CN114486200B - Polarization testing method and system for semiconductor laser - Google Patents
Polarization testing method and system for semiconductor laser Download PDFInfo
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- CN114486200B CN114486200B CN202210107446.9A CN202210107446A CN114486200B CN 114486200 B CN114486200 B CN 114486200B CN 202210107446 A CN202210107446 A CN 202210107446A CN 114486200 B CN114486200 B CN 114486200B
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- splitting prism
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- 230000010287 polarization Effects 0.000 title claims abstract description 81
- 239000004065 semiconductor Substances 0.000 title claims abstract description 63
- 238000012360 testing method Methods 0.000 title claims abstract description 45
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 238000010998 test method Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Abstract
The invention provides a polarization testing method and a polarization testing system for a semiconductor laser, which mainly solve the problems that the existing polarization testing method is low in reliability and high in testing cost, and whether a collimation light path is in an effective included angle with a polarization beam splitting prism cannot be determined. The test system comprises a six-dimensional adjusting table, a collimating lens, a polarization beam splitter prism, a scale adjusting plate, a power detection device, a first sliding rail and a second sliding rail; the semiconductor laser is arranged on the six-dimensional adjusting table; the collimating lens, the polarization beam splitter prism, the power detection device and the scale adjusting plate are sequentially arranged on an emergent light path of the semiconductor laser; the collimating lens performs beam collimation on the fast axis and the slow axis of the semiconductor laser; the polarization beam splitting prism is arranged on the first sliding rail; the power detection device is used for acquiring the optical power of the laser beam passing through the collimating lens and the polarization beam splitting prism; the scale adjusting plate is arranged on the second sliding rail.
Description
Technical Field
The invention belongs to the field of semiconductor lasers, and particularly relates to a polarization testing method and a polarization testing system for a semiconductor laser.
Background
With the development of laser technology, lasers are widely used in various fields. Particularly, the semiconductor laser has the characteristics of small volume, high efficiency, easy integration, no maintenance and the like, and has been widely applied to the fields of material processing, medical cosmetology, laser radar, aerospace and the like. In particular, fiber lasers widely used in the industrial field are each realized by a semiconductor laser as a pumping source by a polarization beam combining method.
In order to ensure that the polarization degree of the semiconductor laser meets the use requirement, the polarization degree of the laser needs to be accurately measured. The current test method of the polarization degree uses a complex light path and test devices, reduces the reliability of the system and increases the test cost, and the existing test method can not determine whether the collimation light path is in an effective included angle with the polarization beam splitter prism.
Disclosure of Invention
The invention aims to solve the problems that the existing method for testing the polarization degree has lower reliability and higher testing cost and can not determine whether a collimation light path is in an effective included angle with a polarization beam splitter prism, thereby providing a method and a system for testing the polarization of a semiconductor laser.
In order to achieve the above object, the present invention has the technical scheme that:
the polarization testing method of the semiconductor laser provided by the invention comprises the following steps:
step one, a semiconductor laser is arranged on a six-dimensional adjusting table, a front cavity of the semiconductor laser is positioned at the rotation center of the six-dimensional adjusting table, and the centers of a collimating lens and a polarization beam splitter prism are arranged on the same axis;
step two, the laser beam emitted by the semiconductor laser enters the scale adjusting plate after passing through the collimating lens and the polarization beam splitting prism, and the six-dimensional adjusting table adjusts the relative positions of the semiconductor laser and the collimating lens, so that the collimating lens effectively compresses the angles of the slow axis and the fast axis of the light spot of the laser beam of the semiconductor laser;
step three, adjusting the position of the scale adjusting plate along the light path direction, judging whether the size of a light spot of the laser beam passing through the collimating lens incident on the scale adjusting plate is changed or not, if the size of the light spot and the center position of the light spot are not changed, executing step four, and if the size of the light spot and the center position of the light spot are changed, returning to step two until the size of the light spot and the center position of the light spot are not changed, wherein the included angle between the outgoing laser beam and the polarization beam splitting prism is within an effective included angle, and the directivity of the laser beam meets the requirement;
and step four, obtaining laser power P0 of the laser beam passing through the polarization beam splitting prism, moving the polarization beam splitting prism out of a laser emergent light path, and obtaining laser power P1 of the laser beam passing through the collimating lens, thereby obtaining polarization degree POL=P0/P1.
In the third step, the included angle between the outgoing laser beam and the polarization beam splitter prism is controlled within 4 degrees.
The invention provides a semiconductor laser polarization testing system which comprises a six-dimensional adjusting table, a collimating lens, a polarization beam splitter prism, a scale adjusting plate, a power detection device, a first sliding rail and a second sliding rail; the semiconductor laser is arranged on a six-dimensional adjusting table, and the six-dimensional adjusting table realizes the relative position adjustment of the semiconductor laser and the collimating lens; the collimating lens, the polarization beam splitter prism, the power detection device and the scale adjusting plate are sequentially arranged on an emergent light path of the semiconductor laser, and the centers of the collimating lens and the polarization beam splitter prism are in the same axial direction; the collimating lens performs beam collimation on the fast axis and the slow axis of the semiconductor laser; the first sliding rail is used for adjusting the position of the polarization beam splitting prism to measure the polarization degree; the power detection device is used for acquiring the optical power of the laser beam passing through the collimating lens and the polarization beam splitting prism; the scale adjusting plate is arranged on the second sliding rail, and the second sliding rail is used for adjusting the displacement of the scale adjusting plate along the direction of the light path, so that the scale adjusting plate is used for judging the directivity of the laser beam.
Further, the front cavity of the semiconductor laser is at the center of rotation of the six-dimensional adjustment table to ensure that semiconductor laser displacement is minimized during adjustment.
Further, the power detection device is a power meter.
Compared with the prior art, the invention has the following beneficial effects:
1. the test system and the test method have higher test reliability and lower test cost. The method and the system only need to perform power test on one light path, and the power detection device does not need to move the position when testing the power P0 and the power P1, so that the test error caused by the position change of the power detection device is avoided. Meanwhile, after the semiconductor laser is mounted on the six-dimensional adjusting table, the relative positions of the semiconductor laser and the collimating lens can be adjusted in six dimensions, so that the beam compression quality of the fast and slow axes of the semiconductor laser is ensured. In addition, the invention has the advantages of easy adjustment of the light path, simple integral structure and low system construction cost. When the light path is regulated, whether the light path is properly regulated or not is confirmed through a scale regulating plate of the system, and the operation is simple.
2. The test system and the test method can determine that the collimating light path and the polarization beam splitter prism are in an effective included angle. When the system is tested, the semiconductor laser, the collimating lens and the polarization beam splitter prism are arranged on the same axis, and the collimating light path and the polarization beam splitter prism can be ensured to be in an effective included angle only by ensuring that the central position of a light spot is unchanged when the emergent light spot of the collimating lens is incident on different positions of the scale adjusting plate.
3. The method has the advantages of simple test flow, easy operation and short test time. After the light path is adjusted, the test can be completed by only moving the polarization beam splitter prism twice.
4. When the method is used for power test, the power detection device does not need to move, so that test errors caused by position change in two times of power test are avoided.
5. The method and the system of the invention ensure the test precision because the obtained test value is an absolute value and the power meter is calibrated by the national authentication measuring unit by using the power meter for test. In the prior art, the photoelectric detector is used for testing during power test, and the measured value result is a relative value, so that the power coefficient of the photoelectric detector is required to be calibrated, and the testing precision is lower compared with that of a power meter.
Drawings
FIG. 1 is a schematic diagram of a polarization testing system for a semiconductor laser according to the present invention.
Reference numerals: the device comprises a 1-semiconductor laser, a 2-six-dimensional adjusting table, a 3-collimating lens, a 4-polarization beam splitter prism, a 5-power detection device, a 6-scale adjusting plate, a 7-first sliding rail and an 8-second sliding rail.
Detailed Description
The invention will be described in detail below with reference to the drawings and the detailed description. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present invention, and are not intended to limit the scope of the present invention.
According to the optical property of the semiconductor laser, the invention provides a polarization testing method, and the method obtains better collimation light spots by designing a testing system with the relative positions of the semiconductor laser and the collimation lens adjustable, so that the included angle of the laser incident on the polarization beam splitting prism is smaller than 4 degrees, and the accurate polarization degree of the laser is obtained.
The invention provides a polarization testing method of a semiconductor laser, which specifically comprises the following steps:
step one, mounting a semiconductor laser 1 on a six-dimensional adjusting table 2, wherein a front cavity of the semiconductor laser 1 is positioned at the rotation center of the six-dimensional adjusting table 2 so as to ensure that the displacement of the semiconductor laser 1 is reduced to the minimum in the adjusting process, and simultaneously, the centers of a collimating lens 3 and a polarization beam splitting prism 4 are arranged on the same axis;
step two, the laser beam emitted by the semiconductor laser 1 is incident on the scale adjusting plate 6 after passing through the collimating lens 3 and the polarization beam splitting prism 4, and the six-dimensional adjusting table 2 adjusts the relative positions of the semiconductor laser 1 and the collimating lens 3, so that the collimating lens 3 effectively compresses the slow axis and the fast axis angles of the light spots of the laser beam of the semiconductor laser 1;
step three, adjusting the position of the scale adjusting plate 6 along the light path direction, judging whether the size of a light spot of the laser beam passing through the collimating lens 3 incident on the scale adjusting plate 6 is changed or not, if the size of the light spot and the position of the light spot are not changed, executing step four, if the size of the light spot and the position of the light spot are changed, returning to step two until the size of the light spot and the position of the light spot are not changed, at the moment, the laser beam passing through the collimating lens 3 is perpendicular to the light receiving surface of the polarization beam splitting prism 4, the included angle between the outgoing laser beam and the polarization beam splitting prism 4 is within an effective included angle, and the directivity of the laser beam meets the requirements;
in the step, the included angle between the outgoing laser beam and the polarization beam splitting prism 4 is controlled within 4 degrees;
step four, obtaining the laser power P0 of the laser beam passing through the polarization beam splitting prism 4, moving the polarization beam splitting prism 4 out of a laser emergent light path, and obtaining the laser power P1 of the laser beam passing through the collimating lens 3, thereby obtaining the polarization degree pol=p0/P1, wherein P0 is the laser power before the polarization beam splitting prism 4 moves, and P1 is the laser power after the polarization beam splitting prism 4 moves out.
As shown in fig. 1, the present invention provides a semiconductor laser polarization testing system for implementing the above method, which includes a six-dimensional adjusting table 2, a collimating lens 3, a polarization beam splitter prism 4, a scale adjusting plate 6, a power detecting device 5, a first slide rail 7 and a second slide rail 8. The semiconductor laser 1 is arranged on a six-dimensional adjusting table 2, the six-dimensional adjusting table 2 can realize the relative position adjustment of the semiconductor laser 1 and a collimating lens 3, and in the specific installation, the front cavity of the semiconductor laser 1 is positioned at the rotation center of the six-dimensional adjusting table 2 so as to ensure that the displacement of the semiconductor laser 1 is reduced to the minimum in the adjusting process. The collimating lens 3, the polarization beam splitting prism 4, the power detection device 5 and the scale adjusting plate 6 are sequentially arranged on an emergent light path of the semiconductor laser 1, the centers of the collimating lens 3 and the polarization beam splitting prism 4 are in the same axial direction, and the collimating lens 3 can collimate light beams on the fast axis and the slow axis of the semiconductor laser 1; the polarization beam splitter prism 4 is arranged on a first sliding rail 7, and the first sliding rail 7 is used for adjusting the position of the polarization beam splitter prism 4 and measuring the polarization degree; the power detection device 5 is used for acquiring the optical power of the laser beam passing through the collimating lens 3 and the polarization beam splitting prism 4, and a power meter can be adopted specifically; the scale adjusting plate 6 is arranged on the second sliding rail 8, and the second sliding rail 8 is used for adjusting the displacement of the scale adjusting plate 6 along the light path direction, so that the scale adjusting plate 6 is used for judging the directivity of the laser beam.
The adjustment precision of the six-dimensional adjusting table 2 is in the micron level, the displacement precision of the first sliding rail 7 and the second sliding rail 8 is in the micron level, and the collimating lens 3 and the polarization beam splitting prism 4 are standard general products. The scale adjusting plate 6 and the second sliding rail 8 form a distance adjusting device, the distance adjusting device can judge the directivity of the collimated light beam, and the scale adjusting plate 6 is provided with scales to provide coordinates to determine the position of the light spot.
Claims (5)
1. The polarization testing method of the semiconductor laser is characterized by comprising the following steps of:
step one, a semiconductor laser (1) is arranged on a six-dimensional adjusting table (2), a front cavity of the semiconductor laser (1) is positioned at the rotation center of the six-dimensional adjusting table (2), and the centers of a collimating lens (3) and a polarization beam splitting prism (4) are arranged on the same axis;
step two, the laser beam emitted by the semiconductor laser (1) is incident on a scale adjusting plate (6) after passing through a collimating lens (3) and a polarization beam splitting prism (4), and the six-dimensional adjusting table (2) adjusts the relative positions of the semiconductor laser (1) and the collimating lens (3) so that the collimating lens (3) effectively compresses the angles of a light spot slow axis and a light spot fast axis of the laser beam of the semiconductor laser (1);
step three, adjusting the position of the scale adjusting plate (6) along the light path direction, judging whether the size of a light spot of the laser beam which passes through the collimating lens (3) and is incident on the scale adjusting plate (6) is changed or not, if the size of the light spot and the center position of the light spot are not changed, executing step four, and if the size of the light spot and the center position of the light spot are changed, returning to step two until the size of the light spot and the center position of the light spot are not changed, wherein the included angle between the outgoing laser beam and the polarizing beam splitting prism (4) is within an effective included angle, and the directivity of the laser beam meets the requirement;
and step four, obtaining laser power P0 of the laser beam passing through the polarization beam splitting prism (4), moving the polarization beam splitting prism (4) out of a laser emergent light path, and obtaining laser power P1 of the laser beam passing through the collimating lens (3), so that the polarization degree POL=P0/P1 is obtained.
2. The method for testing polarization of semiconductor laser according to claim 1, wherein: in the third step, the included angle between the outgoing laser beam and the polarization beam splitting prism (4) is controlled within 4 degrees.
3. A semiconductor laser polarization testing system, characterized by: the device comprises a six-dimensional adjusting table (2), a collimating lens (3), a polarization beam splitting prism (4), a scale adjusting plate (6), a power detecting device (5), a first sliding rail (7) and a second sliding rail (8);
the semiconductor laser (1) is arranged on a six-dimensional adjusting table (2), and the six-dimensional adjusting table (2) realizes the relative position adjustment of the semiconductor laser (1) and the collimating lens (3);
the collimating lens (3), the polarization beam splitting prism (4), the power detection device (5) and the scale adjusting plate (6) are sequentially arranged on an emergent light path of the semiconductor laser (1), and the centers of the collimating lens (3) and the polarization beam splitting prism (4) are in the same axial direction;
the collimating lens (3) is used for carrying out beam collimation on the fast axis and the slow axis of the semiconductor laser (1);
the polarization beam splitting prism (4) is arranged on a first sliding rail (7), and the first sliding rail (7) is used for adjusting the position of the polarization beam splitting prism (4) to measure the polarization degree;
the power detection device (5) is used for acquiring the optical power of the laser beam passing through the collimating lens (3) and the polarization beam splitting prism (4);
the scale adjusting plate (6) is arranged on the second sliding rail (8), and the second sliding rail (8) is used for adjusting the displacement of the scale adjusting plate (6) along the direction of the light path, so that the scale adjusting plate (6) is used for judging the directivity of the laser beam.
4. A semiconductor laser polarization testing system according to claim 3, wherein: the front cavity of the semiconductor laser (1) is located at the rotation center of the six-dimensional adjusting table (2) so as to ensure that the displacement of the semiconductor laser (1) is minimized in the adjusting process.
5. The semiconductor laser polarization testing system according to claim 4, wherein: the power detection device (5) is a power meter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210107446.9A CN114486200B (en) | 2022-01-28 | 2022-01-28 | Polarization testing method and system for semiconductor laser |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210107446.9A CN114486200B (en) | 2022-01-28 | 2022-01-28 | Polarization testing method and system for semiconductor laser |
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| Publication Number | Publication Date |
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| CN114486200A CN114486200A (en) | 2022-05-13 |
| CN114486200B true CN114486200B (en) | 2024-04-12 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435422A (en) * | 2011-09-22 | 2012-05-02 | 西安炬光科技有限公司 | Polarization test method and polarization test system of semiconductor laser |
| CN102435421A (en) * | 2011-09-22 | 2012-05-02 | 西安炬光科技有限公司 | Test method and test system for polarization of semiconductor laser |
| CN103528799A (en) * | 2013-10-24 | 2014-01-22 | 西安炬光科技有限公司 | Space polarization testing method and device for semiconductor laser device provided with multiple light emitting units |
| CN108508617A (en) * | 2017-02-24 | 2018-09-07 | 中国科学院半导体研究所 | Laser collimator apparatus and alignment method |
| CN208569110U (en) * | 2018-07-10 | 2019-03-01 | 福建海创光电有限公司 | A kind of semiconductor laser fiber coupling device |
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2022
- 2022-01-28 CN CN202210107446.9A patent/CN114486200B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435422A (en) * | 2011-09-22 | 2012-05-02 | 西安炬光科技有限公司 | Polarization test method and polarization test system of semiconductor laser |
| CN102435421A (en) * | 2011-09-22 | 2012-05-02 | 西安炬光科技有限公司 | Test method and test system for polarization of semiconductor laser |
| CN103528799A (en) * | 2013-10-24 | 2014-01-22 | 西安炬光科技有限公司 | Space polarization testing method and device for semiconductor laser device provided with multiple light emitting units |
| CN108508617A (en) * | 2017-02-24 | 2018-09-07 | 中国科学院半导体研究所 | Laser collimator apparatus and alignment method |
| CN208569110U (en) * | 2018-07-10 | 2019-03-01 | 福建海创光电有限公司 | A kind of semiconductor laser fiber coupling device |
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| CN114486200A (en) | 2022-05-13 |
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