CN114506645B - Conveyor belt cleaning device and silicon wafer sorting system - Google Patents

Conveyor belt cleaning device and silicon wafer sorting system Download PDF

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Publication number
CN114506645B
CN114506645B CN202210314575.5A CN202210314575A CN114506645B CN 114506645 B CN114506645 B CN 114506645B CN 202210314575 A CN202210314575 A CN 202210314575A CN 114506645 B CN114506645 B CN 114506645B
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China
Prior art keywords
cleaning
conveyor belt
connecting rod
belt
conveying
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CN202210314575.5A
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CN114506645A (en
Inventor
付明全
徐志群
孙彬
周禹
郭翔
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Gaojing Solar Co ltd
Guangdong Jinwan Gaojing Solar Energy Technology Co ltd
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Guangdong Jinwan Gaojing Solar Energy Technology Co ltd
Guangdong Gaojing Solar Energy Technology Co Ltd
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Priority to CN202210314575.5A priority Critical patent/CN114506645B/en
Publication of CN114506645A publication Critical patent/CN114506645A/en
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Publication of CN114506645B publication Critical patent/CN114506645B/en
Priority to PCT/CN2023/083065 priority patent/WO2023179660A1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G45/00Lubricating, cleaning, or clearing devices
    • B65G45/10Cleaning devices
    • B65G45/12Cleaning devices comprising scrapers
    • B65G45/16Cleaning devices comprising scrapers with scraper biasing means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a conveying belt cleaning device and a silicon wafer sorting system, and relates to the technical field of semiconductors. The cleaning efficiency can be improved, the problem that the silicon wafer sorting system stops due to cleaning of the conveyor belt is avoided, and the sorting efficiency of the silicon wafers is further improved.

Description

Conveyor belt cleaning device and silicon wafer sorting system
Technical Field
The invention relates to the technical field of semiconductors, in particular to a conveyor belt cleaning device and a silicon wafer sorting system.
Background
Before the silicon wafers leave a factory, a silicon wafer sorting system is needed to sort the silicon wafers, defective silicon wafers are found out, the yield of the silicon wafers leaving the factory is guaranteed, and the good silicon wafers are graded.
In the process of sorting the silicon wafers by adopting the silicon wafer sorting system, dust is generated in the friction process between the conveying belt at each station and the silicon wafers and the belt pulley, and the dust is attached to the conveying belt. In the process of conveying the silicon wafers by the conveying belt, dust contacts the surfaces of the silicon wafers, secondary pollution is caused to the silicon wafers, the quality of the silicon wafers is affected, and the yield of the silicon wafers leaving the factory is reduced.
In the prior art, the conveyor belt is cleaned manually. Specifically, when the conveyor belt is manually cleaned, the silicon wafer sorting system needs to stop running, so that the cleaning efficiency is low, and the sorting efficiency of the silicon wafers is reduced.
Disclosure of Invention
The invention provides a conveying belt cleaning device and a silicon wafer sorting system, which can automatically clean a conveying belt for conveying silicon wafers, so that the cleaning efficiency and the silicon wafer production efficiency are improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides a conveyor belt cleaning apparatus comprising:
one end of the connecting piece is connected with the turnover mechanism and can rotate along with the turnover mechanism;
a first cleaning mechanism having a first end for cleaning the first conveyor belt and a second end abutting against the link;
a second cleaning mechanism having a third end for cleaning the second conveyor belt and a fourth end in rotational communication with the link;
the turnover mechanism drives the connecting piece to rotate from a first position to a second position, the second end moves along with the connecting piece and drives the first end to abut against the first conveyor belt, and meanwhile, the fourth end moves along with the connecting piece and drives the third end to abut against the second conveyor belt.
According to the conveying belt cleaning device provided by the invention, in the process of removing defective silicon wafers by the silicon wafer sorting system, the turnover mechanism drives the connecting piece to move from the first position to the second position, so that the second end of the first cleaning mechanism and the fourth end of the second cleaning mechanism are driven to move, the first end is driven to clean the first conveying belt, the third end is used for cleaning the second conveying belt, in the cleaning process, an additional power source is not required to be added, the first conveying belt and the second conveying belt can be continuously and respectively cleaned in a point-drive mode only by virtue of the turnover action of the turnover mechanism, and therefore, the damage or secondary pollution of particle dust on the first conveying belt/the second conveying belt to the subsequently conveyed silicon wafers is avoided, and the delivery yield of the silicon wafers is improved. Compared with the method of manually cleaning the conveyor belt in the prior art, the method has the advantages that the cleaning efficiency can be improved, the problem that the silicon wafer sorting system is stopped due to cleaning of the conveyor belt is solved, and the sorting efficiency of the silicon wafers is further improved.
In a possible implementation manner, the conveyor belt cleaning device further includes a fixed seat, a first hinge point is formed between the first cleaning mechanism and the fixed seat, and the first end and the second end are respectively disposed on two sides of the first hinge point.
In a possible implementation manner, the first cleaning mechanism includes a first connecting rod and a first cleaning member, the first connecting rod is hinged to the fixing seat, two ends of the first connecting rod respectively correspond to a first end and a second end of the first cleaning mechanism, the first cleaning member is detachably mounted at the first end, and the second end abuts against the lower end of the connecting member.
In a possible implementation manner, the first cleaning mechanism further includes a first balancing weight and a limiting member, the first balancing weight is disposed at the first end, and the limiting member is disposed on the fixing base and can abut against the periphery of the first connecting rod.
In a possible implementation manner, the limiting member is a rigid member, and the limiting member is located at an included angle between the first end of the first connecting rod and the fixing base.
In a possible implementation manner, the limiting member is a compression spring, one end of the limiting member is connected to the fixing base, and the other end of the limiting member is connected to the second end.
In a possible implementation manner, the first cleaning mechanism includes a second connecting rod, a second cleaning member and a second counterweight, the second connecting rod is hinged to the fixing seat, the second connecting rod includes a first portion and a second portion which are different in length, an included angle is formed between the first portion and the second portion, the second cleaning member is detachably mounted on the first portion, the second counterweight is disposed on the second portion, and the second connecting rod is abutted to the connecting member through the second counterweight.
In a possible implementation manner, the cleaning device further includes a fixing seat, a second hinge point is provided between the second cleaning mechanism and the fixing seat, and the third end and the fourth end are disposed on two sides of the second hinge point.
In a possible implementation manner, the second cleaning mechanism includes a third connecting rod, a fourth connecting rod and a third cleaning piece, one end of the third connecting rod is hinged to one end of the fourth connecting rod, the other end of the third connecting rod is hinged to the connecting piece, the third cleaning piece is detachably disposed at the other end of the fourth connecting rod, and the middle portion of the fourth connecting rod is hinged to the fixed seat.
In a second aspect, the invention provides a silicon wafer sorting system, which comprises a turnover mechanism, a conveying device and the conveying belt cleaning device, wherein the conveying device comprises a first conveying belt and a second conveying belt for conveying silicon wafers, the turnover mechanism is connected with the first conveying belt and is used for driving the first conveying belt to turn over from a horizontal state to an inclined state; the first cleaning mechanism is used for cleaning the first conveyor belt, and the second cleaning mechanism is used for cleaning the second conveyor belt.
Compared with the prior art, the silicon wafer sorting system provided by the invention is provided with the first cleaning mechanism and the second cleaning mechanism at the turnover mechanism, the first cleaning mechanism is driven to clean the first conveying belt through the turnover action of the turnover mechanism, and the second cleaning mechanism is driven to clean the second conveying belt at the same time, so that the damage or secondary pollution of particle dust on the first conveying belt/the second conveying belt to the subsequently conveyed silicon wafers is avoided, the delivery rate of the silicon wafers is improved, an additional power source is not required to be added, and compared with the method for manually cleaning the conveying belts in the prior art, the silicon wafer sorting system can improve the cleaning efficiency, the problem of shutdown of the silicon wafer sorting system due to cleaning of the conveying belts is avoided, and the sorting efficiency of the silicon wafers is further improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic perspective view of a removal station of a silicon wafer sorting system according to an embodiment of the present invention;
FIG. 2 is a schematic plan view of a removal station of the silicon wafer sorting system according to one embodiment of the present invention;
FIG. 3 is a second schematic plan view of a removing station of the silicon wafer sorting system according to the embodiment of the present invention;
FIG. 4 is a third schematic plan view of a removing station of the silicon wafer sorting system according to the embodiment of the present invention;
FIG. 5 is a perspective view of a cleaning assembly in a first conveyor according to an embodiment of the invention;
FIG. 6 is a schematic perspective view of a structured transport station of the silicon wafer sorting system according to the embodiment of the present invention;
FIG. 7 is a schematic plan view of a structured transport station of a silicon wafer sorting system according to an embodiment of the present invention;
FIG. 8 is a second schematic plan view of the structured transport station of the silicon wafer sorting system according to the embodiment of the present invention;
fig. 9 is a schematic perspective view of a second cleaning mechanism according to an embodiment of the present invention.
Reference numerals: a turnover mechanism 100; a first conveyor belt 101; a second conveyor belt 102; a connecting member 200; a fixed seat 201; a first hinge point 300; a first link 301; a first cleaning member 302; a first weight 303; a stopper 304; a second link 305; a second cleaning member 306; a second weight 307; a second hinge point 400; a third link 401; a fourth link 402; a third cleaning member 403.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the following, the terms "first", "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present disclosure, "a plurality" means two or more unless otherwise specified.
Additionally, the use of "based on" or "according to" means open and inclusive, as a process, step, calculation, or other action that is "based on" or "according to" one or more stated conditions or values may in practice be based on additional conditions or exceeding the stated values.
In order to clean a conveying belt used for conveying silicon wafers at corresponding stations in a silicon wafer sorting system, and therefore improve the yield and sorting efficiency of ex-factory silicon wafers, the embodiment of the invention provides a conveying belt cleaning device and a silicon wafer sorting system.
The silicon wafer sorting system provided by the embodiment of the invention is used for screening the silicon wafers before the silicon wafers leave a factory, removing defective silicon wafers and ensuring the yield of the silicon wafers leaving the factory. Each station of the silicon chip sorting system can be provided with the conveying belt cleaning device so as to clean the conveying belt at each station. The embodiment is described by taking a system with a rejecting station and a regular conveying station as an example, and the silicon wafer sorting system can comprise a conveying device, a size module mechanism, a turnover mechanism 100 and a conveying belt cleaning device. The conveying device comprises a first conveying belt 101 and a second conveying belt 102 for conveying silicon wafers, the first conveying belt 101 is located at the eliminating station, the second conveying belt 102 is located at the regular conveying station, and the regular conveying station is a downstream station of the eliminating station. The size module mechanism is used for detecting the size of the silicon wafer conveyed on the conveying belt so as to judge whether the silicon wafer on the conveying belt is a defective silicon wafer. The turnover mechanism 100 is arranged at the removing station and connected with the first conveyor belt 101, and when the size module mechanism detects that defective silicon wafers appear on the first conveyor belt 101, the turnover mechanism 100 drives the first conveyor belt 101 to rotate from a horizontal state to an inclined state, so that the defective silicon wafers fall into a waste box below the first conveyor belt 101. Referring to fig. 1 and 6, the conveyor belt cleaning device includes a connecting member 200, a first cleaning mechanism and a second cleaning mechanism, one end of the connecting member 200 is connected to the turnover mechanism 100 and can rotate with the turnover mechanism 100, the other end of the connecting member 200 can abut against or be hinged with the first cleaning mechanism and the second cleaning mechanism, the first cleaning mechanism has a first end and a second end, the first end is used for cleaning the first conveyor belt 101, the second end abuts against the connecting member 200, the second cleaning mechanism has a third end and a fourth end, the third end is used for cleaning the second conveyor belt 102, the fourth end is rotatably connected with the connecting member 200, specifically, when the turnover mechanism 100 drives the connecting member 200 to rotate from the first position to the second position, the second end of the first cleaning mechanism is moved by the connecting member 200, the first end thereof is linked to abut against the first conveyor belt 101 along with the second end, and further performs a cleaning operation on the first conveyor belt 101, meanwhile, the fourth end of the second cleaning mechanism moves under the action of the connecting member 200, and the third end of the second cleaning mechanism is linked to abut against the second conveyor belt 102 along with the fourth end, so as to clean the second conveyor belt 102. When the turnover mechanism 100 drives the connecting member 200 to rotate from the second position to the first position, the connecting member 200 is separated from the second end of the first cleaning mechanism, so that one end of the first cleaning mechanism is far away from the first conveyor belt 101, and meanwhile, the connecting member 200 drives the fourth end of the second connecting mechanism to be reset, so that the third end of the second cleaning mechanism is far away from the second conveyor belt 102.
It should be noted that the connecting member 200 may have one end fixed to the turnover mechanism 100 and rotate with the turnover mechanism 100, or a rotating shaft may extend from a driving source of the turnover mechanism 100, and one end of the connecting member 200 is fixedly mounted on the rotating shaft.
It will be appreciated that the transfer device may also include other components, and embodiments of the invention are not specifically limited herein. For example, the conveying device may further include a plurality of belt pulleys, a motor, and other conveying belts, and both ends of each conveying belt may be respectively disposed on one belt pulley, and an output shaft of the motor is connected to the belt pulley. The conveying belt can be used for bearing silicon wafers, and the belt wheel can drive the conveying belt to move in the process that the motor drives the belt wheel to rotate, so that the silicon wafers on the belt wheel are conveyed.
In one embodiment, the connector 200 may have any shape. Specifically, the connecting member 200 may have a rectangular plate shape or a block shape, or may have a triangular plate shape.
According to the conveying belt cleaning device provided by the invention, in the process of removing defective silicon wafers by a silicon wafer sorting system, the turnover mechanism 100 drives the connecting piece 200 to move from the first position to the second position, so that the first end of the first cleaning mechanism is in contact with the first conveying belt 101, the first conveying belt 101 is cleaned, and the third end of the second cleaning mechanism is in contact with the second conveying belt 102, and the second conveying belt 102 is cleaned. In other words, in the cleaning process, an additional power source is not required to be added, and the first conveyor belt 101 and the second conveyor belt 102 can be cleaned in a point-moving manner only by means of the turning action of the turning mechanism 100, so that damage or secondary pollution of particle dust on the first conveyor belt 101/the second conveyor belt 102 to the subsequently transported silicon wafers is avoided, and the yield of the silicon wafers is improved. Compared with the method of manually cleaning the conveyor belt in the prior art, the method has the advantages that the cleaning efficiency is improved, the problem that the silicon wafer sorting system is shut down due to cleaning of the conveyor belt is solved, and the sorting efficiency of the silicon wafers is further improved.
In one embodiment, the moving speed of the first conveyor belt 101/the second conveyor belt 102 is 600mm/s, the turnover mechanism 100 drives the connecting member 200 to stay at the second position for 0.1s, and the first conveyor belt 101/the second conveyor belt 102 can move for 60mm within 0.1 s. That is, the turnover mechanism 100 moves once, and the first conveyor belt 101 and the second conveyor belt 102 of 60mm can be cleaned.
As shown in fig. 1 to 8, the conveyor belt cleaning device is disposed at a lower end of the turnover mechanism 100, a first conveyor belt 101 is disposed on the turnover mechanism 100, that is, the turnover mechanism 100 and the first conveyor belt 101 are rejecting stations, when the size module mechanism detects that a silicon wafer of the first conveyor belt 101 is a defective product, the size module mechanism sends a turnover signal to the turnover mechanism 100, as shown in fig. 3, after the turnover mechanism 100 receives the turnover signal, the turnover mechanism 100 drives the first conveyor belt 101 to be switched from a horizontal state to an inclined state, so that the defective product on the first conveyor belt 101 falls into a waste material box below the first conveyor belt 101. The structured transmission station is located at one side of the rejection station, namely, the side of the turnover mechanism 100 facing downwards in an inclined manner, and the structured transmission station comprises a second conveyor belt 102 arranged horizontally.
The conveyor belt cleaning device comprises a connecting piece 200, a first cleaning mechanism and a second cleaning mechanism, wherein one end of the connecting piece 200 is connected with the turnover mechanism 100, the other end of the connecting piece 200 can rotate along with the turnover mechanism 100, the first cleaning mechanism is provided with a first end and a second end, the second cleaning mechanism is provided with a third end and a fourth end, when the connecting piece 200 rotates along with the turnover mechanism 100 from the first position to the second position, the first end is driven to move and abut against the first conveyor belt 101 through the second end, the third end is driven to move and abut against the second conveyor belt 102 through the fourth end, the first end carries out cleaning operation on the first conveyor belt 101, the third end carries out cleaning operation on the second conveyor belt 102, in the embodiment, the first position can be a position where the first conveyor belt 101/turnover mechanism 100 is in a horizontal state, and the second position can be a position where the first conveyor belt 101/turnover mechanism 100 is in an inclined state, the second conveyor 102 is always horizontally disposed.
In a possible implementation manner, referring to fig. 2 and 7, the conveyor belt cleaning device further includes a fixed seat 201, a first hinge point 300 is provided between the first cleaning mechanism and the fixed seat 201, the first end and the second end are respectively disposed at two sides of the first hinge point 300, when the connecting element 200 abuts against and drives the second end to rotate around the first hinge point 300, the first end is driven by the second end to correspondingly rotate around the first hinge point 300 to be in contact with the first conveyor belt 101, so as to clean the first conveyor belt 101; the second hinge point 400 is further arranged between the second cleaning mechanism and the fixing base 201, the third end and the fourth end are arranged on two sides of the second hinge point 400, the connecting piece 200 is abutted to and drives the fourth end to rotate around the second hinge point 400, and the third end is driven by the fourth end to correspondingly rotate around the second hinge point 400 to be in contact with the second conveyor belt 102, so that the second conveyor belt 102 is cleaned.
In a possible implementation manner, referring to fig. 2 and 3, the first cleaning mechanism includes a first connecting rod 301 and a first cleaning member 302, the first connecting rod 301 is hinged to the fixing base 201, that is, the first connecting rod 301 and the fixing base 201 form a lever structure, when the connecting member 200 is located at the first position, the first connecting rod 301 can be in a horizontal state, in this embodiment, a hinge point of the first connecting rod 301 and the fixing base 201 is a first hinge point 300, two ends of the first connecting rod 301 correspond to a first end and a second end of the first cleaning mechanism, respectively, the first cleaning member 302 is detachably mounted at the first end, the second end abuts against a lower end portion of the connecting member 200, when the connecting member 200 rotates with the turnover mechanism 100 from the first position to the second position, the lower end portion of the connecting member 200 drives the second end to rotate downward along the first hinge point 300, at this time, the first end rotates upward along the first hinge point 300 until the first cleaning member 302 abuts against the first conveyor belt 101, first conveyor belt 101 moves relative to first cleaning member 302 such that first cleaning member 302 performs a cleaning operation on first conveyor belt 101.
It can be understood that when the connecting member 200 is at the first position, the connecting member 200 is perpendicular to the horizontal plane, and the connecting member 200 rotates with the turnover mechanism 100 from the first position to the second position, the lower end of the connecting member 200 moves downward to press against the second end, so that the first end tilts along the first hinge point 300 until the first cleaning member 302 abuts against the first conveyor belt 101.
In practice, when the connecting member 200 is at the first position, the first cleaning member 302 is spaced apart from the first conveyor belt 101. When the turnover mechanism 100 drives the connecting member 200 to rotate from the first position to the second position, the connecting member 200 contacts with the second end of the first link 301 and drives the first link 301 to move circumferentially along the first hinge point 300, and when the connecting member 200 is at the second position, the first cleaning member 302 contacts with the first conveyor belt 101 to clean the first conveyor belt 101. When the turnover mechanism 100 drives the connection member 200 to return from the second position to the first position, the connection member 200 is separated from the second end of the first link 301, so that the first end of the first link 301 rotates downward along the first hinge point 300 due to its own gravity to gradually get away from the first conveyor belt 101, that is, the first cleaning member 302 gets away from the first conveyor belt 101.
In a possible implementation manner, the first hinge point 300 is located near the second end, the first link 301 and the fixing base 201 form an unequal arm lever structure, and the moment arm corresponding to the first end is greater than the moment arm corresponding to the second end, so that after the connecting element 200 is separated from the second end, the first end is convenient to be away from the first conveyor belt 101, that is, the first cleaning element 302 is convenient to be separated from the first conveyor belt 101.
In one possible implementation manner, referring to fig. 4, the first cleaning mechanism may further include a first weight 303 and a limiting member 304. The first weight member 303 may be disposed at the first end, and when the reverse movement mechanism drives the connecting member 200 to rotate from the second position to the first position, the first end is far away from the first conveyor belt 101 under the gravity of the first weight member 303, that is, the first cleaning member 302 can be quickly far away from the first conveyor belt 101. The limiting member 304 is disposed on the fixing base 201 and can abut against the periphery of the first connecting rod 301, and the limiting member 304 can be a rigid member or an elastic member, which can prevent the second end from touching the first conveyor belt 101 during the resetting process, so as to prevent damage to the first conveyor belt 101 or the silicon wafer on the first conveyor belt 101.
In one embodiment, the limiting member 304 is a rigid member. The limiting member 304 may be disposed on the fixing base 201, and the limiting member 304 is located at an included angle between the first end and the fixing base 201, when the connecting member 200 is reset to the first position along with the turnover mechanism 100 from the second position, the lower end of the connecting member 200 cancels the pressure on the second end, and the first end may rotate downward along the first hinge point 300, and the limiting member 304 may limit the downward rotation stroke of the first end, so as to prevent the first weight block 303 from directly impacting the fixing base 201.
For example, the position-limiting member 304 may be made of a rigid material such as metal or plastic.
In another embodiment, the limiting member 304 is an elastic member, one end of the limiting member 304 is connected to the fixing base 201, and the other end is connected to the second end. The both ends of locating part 304 are detachably established respectively on fixing base 201 and first connecting rod 301, can change the elastic component regularly like this to prevent that the elastic component from taking place incomplete elastic deformation back, can't carry on spacingly to first connecting rod 301, make first connecting rod 301 collide first conveyer belt 101 at the in-process that resets.
For example, the stopper 304 may be a compression spring.
In a possible implementation manner, when the first connecting rod 301 and the fixing base 201 form an unequal-arm lever structure, only the limiting member 304 may be disposed on the fixing base 201 without the first balancing weight 303. The limiting member 304 may be a rigid member or an elastic member. The specific positions of the limiting members 304 are the same as those described above, and are not described herein again.
In another possible implementation manner, referring to fig. 5, the first cleaning mechanism includes a second link 305, a second cleaning member 306 and a second weight block 307, and two ends of the second link 305 correspond to two ends of the first cleaning mechanism, respectively. The second link 305 includes a first portion and a second portion of unequal length, with an included angle therebetween. The first end of the second connecting rod 305 is located at the first portion and detachably connected to the second cleaning member 306, the second weight block 307 is disposed at the second end of the second connecting rod 305, the second end of the second connecting rod 305 is located at the second portion, and the second connecting rod 305 is rotatably connected to the fixing base 201. In this embodiment, the second portion is in a vertical state when not stressed due to the gravity of the second weight block 307, and an included angle is formed between the first portion and the second portion, at this time, the first end and the second cleaning member 306 are located above the second weight block 307 and are not on a vertical axis coinciding with the second portion, when the turnover mechanism 100 drives the connecting member 200 to rotate from the first position to the second position, the connecting member 200 makes a circular motion along the rotation center of the turnover mechanism 100, at this time, the lower end of the connecting member 200 horizontally presses the second end or the second weight block 307, drives the second connecting rod 305 to rotate along a hinge point between the second connecting rod and the fixed seat 201, at this time, the first end and the second cleaning member 306 rotate to the vertical direction and abut against the first conveyor belt 101, and further cleans the first conveyor belt 101. When the turnover mechanism 100 drives the connecting member 200 to return from the second position to the first position, since the second end of the second connecting rod 305 has the second weight block 307, the second portion of the second connecting rod 305 returns to be in a vertical state under the action of the gravity of the second weight block 307, and the first portion of the second connecting rod 305 is far away from the first conveyor belt 101, that is, the second cleaning member 306 is far away from the first conveyor belt 101.
In a possible implementation manner, referring to fig. 6 to 9, the second cleaning mechanism includes a third connecting rod 401, a fourth connecting rod 402, and a third cleaning member 403, one end of the third connecting rod 401 is hinged to the fourth connecting rod 402, the other end of the third connecting rod 401 is hinged to the connecting member 200, the third cleaning member 403 is detachably disposed at the other end of the fourth connecting rod 402, the middle portion of the fourth connecting rod 402 is hinged to the fixing base 201, the hinge point between the fourth connecting rod 402 and the fixing base 201 is a second hinge point 400, the third end is the end of the fourth connecting rod 402 where the third cleaning member 403 is disposed, and the fourth end is the end of the third connecting rod 401 that is hinged to the connecting member 200. When the turnover mechanism 100 performs a turnover action, the third connecting rod 401 is driven by the connecting member 200 to move, so that the fourth connecting rod 402 rotates along the second hinge point 400, the third end is close to and abutted against the second conveyor belt 102, that is, the third cleaning member 403 is abutted against the second conveyor belt 102, so as to clean the second conveyor belt 102.
Fig. 9 is a perspective view showing the second cleaning mechanism, and the third link 401 and the fourth link 402 are both linear in shape. One end of the third connecting rod 401 and one end of the fourth connecting rod 402 are rotatably connected, the other end of the third connecting rod 401 is connected with the connecting piece 200, the other end of the fourth connecting rod 402 is detachably connected with the third cleaning piece 403, and the fourth connecting rod 402 is rotatably connected with the fixing seat 201.
In practice, when the connecting member 200 is in the first position, there is a gap between the third cleaning member 403 and the second conveyor belt 102. When the turnover mechanism 100 drives the connecting member 200 to rotate from the first position to the second position, the connecting member 200 drives the third connecting rod 401 to move linearly, and then the third connecting rod 401 drives the fourth connecting rod 402 to move circularly along the second hinge point 400, so that the third cleaning member 403 contacts with the second conveyor belt 102 to clean the second conveyor belt 102.
Specifically, as shown in fig. 2 and fig. 7, the regular transmission station is a downstream station of the rejecting station, in this embodiment, the rejecting station is illustrated on the left side of the regular transmission station, one end of the connecting element 200 is disposed on the turnover mechanism 100, the other end of the connecting element extends downward along the vertical direction, the first cleaning mechanism is disposed on the left side of the connecting element 200, the second cleaning mechanism is disposed on the right side of the connecting element 200, when the turnover mechanism 100 drives the connecting element 200 to rotate from the first position to the second position, the connecting element 200 drives the second end of the first connecting rod 301 to rotate downward along the first hinge point 300, the first end of the first connecting rod is rotated upward along the first hinge point 300 to abut against the first conveyor belt 101, so as to clean the first conveyor belt 101, the connecting element 200 drives the third connecting rod 401 to move linearly to the left, and the third connecting rod 401 drives the fourth connecting rod 402 to rotate along the second hinge point 400, and the third end rotates upward along the second hinge point 400 to abut against the second conveyor belt 102, thereby cleaning the second conveyor belt 102. When the turnover mechanism 100 drives the connecting member 200 to rotate from the second position to the first position, the lower end of the connecting member 200 releases the pressure on the first connecting rod 301, the first end of the connecting member rotates downward to be away from the first conveyor belt 101 due to the self-gravity, the third connecting rod 401 is driven by the connecting member 200 to move linearly rightward, the third connecting rod 401 drives the fourth connecting rod 402 to rotate along the second hinge point 400, and the third end of the connecting member rotates downward to be away from the second conveyor belt 102 along the second hinge point 400.
In one embodiment, the fixing base 201 may be fixedly disposed on the conveying device.
In one possible implementation, each of the first cleaning member 302, the second cleaning member 306 and the third cleaning member 403 can be a relatively soft article having a cleaning function. For example, the first cleaning member 302, the second cleaning member 306 and the third cleaning member 403 may be sponges or rags.
The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions within the technical scope of the present invention are intended to be covered by the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (8)

1. A conveyor belt cleaning apparatus, comprising:
one end of the connecting piece is connected with the turnover mechanism and can rotate along with the turnover mechanism;
the first cleaning mechanism is provided with a first end and a second end, the first end is used for cleaning the first conveyor belt, and the second end is abutted with the connecting piece;
a second cleaning mechanism having a third end for cleaning the second conveyor belt and a fourth end rotatably connected to the link;
the turnover mechanism drives the connecting piece to rotate from a first position to a second position, the second end moves along with the connecting piece and drives the first end to abut against the first conveyor belt, and meanwhile, the fourth end moves along with the connecting piece and drives the third end to abut against the second conveyor belt;
the cleaning device further comprises a fixed seat, a first hinge point is arranged between the first cleaning mechanism and the fixed seat, and the first end and the second end are respectively arranged on two sides of the first hinge point;
the first cleaning mechanism comprises a first connecting rod and a first cleaning piece, the first connecting rod is hinged to the fixed seat, two ends of the first connecting rod respectively correspond to a first end and a second end of the first cleaning mechanism, the first cleaning piece is detachably mounted at the first end, and the second end is abutted to the lower end of the connecting piece.
2. A cleaning device for conveying belt as claimed in claim 1, wherein the first cleaning mechanism further comprises a first weight block and a limiting member, the first weight block is disposed at the first end, and the limiting member is disposed on the fixing base and can abut against the outer periphery of the first connecting rod.
3. The cleaning device as claimed in claim 2, wherein the position-limiting member is a rigid member, and the position-limiting member is located at an included angle between the first end of the first link and the fixing base.
4. A cleaning device for conveying belt according to claim 2, wherein the limiting member is a compression spring, one end of the limiting member is connected to the fixing base, and the other end is connected to the second end.
5. A conveyor belt cleaning apparatus as in claim 1 wherein the first cleaning mechanism comprises a second link, a second cleaning element and a second counterweight, the second link is hinged to the mounting base, the second link comprises a first portion and a second portion of unequal lengths, the first portion and the second portion define an included angle therebetween, the second cleaning element is removably mounted to the first portion, the second counterweight is disposed on the second portion, and the second link abuts the connecting element via the second counterweight.
6. A conveyor belt cleaning apparatus as claimed in claim 1 further comprising a fixed base, wherein a second hinge point is provided between the second cleaning mechanism and the fixed base, and the third end and the fourth end are disposed on opposite sides of the second hinge point.
7. The conveyor belt cleaning device as claimed in claim 6, wherein the second cleaning mechanism comprises a third connecting rod, a fourth connecting rod and a third cleaning member, one end of the third connecting rod is hinged to one end of the fourth connecting rod, the other end of the third connecting rod is hinged to the connecting member, the third cleaning member is detachably disposed at the other end of the fourth connecting rod, and the middle part of the fourth connecting rod is hinged to the fixed seat.
8. A silicon wafer sorting system comprising a turnover mechanism, a conveying device and the belt cleaning device of any one of claims 1 to 7, wherein the conveying device comprises a first belt and a second belt for conveying silicon wafers, the turnover mechanism is connected with the first belt and is used for driving the first belt to turn from a horizontal state to an inclined state; the first cleaning mechanism is used for cleaning the first conveyor belt, and the second cleaning mechanism is used for cleaning the second conveyor belt.
CN202210314575.5A 2022-03-25 2022-03-25 Conveyor belt cleaning device and silicon wafer sorting system Active CN114506645B (en)

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