CN114540797B - Material moving structure of continuous ALD (atomic layer deposition) film plating equipment - Google Patents

Abstract

The invention provides a material moving structure of continuous ALD (atomic layer deposition) coating equipment, and relates to the technical field of atomic layer deposition. Wherein, this kind of material removes structure contains box subassembly and drive assembly. The box body component comprises a heating cavity, a connecting cavity and a cooling cavity which are sequentially connected. The drive assembly includes two drive members. The two driving components are respectively arranged in the heating cavity and the cooling cavity. The driving member disposed in the heating chamber is configured to: can move back and forth along a predetermined trajectory to move the workpiece outside the heating chamber into the heating chamber and to move the workpiece inside the heating chamber into the coating chamber. The driving member disposed in the cooling chamber is configured to: the workpiece can move back and forth along a preset track so as to move the workpiece in the coating cavity into the cooling cavity and move the workpiece in the cooling cavity out of the cooling cavity; the housing assembly further includes a first access door disposed in the connection cavity. The structure of the film plating cavity is simplified, and the cleaning is convenient.

Description

Material moving structure of continuous ALD (atomic layer deposition) film plating equipment

Technical Field

The invention relates to the technical field of atomic layer deposition, in particular to a material moving structure of continuous ALD (atomic layer deposition) film plating equipment.

Background

Atomic layer deposition (Atomic layer deposition) is a method by which substances can be plated onto a substrate surface layer by layer in the form of a monoatomic film. In atomic layer deposition, the chemical reaction of a new atomic film is directly related to the previous layer in such a way that only one atomic layer is deposited per reaction. And, the deposited layer has an extremely uniform thickness and excellent uniformity.

It will be appreciated that during the atomic layer deposition coating process, the interior of the coating apparatus may be coated as well, or various impurities may be generated inside the coating apparatus. Therefore, the inside of the coating equipment is cleaned regularly, so that the quality of the coating is ensured. However, the existing coating equipment is complex in structure and is not easy to clean the inside of the coating equipment.

In view of the above, the applicant has studied the prior art and has made the present application.

Disclosure of Invention

The application provides a material moving structure of continuous ALD (atomic layer deposition) coating equipment, and aims to solve the technical problem that the interior of the coating equipment is not easy to clean.

In order to solve the technical problems, the application provides a material moving structure of continuous ALD (atomic layer deposition) coating equipment, which comprises a box body component and a driving component.

The box body assembly comprises a heating cavity, a connecting cavity and a cooling cavity which are sequentially connected. The heating cavity is provided with a heating chamber. A coating chamber for coating the workpiece is arranged in the connecting cavity. The cooling cavity is provided with a cooling chamber. The heating chamber and the cooling chamber can be respectively communicated with the coating chamber.

The drive assembly includes two drive members. The two driving members are respectively arranged in the heating chamber and the cooling chamber. The driving member disposed in the heating chamber is configured to: can move back and forth along a predetermined trajectory to move the workpiece outside the heating chamber into the heating chamber and to move the workpiece inside the heating chamber into the coating chamber. The driving member disposed in the cooling chamber is configured to: the workpiece can move back and forth along a preset track so as to move the workpiece in the coating cavity into the cooling cavity and move the workpiece in the cooling cavity out of the cooling cavity;

the housing assembly further includes a first access door disposed in the connection cavity.

By adopting the technical scheme, the invention can obtain the following technical effects:

the workpiece is moved by the driving component arranged in the heating chamber and the cooling chamber, so that the structure in the coating chamber is greatly simplified, the coating chamber is convenient to clean, and the method has good practical significance.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some examples of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is an isometric view of a continuous ALD coating apparatus;

FIG. 2 is a semi-sectional view of a continuous ALD coating apparatus;

FIG. 3 is an exploded view of the connecting chamber;

FIG. 4 is an exploded view of the interior of the connecting chamber;

FIG. 5 is an exploded view of the coating cavity;

FIG. 6 is an exploded view of the coating cavity (hidden case);

FIG. 7 is an isometric view of a cooling chamber;

FIG. 8 is a first exploded view of the drive member;

FIG. 9 is a second exploded view of the drive member;

FIG. 10 is an exploded view of the ratchet mechanism;

FIG. 11 is an exploded view of the boat assembly;

FIG. 12 is a first exploded view of the fork strap door;

fig. 13 is a second exploded view of the fork strap door.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, are intended to fall within the scope of the present invention. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, are intended to fall within the scope of the present invention.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The invention is described in further detail below with reference to the attached drawings and detailed description:

referring to fig. 1 to 13, an embodiment of the present invention provides a material moving structure of a continuous ALD coating apparatus, which includes a box assembly and a driving assembly.

The box assembly comprises a heating cavity 12, a connecting cavity 5 and a cooling cavity 9 which are connected in sequence. The heating chamber 12 is provided with a heating chamber 6. A coating chamber 10 for coating the workpiece is arranged in the connecting cavity 5. The cooling chamber 9 is provided with a cooling chamber 3. The heating chamber 6 and the cooling chamber 3 can be respectively communicated with the coating chamber 10.

The drive assembly comprises two drive members 32. The two driving members 32 are disposed in the heating chamber 6 and the cooling chamber 3, respectively. The driving member 32 disposed in the heating chamber 6 is configured to: can be moved back and forth along a predetermined trajectory to move the workpiece outside the heating chamber 6 into the heating chamber 6 and to move the workpiece inside the heating chamber 6 into the coating chamber 10. The driving member 32 disposed in the cooling chamber 3 is configured to: can be moved back and forth along a predetermined trajectory to move the work piece in the coating chamber 10 into the cooling chamber 3 and to move the work piece in the cooling chamber 3 out of the cooling chamber 3.

Preferably, the box assembly further comprises a coating chamber 4 provided with said coating chamber 10. The connection chamber 5 is provided with a connection chamber 11. The coating cavity 4 is detachably arranged in the connecting cavity 11. The box assembly further comprises a first access door 1 arranged in the connection cavity 5, a second access door arranged in the heating cavity 12 and a third access door arranged in the cooling cavity 9. The first access door 1 is used for taking and placing the coating cavity 4.

Specifically, the two driving components 32 are respectively arranged in the heating chamber 6 and the cooling chamber 3, so that only the guide rail component 8 and the flow equalizing plate 26 are arranged in the film plating chamber 10, the structure is simple, the cleaning is convenient, the damage is not easy, and the practical significance is good.

It will be appreciated that the precursor a and precursor B react to form the desired coating in the coating chamber 10 and also form a coating on the surfaces of the components within the coating chamber 10, and thus the coating chamber 10 may be easily damaged if a transmission mechanism is present and may be inconvenient to clean. In the invention, the carrier disc assembly 7 is sequentially moved among the five guide rail members 8 in a left-right movable mode, so that the heating, coating and cooling operations on the workpiece are realized under the condition that a power mechanism is not arranged in the coating chamber 10, and the invention has good practical significance.

As shown in fig. 8 and 9, in an alternative embodiment, the driving member 32 includes a first moving mechanism 34 movable along a predetermined trajectory, a pawl mechanism 33 disposed on the first moving mechanism 34, a transmission mechanism coupled to the first moving mechanism 34, and a driving mechanism 37 coupled to the transmission mechanism. The driving mechanism 37 can drive the first moving mechanism 34 to move forward or backward along a predetermined trajectory through a transmission mechanism. The detent mechanism 33 is configured to: the first moving mechanism 34 can be abutted against an external object and avoid the external object when moving forward, and can be abutted against the external object and drive the external object to move forward when moving backward. Preferably, the drive member 32 comprises two detent mechanisms 33. The two click mechanisms 33 are disposed at both ends of the first moving mechanism 34, respectively. The click mechanism 33 includes a push plate 38 rotatably disposed on the first moving mechanism 34, and an elastic member 39 engaged between the push plate 38 and the first moving mechanism 34. The push plate 38 is provided with an abutment portion 55 for abutting against the first moving mechanism 34. The abutment 55 serves to limit the push plate 38 when the first movement mechanism 34 moves in the reverse direction. The elastic member 39 is used to drive the push plate 38 to return from the retracted position.

Specifically, the driving mechanism 37 and the transmission mechanism drive the first moving mechanism 34 to move left and right, so that the tray assembly 7 is hooked into the heating chamber 6 from the outside of the heating chamber 12 or pushed into the coating chamber 10 from the inside of the heating chamber 6 through a pawl structure on the first moving mechanism 34. The pawl mechanism 33 with a pure mechanical structure can realize the movement of the carrier disc assembly 7, can adapt to the vacuum high-temperature environment in the heating chamber 6 and is not easy to damage, and has good practical significance. It will be appreciated that two detent mechanisms 33 are provided at each end of the first movement mechanism 34, one for hooking and the other for pushing out, and that both push plates 38 are for applying force in the same direction.

As shown in fig. 8 and 9, in an alternative embodiment, the driving member 32 further includes a second moving mechanism 35, and the second moving mechanism 35 is coupled to the transmission mechanism and configured to be driven by the transmission mechanism to move forward or backward along a predetermined trajectory. The first moving mechanism 34 is configured to: when the second moving mechanism 35 moves, the second moving mechanism 35 can move in the moving direction of the second moving mechanism 35. Preferably, the drive member 32 also includes a base mechanism 36. The base mechanism 36 is configured to be disposed in the heating chamber 6 or the cooling chamber 3. The second moving mechanism 35 is slidably disposed on the base mechanism 36. The first moving mechanism 34 is slidably disposed in the second moving mechanism 35.

Specifically, the second moving mechanism 35 can increase the distance that the driving member 32 extends when moving left and right, so that the tray assembly 7 can be moved to a suitable position with fewer hooking times, which is of great practical significance. The first moving mechanism 34, the second moving mechanism 35, and the transmission mechanism can be integrated into one body by the base mechanism 36 to facilitate the attachment and detachment work of the driving member 32.

As shown in fig. 8 and 9, in an alternative embodiment, the transmission mechanism includes a first gear 53 and a first rack 52 disposed on the base mechanism 36, a second gear 50 and a second rack 51 disposed on the second movement mechanism 35, and a third rack 49 disposed on the first movement mechanism 34. The first gear 53 is engaged with the second rack 51 and is drivingly connected to the driving mechanism 37 for driving the second moving mechanism 35 to move relative to the base mechanism 36. The second gear 50 is engaged with the first rack 52 and the third rack 49, respectively, so as to move the first moving mechanism 34 in the moving direction of the second moving mechanism 35 while the second moving mechanism 35 moves. Preferably, the first moving mechanism 34 includes a first base plate 40 and a plurality of first rollers 41 disposed on the first base plate 40. The base mechanism 36 includes a base support plate 46 and a plurality of second rollers 45 disposed on the base support plate 46. The second moving mechanism 35 includes a second bottom plate 44 and a roller mount 43 disposed on the second bottom plate 44. The roller mounting seat 43 is provided at both sides thereof with guide grooves 42 accommodating the first roller 41 and the second roller 45, respectively.

Specifically, when the first gear 53 drives the second rack 51 to move through the gear-rack transmission structure, the second gear 50 drives the third rack 49 to move, so that the second moving mechanism 35 and the first moving mechanism 34 move towards the same direction at the same time, thereby realizing longer extending distance and extending speed and ensuring efficient movement of the tray assembly 7.

In the present invention, the roller mounting seat 43 is provided on the second moving mechanism 35, and the rollers are mounted on the first moving mechanism 34 and the base mechanism 36, so that the first moving mechanism 34 is slidably mounted on the second moving mechanism 35, and the second moving mechanism 35 is slidably mounted on the base mechanism 36, so that the driving member 32 can have a longer extension distance. As an equivalent alternative to the present invention, it is also within the scope of the present invention to slidably dispose both the first moving mechanism 34 and the second moving mechanism 35 on the base mechanism 36.

In an alternative embodiment, as shown in fig. 8 and 9, the drive mechanism 37 includes a motor 48 and a magnetic fluid vacuum seal transmission 47. The motor 48 is drivingly connected to the input of the mhd vacuum seal actuator 47. The transmission mechanism further comprises a first gear 53 for driving the second movement mechanism 35 to move, and at least one transmission gear 54 drivingly connected to the first gear 53 and the output end of the magnetic fluid vacuum seal transmission device 47. The first gear 53 and the at least one transmission gear 54 are arranged in the vertical direction.

Specifically, the number of the transmission gears 54 is two, the power of the driving mechanism 37 can be transmitted to the second rack 51 positioned in the cavity from the bottom of the cavity through the first gears 53 and the two transmission gears 54 which are vertically arranged, and the multistage gear transmission is adopted, so that the long service life can be kept in a high-temperature vacuum environment, and the multistage gear transmission has good practical significance.

In other embodiments, the transmission can be realized through structures such as a belt and a chain, which belong to the equivalent technical scheme of the embodiment and belong to the protection scope of the invention.

As shown in fig. 2, 7 and 11, in an alternative embodiment, the box assembly further includes a carrier tray assembly 7 for carrying the workpieces and five rail members 8 for supporting the carrier tray assembly 7. The five guide rail members 8 are disposed in the heating chamber 6, the coating chamber 10, the cooling chamber 3, and outside the heating chamber 12 and outside the cooling chamber 9, respectively. The carrier tray assembly 7 is configured to: can be moved between the five rail members 8 by the driving of the driving assembly so as to pass through the heating chamber 12, the connecting chamber 5 and the cooling chamber 9 in sequence. Preferably, the top of the carrier plate assembly 7 is provided with a placement groove for placing the workpiece, and the bottom is provided with a driving groove 57 for embedding the detent mechanism 33. The tray assembly 7 is further provided with tray rollers 56 that are slidable on the rail members 8. The guide rail member 8 is provided with a spacing groove 31 at intervals for spacing the tray roller 56.

Specifically, the friction force of the carrier disc assembly 7 in the moving process can be greatly reduced by adopting the running of the rollers, and the power required by the material moving device is greatly reduced. In other embodiments, it may take the form of a chute 14 that mates with the activity. The invention is not limited in this regard. It can be understood that the friction force of the roller is small, and the shallow limit groove 31 is arranged on the guide rail, so that the disc carrier assembly 7 can be effectively prevented from sliding on the guide rail member 8 in disorder after the disc carrier assembly 7 moves to the preset position.

In an alternative embodiment, as shown in fig. 2 and 3, the material moving structure further includes a seal assembly. The seal assembly includes six insert plate doors 2 disposed in the case assembly. The first insert plate door 2 and the second insert plate door 2 are respectively used for communicating the coating chamber 10 and the connecting chamber 11. The third insert plate door 2 is used for communicating the heating chamber 6 and the connecting chamber 11. The fourth insert plate door 2 is used for communicating the connecting chamber 11 and the cooling chamber 3. The fifth insert plate door 2 is used for communicating the heating chamber 6 and the outside of the heating chamber 12. The sixth insert plate door 2 is used to communicate the cooling chamber 3 with the outside of the cooling chamber 9. Preferably, the six insert doors 2 are all arranged along the vertical direction, so that a U-shaped structure is formed between the first insert door 2 and the second insert door 2 and the connecting chamber 11, a U-shaped structure is formed between the third insert door 2 and the fifth insert door 2 and the heating chamber 12, and a U-shaped structure is formed between the fourth insert door 2 and the sixth insert door 2 and the cooling chamber 3.

Specifically, the six insert plate doors 2 can separate the heating chamber 6, the connecting chamber 11, the coating chamber 10 and the cooling chamber 3 from each other, and independently operate. And the length of the whole coating setting can be greatly shortened, the moving distance of the workpiece in the whole production process is shortened, the internal structure of the coating equipment is simplified, and the occupied area can be reduced.

Preferably, the first board inserting door 2 and the second board inserting door 2 are configured in the connecting cavity 5 and can be separated from the film plating cavity 4 when the door is opened, so that parts on the film plating cavity 4 are reduced, the structure of the film plating cavity 4 is simplified, and the film plating cavity 4 is convenient to disassemble and assemble. The third insert door 2 and the fifth insert door 2 are disposed in the heating chamber 12. The fourth insert door 2 and the fourth insert door 2 are arranged in the cooling chamber 9. Specifically, the heating cavity 12, the connecting cavity 5 and the cooling cavity 9 are mutually independent, and are assembled together to form the coating equipment, so that the production of the coating equipment is greatly facilitated.

Preferably, the first insert door 2 and the third insert door 2 are parallel. So that the heated workpiece in the heating chamber 6 can pass directly through the first insert door 2 and the third insert door 2 into the coating chamber 10. The second insert door 2 is parallel to the fourth insert door 2. So that the coated work piece in the coating chamber 10 can pass directly through the second insert plate door 2 and the fourth insert plate door 2 into the cooling chamber 3. The first insert door 2 and the second insert door 2 are parallel so that the heating chamber 12, the connecting chamber 5 and the cooling chamber 9 are connected in sequence along a straight line. The workpiece moves along the straight line in the whole film plating equipment, so that the structure of the driving assembly and the moving path of the workpiece are greatly simplified.

It will be appreciated that the fifth and sixth gate 2 and 2 may be other types of gate 2, and that the second and third gate 2 and 2 may be mounted on the connecting cavity 5, which is not particularly limited in this regard.

As shown in fig. 12 and 13, in an alternative embodiment, the fork strap gate 2 includes a drive plate 60 movable up and down in the cavity, a connector 66 hinged to the drive plate 60, a sealing plate 65 hinged to the connector 66, and a telescoping drive 58 coupled to the drive plate 60. The telescopic driving piece 58 can drive the driving plate 60 to move downwards to the lower part of the sealing plate 65 to be abutted against an external object. The telescoping drive 58 can also drive the drive plate 60 further downward, thereby rotating the connector 66 and driving the seal plate 65 laterally to seal against the opening of the cavity. Wherein the drive plate 60 and the connector 66 are hinged to the a-axis. The seal plate 65 and the connecting member 66 are hinged to the B-axis. The A axis and the B axis are located on the C plane. The insert plate door 2 is configured to: when the driving plate 60 moves up and down, the included angle D between the plane in which the driving plate 60 is located and the plane C is always smaller than 90 degrees.

Specifically, a link structure is formed between the driving plate 60, the sealing plate 65, and the connection member 66. The telescopic driving piece 58 drives the driving plate 60 to move up and down, and simultaneously drives the sealing plate 65 to move up and down through the connecting piece 66. When the telescopic driving piece 58 drives the driving plate 60 to move downwards, the bottom of the sealing plate 65 is preferentially abutted to the bottom surface of the chamber, then the telescopic driving piece 58 continues to drive the driving plate 60 to move downwards, and at the moment, the sealing plate 65 does not continue to move downwards but becomes horizontally moving under the action of the connecting piece 66 until being abutted to the side surface of the chamber, so that the opening of the chamber is sealed. When the telescopic driving piece 58 drives the driving plate 60 to move downwards, the sealing plate 65 drives the connecting piece 66 to rotate under the action of gravity, so that the sealing plate moves horizontally to be away from the side surface of the cavity and close to the driving plate 60, and when the sealing plate 65 abuts against the driving plate 60, the sealing plate does not move horizontally any more but moves upwards along with the driving plate 60, so that the opening of the cavity is completely opened.

Because contained angle D is less than 90 degrees all the time, therefore under the state of closing the door, the decurrent actuating force of cylinder has a part to convert into the actuating force of horizontal drive closing plate 65 laminating on the cavity all the time, assurance sealed effect that can be fine even closing plate 65 or sealing washer between closing plate 65 and the cavity lateral wall take place wearing and tearing also can not influence sealed effect, has fine practical meaning.

Preferably, the telescopic driving piece 58 is an air cylinder, the first inserting plate door 2 and the second inserting plate door 2 are installed in the connecting chamber 11, the third inserting plate door 2 is installed in the heating chamber 6, the fourth inserting plate door 2 is installed in the cooling chamber 3 and is in a vacuum environment, and in order to avoid air leakage of the air cylinder, the output shaft of the telescopic driving piece 58 is sleeved by the corrugated tube 19.

In an alternative embodiment, as shown in fig. 12 and 13, the fork strap gate 2 further includes a roller mechanism 63 and a stopper 59. The roller mechanism 63 is disposed below the sealing plate 65 in the case, and can limit the limit position of the sealing plate 65 when moving downward and reduce the friction force of the sealing plate 65 when moving laterally. The limiting block 59 is disposed on the driving plate 60 or the cavity, and is used for limiting a baseline position when the driving plate 60 moves upwards. The fork strap door 2 further includes a slide support plate 62 disposed at the lower end of the seal plate 65. The sliding support plate 62 is used for abutting against the roller mechanism 63.

Specifically, the stopper 59 may be installed at a position where the driving plate 60 is upward or at a position where the driving plate 60 is moved upward on the cavity, thereby stopping the driving plate 60 when the driving plate 60 is moved to the highest point. The roller mechanism 63 includes a base and a plurality of rollers disposed on the base. The sliding support plate 62 is mounted on the bottom surface of the sealing plate 65 and is used for abutting against the roller, so that when the sealing plate 65 moves horizontally, the sliding support plate slides in a rolling way, and the resistance applied to the sealing plate 65 during horizontal movement is reduced.

In an alternative embodiment, as shown in fig. 12 and 13, the fork strap gate 2 further comprises a rolling member 67 arranged on the side of the drive plate 60. The rolling member 67 is located on the a-axis for sliding up and down along the chute 14 on the cavity. Specifically, the cavity is provided with runners 14 on both sides of the opening. The card gate 2 is provided with a rotation shaft on a side surface of the drive plate 60. The connecting piece 66 and the rolling piece 67 are sequentially arranged on the rotating shaft, and the rolling piece 67 is a bearing and is used for sliding up and down on the sliding groove 14 of the cavity.

Preferably, the sealing plate 65 is provided with a hinge 64 extending towards the driving plate 60. The hinge portion 64 is configured to abut against the driving plate 60 when the sealing plate 65 approaches the driving plate 60. The connection member 66 is hinged to the hinge portion 64. The drive plate 60 is provided with a stopper 61 extending toward the seal plate 65. The limiting portion 61 is configured to abut against the sealing plate 65 when the sealing plate 65 approaches the driving plate 60. The telescopic driving piece 58 is engaged with the stopper 61.

The hinge part 64 and the limit part 61 are arranged at the same height, so that when the sealing plate 65 approaches the driving plate 60, the limit part 61 and the hinge part 64 are abutted, the contact area between the sealing plate 65 and the driving plate 60 is reduced, larger sound is avoided,

the arrangement of the output shaft of the telescopic driving member 58 between the driving plate 60 and the sealing plate 65 can greatly reduce the thickness of the insert plate door 2, thereby reducing the length of the actual coating equipment and the distance that the workpiece needs to move in the coating process, and having good practical significance.

As shown in fig. 1 to 3, a connection chamber 11 that communicates the heating chamber 6 and the cooling chamber 3 is provided inside the connection chamber 5. The coating cavity 4 is arranged in the connecting cavity 11, and the openings on two sides are respectively opposite to the heating cavity 6 and the cooling cavity 3. The heated workpiece in the heating chamber 6 can directly enter the coating chamber 10 in the connecting chamber 11 after moving out of the heating chamber 6; and the workpiece coated with the film in the film coating chamber 10 can directly enter the cooling chamber 3 communicated with the connecting chamber 11 after being moved out of the film coating chamber 10. And, the heating chamber 6 and the cooling chamber 3 can be vacuum-connected to the coating chamber 10 through the connection chamber 11, thereby improving the cleanliness of the coating process.

It will be appreciated that reactants may be generated in the coating chamber 10 during the coating process, and periodic cleaning of the coating chamber 10 is required to further ensure the quality of the coating. In this embodiment, the coating chamber 10 is conveniently cleaned by detachably installing a coating chamber 4 inside the connecting chamber 5.

It should be noted that the prior art coating apparatus often has only one chamber, and the product needs to be put into the chamber, and then taken out after three steps of heating, coating and cooling, so as to complete the coating operation. According to the continuous ALD film plating equipment, the heating cavity 12, the connecting cavity 5 and the cooling cavity 9 are sequentially connected, and the heating, the film plating and the cooling are respectively carried out in different cavities, so that the film plating cavity 10 is always in film plating operation, and the film plating production efficiency is greatly improved. And through vacuum assembly for heating chamber 6 and cooling chamber 3 can be respectively with coating film cavity 10 vacuum connection, make coating film cavity 10 can not contact the air, avoid the entering of impurity, improved the cleanliness factor in the coating film process greatly, improved the quality of product.

In an alternative embodiment, as shown in fig. 3 to 6, the top of the coating chamber 4 is provided with a feed hole 21 communicating with the coating chamber 10. The tank assembly further comprises a bellows 19 joined to the connection chamber 5, a connection plate 20 joined to the bellows 19, a feed conveyor pipe 17 joined to the connection plate 20, and a first telescopic jacking member 18 capable of being joined between the connection plate 20 and the connection chamber 5. The connection plate 20 is provided with a connection through hole 30 communicating with the bellows 19. The feed pipe 17 is connected to the connecting through hole 30 in a sealing manner and extends through the bellows 19 to the outside of the connecting chamber 5. The first telescopic propping member 18 is used for propping the connecting plate 20 against the coating cavity 4, so that the connecting through hole 30 is in sealing connection with the material conveying hole 21.

Preferably, the upper surface of the film plating cavity 4 is connected with the material conveying pipe 17 through a quick-release structure; specifically, the inside of the connection chamber 11 is always in a vacuum state. Therefore, it is necessary to use the bellows 19 to wrap the feed conveyor pipe 17 to avoid breakage of the feed conveyor pipe 17.

In this embodiment, the plurality of conveying pipes 17 are connected to one connecting plate 20, when the conveying pipes 17 are installed in the film plating cavity 4, only the connecting plate 20 is required to be sealed and pressed on the top of the film plating cavity 4, and the plurality of sealing pipes can be respectively and hermetically connected to the plurality of conveying holes 21 at the same time, so that the plurality of conveying pipes 17 can be quickly and simultaneously assembled and disassembled, and the film plating cavity 4 is greatly convenient to take and place.

In this embodiment, the number of the connecting through holes 30, the bellows 19 and the feed conveying pipe 17 is one-to-one, and at least two. Wherein at least one feed conduit 17 is provided for the passage of a first precursor. At least one feed conduit 17 is provided for the passage of a second precursor. Specifically, the number of the feed pipes 17 is two, and the feed pipes are used for respectively feeding the precursor a and the precursor B, but a digital pressure sensor, a vacuum gauge, a thermocouple and other measuring devices may be further disposed on the connection plate 20 to measure the environmental parameters inside the coating chamber 10, which is not particularly limited in the present invention.

As shown in fig. 3 to 6, in an alternative embodiment, the top of the coating chamber 4 is provided with a sealing surface 22 for engaging the connecting plate 20, and a feed hole 21 provided in the sealing surface 22 and communicating with the coating chamber 10. The sealing surface 22 is arranged in the direction of the coating cavity 4 into and out of the first access door 1. The housing assembly further includes at least two carrier members 24 disposed on each side of the sealing surface 22. The external device can act on the handling member 24 to take and place the coating film chamber 4 from the connection chamber 11.

Specifically, the carrying member 24 is rectangular and annular, and is configured to cooperate with an external device such as a forklift, so as to take and place the plating chamber 4 from the connection chamber 11. The sealing surface 22 is arranged between the carrying pieces 24, so that the parts such as the connecting plate 20 and the like can not interfere with the carrying pieces 24 when the coating cavity 4 enters and exits the connecting cavity 11, and the coating cavity 4 can be conveniently taken and placed.

In an alternative embodiment, as shown in fig. 5 and 6, the top of the coating chamber 10 is provided with a feed trough 29 communicating with the feed aperture 21. The housing assembly further includes a baffle 27 for housing the feed trough 29 and a flow equalization plate 26 disposed on top of the coating chamber 10. The baffle 27 is provided with a plurality of discharge through holes 28. The flow equalizing plate 26 is distributed with a plurality of flow equalizing through holes 25.

Specifically, the film plating cavity 4 is composed of a cavity main body and a cavity top cover; the sealing surface 22 and the feed delivery hole 21 are both arranged on the cavity top cover. The cavity top cover is provided with two material conveying holes 21 and two material feeding grooves 29 respectively communicated with the two material conveying holes 21. The feed tank 29 is a groove which is formed by a transverse groove and a plurality of vertical grooves which are arranged at intervals and are communicated with the transverse groove, so that the whole cavity top cover is fully distributed, and the precursor can be distributed on the whole cavity top cover through the feed tank 29 after passing through the feed hole 21.

The chamber top cover is also provided with two layers of reticular flow equalizing plates 26 in a lamination manner, and precursors flowing out from the discharge through holes 28 of the communicating feed tank 29 flow to the flow equalizing plates 26, so that the precursors can be distributed more uniformly in the coating chamber 10 through the two layers of flow equalizing plates 26, and the flow rate of the precursors can be greatly increased. The problems of insufficient reaction caused by the aggregation of the precursor and too high flow rate can be avoided, and the method has good practical significance.

In an alternative embodiment, as shown in fig. 3 and 4, the material moving apparatus further comprises a vacuum assembly (not shown); the vacuum assembly is coupled to the housing assembly for drawing a vacuum, thereby enabling the heating chamber 6 and the cooling chamber 3 to be vacuum-coupled to the coating chamber 10. Specifically, the vacuum components are respectively connected to the heating chamber 6, the cooling chamber 3, the connecting chamber 11, and the coating chamber 10 for vacuumizing, so that the heating chamber 6 and the cooling chamber 3 can be vacuum-connected to the coating chamber 10 through the connecting chamber 11.

Preferably, the bottom of the coating cavity 4 is provided with a discharge hole 23 communicating with the coating cavity 10. The bottom of the connection cavity 5 is provided with a first connection hole 15 communicating with the connection chamber 11. The coating cavity 4 is located above the first connection hole 15, so that the discharge hole 23 is connected to the first connection hole 15 in a sealing manner. The vacuum assembly is coupled to the first coupling hole 15 for evacuating the coating chamber 10. The box assembly further comprises a second telescopic jacking member 13 which can be engaged between the coating cavity 4 and the connecting cavity 5. The second telescopic jack member 13 is configured to: for abutting the coating cavity 4 against the bottom of the connecting chamber 11.

Specifically, the top of the coating cavity 4 is fed, and the bottom is discharged. The discharging hole 23 and the first connecting hole 15 are respectively arranged at the bottoms of the coating cavity 4 and the connecting cavity 5, and when the discharging hole 23 and the first connecting hole 15 are connected in a sealing mode, sealing connection can be completed only by placing the coating cavity 4 on the bottom surface of the connecting cavity 11, and the coating device has a simple structure and convenient disassembly and assembly and has good practical significance.

Preferably, only one first connection hole 15 is provided at the bottom of the connection chamber 5, and the vacuum assembly includes a discharge pipe coupled to the first connection hole 15, a first vacuum barrier 27 valve disposed at the discharge pipe, two second vacuum barrier 27 valves connected in parallel to the discharge pipe, and two vacuum pumps coupled to the two second vacuum barrier 27 valves, respectively.

In particular, the inventors have found through extensive studies that precursor a and precursor B react in the vacuum pump to cause damage to the vacuum pump, requiring frequent maintenance. Even if a filter device is installed in front of the vacuum pump to filter one of the precursors, the filter device may affect the flow rate of the fluid in the discharge pipe, greatly reduce the vacuumizing speed, and the filter device may need to be frequently replaced to ensure the filtering effect.

Therefore, in the embodiment of the invention, the precursor A and the precursor B in the coating cavity 10 are respectively extracted through the discharge pipe by the two vacuum valves, so that the precursor A and the precursor B are prevented from reacting in the vacuum pump, the service life of the vacuum structure is greatly prolonged, and the method has good practical significance.

Preferably, the connection chamber 11, the heating chamber 6 and the cooling chamber 3 are respectively communicated with a small vacuum pump through pipelines to carry out vacuum pumping, so that the heating chamber 6, the connection chamber 11, the coating chamber 10 and the cooling chamber 3 are all kept in a vacuum state to independently operate, and the cleanliness of the coating process is ensured.

In this embodiment, the first telescopic propping member 18 and the second telescopic propping member 13 have the same structure, and each of the first telescopic propping member and the second telescopic propping member comprises a stud with a clamping position in the middle, and two ejector rods respectively in threaded connection with two ends of the stud, and the telescopic propping member is extended by rotating the ejector rods and the stud, so that the connecting plate 20 is propped against the top of the coating cavity 4, and the coating cavity 4 is propped against the bottom of the connecting cavity 11.

In an alternative embodiment, as shown in fig. 3, the housing assembly further includes a positioning member 16 disposed at the bottom of the connection chamber 11. The positioning member 16 is configured to: the position of the coating chamber 10 within the connecting chamber 11 can be limited. Specifically, the positioning member 16 includes a plurality of positioning blocks disposed at the bottom of the connection chamber 11. Spacing spaces for accommodating the coating cavity 4 are formed among the positioning blocks. The positioning block is provided with a guide inclined plane facing the limiting space.

In the present embodiment, the positioning member 16 includes 8 positioning blocks, which are provided at four corners of the plating chamber 4, respectively. The height of the positioning blocks provided in the direction of the cooling chamber 3 and the heating chamber 6 is lower than the height of the positioning blocks provided in the direction of the access door.

Preferably, the box assembly further comprises a heating structure of the coating chamber 10 and the heating chamber 6; specifically, a plurality of heating pipes are provided at the top of the heating chamber 6 to heat the heating chamber 6. A heating plate is arranged on the side surface of the film coating cavity 4; heating plates are also arranged on the first plugboard door 2 and the second plugboard door 2; a plurality of heating pipes and thermocouples are provided in the heating plate to heat the coating chamber 10. In this embodiment, the heating pipe and the thermocouple on the heating plate are connected by a quick-connect interface, so as to facilitate the disassembly and assembly of the film plating cavity 4.

The production method for producing the continuous ALD film coating equipment comprises the following steps:

opening a fifth plugboard door to enable the heating cavity to be communicated with the outside;

the driving component in the heating cavity extends out of the heating cavity and hooks the carrying disc assembly; wherein, the guide rail component outside the heating cavity can be used for placing a carrying disc component, and the carrying disc component can be used for placing a workpiece;

the driving component in the heating cavity retracts into the heating cavity and hooks the tray assembly into the heating cavity;

closing a fifth plugboard door, vacuumizing the heating chamber, and heating the heating chamber;

vacuumizing the cooling cavity, the connecting cavity and the coating cavity, and heating the connecting cavity to enable the connecting cavity to be at a process temperature;

after the workpiece is heated to a first preset temperature, opening a first plugboard door and a third plugboard door to enable the heating chamber to be communicated with the film coating chamber in vacuum;

the driving component in the heating cavity stretches into the coating cavity and pushes the carrying disc component into the coating cavity;

the driving mechanism in the heating chamber retracts the heating chamber and closes the first flashboard door and the third flashboard door,

leading a precursor A into the coating cavity, and simultaneously opening a first vacuum baffle valve, a second vacuum baffle valve and a first vacuum pump to extract the precursor A in the coating cavity so as to leave a layer of precursor A on the surface of a workpiece;

Stopping introducing the precursor A into the coating cavity, and closing the first vacuum baffle valve, the second vacuum baffle valve and the first vacuum pump after the precursor A in the coating cavity is completely pumped out;

leading a precursor B into the coating cavity, and simultaneously opening a second vacuum baffle valve and a second vacuum pump to pump the precursor B in the coating cavity, so that the precursor B reacts with the precursor A on the surface of the workpiece, and a coating film is formed on the surface of the workpiece;

stopping introducing the precursor B into the coating cavity, and closing a second vacuum baffle valve and a second vacuum pump after the precursor B in the coating cavity is completely pumped out;

opening a second plugboard door and a fourth plugboard door to connect the cooling chamber with the film coating chamber in vacuum;

the driving mechanism in the cooling cavity stretches into the film coating cavity to hook the carrying disc assembly;

the driving mechanism in the cooling cavity retracts into the cooling cavity and hooks the carrier disc assembly into the cooling cavity;

when the workpiece is cooled to a second preset temperature, stopping vacuumizing the cooling chamber, and opening a sixth plugboard door to enable the cooling chamber to be communicated with the outside;

the driving mechanism in the cooling cavity extends out of the cooling cavity, and simultaneously pushes the carrier disc assembly in the cooling cavity out of the cooling cavity; wherein, the cooling chamber is provided with a guide rail component for placing the carrier plate component outside;

The drive mechanism within the cooling chamber retracts the cooling chamber, then closes the sixth fork strap door, and draws a vacuum on the cooling chamber.

It should be noted that the above steps are not sequential, for example: the heating chamber is in a vacuum state for all the time except when the fifth flashboard door is opened. The cooling chamber is in a vacuum state for all the time except when the sixth insert plate door is opened. The connecting cavity and the coating cavity are always in a vacuum state in the whole process and are not in direct contact with the external environment. The heating chamber and the cooling chamber can be heated all the time, or can be heated after the plug board door is closed, and the invention is not limited to the above and is not limited to the sequence.

The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, and various modifications and variations may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. A material moving structure of a continuous ALD coating apparatus, comprising:

The box body assembly comprises a heating cavity (12), a connecting cavity (5) and a cooling cavity (9) which are connected in sequence; the heating cavity (12) is provided with a heating cavity (6); a coating chamber (10) for coating a workpiece is arranged in the connecting cavity (5); the cooling cavity (9) is provided with a cooling cavity (3); the heating chamber (6) and the cooling chamber (3) can be respectively communicated with the coating chamber (10);

a drive assembly comprising two drive members (32); the two driving members (32) are respectively arranged in the heating chamber (6) and the cooling chamber (3); the driving member (32) arranged in the heating chamber (6) is configured to: is capable of moving back and forth along a predetermined trajectory to move a workpiece outside the heating chamber (6) into the heating chamber (6), and to move a workpiece inside the heating chamber (6) into the coating chamber (10); the driving member (32) disposed in the cooling chamber (3) is configured to: can move back and forth along a predetermined trajectory to move the workpiece in the coating chamber (10) into the cooling chamber (3) and to move the workpiece in the cooling chamber (3) out of the cooling chamber (3);

the box body assembly further comprises a first access door (1) arranged in the connecting cavity (5);

The driving member (32) comprises a first moving mechanism (34) capable of moving along a preset track, a pawl mechanism (33) arranged on the first moving mechanism (34), a transmission mechanism connected with the first moving mechanism (34), and a driving mechanism (37) connected with the transmission mechanism; the driving mechanism (37) can drive the first moving mechanism (34) to move forward or backward along a preset track through the transmission mechanism; the detent mechanism (33) is configured to: the first moving mechanism (34) can be abutted against an external object and avoid the external object when moving forwards, and can be abutted against the external object and drive the external object to move forwards when moving backwards;

the pawl mechanism (33) comprises a push plate (38) rotatably arranged on the first moving mechanism (34), and an elastic piece (39) connected between the push plate (38) and the first moving mechanism (34); the push plate (38) is provided with an abutting part (55) for abutting against the first moving mechanism (34); the abutting part (55) is used for limiting the push plate (38) when the first moving mechanism (34) moves reversely; the elastic piece (39) is used for driving the push plate (38) to reset from the avoiding position;

The box body assembly further comprises a carrying disc assembly (7) for carrying workpieces and five guide rail members (8) for supporting the carrying disc assembly (7); five guide rail members (8) are respectively arranged outside the heating chamber (6), the coating chamber (10), the cooling chamber (3), the heating chamber (12) and the cooling chamber (9); the carrier plate assembly (7) is configured to: can be moved between the five guide rail members (8) under the drive of the drive assembly so as to pass through the heating chamber (12), the connecting chamber (5) and the cooling chamber (9) in sequence.

2. The material moving structure according to claim 1, wherein the driving member (32) further includes a second moving mechanism (35), the second moving mechanism (35) being coupled to the transmission mechanism and configured to be driven by the transmission mechanism to move forward or backward along a predetermined trajectory; the first movement mechanism (34) is configured to: when the second moving mechanism (35) moves, the second moving mechanism (35) can move relative to the second moving mechanism (35) in the moving direction of the second moving mechanism (35).

3. The material moving structure according to claim 2, characterized in that the driving member (32) further comprises a base mechanism (36); the base mechanism (36) is configured to be arranged in the heating chamber (6) or the cooling chamber (3); the second moving mechanism (35) is slidably arranged on the base mechanism (36); the first moving mechanism (34) is slidably disposed on the second moving mechanism (35).

4. A material movement structure according to claim 3, wherein the transmission mechanism comprises a first gear (53) and a first rack (52) arranged on the base mechanism (36), a second gear (50) and a second rack (51) arranged on the second movement mechanism (35), and a third rack (49) arranged on the first movement mechanism (34); the first gear (53) is engaged with the second rack (51) and is in transmission connection with the driving mechanism (37) so as to drive the second moving mechanism (35) to move relative to the base mechanism (36); the second gear (50) is respectively meshed with the first rack (52) and the third rack (49) and is used for moving the first moving mechanism (34) towards the moving direction of the second moving mechanism (35) while the second moving mechanism (35) moves.

5. The material moving structure according to claim 2, characterized in that the driving mechanism (37) comprises a motor (48) and a magnetic fluid vacuum sealing transmission (47); the motor (48) is in transmission connection with the input end of the magnetofluid vacuum sealing transmission device (47);

the transmission mechanism further comprises a first gear (53) for driving the second moving mechanism (35) to move, and at least one transmission gear (54) connected with the first gear (53) and the output end of the magnetic fluid vacuum sealing transmission device (47) in a transmission way; the first gear (53) and the at least one transmission gear (54) are arranged along a vertical direction.

6. A material moving structure according to claim 3, wherein the first moving mechanism (34) comprises a first base plate (40) and a plurality of first rollers (41) arranged on the first base plate (40); the base mechanism (36) comprises a base support plate (46), and a plurality of second rollers (45) arranged on the base support plate (46); the second moving mechanism (35) comprises a second bottom plate (44) and a roller mounting seat (43) arranged on the second bottom plate (44); guide grooves (42) for accommodating the first roller (41) and the second roller (45) are respectively arranged on two sides of the roller mounting seat (43).

7. The material moving structure according to claim 1, characterized in that the driving member (32) comprises two of the detent mechanisms (33); the two detent mechanisms (33) are respectively arranged at both ends of the first moving mechanism (34).

8. The material moving structure according to claim 1, characterized in that a bottom of the carrier plate assembly (7) is provided with a driving groove (57) for embedding the detent mechanism (33); the tray assembly (7) is provided with a tray roller (56) capable of sliding on the guide rail member (8); limiting grooves (31) used for limiting the tray rollers (56) are formed in the guide rail members (8) at intervals.