TWI366658B - Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle - Google Patents

Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle

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Publication number
TWI366658B
TWI366658B TW097120187A TW97120187A TWI366658B TW I366658 B TWI366658 B TW I366658B TW 097120187 A TW097120187 A TW 097120187A TW 97120187 A TW97120187 A TW 97120187A TW I366658 B TWI366658 B TW I366658B
Authority
TW
Taiwan
Prior art keywords
fabry
measurement method
plane mirrors
perot interferometric
interferometric principle
Prior art date
Application number
TW097120187A
Other languages
Chinese (zh)
Other versions
TW200949192A (en
Inventor
Yung Cheng Wang
Lih Horng Shyu
Yu Ling Hsiao
Chung Ping Chang
Original Assignee
Univ Nat Yunlin Sci & Tech
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Filing date
Publication date
Application filed by Univ Nat Yunlin Sci & Tech filed Critical Univ Nat Yunlin Sci & Tech
Priority to TW097120187A priority Critical patent/TWI366658B/en
Publication of TW200949192A publication Critical patent/TW200949192A/en
Application granted granted Critical
Publication of TWI366658B publication Critical patent/TWI366658B/en

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TW097120187A 2008-05-30 2008-05-30 Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle TWI366658B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097120187A TWI366658B (en) 2008-05-30 2008-05-30 Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097120187A TWI366658B (en) 2008-05-30 2008-05-30 Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle

Publications (2)

Publication Number Publication Date
TW200949192A TW200949192A (en) 2009-12-01
TWI366658B true TWI366658B (en) 2012-06-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW097120187A TWI366658B (en) 2008-05-30 2008-05-30 Measurement method for parallelism verification of two plane mirrors by fabry-perot interferometric principle

Country Status (1)

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TW (1) TWI366658B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5725528B2 (en) * 2010-03-02 2015-05-27 岩崎電気株式会社 Beam parallelism measuring device
CN106092515B (en) * 2015-04-30 2019-09-20 清华大学 A method of with Fabry-Perot etalon focal length measurement and corner
CN114647076A (en) * 2022-03-23 2022-06-21 优尼科(青岛)微电子有限公司 Leveling system and leveling method for electrostatic MEMS Fabry-Perot cavity chip
CN114545702B (en) * 2022-04-21 2022-09-13 国科大杭州高等研究院 High-precision assembling and adjusting system, assembling and adjusting method and tuning method of piezoelectric tuning F-P filter

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Publication number Publication date
TW200949192A (en) 2009-12-01

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