CN210314480U - Structure for correcting X-Y direction of atomic layer precipitation reaction cover - Google Patents
Structure for correcting X-Y direction of atomic layer precipitation reaction cover Download PDFInfo
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- CN210314480U CN210314480U CN201921356710.2U CN201921356710U CN210314480U CN 210314480 U CN210314480 U CN 210314480U CN 201921356710 U CN201921356710 U CN 201921356710U CN 210314480 U CN210314480 U CN 210314480U
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- layer deposition
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Abstract
The utility model relates to a correction structure, in particular to a structure for correcting X-Y direction of an atomic layer deposition reaction cover, which comprises an X direction correction component provided with a slide block and a Y direction correction component provided with a stud, wherein the Y direction correction component is arranged on the X direction correction component; the X-direction correcting component is provided with a fixed seat, and is matched with the sliding block to be connected to the fixed seat in a sliding manner; an adjusting bolt is inserted into the sliding block in a penetrating manner and is fixed through threads; the Y-direction correcting component is provided with a connecting ring, and the stud is inserted on the connecting ring and limited by a nut; the connecting ring is fixed on the fixed seat; the adjustment of the reaction cover in the X-Y direction can be realized by simple operation, so that the correct sealing of the reaction cavity is easier to realize; the problem that the use of the equipment and the chemical reaction are influenced due to the machining precision, the installation precision and the like in the installation of the original equipment is solved; the installation difficulty is reduced, the installation time is shortened, and the working efficiency is improved.
Description
Technical Field
The utility model relates to a rectify structure, specifically be a structure that is used for atomic layer precipitation reaction lid X-Y direction to rectify.
Background
The reaction cover of the atomic layer deposition is a part of a component of an atomic layer deposition automatic reaction cavity (hereinafter referred to as a reaction cavity), an automatic execution mechanism is required to control the reaction cover to automatically and vertically lift in a high vacuum environment, and the reaction cover and the reaction cavity form a closed state required by chemical reaction; the actions of automatic vertical lifting and forming a seal with the reaction cavity are completed by controlling the reaction cover by the automatic execution mechanism, which puts further requirements on a connecting mechanism between the automatic execution mechanism and the reaction cover;
the traditional automatic lifting mechanism adopts a direct flexible connection mode, the self-adjustable amplitude is very small, installation deviation is easy to occur, secondary adjustment is very difficult, special tools are required to assist positioning adjustment and an integral cleaning program of the adjusted equipment, the process is complex, a large amount of manpower and material resources are consumed, the requirement on the X-Y direction dimension precision of a reaction cover of atomic layer deposition and an atomic layer deposition automatic reaction cavity is high, otherwise, the equipment is operated under the condition that reaction air holes cannot be aligned, and chemical reaction in the cavity is directly influenced.
Therefore, in order to overcome the above problems, the present invention provides a structure for correcting the X-Y direction of an atomic layer deposition reaction cover.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a structure that is used for atomic layer precipitation reaction lid X-Y direction to rectify to solve the problem that proposes among the above-mentioned background art.
The reaction cover of the atomic layer deposition is a part of a component of an atomic layer deposition automatic reaction cavity (hereinafter referred to as a reaction cavity), an automatic execution mechanism is required to control the reaction cover to automatically and vertically lift in a high vacuum environment, and the reaction cover and the reaction cavity form a closed state required by chemical reaction; the actions of automatic vertical lifting and forming a seal with the reaction cavity are completed by controlling the reaction cover by the automatic execution mechanism, which puts further requirements on a connecting mechanism between the automatic execution mechanism and the reaction cover;
the traditional automatic lifting mechanism adopts a direct flexible connection mode, the self-adjustable amplitude is very small, installation deviation is easy to occur, secondary adjustment is very difficult, special tools are required to assist positioning adjustment and an integral cleaning program of the adjusted equipment, the process is complex, a large amount of manpower and material resources are consumed, the requirement on the X-Y direction dimension precision of a reaction cover of atomic layer deposition and an atomic layer deposition automatic reaction cavity is high, otherwise, the equipment is operated under the condition that reaction air holes cannot be aligned, and chemical reaction in the cavity is directly influenced.
Therefore, in order to overcome the above problems, the present invention provides a structure for X-Y direction correction of an atomic layer precipitation reaction lid, the structure comprising an X direction correcting member provided with a slider, and a Y direction correcting member provided with a stud, the Y direction correcting member being installed at the X direction correcting member;
wherein, the X-direction correcting component is provided with a fixed seat, and the sliding block is connected on the fixed seat in a sliding way; an adjusting bolt is inserted into the sliding block in a penetrating manner and is fixed through threads;
furthermore, the adjusting bolt is unscrewed, the limit of the sliding block is released, and the free adjustment in the X direction is completed through the sliding of the sliding block in the fixed seat;
the Y-direction correcting component is provided with a connecting ring, and the stud is inserted on the connecting ring and limited by a nut;
further, the nut is unscrewed, the limit of the stud is released, and the free adjustment in the Y direction is completed by adjusting the penetration length of the stud in the connecting ring;
the connecting ring is fixed on the fixed seat;
the adjusting bolt is unscrewed, the limit of the sliding block is removed, the free adjustment in the X direction is completed through the sliding of the sliding block in the fixed seat, the nut is unscrewed, the limit of the stud is removed, the free adjustment in the Y direction is completed through the insertion length of the adjusting stud in the connecting ring, the adjusting stud and the reaction cover can reach the installation position after being matched and adjusted with each other, the natural connection state is presented, the adjustment in the X-Y direction of the reaction cover can be realized through simple operation, and the correct sealing of the reaction cavity is easier to realize; the problem that the use of the equipment and the chemical reaction are influenced due to the machining precision, the installation precision and the like in the installation of the original equipment is solved; the installation difficulty is reduced, the installation time is shortened, and the working efficiency is improved.
The utility model discloses further scheme: the fixing seat and the sliding block are both T-shaped.
The utility model discloses further scheme again: the connecting ring is matched with the stud and provided with a through hole.
The utility model discloses further scheme again: the adjusting bolt is limited on the fixing plate through threads, and the fixing plate is fixed on the fixing seat.
The utility model discloses further scheme again: the fixed plate is provided with two, and is parallel distribution.
The utility model discloses further scheme again: the fixed plate is provided with a threaded hole in cooperation with the adjusting bolt.
The utility model discloses further scheme again: and two ends of the adjusting bolt are respectively fixed with a limiting cap.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses in unscrew adjusting bolt, remove the spacing of slider, accomplish X direction free adjustment through the slip of slider in the fixing base, unscrew the nut, remove the spacing of double-screw bolt, accomplish Y direction free adjustment through adjusting the double-screw bolt interlude length in the link, make after mutually supporting the adjustment can reach the mounted position with the reaction lid, present the state of natural connection, can simply operate the adjustment in the X-Y direction that realizes the reaction lid to change and realize the accurate closure of reaction chamber; the problem that the use of the equipment and the chemical reaction are influenced due to the machining precision, the installation precision and the like in the installation of the original equipment is solved; the installation difficulty is reduced, the installation time is shortened, and the working efficiency is improved.
Drawings
Fig. 1 is a schematic structural diagram of the structure for correcting the X-Y direction of the atomic layer deposition reaction cover of the present invention.
Fig. 2 is a left side view of the structure of fig. 1.
In the figure: 1-fixing the plate; 2-a fixed seat; 3-a slide block; 4-adjusting the bolt; 5-connecting rings; 6-a nut; 7-stud.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The reaction cover of the atomic layer deposition is a part of a component of an atomic layer deposition automatic reaction cavity (hereinafter referred to as a reaction cavity), an automatic execution mechanism is required to control the reaction cover to automatically and vertically lift in a high vacuum environment, and the reaction cover and the reaction cavity form a closed state required by chemical reaction; the actions of automatic vertical lifting and forming a seal with the reaction cavity are completed by controlling the reaction cover by the automatic execution mechanism, which puts further requirements on a connecting mechanism between the automatic execution mechanism and the reaction cover;
the traditional automatic lifting mechanism adopts a direct flexible connection mode, the self-adjustable amplitude is very small, installation deviation is easy to occur, secondary adjustment is very difficult, special tools are required to assist positioning adjustment and an integral cleaning program of the adjusted equipment, the process is complex, a large amount of manpower and material resources are consumed, the requirement on the X-Y direction dimension precision of a reaction cover of atomic layer deposition and an atomic layer deposition automatic reaction cavity is high, otherwise, the equipment is operated under the condition that reaction air holes cannot be aligned, and chemical reaction in the cavity is directly influenced.
Therefore, in order to overcome the above problems, the present invention provides a structure for X-Y alignment of an ald reaction lid, please refer to fig. 1 and 2, and example 1 and example 2.
Example 1
A structure for X-Y direction correction of an atomic layer deposition reaction cover comprises an X direction correction member provided with a slide block 3, and a Y direction correction member provided with a stud 7, wherein the Y direction correction member is installed on the X direction correction member.
Wherein, the X-direction correcting component is provided with a fixed seat 2, and the sliding block 3 is connected on the fixed seat 2 in a sliding way; adjusting bolts 4 are inserted into the sliding blocks 3 in a penetrating mode and are fixed through threads. Preferably, the fixed seat 2 and the sliding block 3 are both T-shaped.
Furthermore, the adjusting bolt 4 is loosened, the limit of the sliding block 3 is released, and the sliding of the sliding block 3 in the fixed seat 2 is used for completing the free adjustment in the X direction.
The Y-direction correcting component is provided with a connecting ring 5, and a stud 7 is inserted in the connecting ring 5 and limited by a nut 6. Preferably, the connecting ring 5 is provided with a through hole matched with the stud 7.
Further, the nut 6 is loosened to release the limit of the stud 7, and the stud 7 is adjusted to be inserted into the adapter ring 5 to adjust the Y-direction freely.
The connecting ring 5 is fixed on the fixed seat 2.
The adjusting bolt 4 is unscrewed, the limit of the sliding block 3 is removed, the free adjustment in the X direction is completed through the sliding of the sliding block 3 in the fixed seat 2, the nut 6 is unscrewed, the limit of the stud 7 is removed, the free adjustment in the Y direction is completed through the insertion length of the adjusting stud 7 in the connecting ring 5, the mounting position of the reaction cover can be reached after the mutual matching adjustment, the natural connection state is presented, the adjustment in the X-Y direction of the reaction cover can be realized through simple operation, and the correct sealing of the reaction cavity can be realized more easily; the problem that the use of the equipment and the chemical reaction are influenced due to the machining precision, the installation precision and the like in the installation of the original equipment is solved; the installation difficulty is reduced, the installation time is shortened, and the working efficiency is improved.
Example 2
The embodiment of the utility model provides a structure that is used for atomic layer precipitation reaction lid X-Y direction to rectify is specifically the further injeciton that goes on the basis of embodiment 1.
As shown in fig. 1, the adjusting bolt 4 is limited on the fixing plate 1 by threads, and the fixing plate 1 is fixed on the fixing seat 2.
Further, the fixed plates 1 are arranged in two and are distributed in parallel.
Furthermore, the fixing plate 1 is provided with a threaded hole in cooperation with the adjusting bolt 4.
Furthermore, two ends of the adjusting bolt 4 are respectively fixed with a limiting cap.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. A structure for X-Y direction correction of an atomic layer deposition reaction lid, characterized in that the structure comprises an X direction correcting member provided with a slider (3), and a Y direction correcting member provided with a stud (7), the Y direction correcting member being mounted on the X direction correcting member; wherein the content of the first and second substances,
the X-direction correcting component is provided with a fixed seat (2), and the sliding block (3) is connected to the fixed seat (2) in a sliding manner; an adjusting bolt (4) is inserted into the sliding block (3) in a penetrating way and is fixed through threads;
the Y-direction correcting component is provided with a connecting ring (5), and a stud (7) is inserted into the connecting ring (5) and limited by a nut (6);
the connecting ring (5) is fixed on the fixed seat (2).
2. The structure for X-Y alignment of an ALD reactor lid as recited in claim 1, wherein the holder (2) and the slider (3) are T-shaped.
3. The structure for correcting the X-Y direction of the atomic layer deposition reaction cover according to claim 1, wherein the connecting ring (5) is provided with a through hole for matching the stud (7).
4. The structure for correcting the X-Y direction of the atomic layer deposition reaction cover according to claim 1, wherein the adjusting bolt (4) is limited on the fixing plate (1) in a threaded manner, and the fixing plate (1) is fixed on the fixing base (2).
5. The structure for X-Y alignment of atomic layer deposition reaction lids as claimed in claim 4, wherein the fixing plate (1) is provided in two and arranged in parallel.
6. The structure for correcting the X-Y direction of the atomic layer deposition reaction cover according to claim 4, wherein the fixing plate (1) is provided with a threaded hole in cooperation with the adjusting bolt (4).
7. The structure for X-Y direction correction of atomic layer deposition reaction cover according to claim 4, characterized in that a limiting cap is fixed at each end of the adjusting bolt (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921356710.2U CN210314480U (en) | 2019-08-21 | 2019-08-21 | Structure for correcting X-Y direction of atomic layer precipitation reaction cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921356710.2U CN210314480U (en) | 2019-08-21 | 2019-08-21 | Structure for correcting X-Y direction of atomic layer precipitation reaction cover |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210314480U true CN210314480U (en) | 2020-04-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921356710.2U Active CN210314480U (en) | 2019-08-21 | 2019-08-21 | Structure for correcting X-Y direction of atomic layer precipitation reaction cover |
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| Country | Link |
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| CN (1) | CN210314480U (en) |
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2019
- 2019-08-21 CN CN201921356710.2U patent/CN210314480U/en active Active
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