CN1546968A - Pressure sensor of magnetic excitation vibrating cylinder - Google Patents
Pressure sensor of magnetic excitation vibrating cylinder Download PDFInfo
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- CN1546968A CN1546968A CNA2003101096821A CN200310109682A CN1546968A CN 1546968 A CN1546968 A CN 1546968A CN A2003101096821 A CNA2003101096821 A CN A2003101096821A CN 200310109682 A CN200310109682 A CN 200310109682A CN 1546968 A CN1546968 A CN 1546968A
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Abstract
The invention is a kind of magnetism motivation vibration cylinder pressure sensor, which belongs to resonance pressure sensor; the measuring precision is high, the structure is simple, the size and weight is small; the invention includes sensitive elements and motivation circuit; the sensitive elements include insulator, insulator base, thin-wall cylinder, vacuum cavity protecting cylinder, conducting core, spring presser bits, ceramic capacitance, rare earth magnet, soft magnet, base, pressure accessing aperture, localization pin and wires; the two ends of the vacuum cavity protecting cylinder are connected with the insulator base and the thin-wall cylinder base, and forms a vacuum cavity; the conducting core is set in the thin-wall cylinder, the upper part is connected with the aperture tightly, the rare earth magnet is set at two sides of the magnet or around the magnet through the spring presser bits; there distributes four symmetrical arc ceramic capacitances boards which has gap with the thin-wall cylinder around the cylinder, the ceramic capacitance boards are fixed through localization pin and soft magnet.
Description
Technical field
The present invention relates to a kind of vibration cylinder pressure transducer, belong to resonance type pressure sensor.
Technical background
Vibration cylinder pressure transducer is invented the earliest in Britain, and its principle of work is the faint conversion of magnetic gap when utilizing cylindrical shell resonance, has changed the electric current that swashs, picks up coil, through amplification, closed loop excitation, output, reaches the corresponding relation of gaging pressure-frequency.This sensor measurement precision is higher, but complex structure, the closed loop debug difficulties, energy consumption is big, is not easy to produce in batches.
Summary of the invention
Purpose of the present invention is exactly the deficiency that overcomes above-mentioned prior art, and the magnetic pumping vibration cylinder pressure transducer that a kind of measuring accuracy height and simple in structure, size and weight are little, be easy to produce in batches is provided.
The present invention improves the excitation of traditional vibration cylinder pressure transducer and the mode of picking up, promptly adopt a pair of or two pairs of rare-earth permanent magnets, be placed on the both sides of sensitive element thin cylinder or all around respectively, form strong stationary magnetic field, when thin cylinder itself passes through the electric current of alternation, itself just produces the power of alternation, drives thin cylinder generation deformation; Four of the symmetry that distributing around thin cylinder have the circular arc pole plate of fixed interval (FI) with thin cylinder; thin cylinder generation deformation and the displacement that produces; the quantity of electric charge on the pole plate is changed; through signal Processing such as converting electrical signal, amplifications, output signal frequency is exactly the frequency of thin cylinder resonance.Another part signal is introduced into excitation end, when the natural frequency of the frequency of feedback signal and thin cylinder resonance is identical, and the positive feedback of formation closed loop, the sensor closed-loop system just becomes a stable resonator system.
Magnetic pumping vibration cylinder pressure transducer of the present invention includes sensitive element and exciting circuit; Sensitive element includes insulator, insulator block, thin cylinder, vacuum cavity protecting tube, conductive core, spring pressuring plate, ceramic condenser, rare-earth permanent magnet, soft magnetic bodies, base, pressure and connects and draw mouth, register pin and lead; Insulator is installed on the insulator block, thin closed cylinder and be welded on the base, vacuum cavity protecting tube two ends form vacuum chamber with insulator block and base welding respectively; Conductive core places thin cylinder inside, and top connects with pressure draws tight-lipped fitting over, and plays electric action; Soft magnetic bodies plays the magnetic conduction effect, and rare-earth permanent magnet is installed in soft magnetic bodies both sides or all around by spring pressuring plate; Four of the symmetry that distributing around thin cylinder have the circular arc ceramic condenser pole plate of fixed interval (FI) with thin cylinder, and the ceramic condenser pole plate fixes by register pin, soft magnetic bodies.
Exciting circuit includes translation circuit, one-level amplification, secondary amplification, voltage-electric current converter and shaping output.
The resonance mode that sensitive element thin cylinder electric magnetization is realized is (2,1) pattern, and promptly laterally the all-wave number is 2, and vertically the half-wave number is 1.And responsive thin wall cylinder changes pressure can produce responsive resonance frequency conversion.Gap between ceramic condenser pole plate and the thin cylinder is 25 μ m～10 μ m.
Vibration cylinder pressure transducer of the present invention is mainly used in measures dynamic or static gaseous tension.This sensor has solved the traditional electrical magnetic coil and encourage-picked up mode complex structure, problem that energy consumption is big, and is simple in structure, is easy to produce in batches.Can be made into the vibration cylinder pressure transducer that diameter is a φ 4mm electric magnetization, be that the overall weight of sensor and the volume of sensitive element thin cylinder of φ 18mm is all little a lot of than traditional diameter, and precision is higher.
Description of drawings
Fig. 1 is a sensitive element structural representation of the present invention.
Fig. 2 is the sectional view along A-A line among Fig. 1.
Fig. 3 is an exciting circuit theory diagram of the present invention.
Among the figure: 1, insulator, 2, insulator block, 3, thin cylinder, 4, the vacuum cavity protecting tube, 5, conductive core, 6, spring pressuring plate, 7, the ceramic condenser pole plate, 8, rare-earth permanent magnet, 9, soft magnetic bodies, 10, base, 11, pressure connects and draw mouth, 12, register pin.
Embodiment
Exciting circuit is the driving source of sensor.Translation circuit, one-level amplify, secondary amplifies and all adopts high impedance TL084 operational amplifier, and voltage-electric current converter adopts conversion transformer, and shaping output is to be made of miniature triode BC187-16 and MC78L05 three terminal regulator and stabilivolt ZMM4V7.
Translation circuit is that the quantity of electric charge on the ceramic condenser is converted into voltage, amplify this weak voltage amount amplification by one-level, secondary, part signal output frequency signal behind shaping circuit, the frequency of this signal is exactly the frequency of thin cylinder resonance, another part is introduced into the excitation end through superpotential-current converter, when the natural frequency of the frequency of feedback signal and thin cylinder resonance is identical, form the closed loop positive feedback, the sensor closed-loop system just becomes a stable resonator system.
Sensitive element structure of the present invention is affixed with vacuum electron beam welding form.Ceramic condenser pole plate 7 is as the device of excitation-pickoff signals; Soft magnetic bodies 9 plays the magnetic conduction effect and rare-earth permanent magnet 8 is installed, and insulator block 2 is used to install insulator 1, and base 10 welds together with thin cylinder 3.
Rare-earth permanent magnet 8 adopts symmetrical magnetic circuits design forms a pair of or two pairs, all can satisfy the working sensor requirement.
Concrete application example of the present invention is to have made φ 4mm magnetic pumping vibration cylinder pressure transducer, is used to measure atmospheric pressure; Be the resonant vibration barrel pressure pickup of domestic present size minimum, the typical sizes of its sensitive element---thin cylinder is diameter 4mm, length 28～30mm, thickness 0.03～0.05mm, and the sensor overall dimensions is 60 * 30 * 17mm
3Its measurement range is 2kPa～600kPa, and integrated measurement accuracy is 0.01%～0.05%FSP, and the environment for use temperature range is at-55 ℃～100 ℃.
Claims (6)
1, a kind of magnetic pumping vibration cylinder pressure transducer, include sensitive element and exciting circuit, it is characterized in that sensitive element includes insulator, insulator block, thin cylinder, vacuum cavity protecting tube, conductive core, spring pressuring plate, ceramic condenser, rare-earth permanent magnet, soft magnetic bodies, base, pressure and connects and draw mouth, register pin and lead; Vacuum cavity protecting tube two ends form vacuum chamber with the seat that insulator is installed with the seat welding that is connected with thin cylinder respectively; Conductive core places thin cylinder inside, and top connects with pressure draws tight-lipped fitting over, and rare-earth permanent magnet is installed in soft magnetic bodies both sides or all around by spring pressuring plate; Four of the symmetry that distributing around thin cylinder have the circular arc ceramic condenser pole plate of fixed interval (FI) with thin cylinder, and the ceramic condenser pole plate fixes by register pin, soft magnetic bodies.
2, magnetic pumping vibration cylinder pressure transducer as claimed in claim 1 is characterized in that the resonance mode that the thin cylinder electric magnetization is realized is (2,1) pattern, and promptly laterally the all-wave number is 2, and vertically the half-wave number is 1.
3, as claimed in claim 1, it is characterized in that the gap between ceramic condenser pole plate and the thin cylinder is 25 μ m～10 μ m.
4, as claimed in claim 1, it is characterized in that exciting circuit includes translation circuit, one-level amplification, secondary amplification, voltage-electric current converter and shaping output; Translation circuit, one-level amplify, secondary amplifies and all adopts high impedance TL084 operational amplifier, and voltage-electric current converter adopts conversion transformer, and shaping output is to be made of miniature triode BC187-16 and MC78L05 three terminal regulator and stabilivolt ZMM4V7.
5, magnetic pumping vibration cylinder pressure transducer as claimed in claim 1, the typical sizes that it is characterized in that responsive thin cylinder be diameter 4mm, length at 28～30mm, thickness at 0.03～0.05mm.
6, magnetic pumping vibration cylinder pressure transducer as claimed in claim 1 is characterized in that sensitive element structure is affixed with vacuum electron beam welding form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200310109682 CN1235025C (en) | 2003-11-28 | 2003-11-28 | Pressure sensor of magnetic excitation vibrating cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200310109682 CN1235025C (en) | 2003-11-28 | 2003-11-28 | Pressure sensor of magnetic excitation vibrating cylinder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1546968A true CN1546968A (en) | 2004-11-17 |
| CN1235025C CN1235025C (en) | 2006-01-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200310109682 Expired - Fee Related CN1235025C (en) | 2003-11-28 | 2003-11-28 | Pressure sensor of magnetic excitation vibrating cylinder |
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| CN (1) | CN1235025C (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100472190C (en) * | 2007-03-23 | 2009-03-25 | 厦门大学 | Electromagnetic resonant cylinder quality sensor |
| CN104568239A (en) * | 2014-12-09 | 2015-04-29 | 太原航空仪表有限公司 | Small-scale vibration cylinder pressure sensor excitated by 9mm piezoelectricity |
| CN105486448A (en) * | 2015-12-23 | 2016-04-13 | 太原航空仪表有限公司 | Vibration damping mechanism used for vibration cylinder pressure transducer |
| CN105486438A (en) * | 2015-12-23 | 2016-04-13 | 太原航空仪表有限公司 | Vibration cylinder pressure transducer of vibration damping integrated structure |
| CN105571478A (en) * | 2015-12-24 | 2016-05-11 | 太原航空仪表有限公司 | Piezoelectric vibration cylinder icing sensor and method for measuring icing condition thereof |
| CN105628297A (en) * | 2015-12-24 | 2016-06-01 | 太原航空仪表有限公司 | Fitting method of 9mm piezoelectric excitation vibration cylinder pressure sensor |
| CN110411630A (en) * | 2019-08-02 | 2019-11-05 | 西安微电子技术研究所 | A kind of vibration cylinder pressure transducer and its characteristic compensation method |
| CN114563123A (en) * | 2022-04-28 | 2022-05-31 | 成都凯天电子股份有限公司 | External excitation type vibration cylinder pressure sensor and pressure calculation method thereof |
-
2003
- 2003-11-28 CN CN 200310109682 patent/CN1235025C/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100472190C (en) * | 2007-03-23 | 2009-03-25 | 厦门大学 | Electromagnetic resonant cylinder quality sensor |
| CN104568239A (en) * | 2014-12-09 | 2015-04-29 | 太原航空仪表有限公司 | Small-scale vibration cylinder pressure sensor excitated by 9mm piezoelectricity |
| CN104568239B (en) * | 2014-12-09 | 2017-11-21 | 太原航空仪表有限公司 | A kind of 9mm piezoelectric excitations small vibrating barrel pressure pickup |
| CN105486448A (en) * | 2015-12-23 | 2016-04-13 | 太原航空仪表有限公司 | Vibration damping mechanism used for vibration cylinder pressure transducer |
| CN105486438A (en) * | 2015-12-23 | 2016-04-13 | 太原航空仪表有限公司 | Vibration cylinder pressure transducer of vibration damping integrated structure |
| CN105486448B (en) * | 2015-12-23 | 2018-04-03 | 太原航空仪表有限公司 | A kind of damper mechanism for vibration cylinder pressure transducer |
| CN105571478A (en) * | 2015-12-24 | 2016-05-11 | 太原航空仪表有限公司 | Piezoelectric vibration cylinder icing sensor and method for measuring icing condition thereof |
| CN105628297A (en) * | 2015-12-24 | 2016-06-01 | 太原航空仪表有限公司 | Fitting method of 9mm piezoelectric excitation vibration cylinder pressure sensor |
| CN105571478B (en) * | 2015-12-24 | 2018-06-19 | 太原航空仪表有限公司 | Piezoelectric type vibration cylinder freezing sensor and its method for measuring ice condition |
| CN105628297B (en) * | 2015-12-24 | 2018-08-21 | 太原航空仪表有限公司 | A kind of approximating method of 9mm pressure sensor of piezoelectric excitation vibrating cylinder |
| CN110411630A (en) * | 2019-08-02 | 2019-11-05 | 西安微电子技术研究所 | A kind of vibration cylinder pressure transducer and its characteristic compensation method |
| CN114563123A (en) * | 2022-04-28 | 2022-05-31 | 成都凯天电子股份有限公司 | External excitation type vibration cylinder pressure sensor and pressure calculation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1235025C (en) | 2006-01-04 |
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