CN114543728A - Novel liquid gap calibration method - Google Patents
Novel liquid gap calibration method Download PDFInfo
- Publication number
- CN114543728A CN114543728A CN202210091198.3A CN202210091198A CN114543728A CN 114543728 A CN114543728 A CN 114543728A CN 202210091198 A CN202210091198 A CN 202210091198A CN 114543728 A CN114543728 A CN 114543728A
- Authority
- CN
- China
- Prior art keywords
- heat shield
- cover plate
- furnace
- calibration method
- shield cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000013078 crystal Substances 0.000 claims abstract description 20
- 238000007789 sealing Methods 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 2
- 238000007599 discharging Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
Abstract
The invention discloses a novel liquid gap calibration method, and relates to the technical field of monocrystalline silicon manufacturing. The calibration method comprises the following steps: step 1: the corresponding heat shield cover plate tool is set by measuring the size of the furnace body; step 2: sealing the lower opening of the heat shield; and step 3: the heat shield is lowered to the lower limit by closing the empty furnace; and 4, step 4: the crystal position of the seed crystal is accurately reached to the lower edge of the heat shield; and 5, measuring the actual liquid port distance in the furnace through the variation of the crystal position. After the integral method is applied, the operation is simple, the actual liquid port distance in the furnace can be accurately measured only by adding a heat shield cover plate tool for assistance, the working hours and the labor cost are not increased, the liquid port distance deviation is within +/-1 mm, the concentration is high, and the consistency is good.
Description
Technical Field
The invention relates to the technical field of monocrystalline silicon manufacturing, in particular to a novel liquid gap calibration method.
Background
In the process of drawing the silicon single crystal rod, the problem of poor consistency of the distances between the liquid introducing and discharging ports of staff in a production field can not be solved by an effective means all the time, and the distances between the liquid introducing and discharging ports of the staff in the production field are not much the same for every person according to experience of old staff; due to lack of experience, new staff cannot accurately and consistently place liquid port distances and have larger or smaller liquid port distances; the centralized control can not realize the consistency of the liquid gap placement, the problem always troubles a plurality of single crystal practitioners, and the problem of the liquid gap is a main factor of wire breakage, thereby greatly influencing the yield of a production field.
Disclosure of Invention
The invention aims to provide a novel liquid port distance calibration method, which aims to solve the existing problems: the placement of the liquid port distances cannot be accurately and consistently carried out, and the placement of the liquid port distances is too large or too small, so that the consistency of the placement of the liquid port distances cannot be realized by centralized control.
In order to achieve the purpose, the invention provides the following technical scheme: a novel liquid gap calibration method comprises the following steps:
step 1: the corresponding heat shield cover plate tool is set by measuring the size of the furnace body;
step 2: sealing the lower opening of the heat shield;
and step 3: the heat shield is lowered to the lower limit by closing the empty furnace;
and 4, step 4: the crystal position of the seed crystal is accurately reached to the lower edge of the heat shield;
and 5, measuring the actual liquid port distance in the furnace through the variation of the crystal position.
Preferably, the heat shield cover plate setting tool comprises the following steps:
s1: placing four ends of a heat shield cover plate tool at a lower opening of a heat shield;
s2: positioning holes are formed in four ends of the heat shield cover plate tool;
s3: carrying a rubber band in the positioning hole;
s4: and fixing the heat shield cover plate tool at the heat shield by using the rubber band.
The heat shield cover plate tool is made of carbon, is light and easy to take, can be bound at the lower opening of the heat shield, and can be effectively monitored when the seed crystal reaches the lower edge of the heat shield;
the liquid port distance position is equal to the crystal position 2, equal to the crystal position 1 and is equal to the liquid port distance standard value;
the distance between the liquid introducing and discharging port and the placing deviation is within +/-1 mm;
the method is designed into an automatic program, and is not observed and judged by personnel any more;
can be seamlessly connected with a centralized control system, and the consistency of liquid port distance placement is ensured.
Compared with the prior art, the invention has the beneficial effects that:
1. the method is simple to operate, and the actual liquid port distance in the furnace can be accurately measured only by adding a heat shield cover plate tool for assistance;
2. the method does not increase working hours and labor cost;
3. the method has the advantages of liquid gap deviation within +/-1 mm, high concentration and good consistency
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of a heat shield cover plate tooling of the present invention;
FIG. 2 is an overall schematic of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-2, a novel liquid gap calibration method, includes the following steps:
step 1: the corresponding heat shield cover plate tool is set by measuring the size of the furnace body;
and 2, step: sealing the lower opening of the heat shield;
and step 3: the heat shield is lowered to the lower limit by closing the empty furnace;
and 4, step 4: the crystal position of the seed crystal is accurately reached to the lower edge of the heat shield;
and 5, measuring the actual liquid port distance in the furnace through the variation of the crystal position.
The tool for arranging the heat shield cover plate comprises the following steps:
s1: placing four ends of a heat shield cover plate tool at a lower opening of a heat shield;
s2: positioning holes are formed in four ends of the heat shield cover plate tool;
s3: carrying a rubber band in the positioning hole;
s4: and fixing the heat shield cover plate tool at the heat shield by using the rubber band.
The heat shield cover plate tool is made of carbon, is light and easy to take, can be bound at the lower opening of the heat shield, and can be effectively monitored when the seed crystal reaches the lower edge of the heat shield;
the liquid port distance position is equal to the crystal position 2, equal to the crystal position 1 and is equal to the liquid port distance standard value;
the distance between the liquid introducing and discharging port and the placing deviation is within +/-1 mm;
the method is designed into an automatic program, and is not observed and judged by personnel any more;
can be seamlessly connected with a centralized control system, and the consistency of liquid port distance placement is ensured.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (2)
1. A novel liquid gap calibration method is characterized in that: the calibration method comprises the following steps:
step 1: the corresponding heat shield cover plate tool is set by measuring the size of the furnace body;
step 2: sealing the lower opening of the heat shield;
and step 3: the heat shield is lowered to the lower limit by closing the empty furnace;
and 4, step 4: the crystal position of the seed crystal is accurately reached to the lower edge of the heat shield;
and 5, measuring the actual liquid port distance in the furnace through the variation of the crystal position.
2. The novel liquid gap calibration method according to claim 1, characterized in that: the tool for arranging the heat shield cover plate comprises the following steps:
s1: placing four ends of a heat shield cover plate tool at a lower opening of a heat shield;
s2: positioning holes are formed in four ends of the heat shield cover plate tool;
s3: carrying a rubber band in the positioning hole;
s4: and fixing the heat shield cover plate tool at the heat shield by using the rubber band.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210091198.3A CN114543728A (en) | 2022-01-26 | 2022-01-26 | Novel liquid gap calibration method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210091198.3A CN114543728A (en) | 2022-01-26 | 2022-01-26 | Novel liquid gap calibration method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114543728A true CN114543728A (en) | 2022-05-27 |
Family
ID=81673248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210091198.3A Pending CN114543728A (en) | 2022-01-26 | 2022-01-26 | Novel liquid gap calibration method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114543728A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104278320A (en) * | 2013-07-04 | 2015-01-14 | 有研新材料股份有限公司 | Apparatus for measuring liquid level position of silicon melt in Czochralski silicon single crystal furnace |
| CN113566722A (en) * | 2021-06-23 | 2021-10-29 | 浙江晶阳机电股份有限公司 | Device and method for automatically measuring distance between liquid ports |
| CN113913922A (en) * | 2021-10-28 | 2022-01-11 | 双良硅材料(包头)有限公司 | Method for setting liquid gap of single crystal furnace |
-
2022
- 2022-01-26 CN CN202210091198.3A patent/CN114543728A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104278320A (en) * | 2013-07-04 | 2015-01-14 | 有研新材料股份有限公司 | Apparatus for measuring liquid level position of silicon melt in Czochralski silicon single crystal furnace |
| CN113566722A (en) * | 2021-06-23 | 2021-10-29 | 浙江晶阳机电股份有限公司 | Device and method for automatically measuring distance between liquid ports |
| CN113913922A (en) * | 2021-10-28 | 2022-01-11 | 双良硅材料(包头)有限公司 | Method for setting liquid gap of single crystal furnace |
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