment of the present invention and it is noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A method for outputting a measured exciting force signal of a piezoelectric vibration sensor with high sensitivity has the following technical characteristics: the piezoelectric cantilever beam (3) is fixed by the base (5), one end of the piezoelectric cantilever beam is fixed on the base (5), and the other end of the piezoelectric cantilever beam is suspended in the air to fix the mass block (1); the piezoelectric cantilever beam (3) is used as a sensitive element and formed by overlapping at least two piezoelectric sensitive elements, the vibration to be measured of the mass block (1) acts on the sensitive element, and a damping block (4) is fixed at the position, close to the base (5), of the cantilever beam formed by the vibration to be measured; the cantilever beam piezoelectric body vibrates under the action of the mass block (1), when the vibration frequency is close to the first-order resonance frequency of the cantilever beam piezoelectric body, the damping of the damping block (4) acts on the piezoelectric cantilever beam (3) to inhibit the rapid increase of amplitude resonance near the first-order resonance frequency point of the cantilever beam bending vibration mode, so that a frequency band in which the cantilever beam vibration amplification and the measured excitation force amplification are in corresponding linear relation and lower than the second-order resonance frequency is formed, a measured excitation force signal with higher upper frequency limit and low measurement error is obtained, output signal wires (2) led out from the upper surface and the lower surface of the excitation force signal output end of the piezoelectric cantilever beam (3) respectively output the measured excitation force signal, an electric signal obtained by converting the measured excitation force signal through the piezoelectric effect, and a response signal of corresponding vibration to be measured is output.
2. The method of outputting a sensed excitation force signal of a piezoelectric vibration sensor with high sensitivity as claimed in claim 1, wherein: and output signal wires (2) are respectively led out from the upper surface and the lower surface of the piezoelectric cantilever beam (3) and are used for outputting measurement signals of the sensor.
3. The method of outputting a sensed excitation force signal of a piezoelectric vibration sensor with high sensitivity as claimed in claim 1, wherein: the mass block (1) is installed and fixed at the tail end of the suspended end of the piezoelectric cantilever beam (3), and the length-diameter ratio of the mass block ranges from 2:1 to 1: 2.
4. The method of outputting a sensed excitation force signal of a piezoelectric vibration sensor with high sensitivity as claimed in claim 1, wherein: the mass block (1) is made of metal materials, and the weight of the mass block (1) is adjusted through the size of the mass block to ensure that the sensor reaches the designed sensitivity index.
5. The method of outputting a sensed excitation force signal of a piezoelectric vibration sensor with high sensitivity as claimed in claim 1, wherein: the damping block (4) is fixedly bonded with the piezoelectric cantilever beam (3) in a glue bonding mode and is also fixedly bonded with the base.
6. The method of outputting a sensed excitation force signal of a piezoelectric vibration sensor with high sensitivity as claimed in claim 1, wherein: the base (5) is made of metal materials or non-metal materials, namely ceramic and cast stone glass.
7. The method of outputting a sensed excitation force signal of a piezoelectric vibration sensor with high sensitivity as claimed in claim 1, wherein: the piezoelectric cantilever beam (3) as a sensitive element is formed by overlapping at least two piezoelectric sensitive elements, the piezoelectric sensitive elements are piezoelectric sheets made of piezoelectric ceramic materials, the piezoelectric sheets are formed by bonding thin piezoelectric ceramic sheets with the same size and the same polarization direction, one end of each overlapping sheet is fixed on the base (5) to form the cantilever beam, the upper surface of each overlapping sheet serves as one electrode, and the lower surface of each overlapping sheet serves as the other electrode.
8. The method of highly sensitively outputting a sensed excitation force signal of a piezoelectric vibration sensor as claimed in claim 7, wherein: the piezoelectric sheet is adhered on a brass sheet with the thickness of 1mm-2mm, the length of 60mm-80mm and the width of 8mm-12mm by using epoxy resin to form a laminated structure, one end of the laminated sheet has the length of 6mm-10mm and is clamped in a rigid glass base, and the laminated sheet is fixed on the glass base to form the cantilever beam.
9. the method of outputting a sensed excitation force signal of a piezoelectric vibration sensor with high sensitivity as claimed in claim 1, wherein: the vibration of the piezoelectric cantilever beam (3) complies with Hooke's law, the end part of the piezoelectric beam is subjected to external force to cause bending deformation, the stress in the piezoelectric sheet comes from the change of the length of a curved surface when the cantilever beam bends and vibrates, the vibration to be detected of the mass block (1) acts on a sensitive element, meanwhile, under the damping action of the damping block (4), the vibration frequency of the piezoelectric cantilever beam (3) is lower than the second-order resonance frequency, the amplification of the vibration of the cantilever beam and the amplification of the vibration force to be detected are in corresponding linear relation, the mass block (1) continuously reacts when being subjected to vibration, the cantilever part of the piezoelectric cantilever beam (3) deforms to form the cantilever beam, the cantilever beam is fixed at the position of the damping block (4) close to the base (5), and.
10. the method of outputting a sensed excitation force signal of a piezoelectric vibration sensor with high sensitivity as claimed in claim 1, wherein: when the cantilever beam bends and vibrates, the stress vectors applied to the upper surface and the lower surface of the piezoelectric sheet are just opposite, the piezoelectric cantilever beam (3) obtains high-frequency upper limit that the vibration belongs to second-order system response and the frequency monitoring upper limit requirement reaches over 1000Hz with high sensitivity under the damping action of the damping block (4), and when the measured vibration frequency omega is equal to the resonance frequency omega of the sensornAnd then, according to a second-order system amplitude-frequency characteristic formula:The amplitude A (omega) of the piezoelectric cantilever beam (3) near the resonance point is suppressed by increasing the relative damping coefficient zeta, and finally the sensor with higher upper frequency limit and low measurement error is obtained.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08195995A (en) * | 1995-01-13 | 1996-07-30 | Mitsubishi Electric Corp | Detecting element for bone-conduction voice vibration |
| JP2003322557A (en) * | 2002-04-26 | 2003-11-14 | Kawasaki Heavy Ind Ltd | Vibration detecting method and vibration detecting sensor |
| CN101441104A (en) * | 2007-11-21 | 2009-05-27 | 中国科学院半导体研究所 | Electromagnetic damping optical fiber vibration sensor |
| CN103036478A (en) * | 2013-01-11 | 2013-04-10 | 浙江工商大学 | Efficient wideband vibrating energy collector with elastic amplifying mechanism |
| CN103471702A (en) * | 2013-09-12 | 2013-12-25 | 马宾 | Fiber grating vibrating sensor with temperature insensitivity, tunable damping and high precision |
| CN104993738A (en) * | 2015-07-09 | 2015-10-21 | 清华大学深圳研究生院 | Piezoelectric power collector |
| WO2016173151A1 (en) * | 2015-04-28 | 2016-11-03 | 南京航空航天大学 | Piezoelectric oscillator structure for vibration energy recovery |
| CN106124036A (en) * | 2016-08-17 | 2016-11-16 | 西南交通大学 | A kind of novel vibration pickup and Optimization Design thereof |
| CN109274289A (en) * | 2018-12-07 | 2019-01-25 | 中国计量大学 | A kind of piezoelectric energy trapping device and method that can automatically adjust resonant frequency and bandwidth |
-
2019
- 2019-09-26 CN CN201910919198.6A patent/CN110567573A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08195995A (en) * | 1995-01-13 | 1996-07-30 | Mitsubishi Electric Corp | Detecting element for bone-conduction voice vibration |
| JP2003322557A (en) * | 2002-04-26 | 2003-11-14 | Kawasaki Heavy Ind Ltd | Vibration detecting method and vibration detecting sensor |
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