CN108388023A - A kind of high-accuracy assembly system of large caliber wide spectrum F-P tunable optic filters - Google Patents
A kind of high-accuracy assembly system of large caliber wide spectrum F-P tunable optic filters Download PDFInfo
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- CN108388023A CN108388023A CN201810090458.9A CN201810090458A CN108388023A CN 108388023 A CN108388023 A CN 108388023A CN 201810090458 A CN201810090458 A CN 201810090458A CN 108388023 A CN108388023 A CN 108388023A
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- parallelism
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- 238000001228 spectrum Methods 0.000 title claims abstract description 15
- 239000011521 glass Substances 0.000 claims abstract description 58
- 238000006073 displacement reaction Methods 0.000 claims abstract description 38
- 238000009434 installation Methods 0.000 claims abstract description 28
- 230000005611 electricity Effects 0.000 claims abstract description 14
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000000694 effects Effects 0.000 claims description 2
- 230000003252 repetitive effect Effects 0.000 claims description 2
- 230000002459 sustained effect Effects 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 abstract description 13
- 230000001105 regulatory effect Effects 0.000 abstract description 5
- 239000000919 ceramic Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 238000001723 curing Methods 0.000 description 2
- 238000003331 infrared imaging Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/40—Arrangements for reducing harmonics
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention discloses a kind of high-accuracy assembly systems of large caliber wide spectrum F P tunable optic filters, the assembly system is mainly made of horizontal glass installation module, index glass installation module, piezoelectric inertia driver, three-dimensional micro-displacement platform and two-dimensional electricity driving displacement platform, the depth of parallelism between mirror surface long to the initial cavity of F P chambers is adjusted using coarse adjustment, fine tuning and three weight regulating mechanism of accurate adjustment accurately to be set, chamber length, which adjusts resolution ratio, can reach 10nm magnitudes, and the depth of parallelism can reach 10 between two mirror surface of intracavitary‑1μ rad magnitudes.The high-accuracy assembly system displacement location precision is high, and depth of parallelism regulating power is strong, it can be ensured that the long depth of parallelism between mirror surface of the initial cavity of the F P chambers of large caliber wide spectral region F P tunable optic filters meets high-spectrum remote-sensing application requirement.
Description
Technical field
The present invention relates to F-P tunable optic filters, more particularly to a kind of large caliber wide spectral region F-P tunable optic filters
High-accuracy assembly system.
Background technology
High spectrum resolution remote sensing technique is with the characteristics of " collection of illustrative plates " and powerful information obtaining ability, in geoscience, national defence
Many application field performances such as safety, environmental monitoring and survey of deep space are excellent.In recent years, high spectrum resolution remote sensing technique is in unmanned plane system
The application in certain special technique fields such as system, moonlet payload, proposes more miniaturization, the lightweight of imaging spectrometer
High requirement.
Light splitting technology is one of the core key technology in high spectrum resolution remote sensing technique, and existing hyperspectral imager is based on more
Prism-grating-prism component or grating beam splitting[1-3], beam splitting system takes up space larger, leads to the heavier-weight of complete machine.Imaging
More stringent requirements are proposed to light splitting technology for the lighter development trend of spectrometer smaller.
Fabry-Perot interferometer (Fabry-Perot Interferometer, FPI) is to utilize multiple-beam interference principle
The light-splitting device for carrying out optical electivity, is widely used in hyperfine spectrum structural analysis field[4].Fabry-Perot (F-P) can
Tuning filtering device (Tunable Fabry-Perot Filters, TFPF) can be with its change of cavity length using the passband wavelength of F-P cavity
The characteristics of, realize adjustable filtering.
Two pieces of transparent plates that TFPF is mainly coated with high reflectance film layer by the inner surface being placed in parallel form, between tablet
The air gap adjusted using small piezoelectric ceramics block.TFPF configurations are flat, compact-sized simple, small, light-weight,
It can be placed in parallel light path when being used in spectrum imaging system, before being also placed directly within detector.It can using TFPF light splitting
The volume, weight and power consumption of hyperspectral imager is greatly reduced in the beam splitting system for greatly simplifying imaging spectrometer.
TFPF is as scannable beam splitter in use, its clear aperature usually requires to reach in hyperspectral remote sensing system
To tens mm, the chamber length for the operating spectral range (>=500nm) and nm grades of spectral resolution for ensureing wide, F-P cavity wants small
To μm scale even smaller, to maintain to be better than 10 between intracavity reflecting minute surface-1The depth of parallelism that rad grades of μ.In order to keep device light as possible
Thin, the thickness for the piezoelectric ceramics block that TFPF is selected is generally 2~3mm, and maximum output displacement is only several μm, if in F-P cavity not
The maximum output displacement of piezoelectric actuator is had exceeded with the actual needs adjustment amount that the Air gap thickness difference or chamber of position are grown,
Then piezoelectric actuator will lose effective regulating power of the depth of parallelism between minute surface long to chamber.
How high-accuracy assembly is carried out to large scale TFPF, it is ensured that the initial cavity of F-P cavity is long parallel between mirror surface
Degree reaches the technical requirement of setting, is the premise that TFPF realizes the nm grades of adjustable filtering of high spectral resolution.
Bibliography
[1] Optical System Design [J] of Wang Xin, Yang Bo, the special space remote sensings short-wave infrared imaging spectrometer of fourth are infrared
Technology, 2009,31 (12)：687-690
[2] Yuan Liyin, He Zhiping, Shu Rong short-wave infrared prism-grating-prism imaging spectrometer optical systems design
[J] photon journals, 2011,40 (6)：831-834
[3] Xue Qingsheng, crown canopy space, spaceborne big visual field short-wave infrared imaging spectrometer optical design [J] the photons of the non-of Song Ke
Journal, 2011,40 (5)：673-678
[4] Harbin Zheng Zhi benevolence optics [M]：Publishing house of Harbin Institute of Technology, 2006：124
Invention content
The present invention is long 10 between intracavity reflecting minute surface for the F-P cavity μm grade chamber of large scale wide spectral range TFPF-1μrad
A kind of matching requirements of the depth of parallelism of grade, it is proposed that high-accuracy assembly system of large caliber wide spectral region TFPF.
As shown in Figure 1, the high-accuracy assembly system of large caliber wide spectral region TFPF of the present invention includes horizontal glass peace
Die-filling piece 1, index glass installation module 2, three-dimensional micro-displacement platform 3, piezoelectric inertia driver 6 and two-dimensional electricity driving displacement platform 7.
Wherein, the optical adjusting frame of horizontal glass installation module 1 can provide ± 4 ° of angle adjustment in pitching and beat direction,
In the plane perpendicular to mirror holder optical axis 360 ° it is rotatable, and with 2 ° of rotary index；
The optical adjusting frame of index glass installation module 2 has 3 1/4 inch of -80 adjusting screws, can provide pitching and beat
Direction provides ± 4 ° of angle adjustment, can be compatible with piezoelectric inertia driver 6；
Three-dimensional micro-displacement platform 3 contains three groups of displacement governors, and every group of displacement governor is by coarse adjustment knob 4 and fine tuning
It saves device 5 to form, coarse adjustment knob 4 has the stroke of mm magnitudes, and each revolution of coarse adjustment range is 500 μm, and Fine adjustment knob 5 has 100 μm
The stroke of magnitude, each revolution of fine setting scope are 50 μm；
Piezoelectric inertia driver 6 carries 1/4, and " -80 installation screw threads, compatible index glass install the pH effect in module 2
Frame has 10mm strokes, and the typical step-length of 20nm can be reached under closed-loop control；
Two-dimensional electricity driving displacement platform 7 is not less than 1 inch in stroke vertically and horizontally, and displacement resolution is better than
1 μm, repetitive positioning accuracy is better than 5 μm；
The piezoelectric inertia driver 6 is mounted on 3 1/4 inch -80 of the optical adjusting frame in index glass installation module 2
At the mounting hole of adjusting screw；
The horizontal glass installation module 1 is mounted on two-dimensional electricity driving displacement platform 7, and three-dimensional micro-displacement platform 3 is mounted on two dimension
On electricity driving displacement platform 7, index glass is installed module 2 and is mounted on three-dimensional micro-displacement platform 3；
The optical axis of the described horizontal glass installation module 1 and index glass installation module 2 is in sustained height, and parallel with respect to each other. puts
It sets.
The high-accuracy assembly system of large caliber wide spectral region TFPF of the present invention is long to F-P cavity chamber to put down between minute surface
The adjusting of row degree is mainly realized by coarse adjustment, fine tuning and three weight regulating mechanism of accurate adjustment.
When being assembled to TFPF, horizontal glass and index glass are put into horizontal glass installation module 1 respectively and index glass installs the light of module 2
It learns on adjustment frame, horizontal glass is installed module 1 and remained stationary as with after the relative position of Spectrum testing systems optical axis adjusting, index glass peace
Die-filling piece 2 and horizontal glass installation module 1 between be placed in parallel, two mirror surfaces are relative to each other, relative position between the two it is thick
The fine tuning that reconciles is realized by three-dimensional micro-displacement platform 3.The coarse adjustment knob 4 of three-dimensional micro-displacement platform 3 can make index glass installation module 2 with
Faster speed installs module 1 close to horizontal glass, and Fine adjustment knob 5 can be installed slow when module 2 installs module 1 close to horizontal glass in index glass
Slowly relative position between the two is adjusted, the distance between index glass and horizontal glass is made to reach the magnitude where the initial cavity length of F-P cavity.
Be coated with electrode on two mirror surfaces, using capacitance measurement can obtain distance between two mirror surfaces with it is parallel
The feedback information of degree, rotation adjustment function two speculums of completion that optical adjusting frame in module 1 is installed by horizontal glass power on pole figure
The alignment of shape.
The accurate adjusting of accurate setting and the depth of parallelism that F-P cavity initial cavity is grown is realized that index glass is pacified by piezoelectric inertia driver 6
Die-filling piece of 2 compatible three piezoelectric inertia drivers 6.It is fed back using the minute surface gap that capacitance measurement provides, it can be used to piezoelectricity
Property driver 6 carry out closed-loop control, displacement resolution can reach 20nm, point that two speculum distance between the surface can be made to adjust
Resolution reaches 10nm magnitudes, and the depth of parallelism reaches 10-1μ rad magnitudes.
It is whole that two-dimensional electricity driving displacement platform 7 can be such that index glass and horizontal glass is carried out in the plane perpendicular to Spectrum testing systems optical axis
Body is translatable, and is convenient for carrying out the different location in the effective clear aperatures of TFPF the calibration of spectral measurement and passband peak wavelength, two
Dimension electricity driving displacement platform can need the corresponding matching product of unrestricted choice according to traveled distance.
The present invention can carry out large scale TFPF high-accuracy assembly, and the assembly system displacement location precision is high, parallel
It is strong to spend regulating power, it can be ensured that the long depth of parallelism between mirror surface of F-P cavity initial cavity of TFPF reaches high-spectrum remote-sensing application
It is required that.
Description of the drawings
Fig. 1 is the high-accuracy assembly system structural schematic diagram of large caliber wide spectral region TFPF.
Specific implementation mode
Below by taking the high-accuracy assembly system of the effective clear aperture wide spectral range TFPF of 30mm as an example to the present invention do into
The explanation of one step.
Mirror holder in the assembly system in horizontal glass installation module 1, the mirror holder in index glass installation module 2, three-dimensional micro-displacement are flat
Platform 3 and 6 model of piezoelectric inertia driver are respectively KS2RS, KS2, PIAK10 and MBT616D/M, above-mentioned lighting apparatus component and and mirror
The matched extension bar of frame and pedestal are the production of Thorlabs companies；Two-dimensional electricity driving displacement platform 7 be stand upright the Chinese photoproduction production ultrathin type
Electricity driving displacement platform TSA30-C and high-accuracy electric lifting platform KSAV2030-ZF assemble.
When being assembled to TFPF, horizontal glass and index glass are installed into horizontal glass installation module 1 respectively first and index glass installs mould
On the optical regulation lens frame KS2RS and KS2 of block 2, then three small piezoelectric ceramics blocks are attached on the corresponding position of horizontal glass,
Coat suitable uv-curable glue in another free end of piezoelectric ceramics block.
In TFPF assembling process, the intracavitary for being located at horizontal glass installation module 1 and two speculums in index glass installation module 2 is anti-
It is opposite to penetrate minute surface, the two is placed in parallel.Horizontal glass is installed module 1 and is protected with after the relative position of Spectrum testing systems optical axis adjusting
Hold it is motionless, between two speculums relative position coarse adjustment and fine tuning adjusted by three-dimensional micro-displacement platform 3.Three-dimensional micro-displacement platform 3
4 stroke 4mm of coarse adjustment knob, can make index glass installation module 2 that module 1 be installed with horizontal glass with the adjustment of the speed of 500 μm/rev
Relative position；300 μm of 5 stroke of Fine adjustment knob can be installed when module 2 installs module 1 close to horizontal glass in index glass with 50 μm/rev
Speed slowly adjust relative position between the two, so that the distance between two mirror surfaces is reached a μm magnitude.
Rotation adjustment function two speculums of completion that optical adjusting frame KS2RS in module 1 is installed by horizontal glass power on pole figure
The alignment of shape.
The accurate setting of F-P cavity initial cavity length and the accurate of the depth of parallelism adjust by index glass install in module 2 with optics tune
The piezoelectric inertia driver 6 of whole frame KS2 compatibilities is completed.It is fed back using the capacitance measurement that measuring electrode on two mirror surfaces provides,
Closed-loop control lower piezoelectric inertia starter 6 is capable of providing the typical step-length of 20nm, and distance between index glass and horizontal glass can be made to adjust
Resolution ratio reach 10nm magnitudes, the depth of parallelism between two mirror surfaces reaches 10-1μ rad magnitudes.
Two-dimensional electricity driving displacement platform 7 is 30mm in the stroke of vertical direction, and stroke in the horizontal direction is 30mm, and it is fixed to make
Mirror installs module 1 and index glass installation module 2 is whole is translatable in the plane perpendicular to Spectrum testing systems optical axis, convenient for pair
Different location in the effective clear aperatures of TFPF carries out the calibration of spectral measurement and passband peak position.
The long depth of parallelism between minute surface of F-P cavity initial cavity that distance and the depth of parallelism between two mirror surfaces reach setting is wanted
When asking, using ultraviolet lamp simultaneously by all ultra-violet curing adhesive curings, so that piezoelectric ceramics block is attached to index glass, complete the dress of TFPF
Match.
Claims (1)
1. a kind of high-accuracy assembly system of large caliber wide spectrum F-P tunable optic filters, including horizontal glass installation module (1)；It is dynamic
Mirror installs module (2)；Three-dimensional micro-displacement platform (3)；Piezoelectric inertia driver (6)；Two-dimensional electricity driving displacement platform (7)；Its feature exists
In：
The optical adjusting frame of the horizontal glass installation module (1) provides ± 4 ° of angle adjustment in pitching and beat direction, is hanging down
It is directly rotatable in 360 ° in the plane of mirror holder optical axis, and with 2 ° of rotary index；
The optical adjusting frame of the index glass installation module (2) has 3 1/4 inch of -80 adjusting screws, pitching and beat direction
The angle adjustment for providing ± 4 °, can be compatible with piezoelectric inertia driver (6)；
The three-dimensional micro-displacement platform (3) contains three groups of displacement governors, every group of displacement governor by coarse adjustment knob (4) and
Fine adjustment knob (5) forms, and coarse adjustment knob (4) has the stroke of mm magnitudes, and each revolution of coarse adjustment range is 500 μm, Fine adjustment knob (5)
Has the stroke of 100 μm of magnitudes, each revolution of fine setting scope is 50 μm；
The piezoelectric inertia driver (6) carries 1/4, and " -80 installation screw threads, the pH effect in module (2) is installed with index glass
Frame is compatible with, and has 10mm magnitude strokes, step-length reaches 20nm under closed-loop control；
The two-dimensional electricity driving displacement platform (7) is not less than 1 inch in stroke vertically and horizontally, displacement resolution
Better than 1 μm, repetitive positioning accuracy is better than 5 μm；
The piezoelectric inertia driver (6) is mounted on 3 1/4 inch -80 of the optical adjusting frame in index glass installation module (2)
At the mounting hole of adjusting screw；
The horizontal glass installation module (1) is mounted on two-dimensional electricity driving displacement platform (7), and three-dimensional micro-displacement platform (3) is mounted on two
On Wei electricity Dong Weiyitai (7), index glass is installed module (2) and is mounted on three-dimensional micro-displacement platform (3)；
The described horizontal glass installation module (1) and the optical axis of index glass installation module (2) are in sustained height, and parallel with respect to each other. put
It sets.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810090458.9A CN108388023B (en) | 2018-01-30 | 2018-01-30 | High-precision assembly system of large-caliber wide-spectrum F-P tunable filter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810090458.9A CN108388023B (en) | 2018-01-30 | 2018-01-30 | High-precision assembly system of large-caliber wide-spectrum F-P tunable filter |
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| Publication Number | Publication Date |
|---|---|
| CN108388023A true CN108388023A (en) | 2018-08-10 |
| CN108388023B CN108388023B (en) | 2023-05-05 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109061896A (en) * | 2018-08-23 | 2018-12-21 | 武汉高科恒大光电有限公司 | Laser generator light path regulating device |
| CN111610639A (en) * | 2019-02-26 | 2020-09-01 | 弗提图德萨沃有限公司 | Optical lens assembling device and assembling method of optical-mechanical module |
| CN114545702A (en) * | 2022-04-21 | 2022-05-27 | 国科大杭州高等研究院 | High-precision assembling and adjusting system, assembling and adjusting method and tuning method of piezoelectric tuning F-P filter |
| CN114545703A (en) * | 2022-04-21 | 2022-05-27 | 国科大杭州高等研究院 | F-P tunable filter, system and correction and electric tuning method applying precise six-dimensional adjusting mechanism |
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| JPS56112617A (en) * | 1980-01-29 | 1981-09-05 | Thomson Csf | Interference microscope with tuning type optical resonator into which single mode optical fiber is incorporated and its application to light filtration and spectral diffraction |
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| CN1839332A (en) * | 2003-04-29 | 2006-09-27 | 罗斯蒙德公司 | Tunable fabry-perot filter |
| CN101982801A (en) * | 2010-10-12 | 2011-03-02 | 华中科技大学 | Piezoelectric-driven F-P cavity tunable filter |
| CN207965381U (en) * | 2018-01-30 | 2018-10-12 | 中国科学院上海技术物理研究所 | The high-accuracy assembly system of large caliber wide spectral region F-P tunable optic filters |
-
2018
- 2018-01-30 CN CN201810090458.9A patent/CN108388023B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPS56112617A (en) * | 1980-01-29 | 1981-09-05 | Thomson Csf | Interference microscope with tuning type optical resonator into which single mode optical fiber is incorporated and its application to light filtration and spectral diffraction |
| US6241397B1 (en) * | 1998-04-17 | 2001-06-05 | Micron Optics, Inc. | Cascaded fixed and tunable multiple-fiber Fabry Perot filters and fixed and tunable ferrule alignment fixtures for fiber Fabry Perot filters |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109061896A (en) * | 2018-08-23 | 2018-12-21 | 武汉高科恒大光电有限公司 | Laser generator light path regulating device |
| CN111610639A (en) * | 2019-02-26 | 2020-09-01 | 弗提图德萨沃有限公司 | Optical lens assembling device and assembling method of optical-mechanical module |
| CN114545702A (en) * | 2022-04-21 | 2022-05-27 | 国科大杭州高等研究院 | High-precision assembling and adjusting system, assembling and adjusting method and tuning method of piezoelectric tuning F-P filter |
| CN114545703A (en) * | 2022-04-21 | 2022-05-27 | 国科大杭州高等研究院 | F-P tunable filter, system and correction and electric tuning method applying precise six-dimensional adjusting mechanism |
| CN114545702B (en) * | 2022-04-21 | 2022-09-13 | 国科大杭州高等研究院 | High-precision assembling and adjusting system, assembling and adjusting method and tuning method of piezoelectric tuning F-P filter |
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