CN114545702B - High-precision assembling and adjusting system, assembling and adjusting method and tuning method of piezoelectric tuning F-P filter - Google Patents
High-precision assembling and adjusting system, assembling and adjusting method and tuning method of piezoelectric tuning F-P filter Download PDFInfo
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- CN114545702B CN114545702B CN202210420408.9A CN202210420408A CN114545702B CN 114545702 B CN114545702 B CN 114545702B CN 202210420408 A CN202210420408 A CN 202210420408A CN 114545702 B CN114545702 B CN 114545702B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/213—Fabry-Perot type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
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Abstract
The invention provides a high-precision assembling and debugging system, an assembling and debugging method and a tuning method of a piezoelectric tuning F-P filter, wherein a two-dimensional inclination angle between a movable cavity mirror and a fixed cavity mirror relative to a reflecting mirror surface in the F-P filter is measured through a two-dimensional precise angle measuring module, a measuring result can trace to laser wavelength, and the measuring precision is extremely high; the six-dimensional precise adjustment module drives the F-P intracavity movable cavity mirror according to the two-dimensional dip angle between the relative reflecting mirror surfaces of the movable cavity mirror and the fixed cavity mirror in the F-P filter measured by the two-dimensional precise angle measurement module, so as to realize the precise adjustment of the parallelism and the initial cavity length between the two reflecting mirror surfaces in the F-P cavity, wherein: the parallelism adjusting precision can reach
And the cavity length adjusting precision can reach nm level. The high-precision assembly and adjustment system of the piezoelectric tuning F-P filter provided by the invention has a simple structure and higher automatic assembly and adjustment capability, can greatly reduce the assembly and adjustment difficulty of the piezoelectric tuning F-P filter, and greatly improves the assembly and adjustment efficiency.
Description
Technical Field
The invention relates to a tunable F-P filter, in particular to a high-precision adjusting system, an adjusting method and a tuning method of a piezoelectric tuning F-P filter.
Background
The Fabry-Perot (F-P) filter is mainly composed of two flat plates with high-reflectivity film layers plated on the opposite inner surfaces, is an element for performing optical filtering by utilizing the principle of multi-beam interference, and has wide application in the fields of ultra-fine spectral structure analysis, laser resonant cavities and optical communication.
Tunable F-P filter utilizing transmitted waves of F-P cavityThe characteristic that the length can be changed along with the cavity length of the optical tunable filter can be realized. The two plates should be kept strictly parallel during tuning to produce multiple beam interference. Therefore, the tuning of the cavity length of the two flat plates in strict parallel is generally realized by adopting 3 moving parts which are placed between the two flat plates and distributed in a triangular manner. In order to ensure that the F-P filter has wider optical filtering range and nano-scale filtering capability, the cavity length of the F-P cavity is as small as
The dimension is even smaller, and the parallelism of micro-arc degree magnitude is maintained between the reflection mirrors in the cavity, at the moment, the piezoelectric actuator is generally selected as a moving part for tuning and filtering, the displacement precision can reach nano magnitude, but the maximum output displacement is only several microns. If the two flat plates cannot be strictly parallel during initial adjustment, the actual adjustment amount exceeds the maximum output displacement of the piezoelectric actuator, so that the piezoelectric actuator loses effective adjustment capability and cannot realize optical tuning filtering.
How to ensure the high-precision installation and adjustment of the piezoelectric tuning F-P filter and realize the adjustment of the cavity length in the nanometer order and the parallelism between the cavity mirrors in the micro-arc order is a technical problem to be solved urgently by technical personnel in the field.
Disclosure of Invention
A first object of the present invention is to provide a high-precision tuning system for a piezoelectric tuned F-P filter, which solves the problem of high-precision tuning of piezoelectric tuned F-P filters in the prior art.
Therefore, the above purpose of the invention is realized by the following technical scheme:
a high accuracy debugging system of piezoelectricity tunning F-P filter which characterized in that: the high-precision assembly and adjustment system of the piezoelectric tuning F-P filter comprises a six-dimensional precision adjustment module and a two-dimensional precision angle measurement module, wherein the two-dimensional precision angle measurement module is used for measuring a two-dimensional inclination angle of the lower surface of a movable cavity mirror in the piezoelectric tuning F-P filter relative to the upper surface of a fixed cavity mirror so as to realize micro-arc-magnitude high-precision angle measurement, and the six-dimensional precision adjustment module carries out nano-magnitude and micro-arc-magnitude high-precision assembly and adjustment on the movable cavity mirror in the piezoelectric tuning F-P filter according to the measurement result of the two-dimensional precision angle measurement module.
While adopting the technical scheme, the invention can also adopt or combine the following technical scheme:
as a preferred technical scheme of the invention: the six-dimensional precision adjusting module comprises a high-precision six-degree-of-freedom platform and an adjusting clamping tool, the adjusting clamping tool is clamped on a movable cavity mirror in the piezoelectric tuning F-P filter, and the high-precision six-degree-of-freedom platform is used for controlling the adjusting clamping tool to drive the movable cavity mirror to carry out nano-scale and micro-arc-scale high-precision assembly and adjustment.
As a preferred technical scheme of the invention: the two-dimensional precise angle measuring module comprises an ultrastable laser, a polarization beam splitter, 1/4 wave plates and a plane array detector, wherein polarized light emitted by the ultrastable laser passes through the polarization beam splitter and a 1/4 wave plate and then is respectively reflected by the upper surface and the lower surface of a passive cavity mirror and the upper surface and the lower surface of a fixed cavity mirror, interference occurs between the polarized light reflected by the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror, when the polarized light passes through the 1/4 wave plate again, the polarization states of two beams of reflected light are changed and then are reflected to the plane array detector by the polarization beam splitter, and the plane array detector detects interference signals of the two beams of emitted light.
As a preferred technical scheme of the invention: the upper surface of the movable cavity mirror and the lower surface of the fixed cavity mirror in the piezoelectric tuning F-P filter are both wedge-shaped surfaces so as to avoid interference of emitted light of the upper surface of the movable cavity mirror and the lower surface of the fixed cavity mirror on laser interference measurement.
As a preferred technical scheme of the invention: the piezoelectric tuning F-P filter comprises a fixed cavity mirror, a movable cavity mirror and three piezoelectric actuators, wherein the movable cavity mirror and the fixed cavity mirror are vertically displaced relative to each other, the three piezoelectric actuators are positioned between the fixed cavity mirror and the movable cavity mirror, and the piezoelectric actuators are distributed on the edge of an F-P cavity formed by the fixed cavity mirror and the movable cavity mirror.
As a preferred technical scheme of the invention: the piezoelectric actuators are arranged on the surface of the fixed cavity mirror and/or the movable cavity mirror in a triangular shape.
A second object of the present invention is to provide a high-precision tuning method for a piezoelectric tuned F-P filter, which overcomes the drawbacks of the prior art.
Therefore, the above purpose of the invention is realized by the following technical scheme:
a high-precision adjusting method of a piezoelectric tuning F-P filter is characterized by comprising the following steps: the high-precision adjusting method of the piezoelectric tuning F-P filter is based on the high-precision adjusting system of the piezoelectric tuning F-P filter, and comprises the following steps:
s1, setting the upper surface of a movable cavity mirror and the lower surface of a fixed cavity mirror in the piezoelectric tuning F-P filter as wedge-shaped surfaces, wherein the upper surface of the fixed cavity mirror is parallel to the xoy plane, bonding three piezoelectric actuators in triangular distribution on the edge of the upper surface of the fixed cavity mirror and ensuring that the F-P cavity formed by the movable cavity mirror and the fixed cavity mirror has a large enough light transmission aperture;
s2, adjusting the clamping tool in the six-dimensional precision adjusting module to clamp the movable endoscope, and ensuring that the movable endoscope and the fixed endoscope are basically aligned in the vertical direction under the driving of a high-precision six-degree-of-freedom platform in the six-dimensional precision adjusting module;
s3, performing light path correction on the two-dimensional precise angle measuring module to enable polarized light emitted by the ultrastable laser in the two-dimensional precise angle measuring module to reach the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror and be reflected by the two surfaces, and receiving two beams of light reflected by the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror by the planar array detector;
s4, controlling the high-precision six-degree-of-freedom platform to drive the movable cavity mirror to finely adjust until the area array detector can detect clear interference fringes, and assuming that the fringe direction of the interference fringes is used
Indicating that the fringe spacing is denoted by d and can be calculated according to the interference fringes detected by the area array detector
And d;
the two-dimensional inclination angles of the intracavity reflecting mirror surface of the movable cavity mirror relative to the intracavity reflecting mirror surface of the fixed cavity mirror are assumed to be respectively used
And
indicates, i.e., the rotation angle about the x-axis and about the y-axis; derived from the interference principle, the direction of the interference fringes
Angle of inclination to two dimensions
、
The relationship between is
Distance d between interference fringes and two-dimensional tilt angle
、
The relationship between is
Thereby deriving a two-dimensional tilt angle
、
Respectively is an angle value of
，
；
In addition, as can be seen from the principle of interference,the smaller the inclination angle is, the wider the stripe is, and the stripe width d and the stripe direction are comprehensively judged
And the moving direction of the interference fringe can determine the two-dimensional inclination angle
、
Positive and negative angles of (d);
s5, measuring the two-dimensional inclination angle by the two-dimensional precise angle measuring module
、
As the control input of the high-precision six-degree-of-freedom platform, the high-precision six-degree-of-freedom platform drives the movable cavity mirror to perform reverse adjustment around the x and y axes, so that the lower surface of the movable cavity mirror is ensured to be strictly parallel to the upper surface of the fixed cavity mirror;
s6, after two reflecting mirror surfaces in the cavity of the F-P cavity are strictly parallel, the high-precision six-degree-of-freedom motion platform continues to drive the movable cavity mirror to move to a proper position along the Z-axis negative direction, when the lower surface of the movable cavity mirror basically contacts the tops of the 3 piezoelectric actuators, the tops of the 3 piezoelectric actuators are adhered to the lower surface of the movable cavity mirror, the precise adjustment of the parallelism between the two reflecting mirror surfaces in the cavity and the initial cavity length is completed, the cavity length adjustment precision can reach the nanometer level, and the parallelism between the two reflecting mirror surfaces in the cavity can reach the micro radian level.
It is a further object of the present invention to provide a method for tuning a piezoelectric tuned F-P filter with high accuracy that addresses the deficiencies in the prior art.
Therefore, the above purpose of the invention is realized by the following technical scheme:
a high-precision tuning method of a piezoelectric tuning F-P filter is characterized in that: the tuning method of the piezoelectric tuning F-P filter comprises the following steps: the three piezoelectric actuators are used for driving the movable cavity mirror in the piezoelectric tuning F-P filter which is adjusted by the high-precision adjusting method of the piezoelectric tuning F-P filter, so that the two reflecting mirror surfaces in the cavity of the F-P filter are strictly parallel in the cavity length adjusting process, and the optical filtering based on the multi-beam interference is realized.
The invention provides a high-precision assembly and adjustment system, an assembly and adjustment and a tuning method of a piezoelectric tuning F-P filter, wherein a two-dimensional inclination angle between a movable cavity mirror and a fixed cavity mirror in the F-P filter relative to a reflecting mirror surface is measured through a two-dimensional precision angle measuring module, the measurement result can be traced to laser wavelength, and the measurement precision is extremely high; the six-dimensional precision adjusting module drives the F-P intracavity movable cavity mirror according to the two-dimensional inclination angle between the relative reflecting mirror surfaces of the movable cavity mirror and the fixed cavity mirror in the F-P filter measured by the two-dimensional precision angle measuring module, so as to realize the precision adjustment of the parallelism and the initial cavity length between the two reflecting mirror surfaces in the F-P cavity, wherein: the parallelism adjusting precision can reach
And the cavity length adjusting precision can reach nm level. The high-precision assembly and adjustment system of the piezoelectric tuning F-P filter provided by the invention has a simple structure and higher automatic assembly and adjustment capability, can greatly reduce the assembly and adjustment difficulty of the piezoelectric tuning F-P filter, and greatly improves the assembly and adjustment efficiency.
Drawings
Fig. 1 is a schematic diagram of a high-precision tuning system for a piezoelectric tuned F-P filter according to the present invention.
Fig. 2 is a bonding diagram of piezoelectric actuators in a triangular arrangement.
Fig. 3 is a schematic diagram of interference fringes and positive and negative determinations of two-dimensional tilt angles under different two-dimensional tilt angles.
Detailed Description
The invention is described in further detail with reference to the figures and specific embodiments.
As shown in fig. 1, a high-precision assembling and adjusting system for a piezoelectric tuning F-P filter comprises a six-dimensional precision adjusting module 100 and a two-dimensional precision angle measuring module 200, wherein the six-dimensional precision adjusting module 100 is composed of a high-precision six-degree-of-freedom platform 101 and an adjusting clamping tool 102; the two-dimensional precise angle measurement module 200 is composed of an ultra-stable laser 201, a polarization beam splitter 202, an 1/4 wave plate 203 and an area array detector 204. The adjusting and clamping tool 102 is installed on a hoisted and placed high-precision six-degree-of-freedom platform 101, and the movable cavity mirror 301 for clamping the piezoelectric tuning F-P filter 300 is driven by the high-precision six-degree-of-freedom platform 101 to be installed and adjusted in a high-precision mode, so that strict parallelism between two reflecting mirror surfaces in an F-P cavity in the installing and adjusting process is achieved.
The high-precision six-degree-of-freedom platform 101 is realized by adopting a commercial six-axis piezoelectric platform system of PI, the displacement precision is 1 nm, and the rotation precision is 0.1
. The size of the clamping tool 102 is adjusted according to the size design of the movable cavity mirror 301, aluminum alloy processing is adopted, and the clamping tool is installed on the hoisted high-precision six-freedom-degree platform 101 through hexagon socket head cap screws. The ultra-stable laser 201 adopts a frequency stabilized 633nm helium-neon laser produced by REO, the frequency stability index is +/-1 MHZ @1H, +/-2 MHZ @ 8H, and the laser of 633nm corresponds to red light, and meanwhile, the debugging of optical correction is facilitated. The matched polarization beam splitter 202 and 1/4 wave plate 203 are selected according to the laser wavelength of 633 nm. The area array detector 204 selects a Soranbo Kiralux series CMOS small scientific research grade black-and-white camera, the pixel number is 1280 multiplied by 1024, the pixel size is 4.8 um, the AD quantization digit is 10 bits, and a lens matched with the focal length is selected according to the width of interference fringes.
As shown in fig. 2, the piezoelectric tuned F-P filter 300 is composed of a movable cavity mirror 301, a fixed cavity mirror 302, and 3 piezoelectric actuators 303 located between the movable cavity mirror 301 and the fixed cavity mirror 302, wherein the 3 piezoelectric actuators 303 are distributed at the edge of the F-P cavity in a triangular shape, so as to ensure that the middle of the F-P filter has a large enough clear aperture.
Polarized light emitted by the ultrastable laser 201 sequentially passes through the polarization beam splitter 202 and the 1/4 wave plate 203, and then is reflected by the lower surface of the passive cavity mirror 301 and the upper surface of the fixed cavity mirror 302, and two reflected lights interfere with each other. After passing through 1/4 wave plate 203 again, the polarization states of the two reflected lights are changed, and then both reflected lights are reflected by the polarization beam splitter 202 to the area array detector 204, and the interference signals of the two lights are detected by the area array detector 204.
The upper surface of the movable cavity mirror 301 and the lower surface of the fixed cavity mirror 302 which form the piezoelectric tuning F-P filter 300 are both processed into wedge-shaped surfaces, so that the interference of the reflected light of the two surfaces to laser interference measurement is avoided.
The two-dimensional inclination angle of the reflection mirror surface in the cavity of the movable cavity mirror 301 relative to the reflection mirror surface in the cavity of the fixed cavity mirror 302 can be obtained by resolving according to the interference signal detected by the area array detector 204, so that the purpose of realizing
And (4) measuring the angle with high precision in magnitude.
The two-dimensional inclination angle measured by the two-dimensional precise angle measuring module 200 is used as the control input of the six-dimensional precise adjusting module 100, the movable cavity mirror 301 of the piezoelectric tuning F-P filter 300 is adjusted, the parallelism between two reflecting mirror surfaces in an F-P cavity and the initial cavity length are accurately adjusted, the cavity length adjusting precision can reach the nanometer level, and the parallelism between the two reflecting mirror surfaces in the cavity can reach the micro radian level.
A high-precision assembling and adjusting method for a piezoelectric tuning F-P filter comprises the following steps:
s1, setting the upper surface of a movable cavity mirror and the lower surface of a fixed cavity mirror in the piezoelectric tuning F-P filter as wedge surfaces, wherein the upper surface of the fixed cavity mirror is parallel to the xoy plane, bonding three piezoelectric actuators in triangular distribution on the edge of the upper surface of the fixed cavity mirror, and ensuring that the F-P cavity formed by the movable cavity mirror and the fixed cavity mirror has a large enough clear aperture;
s2, adjusting the clamping tool in the six-dimensional precision adjusting module to clamp the movable endoscope, and ensuring that the movable endoscope and the fixed endoscope are basically aligned in the vertical direction under the driving of a high-precision six-degree-of-freedom platform in the six-dimensional precision adjusting module;
s3, carrying out light path correction on the two-dimensional precise angle measuring module, so that polarized light emitted by the ultrastable laser in the two-dimensional precise angle measuring module can reach the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror and is reflected by the two surfaces, and two beams of light reflected by the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror are received by the planar array detector;
s4, controlling the high-precision six-degree-of-freedom platform to drive the movable cavity mirror to finely adjust until the area array detector can detect clear interference fringes, and assuming that the fringe direction of the interference fringes is used
Indicating that the fringe spacing is denoted by d and can be calculated according to the interference fringes detected by the area array detector
And d;
the two-dimensional inclination angles of the intracavity reflecting mirror surface of the movable cavity mirror relative to the intracavity reflecting mirror surface of the fixed cavity mirror are assumed to be respectively used
And
indicating, i.e., the rotation angles about the x-axis and about the y-axis; derived from the interference principle, the direction of the interference fringes
Angle of inclination to two dimensions
、
The relationship between is
Distance d between interference fringes and two-dimensional tilt angle
、
The relationship between is
Thereby deriving a two-dimensional tilt angle
、
Respectively is an angle value of
，
；
Further, it is known from the interference principle that the smaller the tilt angle, the wider the fringe. As shown in FIG. 3, the width d and direction of the stripe are comprehensively determined
And the moving direction of the interference fringe can determine the two-dimensional inclination angle
、
Positive and negative angles of (d);
s5, measuring the two-dimensional inclination angle by the two-dimensional precise angle measuring module
、
As the control input of the high-precision six-degree-of-freedom platform, the high-precision six-degree-of-freedom platform drives the movable cavity mirror to perform reverse adjustment around the x axis and the y axis, so that the lower surface of the movable cavity mirror is ensured to be strictly parallel to the upper surface of the fixed cavity mirror;
s6, after two reflecting mirror surfaces in the cavity of the F-P cavity are strictly parallel, the high-precision six-degree-of-freedom motion platform continues to drive the movable cavity mirror to move to a proper position along the Z-axis negative direction, when the lower surface of the movable cavity mirror basically contacts the tops of the 3 piezoelectric actuators, the tops of the 3 piezoelectric actuators are adhered to the lower surface of the movable cavity mirror, the precise adjustment of the parallelism between the two reflecting mirror surfaces in the cavity and the initial cavity length is completed, the cavity length adjustment precision can reach the nanometer level, and the parallelism between the two reflecting mirror surfaces in the cavity can reach the micro radian level.
A method of high precision tuning of a piezo-tuned F-P filter, comprising: the three piezoelectric actuators are used for driving the movable cavity mirror in the piezoelectric tuning F-P filter which is adjusted by the high-precision adjusting method of the piezoelectric tuning F-P filter, so that the two reflecting mirror surfaces in the cavity of the F-P filter are strictly parallel in the cavity length adjusting process, and the optical filtering based on the multi-beam interference is realized.
The above-described embodiments are intended to illustrate the present invention, but not to limit the present invention, and any modifications, equivalents, improvements, etc. made within the spirit of the present invention and the scope of the claims fall within the scope of the present invention.
Claims (9)
1. A high accuracy debugging system of piezoelectricity tunning F-P filter which characterized in that: the high-precision assembly and adjustment system of the piezoelectric tuning F-P filter comprises a six-dimensional precision adjustment module and a two-dimensional precision angle measurement module, wherein the two-dimensional precision angle measurement module is used for measuring a two-dimensional inclination angle of the lower surface of a movable cavity mirror in the piezoelectric tuning F-P filter relative to the upper surface of a fixed cavity mirror so as to realize micro-arc-magnitude high-precision angle measurement, and the six-dimensional precision adjustment module carries out nano-magnitude and micro-arc-magnitude high-precision assembly and adjustment on the movable cavity mirror in the piezoelectric tuning F-P filter according to the measurement result of the two-dimensional precision angle measurement module.
2. A high precision tuning system for a piezo-tuned F-P filter according to claim 1, wherein: the six-dimensional precision adjusting module comprises a high-precision six-degree-of-freedom platform and an adjusting clamping tool, the adjusting clamping tool is clamped on a movable cavity mirror in the piezoelectric tuning F-P filter, and the high-precision six-degree-of-freedom platform is used for controlling the adjusting clamping tool to drive the movable cavity mirror to carry out nano-scale and micro-arc-scale high-precision assembly and adjustment.
3. A high precision tuning system for a piezo-tuned F-P filter according to claim 1, wherein: the two-dimensional precise angle measuring module comprises an ultrastable laser, a polarization beam splitter, 1/4 wave plates and a plane array detector, wherein polarized light emitted by the ultrastable laser is reflected by the polarization beam splitter and the 1/4 wave plates and then is respectively reflected by the upper surface and the lower surface of a passive cavity mirror and the upper surface and the lower surface of a fixed cavity mirror, interference occurs between the polarized light reflected by the lower surface of the dynamic cavity mirror and the upper surface of the fixed cavity mirror, when the polarized light passes through the 1/4 wave plates again, the polarization states of two beams of reflected light are changed and then are reflected to the plane array detector by the polarization beam splitter, and the plane array detector detects interference signals of the two beams of emitted light.
4. A high accuracy tuning system for a piezo-tuned F-P filter according to claim 3, wherein: the upper surface of the movable cavity mirror and the lower surface of the fixed cavity mirror in the piezoelectric tuning F-P filter are both wedge-shaped surfaces so as to avoid interference of emitted light of the upper surface of the movable cavity mirror and the lower surface of the fixed cavity mirror on laser interference measurement.
5. A high precision tuning system for a piezo-tuned F-P filter according to claim 1, wherein: the piezoelectric tuning F-P filter comprises a fixed cavity mirror, a movable cavity mirror which moves up and down relative to the fixed cavity mirror and three piezoelectric actuators positioned between the fixed cavity mirror and the movable cavity mirror, wherein the piezoelectric actuators are distributed on the edge of an F-P cavity formed by the fixed cavity mirror and the movable cavity mirror.
6. A high precision tuning system for a piezo-tuned F-P filter according to claim 5, wherein: the piezoelectric actuators are arranged on the surface of the fixed cavity mirror and/or the movable cavity mirror in a triangular shape.
7. A high precision tuning system for a piezo-tuned F-P filter according to claim 5, wherein: the upper surface of the movable cavity mirror and the lower surface of the fixed cavity mirror are both wedge-shaped surfaces.
8. A high-precision adjusting method of a piezoelectric tuning F-P filter is characterized by comprising the following steps: the high-precision assembly method of the piezoelectric tuned F-P filter is based on the high-precision assembly system of the piezoelectric tuned F-P filter of claim 1, and comprises the following steps:
s1, setting the upper surface of a movable cavity mirror and the lower surface of a fixed cavity mirror in the piezoelectric tuning F-P filter as wedge-shaped surfaces, wherein the upper surface of the fixed cavity mirror is parallel to the xoy plane, bonding three piezoelectric actuators in triangular distribution on the edge of the upper surface of the fixed cavity mirror and ensuring that the F-P cavity formed by the movable cavity mirror and the fixed cavity mirror has a large enough light transmission aperture;
s2, adjusting the clamping tool in the six-dimensional precision adjusting module to clamp the movable endoscope, and ensuring that the movable endoscope and the fixed endoscope are basically aligned in the vertical direction under the driving of a high-precision six-degree-of-freedom platform in the six-dimensional precision adjusting module;
s3, carrying out light path correction on the two-dimensional precise angle measuring module, so that polarized light emitted by the ultrastable laser in the two-dimensional precise angle measuring module can reach the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror and is reflected by the two surfaces, and two beams of light reflected by the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror are received by the planar array detector;
s4, controlling the high-precision six-degree-of-freedom platform to drive the movable cavity mirror to be finely adjusted until the area array detector can detect clear interference fringes, assuming that the fringe direction of the interference fringes is represented by theta and the fringe distance is represented by d, solving theta and d according to the interference fringes detected by the area array detector, wherein theta is an included angle formed by the interference fringe direction and the horizontal space dimension of the area array detector; (ii) a
Two-dimensional inclination angles of the intracavity reflecting mirror surface of the movable cavity mirror relative to the intracavity reflecting mirror surface of the fixed cavity mirror are respectively represented by alpha and beta, namely rotation angles around an x axis and a y axis; it can be derived from the interference principle that the relationship between the interference fringe direction θ and the two-dimensional tilt angles α and β is θ ═ arctan (α/β), and the relationship between the interference fringe spacing d and the two-dimensional tilt angles α and βThe relationship is
Thereby deriving the angle values of the two-dimensional dip angles alpha and beta respectively
Wherein λ is the laser wavelength;
in addition, according to the interference principle, the smaller the inclination angle is, the wider the fringe is, and the positive and negative angles of the two-dimensional inclination angles alpha and beta can be judged by comprehensively judging the fringe width d, the fringe direction theta and the moving direction of the interference fringe;
s5, taking the two-dimensional dip angles alpha and beta measured by the two-dimensional precise angle measuring module as the control input of the high-precision six-freedom-degree platform, and driving the movable cavity mirror to reversely adjust around the x and y axes by the high-precision six-freedom-degree platform, thereby ensuring that the lower surface of the movable cavity mirror is strictly parallel to the upper surface of the fixed cavity mirror;
s6, after two reflecting mirror surfaces in the cavity of the F-P cavity are strictly parallel, the high-precision six-degree-of-freedom motion platform continues to drive the movable cavity mirror to move to a proper position along the Z-axis negative direction, when the lower surface of the movable cavity mirror basically contacts the tops of the 3 piezoelectric actuators, the tops of the 3 piezoelectric actuators are adhered to the lower surface of the movable cavity mirror, the precise adjustment of the parallelism between the two reflecting mirror surfaces in the cavity and the initial cavity length is completed, the cavity length adjustment precision can reach the nanometer level, and the parallelism between the two reflecting mirror surfaces in the cavity can reach the micro radian level.
9. A high-precision tuning method of a piezoelectric tuning F-P filter is characterized in that: the tuning method of the piezoelectric tuning F-P filter comprises the following steps: the movable cavity mirror in the piezoelectric tuned F-P filter adjusted by the high-precision adjustment method of the piezoelectric tuned F-P filter in claim 8 is driven by three piezoelectric actuators to ensure that two reflecting mirror surfaces in the cavity of the F-P filter are strictly parallel in the cavity length tuning process, so that optical filtering based on multi-beam interference is realized.
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