CN110411630A - A kind of vibration cylinder pressure transducer and its characteristic compensation method - Google Patents

A kind of vibration cylinder pressure transducer and its characteristic compensation method Download PDF

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Publication number
CN110411630A
CN110411630A CN201910711890.XA CN201910711890A CN110411630A CN 110411630 A CN110411630 A CN 110411630A CN 201910711890 A CN201910711890 A CN 201910711890A CN 110411630 A CN110411630 A CN 110411630A
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China
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circuit
amplifier
input terminal
resistance
output end
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刘江
梁亚俊
杨晓萍
王思颖
王晓利
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Xian Microelectronics Technology Institute
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Xian Microelectronics Technology Institute
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Priority to CN201910711890.XA priority Critical patent/CN110411630A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/26Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04Means for compensating for effects of changes of temperature, i.e. other than electric compensation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The present invention provides a kind of vibration cylinder pressure transducer and its characteristic compensation method, and structure is simple, and design rationally, can be realized the linearity error and temperature error compensation of sensor, and precision is high.It includes pedestal, the vibrating barrel being sealingly disposed on pedestal, and the single coil excitement on vibrating barrel and pick-up coil and main circuit and compensation circuit is arranged in;Main circuit includes sequentially connected positive feedback oscillating circuit and shaping circuit;The input terminal of positive feedback oscillating circuit is separately connected single coil excitement and pick-up coil, and the adjustment of Induction Peried and amplification factor is carried out to vibration frequency signal;Shaping circuit is used to carry out vibration frequency signal the phase adjustment of waveform;Compensation circuit includes temperature measuring circuit, characteristic storage circuit and power-switching circuit;Temperature measuring circuit includes temperature sensor and amplifier;Power-switching circuit input terminal connects supply voltage+VCC, output end is separately connected temperature measuring circuit and characteristic storage circuit is powered.

Description

A kind of vibration cylinder pressure transducer and its characteristic compensation method
Technical field
The invention belongs to hybrid semiconductor integrated circuit technical field, specially a kind of vibration cylinder pressure transducer and its spy Property compensation method.
Background technique
Vibration cylinder pressure transducer is to measure pressure using the intrinsic frequency of vibrating barrel, with the metal foil cylinder of vibration For sensing element, the size of intrinsic frequency depends on and the medium around the shape state of cylinder, size, material and cylinder.Tested parameter Variation so that a certain physical characteristic of cylinder is changed, to change the eigentone of cylinder, pass through the vibration of measuring cylinder Frequency is that can reach the purpose for measuring tested parameter.Vibration cylinder type sensor has evolved to higher level, is mainly used for measuring gas Body pressure and density etc..
In vibration cylinder pressure transducer, the variation of gas pressure causes a stress variation in cylinder, to change cylinder Vibration frequency.Pedestal is fixed in one end of vibration cylinder, and the closed other end is free end.It is vacuum between shell and vibration cylinder using as pressure Power reference, vibration cylinder are equivalent to Forced Second Order vibrational system, there is very high quality factor.Single coil excitement and pick-up coil pass through vibration cylinder Coupling, forms positive feedback oscillating circuit together with amplifying circuit, the precision of vibrating cylinder pressure transducer up to ten thousand/it is several.
But since its intrinsic frequency is related to the attribute of cylinder itself, so the reasons such as material, flow-route and temperature to shake There are corresponding errors for the measurement of dynamic barrel pressure pickup.
Summary of the invention
Aiming at the problems existing in the prior art, the present invention provides a kind of vibration cylinder pressure transducer and its characteristic compensation side Method, structure is simple, and design rationally, can be realized the linearity error and temperature error compensation of sensor, and precision is high.
The present invention is to be achieved through the following technical solutions:
A kind of vibration cylinder pressure transducer, including pedestal, the vibrating barrel being sealingly disposed on pedestal are arranged on vibrating barrel Single coil excitement and pick-up coil and main circuit and compensation circuit;
The main circuit includes sequentially connected positive feedback oscillating circuit and shaping circuit;Positive feedback oscillating circuit it is defeated Enter end and be separately connected single coil excitement and pick-up coil, the adjustment of Induction Peried and amplification factor is carried out to vibration frequency signal;It is whole Shape circuit is used to carry out vibration frequency signal the phase adjustment of waveform;Shaping circuit output end exports vibration frequency;
The compensation circuit includes temperature measuring circuit, characteristic storage circuit and power-switching circuit;
The temperature measuring circuit includes temperature sensor and amplifier;Temperature sensor is arranged in pedestal, is used to The operating temperature of detection sensor;Amplifier amplifies processing to acquisition signal and exports;
The characteristic storage circuit is used for the performance data by memory storage sensor, the performance data packet Include making material, manufacture craft and temperature characterisitic;
The power-switching circuit, input terminal connect supply voltage+VCC, output end be separately connected temperature measuring circuit and The power supply of characteristic storage circuit.
Preferably, the positive feedback oscillating circuit includes prime unit for adjusting Induction Peried and puts for adjusting The rear class unit of big multiple.
Further, the positive feedback oscillating circuit includes the two-stage integrated transporting discharging being arranged in outside vibrating barrel;Level-one fortune Adjustment Induction Peried is put, another grade of amplifier adjusts amplification factor.
Further, the positive feedback oscillating circuit includes the level Four integrated transporting discharging being arranged in outside vibrating barrel;First and second Grade amplifier is in adjustment Induction Peried, third and fourth grade of amplifier is for adjusting amplification factor;
Non-inverting input terminal of the pick-up coil through capacitor C1 connection first order amplifier, the non-inverting input terminal of first order amplifier is through electricity R1 ground connection is hindered, the inverting input terminal of first order amplifier is connected with output end;
The non-inverting input terminal of second level amplifier successively connects the output end of first order amplifier, second level fortune through resistance R3 with R2 The non-inverting input terminal put is grounded through capacitor C2, is grounded between resistance R2 and R3 through sequentially connected capacitor C3 and C4, second level fortune The inverting input terminal put is connected with output end, is connected between output end and capacitor C3 and C4;
Output end of the inverting input terminal of third level amplifier through resistance R4 connection second level amplifier, the reverse phase of third level amplifier Input terminal is grounded through resistance R5 connection output end, normal phase input end through capacitor C4;
The inverting input terminal of fourth stage amplifier through the output end through resistance R6 connection third level amplifier, fourth stage amplifier it is anti- Phase input terminal is through resistance R7 connection output end.
Preferably, the shaping circuit includes triode and phase inverter;The base stage of triode is through resistance R9 and positive feedback Output end of oscillating circuit connection, the inverted device of the output end of triode export vibration frequency;Triode uses the form of OC open circuit Output or emitter-base bandgap grading output;Phase inverter is using multi-stage cascade or carries out frequency multiplication, scaling down processing.
Further, the emitter E ground connection of triode T1, collector C is through resistance R10 connection supply voltage+VCC, collector C Inverted device exports vibration frequency.
Preferably, the power-switching circuit includes two converting units;First converting unit input terminal connects power supply electricity Pressure+VCC,-V is converted into using chip IC L7660, W7805 or MIC4575EE, output end connection temperature measuring circuit;The Two converting unit input terminals connect supply voltage+VCC, using MIC5205-3.3, W7805 or MIC4575 by supply voltage conversion+ VCCFor+3.3V, output end connection performance storage circuit.
Further, the temperature measuring circuit includes instrument amplifier AD620 and temperature measurement chip AD590;
The input terminal of temperature measurement chip AD590 meets supply voltage+V through resistance R11CC, and the cathode of voltage-stabiliser tube D1 is connected, The plus earth of voltage-stabiliser tube D1;The electrode input end of the output end connection AD620 of AD590, and it is negative through capacitor C9 connection AD620 Pole input terminal;
The electrode input end of instrument amplifier AD620 is grounded through resistance R12, and negative input is grounded through resistance R13, cathode Input terminal connects the input terminal of AD590 through resistance R14;Resistance R15 mono- terminates 1 foot of AD620,8 feet of another termination AD620.
Preferably, the characteristic storage circuit includes the read-only memory EEPROM using CAT24C256.
A kind of characteristic compensation method of vibration cylinder pressure transducer, based on sensor described in above-mentioned any one;Including,
Vibration frequency signal is exported by main circuit;
It is measured in real time by operating temperature of the temperature measuring circuit to sensor, output temperature signal;
Pass through the performance data of characteristic storage circuit output transducer;And by condition of different temperatures and performance data condition Under, the error information of each pressure spot is stored in read-only memory in the form of data form;The error information includes non- Linear performance data error information and temperature error data;
Vibration frequency signal and temperature signal are converted to digital quantity by F/D and A/D converter to be sent in processor, located Device is managed further according to the performance data of reading and the data form of error information, error correction is carried out to vibration frequency signal, to survey Test result compensates.
Compared with prior art, the invention has the following beneficial technical effects:
Sensor of the present invention is directed to the linearity error and temperature error of sensor, compensates to test result, leads to The temperature variation characteristic for crossing temperature-sensing element acquires the operating temperature of sensor in real time, to provide the compensation of temperature He other characteristics Signal;The method of the invention is by the non-linear and temperature error data of pressure spot each under condition of different temperatures with data simultaneously The form of table is stored in read-only memory EEPROM.In this way, by F/D and A/D converter can by frequency signal and Temperature signal is converted to digital quantity and is sent to single-chip microcontroller, further according to the performance data stored in EEPROM, can use single-chip microcontroller into The error correction of row data, compensates test result.
Further, circuit is assembled using hybrid integrated thick-film technique, improves the Stability and dependability of its work.It should Circuit has the characteristics that structure is simple, body is a small amount of light, can be sealed in inside vibrating barrel, the space for greatly reducing system is wanted It asks.
Detailed description of the invention
Fig. 1 is the circuit diagram of positive feedback oscillating circuit and shaping circuit described in present example.
Fig. 2 is the circuit diagram of power-switching circuit described in present example.
Fig. 3 is the circuit diagram of temperature measuring circuit described in present example.
Fig. 4 is the circuit diagram of characteristic storage circuit described in present example.
Specific embodiment
Below with reference to specific embodiment, the present invention is described in further detail, it is described be explanation of the invention and It is not to limit.
For the present invention on the basis of optimizing oscillating circuit, combination temperature measuring circuit and characteristic storage circuit pass through list Piece machine carries out characteristic compensation to sensor, reduces temperature factor, manufacture material and manufacturing process to output characteristics and temperature characterisitic Caused by influence and error, substantially increase measurement accuracy, while simplifying complicated hardware design, the environment for enhancing it is suitable Ying Xing.The sensor has stronger scalability, and output interface can be made a variety of shapes such as number, simulation, electric current, alarm Formula, to meet the needs of different user.It is assembled by using hydrid integrated circuit thick-film technique, so that characteristic compensating circuit itself It can be sealed in inside sensor cavity, both optimize line construction and reduced circuit volume, further through to temperature and sensor The compensation of self-characteristic further improves the measurement accuracy of vibration cylinder pressure transducer.
A kind of vibration cylinder pressure transducer of the present invention, including positive feedback oscillating circuit, shaping circuit, power-switching circuit, Temperature measuring circuit and characteristic storage circuit;
Positive feedback oscillating circuit is common by the single coil excitement, pick-up coil and external level Four integrated transporting discharging of sensor internal It constitutes, wherein preceding two stage amplifer is mainly used for adjusting Induction Peried, rear two stage amplifer is for adjusting amplification factor.The one end capacitor C1 Pick-up coil is connect, another termination first order amplifier is provided commonly for adjustment Induction Peried with resistance R1;Second level amplifier periphery electricity Road includes resistance R2, R3 and capacitor C2, C3, C4, carries out the adjustment of Induction Peried again on the basis of first order amplifier;Resistance R4 ~R7, R9 together constitutes the peripheral circuit of third and fourth grade of amplifier, forms the sine wave for cutting top;Resistance R8 mono- terminates sensor Internal single coil excitement, one end are connect by capacitor C5 with fourth stage amplifier.
The positive-feedback circuit, internal level Four amplifier structure can be in the case where not stringent to test structural requirement It is reduced to two-stage, level-one adjusts level-one amplification;The resistance that periphery uses can also be adjusted correspondingly with capacitor.
The shaping circuit is made of triode and phase inverter;R9 mono- terminates fourth stage amplifier output end, three poles of termination The pole pipe B;According to the requirement of detection waveform phase, emitter-base bandgap grading output is can also be used in the form output that OC open circuit can be used in triode;Root According to the testing requirements to output vibration frequency, phase inverter can be used multi-stage cascade or carry out frequency multiplication, scaling down processing, facilitate frequency Detection;It, can be used in parallel by phase inverter residue gate circuit to improve driving capability.
The power-switching circuit, external only offer+VCCSupply voltage is converted into-V by chip IC L7660EE, together When in order to meet the use of characteristic storage circuit, using MIC5205-3.3 by+VCCSupply voltage is converted to+3.3V for storage The voltage that system uses.W7805, MIC4575 can be used according to the requirement of power-supply system in the power-switching circuit Equal DC/DC chip realizes the conversion of power-supply system.
The temperature measuring circuit is constituted by instrument amplifier AD620, temperature sensor, with reference voltage source;Temperature passes According to requirements using temperature measurement chip AD590, different source of stable pressure, mono- termination+V of resistance R11 may be selected in D1 to sensorCCElectricity Source, another termination voltage-stabiliser tube D1, the pressure stabilizing value is by the reference power supply as AD590;Resistance R12, R13, R14 respectively with AD620 Connection, for adjusting the accuracy of measurement numerical value;Resistance R15 mono- terminates 1 foot of AD620, and 8 feet of another termination AD620 are used for Adjust the gain of amplifier.
Temperature-sensing element is mounted in the pedestal of sensor, using temperature-sensing element electrical property (output voltage, resistance) with The characteristic of temperature change carrys out the operating temperature of detection sensor;Meanwhile quartz crystal can also be used as temperature sensor, with vibration Dynamic barrel pressure pickup is packaged together, and experiences identical temperature.
The characteristic storage circuit, is made of EEPROM, is mainly used for making material, the manufacture craft, temperature of storage circuit Characteristic etc. is spent, this class feature is stored in EEPROM.In this way, can be by frequency signal and temperature by F/D and A/D converter Degree signal is converted to digital quantity and is sent to single-chip microcontroller, further according to the performance data stored in EEPROM, can be carried out using single-chip microcontroller The error correction of data, compensates test result.
Specifically, as shown in Figure 1, in the main circuit of sensor of the present invention ,+VCCFor the power supply voltage of circuit, Positive feedback oscillating circuit is collectively formed by the single coil excitement, pick-up coil and the multistage integrated transporting discharging of outside of sensor internal, In preceding two stage amplifer be mainly used for adjusting Induction Peried, rear two stage amplifer is for adjusting amplification factor.
Specifically, capacitor C1 mono- terminates pick-up coil, the non-inverting input terminal of another termination first order amplifier and is connect again The resistance R1 that non-inverting input terminal and ground connection are arranged is provided commonly for adjustment Induction Peried, the inverting input terminal and output of first order amplifier End connection;Second level amplifier peripheral circuit includes resistance R2, R3 and capacitor C2, C3, C4, on the basis of first order amplifier again into The adjustment of row Induction Peried, non-inverting input terminal of the output end of first order amplifier successively through resistance R2, R3 connection second level amplifier, The non-inverting input terminal of second level amplifier is grounded through capacitor C2, is grounded between resistance R2, R3 through sequentially connected capacitor C3, C4, the The inverting input terminal of second level amplifier is connected with output end, and output end is connected between capacitor C3, C4;Resistance R4~R7, R9 are common The peripheral circuit of third and fourth grade of amplifier is constituted, the sine wave for cutting top is formed;The output of the one end resistance R4 connection second level amplifier End, the other end connect the inverting input terminal of third level amplifier, the inverting input terminal of third level amplifier through resistance R5 connection output end, Normal phase input end is grounded through capacitor C4;Inverting input terminal of the output end of third level amplifier through resistance R6 connection fourth stage amplifier, And inverting input terminal is through resistance R7 connection output end, the positive input end grounding of fourth stage amplifier, the termination sensor of resistance R8 mono- Internal single coil excitement, the other end are connect by capacitor C5 with fourth stage amplifier output end.Not stringent to test structural requirement In the case where can simplify as two-stage, level-one adjusts level-one amplification;The resistance that periphery uses can also carry out corresponding with capacitor Adjustment.
Wherein, shaping circuit is made of triode T1 and phase inverter;Resistance R9 mono- terminates fourth stage amplifier output end, another The base stage B of triode T1 is terminated, emitter E ground connection, collector C is through resistance R10 connection supply voltage+VCC, collector C is inverted Device exports vibration frequency;According to the requirement of detection waveform phase, the form output that OC open circuit can be used in triode, which can also be used, is penetrated Pole output;According to the testing requirements to output vibration frequency, phase inverter be can be used at multi-stage cascade or progress frequency multiplication, frequency dividing Reason, facilitates frequency detecting;It, can also be used in parallel by phase inverter residue gate circuit to improve driving capability.
As shown in Fig. 2, power-switching circuit provides whole power-supply system for circuit.External only offer+VCCSupply voltage, - V is converted by chip IC L7660EE, while in order to meet the use of characteristic storage circuit, using MIC5205-3.3 will+ VCCSupply voltage is converted to the voltage that+3.3V uses for storage system.According to the requirement of power-supply system, can also be used The conversion of the DC/DC chip such as W7805, MIC4575 realization power-supply system.
As shown in figure 3, temperature measuring circuit is by instrument amplifier AD620, temperature measurement chip AD590 and reference voltage source It constitutes;According to requirements, different voltage-stabilizing devices, mono- termination+V of resistance R11 may be selected in D1CCPower supply, another termination voltage-stabiliser tube Reference power supply as AD590 is connected the input terminal of AD590 by the cathode of D1, the plus earth of voltage-stabiliser tube D1, the pressure stabilizing value; The electrode input end of the output end connection AD620 of AD590, the negative input through capacitor C9 connection AD620;Resistance R12, R13, R14 is connect with AD620 respectively, and for adjusting the accuracy of measurement numerical value, the electrode input end of AD620 is grounded through resistance R12, is born Pole input terminal is grounded through resistance R13, and negative input connects the input terminal of AD590 through resistance R14;Resistance R15 mono- terminates AD620's 1 foot, 8 feet of another termination AD620, for adjusting the gain of amplifier.It can be using the bottom that temperature-sensing element is mounted on to sensor In seat, the characteristic varied with temperature using the electrical property (output voltage, resistance) of temperature-sensing element is come the work temperature of detection sensor Degree;In addition, quartz crystal can also be used as temperature sensor, it is packaged together, experiences identical with vibration cylinder pressure transducer Temperature.
Fig. 4 is characteristic storage circuit, is made of EEPROM, using CAT24C256, is mainly used for the production material of storage circuit Material, manufacture craft, temperature characterisitic etc., this class feature are stored and is sent to the calculating of single-chip microcontroller and test data exchanges, by transporting Calculation obtains the characteristic compensation value of sensor.

Claims (10)

1. a kind of vibration cylinder pressure transducer, which is characterized in that including pedestal, the vibrating barrel being sealingly disposed on pedestal, setting Single coil excitement and pick-up coil and main circuit and compensation circuit on vibrating barrel;
The main circuit includes sequentially connected positive feedback oscillating circuit and shaping circuit;The input terminal of positive feedback oscillating circuit It is separately connected single coil excitement and pick-up coil, the adjustment of Induction Peried and amplification factor is carried out to vibration frequency signal;Shaping electricity Road is used to carry out vibration frequency signal the phase adjustment of waveform;Shaping circuit output end exports vibration frequency;
The compensation circuit includes temperature measuring circuit, characteristic storage circuit and power-switching circuit;
The temperature measuring circuit includes temperature sensor and amplifier;Temperature sensor is arranged in pedestal, for detecting The operating temperature of sensor;Amplifier amplifies processing to acquisition signal and exports;
The characteristic storage circuit is used for the performance data by memory storage sensor, and the performance data includes system Make material, manufacture craft and temperature characterisitic;
The power-switching circuit, input terminal connect supply voltage+VCC, output end is separately connected temperature measuring circuit and characteristic Storage circuit power supply.
2. a kind of vibration cylinder pressure transducer according to claim 1, which is characterized in that the positive feedback oscillating circuit Including the prime unit for adjusting Induction Peried and the rear class unit for adjusting amplification factor.
3. a kind of vibration cylinder pressure transducer according to claim 2, which is characterized in that the positive feedback oscillating circuit Including the two-stage integrated transporting discharging outside vibrating barrel is arranged in;Level-one amplifier adjusts Induction Peried, and another grade of amplifier adjusts times magnification Number.
4. a kind of vibration cylinder pressure transducer according to claim 2, which is characterized in that the positive feedback oscillating circuit Including the level Four integrated transporting discharging outside vibrating barrel is arranged in;First and second grade of amplifier is in adjustment Induction Peried, third and fourth grade of amplifier For adjusting amplification factor;
Non-inverting input terminal of the pick-up coil through capacitor C1 connection first order amplifier, the non-inverting input terminal of first order amplifier is through resistance R1 Ground connection, the inverting input terminal of first order amplifier are connected with output end;
The non-inverting input terminal of second level amplifier successively connects the output end of first order amplifier through resistance R3 with R2, second level amplifier Non-inverting input terminal is grounded through capacitor C2, is grounded between resistance R2 and R3 through sequentially connected capacitor C3 and C4, second level amplifier Inverting input terminal is connected with output end, is connected between output end and capacitor C3 and C4;
Output end of the inverting input terminal of third level amplifier through resistance R4 connection second level amplifier, the anti-phase input of third level amplifier Through resistance R5 connection output end, normal phase input end is grounded through capacitor C4 at end;
For the inverting input terminal of fourth stage amplifier through the output end through resistance R6 connection third level amplifier, the reverse phase of fourth stage amplifier is defeated Enter end through resistance R7 connection output end.
5. a kind of vibration cylinder pressure transducer according to claim 1, which is characterized in that the shaping circuit includes three Pole pipe and phase inverter;The base stage of triode is connect through resistance R9 with positive feedback output end of oscillating circuit, the output end warp of triode Phase inverter exports vibration frequency;Triode is exported in the form of OC open circuit or emitter-base bandgap grading output;Phase inverter using multi-stage cascade or Person carries out frequency multiplication, scaling down processing.
6. a kind of vibration cylinder pressure transducer according to claim 5, which is characterized in that the emitter E of triode T1 connects Ground, collector C is through resistance R10 connection supply voltage+VCC, the inverted device output vibration frequency of collector C.
7. a kind of vibration cylinder pressure transducer according to claim 1, which is characterized in that the power-switching circuit includes Two converting units;First converting unit input terminal connects supply voltage+VCC, using chip IC L7660, W7805 or MIC4575 It is converted into-VEE, output end connection temperature measuring circuit;Second converting unit input terminal connects supply voltage+VCC, use MIC5205-3.3, W7805 or MIC4575 are by supply voltage conversion+VCCFor+3.3V, output end connection performance storage circuit.
8. a kind of vibration cylinder pressure transducer according to claim 1, which is characterized in that the temperature measuring circuit includes Instrument amplifier AD620 and temperature measure chip AD590;
The input terminal of temperature measurement chip AD590 meets supply voltage+V through resistance R11CC, and connect the cathode of voltage-stabiliser tube D1, pressure stabilizing The plus earth of pipe D1;The electrode input end of the output end connection AD620 of AD590, and the cathode through capacitor C9 connection AD620 is defeated Enter end;
The electrode input end of instrument amplifier AD620 is grounded through resistance R12, and negative input is grounded through resistance R13, cathode input End connects the input terminal of AD590 through resistance R14;Resistance R15 mono- terminates 1 foot of AD620,8 feet of another termination AD620.
9. a kind of vibration cylinder pressure transducer according to claim 1, which is characterized in that the characteristic storage circuit includes Using the read-only memory EEPROM of CAT24C256.
10. a kind of characteristic compensation method of vibration cylinder pressure transducer, which is characterized in that be based on claim 1-9 any one The sensor;Including,
Vibration frequency signal is exported by main circuit;
It is measured in real time by operating temperature of the temperature measuring circuit to sensor, output temperature signal;
Pass through the performance data of characteristic storage circuit output transducer;And under the conditions of condition of different temperatures and performance data, The error information of each pressure spot is stored in read-only memory in the form of data form;The error information includes non-linear Performance data error information and temperature error data;
Vibration frequency signal and temperature signal are converted to digital quantity by F/D and A/D converter to be sent in processor, processor The data form of performance data and error information further according to reading carries out error correction to vibration frequency signal, ties to test Fruit compensates.
CN201910711890.XA 2019-08-02 2019-08-02 A kind of vibration cylinder pressure transducer and its characteristic compensation method Pending CN110411630A (en)

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Publication number Priority date Publication date Assignee Title
CN114323364A (en) * 2021-11-11 2022-04-12 浙江中控技术股份有限公司 High-precision pressure sensor with vibration measurement function and correction method
CN114323364B (en) * 2021-11-11 2024-01-30 浙江中控技术股份有限公司 High-precision pressure sensor with vibration measuring function and correction method
CN114544042A (en) * 2022-04-27 2022-05-27 成都凯天电子股份有限公司 Pressure error compensation method for vibrating cylinder pressure sensor under variable temperature condition
CN114563123A (en) * 2022-04-28 2022-05-31 成都凯天电子股份有限公司 External excitation type vibration cylinder pressure sensor and pressure calculation method thereof

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Application publication date: 20191105