CN114459640A - Flexible pressure sensor and preparation method thereof - Google Patents

Flexible pressure sensor and preparation method thereof Download PDF

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Publication number
CN114459640A
CN114459640A CN202210081978.XA CN202210081978A CN114459640A CN 114459640 A CN114459640 A CN 114459640A CN 202210081978 A CN202210081978 A CN 202210081978A CN 114459640 A CN114459640 A CN 114459640A
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flexible
flexible pressure
layer
pressure sensor
copper foil
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向亮
唐俐
陈明
王小龙
聂飞
盛俊杰
胡海涛
候玉欣
张远奥
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General Engineering Research Institute China Academy of Engineering Physics
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General Engineering Research Institute China Academy of Engineering Physics
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

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  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The invention discloses a flexible pressure sensor and a preparation method thereof, wherein the flexible pressure sensor comprises a flexible pressure-sensitive functional layer, a flexible copper foil electrode and a flexible protection packaging layer; the flexible pressure sensor has good repeatability, stability and reliability and a larger pressure effect range; the unique pressure sensitive material is adopted as the pressure sensitive element of the pressure sensor, so that the prepared flexible pressure sensor has excellent flexibility, extremely thin thickness and extremely light weight, and has good installation biocompatibility.

Description

Flexible pressure sensor and preparation method thereof
Technical Field
The invention relates to the technical field of pressure sensors, in particular to a flexible pressure sensor and a preparation method thereof.
Background
Pressure sensors are typically used to measure the amount of contact force between two rigid surfaces, with both the sensitive material and the conductive electrodes that make up the pressure sensor being rigid. However, with the demand for future intelligent development of equipment, more and more intelligent monitoring is required, for example: the working environment of the sensor becomes more complex and difficult due to special factors such as severe limitation of a test space, such as gas components, loading history, temperature, pressure, gaps, cracks, sizes, shapes, material characteristics, acceleration and impact, the common rigid pressure sensor cannot meet the requirements of measuring the surface contact stress distribution and the contact pressure of an object in a narrow space inside the equipment, and the research on the sensor with special performances, such as miniaturization, thinning, flexibility and light weight, namely the biocompatibility of sensor installation, is urgently needed. Therefore, the research on the novel flexible sensor has very important significance.
At present, the existing flexible pressure sensor is basically prepared based on a high-molecular force-sensitive composite material, such as a multi-walled carbon nanotube/silicone rubber composite pressure-sensitive material, a carbon black/rubber force-sensitive composite material, a composite piezoresistive sensitive material added with polyvinyl silicone oil modified carbon black/silicone rubber, and the like, the prepared composite sensitive material has a lower pressure-sensitive threshold value, better elastic mechanical property and extremely thin appearance structure advantage, can be prepared in a large area, and the preparation process thereof comprises a conductive paste printing mode, a mechanical stirring vulcanization mode, and the like.
However, for the test requirements of some special occasions and under some special environmental conditions, when a pressure sensor needs to be prepared on phenyl silicon crude rubber (hereinafter referred to as "silicon foam cushion layer") based on a solid sheet, the existing preparation process cannot be directly prepared on the silicon foam cushion layer due to the limitation of the preparation mechanism.
The existing flexible pressure sensor is made by filling a macromolecule/silicon rubber composite material with a nano conductive functional material, and adopting preparation methods such as stirring, vulcanization, mixing, plasma material printing and the like to prepare a pressure sensitive layer, wherein a conductive network structure of the material is attached to a mechanical network formed by crosslinking of macromolecule/silicon rubber molecules, and when the composite material is acted by an external force, the conductive network formed by the crosslinking network of the silicon rubber molecules and the nano particles can generate corresponding changes of destruction and reconstruction, so that the composite material has the performance of piezoresistance. The existing preparation mechanism has the following disadvantages:
1) according to the traditional preparation process of the flexible composite material, the bonding force between the nano conductive functional material and the silicon foam sheet is Van der Waals force, the bonding force is weak, the nano conductive functional material is easy to fall off, the structural stability of the composite material is poor, the flexible pressure sensor is easy to damage and lose efficacy, and the service life of the sensor is short;
2) the nano conductive functional material is easy to agglomerate when being filled into the silicon foam sheet, so that the nano conductive functional material and the silicon foam cushion layer are not uniformly mixed, the functional consistency of the composite material is poor, and the performances of the sensor such as the consistency and the repeatability of the test are poor;
3) the preparation process of the pressure sensitive material leads to the fact that the quantity of the nano conductive functional material which can enter foam holes of the silicon foam cushion layer is small, and the nano conductive functional material is in an agglomerated state, so that the sensitivity of the sensor is low, and the pressure measurement range is small;
4) the traditional plasma material printing preparation process cannot realize uniform printing on a silicon foam cushion layer with rich foam holes and cannot manufacture a printing type flexible pressure sensor.
Therefore, it is necessary to develop a flexible pressure sensor and a method for manufacturing the same to solve the above problems.
Disclosure of Invention
The invention aims to solve the problems and designs a flexible pressure sensor and a preparation method thereof.
The invention realizes the purpose through the following technical scheme:
a flexible pressure sensor comprising:
a flexible pressure sensitive functional layer; the flexible pressure-sensitive functional layer comprises a phenyl silicone crude rubber composite foam material layer; the phenyl silicone crude rubber composite foam material layer is internally formed into a microporous structure, a plurality of through holes are formed through the phenyl silicone crude rubber composite foam material layer, and modified carbon nano tubes are polymerized and deposited on the surfaces of the microporous structure, the through holes and the phenyl silicone crude rubber composite foam material layer;
a flexible copper foil electrode; the two layers of flexible copper foil electrodes are respectively connected and arranged on two sides of the flexible pressure-sensitive functional layer. The flexible pressure sensor also comprises a flexible protective packaging layer, and the two layers of flexible protective packaging layers are combined and used for packaging the flexible pressure-sensitive functional layer and the flexible copper foil electrode.
Preferably, the flexible pressure sensor further comprises a flexible protective packaging layer, wherein the flexible protective packaging layer is a polyimide film and has a thickness of 0.01 mm-1 mm.
Preferably, the flexible copper foil electrode is made of copper foil, gold foil or silver foil; the thickness of the flexible copper foil electrode is 0.01 mm-1 mm.
Preferably, the flexible pressure sensitive functional layer has a thickness of 0.1mm to 3 mm.
The preparation method of the flexible pressure sensor comprises the following steps:
a1, preparing a flexible pressure-sensitive functional layer;
a2, mounting flexible copper foil electrodes: cutting the flexible copper foil electrode layer, reserving a structure for leading out a lead at a pin, and placing the flexible pressure-sensitive functional layer between the two layers of flexible copper foil electrode layers with a central position, wherein the area of the flexible copper foil electrode layer is smaller than that of the flexible pressure-sensitive functional layer;
a3, packaging of flexible pressure sensor: respectively cutting the flexible protection packaging layer into a first packaging layer serving as a flexible functional layer and a second packaging layer serving as a lead, arranging adhesive on one surface of the two first packaging layers, adhering the first packaging layers to the electrode layer and the peripheral edge of the flexible functional layer exposed beyond the electrode layer, and mutually bonding and sealing the edges of the two first packaging layers; and in addition, the lead close to the flexible copper foil electrode is packaged through two second packaging layers.
Preferably, when packaging the flexible pressure sensor, excess air between the two flexible protective packaging layers is excluded.
Specifically, the preparation of the flexible pressure-sensitive functional layer comprises the following steps:
s1, taking a solid phenyl silicone crude rubber composite foam material with a certain thickness;
s2, processing a plurality of micro through holes on the silicon foam sheet by adopting a micro processing technology;
s3, taking a certain amount of carbon nano tubes and modifying the carbon nano tubes;
s4, mixing the modified carbon nano tube with absolute ethyl alcohol in proportion, dissolving the modified carbon nano tube with the proportion of 0.1g in 150ml of absolute ethyl alcohol solution, and cleaning the solution by an ultrasonic cleaner to obtain modified carbon nano tube dispersion liquid;
s5, adhering the phenyl silicone crude rubber composite foam material layer to a stainless steel positive plate, putting the phenyl silicone crude rubber composite foam material layer and another stainless steel negative plate into the modified carbon nano tube dispersion liquid in parallel, introducing a voltage of 5-30V between the two electrodes, and performing electrophoresis for 0.5-4 h;
s6, baking the phenyl silicone crude rubber composite foam material layer processed in the steps at 80-100 ℃ for 5-10 min to obtain the flexible pressure-sensitive composite material.
Further, the modified preparation method of the carbon nano tube comprises the following steps:
s31, weighing a certain mass of carbon nanotubes;
s32, measuring the concentrated nitric acid with the weight percentage concentration of 63.01% by using the measuring cylinder, introducing the concentrated nitric acid into the beaker, measuring the concentrated sulfuric acid with the weight percentage concentration of 98.08% by using the measuring cylinder, slowly pouring the concentrated nitric acid into the beaker along the wall of the beaker, and continuously stirring by using a glass rod to accelerate heat dissipation;
s33, pouring the carbon nanotubes to be modified into the beaker and mixing uniformly;
s34, pouring the liquid in the beaker in the previous step into a flask, putting the flask into a magnetic stirring oil bath pot, heating to a temperature of more than 100 ℃, and timing for 1h under the condition of keeping the temperature;
s35, cooling the solution in the flask in the previous step, pouring the cooled solution into a beaker filled with deionized water, and repeatedly performing suction filtration by using the deionized water until the carbon nano tube is neutral;
and S36, drying and grinding the carbon nano tube to finish the modification of the carbon nano tube.
The invention has the beneficial effects that:
1. the flexible pressure sensor has good repeatability, stability and reliability and a larger pressure effect range;
2. the unique pressure sensitive material is adopted as the pressure sensitive element of the pressure sensor, so that the prepared flexible pressure sensor has excellent flexibility, extremely thin thickness and extremely light weight, and has good installation biocompatibility;
3. in the preparation of the flexible pressure sensor, an electrochemical method is introduced into the preparation of the sensitive material of the sensor, expensive photoetching equipment and a complicated photoetching process are not required, the flexible pressure sensor is simple in structure, good in bending property, stable, simple in preparation method and low in cost, can be manufactured in a large area, improves the multifunction and application range of the material, and solves the requirements of modern information technology on the multifunction of the material and the testing requirements of special environments.
Drawings
FIG. 1 is a cross-sectional view of the present invention;
FIG. 2 is a partial top view of the present invention;
FIG. 3 is a schematic structural view of a flexible pressure sensitive functional layer according to the present invention;
FIG. 4 is an SEM image of a silicon foam blanket doped with modified carbon nanotubes prepared in example;
FIG. 5 is a graph of response time of the flexible pressure sensor in an embodiment;
FIG. 6 is a graph of the response of the flexible pressure sensor to voltage under different pressure loads at room temperature in the embodiment;
FIG. 7 is a graph of a cycle stability test of the flexible pressure sensor in an embodiment;
fig. 8 is a graph of an electrical test of the flexible pressure sensor in an embodiment.
In the figure: 1. a flexible pressure sensitive functional layer; 11. a phenyl silicone crude rubber composite foam material layer; 12. a through hole; 13. modifying the carbon nano tube; 2. a flexible copper foil electrode; 3. a flexible protective encapsulation layer.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "inside", "outside", "left", "right", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships that the products of the present invention are conventionally placed in use, or the orientations or positional relationships that are conventionally understood by those skilled in the art, and are used for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is also to be noted that, unless otherwise explicitly stated or limited, the terms "disposed" and "connected" are to be interpreted broadly, and for example, "connected" may be a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, and may be a communication between the two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The following detailed description of embodiments of the invention refers to the accompanying drawings.
As shown in fig. 1-3, a flexible pressure sensor comprising:
a flexible pressure sensitive functional layer 1; the flexible pressure-sensitive functional layer 1 comprises a phenyl silicone crude rubber composite foam material layer 11; a microporous structure is formed in the phenyl silicone crude rubber composite foam material layer 11, a plurality of through holes are formed through the phenyl silicone crude rubber composite foam material layer 11, and modified carbon nano tubes 13 are polymerized and deposited on the surfaces of the microporous structure, the through holes and the phenyl silicone crude rubber composite foam material layer 11;
a flexible copper foil electrode 2; the two layers of flexible copper foil electrodes 2 are respectively connected and arranged on two sides of the flexible pressure-sensitive functional layer 1.
The flexible pressure sensor also comprises a flexible protective packaging layer 3, and the two layers of flexible protective packaging layers 3 are combined and then used for packaging the flexible pressure-sensitive functional layer 1 and the flexible copper foil electrode 2.
In some embodiments, the flexible protective encapsulation layer 3 is an extremely thin, insulating, high temperature resistant polyimide film with a thickness of 0.01mm to 1 mm.
In some embodiments, the flexible copper foil electrode 2 is preferably made of copper foil, gold foil, or silver foil; the thickness of the flexible copper foil electrode 2 is 0.01 mm-1 mm.
In some embodiments, the flexible pressure sensitive functional layer 1 has a thickness of 0.1mm to 3 mm. The flexible pressure sensitive functional layer 1 is used to convert a pressure signal into an electrical signal.
In some embodiments, the phenyl silicone raw composite foam layer 11 includes phenyl silicone raw rubber, white carbon black, hexamethyl, and other material components.
In some embodiments, as shown in fig. 3, the plurality of through holes 12 are arranged in parallel with each other, and the through holes 12 are perpendicular to the surface of the phenyl silicone raw rubber composite foam material layer 11.
The flexible pressure sensitive functional layer 1 has a piezoresistive effect working mechanism that: taking a solid phenyl silicone crude rubber composite foam material as a flexible substrate layer, and taking a multi-layer rich microporous structure (a cellular structure) thereof as a stressed elastic framework of the pressure-sensitive material; in addition, a large number of micro through holes are added in the phenyl silicone crude rubber composite foam material, modified carbon nano tubes are adopted, under the action of an electric field, the modified carbon nano tubes and benzene rings in the phenyl silicone crude rubber are chemically bonded, a layer of modified carbon nano tubes is uniformly polymerized on the inner surfaces and the surfaces of the holes of the phenyl silicone crude rubber, the conductive function of the modified carbon nano tubes and the pore structure of the phenyl silicone crude rubber form a conduction network of the composite material, when the material is stressed, the number of unsaturated contact points which are changed along with the stress is formed between the modified carbon nano tubes and the phenyl silicone crude rubber, so that the resistance value of the polymer material is correspondingly changed, and the polymer material has the pressure-sensitive function, namely the flexible pressure-sensitive functional layer is obtained.
The preparation method of the flexible pressure sensor comprises the following steps:
a1, preparing a flexible pressure-sensitive functional layer;
a2, mounting flexible copper foil electrodes: cutting the flexible copper foil electrode layer, reserving a structure for leading out a lead at a pin, and placing the flexible pressure-sensitive functional layer between the two layers of flexible copper foil electrode layers with a central position, wherein the area of the flexible copper foil electrode layer is smaller than that of the flexible pressure-sensitive functional layer; the flexible copper foil electrode is cut into a structure with the size of 28mm multiplied by 28mm, and the pin is reserved with the size of 400mm multiplied by 4mm and used as a lead to be led out;
a3, packaging of flexible pressure sensor: respectively cutting the flexible protection packaging layer into a first packaging layer serving as a flexible functional layer and a second packaging layer serving as a lead, arranging adhesive on one surface of the two first packaging layers, adhering the first packaging layers to the electrode layer and the peripheral edge of the flexible functional layer exposed beyond the electrode layer, and mutually bonding and sealing the edges of the two first packaging layers; and in addition, the lead close to the flexible copper foil electrode is packaged through two second packaging layers. Specifically, a flexible protective packaging layer with the thickness of 0.15mm is cut into a packaging layer (a first packaging layer) which is used as a flexible functional layer and has the size of 60mm multiplied by 60mm, and a packaging layer (a second packaging layer) which is used as a lead and has the size of 500mm multiplied by 10mm is reserved at a pin;
preferably, when packaging the flexible pressure sensor, excess air between the two flexible protective packaging layers is excluded.
Specifically, the preparation of the flexible pressure-sensitive functional layer comprises the following steps:
s1, taking a solid phenyl silicone crude rubber composite foam material with the thickness of 0.5 mm; cutting into square gaskets with the size of 30mm multiplied by 30 mm;
s2, processing a plurality of micro through holes on the silicon foam sheet by adopting a micro processing technology;
s3, taking a certain amount of carbon nano tubes and modifying the carbon nano tubes;
s4, mixing the modified carbon nano tube with absolute ethyl alcohol in proportion, dissolving the modified carbon nano tube with the proportion of 0.1g in 150ml of absolute ethyl alcohol solution, and cleaning the solution by an ultrasonic cleaner to obtain modified carbon nano tube dispersion liquid;
s5, adhering the phenyl silicone crude rubber composite foam material layer to a stainless steel positive plate, putting the phenyl silicone crude rubber composite foam material layer and another stainless steel negative plate into the modified carbon nano tube dispersion liquid in parallel, introducing a voltage of 20V between the two electrodes, and performing electrophoresis for 40 min; the distance between the negative plate and the positive plate is 8 mm;
s6, baking the phenyl silicone crude rubber composite foam material layer processed in the steps for 10min at 80 ℃ to obtain the flexible pressure-sensitive composite material.
Further, the modified preparation method of the carbon nano tube comprises the following steps:
s31, weighing a certain mass of carbon nanotubes;
s32, measuring the concentrated nitric acid with the weight percentage concentration of 63.01% by using the measuring cylinder, introducing the concentrated nitric acid into the beaker, measuring the concentrated sulfuric acid with the weight percentage concentration of 98.08% by using the measuring cylinder, slowly pouring the concentrated nitric acid into the beaker along the wall of the beaker, and continuously stirring by using a glass rod to accelerate heat dissipation;
s33, pouring the carbon nano tube to be modified into the beaker and mixing evenly;
s34, pouring the liquid in the beaker in the previous step into a flask, putting the flask into a magnetic stirring oil bath pot, heating to a temperature of more than 100 ℃, and timing for 1h under the condition of keeping the temperature;
s35, cooling the solution in the flask in the previous step, pouring the cooled solution into a beaker filled with deionized water, and repeatedly performing suction filtration by using the deionized water until the carbon nano tube is neutral;
and S36, drying and grinding the carbon nano tube to finish the modification of the carbon nano tube.
The performance of the flexible pressure sensor is verified, examined and tested, the test curve and the test result are shown in the following drawings in detail, and the specific test process is described as follows:
as shown in fig. 4, SEM pictures of the flexible pressure sensitive composite based on the silicon foam cushion layer are shown, showing the microstructure of the dense combination of the modified carbon nanotubes and the silicon foam cushion layer;
as shown in fig. 5, the response time of the flexible pressure sensor based on silicon foam cushion with piezoresistive effect is shown, the response time of the pressure sensor is about 105ms when pressure is applied, and the response time of the pressure sensor is about 38ms when pressure is unloaded;
as shown in fig. 6, the electrical performance characteristics of the flexible pressure sensor based on a silicon foam cushion layer of the present application are shown, which is a response curve of current versus voltage at a given pressure load (0 MPa, 100KPa, 500KPa, 1MPa, 2MPa, and 3MPa, respectively) at normal temperature. It can be known from the figure that the current can linearly respond to the change of the working voltage for different given pressure loads, so that the sensing device has good working stability when different working voltages are applied at normal temperature.
As shown in fig. 7, the electrical performance characteristics of the flexible pressure sensor based on the silicon foam cushion layer of the present application are demonstrated, and the pressure sensor has good cycle stability by a current relative change value versus time response curve under multiple cycles, which is obtained by rapidly releasing after a certain pressure is continuously and periodically given.
As shown in fig. 8, the electrical performance characteristics of the flexible pressure sensor based on the silicon foam cushion layer of the present application are shown, the pressure sensor gives a constant pressure of 2V under a given pressure load at normal temperature, and the variation curve of the relative variation value of the current to the pressure is finally measured by controlling the magnitude of the applied pressure. It can be seen that the pressure sensor has better linearity.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the technical principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (9)

1. A flexible pressure sensor, comprising:
a flexible pressure sensitive functional layer; the flexible pressure-sensitive functional layer comprises a phenyl silicone raw rubber composite foam material layer; the phenyl silicone crude rubber composite foam material layer is internally formed into a microporous structure, a plurality of through holes are formed through the phenyl silicone crude rubber composite foam material layer, and modified carbon nano tubes are polymerized and deposited on the surfaces of the microporous structure, the through holes and the phenyl silicone crude rubber composite foam material layer;
a flexible copper foil electrode; the two layers of flexible copper foil electrodes are respectively connected and arranged on two sides of the flexible pressure-sensitive functional layer.
2. The flexible pressure sensor of claim 1, further comprising a flexible protective encapsulation layer, wherein the two layers of flexible protective encapsulation layers are combined for encapsulation of the flexible pressure sensitive functional layer and the flexible copper foil electrode.
3. The flexible pressure sensor of claim 2, wherein the flexible protective packaging layer is a polyimide film having a thickness of 0.01mm to 1 mm.
4. The flexible pressure sensor according to claim 1, wherein the flexible copper foil electrode is made of copper foil, gold foil or silver foil; the thickness of the flexible copper foil electrode is 0.01 mm-1 mm.
5. The flexible pressure sensor of claim 1, wherein the flexible pressure sensitive functional layer has a thickness of 0.1mm to 3 mm.
6. The preparation method of the flexible pressure sensor is characterized by comprising the following steps:
a1, preparing a flexible pressure-sensitive functional layer;
a2, mounting flexible copper foil electrodes: cutting the flexible copper foil electrode layer, reserving a structure for leading out a lead at a pin, and placing the flexible pressure-sensitive functional layer between the two layers of flexible copper foil electrode layers, wherein the area of the flexible copper foil electrode layer is smaller than that of the flexible pressure-sensitive functional layer;
a3, packaging of flexible pressure sensor: respectively cutting the flexible protection packaging layer into a first packaging layer serving as a flexible functional layer and a second packaging layer serving as a lead, arranging adhesive on one surface of the two first packaging layers, adhering the first packaging layers to the electrode layer and the peripheral edge of the flexible functional layer exposed beyond the electrode layer, and mutually bonding and sealing the edges of the two first packaging layers; and in addition, the lead close to the flexible copper foil electrode is packaged through two second packaging layers.
7. The flexible pressure sensor of claim 6, wherein excess air between the two flexible protective packaging layers is excluded during packaging of the flexible pressure sensor.
8. The flexible pressure sensor of claim 6, wherein preparing the flexible pressure sensitive functional layer comprises the steps of:
s1, taking a solid phenyl silicone crude rubber composite foam material with a certain thickness;
s2, processing a plurality of micro through holes on the silicon foam sheet by adopting a micro processing technology;
s3, taking a certain amount of carbon nano tubes and modifying the carbon nano tubes;
s4, mixing the modified carbon nano tube with absolute ethyl alcohol in proportion, dissolving the modified carbon nano tube with the proportion of 0.1g in 150ml of absolute ethyl alcohol solution, and cleaning the solution by an ultrasonic cleaner to obtain modified carbon nano tube dispersion liquid;
s5, adhering the phenyl silicone crude rubber composite foam material layer to a stainless steel positive plate, putting the phenyl silicone crude rubber composite foam material layer and another stainless steel negative plate into the modified carbon nano tube dispersion liquid in parallel, introducing a voltage of 5-30V between the two electrodes, and performing electrophoresis for 0.5-4 h;
s6, baking the phenyl silicone crude rubber composite foam material layer processed in the steps at 80-100 ℃ for 5-10 min to obtain the flexible pressure-sensitive composite material.
9. The preparation method of the phenyl silicone crude rubber-based flexible pressure-sensitive composite material according to claim 8, wherein the preparation method of the carbon nanotube by modification comprises the following steps:
s31, weighing a certain mass of carbon nanotubes;
s32, measuring the concentrated nitric acid with the weight percentage concentration of 63.01% by using the measuring cylinder, introducing the concentrated nitric acid into the beaker, measuring the concentrated sulfuric acid with the weight percentage concentration of 98.08% by using the measuring cylinder, slowly pouring the concentrated nitric acid into the beaker along the wall of the beaker, and continuously stirring by using a glass rod to accelerate heat dissipation;
s33, pouring the carbon nanotubes to be modified into the beaker and mixing uniformly;
s34, pouring the liquid in the beaker in the previous step into a flask, putting the flask into a magnetic stirring oil bath pot, heating to a temperature of more than 100 ℃, and timing for 1h under the condition of keeping the temperature;
s35, cooling the solution in the flask in the previous step, pouring the cooled solution into a beaker filled with deionized water, and repeatedly performing suction filtration by using the deionized water until the carbon nano tube is neutral;
and S36, drying and grinding the carbon nano tube to finish the modification of the carbon nano tube.
CN202210081978.XA 2022-01-24 2022-01-24 Flexible pressure sensor and preparation method thereof Pending CN114459640A (en)

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Citations (7)

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Publication number Priority date Publication date Assignee Title
CN105670297A (en) * 2016-01-28 2016-06-15 深圳市慧瑞电子材料有限公司 Conductive rubber material for flexible sensors as well as preparation method and application of conductive rubber material
CN106336668A (en) * 2016-09-29 2017-01-18 中国工程物理研究院核物理与化学研究所 Self-adhesion silicone rubber foam material and preparation method thereof
CN107247082A (en) * 2017-05-11 2017-10-13 贵州民族大学 A kind of preparation method based on pulse electrodeposition carbon nano tube modified electrode
CN109520646A (en) * 2018-11-27 2019-03-26 安徽大学 Highly sensitive condenser type flexible touch sensation sensor and preparation method thereof based on three-dimensional porous micro-structure compound medium layer
JP2019128340A (en) * 2018-01-19 2019-08-01 實 佐々木 Sheet-like load sensor
CN110305482A (en) * 2018-12-06 2019-10-08 湖北工业大学 A kind of preparation of cyclic tension method mixes filler/quick conducing composite material of silicon rubber flexible force and preparation method thereof
CN113340484A (en) * 2021-05-20 2021-09-03 电子科技大学 Wide-range flexible resistance type pressure sensor and preparation method thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105670297A (en) * 2016-01-28 2016-06-15 深圳市慧瑞电子材料有限公司 Conductive rubber material for flexible sensors as well as preparation method and application of conductive rubber material
CN106336668A (en) * 2016-09-29 2017-01-18 中国工程物理研究院核物理与化学研究所 Self-adhesion silicone rubber foam material and preparation method thereof
CN107247082A (en) * 2017-05-11 2017-10-13 贵州民族大学 A kind of preparation method based on pulse electrodeposition carbon nano tube modified electrode
JP2019128340A (en) * 2018-01-19 2019-08-01 實 佐々木 Sheet-like load sensor
CN109520646A (en) * 2018-11-27 2019-03-26 安徽大学 Highly sensitive condenser type flexible touch sensation sensor and preparation method thereof based on three-dimensional porous micro-structure compound medium layer
CN110305482A (en) * 2018-12-06 2019-10-08 湖北工业大学 A kind of preparation of cyclic tension method mixes filler/quick conducing composite material of silicon rubber flexible force and preparation method thereof
CN113340484A (en) * 2021-05-20 2021-09-03 电子科技大学 Wide-range flexible resistance type pressure sensor and preparation method thereof

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