CN113917646A - Three-degree-of-freedom fine adjustment device for movable mirror - Google Patents
Three-degree-of-freedom fine adjustment device for movable mirror Download PDFInfo
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- CN113917646A CN113917646A CN202111291431.4A CN202111291431A CN113917646A CN 113917646 A CN113917646 A CN 113917646A CN 202111291431 A CN202111291431 A CN 202111291431A CN 113917646 A CN113917646 A CN 113917646A
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- lever
- flexible hinge
- lens
- degree
- movable mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lens Barrels (AREA)
Abstract
The invention relates to a three-freedom-degree fine adjustment device for a movable mirror, which comprises: drive unit, execution unit, flexible hinge, lens seat and outer lens cone. The driving unit and the execution unit are installed on the outer lens barrel, the flexible hinge is connected with the execution unit, and the flexible hinge is connected with the lens seat. The driving unit drives the execution unit to adjust the lens seat to move. The driving force generated by the motor is amplified by the lever mechanism to drive the position of three moving points of the flexible hinge mechanism to change, thereby driving the lens seat to move. When the three drivers move synchronously, Z-direction displacement adjustment is realized; when the three drivers are adjusted differentially, the corresponding adjustment of thetax and thetay is realized. The three-degree-of-freedom fine adjustment device for the movable mirror is high in adjustment precision, good in repeatability and easy to install and adjust.
Description
Technical Field
The invention belongs to the technical field of photoetching machines, belongs to the field of integrated circuit equipment manufacturing, and particularly relates to a three-degree-of-freedom fine adjustment device for a movable mirror.
Background
With the development of large-scale integrated circuits, the demand of high-precision projection lithography machines is increasing. For a high-precision projection lithography machine, the imaging quality of an objective lens system is reduced due to manufacturing and assembling errors of lenses, and in order to improve the imaging quality, a specific lens needs to be selected from a projection objective lens to adjust in the Z direction, the theta x direction and the theta y direction.
Disclosure of Invention
The invention aims to provide a three-degree-of-freedom fine adjustment device for a movable mirror, which has good rigidity and thermal stability, can compensate image quality change caused by lens processing and assembling errors and ensures the imaging quality of an objective lens.
In order to achieve the purpose, the invention adopts the technical scheme that:
a three-degree-of-freedom fine adjustment device for a movable mirror comprises a driving unit, an execution unit, a flexible hinge, a lens seat and an outer lens cone;
the driving unit and the execution unit are arranged on the outer lens barrel, the flexible hinge is connected with the execution unit and the lens seat, and the driving unit drives the execution unit to adjust the lens seat to move;
the driving unit comprises a first motor, a second motor and a third motor; the executing unit comprises a first lever mechanism, a second lever mechanism and a third lever mechanism, wherein each lever mechanism comprises a lever seat, a ball head lever, a pressing ring, a shaft and a driving rod; the first motor, the second motor and the third motor are respectively connected with the driving rods of the first lever mechanism, the second lever mechanism and the third lever mechanism; the middle surface of the flexible hinge is provided with three steps, namely a first step, a second step and a third step which are respectively contacted with the three ball head levers, the upper surface of the flexible hinge is provided with three steps, namely a fourth step, a fifth step and a sixth step which are respectively fixedly connected with the lens seat, and the lower surface of the flexible hinge is fixedly connected with the outer lens barrel;
the driving force generated by the driving unit is amplified through a lever mechanism to drive the three moving point positions of the flexible hinge to change, so that the lens seat is driven to move, and when the three motors synchronously move, the Z-direction displacement adjustment of the lens seat is realized; when three motors are adjusted in a differential mode, corresponding adjustment of theta x and theta y is achieved.
Furthermore, three motors of the driving unit are uniformly distributed along the circumference and are respectively arranged on trisection points of the outer lens cone.
Furthermore, the execution unit is a primary lever mechanism and amplifies the driving force of the driving unit.
Furthermore, three lever mechanisms of the execution unit are arranged on trisection points of the outer lens cone and respectively correspond to three motors of the driving unit.
Furthermore, flexible hinge has six through-holes, and forms the hinge in this six through-hole department, is equivalent to six fulcrums, the hinge includes three groups, is first group hinge, second group hinge, third group hinge respectively, three groups of hinges are along circumference evenly distributed.
Furthermore, the first group of hinges are located on two sides of the first step, the second group of hinges are located on two sides of the second step, and the third group of hinges are located on two sides of the third step.
Further, the flexible hinge is made of 9Cr18 metal material.
Furthermore, the bulb lever passes the axle, and is located the intermediate position of axle, and the bearing is installed epaxial and is located the lever both sides, and the overall structure after the installation sets up on the lever seat, and lever seat both sides are compressed tightly with the clamping ring, and the clamping ring adopts the fix with screw on the lever seat, and the preceding terminal surface and the bulb lever contact of actuating lever, rear end are equipped with the screw thread, with the motor is connected, is provided with the bulb on the bulb lever.
Further, the step is fixed to the lens holder by a screw structure, thereby fixing the lens holder to the flexible hinge.
The invention has the beneficial effects that:
the invention has good stability, high adjusting precision, good repeatability and easy installation and adjustment;
the flexible hinge disclosed by the invention is made of an elastic metal material 9Cr18, has good elasticity, and can be guaranteed to be in contact with the ball head of the ball head lever no matter the moving mirror is in any motion state.
Drawings
The specific structural form and image quality characteristic of the single-rate projection exposure objective lens are further illustrated in the form of the attached drawings:
FIG. 1 is a top view of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
Fig. 3 is a top view of the lens holder of the present invention.
Fig. 4 is a top view of the lever mechanism of the present invention.
Fig. 5 is a cross-sectional view of a lever mechanism according to the present invention.
FIG. 6 is a schematic view of a flexible hinge according to the present invention.
FIG. 7 is a top view of a flexible hinge according to the present invention.
Fig. 8 is a top view of the outer barrel according to the present invention.
Fig. 9 is a side view of the outer barrel according to the present invention.
Fig. 10 is a schematic view illustrating the adjustment of the angle θ y according to the present invention.
Fig. 11 is a schematic view illustrating the adjustment of the angle θ x according to the present invention.
Detailed Description
For the purpose of making the objects, aspects and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1-9, the device comprises a driving unit, an actuating unit, a flexible hinge, a lens holder (7) and an outer barrel (8). The driving unit and the execution unit are installed on the outer lens barrel, the flexible hinge is connected with the execution unit, and the flexible hinge is connected with the lens seat. The driving unit drives the execution unit to adjust the lens seat to move. The driving unit comprises a first motor (1), a second motor (2) and a third motor (3); the execution unit comprises a first lever mechanism (4), a second lever mechanism (5) and a third lever mechanism (6); the first motor, the second motor and the third motor of the driving unit are respectively connected with the driving rods of the first lever mechanism (4), the second lever mechanism (5) and the third lever mechanism (6) of the execution unit; the middle surface (400) of the flexible hinge is provided with three steps, namely a first step (A), a second step (B) and a third step (C), which are respectively in contact with three ball-head levers, the upper surface (500) of the flexible hinge (9) is provided with three steps, namely a fourth step (D), a fifth step (E) and a sixth step (F), which are respectively fixedly connected with the lens seat (7), and the lower surface (600) of the flexible hinge (9) is fixedly connected with the outer lens cone (8); the driving force generated by the motor is amplified through the lever mechanism, and the three step surfaces A, B, C of the flexible hinge mechanism are driven to change positions, so that the lens seat is driven to move. When the three motors move synchronously, the adjustment of the axial-Z displacement of the lens is realized; when the three drivers are adjusted differentially, the corresponding lenses are adjusted along X-axis and Y-axis deflection angles theta X and theta Y. The three-degree-of-freedom fine adjustment device for the movable mirror is high in adjustment precision, good in repeatability and easy to install and adjust.
As shown in fig. 4 and 5, since the structures and the working principles of the three lever mechanisms are the same, the first lever is taken as an example for explanation. The lever mechanism comprises a lever seat (41), a ball head lever (42), pressing rings (43 and 44), a shaft (45), bearings (46 and 47) and a driving rod (48). The ball head lever (42) penetrates through the shaft (45) and is located in the middle of the shaft (45), the bearings (46 and 47) are installed on two sides of the shaft (45) and are integrally installed on the lever seat (41), the two sides are pressed by the pressing rings (43 and 44), and the pressing rings (43 and 44) are fixed on the lever seat (41) through screws. The front end surface of the driving rod (48) is contacted with the ball head lever (42), and the rear end is provided with threads and is connected with the motor. The lever seat (41) is provided with mounting holes (401 and 402), and the ball head lever (42) is provided with a ball head (403). The motor drives the driving rod (48) to move linearly, and then drives the ball head lever (42) to rotate, so that the ball head (403) of the ball head lever (42) moves upwards.
As shown in fig. 1, 3, 6 and 7, six through holes H1, H2, H3, H4, H5 and H6 are arranged on the flexible hinge to form a hinge, which is equivalent to six pivots, wherein H1 and H2 are first group hinges and are located at two sides of the first step a, H3 and H4 are second group hinges and are located at two sides of the second step B, and H5 and H6 are third group hinges and are located at two sides of the third step C, and the three groups of hinges are uniformly distributed along the circumference. Six through holes (91, 92, 93, 94, 95, 96) are arranged on the flexible hinge. The step A, B, C of the flexible hinge is provided with a threaded hole, and since the structure and the working principle of the three steps are the same, the step a is taken as an example for explanation. The step A is provided with four threaded holes (901, 902, 903 and 904), first, second, third and fourth mounting screws (101, 102, 103 and 104) penetrate through mounting holes (701, 702, 703 and 704) on the lens seat and are screwed into the threaded holes (901, 902, 903 and 904) on the step A, the other step surfaces and the lens seat are connected in the same way, and the lens seat is fixed on the flexible hinge in the same way.
As shown in fig. 4, 6, 8 and 9, the bottom surface 800 of the outer barrel is provided with first and second threaded holes (801 and 802), screws are inserted through the mounting holes (401 and 402) on the lever seat and screwed into the first and second threaded holes (801 and 802) on the outer barrel, so as to fix the first lever on the bottom surface of the outer barrel, and the other lever mechanisms are the same as above, and so on. The bottom surface 800 of the outer barrel is provided with third, fourth, fifth, sixth, seventh and eighth screw holes (803, 804, 805, 806, 807 and 808), screws are inserted through the mounting holes (91, 92, 93, 94, 95 and 96) on the flexible hinge and screwed into the third, fourth, fifth, sixth, seventh and eighth screw holes (803, 804, 805, 806, 807 and 808) on the outer barrel, and the flexible hinge is fixed to the bottom surface of the outer barrel. The first motor is connected with the outer barrel through four threaded holes (809, 810, 811, 812) on the outer barrel.
As shown in fig. 10 and 11, the height direction is defined as the Z-axis, and the outward direction of the first motor is the X-axis. Z1, Z2 and Z3 are the ascending distances of the ball heads of the three ball head levers, R is the radius of a circle formed by the ball head points of the three ball head levers, and theta is a deflection angle.
When Z1-Z2-Z3, the moving mirror can move in the Z direction.
For the adjustment of the movable mirror in the directions of thetax and thetay, because the deflection angle is small, the tangent can be used for calculating instead of the sine. When the θ y direction is adjusted, the Z2 and the Z3 have the same displacement in the Z direction, the projection on the XZ plane is at the same position, and the Z1 needs to make displacement movement in the opposite direction. To achieve θ y adjustment, the stroke of Z1, Z2, and Z3 that needs to be adjusted is:
Z2＝Z3＝Rcos(π/3)tanθ
Z1＝-Rtanθ
in fig. 11, R ═ R × cos (pi/6), in order to achieve the adjustment in the θ x direction, it is necessary to ensure that Z1 is unchanged, the displacement amounts of Z2 and Z3 in the Z direction are the same and opposite, and the stroke of Z2 and Z3 that needs to be adjusted is:
Z2＝-Z3＝rtanθ＝Rcos(π/6)tanθ
although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. A three-degree-of-freedom fine adjustment device for a movable mirror is characterized in that:
the device comprises a driving unit, an execution unit, a flexible hinge, a lens seat and an outer lens cone;
the driving unit and the execution unit are arranged on the outer lens barrel, the flexible hinge is connected with the execution unit and the lens seat, and the driving unit drives the execution unit to adjust the lens seat to move;
the driving unit comprises a first motor (1), a second motor (2) and a third motor (3); the executing unit comprises a first lever mechanism (4), a second lever mechanism (5) and a third lever mechanism (6), wherein each lever mechanism comprises a lever seat (41), a ball head lever (42), pressing rings (43, 44), a shaft (45) and a driving rod (48); the first motor (1), the second motor (2) and the third motor (3) are respectively connected with driving rods of a first lever mechanism (4), a second lever mechanism (5) and a third lever mechanism (6); the middle surface (400) of the flexible hinge is provided with three steps, namely a first step (A), a second step (B) and a third step (C), which are respectively in contact with the three ball head levers, the upper surface (500) of the flexible hinge (9) is provided with three steps, namely a fourth step (D), a fifth step (E) and a sixth step (F), which are respectively fixedly connected with the lens seat (7), and the lower surface (600) of the flexible hinge (9) is fixedly connected with the outer lens cone (8);
the driving force generated by the driving unit is amplified through a lever mechanism to drive the three moving point positions of the flexible hinge to change, so that the lens seat is driven to move, and when the three motors synchronously move, the Z-direction displacement adjustment of the lens seat is realized; when the three motors are adjusted in a differential mode, corresponding adjustment of theta x and theta y is achieved; the Z direction is the axial direction of the lens, and the theta X and the theta Y are deflection angles of the lens along the X axis and the Y axis respectively.
2. The three-degree-of-freedom fine adjustment device for the movable mirror, as recited in claim 1, is characterized in that: three motors of the driving unit are uniformly distributed along the circumference and are respectively arranged on trisection points of the outer lens cone.
3. The three-degree-of-freedom fine adjustment device for the movable mirror, as recited in claim 1, is characterized in that: the execution unit is a primary lever mechanism and amplifies the driving force of the driving unit.
4. The three-degree-of-freedom fine adjustment device for the movable mirror, as recited in claim 1, is characterized in that: and the three lever mechanisms of the execution unit are arranged on trisection points of the outer lens cone and respectively correspond to the three motors of the driving unit.
5. The three-degree-of-freedom fine adjustment device for the movable mirror, as recited in claim 1, is characterized in that: the flexible hinge is provided with six through holes (H1, H2, H3, H4, H5 and H6), a hinge is formed at the six through holes and is equivalent to six fulcrums, the hinge comprises three groups, namely a first group of hinges (H1 and H2), a second group of hinges (H3 and H4) and a third group of hinges (H5 and H6), and the three groups of hinges are uniformly distributed along the circumference.
6. The three-degree-of-freedom fine adjustment device for the movable mirror, as recited in claim 5, is characterized in that: the first group of hinges are located on two sides of the first step (A), the second group of hinges are located on two sides of the second step (B), and the third group of hinges are located on two sides of the third step (C).
7. The three-degree-of-freedom fine adjustment device for the movable mirror, as recited in claim 1, is characterized in that: the flexible hinge is made of 9Cr18 metal material.
8. The three-degree-of-freedom fine adjustment device for the movable mirror, as recited in claim 1, is characterized in that:
ball head lever (42) pass axle (45), and are located the intermediate position of axle (45), and bearing (46, 47) are installed on axle (45) and are located ball head lever (42) both sides, and overall structure after the installation sets up on lever seat (41), and lever seat (41) both sides are compressed tightly with clamping ring (43, 44), and clamping ring (43, 44) adopt the fix with screw on lever seat (41), and the preceding terminal surface and the contact of ball head lever (42) of actuating lever (48), the rear end is equipped with the screw thread, with the motor is connected, is provided with bulb (403) on ball head lever (42).
9. The three-degree-of-freedom fine adjustment device for the movable mirror, as recited in claim 1, is characterized in that:
the step is secured to the lens mount by a threaded arrangement, thereby securing the lens mount to the flexible hinge.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111291431.4A CN113917646B (en) | 2021-11-01 | 2021-11-01 | Three-degree-of-freedom fine tuning device for movable mirror |
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| CN202111291431.4A CN113917646B (en) | 2021-11-01 | 2021-11-01 | Three-degree-of-freedom fine tuning device for movable mirror |
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| CN113917646B CN113917646B (en) | 2023-06-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114442253A (en) * | 2022-03-11 | 2022-05-06 | 中国科学院光电技术研究所 | Axial micro-motion adjusting device for optical element |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114442253A (en) * | 2022-03-11 | 2022-05-06 | 中国科学院光电技术研究所 | Axial micro-motion adjusting device for optical element |
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