CN114545703B - F-P tunable filter, system and correction and electric tuning method applying precise six-dimensional adjusting mechanism - Google Patents
F-P tunable filter, system and correction and electric tuning method applying precise six-dimensional adjusting mechanism Download PDFInfo
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- CN114545703B CN114545703B CN202210420615.4A CN202210420615A CN114545703B CN 114545703 B CN114545703 B CN 114545703B CN 202210420615 A CN202210420615 A CN 202210420615A CN 114545703 B CN114545703 B CN 114545703B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/213—Fabry-Perot type
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Abstract
The invention provides an F-P tunable filter, a system, a correction method and an electric tuning method applying a precise six-dimensional adjusting mechanism. In addition, with the help of the laser interference two-dimensional angle measuring module for auxiliary correction, the precise six-dimensional adjusting mechanism can also be used as an actuating mechanism in the initial adjustment and correction process, so that strict parallelism between two mirror surfaces on the inner surface of the F-P cavity is realized. The filter provided by the invention has the characteristics of simple structure, automatic adjustment and correction, large clear aperture and high filtering capability, the optical filtering resolution can reach the nanometer level, and the filter has wide application prospects in the fields of hyperfine spectral structure analysis, laser resonant cavities and optical communication.
Description
Technical Field
The invention relates to a tunable F-P filter, in particular to an F-P tunable filter applying a precise six-dimensional adjusting mechanism, a system and a correction and electric tuning method.
Background
The Fabry-Perot (F-P) filter is an element for optical filtering by using the principle of multi-beam interference, mainly consists of two flat plates with high-reflectivity film layers plated on the opposite inner surfaces, and has wide application in the fields of ultra-fine spectral structure analysis, laser resonant cavities and optical communication.
By using the characteristic that the transmission wavelength of the F-P cavity changes along with the change of the cavity lengthThe point can tune the F-P filter to achieve optical filtering. In order to generate multiple beam interference, the two flat plates should be kept strictly parallel during tuning, therefore, 3 moving parts which are placed between the two flat plates and distributed in a triangular shape are generally adopted to realize the cavity length tuning between the two plates, as shown in fig. 1. In order to ensure that the F-P filter has wider optical filtering range and nano-scale filtering capability, the cavity length of the F-P cavity is as small as
The dimension is even smaller, and the parallelism of micro-arc degree order is maintained between the reflection mirror surfaces in the cavity, at the moment, the piezoelectric actuator is generally selected as a moving part for electric tuning filtering, the displacement precision can reach nano-order, but the maximum output displacement is only several
. The inherent hysteresis and creep characteristics of the piezoelectric actuators cause the open-loop control of the piezoelectric actuators to be nonlinear, in order to realize high-precision electric tuning, a group of capacitance sensors consisting of capacitance plates plated on the inner surfaces of two flat plates are required to be matched with each piezoelectric actuator to serve as feedback, closed-loop feedback control is carried out by matching the capacitance micrometering technology with the piezoelectric actuator drive, and the F-P filter causes complex production process and large difficulty in closed-loop tuning control. In addition, two end faces of the piezoelectric actuator need to be bonded between the two flat plates by glue during initial assembly and debugging, the thickness and uniformity of the bonding glue are not easy to control, and if the two flat plates cannot be strictly parallel during initial assembly and debugging, the actual tuning amount exceeds the maximum output displacement of the piezoelectric actuator, so that the piezoelectric actuator loses effective adjusting capability and cannot realize optical tuning filtering, and therefore, the assembly and debugging difficulty is also high. In the subsequent tuning process, one flat plate is driven by 3 piezoelectric brakes together to realize cavity length tuning which is strictly parallel to another fixed flat plate, the requirements on synchronization and consistency control of the 3 piezoelectric brakes are high, and the implementation is not easy.
Therefore, how to simplify the production process of the electrically tuned F-P filter and reduce the difficulty of initial tuning and subsequent strict parallel tuning control is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
The first purpose of the invention is to provide an F-P tunable filter applying a precise six-dimensional adjusting mechanism, aiming at the problems that the production process of an electric tuning F-P filter is complex, and the initial installation and adjustment and strict parallel tuning control are difficult in the prior art.
Therefore, the above purpose of the invention is realized by the following technical scheme:
an F-P tunable filter applying a precise six-dimensional adjusting mechanism is characterized in that: the F-P tunable filter applying the precise six-dimensional adjusting mechanism comprises a fixed cavity mirror, a moving cavity mirror moving relative to the fixed cavity mirror, a clamp and the precise six-dimensional adjusting mechanism, wherein an F-P cavity is formed in the space between the fixed cavity mirror and the moving cavity mirror, the precise six-dimensional adjusting mechanism is hoisted and fixed, the clamp is fixed at the lower end of the precise six-dimensional adjusting mechanism, and the clamp is used for clamping the moving cavity mirror; the inner surface of the fixed cavity mirror opposite to the moving cavity mirror and the inner surface of the moving cavity mirror opposite to the fixed cavity mirror are respectively provided with a light-passing area, and a high-reflectivity film is plated on the light-passing area; the precise six-dimensional adjusting mechanism drives the lower surface of the moving cavity mirror and the upper surface of the fixed cavity mirror to be strictly parallel, and the precision of the precise six-dimensional adjusting mechanism moves up and down in the nanometer level to realize the optical tuning filtering based on the multi-beam interference, and the resolution of the optical filtering reaches the nanometer level.
While adopting the above technical solutions, the present invention can also adopt or combine the following technical solutions:
as a preferred technical scheme of the invention: the two opposite inner surfaces of the fixed cavity mirror and the moving cavity mirror are parallel to each other, and the two outer surfaces of the fixed cavity mirror, which are opposite to each other, of the moving cavity mirror are wedge-shaped surfaces.
As a preferred technical scheme of the invention: the precise six-dimensional adjusting mechanism is provided with a closed-loop feedback control system to realize high-precision translation along the three xyz coordinate axes in nanometer order and high-precision rotation around the three xyz coordinate axes in micro-arc measurement level.
A second objective of the present invention is to provide a calibration system for an F-P tunable filter using a precise six-dimensional adjustment mechanism, which overcomes the drawbacks of the prior art.
Therefore, the above purpose of the invention is realized by the following technical scheme:
a calibration system of an F-P tunable filter using a precise six-dimensional adjustment mechanism is characterized in that: the correcting system of the F-P tunable filter applying the precise six-dimensional adjusting mechanism comprises the F-P tunable filter applying the precise six-dimensional adjusting mechanism and the laser interference angle measuring module, wherein the laser interference angle measuring module emits laser towards the moving cavity mirror and the fixed cavity mirror and measures the two-dimensional inclination angle of the lower surface of the moving cavity mirror relative to the upper surface of the fixed cavity mirror, and the precise six-dimensional adjusting mechanism in the F-P tunable filter applying the precise six-dimensional adjusting mechanism adjusts the moving cavity mirror according to the two-dimensional inclination angle measured by the laser interference angle measuring module.
While adopting the technical scheme, the invention can also adopt or combine the following technical scheme:
as a preferred technical scheme of the invention: the two opposite inner surfaces of the fixed cavity mirror and the moving cavity mirror are parallel to each other and parallel to a horizontal plane, and the two outer surfaces of the fixed cavity mirror, which are opposite to the moving cavity mirror, are wedge-shaped surfaces; and the laser emitted by the laser interference angle measuring module is emitted towards the moving cavity mirror and the fixed cavity mirror along the vertical direction.
As a preferred technical scheme of the invention: the precise six-dimensional adjusting mechanism is provided with a closed-loop feedback control system to realize high-precision translation along the three xyz coordinate axes in nanometer order and high-precision rotation around the three xyz coordinate axes in micro-arc measurement level.
The third objective of the present invention is to provide a method for calibrating an F-P tunable filter using a precise six-dimensional adjustment mechanism, which overcomes the drawbacks of the prior art.
Therefore, the above purpose of the invention is realized by the following technical scheme:
a method for correcting an F-P tunable filter by using a precise six-dimensional adjusting mechanism is characterized in that the method for correcting the F-P tunable filter by using the precise six-dimensional adjusting mechanism is based on the correction system of the F-P tunable filter by using the precise six-dimensional adjusting mechanism, and comprises the following steps:
s1, setting the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror into wedge-shaped surfaces, enabling the upper surface of the fixed cavity mirror to be parallel to the xoy plane, clamping the moving cavity mirror by a clamp, fixing the moving cavity mirror on a hoisted precise six-dimensional adjusting mechanism, and placing the moving cavity mirror at a proper distance above the fixed cavity mirror;
s2, driving the motion cavity mirror by the precise six-dimensional adjusting mechanism to enable the light passing areas on the inner surfaces of the two cavity mirrors to be aligned in the vertical direction;
s3, the laser interference two-dimensional angle measurement module emits a beam of measurement light source, the measurement light source vertically enters the non-coated area of the moving cavity mirror along the Z-axis negative direction, and is reflected by the upper surface and the lower surface of the moving cavity mirror and the upper surface and the lower surface of the fixed cavity mirror in sequence, because the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror are both provided with wedge surfaces, the reflected light of the two surfaces can not affect interference signals, two beams of reflected light reflected by the lower surface of the moving cavity mirror and the upper surface of the fixed cavity mirror interfere with each other, and the interference signals are received by the laser interference two-dimensional angle measurement module;
s4, the laser interference two-dimensional angle measurement module calculates the two-dimensional inclination angles of the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror according to the received interference signals, the precise six-dimensional adjusting mechanism is used as an executing mechanism in the initial correction process, the measured two-dimensional inclination angles are used as control command input, the precise six-dimensional adjusting mechanism is controlled to drive the moving cavity mirror to realize high-precision translation and rotation, strict parallelism between two opposite mirror surfaces of the moving cavity mirror and the fixed cavity mirror is ensured, and a group of six-axis correction parameters of the precise six-dimensional adjusting mechanism at the moment are recorded;
s5, repeating the steps S3-S4 for multiple times, and verifying the repeatability of the six-axis correction parameters; if the parameter repeatability is good, the six-axis correction parameter is used as an initial correction parameter to control the precise six-dimensional adjusting mechanism to directly reach the position where the correction is finished; if the parameter repeatability is not good, an initial calibration is performed each time the F-P filter is used.
It is a further object of the present invention to provide a method for electrically tuning an F-P tunable filter using a precise six-dimensional adjustment mechanism that addresses the deficiencies in the prior art.
Therefore, the above purpose of the invention is realized by the following technical scheme:
an electric tuning method of an F-P tunable filter applying a precise six-dimensional adjusting mechanism is characterized in that: the electric tuning method of the F-P tunable filter applying the precise six-dimensional adjusting mechanism comprises the following steps: the precise six-dimensional adjusting mechanism in the F-P tunable filter corrected by the correcting method of the F-P tunable filter using the precise six-dimensional adjusting mechanism is controlled to move the movable cavity mirror up and down in a translation mode along the vertical direction and keep other five axes of the precise six-dimensional adjusting mechanism unchanged in a correcting state, the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror are driven to be strictly parallel, the precision is kept in the nanometer level, the up-and-down movement of the movable cavity mirror and the fixed cavity mirror is driven, the optical tuning filtering based on the multi-beam interference is realized, and the optical filtering resolution reaches the nanometer level.
The invention provides an F-P tunable filter, a system, a correction method and an electric tuning method applying a precise six-dimensional adjusting mechanism. In addition, with the help of the laser interference two-dimensional angle measuring module for auxiliary correction, the precise six-dimensional adjusting mechanism can also be used as an actuating mechanism in the initial adjustment and correction process, so that strict parallelism between two mirror surfaces on the inner surface of the F-P cavity is realized. The filter provided by the invention has the characteristics of simple structure, automatic adjustment and correction, large clear aperture and high filtering capability, the optical filtering resolution can reach the nanometer level, and the filter has wide application prospects in the fields of hyperfine spectral structure analysis, laser resonant cavities and optical communication.
Drawings
Fig. 1 is a schematic diagram of a prior art F-P electrically tuned filter using piezoelectric actuators in a triangular distribution.
Fig. 2 is a schematic diagram of an F-P tunable filter using a precise six-dimensional adjustment mechanism according to the present invention.
Fig. 3 is a diagram illustrating initial tuning correction of an F-P tunable filter using a precise six-dimensional tuning mechanism according to the present invention.
Detailed Description
The invention is described in further detail with reference to the figures and specific embodiments.
As shown in fig. 2, an F-P tunable filter using a precise six-dimensional adjusting mechanism comprises a fixed cavity mirror 1, a moving cavity mirror 2, a clamp 3 and a precise six-dimensional actuator 4, wherein the fixed cavity mirror 1, the moving cavity mirror 2 and a space surrounded by the fixed cavity mirror 1 and the moving cavity mirror 2 form an F-P cavity, the clamp 3 clamps the moving cavity mirror 2 and fixes the moving cavity mirror on the hoisted precise six-dimensional actuator 4, the moving cavity mirror 2 can move up and down strictly parallel to the fixed cavity mirror 1 under the driving of the precise six-dimensional actuator 4, so that the precondition of forming multi-beam interference is met, and further, the transmission wavelength is changed by adjusting the cavity length of the F-P cavity, and optical tuning filtering is realized.
The fixed cavity mirror 1 and the moving cavity mirror 2 are made of K9 glass, and the lower surface of the fixed cavity mirror 1 and the upper surface of the moving cavity mirror 2 are both processed into wedge-shaped surfaces. The two inner surfaces of the fixed cavity mirror 1 and the moving cavity mirror 2 which are oppositely arranged are provided with light transmission areas 5 for optical filtering, a high-reflectivity film needs to be plated, the requirement on the surface quality of the film is very high, a film plating material with the best matching property with a substrate lattice constant is adopted, and an ion beam sputtering film plating process is adopted for film plating, so that the reflection surface shape and the surface roughness of the film are ensured to meet the design requirement. The clamp 3 clamps one edge of the moving cavity mirror 2, the size of the clamp is designed according to the thickness of the moving cavity mirror 2, the clamp is made of aluminum alloy, and the clamp is fixed on the hoisted precise six-dimensional actuator 4 through screws. A thin layer of foam is placed on the clamped contact surface of the motion cavity mirror 2 to protect the mirror surface. The precise six-dimensional actuator 4 adopts a commercial high-precision six-degree-of-freedom piezoelectric platform with a closed-loop feedback control system as an actuating mechanism of an electric tuning filter, and can realize high-precision translation along three coordinate axes of xyz and high-precision translation around the three coordinate axes of xyzHigh-precision rotation of the shaft, wherein the translation precision is 1 nm, and the rotation precision is 1
。
As shown in fig. 3, with the help of the laser interference two-dimensional angle measurement module 6 for auxiliary correction, the precise six-dimensional actuator 4 can also be used as an execution mechanism in the initial correction process to drive the moving cavity mirror 2 to realize high-precision translation and rotation, thereby ensuring the initial alignment of the moving cavity mirror 2 and the fixed cavity mirror 1 in the vertical direction and the strict parallelism between two opposite mirror surfaces after alignment. The laser interference two-dimensional angle measurement module 6 is realized by selecting high-precision commercial angle measurement equipment, receives interference signals of two beams of reflected light by utilizing a laser interference principle, measures a two-dimensional inclination angle between two reflecting surfaces, and has the angle measurement precision of 1
。
A correction method of an F-P tunable filter applying a precise six-dimensional adjusting mechanism comprises the following steps:
s1, setting the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror into wedge-shaped surfaces, enabling the upper surface of the fixed cavity mirror to be parallel to the xoy plane, clamping the moving cavity mirror by a clamp, fixing the moving cavity mirror on a hoisted precise six-dimensional adjusting mechanism, and placing the moving cavity mirror at a proper distance above the fixed cavity mirror;
s2, driving the motion cavity mirror by the precise six-dimensional adjusting mechanism to align the light passing areas on the inner surfaces of the two cavity mirrors in the vertical direction;
s3, the laser interference two-dimensional angle measurement module emits a beam of measurement light source, the measurement light source vertically enters the non-coated area of the moving cavity mirror along the Z-axis negative direction, and is reflected by the upper surface and the lower surface of the moving cavity mirror and the upper surface and the lower surface of the fixed cavity mirror in sequence, because the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror are both provided with wedge surfaces, the reflected light of the two surfaces can not affect interference signals, two beams of reflected light reflected by the lower surface of the moving cavity mirror and the upper surface of the fixed cavity mirror interfere with each other, and the interference signals are received by the laser interference two-dimensional angle measurement module;
s4, the laser interference two-dimensional angle measurement module calculates the two-dimensional inclination angles of the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror according to the received interference signals, the precise six-dimensional adjusting mechanism is used as an executing mechanism in the initial correction process, the measured two-dimensional inclination angles are used as control command input, the precise six-dimensional adjusting mechanism is controlled to drive the moving cavity mirror to realize high-precision translation and rotation, strict parallelism between two opposite mirror surfaces of the moving cavity mirror and the fixed cavity mirror is ensured, and a group of six-axis correction parameters of the precise six-dimensional adjusting mechanism at the moment are recorded;
s5, repeating the steps S3-S4 for multiple times, and verifying the repeatability of the six-axis correction parameters; if the parameter repeatability is good, the six-axis correction parameter is used as an initial correction parameter to control the precise six-dimensional adjusting mechanism to directly reach the position where the correction is finished; if the parameter repeatability is not good, an initial calibration is performed each time the F-P filter is used.
An electrical tuning method of an F-P tunable filter applying a precise six-dimensional adjustment mechanism, comprising: the precise six-dimensional adjusting mechanism in the F-P tunable filter corrected by the correcting method of the F-P tunable filter using the precise six-dimensional adjusting mechanism is controlled to move the movable cavity mirror up and down in a translation mode along the vertical direction and keep other five axes of the precise six-dimensional adjusting mechanism unchanged in a correcting state, the lower surface of the movable cavity mirror and the upper surface of the fixed cavity mirror are driven to be strictly parallel, the precision is kept in the nanometer level, the up-and-down movement of the movable cavity mirror and the fixed cavity mirror is driven, the optical tuning filtering based on the multi-beam interference is realized, and the optical filtering resolution reaches the nanometer level.
The above detailed description is provided to illustrate the present invention, but not to limit the present invention, and any modifications, equivalents, improvements, etc. made within the spirit of the present invention and the scope of the claims fall within the scope of the present invention.
Claims (6)
1. A calibration system of an F-P tunable filter using a precise six-dimensional adjustment mechanism is characterized in that: the correcting system of the F-P tunable filter applying the precise six-dimensional adjusting mechanism comprises the F-P tunable filter applying the precise six-dimensional adjusting mechanism and a laser interference angle measuring module, wherein the laser interference angle measuring module emits laser towards the moving cavity mirror and the fixed cavity mirror and measures a two-dimensional inclination angle of the lower surface of the moving cavity mirror relative to the upper surface of the fixed cavity mirror, and the precise six-dimensional adjusting mechanism in the F-P tunable filter applying the precise six-dimensional adjusting mechanism adjusts the moving cavity mirror according to the two-dimensional inclination angle measured by the laser interference angle measuring module; the F-P tunable filter applying the precise six-dimensional adjusting mechanism comprises a fixed cavity mirror, a moving cavity mirror moving relative to the fixed cavity mirror, a clamp and the precise six-dimensional adjusting mechanism, wherein an F-P cavity is formed in the space between the fixed cavity mirror and the moving cavity mirror, the precise six-dimensional adjusting mechanism is fixedly hoisted, the clamp is fixed at the lower end of the precise six-dimensional adjusting mechanism, and the clamp is used for clamping the moving cavity mirror; the inner surface of the fixed cavity mirror opposite to the moving cavity mirror and the inner surface of the moving cavity mirror opposite to the fixed cavity mirror are respectively provided with a light-passing area, and a high-reflectivity film is plated on the light-passing area; the precise six-dimensional adjusting mechanism drives the lower surface of the moving cavity mirror and the upper surface of the fixed cavity mirror to be strictly parallel, and the precision of the precise six-dimensional adjusting mechanism moves up and down in the nanometer level to realize the optical tuning filtering based on the multi-beam interference, and the resolution of the optical filtering reaches the nanometer level.
2. The calibration system for an F-P tunable filter using a precision six-dimensional adjustment mechanism according to claim 1, wherein: the two opposite inner surfaces of the fixed cavity mirror and the moving cavity mirror are parallel to each other, and the two outer surfaces of the fixed cavity mirror, which are opposite to each other, of the moving cavity mirror are wedge-shaped surfaces.
3. The calibration system for an F-P tunable filter using a precision six-dimensional adjustment mechanism according to claim 1, wherein: the precise six-dimensional adjusting mechanism is provided with a closed-loop feedback control system to realize high-precision translation along the three xyz coordinate axes in nanometer order and high-precision rotation around the three xyz coordinate axes in micro-arc measurement level.
4. The calibration system for an F-P tunable filter using a precision six-dimensional adjustment mechanism according to claim 1, wherein: the two opposite inner surfaces of the fixed cavity mirror and the moving cavity mirror are parallel to each other and parallel to a horizontal plane, and the two outer surfaces of the fixed cavity mirror, which are opposite to the moving cavity mirror, are wedge-shaped surfaces; and the laser emitted by the laser interference angle measuring module is emitted towards the moving cavity mirror and the fixed cavity mirror along the vertical direction.
5. A method for correcting an F-P tunable filter using a precise six-dimensional adjustment mechanism, wherein the method for correcting an F-P tunable filter using a precise six-dimensional adjustment mechanism is based on the system for correcting an F-P tunable filter using a precise six-dimensional adjustment mechanism of claim 1, and comprises the steps of:
s1, setting the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror into wedge-shaped surfaces, enabling the upper surface of the fixed cavity mirror to be parallel to the xoy plane, clamping the moving cavity mirror by a clamp, fixing the moving cavity mirror on a hoisted precise six-dimensional adjusting mechanism, and placing the moving cavity mirror at a proper distance above the fixed cavity mirror;
s2, driving the motion cavity mirror by the precise six-dimensional adjusting mechanism to align the light passing areas on the inner surfaces of the two cavity mirrors in the vertical direction;
s3, the laser interference two-dimensional angle measurement module emits a beam of measurement light source, the measurement light source vertically enters the non-coated area of the moving cavity mirror along the Z-axis negative direction, and is reflected by the upper surface and the lower surface of the moving cavity mirror and the upper surface and the lower surface of the fixed cavity mirror in sequence, because the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror are both provided with wedge surfaces, the reflected light of the two surfaces can not affect interference signals, two beams of reflected light reflected by the lower surface of the moving cavity mirror and the upper surface of the fixed cavity mirror interfere with each other, and the interference signals are received by the laser interference two-dimensional angle measurement module;
s4, the laser interference two-dimensional angle measurement module calculates the two-dimensional inclination angles of the upper surface of the moving cavity mirror and the lower surface of the fixed cavity mirror according to the received interference signals, the precise six-dimensional adjusting mechanism is used as an executing mechanism in the initial correction process, the measured two-dimensional inclination angles are used as control command input, the precise six-dimensional adjusting mechanism is controlled to drive the moving cavity mirror to realize high-precision translation and rotation, strict parallelism between two opposite mirror surfaces of the moving cavity mirror and the fixed cavity mirror is ensured, and a group of six-axis correction parameters of the precise six-dimensional adjusting mechanism at the moment are recorded;
s5, repeating the steps S3-S4 for multiple times, and verifying the repeatability of the six-axis correction parameters; if the parameter repeatability is good, the six-axis correction parameter is used as an initial correction parameter to control the precise six-dimensional adjusting mechanism to directly reach the position where the correction is finished; if the parameter repeatability is not good, an initial calibration is performed each time the F-P filter is used.
6. An electric tuning method of an F-P tunable filter applying a precise six-dimensional adjusting mechanism is characterized in that: the electric tuning method of the F-P tunable filter applying the precise six-dimensional adjusting mechanism comprises the following steps: the precise six-dimensional adjusting mechanism in the F-P tunable filter corrected by the correcting method of the F-P tunable filter using the precise six-dimensional adjusting mechanism of claim 5 is controlled to translate the moving cavity mirror up and down along the vertical direction and keep the other five axes of the precise six-dimensional adjusting mechanism unchanged in the correcting state, so as to drive the lower surface of the moving cavity mirror and the upper surface of the fixed cavity mirror to be strictly parallel and to move up and down with the precision in the nanometer level, thereby realizing the optical tuning filtering based on the multi-beam interference, and the optical filtering resolution reaches the nanometer level.
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| CN1759331A (en) * | 2003-03-19 | 2006-04-12 | 三菱电机株式会社 | Wavelength filter and wavlength monitor device |
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| US6816636B2 (en) * | 2001-09-12 | 2004-11-09 | Honeywell International Inc. | Tunable optical filter |
| CN1176392C (en) * | 2002-09-29 | 2004-11-17 | 上海交通大学 | Tunable wavelength selective 2X2 photoswitch |
| CN108388023B (en) * | 2018-01-30 | 2023-05-05 | 中国科学院上海技术物理研究所 | High-precision assembly system of large-caliber wide-spectrum F-P tunable filter |
| CN110161008B (en) * | 2019-06-04 | 2021-10-29 | 山东理工大学 | Fluorescent particle tracing method and device with self-calibration of coaxial-axis degree and amplification factor |
| WO2021056251A1 (en) * | 2019-09-25 | 2021-04-01 | 深圳市海谱纳米光学科技有限公司 | Tunable optical filtering apparatus |
| CN211063029U (en) * | 2019-12-17 | 2020-07-21 | 昂纳信息技术（深圳）有限公司 | Light spot adjusting system of laser |
| FI20205917A1 (en) * | 2020-09-22 | 2022-03-23 | Teknologian Tutkimuskeskus Vtt Oy | Capacitively controlled Fabry-Perot interferometer |
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