CN114446750A

CN114446750A - Etching machine

Info

Publication number: CN114446750A
Application number: CN202011208927.6A
Authority: CN
Inventors: 钱强; 袁鸣
Original assignee: Wuxi Xinhan Electronic Technology Co ltd
Current assignee: Wuxi Xinhan Electronic Technology Co ltd
Priority date: 2020-11-03
Filing date: 2020-11-03
Publication date: 2022-05-06

Abstract

The invention discloses an etching machine which comprises a fixed cavity, wherein a hollow cavity is connected to the bottom of the fixed cavity in a penetrating manner, a forward and reverse rotating motor is fixedly arranged in the inner cavity of the hollow cavity, two rotating shafts are arranged at the top of the inner cavity of the fixed cavity, the end part of an output shaft of the forward and reverse rotating motor is in transmission connection with one of the rotating shafts, belt pulleys and a driving gear are fixedly arranged on the outer peripheral surfaces of the two rotating shafts, a transmission belt is connected between the two belt pulleys, and rotating rods are arranged at the four-angle positions of the inner cavity of the fixed cavity. According to the invention, the fixed cavity is supported by the four support legs, the stability of the etching machine body is improved, the forward and reverse rotating motor drives the four rotating rods to rotate in a forward rotation manner, so that the movable plate is driven to move downwards, the fixed cavity is jacked up by the four universal wheels, and the etching machine body is convenient to move, so that the etching machine body can be fixed and moved as required, and the etching machine is good in fixing effect and convenient and fast to move.

Description

Etching machine

Technical Field

The invention relates to the technical field of etching machines, in particular to an etching machine.

Background

A plasma etching machine, also called a plasma etching machine, a plasma plane etching machine, a plasma surface treatment instrument, a plasma cleaning system and the like, wherein the plasma etching is the most common form in dry etching, the principle is that gas exposed in an electron region forms plasma, gas consisting of ionized gas and released high-energy electrons is generated, thereby plasma or ions are formed, ionized gas atoms can release enough force to tightly adhere materials or etching surfaces with surface expulsion force when being accelerated by an electric field, and the plasma cleaning is a light condition of plasma etching to a certain extent, the equipment for carrying out the etching process substantially comprises a reaction chamber, a dry power supply and a vacuum part, a workpiece is sent into the reaction chamber pumped out by a vacuum pump, gas is introduced and is exchanged with the plasma, and the plasma reacts on the surface of the workpiece, the volatile by-products of the reaction are pumped away by the vacuum pump, the plasma etching process is actually a reactive plasma process, and the recent development is that the plasma etching process is installed in a shelf type inside the reaction chamber, the design is flexible, and the user can remove the shelf to configure a proper plasma etching method: reactive plasma (RIE), downstream plasma, and direct plasma, plasma etchers are generally used for processing semiconductor silicon wafers or substrates, and the technology is relatively high.

The prior art has the following defects: the existing etching machine is divided into two types, one type is fixed, the other type is movable, both types have defects, the fixed type is inconvenient to move, the movable type is poor in fixed effect, how to design the etching machine, the fixed effect is good when the etching machine needs to be fixed, the etching machine needs to be convenient to move when the etching machine needs to be moved, and the problem needs to be solved urgently at present.

The above information disclosed in this background section is only for enhancement of understanding of the background of the disclosure and therefore it may contain information that does not constitute prior art that is already known to a person of ordinary skill in the art.

Disclosure of Invention

The invention aims to provide an etching machine, which supports a fixed cavity through four support legs, improves the stability of an etching machine body, enables a forward and reverse rotating motor to rotate forward to drive four rotating rods to rotate, further drives a movable plate to move downwards, and jacks up the fixed cavity through four universal wheels, so that the etching machine body can move conveniently, can be fixed and moved as required, has a good fixing effect, and is convenient to move, so as to solve the problems in the background technology.

In order to achieve the above purpose, the invention provides the following technical scheme: an etching machine comprises a fixed cavity, wherein a hollow cavity is connected to the bottom of the fixed cavity in a penetrating manner, a forward and reverse rotating motor is fixedly arranged in the cavity of the hollow cavity, two rotating shafts are arranged at the top of the cavity of the fixed cavity, the output shaft end part of the forward and reverse rotating motor is in transmission connection with one of the rotating shafts, belt pulleys and driving gears are fixedly arranged on the outer peripheral surfaces of the two rotating shafts, a transmission belt is connected between the two belt pulleys, rotating rods are arranged at the four corners of the cavity of the fixed cavity, driven gears are fixedly arranged at the tops of the four rotating rods, chains are connected between the two driving gears and the two driven gears at corresponding positions, a movable plate is arranged in the cavity of the fixed cavity, sleeves are fixedly arranged at the four corners of the top of the movable plate, the four rotating rods are respectively arranged in the sleeves at corresponding positions in a penetrating manner, and universal wheels are fixedly arranged at the four corners of the bottom of the movable plate, an etching machine body is fixedly arranged at the top of the fixed cavity.

Preferably, first through grooves are fixedly formed in two sides of the bottom of the fixed cavity, and the four first through grooves are respectively formed in the bottoms of the universal wheels at corresponding positions.

Preferably, a second through groove is fixedly formed in the top of the movable plate, and the hollow cavity penetrates through the second through groove.

Preferably, four the bull stick bottom all is fixed and is provided with the external screw thread, four the cover inner wall all is fixed and is provided with the internal thread, four the bull stick is threaded connection respectively in the cover of corresponding position.

Preferably, four the pivot and the fixed chamber top junction of bull stick and fixed chamber top and the pivot and the fixed chamber top junction of keeping away from just reversing motor all are provided with the bearing, four the bull stick and the pivot of keeping away from just reversing motor all rotate with fixed chamber through the bearing and are connected.

Preferably, the middle parts of the inner walls on the two sides of the fixed cavity are fixedly provided with stop blocks.

Preferably, supporting legs are fixedly arranged at the four corners of the bottom of the fixing cavity, and anti-skid pads are fixedly arranged at the bottoms of the four supporting legs.

In the technical scheme, the invention provides the following technical effects and advantages:

realize supporting the fixed chamber through four stabilizer blades, under the effect of slipmat that corresponds the position, the fixed effect in fixed chamber is better, thereby make the etching machine body more stable, positive and negative motor corotation drives two pivots and rotates simultaneously, two pivots and then drive four bull sticks and rotate, make four sleeve pipes drive the fly leaf and move down simultaneously when four bull sticks rotate, four universal wheels are worn out the realization from the first logical inslot that corresponds the position and are fixed chamber jack-up, thereby the removal in fixed chamber of being convenient for under the effect of four universal wheels, and then the etching machine body of being convenient for removes, thereby the etching machine body can realize fixing and removing as required, and fixed effectual, it is convenient to remove.

Drawings

In order to more clearly illustrate the embodiments of the present application or technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings can be obtained by those skilled in the art according to the drawings.

Fig. 1 is a schematic view of the overall structure of the present invention.

FIG. 2 is an enlarged view of portion A of FIG. 1 according to the present invention.

FIG. 3 is a view of the usage scenario of FIG. 1 in accordance with the present invention.

FIG. 4 is a left side sectional view of a partial structure of a fixation chamber of the present invention.

FIG. 5 is a schematic view of the connection of the driving gear, the driven gear and the chain according to the present invention.

Description of reference numerals:

1. a fixed cavity; 2. a hollow cavity; 3. a positive and negative rotation motor; 4. a rotating shaft; 5. a belt pulley; 6. a driving gear; 7. a drive belt; 8. a rotating rod; 9. a driven gear; 10. a chain; 11. a movable plate; 12. a sleeve; 13. a universal wheel; 14. an etching machine body; 15. and (3) a support leg.

Detailed Description

Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the examples set forth herein; rather, these example embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and a repetitive description thereof will be omitted.

Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more example embodiments. In the following description, numerous specific details are provided to give a thorough understanding of example embodiments of the disclosure. One skilled in the relevant art will recognize, however, that the subject matter of the present disclosure can be practiced without one or more of the specific details, or with other methods, components, steps, and so forth. In other instances, well-known structures, methods, implementations, or operations are not shown or described in detail to avoid obscuring aspects of the disclosure.

The invention provides an etching machine as shown in figures 1-5, which comprises a fixed cavity 1, wherein the bottom of the fixed cavity 1 is connected with a hollow cavity 2 in a penetrating way, a forward and reverse rotating motor 3 is fixedly arranged in the inner cavity of the hollow cavity 2, two rotating shafts 4 are arranged at the top of the inner cavity of the fixed cavity 1, the end part of an output shaft of the forward and reverse rotating motor 3 is in transmission connection with one rotating shaft 4, belt pulleys 5 and driving gears 6 are fixedly arranged on the outer peripheral surfaces of the two rotating shafts 4, a transmission belt 7 is connected between the two belt pulleys 5, rotating rods 8 are arranged at four corners of the inner cavity of the fixed cavity 1, driven gears 9 are fixedly arranged at the tops of the four rotating rods 8, chains 10 are connected between the two driving gears 6 and the two driven gears 9 at corresponding positions, a movable plate 11 is arranged in the inner cavity of the fixed cavity 1, sleeves 12 are fixedly arranged at four corners of the top of the movable plate 11, the four rotating rods 8 are respectively arranged in the sleeve 12 in the corresponding positions in a penetrating manner, universal wheels 13 are fixedly arranged at four corners of the bottom of the movable plate 11, and an etching machine body 14 is fixedly arranged at the top of the fixed cavity 1.

Furthermore, in the above technical scheme, first through grooves are fixedly formed in both sides of the bottom of the fixed cavity 1, and the four first through grooves are respectively formed in the bottoms of the universal wheels 13 at the corresponding positions, so that the four universal wheels 13 can conveniently penetrate out.

Further, in the above technical solution, a second through groove is fixedly formed in the top of the movable plate 11, and the hollow cavity 2 is disposed in the second through groove in a penetrating manner, so that the movable plate 11 can move downward.

Further, in the above technical scheme, four bottoms of the rotating rods 8 are all fixedly provided with external threads, four inner walls of the sleeve 12 are all fixedly provided with internal threads, and the four rotating rods 8 are respectively in threaded connection with the corresponding positions in the sleeve 12 to realize threaded transmission.

Further, in the above technical scheme, four the junction of the rotating rod 8 and the top of the fixed cavity 1 and the junction of the rotating shaft 4 far away from the forward and reverse rotating motor 3 and the top of the fixed cavity 1 are provided with bearings, four the rotating rod 8 and the rotating shaft 4 far away from the forward and reverse rotating motor 3 are connected with the fixed cavity 1 through the bearings in a rotating manner, and four rotating rods 8 are connected with the fixed cavity 1 in a rotating manner.

Furthermore, in the above technical solution, the middle parts of the inner walls at both sides of the fixed cavity 1 are both fixedly provided with a stopper, so that the movable plate 11 is limited, and the four sleeves 12 are prevented from rotating out from the rotating rods 8 at the corresponding positions.

Furthermore, in the above technical scheme, four supporting legs 15 are fixedly arranged at four corners of the bottom of the fixed cavity 1, and anti-slip pads are fixedly arranged at the bottoms of the four supporting legs 15, so that the fixed cavity 1 is supported, and the fixed cavity 1 is better fixed under the action of the four anti-slip pads.

The implementation mode is specifically as follows: when the etching machine is in practical use, the fixed cavity 1 is supported by the four support legs 15, the fixed cavity 1 is better fixed under the action of the anti-slip pads at the corresponding positions, so that the etching machine body 14 is more stable, when the etching machine body 14 needs to be moved, the forward and reverse rotating motor 3 is connected with an external power supply through a lead, the forward and reverse rotating motor 3 is connected for forward rotation, the forward and reverse rotating motor 3 drives the two rotating shafts 4 to rotate simultaneously under the action of the two belt pulleys 5 and the transmission belt 7, the two rotating shafts 4 further drive the driving gears 6 at the corresponding positions to rotate, the two driving gears 6 drive the four driven gears 9 and the rotating rods 8 at the corresponding positions to rotate under the action of the two chains 10, the four rotating rods 8 are respectively in threaded connection in the sleeves 12 at the corresponding positions, and the four sleeves 12 drive the movable plate 11 to move downwards simultaneously when the four rotating rods 8 rotate, four universal wheels 13 wear out the realization from the first logical inslot that corresponds the position and will fix 1 jack-up in chamber, thereby be convenient for fixed chamber 1's removal under four universal wheel 13's effect, and then be convenient for etching machine body 14 removes, thereby etching machine body 14 can realize fixing and removing as required, and fixed effectual, it is convenient to remove, the present etching machine that this embodiment has specifically solved and has existed among the prior art divide into two kinds, one kind is fixed, another kind is portable, both all have the shortcoming, fixed removal is inconvenient, the relatively poor problem of portable fixed effect.

This practical theory of operation: realize supporting fixed chamber 1 through four stabilizer blades 15, improve the stability of etching machine body 14, positive reverse motor 3 corotation drives four bull sticks 8 and rotates, and then drives fly leaf 11 downstream, realizes fixing chamber 1 jack-up through four universal wheels 13, and etching machine body 14 of being convenient for removes to make etching machine body 14 can realize fixing and removing as required.

While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and are not to be construed as limiting the scope of the invention.

Claims

1. An etching machine, comprising a fixed cavity (1), characterized in that: the bottom of the fixed cavity (1) is connected with a hollow cavity (2) in a penetrating manner, a forward and reverse rotating motor (3) is fixedly arranged in the inner cavity of the hollow cavity (2), two rotating shafts (4) are arranged at the top of the inner cavity of the fixed cavity (1), the end part of an output shaft of the forward and reverse rotating motor (3) is in transmission connection with one rotating shaft (4), belt pulleys (5) and driving gears (6) are fixedly arranged on the outer peripheral surfaces of the two rotating shafts (4), a transmission belt (7) is connected between the two belt pulleys (5), rotating rods (8) are arranged at four corners of the inner cavity of the fixed cavity (1), driven gears (9) are fixedly arranged at the tops of the four rotating rods (8), chains (10) are connected between the two driving gears (6) and the two driven gears (9) at corresponding positions, and a movable plate (11) is arranged in the inner cavity of the fixed cavity (1), all fixed sleeve pipe (12) that are provided with in fly leaf (11) top four corners position department, four bull stick (8) run through respectively and set up in sleeve pipe (12) of corresponding position, fly leaf (11) bottom four corners position department all fixedly is provided with universal wheel (13), fixed chamber (1) top is fixed and is provided with etching machine body (14).

2. An etching machine according to claim 1, characterized in that: the two sides of the bottom of the fixed cavity (1) are fixedly provided with first through grooves, and the four first through grooves are respectively arranged at the bottoms of the universal wheels (13) at corresponding positions.

3. An etching machine according to claim 1, characterized in that: a second through groove is fixedly formed in the top of the movable plate (11), and the hollow cavity (2) penetrates through the second through groove.

4. An etching machine according to claim 1, characterized in that: four the outer screw thread is all fixed to bull stick (8) bottom, four the internal thread is all fixed to be provided with on sleeve pipe (12) inner wall, four bull stick (8) threaded connection respectively is in sleeve pipe (12) of corresponding position.

5. An etching machine according to claim 1, characterized in that: four rotating rod (8) and fixed chamber (1) top junction and pivot (4) and fixed chamber (1) top junction of keeping away from just reversing motor (3) all are provided with the bearing, four rotating rod (8) and pivot (4) of keeping away from just reversing motor (3) all rotate with fixed chamber (1) through the bearing and are connected.

6. An etching machine according to claim 1, characterized in that: the middle parts of the inner walls at two sides of the fixed cavity (1) are fixedly provided with stop blocks.

7. An etching machine according to claim 1, characterized in that: the four corners of the bottom of the fixed cavity (1) are fixedly provided with support legs (15), and the bottoms of the support legs (15) are fixedly provided with non-slip mats.