TWI366658B - Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle - Google Patents
Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principleInfo
- Publication number
- TWI366658B TWI366658B TW097120187A TW97120187A TWI366658B TW I366658 B TWI366658 B TW I366658B TW 097120187 A TW097120187 A TW 097120187A TW 97120187 A TW97120187 A TW 97120187A TW I366658 B TWI366658 B TW I366658B
- Authority
- TW
- Taiwan
- Prior art keywords
- fabry
- measurement method
- plane mirrors
- perot interferometric
- interferometric principle
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW097120187A TWI366658B (en) | 2008-05-30 | 2008-05-30 | Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW097120187A TWI366658B (en) | 2008-05-30 | 2008-05-30 | Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200949192A TW200949192A (en) | 2009-12-01 |
TWI366658B true TWI366658B (en) | 2012-06-21 |
Family
ID=44870845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097120187A TWI366658B (en) | 2008-05-30 | 2008-05-30 | Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI366658B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5725528B2 (en) * | 2010-03-02 | 2015-05-27 | 岩崎電気株式会社 | Beam parallelism measuring device |
CN106092515B (en) * | 2015-04-30 | 2019-09-20 | 清华大学 | A method of with Fabry-Perot etalon focal length measurement and corner |
CN114647076A (en) * | 2022-03-23 | 2022-06-21 | 优尼科(青岛)微电子有限公司 | Leveling system and leveling method for electrostatic MEMS Fabry-Perot cavity chip |
CN114545702B (en) * | 2022-04-21 | 2022-09-13 | 国科大杭州高等研究院 | High-precision assembling and adjusting system, assembling and adjusting method and tuning method of piezoelectric tuning F-P filter |
-
2008
- 2008-05-30 TW TW097120187A patent/TWI366658B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200949192A (en) | 2009-12-01 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |