CN109520646A - Highly sensitive condenser type flexible touch sensation sensor and preparation method thereof based on three-dimensional porous micro-structure compound medium layer - Google Patents
Highly sensitive condenser type flexible touch sensation sensor and preparation method thereof based on three-dimensional porous micro-structure compound medium layer Download PDFInfo
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Abstract
The invention discloses the highly sensitive condenser type flexible touch sensation sensors and preparation method thereof based on three-dimensional porous micro-structure compound medium layer, it is in the upper of three-dimensional porous micro-structure compound medium layer, lower surface all sets gradually flexible isolating layer, flexible plate and flexible cover sheet, three-dimensional porous micro-structure compound medium layer is using polyurethane sponge as template, using graphene/multi-walled carbon nanotube/silicon rubber conducing composite material as the quick composite material of power, by impregnating package graphene/multi-walled carbon nanotube/silicon rubber composite conducting material in polyurethane sponge three-dimensional framework surface layer, self assembly obtains.Condenser type flexible touch sensation sensor of the invention has good flexible, detection sensitivity and dynamic response characteristic, and the highly sensitive flexible touch sensation sensor design to apply towards intelligent robot electronic skin provides thinking.
Description
Technical field
The invention belongs to flexible touch sensation sensor fields, and in particular to one kind is based on three-dimensional porous micro-structure compound medium layer
Highly sensitive condenser type flexible touch sensation sensor and preparation method thereof, be used as electronic skin and realize tactilely-perceptible.
Background technique
Electronic skin (e-skin) is one of forefront direction of intellectual material and sensor research and contemporary electronic letter
The emerging field for ceasing industry development has important application value in fields such as artificial intelligence, communication amusement, medical treatment & healths.It is soft
Property touch sensor is that robot perception external environment information is only second to regard as the important component in electronic skin research
A kind of important channel felt is that robot realizes one of the necessary medium directly interacted with external environment or object, development tool
The electronic skin of tactile perceptional function, which explores physical world to the following intelligent robot, has important scientific meaning and application
Value.
With the development of science and technology and process for producing is continuously improved, in the side such as functional structure, external appearance characteristic
Propose higher demand in face of robot touch sensor, have flexibility, wearing comfort, high sensitivity, high stability with
And can large area tactilely-perceptible the features such as flexible touch sensation sensor become electronic skin research hotspot.Traditional silicon substrate, metal
Strain chip robot touch sensor flexible, ductility and in terms of there are certain drawbacks, by nanometer
Conductive material is filled in the preparation quick conducing composite material of power in flexible substrate and is widely used in flexible touch sensation sensor design.
Carbon material, especially carbon nanotube, graphene can be assembled into a variety of macrostructures, including one-dimensional fiber, two-dimensional film
With three-dimensional block structure, there are the properties such as excellent electricity, mechanics, calorifics and good flexible, stability, assign flexible pass
Sensor high sensitivity and excellent stability prepare the quick composite conducting material of power based on carbon based nano-material, sense in softness haptic perception
Significant role is played in device research.
Different according to working principle, flexible touch sensation sensor can be roughly divided into photo-electric, piezoelectric type, resistance-type, condenser type
Etc. several classes.High sensitivity, high-precision, the speed of response are fast, sluggishness is small, are easily integrated because having for condenser type flexible touch sensation sensor
Advantage is widely used in intelligent robot electronic skin research.Tradition is existed based on the flexible touch sensation sensor of composite material
The sensitivity of low-pressure area is lower, and in order to improve the sensing capabilities of flexible touch sensation sensor, domestic and international scientific research personnel is in sensitive material
System and sensing unit structure design aspect continuously attempt to, and are hoisting machine people's electronics by the way that micro-structure is arranged in tactile sensing layer
A kind of common method of skin touch detection sensitivity.Common micro-structure mainly has pyramid, tentaculiform, concavo-convex, micropin
Structure etc., in general, generally requiring complicated process flow in its preparation process when sensitive layer designs micro-structure, such as photoetching is splashed
It penetrates, be deposited, etch, and exist and the drawbacks such as be not easy to be mass produced.
In recent years, three-dimensional porous shape micro-structure composite conducting material becomes machine with its unique electric property and mechanical property
The research hotspot of device people's flexible electronic skin, common three-dimensional porous micro-structure composite conducting material preparation method have: vacuum is cold
Freeze seasoning, chemical vapour deposition technique and dipping pack etc..Vacuum freeze-drying method, also referred to as lyophilization, principle be by
Wet stock or solution are frozen into solid-state under lower temperature (- 50 DEG C~-10 DEG C), then make it at vacuum (1.3~12Pa)
In moisture without liquid to be directly sublimed into gaseous state dry to achieve the purpose that.Shu Wan et al. utilizes lyophilization
Graphene oxide foam is prepared, and based on the excellent elasticity of graphene oxide foam and the features such as high relative dielectric constant, with oxygen
Graphite alkene foam and graphene are that substrate prepares high-performance compound medium layer and flexible electrode respectively, devise a kind of hypersensitive
The condenser type flexible touch sensation sensor of degree is, it can be achieved that compared with high detection sensitivity (~0.8kPa-1), low-detection lower limit (~
0.24Pa), quick response (~100ms) etc..But there are equipment valuableness, energy consumption and materials to be prepared into for vacuum freeze-drying method
This high drawback.Chemical vapor deposition (CVD) is usually using three-dimensional foam nickel material as template, the chemical vapor deposition on three-dimensional framework
The product conductive materials such as graphene, then the graphene of three-dimensional porous micro-structure can be obtained by the chemical etching nickel skeleton that defoams
Conducting foam.Huang Wei team, advanced material research institute, Nanjing University of Technology is prepared for three-dimensional porous conduction by chemical vapor deposition
Material, and be applied to flexible extensible touch sensor, it can be achieved that high sensitivity (coefficient of strain GF=35), quick response (~
30ms), good stability (cycle-index > 5000) tactilely-perceptible function.But generally there are deposition rates for chemical vapor deposition not
High, deposition process is easy to pollute film surface, environment, and to equipment, often there are also corrosion resistant requirements.Compared to true
Vacuum freecing-dry method and chemical vapour deposition technique, it is direct on three dimensional skeletal structure surface by the self assembly mode for impregnating pack
Three-dimensional porous micro-structure composite conducting material is formed, preparation cost is reduced, simplifies process flow, there is method preparation letter
List is conducive to the advantages such as magnanimity preparation.
Based on the excellent mechanical characteristic of three-dimensional porous micro-structure conducing composite material and electrology characteristic design capacitance formula tactile
The compound medium layer of sensor prepares highly sensitive condenser type flexible touch sensation sensor and has obtained the extensive of domestic and international researcher
Concern, and important application value is shown in the fields such as human body physiological parameter monitoring, human-computer interaction and soft robot.
Summary of the invention
To promote the sensitivity of electronic skin tactilely-perceptible, the present invention is using polyurethane sponge three-dimensional framework as template, using certainly
Assemble method, it is multiple by impregnating package graphene/multi-walled carbon nanotube/silicon rubber in polyurethane sponge three-dimensional framework surface layer
It closes conductive material and prepares three-dimensional conductive network, and be used as three-dimensional porous micro-structure compound medium layer, propose a kind of based on three-dimensional
Highly sensitive condenser type flexible touch sensation sensor of porous microstructure compound medium layer and preparation method thereof, it is intended to solve existing flexibility
The problems such as touch sensor sensitivity is low, stability is poor and compound medium layer micro-structure preparation process is cumbersome, and pass through regulation
The electrology characteristic and mechanical characteristic of three-dimensional porous micro-structure compound medium layer are the tactile feel of electronic skin under different application scene
Know and a kind of possible designs scheme is provided.
The present invention solves technical problem, adopts the following technical scheme that
The present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer, special
Point is: the condenser type flexible touch sensation sensor can be equivalent to the parallel-plate of pole plate spacing and effective dielectric constant synergistic effect
Capacitor, the upper and lower surfaces of three-dimensional porous micro-structure compound medium layer be all disposed with flexible isolating layer, flexible plate and
Flexible cover sheet；
The three-dimensional porous micro-structure compound medium layer is using polyurethane sponge as template, with graphene/multi-wall carbon nano-tube
Pipe/silicon rubber composite conducting material is the quick composite material of power, is wrapped up by impregnating in polyurethane sponge three-dimensional framework surface layer
Graphene/multi-walled carbon nanotube/silicon rubber conducing composite material, self assembly obtain.
The quick composite material of power is used in combination with two-dimensional graphene and one-dimensional multi-walled carbon nanotube two-phase conductive material, is scattered in
In silicone rubber matrix, it is quick that the uniformly dispersed and power of conductive phase in the base is promoted using the synergistic effect between two-phase conductive material
The electricity network stabilization of composite material.Wherein, the mass ratio of two-dimensional graphene, one-dimensional multi-walled carbon nanotube and silicon rubber is 1:
2~3:20~30, preferably 1:2.5:20.
Using PDMS as material, the flexible plate is with organosilicon conductive silver glue by the flexible isolating layer and flexible cover sheet
Material.
Highly sensitive condenser type flexible touch sensation sensor of the invention is based on pole plate spacing and effective dielectric constant collaboration is made
With: under haptic force effect, three-dimensional porous micro-structure compound medium layer is compressed, on the one hand, on condenser type flexible touch sensation sensor
Bottom crown spacing reduces, and on the other hand, three-dimensional porous micro-structure compound medium layer electrology characteristic occurs, so as to cause complex media
Layer effective dielectric constant changes.Synergistic effect improves condenser type softness haptic perception between pole plate spacing and effective dielectric constant
Transducer sensitivity.
Selection graphene and multi-walled carbon nanotube two-phase conductive filler filled silicon rubber prepare composite conducting material, graphene
Specific surface area be far longer than carbon nanotube, when graphene/carbon nano-tube is scattered in silicone rubber matrix, carbon nanotube-graphite
Alkene lamella contact probability is higher than the contact of carbon nanotube-carbon nanotube, weakens the agglomeration between carbon nanotube.This
Outside, the carbon nanotube that may act as " bridge " effect is distributed with around graphene sheet layer, can be connected to apart from farther away graphene sheet layer
Between gap, while but also graphene sheet layer is not easy to stack again, graphene and carbon nanotube play the work obstructed each other
With finally obtaining good dispersion in silicone rubber matrix.Synergistic effect between one-dimensional electric phase and two-dimentional conductive phase, not only
Conducive to conductive phase in the base evenly dispersed, meanwhile, be conducive to the stabilization of the electricity network of the quick composite conducting material of lifting force
Property.
The present invention is based on the systems of the highly sensitive condenser type flexible touch sensation sensor of three-dimensional porous micro-structure compound medium layer
Make method, includes the following steps:
Step 1 prepares three-dimensional porous micro-structure compound medium layer
11, graphene/multi-walled carbon nanotube suspension is prepared
It disperses graphene and multi-walled carbon nanotube in organic solvent naphtha, ultrasonic disperse 1h, then magnetic agitation 1h,
Obtain evenly dispersed graphene/multi-walled carbon nanotube suspension；
12, graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution is prepared
Silicon rubber, ultrasonic disperse 1h, then magnetic agitation 1h are added in graphene/multi-walled carbon nanotube suspension, obtains
Evenly dispersed graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution；
13, three-dimensional porous micro-structure compound medium layer is prepared
Firstly, being placed in centrifuge with deionized water clean polyurethane sponge and removing excessive moisture, revolving speed is set as
1000rpm, repeatedly, to remove polyurethane sponge surface impurity, naturally dry is simultaneously cut into required size；
Then soaking-centrifugation-curing process is carried out to pretreated polyurethane sponge: by pretreated polyurethane sea
Silk floss is immersed in graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution and is repeatedly squeezed, and makes graphene/multi-wall carbon nano-tube
Pipe/silicon rubber composite conducting solution comes into full contact with polyurethane sponge three-dimensional framework surface；It will be in graphene/multi-wall carbon nano-tube
Polyurethane sponge after impregnating in pipe/silicon rubber composite conducting solution, which is placed on centrifuge, to be centrifuged, and revolving speed is set as 600rpm,
To remove extra graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution；Polyurethane sponge is placed in 60 DEG C of vacuum again
Drying box solidification；
Repeat multiple soaking-centrifugation-curing process, thus by impregnating packing technology layer by layer for graphene/multi wall
Carbon nanometer tube/silicon rubber composite conducting material is attached to polyurethane sponge three-dimensional framework surface, and it is multiple to obtain three-dimensional porous micro-structure
Close dielectric layer；
Step 2, highly sensitive condenser type flexible touch sensation sensor
Three-dimensional porous micro-structure compound medium layer upper and lower surfaces respectively successively spin coating flexible isolating layer, flexible plate and
Flexible cover sheet, thickness is 50 μm, and flexible electrode is drawn on flexible plate, is obtained based on three-dimensional porous micro-structure
Highly sensitive condenser type flexible touch sensation sensor.
Preferably, in step 1, graphene, multi-walled carbon nanotube, silicon rubber and naphtha mass volume ratio be 1g:2~
3g:20~30g:500~800mL.
In the above method, the technological parameters such as package number, conductive phase content, composite conducting solution concentration are impregnated by changing
The regulation to the electrology characteristic and mechanical characteristic of three-dimensional porous micro-structure compound medium layer can be achieved, to meet different application field
Demand of the electronic skin to tactilely-perceptible under scape.
It is template that three-dimensional porous material polyurethane sponge is selected in dipping pack of the invention, by its three-dimensional Skeleton Table
Surface layer layer dipping package composite conducting material has simple process, mechanics to prepare three-dimensional porous micro-structure composite conducting material
The features such as characteristic and electrology characteristic easy-regulating.This method can realize the magnanimity preparation of three-dimensional porous micro-structure conducing composite material,
This three-dimensional porous micro-structure conducing composite material has both the unique mechanical property of polyurethane three-dimensional net structure and conduction is compound
The excellent electricity of material, mechanical property have expanded conducing composite material in flexible electronic device, soft robot, electromagnetic shielding
And the application in the fields such as energy storage material.
Compared with the prior art, the beneficial effects of the present invention are embodied in:
1, highly sensitive condenser type flexible touch sensation sensor of the invention is with three-dimensional porous micro-structure conducing composite material
Elastic composite dielectric layer, by normal using bottom crown spacing upper when flexible touch sensation sensor stress and the effective dielectric of compound medium layer
Synergistic effect between number variation, improves the detection sensitivity of flexible touch sensation sensor.Meanwhile being based on three-dimensional porous micro-structure
The excellent mechanical performance of compound medium layer and electric property, improve the repeated of condenser type flexible touch sensation sensor and dynamic is rung
Answer characteristic.
2, highly sensitive condenser type flexible touch sensation sensor of the invention, using packing technology is impregnated layer by layer, by poly-
Urethane sponge three-dimensional framework surface layer dipping package graphene/multi-walled carbon nanotube/silicon rubber conducing composite material preparation electricity
Appearance formula flexible touch sensation sensor compound medium layer, the electrology characteristic and mechanical characteristic of three-dimensional porous micro-structure compound medium layer can lead to
It crosses the technological parameters such as change dipping package number, conductive phase content, composite conducting solution concentration to be regulated and controled, to realize to electricity
The flexible modulation of appearance formula flexible touch sensation sensor performance, to meet the tactilely-perceptible demand under different application scene.
3, highly sensitive condenser type flexible touch sensation sensor of the invention, using the three dimensional skeletal structure of polyurethane sponge as mould
Plate, compared to the three-dimensional conductives network preparation method such as vacuum freeze-drying method, chemical vapour deposition technique, by impregnating package layer by layer
Self assembly mode directly form three-dimensional porous micro-structure composite conducting material on three dimensional skeletal structure surface, reduce and be prepared into
This, simplify process flow, have that method preparation is simple, is conducive to the advantages such as magnanimity preparation.
4, highly sensitive condenser type flexible touch sensation sensor of the invention, using commercial polyurethane sponge as substrate, carbon system material
Material is conductive phase, and raw materials are cheap, meanwhile, easily meet electronic skin to flexibility, wearing comfort, large area tactile
The requirement of perception.
Detailed description of the invention
Fig. 1 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
Structural schematic diagram, figure label: 1 is flexible cover sheet, and 2 be flexible plate, and 3 be flexible isolating layer, and 4 be three-dimensional porous micro- knot
Structure compound medium layer.
Fig. 2 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
Fractionation structural representation.
Fig. 3 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
Operation principle schematic diagram.
Fig. 4 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
Preparation flow figure.
Fig. 5 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
In three-dimensional porous micro-structure compound medium layer scanning electron microscope diagram.
Fig. 6 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
Relative capacity changes at various pressures.
Fig. 7 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
Step response characteristic.
Fig. 8 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
Repeat property.
Fig. 9 is that the present invention is based on the highly sensitive condenser type flexible touch sensation sensors of three-dimensional porous micro-structure compound medium layer
In three-dimensional porous micro-structure compound medium layer it is different dipping package numbers and impregnation concentrations under electrology characteristic changing rule.
Figure 10 is that the present invention is based on the highly sensitive condenser type softness haptic perception of three-dimensional porous micro-structure compound medium layer sensings
The array structure schematic diagram of device.
Specific embodiment
It elaborates with reference to the accompanying drawing to the embodiment of the present invention, following embodiments are being with technical solution of the present invention
Under the premise of implemented, the detailed implementation method and specific operation process are given, but protection scope of the present invention is not limited to
Following embodiments.
Embodiment 1
As shown in Figure 1, the present embodiment is touched based on the highly sensitive condenser type flexibility of three-dimensional porous micro-structure compound medium layer
Feel sensor, it is in three-dimensional that structure, which can be equivalent to the plane-parallel capacitor of pole plate spacing and effective dielectric constant synergistic effect,
The upper and lower surfaces of porous microstructure compound medium layer 4 are all disposed with flexible isolating layer 3, flexible plate 2 and flexible cover sheet
1, fractionation structural representation is as shown in Figure 2.Wherein: flexible isolating layer 3 and flexible cover sheet 1 are using PDMS as material, flexible pole
Plate 2 is using organosilicon conductive silver glue as material；Three-dimensional porous micro-structure compound medium layer 4 is using polyurethane sponge as template, with stone
Black alkene/multi-walled carbon nanotube/silicon rubber conducing composite material is the quick composite material of power, by polyurethane sponge three-dimensional framework table
Surface layer layer dipping package graphene/multi-walled carbon nanotube/silicon rubber composite conducting material, self assembly obtain.
The working principle of highly sensitive condenser type flexible touch sensation sensor based on three-dimensional porous micro-structure compound medium layer
Schematic diagram is as shown in figure 3, its structure can be equivalent to plane-parallel capacitor.As shown in Fig. 3 (a), under haptic force effect, condenser type
The three-dimensional porous micro-structure compound medium layer stress of flexible touch sensation sensor is compressed: on the one hand, between plane-parallel capacitor pole plate
Away from reduction；On the other hand, the graphene/multi-walled carbon nanotube/silicon rubber for being wrapped in polyurethane sponge three-dimensional framework surface is compound
Since spacing reduction between conductive phase, conductive phase contact probability increase, the quantity of effective conductive path increases conductive material, or multiple
Conductive material interfacial contact is closed, new three-dimensional conductive network is formed, so as to cause three-dimensional porous shape compound medium layer electrology characteristic
It changes, effective dielectric constant changes therewith.Fig. 3 (b) is based on ANSYS finite element emulation software to single 3 D
The stress-strain simulation result of porous microstructure, it can be seen that under haptic force effect, deformation occurs for three dimensional skeletal structure, bone
Frame junction stress is maximum, and the effective conductive path of the quick composite conducting material of the power for being wrapped in skeleton surface is caused to change.
Highly sensitive condenser type flexible touch sensation sensor of the present embodiment based on three-dimensional porous micro-structure compound medium layer
Preparation flow is as shown in Figure 4, the specific steps are as follows:
Step 1 prepares three-dimensional porous micro-structure compound medium layer
11, graphene/multi-walled carbon nanotube suspension is prepared
0.10g graphene and 0.25g multi-walled carbon nanotube are weighed, disperses 50mL organic solvent naphtha for conductive filler
In, successively ultrasonic disperse 1h, magnetic agitation 1h, obtain evenly dispersed graphene/multi-walled carbon nanotube suspension.
12, graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution is prepared
2g silicon rubber, and ultrasonic disperse 1h, magnetic agitation 1h are added in graphene/multi-walled carbon nanotube suspension, obtains
Obtain evenly dispersed graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution.
13, three-dimensional porous micro-structure composite conducting material is prepared
Firstly, being placed in centrifuge with deionized water clean polyurethane sponge and removing excessive moisture, revolving speed is set as
1000rpm is repeated 6 times, and to remove polyurethane sponge surface impurity, naturally dry is simultaneously cut into required size；
Then soaking-centrifugation-curing process is carried out to pretreated polyurethane sponge: by pretreated polyurethane sea
Silk floss is immersed in graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution and is repeatedly squeezed, and makes graphene/multi-wall carbon nano-tube
Pipe/silicon rubber composite conducting solution comes into full contact with polyurethane sponge three-dimensional framework surface；It will be in graphene/multi-wall carbon nano-tube
Polyurethane sponge after impregnating in pipe/silicon rubber composite conducting solution, which is placed on centrifuge, to be centrifuged, and revolving speed is set as 600rpm,
To remove extra graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution；Polyurethane sponge is placed in 60 DEG C of vacuum again
Drying box solidification；
Repeat 6 soaking-centrifugation-curing process, thus by impregnating packing technology layer by layer for graphene/multi wall carbon
Nanotube/silicon rubber composite conducting material is attached to polyurethane sponge three-dimensional framework surface, and it is compound to obtain three-dimensional porous micro-structure
Dielectric layer；
Step 2, highly sensitive condenser type flexible touch sensation sensor
Three-dimensional porous micro-structure compound medium layer upper and lower surfaces respectively successively spin coating flexible isolating layer, flexible plate and
Flexible cover sheet, thickness is 50 μm, and flexible electrode is drawn on flexible plate, is obtained based on three-dimensional porous micro-structure
Highly sensitive condenser type flexible touch sensation sensor.
Fig. 5 is the scanning electron microscope diagram of three-dimensional porous micro-structure compound medium layer obtained by the present embodiment.Fig. 5
It (a) is polyurethane sponge three-dimensional framework scanning electron microscope diagram after pretreatment；Fig. 5 (b) is in polyurethane sponge three-dimensional
Skeleton Table bread wraps up in the scanning electron microscope diagram after graphene/multi-walled carbon nanotube/silicon rubber composite conducting material, can see
Out, graphene/multi-walled carbon nanotube/silicon rubber composite conducting material is uniformly wrapped in polyurethane sponge three-dimensional framework surface；Fig. 5
It (c) is graphene/multi-walled carbon nanotube/silicon rubber composite conducting material scanning electron microscope diagram, it can be seen that graphene/
Multi-walled carbon nanotube conductive phase is dispersed in silicone rubber matrix, and conductive imitate is cooperateed between one-dimensional electric phase and two-dimentional conductive phase
The stability of composite conducting material electricity network should be improved.
For the high sensitivity for characterizing condenser type flexible touch sensation sensor obtained by the present embodiment, condenser type under different pressures is measured
For flexible touch sensation sensor output phase to capacitance variations curve as shown in fig. 6, within the scope of 0-1kPa and 1-8kPa, condenser type is flexible
The sensitivity of touch sensor is respectively 3.42kPa-1And 0.66kPa-1, meanwhile, within the scope of 0-1kPa and 1-8kPa, input
Output characteristics has the characteristics that good linear.
Polyurethane sponge has good resilience, as the template of three-dimensional porous micro-structure compound medium layer, to promotion
Condenser type flexible touch sensation sensor dynamic characteristic is of great significance, further to measure its dynamic response time, to this implementation
Example gained condenser type flexible touch sensation sensor apply stage stimulation, resonse characteristic as shown in fig. 7, the response time be about
38ms.Cyclic loading and unloading is carried out to condenser type flexible touch sensation sensor obtained by the present embodiment, observes its stability and repeatability, is surveyed
As shown in figure 8, adding unloading experiment by about 2200s, condenser type flexible touch sensation sensor remains to stablize output test result, keeps
Good stability.
Fig. 9 is three-dimensional porous micro-structure compound medium layer under different dipping times (Dipping times) and solution concentration
Electrology characteristic changing rule, it can be seen that three-dimensional porous with the increase of dipping time when conductive composite solution concentration is fixed
Micro-structure compound medium layer resistance gradually tends towards stability；Under identical dipping time, different conduction composite solution concentration dipping packages
When polyurethane sponge, three-dimensional porous micro-structure compound medium layer resistance is different, and as dipping time increases, tends to be steady
It is fixed.As it can be seen that can be realized by changing the technological parameters such as dipping package number, conductive phase content, composite conducting solution concentration to three
The regulation of the electrology characteristic and mechanical characteristic of porous microstructure compound medium layer is tieed up, to meet electronics skin under different application scene
Demand of the skin to tactilely-perceptible.
Generally for electronic skin large area tactilely-perceptible function is realized, generally require to carry out battle array to flexible touch sensation sensor
Columnization design.Row-column configuration be tactile sensor arrayization design frequently with a kind of method, for realize large area tactilely-perceptible,
The features such as electronic skin is wearable, sliceable is taken into account, array is carried out to condenser type flexible touch sensation sensor obtained by the present embodiment
Design, array structure schematic diagram is as shown in Figure 10, designs 10 × 10 condenser type softness haptic perception sensor arrays in flexible substrate, respectively
Row, column electrode leads to flexible substrate edge to test and array extension, passes through scanning capacitance formula softness haptic perception one by one and senses battle array
Each tactile sensing unit realizes array tactilely-perceptible in column.
The above is only exemplary embodiment of the present invention, are not intended to limit the invention, all in spirit of the invention
With any modifications, equivalent replacements, and improvements made within principle etc., should all be included in the protection scope of the present invention.
Claims (6)
1. the highly sensitive condenser type flexible touch sensation sensor based on three-dimensional porous micro-structure compound medium layer, it is characterised in that:
The condenser type flexible touch sensation sensor can be equivalent to the plane-parallel capacitor of pole plate spacing and effective dielectric constant synergistic effect,
It is all to be disposed with flexible isolating layer, flexible plate and flexibility in the upper and lower surfaces of three-dimensional porous micro-structure compound medium layer
Protective layer；
The three-dimensional porous micro-structure compound medium layer is using polyurethane sponge as template, with graphene/multi-walled carbon nanotube/silicon
Rubber conducing composite material is the quick composite material of power, by impregnating package graphite in polyurethane sponge three-dimensional framework surface layer
Alkene/multi-walled carbon nanotube/silicon rubber composite conducting material, self assembly obtain.
2. condenser type flexible touch sensation sensor according to claim 1, it is characterised in that: the quick composite material of power is with two
Dimension graphene and one-dimensional multi-walled carbon nanotube two-phase conductive material are used in combination, and are scattered in silicone rubber matrix, utilize two-phase conduction material
Synergistic effect between material promotes the electricity network stabilization of the quick composite material of uniformly dispersed and power of conductive phase in the base.
3. condenser type flexible touch sensation sensor according to claim 1, it is characterised in that: two-dimensional graphene, one-dimensional multi wall
The mass ratio of carbon nanotube and silicon rubber is 1:2~3:20~30.
4. condenser type flexible touch sensation sensor according to claim 1, it is characterised in that: the flexible isolating layer and flexibility
Protective layer is using PDMS as material, and the flexible plate is using organosilicon conductive silver glue as material.
5. the high sensitivity based on three-dimensional porous micro-structure compound medium layer described in a kind of any one of Claims 1 to 4
The production method of condenser type flexible touch sensation sensor, which comprises the steps of:
Step 1 prepares three-dimensional porous micro-structure compound medium layer
11, graphene/multi-walled carbon nanotube suspension is prepared
It disperses graphene and multi-walled carbon nanotube in organic solvent naphtha, ultrasonic disperse 1h, then magnetic agitation 1h, obtains
Evenly dispersed graphene/multi-walled carbon nanotube suspension；
12, graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution is prepared
Silicon rubber, ultrasonic disperse 1h, then magnetic agitation 1h are added in graphene/multi-walled carbon nanotube suspension, obtains uniform
Graphene/multi-walled carbon nanotube of dispersion/silicon rubber composite conducting solution；
13, three-dimensional porous micro-structure compound medium layer is prepared
Firstly, being placed in centrifuge with deionized water clean polyurethane sponge and being removed excessive moisture, revolving speed is set as 1000rpm,
Repeatedly, to remove polyurethane sponge surface impurity, naturally dry is simultaneously cut into required size；
Then soaking-centrifugation-curing process is carried out to pretreated polyurethane sponge: pretreated polyurethane sponge is soaked
Enter in graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution and repeatedly squeeze, makes graphene/multi-walled carbon nanotube/silicon
Rubber composite conducting solution comes into full contact with polyurethane sponge three-dimensional framework surface；It will be in graphene/multi-walled carbon nanotube/silicon rubber
Polyurethane sponge after impregnating in glue composite conducting solution, which is placed on centrifuge, to be centrifuged, and revolving speed is set as 600rpm, to remove
Extra graphene/multi-walled carbon nanotube/silicon rubber composite conducting solution；Polyurethane sponge is placed in 60 DEG C of vacuum ovens again
Solidification；
Repeat multiple soaking-centrifugation-curing process, to receive graphene/multi wall carbon by impregnating packing technology layer by layer
Mitron/silicon rubber composite conducting material is attached to polyurethane sponge three-dimensional framework surface, obtains compound Jie of three-dimensional porous micro-structure
Matter layer；
Step 2, highly sensitive condenser type flexible touch sensation sensor
In upper and lower surfaces respectively successively spin coating flexible isolating layer, flexible plate and the flexibility of three-dimensional porous micro-structure compound medium layer
Protective layer, thickness is 50 μm, and flexible electrode is drawn on flexible plate, obtains the Gao Ling based on three-dimensional porous micro-structure
Quick condenser type flexible touch sensation sensor.
6. production method according to claim 5, it is characterised in that: in step 1, graphene, multi-walled carbon nanotube, silicon rubber
The mass volume ratio of glue and naphtha is 1g:2~3g:20~30g:500~800mL.
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