CN114442253A - Axial micro-motion adjusting device for optical element - Google Patents
Axial micro-motion adjusting device for optical element Download PDFInfo
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- CN114442253A CN114442253A CN202210243037.1A CN202210243037A CN114442253A CN 114442253 A CN114442253 A CN 114442253A CN 202210243037 A CN202210243037 A CN 202210243037A CN 114442253 A CN114442253 A CN 114442253A
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- steel ball
- hinge
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- lens
- block
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- 230000003287 optical effect Effects 0.000 title claims abstract description 18
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 99
- 239000010959 steel Substances 0.000 claims abstract description 99
- 238000003825 pressing Methods 0.000 claims abstract description 46
- 238000000034 method Methods 0.000 claims description 6
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 claims description 2
- 239000013013 elastic material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
Abstract
The invention discloses an axial micro-motion adjusting device for an optical element, which comprises a lens, a lens seat, a driving assembly and a hinge. The driving component and the hinge are arranged on the lens base, and the hinge is connected with the lens. The driving component drives the hinge to move up and down to realize the axial micro-motion of the lens. The driving assembly comprises a motor, a motor base, a ball head rod, a front pressing block, a rear pressing block, a first steel ball seat, a second steel ball seat, a third steel ball seat, a first steel ball, a second steel ball, a third steel ball, a first wedge-shaped block, a second wedge-shaped block, a third wedge-shaped block, a driving ring, a left guide rail and a right guide rail; the hinge is provided with three steps, namely a first step, a second step and a third step which are respectively connected with the three wedge-shaped blocks, the upper surface of the hinge is connected with the lens, and the lower surface of the hinge is fixedly connected with the lens base. The driving force generated by the motor is transmitted to the hinge through the wedge-shaped block to drive the position change of three moving points of the hinge mechanism, so that the lens is driven to move axially. The invention has high adjusting precision and good repeatability and is easy to install and adjust.
Description
Technical Field
The invention belongs to the technical field of photoetching machines, belongs to the field of integrated circuit equipment manufacture, and particularly relates to an axial micro-motion adjusting device for an optical element.
Background
With the development of large-scale integrated circuits, the demand of high-precision projection lithography machines is increasing. For a high-precision projection lithography machine, the imaging quality of an objective system is reduced due to manufacturing and assembling errors of lenses, and meanwhile, image quality compensation is required according to actual conditions in the actual exposure process, so that the position and the posture of a specific lens in a projection objective are required to be adjusted in real time. And carrying out axial micro-adjustment on part of the lens according to the image quality compensation requirement.
Disclosure of Invention
The invention aims to provide an axial micro-motion adjusting device for an optical element, which has good rigidity and stability, can compensate image quality change caused by lens processing and assembling errors, meets the image quality compensation requirement in the actual exposure process, and ensures the imaging quality of an objective lens.
In order to achieve the purpose, the invention adopts the technical scheme that: an optical element axial micro-adjustment device, comprising: lens, mirror base, drive assembly and hinge. The driving component and the hinge are arranged on the lens base, and the hinge is connected with the lens. The driving component drives the hinge to move up and down to realize the axial micro-motion of the lens. The driving assembly comprises a motor, a motor base, a ball head rod, a front pressing block, a rear pressing block, a first steel ball seat, a second steel ball seat, a third steel ball seat, a first steel ball, a second steel ball, a third steel ball, a first wedge-shaped block, a second wedge-shaped block, a third wedge-shaped block, a driving ring, a left guide rail and a right guide rail; the hinge is provided with three steps, namely a first step, a second step and a third step which are respectively connected with the three wedge-shaped blocks, the upper surface of the hinge is connected with the lens, and the lower surface of the hinge is fixedly connected with the lens base. The driving force generated by the motor is transmitted to the hinge through the wedge-shaped block to drive the position change of three moving points of the hinge mechanism, so that the lens is driven to move axially.
Furthermore, the motor is fixedly connected with the motor base, the shaft end of the motor is in threaded connection with the ball head rod, the ball head rod is located between the front pressing block and the rear pressing block, the gap between the front pressing block and the rear pressing block is adjustable, the ball head at the front end of the ball head rod is fixed by adjusting the interval between the front pressing block and the rear pressing block, and the front pressing block and the rear pressing block are fixed on the driving ring.
Furthermore, the left guide rail and the right guide rail are symmetrically arranged along the driving direction, the long edge direction of the guide rails is along the driving direction, the bottom surfaces of the left guide rail and the right guide rail are respectively fixed on two step surfaces D and E of the mirror base, and the upper surface of the left guide rail and the upper surface of the right guide rail are connected with the driving ring.
The left guide rail and the right guide rail are wide guide rails, and large rigidity in the direction perpendicular to the driving direction is guaranteed.
Further, the first steel ball seat, the second steel ball seat and the third steel ball seat are identical in structural size, the first steel ball, the second steel ball and the third steel ball are identical in structural size, the first wedge block, the second wedge block and the third wedge block are identical in structural size, the first steel ball seat and the third steel ball seat, the first steel ball and the third steel ball, the first wedge block and the third wedge block are symmetrically arranged along the driving direction respectively, and the second steel ball seat, the second steel ball and the second wedge block are located in the driving axis direction.
Furthermore, the first steel ball, the second steel ball and the third steel ball are respectively positioned in cylindrical holes of the first steel ball seat, the second steel ball seat and the third steel ball seat, gaps are reserved, the first steel ball, the second steel ball and the third steel ball are in contact with inclined planes of the first wedge-shaped block, the second wedge-shaped block and the third wedge-shaped block, and the steel balls roll on the inclined planes of the wedge-shaped blocks in the using process.
The first wedge-shaped block, the second wedge-shaped block and the third wedge-shaped block are completely the same in structure, the inclination angle of the inclined plane is 15 degrees, the surface is ground, and abrasion of the first steel ball, the second steel ball and the third steel ball when the first steel ball, the second steel ball and the third steel ball roll on the inclined plane is reduced.
Furthermore, three flexible structures are uniformly distributed on the hinge along the circumference, the three flexible structures are formed by linear cutting processing, and the structures are completely the same. The three flexible structures are all parallelogram structures, so that the rigidity in other directions can be ensured while the axial flexibility is ensured.
Further, the hinge material is made of an elastic material, including but not limited to: 9Cr18 and titanium alloy.
The invention has the beneficial effects that: three flexible structures of the hinge are all parallelogram structures, and the elastic metal material 9Cr18 is adopted, so that the flexibility of the hinge in the axial direction can be effectively ensured. Meanwhile, the symmetrically arranged parallelogram structures restrict the degree of freedom in other directions, so that errors introduced in other directions can be avoided, and higher adjustment precision and repeatability are achieved. In addition, the left guide rail and the right guide rail of the structure adopt wide guide rails, so that the rigidity in the direction perpendicular to the driving direction can be increased, and the device can be ensured to have high stability. Meanwhile, the driving assembly of the device follows the stability principle of a triangle, and the three-point driving hinge is adopted to deform, so that the stability of the structure is further ensured.
Drawings
The invention relates to an axial micro-motion adjusting device of an optical element, which is further elaborated by the specific structural form and the characteristics in the form of attached drawings:
fig. 1 is a schematic view of an axial fine adjustment device of an optical element according to the present invention, in which 1 is a motor, 2 is a motor base, 6.1 is a first steel ball base, 7.1 is a first steel ball, 9 is a driving ring, 10 is a left guide rail, 11 is a right guide rail, 12 is a hinge, 13 is a lens, 14 is a lens base, 400 is an upper surface of the hinge, 500 is a lower surface of the hinge, a is a first step, and C is a third step.
Fig. 2 is a top view of an axial fine adjustment device of an optical element according to the present invention, wherein 1 is a motor, 2 is a motor base, 3 is a ball-end rod, 4 is a front pressing block, 5 is a rear pressing block, 9 is a driving ring, 12 is a hinge, 13 is a lens, 131 is a first through hole, 132 is a second through hole, 133 is a third through hole, 14 is a lens base, D is a first lens step, E is a second lens step, and F is a third lens step.
Fig. 3 is a schematic view of the driving assembly according to the present invention, wherein 1 is a motor, 2 is a motor base, 6.1 is a first steel ball base, 6.2 is a second steel ball base, 6.3 is a third steel ball base, 7.1 is a first steel ball, 7.2 is a second steel ball, 7.3 is a third steel ball, 8.1 is a first wedge, 8.2 is a second wedge, 8.3 is a third wedge, 9 is a driving ring, 10 is a left side guide rail, 11 is a right side guide rail, and 14 is a mirror base.
Fig. 4 is a cross-sectional view of the driving assembly according to the present invention, wherein 1 is a motor, 2 is a motor base, 3 is a ball rod, 4 is a front pressing block, 5 is a rear pressing block, 6.2 is a second steel ball base, 7.2 is a second steel ball, 8.2 is a second wedge-shaped block, 9 is a driving ring, 31 is a screw end, 32 is a ball head, 41 is a first front pressing block mounting hole, 51 is a first rear pressing block mounting hole, 62 is a screw thread, 64 is a cylindrical surface, 82 is an inclined surface, 84 is an upper end surface, and B is a second step.
Fig. 5 is a top view of the front pressing block according to the present invention, where 41 is a first front pressing block mounting hole, 42 is a second front pressing block mounting hole, 43 is a first front side, and 44 is a second front side.
Fig. 6 is a side view of the front press block of the present invention, wherein 45 is a through hole.
Fig. 7 is a top view of the rear pressing block according to the present invention, where 51 is a first rear pressing block mounting hole, 52 is a second rear pressing block mounting hole, 53 is a first rear side, and 54 is a second rear side.
Fig. 8 is a top view of a second wedge block according to the present invention, where 821 is a first counter bore of the second wedge block, 822 is a second counter bore of the second wedge block, 823 is a third counter bore of the second wedge block, and 824 is a fourth counter bore of the second wedge block.
Fig. 9 is a top view of the driving ring according to the present invention, wherein 91 is a first ball seat mounting hole, 92 is a second ball seat mounting hole, 93 is a third ball seat mounting hole, 904 is a first driving mounting hole, 905 is a second driving mounting hole, 906 is a third driving mounting hole, 907 is a fourth driving mounting hole, 908 is a fifth driving mounting hole, 909 is a sixth driving mounting hole, 910 is a seventh driving mounting hole, 911 is an eighth driving mounting hole, 912 is a first mounting threaded hole, 913 is a second mounting threaded hole, 914 is a third mounting threaded hole, and 915 is a fourth mounting threaded hole.
Fig. 10 is a top view of the hinge according to the present invention, wherein 400 is a top surface, 500 is a bottom surface, 1201 is a first hinge threaded hole, 1202 is a second hinge threaded hole, 1203 is a third hinge threaded hole, 1204 is a fourth hinge threaded hole, a is a first step, B is a second step, and C is a third step.
Fig. 11 is a schematic view of a hinge according to the present invention, where 12.1 is a first flexible structure, 12.2 is a second flexible structure, 12.3 is a third flexible structure, 121 is a first countersunk hole, 122 is a second countersunk hole, 123 is a third countersunk hole, 124 is a fourth countersunk hole, 125 is a fifth countersunk hole, 126 is a sixth countersunk hole, 127 is a first hinge threaded hole, 128 is a second hinge threaded hole, 129 is a third hinge threaded hole, a is a first step, B is a second step, C is a third step, H1 is a first through hole, H2 is a second through hole, H3 is a third through hole, H4 is a fourth through hole, H5 is a fifth through hole, H6 is a sixth through hole, H7 is a seventh through hole, H8 is an eighth through hole, H9 is a ninth through hole, H10 is a tenth through hole, H11 is an eleventh through hole, H6 is a sixth through hole, H7 is a seventeenth through hole, H8 is an eighth through hole, H9 is a fifteenth through hole, H5834 is a fifteenth through hole, and H15 is a fifteenth through hole.
Fig. 12 is a schematic diagram of the movement of the first flexible structure mechanism according to the present invention, wherein 15 is a slider, J1 is a first set of hinges, J2 is a second set of hinges, J3 is a third set of hinges, J4 is a fourth set of hinges, J5 is a fifth set of hinges, J6 is a sixth set of hinges, J7 is a seventh set of hinges, and J8 is an eighth set of hinges.
Fig. 13 is a top view of the lens holder according to the present invention, wherein 141 is a first lens holder threaded hole, 142 is a second lens holder threaded hole, 143 is a third lens holder threaded hole, 144 is a fourth lens holder threaded hole, 145 is a fifth lens holder threaded hole, 146 is a sixth lens holder threaded hole, X is a first lens holder step, and Y is a second lens holder step.
Detailed Description
For the purpose of making the objects, aspects and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, fig. 2 and fig. 3, an axial fine adjustment device for an optical element according to the present invention includes a lens, a lens base, a driving assembly and a hinge. The driving component and the hinge are arranged on the lens base, and the hinge is connected with the lens. The driving component drives the hinge to move up and down to realize the axial micro-motion of the lens. The driving assembly comprises a motor 1, a motor base 2, a ball head rod 3, a front pressing block 4, a rear pressing block 5, a first steel ball seat 6.1, a second steel ball seat 6.2, a third steel ball seat 6.3, a first steel ball 7.1, a second steel ball 7.2, a third steel ball 7.3, a first wedge-shaped block 8.1, a second wedge-shaped block 8.2, a third wedge-shaped block 8.3, a driving ring 9, a left guide rail 10 and a right guide rail 11; the hinges 12 are connected above the three wedge blocks, namely the first wedge block 8.1, the second wedge block 8.2 and the third wedge block 8.3, the upper surface 400 of the hinge 12 is connected with the lens 13, and the lower surface 500 is fixedly connected with the lens base 14. The driving force generated by the motor 1 is transmitted to the hinge through the wedge-shaped block to drive the position change of three moving points of the hinge mechanism, so that the lens is driven to move axially. The optical element axial micro-motion adjusting device provided by the invention has the advantages of high adjusting precision, good repeatability and easiness in installation and adjustment.
As shown in fig. 4, 5, 6 and 7, the motor 1 is fixed on the motor base 2, the ball head rod 3 is fixed on the motor 1 through the screw end 31, passes through the through hole 45 of the front compression block 4, and the ball head 32 is tangent to both the front side surface one 43 and the front side surface two 44 of the front compression block 4 and the rear side surface one 53 and the rear side surface two 54 of the rear compression block 5. The first front pressing block mounting hole 41 and the second front pressing block mounting hole 42 of the front pressing block 4 and the first rear pressing block mounting hole 51 and the second rear pressing block mounting hole 52 of the rear pressing block 5 are column hole notches, so that the gaps between the first front pressing block mounting hole and the second front pressing block mounting hole are adjustable, and the first front pressing block mounting hole and the second rear pressing block mounting hole are guaranteed to be always in contact with the ball head 32 of the ball head rod 3. The front presser mounting hole one 41 and the front presser mounting hole two 42 of the front presser 4 are respectively connected to the first mounting screw hole 912 and the second mounting screw hole 913 of the drive ring 9, and the rear presser mounting hole one 51 and the rear presser mounting hole two 52 of the rear presser 5 are connected to the fourth mounting screw hole 915 and the third mounting screw hole 914 of the drive ring 9 by bolting, whereby the front presser 4 and the rear presser 5 are fixed to the drive ring 9.
As shown in fig. 3, 4, 8, 9 and 10, the three steel ball seats, i.e., the first steel ball seat 6.1, the second steel ball seat 6.2 and the third steel ball seat 6.3, have the same structural dimensions and installation manners, the three steel balls, i.e., the first steel ball 7.1, the second steel ball 7.2 and the third steel ball 7.3, have the same structural dimensions and installation manners, and the three wedge blocks, i.e., the first wedge block 8.1, the second wedge block 8.2 and the third wedge block 8.3, have the same structural dimensions and installation manners, and the second steel ball seat 6.2, the second steel ball 7.2 and the second wedge block 8.2 are taken as examples for explanation. The second steel ball seat 6.2 is connected with the second steel ball seat mounting hole 92 of the driving ring 9 through the screw thread 62, the second steel ball 7.2 is placed in the cylindrical surface 64 of the second steel ball seat 6.2 and is tangent to the inclined surface 82 of the second wedge-shaped block 8.2, and the second steel ball 7.2 rolls on the inclined surface 82 of the second wedge-shaped block 8.2 in the working process. The second wedge-shaped block 8.2 is provided with a first wedge-shaped block counter bore 821, a second wedge-shaped block counter bore second 822, a second wedge-shaped block counter bore third 823 and a second wedge-shaped block counter bore fourth 824, the hinge 12 is provided with a first hinge threaded hole 1201, a second hinge threaded hole 1202, a third hinge threaded hole 1203 and a fourth hinge threaded hole 1204, and the first hinge threaded hole 1201, the second hinge threaded hole 1202, the third hinge threaded hole 1203 and the fourth hinge threaded hole 1204 are respectively connected through screws to fixedly connect the upper end face 84 of the second wedge-shaped block 8.2 with the second step B of the hinge 12.
As shown in fig. 11 and 12, the hinge 9 has three flexible structures (i.e., a first flexible structure 12.1, a second flexible structure 12.2, and a third flexible structure 12.3), and the three structures are completely the same, and the first flexible structure 12.1 is taken as an example for explanation. The first flexible structure 12.1 includes 16 through holes H1, H2, H3, H4, H5, H6, H7, H8, H9, H10, H11, H12, H13, H14, H15, and H16, wherein the first through holes H1 to eighth through holes H8 and the ninth through holes H9 to sixteenth through holes H16 are symmetrically arranged about the third step C, and the structure sizes are completely the same. The first through hole H1 and the second through hole H2 form a first group of hinges J1, the third through hole H3 and the fourth through hole H4 form a second group of hinges J2, the fifth through hole H5 and the sixth through hole H6 form a third group of hinges J3, the seventh through hole H7 and the eighth through hole H8 form a fourth group of hinges J4, and so on, the ninth through hole H9 to the sixteenth through hole H16 form a fifth group of hinges J5, a sixth group of hinges J6, a seventh group of hinges J7 and an eighth group of hinges J8, and the eight groups of hinges form two symmetrically arranged parallelogram structures to guide the movement of the slider 15.
As shown in fig. 2, 10, 11 and 13, the upper surface 400 of the hinge 12 is provided with a first hinge screw hole 127, a second hinge screw hole 128 and a third hinge screw hole 129, and the lens 13 is provided with a first through hole 131, a second through hole 132 and a third through hole 133, which are respectively screwed to fix the lens 13 to the hinge 12. The upper surface 400 of the hinge 12 is provided with a first counter bore 121, a second counter bore 122, a third counter bore 123, a fourth counter bore 124, a fifth counter bore 125, and a sixth counter bore 126, and the lens holder 14 is provided with a first lens holder threaded hole 141, a second lens holder threaded hole 142, a third lens holder threaded hole 143, a fourth lens holder threaded hole 144, a fifth lens holder threaded hole 145, and a sixth lens holder threaded hole 146, which are respectively connected by screws to fix the hinge 12 to the lens holder 14.
As shown in fig. 13, two steps (step X, step Y) are provided on the mirror base 14, and the left side rail 10 and the right side rail 11 are respectively mounted on the step X and the step Y of the mirror base 14.
The detailed design examples of the present invention are only used to illustrate the advantages and rationality of the present invention, and all the examples of the optimized design based on the technical solution of the present invention belong to the scope of the present invention. Techniques and principles not specifically set forth herein are well known to those of skill in the art.
Claims (7)
1. An optical element axial micro-motion adjusting device is characterized in that: the device includes: the lens driving mechanism comprises a lens, a lens seat, a driving assembly and a hinge, wherein the driving assembly and the hinge are installed on the lens seat, the hinge is connected with the lens, the driving assembly drives the hinge to move up and down to realize axial micro motion of the lens, and the driving assembly comprises a motor (1), a motor seat (2), a ball head rod (3), a front pressing block (4), a rear pressing block (5), a first steel ball seat (6.1), a second steel ball seat (6.2), a third steel ball seat (6.3), a first steel ball (7.1), a second steel ball (7.2), a third steel ball (7.3), a first wedge block (8.1), a second wedge block (8.2), a third wedge block (8.3), a driving ring (9), a left guide rail (10) and a right guide rail (11); be provided with three step on hinge (12), be first step (A) respectively, second step (B), third step (C), respectively with first wedge (8.1), second wedge (8.2), third wedge (8.3) are connected, hinge (12) upper surface (400) are connected with lens (13), lower surface (500) and microscope base (14) fixed connection, the drive power that motor (1) produced transmits the hinge through the wedge, drive the three motion point position change of hinge mechanism, thereby drive lens axial motion.
2. An optical element axial fine adjustment device according to claim 1, characterized in that: the motor (1) is fixedly connected with the motor base (2), the shaft end of the motor (1) is in threaded connection with the ball head rod (3), the ball head rod (3) is located between the front pressing block (4) and the rear pressing block (5), the gap between the front pressing block (4) and the rear pressing block (5) is adjustable, the front end ball head of the ball head rod (3) is fixed by adjusting the interval between the front pressing block (4) and the rear pressing block (5), and the front pressing block (4) and the rear pressing block (5) are fixed on the driving ring (9).
3. An optical element axial fine adjustment device according to claim 1, characterized in that: the left guide rail (10) and the right guide rail (11) are symmetrically arranged along the driving direction, the long edge direction of the guide rails is along the driving direction, the bottom surfaces of the left guide rail (10) and the right guide rail (11) are respectively fixed on two step surfaces X and Y of the mirror base (14), and the upper surface of the left guide rail and the upper surface of the right guide rail are connected with the driving ring.
4. An optical element axial fine adjustment device according to claim 1, characterized in that: the first steel ball seat (6.1), the second steel ball seat (6.2) and the third steel ball seat (6.3) are identical in structural size, the first steel ball (7.1), the second steel ball (7.2) and the third steel ball (7.3) are identical in structural size, the first wedge block (8.1), the second wedge block (8.2) and the third wedge block (8.3) are identical in structural size, the first steel ball seat (6.1) and the third steel ball seat (6.3), the first steel ball (7.1) and the third steel ball (7.3), the first wedge block (8.1) and the third wedge block (8.3) are symmetrically arranged in the driving direction respectively, and the second steel ball seat (6.2), the second steel ball (7.2) and the second wedge block (8.2) are located in the driving axis direction.
5. An optical element axial fine adjustment device according to claim 1, characterized in that: the first steel ball (7.1), the second steel ball (7.2) and the third steel ball (7.3) are respectively positioned in cylindrical holes of the first steel ball seat (6.1), the second steel ball seat (6.2) and the third steel ball seat (6.3), gaps are reserved, the first steel ball (7.1), the second steel ball (7.2) and the third steel ball (7.3) are in inclined plane contact with the first wedge-shaped block (8.1), the second wedge-shaped block (8.2) and the third wedge-shaped block (8.3), and the steel balls roll on the inclined planes of the wedge-shaped blocks in the using process.
6. An optical element axial fine adjustment device according to claim 1, characterized in that: three flexible structures (12.1, 12.2 and 12.3) are uniformly distributed on the hinge (12) along the circumference, the three flexible structures (12.1, 12.2 and 12.3) are formed by linear cutting, the structures are completely the same, and the three flexible structures (12.1, 12.2 and 12.3) are all parallelogram structures, so that the rigidity in other directions can be ensured while the axial flexibility is ensured.
7. An optical element axial fine adjustment device according to claim 1, characterized in that: the hinge material is made of an elastic material and comprises: 9Cr18 and titanium alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210243037.1A CN114442253A (en) | 2022-03-11 | 2022-03-11 | Axial micro-motion adjusting device for optical element |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210243037.1A CN114442253A (en) | 2022-03-11 | 2022-03-11 | Axial micro-motion adjusting device for optical element |
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| CN114442253A true CN114442253A (en) | 2022-05-06 |
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| CN202210243037.1A Pending CN114442253A (en) | 2022-03-11 | 2022-03-11 | Axial micro-motion adjusting device for optical element |
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| CN106547063A (en) * | 2015-09-17 | 2017-03-29 | 上海微电子装备有限公司 | A kind of movable lens adjustment mechanism |
| CN107329230A (en) * | 2017-08-31 | 2017-11-07 | 重庆博奥新景医学科技有限公司 | A kind of structure adjusted for optical collection camera lens Manual three-dimensional |
| CN108646372A (en) * | 2018-03-28 | 2018-10-12 | 中国科学院光电技术研究所 | A kind of axial regulating mechanism of single-point driving |
| CN213841556U (en) * | 2020-11-28 | 2021-07-30 | 上海辰基电子科技有限公司 | Drying machine |
| CN215495585U (en) * | 2021-07-16 | 2022-01-11 | 江苏酷腾科教仪器设备有限公司 | Curve bobble presentation device convenient to adjust |
| CN113917644A (en) * | 2021-10-29 | 2022-01-11 | 中国科学院光电技术研究所 | Lens six-degree-of-freedom micro-motion platform |
| CN113917646A (en) * | 2021-11-01 | 2022-01-11 | 中国科学院光电技术研究所 | Three-degree-of-freedom fine adjustment device for movable mirror |
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| CN102590974A (en) * | 2011-01-14 | 2012-07-18 | 上海微电子装备有限公司 | Position fine adjustment device and objective lens adopting same |
| CN102508360A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Plane fine-tuning mechanism device of movable mirror |
| CN106547063A (en) * | 2015-09-17 | 2017-03-29 | 上海微电子装备有限公司 | A kind of movable lens adjustment mechanism |
| CN107329230A (en) * | 2017-08-31 | 2017-11-07 | 重庆博奥新景医学科技有限公司 | A kind of structure adjusted for optical collection camera lens Manual three-dimensional |
| CN108646372A (en) * | 2018-03-28 | 2018-10-12 | 中国科学院光电技术研究所 | A kind of axial regulating mechanism of single-point driving |
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| CN215495585U (en) * | 2021-07-16 | 2022-01-11 | 江苏酷腾科教仪器设备有限公司 | Curve bobble presentation device convenient to adjust |
| CN113917644A (en) * | 2021-10-29 | 2022-01-11 | 中国科学院光电技术研究所 | Lens six-degree-of-freedom micro-motion platform |
| CN113917646A (en) * | 2021-11-01 | 2022-01-11 | 中国科学院光电技术研究所 | Three-degree-of-freedom fine adjustment device for movable mirror |
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Application publication date: 20220506 |