CN108388023B - High-precision assembly system of large-caliber wide-spectrum F-P tunable filter - Google Patents
High-precision assembly system of large-caliber wide-spectrum F-P tunable filter Download PDFInfo
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- CN108388023B CN108388023B CN201810090458.9A CN201810090458A CN108388023B CN 108388023 B CN108388023 B CN 108388023B CN 201810090458 A CN201810090458 A CN 201810090458A CN 108388023 B CN108388023 B CN 108388023B
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- 238000000034 method Methods 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 6
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- 238000003384 imaging method Methods 0.000 description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The inventionThe assembly system mainly comprises a fixed mirror installation module, a movable mirror installation module, a piezoelectric inertia driver, a three-dimensional micro-displacement platform and a two-dimensional electric displacement platform, wherein the initial cavity length of an F-P cavity and the parallelism between reflecting mirror surfaces are accurately set by adopting a coarse adjustment, fine adjustment and fine adjustment triple adjustment mechanism for adjustment, the cavity length adjustment resolution can reach 10nm level, and the parallelism between two reflecting mirror surfaces in the cavity can reach 10 ‑1 μ rad. The high-precision assembly system has high displacement positioning precision and high parallelism adjusting capability, and can ensure that the initial cavity length of the F-P cavity of the F-P tunable filter with large caliber and wide spectral range and the parallelism between the reflecting mirrors meet the requirements of hyperspectral remote sensing application.
Description
Technical Field
The invention relates to an F-P tunable filter, in particular to a high-precision assembly system of the F-P tunable filter with large caliber and wide spectral range.
Background
The hyperspectral remote sensing technology has excellent application fields such as earth science, national defense safety, environmental monitoring, deep space exploration and the like by the characteristic of 'map in one' and strong information acquisition capability. In recent years, the hyperspectral remote sensing technology is applied to certain special technical fields such as unmanned aerial vehicle systems, small satellite payloads and the like, and has put higher demands on miniaturization and light weight of imaging spectrometers.
The spectroscopic technology is one of the key technologies in hyperspectral remote sensing technology, and the existing hyperspectral imager is mostly based on a prism-grating-prism assembly or grating spectroscopic technology [1-3] The beam splitting system occupies a larger space, resulting in a heavier overall machine. The trend towards smaller and lighter imaging spectrometers places higher demands on spectroscopic techniques.
Fabry-Perot interferometer (Fabry-Perot Interferometer, FPI) is implemented using multiple beam dryingSpectral device for spectrum selection based on principle and wide application in ultra-fine spectrum structure analysis field [4] . A Tunable Fabry-Perot (F-P) filter (TFPF) realizes Tunable filtering by utilizing the characteristic that the passband wavelength of an F-P cavity can be changed along with the cavity length.
The TFPF mainly consists of two transparent flat plates with high-reflectivity film layers coated on the inner surfaces thereof, and the air gap between the flat plates is regulated by using a tiny piezoelectric ceramic block. The TFPF has flat configuration, compact and simple structure, small volume and light weight, and can be placed in a parallel light path or directly in front of a detector when used in a spectrum imaging system. The adoption of TFPF light splitting can greatly simplify the light splitting system of the imaging spectrometer, and greatly reduce the volume, weight and power consumption of the hyperspectral imager.
When TFPF is used as a scannable spectroscopic element in hyperspectral remote sensing systems, the clear aperture typically needs to be up to several tens of mm, and to ensure a broad working spectral range (500 nm or more) and spectral resolution at nm, the F-P cavity has a cavity length as small as a μm or less, and the inter-cavity mirror surface is maintained to be better than 10 -1 Parallelism in the order of mu rad. In order to make the device as thin and thin as possible, the thickness of the piezoelectric ceramic block selected by the TFPF is generally 2-3 mm, the maximum output displacement is only a few mu m, and if the thickness difference of air gaps at different positions in the F-P cavity or the actual required adjustment quantity of the cavity length exceeds the maximum output displacement of the piezoelectric actuator, the piezoelectric actuator loses the effective adjustment capability of the parallelism between the cavity length and the mirror surface.
How to carry out high-precision assembly on a large-size TFPF, and ensure that the parallelism between the initial cavity length of an F-P cavity and a reflecting mirror surface meets the set technical index requirement is a precondition for realizing nm-level high-spectral-resolution adjustable filtering by the TFPF.
Reference to the literature
[1] Wang Xin, yang Bo, ding Xue optical system design of space remote sensing shortwave infrared imaging spectrometer [ J ]. Infrared technology, 2009, 31 (12): 687-690
[2] Yuan Liyin, he Zhiping, shu Rong. Shortwave infrared prism-grating-prism imaging spectrometer optical system design [ J ]. Photonics report, 2011, 40 (6): 831-834
[3] Xue Qingsheng, linguan, song Kefei. Optical design of on-board large field of view short wave infrared imaging spectrometer [ J ]. Photonic report, 2011, 40 (5): 673-678
[4] Zheng Zhiren optical [ M ]. Harbin: harbin university of Industrial Press, 2006:124
Disclosure of Invention
The invention is directed to a F-P cavity μm-level cavity length and inter-cavity reflector surface 10 for a large-size broad-spectrum-range TFPF -1 The assembly requirement of the parallelism of mu rad level, a high-precision assembly system of a large-caliber wide-spectrum-range TFPF is provided.
As shown in fig. 1, the high-precision assembly system of the TFPF with large caliber and wide spectrum range according to the present invention includes a fixed mirror mounting module 1, a movable mirror mounting module 2, a three-dimensional micro-displacement platform 3, a piezoelectric inertial actuator 6 and a two-dimensional electric displacement platform 7.
The optical adjusting frame of the fixed mirror mounting module 1 can provide an angle adjustment of +/-4 degrees in pitching and swaying directions, can rotate 360 degrees in a plane perpendicular to the optical axis of the mirror frame and has a rotation graduation of 2 degrees;
the optical adjusting frame of the movable mirror mounting module 2 is provided with 3 1/4 inch-80 adjusting screws, can provide angle adjustment of +/-4 degrees for pitching and swaying directions, and can be compatible with the piezoelectric inertia driver 6;
the three-dimensional micro-displacement platform 3 comprises three groups of displacement regulators, each group of displacement regulators consists of a coarse regulator 4 and a fine regulator 5, the coarse regulator 4 has a travel of the order of mm, the coarse regulation range of each rotation is 500 mu m, the fine regulator 5 has a travel of the order of 100 mu m, and the fine regulation range of each rotation is 50 mu m;
the piezoelectric inertia driver 6 is provided with 1/4' -80 mounting threads, can be compatible with an optical adjusting frame in the movable mirror mounting module 2, has a stroke of 10mm, and can reach a typical step length of 20nm under closed-loop control;
the stroke of the two-dimensional electric displacement table 7 in the vertical direction and the horizontal direction is not less than 1 inch, the displacement resolution is better than 1 mu m, and the repeated positioning precision is better than 5 mu m;
the piezoelectric inertia driver 6 is arranged at the mounting holes of 3 1/4 inch-80 adjusting screws of the optical adjusting frame in the moving mirror mounting module 2;
the fixed mirror installation module 1 is installed on the two-dimensional electric displacement platform 7, the three-dimensional micro-displacement platform 3 is installed on the two-dimensional electric displacement platform 7, and the movable mirror installation module 2 is installed on the three-dimensional micro-displacement platform 3;
the optical axes of the fixed mirror installation module 1 and the movable mirror installation module 2 are positioned at the same height and are arranged in parallel relatively to each other.
The high-precision assembly system of the large-caliber wide-spectrum-range TFPF mainly realizes the adjustment of the parallelism between the cavity length of the F-P cavity and the mirror surface by a coarse adjustment mechanism, a fine adjustment mechanism and a fine adjustment mechanism.
When the TFPF is assembled, a fixed mirror and a movable mirror are respectively assembled on optical adjusting frames of the fixed mirror mounting module 1 and the movable mirror mounting module 2, the fixed mirror mounting module 1 is kept motionless after the relative position of the optical axis of the spectrum testing system is adjusted, the movable mirror mounting module 2 and the fixed mirror mounting module 1 are placed in parallel, two reflecting mirrors are opposite to each other, and coarse adjustment and fine adjustment of the relative position between the fixed mirror and the movable mirror are realized by the three-dimensional micro-displacement platform 3. The coarse regulator 4 of the three-dimensional micro-displacement platform 3 can enable the moving mirror installation module 2 to approach the fixed mirror installation module 1 at a faster speed, and the micro-regulator 5 can slowly regulate the relative position between the moving mirror installation module 2 and the fixed mirror installation module 1 when the moving mirror installation module 2 approaches the fixed mirror installation module 1, so that the distance between the moving mirror and the fixed mirror reaches the magnitude of the initial cavity length of the F-P cavity.
The two reflecting mirror surfaces are plated with electrodes, feedback information of the distance and parallelism between the two reflecting mirror surfaces can be obtained by capacitance micrometer, and alignment of electrode patterns on the two reflecting mirrors is completed by means of a rotation adjusting function of an optical adjusting frame in the fixed mirror installation module 1.
The precise setting of the initial cavity length of the F-P cavity and the precise adjustment of the parallelism are realized by the piezoelectric inertial drivers 6, and the movable mirror mounting module 2 is compatible with three piezoelectric inertial drivers 6. The piezoelectric inertial driver 6 can be closed-loop controlled by using the feedback of mirror gap provided by capacitance micrometer, the displacement resolution can reach 20nm, the resolution of the distance adjustment between two reflecting mirrors can reach 10nm magnitude, and the parallelism can reach 10 -1 μ rad.
The two-dimensional electric displacement table 7 can enable the movable mirror and the fixed mirror to integrally translate in a plane perpendicular to the optical axis of the spectrum test system, so that spectrum measurement and passband peak wavelength calibration can be conveniently carried out on different positions in the effective clear aperture of the TFPF, and the two-dimensional electric displacement table can freely select corresponding matched products according to actual travel requirements.
The invention can carry out high-precision assembly on the large-size TFPF, the assembly system has high displacement positioning precision and strong parallelism adjusting capability, and the parallelism between the initial cavity length of the F-P cavity of the TFPF and the reflecting mirror surface can be ensured to meet the requirements of hyperspectral remote sensing application.
Drawings
FIG. 1 is a schematic diagram of a high-precision assembly system for a large-caliber wide-spectrum TFPF.
Detailed Description
The invention will be further described with reference to a high-precision assembly system of a30 mm effective light transmission aperture wide spectral range TFPF.
In the assembly system, the model numbers of a lens frame in a fixed lens installation module 1, a lens frame in a movable lens installation module 2, a three-dimensional micro-displacement platform 3 and a piezoelectric inertia driver 6 are KS2RS, KS2, PIAK10 and MBT616D/M respectively, and the optical-mechanical assembly, a connecting rod matched with the lens frame and a base are produced by Thorlabs corporation; the two-dimensional electric displacement table 7 is formed by assembling ultra-thin electric displacement tables TSA30-C produced by Zhuo Lihan light and high-precision electric lifting tables KSAV 2030-ZF.
When the TFPF is assembled, the fixed mirror and the movable mirror are firstly respectively arranged on the optical adjustment glasses frames KS2RS and KS2 of the fixed mirror installation module 1 and the movable mirror installation module 2, then three micro piezoelectric ceramic blocks are attached to the corresponding positions of the fixed mirror, and the other free ends of the piezoelectric ceramic blocks are respectively coated with an appropriate amount of ultraviolet curing glue.
In the TFPF assembly process, the intracavity reflecting mirror surfaces of the two reflecting mirrors positioned on the fixed mirror mounting module 1 and the movable mirror mounting module 2 are opposite, and the two reflecting mirrors are arranged in parallel. The fixed mirror installation module 1 is kept motionless after the relative position between the fixed mirror installation module and the optical axis of the spectrum test system is adjusted, and the rough adjustment and the fine adjustment of the relative position between the two reflectors are adjusted by the three-dimensional micro-displacement platform 3. The travel of the coarse regulator 4 of the three-dimensional micro-displacement platform 3 is 4mm, so that the relative position of the movable mirror installation module 2 and the fixed mirror installation module 1 can be adjusted at the speed of 500 mu m/rev; the micro-regulator 5 has a stroke of 300 mu m, and can slowly regulate the relative position between the two mirror surfaces at a speed of 50 mu m/rev when the movable mirror mounting module 2 approaches the fixed mirror mounting module 1, so that the distance between the two mirror surfaces reaches the mu m order.
The alignment of the electrode patterns on the two mirrors is accomplished by means of the rotational adjustment function of the optical adjustment frame KS2RS in the fixed mirror mounting module 1.
The precise setting of the initial cavity length of the F-P cavity and the precise adjustment of the parallelism are accomplished by means of a piezoelectric inertial drive 6 on the moving mirror mounting module 2 compatible with the optical tuning frame KS 2. The piezoelectric inertial driver 6 under closed-loop control can provide a typical step length of 20nm by utilizing the capacitance micrometer feedback provided by the measuring electrodes on the two reflecting mirrors, so that the resolution of distance adjustment between the movable mirror and the fixed mirror can reach the order of 10nm, and the parallelism between the two reflecting mirrors can reach 10 -1 μ rad.
The stroke of the two-dimensional electric displacement table 7 in the vertical direction is 30mm, the stroke in the horizontal direction is 30mm, the whole fixed mirror installation module 1 and the moving mirror installation module 2 can translate in a plane perpendicular to the optical axis of the spectrum test system, and spectrum measurement and passband peak position calibration are conveniently carried out on different positions in the effective clear aperture of the TFPF.
When the distance and the parallelism between the two reflecting mirrors reach the set requirements of the initial cavity length of the F-P cavity and the parallelism between the mirrors, all ultraviolet curing adhesives are cured simultaneously by utilizing an ultraviolet lamp, so that the piezoelectric ceramic blocks are attached to the movable mirrors, and the TFPF assembly is completed.
Claims (1)
1. A high-precision assembly system of a large-caliber wide-spectrum F-P tunable filter comprises a fixed mirror installation module (1); a movable mirror mounting module (2); a three-dimensional micro-displacement platform (3); a piezoelectric inertial drive (6); a two-dimensional electric displacement table (7); the method is characterized in that:
the optical adjusting frame of the fixed mirror mounting module (1) provides an angle adjustment of +/-4 degrees in the pitching and swaying directions, is rotatable by 360 degrees in a plane perpendicular to the optical axis of the mirror frame and has a rotation index of 2 degrees;
the optical adjusting frame of the moving mirror mounting module (2) is provided with 3 1/4 inch-80 adjusting screws, and the pitching and swaying directions provide angle adjustment of +/-4 degrees and can be compatible with the piezoelectric inertia driver (6);
the three-dimensional micro-displacement platform (3) comprises three groups of displacement regulators, each group of displacement regulators consists of a coarse regulator (4) and a fine regulator (5), the coarse regulator (4) has a stroke of 4mm, the coarse regulation range of each rotation is 500 mu m, the fine regulator (5) has a stroke of 300 mu m, and the fine regulation range of each rotation is 50 mu m;
the piezoelectric inertial driver (6) is provided with 1/4 inch-80 mounting threads, is compatible with an optical adjusting frame in the moving mirror mounting module (2), has a stroke of 10mm magnitude, and has a step length of 20nm under closed-loop control;
the stroke of the two-dimensional electric displacement table (7) in the vertical direction and the horizontal direction is not less than 1 inch, the displacement resolution is less than 1 mu m, and the repeated positioning precision is less than 5 mu m;
the piezoelectric inertia driver (6) is arranged at the mounting holes of 3 1/4 inch-80 adjusting screws of the optical adjusting frame in the moving mirror mounting module (2);
the fixed mirror installation module (1) is installed on the two-dimensional electric displacement platform (7), the three-dimensional micro-displacement platform (3) is installed on the two-dimensional electric displacement platform (7), and the movable mirror installation module (2) is installed on the three-dimensional micro-displacement platform (3);
the optical axes of the fixed mirror installation module (1) and the movable mirror installation module (2) are positioned at the same height and are arranged in parallel relatively to each other.
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| CN109061896B (en) * | 2018-08-23 | 2020-11-10 | 武汉高科恒大光电有限公司 | Laser generator light path adjusting device |
| CN111610639A (en) * | 2019-02-26 | 2020-09-01 | 弗提图德萨沃有限公司 | Optical lens assembling device and assembling method of optical-mechanical module |
| CN114545702B (en) * | 2022-04-21 | 2022-09-13 | 国科大杭州高等研究院 | High-precision assembling and adjusting system, assembling and adjusting method and tuning method of piezoelectric tuning F-P filter |
| CN114545703B (en) * | 2022-04-21 | 2022-09-13 | 国科大杭州高等研究院 | F-P tunable filter, system and correction and electric tuning method applying precise six-dimensional adjusting mechanism |
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| JPS56112617A (en) * | 1980-01-29 | 1981-09-05 | Thomson Csf | Interference microscope with tuning type optical resonator into which single mode optical fiber is incorporated and its application to light filtration and spectral diffraction |
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| CN101982801A (en) * | 2010-10-12 | 2011-03-02 | 华中科技大学 | Piezoelectric-driven F-P cavity tunable filter |
| CN207965381U (en) * | 2018-01-30 | 2018-10-12 | 中国科学院上海技术物理研究所 | The high-accuracy assembly system of large caliber wide spectral region F-P tunable optic filters |
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- 2018-01-30 CN CN201810090458.9A patent/CN108388023B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112617A (en) * | 1980-01-29 | 1981-09-05 | Thomson Csf | Interference microscope with tuning type optical resonator into which single mode optical fiber is incorporated and its application to light filtration and spectral diffraction |
| US6241397B1 (en) * | 1998-04-17 | 2001-06-05 | Micron Optics, Inc. | Cascaded fixed and tunable multiple-fiber Fabry Perot filters and fixed and tunable ferrule alignment fixtures for fiber Fabry Perot filters |
| CN1839332A (en) * | 2003-04-29 | 2006-09-27 | 罗斯蒙德公司 | Tunable fabry-perot filter |
| CN101982801A (en) * | 2010-10-12 | 2011-03-02 | 华中科技大学 | Piezoelectric-driven F-P cavity tunable filter |
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