CN110285774A - A kind of quick judgement silica crucible size meets the device and application method of specification - Google Patents
A kind of quick judgement silica crucible size meets the device and application method of specification Download PDFInfo
- Publication number
- CN110285774A CN110285774A CN201910682729.4A CN201910682729A CN110285774A CN 110285774 A CN110285774 A CN 110285774A CN 201910682729 A CN201910682729 A CN 201910682729A CN 110285774 A CN110285774 A CN 110285774A
- Authority
- CN
- China
- Prior art keywords
- silica crucible
- radian
- measurement
- straight wall
- diameter layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 256
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 127
- 238000000034 method Methods 0.000 title claims description 14
- 238000005259 measurement Methods 0.000 claims abstract description 71
- 244000144985 peep Species 0.000 claims abstract description 10
- 239000004575 stone Substances 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- 239000011148 porous material Substances 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 9
- 238000001514 detection method Methods 0.000 description 5
- 229910052571 earthenware Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003116 impacting effect Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000008092 positive effect Effects 0.000 description 2
- 238000012797 qualification Methods 0.000 description 2
- 229920000297 Rayon Polymers 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention provides one kind and quickly judges that silica crucible size meets the device of specification, including radian portion and straight wall portion, radian portion can be used alone with straight wall portion, or radian portion is detachably connected with straight wall portion, wherein, radian portion includes the first radian portion and the second radian portion, and the first arc section is not set to the both ends in the second radian portion, and radian portion is equipped with multiple mesh；Straight wall portion includes observation portion and measurement portion, and observation portion is set to measurement portion one end, another end opening of measurement portion, and measurement portion is equipped with peep hole.It is simple that the beneficial effects of the invention are as follows structures, easy to use, has radian portion and straight wall portion, and the shape and silica crucible of radian portion and straight wall portion when being used cooperatively are adapted, radian portion and vertical wall section are not assembled with silica crucible, judge whether the size of silica crucible is qualified, rapid survey, save measurement working hour, measurement error is small, and consistency is good, and measurement is convenient, understandable, measuring device cost is small, is easy to implement automatic measurement.
Description
Technical field
The invention belongs to pulling of crystals technical fields, quickly judge that silica crucible size meets specification more particularly, to one kind
Device and application method.
Background technique
Silica crucible has emphatically single crystal growing furnace charging, Cheng Jing and monocrystalline quality as one of important auxiliary material of czochralski crystal growing furnace
It acts on, therefore, the size of silica crucible will affect its reasonable assembly with other thermal field parts, if silica crucible vertical wall section
Off size reason easily causes monocrystalline abnormal at edge deformation, crimping on brilliant difference even crucible, if the off size reason of arc section, easily
The disconnected bud in monocrystalline tail portion is caused, crystal-pulling cost increase, quality decline are bound to cause.Therefore for monocrystalline silicon manufacturing enterprise quartz
Crucible incoming inspection work is carried out particularly important.
Currently to silica crucible measurement method majority be use the tools such as vernier caliper, tape measure, dedicated radian slide calliper rule shape
Formula measures, and heavy workload and is influenced that error is big, consistency is poor by measurement level, exists simultaneously the inaccurate situation of data, and one
Denier feeds back off size reason retrospect will be extremely difficult, this is very unfavorable to the sustainable development of enterprise.
Summary of the invention
In view of the above problems, the problem to be solved in the present invention is to provide one kind quickly to judge that silica crucible size meets specification
Device and application method, measured for the size to silica crucible, measurement is convenient, and error is small, can be applied to automate
Measurement.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: it is a kind of quickly to judge that silica crucible size is full
The device of sufficient specification, including radian portion and straight wall portion, radian portion can be used alone with straight wall portion or radian portion and straight wall portion it is removable
Unload connection, wherein
Radian portion includes the first radian portion and the second radian portion, and the first arc section is not set to the both ends in the second radian portion,
Radian portion is equipped with multiple mesh, and radian portion is used to assemble with silica crucible, measure to the bottom radian of silica crucible, first
Radian portion is measured with the first radian of the other bottom to silica crucible of the second arc section and the second radian；
Straight wall portion includes observation portion and measurement portion, and observation portion is set to measurement portion one end, another end opening of measurement portion, measurement portion
Equipped with peep hole, straight wall portion is used to assemble with the straight wall portion of silica crucible, measures for the straight wall portion to silica crucible.
Further, mesh size 25-100mm.
Further, measurement portion includes internal diameter layer and outer diameter layer, and internal diameter layer and outer diameter layer are coaxially disposed, internal diameter layer and outer diameter
One end of layer is connect with observation portion, has measurement gap between internal diameter layer and outer diameter layer.
Further, the wall thickness for measuring gap and silica crucible is adapted.
Further, radian portion and straight wall portion are transparent material.
Further, internal diameter layer and another end opening of outer diameter layer.
A kind of quick judgement silica crucible size meets the application method of the device of specification, comprising the following steps:
S1: radian portion is assembled with silica crucible, judges whether radian portion rationally assembles with silica crucible by mesh；
S2: straight wall portion is assembled with silica crucible, between the vertical wall section insertion internal diameter layer and outer diameter layer of silica crucible
Measurement gap in, judge whether straight wall portion rationally assembles with silica crucible by peep hole.
Further, judge radian portion in step S1 and foundation that silica crucible rationally assembles is radian portion and silica crucible
Fitting, and judged automatically by infrared ray.
Further, radian portion is assembled with silica crucible by sliding block and link mechanism.
Further, judge straight wall portion in step S2 and foundation that silica crucible rationally assembles is silica crucible vertical wall section
It can be inserted into measurement gap, and the inner wall of silica crucible vertical wall section is bonded with internal diameter layer and outer diameter layer respectively with outer wall, and is led to
Infrared ray is crossed to judge automatically.
The advantages and positive effects of the present invention are: due to the adoption of the above technical scheme, so that quickly judging quartzy earthenware
The apparatus structure that crucible size meets specification is simple, easy to use, has radian portion and straight wall portion, and radian portion and straight wall portion cooperate
Shape and silica crucible when use are adapted, and radian portion and vertical wall section are not assembled with silica crucible, by judging radian portion
Whether with silica crucible assembly rationally judge whether the size of silica crucible is qualified with straight wall portion, rapid survey saves measurement
In working hour, measurement error is small, and consistency is good, and measurement is convenient, understandable, and measuring device cost is small, is easy to implement automatic measurement.
Detailed description of the invention
Fig. 1 is the structural schematic diagram in the radian portion of one embodiment of the invention；
Fig. 2 is the structural schematic diagram in the straight wall portion of one embodiment of the invention.
In figure:
1, observation portion 2, measurement gap 3, internal diameter layer
4, outer diameter layer 5, peep hole 6, mesh
7, the second radian portion 8, the first radian portion
Specific embodiment
The present invention is further illustrated in the following with reference to the drawings and specific embodiments.
Fig. 1 and 2 shows the structure of one embodiment of the invention, and the present embodiment is related to one kind and quickly judges silica crucible size
The device and application method for meeting specification, measure for the size to silica crucible, use convenient for subsequent pulling of crystals
Silica crucible size qualification guarantees being normally carried out for pulling of crystals, this quickly judges that silica crucible size meets the device of specification
With radian portion and straight wall portion, radian portion and straight wall portion are used in combination and carry out dimensional measurement to silica crucible, and measurement is convenient, accidentally
Difference is small.
A kind of quick judgement silica crucible size meets the device of specification, as illustrated in fig. 1 and 2, including radian portion and straight wall
Portion, radian portion can be used alone with straight wall portion, alternatively, radian portion is detachably connected with straight wall portion, radian portion is used for quartzy earthenware
The bottom arc section of crucible carries out dimensional measurement, and straight wall portion is used to carry out dimensional measurement, radian to the vertical wall section of silica crucible
Portion can be single use with straight wall portion, carry out dimensional measurement to the arc section of silica crucible and vertical wall section respectively；Alternatively,
Radian portion is detachably connected with straight wall portion, and the two is used cooperatively, and is measured to the size of silica crucible, radian portion and straight wall portion
It can be slidably connected or other detachable connection methods, be selected according to actual needs, here by grafting
Do not do specific requirement.
Wherein, radian portion includes the first radian portion 8 and the second radian portion 7, and the quantity in the first radian portion 8 is two, two
First radian portion 8 is respectively arranged on the both ends in the second radian portion 7, and two the first radian portions 8 are fixed with the second radian portion 7 respectively to be connected
It connects, the first radian portion 8 can be fixedly connected by viscose glue with the second radian portion 7 or the first radian portion 8 and the second radian portion 7
It is integrally formed or other is fixedly connected with mode, selected according to actual needs, do not do specific requirement here, it is preferred that
In the present embodiment, the first radian portion 8 and the second radian portion 7 are integrally formed, and stable structure is unlikely to deform.First radian portion 8
Radian size less than the second radian portion 7 size so that the radian portion that constitutes of two the first radian portions 8 and the second radian portion 7 with
The bottom arc section shape of silica crucible is adapted, and is surveyed convenient for radian portion in the size of the arc section to silica crucible bottom
When amount, silica crucible is placed in radian portion, is assembled, so that radian portion is bonded with the bottom arc section of silica crucible,
The dimensional measurement for carrying out silica crucible bottom when silica crucible bottom arc section and radian portion fit, and fits closely, does not have
When having gap, illustrate that assembly rationally, indicates silica crucible bottom arc section size qualification.
Radian portion is equipped with multiple mesh 6, the setting of mesh 6, convenient for the dimensional measurement to silica crucible bottom arc section
When observe, observation silica crucible bottom arc section whether fit with radian portion, it is preferred that radian portion is arranged in mesh 6
Second radian portion 7, and the quantity of mesh 6 be it is multiple, selected according to actual needs, the size of mesh 6 is 25-100mm, net
The shape in hole 6 can be circle or rectangular, or other shapes, be selected according to actual needs.
Straight wall portion is used to measure the size of silica crucible vertical wall section, which includes observation portion 1 and measurement portion, observation
Portion 1 is set to measurement portion one end, another end opening of measurement portion, and measurement portion is equipped with peep hole 5；The setting in observation portion 1, convenient for stone
It is observed when the vertical wall section measurement of English crucible, whether the size convenient for judging silica crucible vertical wall section is qualified；Measurement portion
Setting, convenient for being measured to silica crucible vertical wall section；Observation portion 1 is mounted on one end of measurement portion, and observation portion 1 and survey
Amount portion may be a fixed connection, and may be a detachable connection or other connection types, be selected according to actual needs
It selects, and observation portion 1 and measurement portion intersect vertically setting.
Above-mentioned observation portion 1 is plate structure, and the cross-sectional shape of shape and measurement portion is adapted, and is convenient for observation portion 1
Connect with measurement portion, observation portion 1 it is conveniently of circular shape, multiple peep holes 5, the shape of peep hole 5 are provided in observation portion 1
Shape can be circle or rectangular or other shapes, is selected according to true form, does not do specific requirement here,
Size does not do specific requirement equally here, is selected according to actual needs.Observation portion 1 is mounted on one end of measurement portion, measurement
Another end opening in portion measures the vertical wall section of silica crucible convenient for being sleeved on silica crucible.
Above-mentioned measurement portion includes internal diameter layer 3 and outer diameter layer 4, and internal diameter layer 3 and outer diameter layer 4 are coaxially disposed, internal diameter layer 3 and outer
There is measurement gap, measurement gap 2 and the wall thickness of silica crucible are adapted, the shape of internal diameter layer 3 and outer diameter layer 4 between diameter layer 4
It is adapted, is measured convenient for the vertical wall section to silica crucible, it is preferred that internal diameter with the vertical wall section shape of silica crucible
Layer 3 is cylindrical structure, inner hollow, both ends open, it is, measurement portion is ring structure, internal diameter layer 3 with outer diameter layer 4
Internally positioned, outer diameter layer 4 is located at outside, and internal diameter layer 3 and outer diameter layer 4 constitute cyclic structure, between internal diameter layer 3 and outer diameter layer 4
Distance and the thickness of the vertical wall section of silica crucible are adapted, and the size convenient for the vertical wall section to silica crucible measures,
Internal diameter layer 3 is connect with observation portion 1 with one end of outer diameter layer 4, it is, the columned ring that internal diameter layer 3 and outer diameter layer 4 are constituted
Shape structure one end is connect with observation portion 1, and end measurement gap 2 is silent, another end opening, and end measurement gap 2 is open, and is convenient for
The vertical wall section of silica crucible is measured.The setting in observation portion 1, when straight wall portion is when measuring, measurement portion is sleeved on
The end of the vertical wall section of silica crucible, the vertical wall section of silica crucible stops observation portion, so that measurement portion hovers over
At this position, guarantees that measurement process position is fixed, avoid measurement portion from falling, the arc section of silica crucible is damaged, together
When avoid impacting measurement.
To avoid radian portion and straight wall portion from impacting silica crucible, the radian portion and straight wall portion are transparent material,
Convenient for measurement.
A kind of quick judgement silica crucible size meets the application method of the device of specification, comprising the following steps:
S1: radian portion is assembled with silica crucible, and silica crucible is placed in radian portion, so that the arc of silica crucible
The outer wall of degree part is contacted with radian portion, judges whether radian portion rationally assembles with silica crucible by mesh 6, the judgement radian
The foundation that portion and silica crucible rationally assemble is that radian portion is bonded with silica crucible, if the outer wall of the arc section of silica crucible and
Radian portion inner wall is in close contact, then illustrates that the size of the arc section of silica crucible is up to specification, can carry out pulling of crystals makes
With；If the outer wall of the arc section of silica crucible is not in close contact with radian portion inner wall, there is gap, then illustrate silica crucible
The off-dimension of arc section not can be carried out pulling of crystals use.It is filled in the arc section for carrying out radian portion and silica crucible
Timing can be assembled by sliding block and link mechanism, can also be assembled by other means, realize automatic makeup
Match, at the same by laser detection instrument detection assembly it is whether reasonable, i.e., by detection silica crucible outer wall and radian portion outer wall away from
Deviation, if range difference in range of set value, illustrates radian portion and silica crucible assembly rationally, conversely, then illustrating radian portion
It is unreasonable with the assembly of silica crucible, it is easy to implement automation.
S2: straight wall portion is assembled with silica crucible, the vertical wall section of silica crucible insertion internal diameter layer 3 and outer diameter layer 4 it
Between measurement gap in, from the lower part in straight wall portion measurement gap location carry out silica crucible vertical wall section and straight wall portion assemble, stone
The vertical wall section of English crucible is inserted into along the measurement gap of the lower part in straight wall portion, and straight wall portion is sleeved on to the straight wall portion of silica crucible
On point, judges whether straight wall portion rationally assembles with silica crucible by peep hole, judge that straight wall portion is rationally assembled with silica crucible
Foundation be that silica crucible vertical wall section can be inserted into measurement gap 2, and the inner wall of silica crucible vertical wall section and outer wall are distinguished
It is bonded with internal diameter layer 3 and outer diameter layer 4, then silica crucible Sizes, pulling of crystals use can be carried out；If can not assemble or fill
It is larger with rear spacing, illustrate off size reason, may not apply to pulling of crystals；It is filled in the vertical wall section of straight wall portion and silica crucible
Timing can complete assembly in conjunction with transfer matic, can also be assembled with combining with digital control program, if assembly is unreasonable, can be stopped
Assembly guarantees that crucible is injury-free.Judge when whether straight wall portion and silica crucible rationally assemble can by laser detection instrument,
I.e. by detection silica crucible outer wall (passing through the aperture of outer diameter layer) and straight wall portion outer wall range difference, if range difference is in range of set value
It is interior, then illustrate radian portion and silica crucible assembly rationally, conversely, then illustrating that the assembly of radian portion and silica crucible is unreasonable, just
It is automated in realizing.
The advantages and positive effects of the present invention are: due to the adoption of the above technical scheme, so that quickly judging quartzy earthenware
The apparatus structure that crucible size meets specification is simple, easy to use, has radian portion and straight wall portion, and radian portion and straight wall portion cooperate
Shape and silica crucible when use are adapted, and radian portion and vertical wall section are not assembled with silica crucible, by judging radian portion
Whether with silica crucible assembly rationally judge whether the size of silica crucible is qualified with straight wall portion, rapid survey saves measurement
In working hour, measurement error is small, and consistency is good, and measurement is convenient, understandable, and measuring device cost is small, is easy to implement automatic measurement.
The embodiments of the present invention have been described in detail above, but content is only the preferred embodiment of the present invention,
It should not be considered as limiting the scope of the invention.Any changes and modifications in accordance with the scope of the present application,
It should still be within the scope of the patent of the present invention.
Claims (10)
1. one kind quickly judges that silica crucible size meets the device of specification, it is characterised in that: including radian portion and straight wall portion, institute
State that radian portion can be used alone with the straight wall portion or the radian portion is detachably connected with the straight wall portion, wherein
The radian portion includes the first radian portion and the second radian portion, and first arc section is not set to second radian portion
Both ends, the radian portion be equipped with multiple mesh, the radian portion be used for silica crucible assemble, to the bottom of the silica crucible
Portion's radian measures, first arc in first radian portion and the other bottom to the silica crucible of second arc section
Degree and the second radian measure；
The straight wall portion includes observation portion and measurement portion, and the observation portion is set to described measurement portion one end, and the measurement portion is another
End opening, the measurement portion are equipped with peep hole, and the straight wall portion is used to assemble with the straight wall portion of the silica crucible, for institute
The straight wall portion for stating silica crucible measures.
2. the device that quick judgement silica crucible size according to claim 1 meets specification, it is characterised in that: the net
Pore size is 25-100mm.
3. the device that quick judgement silica crucible size according to claim 1 or 2 meets specification, it is characterised in that: institute
Stating measurement portion includes internal diameter layer and outer diameter layer, and the internal diameter layer and the outer diameter layer are coaxially disposed, the internal diameter layer and described outer
One end of diameter layer is connect with the observation portion, has measurement gap between the internal diameter layer and the outer diameter layer.
4. the device that quick judgement silica crucible size according to claim 3 meets specification, it is characterised in that: the survey
The wall thickness for measuring gap and the silica crucible is adapted.
5. the device that quick judgement silica crucible size according to claim 4 meets specification, it is characterised in that: the arc
Degree portion and the straight wall portion are transparent material.
6. the device that quick judgement silica crucible size according to claim 4 or 5 meets specification, it is characterised in that: institute
State internal diameter layer and another end opening of outer diameter layer.
7. one kind quickly judges that silica crucible size meets the application method of the device of specification, it is characterised in that: including following step
It is rapid:
S1: the radian portion is assembled with the silica crucible, judges the radian portion and the quartz by the mesh
Whether crucible rationally assembles；
S2: the straight wall portion is assembled with the silica crucible, and the vertical wall section of the silica crucible is inserted into the internal diameter layer
In measurement gap between the outer diameter layer, judge whether the straight wall portion rationally fills with the silica crucible by peep hole
Match.
8. quick judgement silica crucible size according to claim 7 meets the application method of the device of specification, feature
Be: judge in the step S1 foundation that the radian portion and the silica crucible rationally assemble for the radian portion with it is described
Silica crucible fitting, and judged automatically by infrared ray.
9. quick judgement silica crucible size according to claim 8 meets the application method of the device of specification, feature
It is: is assembled with the silica crucible by sliding block and link mechanism in the radian portion.
10. meeting the user of the device of specification according to the described in any item quick judgement silica crucible sizes of claim 7-9
Method, it is characterised in that: judge the straight wall portion in the step S2 and foundation that the silica crucible rationally assembles is the stone
English crucible vertical wall section can be inserted into the measurement gap, and the inner wall of the silica crucible vertical wall section and outer wall respectively with institute
Internal diameter layer and outer diameter layer fitting are stated, and is judged automatically by infrared ray.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910682729.4A CN110285774A (en) | 2019-07-26 | 2019-07-26 | A kind of quick judgement silica crucible size meets the device and application method of specification |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910682729.4A CN110285774A (en) | 2019-07-26 | 2019-07-26 | A kind of quick judgement silica crucible size meets the device and application method of specification |
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| CN110285774A true CN110285774A (en) | 2019-09-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910682729.4A Pending CN110285774A (en) | 2019-07-26 | 2019-07-26 | A kind of quick judgement silica crucible size meets the device and application method of specification |
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| CN (1) | CN110285774A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110966938A (en) * | 2019-12-24 | 2020-04-07 | 江门市安诺特炊具制造有限公司 | Automatic measuring device and measuring method for bottom concave of cooker |
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