CN114435865B - Belt conveyor - Google Patents
Belt conveyor Download PDFInfo
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- CN114435865B CN114435865B CN202111258287.4A CN202111258287A CN114435865B CN 114435865 B CN114435865 B CN 114435865B CN 202111258287 A CN202111258287 A CN 202111258287A CN 114435865 B CN114435865 B CN 114435865B
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- Prior art keywords
- roller
- idler
- conveyor
- belt
- conveyor belt
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- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- 230000002093 peripheral effect Effects 0.000 claims description 33
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000003638 chemical reducing agent Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 35
- 230000000694 effects Effects 0.000 description 5
- 230000005611 electricity Effects 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
- B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/60—Arrangements for supporting or guiding belts, e.g. by fluid jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
- B65G23/02—Belt- or chain-engaging elements
- B65G23/04—Drums, rollers, or wheels
- B65G23/08—Drums, rollers, or wheels with self-contained driving mechanisms, e.g. motors and associated gearing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
- B65G23/44—Belt or chain tensioning arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02128—Belt conveyors
- B65G2812/02138—Common features for belt conveyors
- B65G2812/02148—Driving means for the belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/02—Belt or chain conveyors
- B65G2812/02128—Belt conveyors
- B65G2812/02138—Common features for belt conveyors
- B65G2812/02168—Belts provided with guiding means, e.g. rollers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a belt conveyor for conveying a wafer storage container used in a semiconductor manufacturing process, comprising: the conveyor body comprises a 1 st side frame and a 2 nd side frame which are respectively arranged at two side ends of the lower frame; 1 st idler roller to 1 st idler roller and 2 nd idler roller to 2_n th idler roller; a driving roller having both side ends rotatably provided at a 1 st roller region of each of the 1 st side frames and a 2 nd roller region of the 2 nd side frames, the 1 st roller region being formed by projecting each of the 1 st idler rollers onto and under the 1 st idler roller; and the 1 st and 2 nd conveyors. The present invention can reduce the height of the belt conveyor by updating the arrangement of each component of the belt conveyor to reduce the overall volume.
Description
Technical Field
The present invention relates to a wafer transfer apparatus used in a semiconductor manufacturing process, and more particularly, to a belt conveyor.
Background
In semiconductor manufacturing processes, safe transport of wafers is an important issue. A conveyor for transporting a wafer storage container provided with a plurality of wafers, such as a front opening unified pod (Front Opening Uni fied Pod, FOUP), needs to be designed so that no unexpected problems occur during loading, unloading, and transporting of the wafer storage container. In addition, in the semiconductor manufacturing field, a conveyor for conveying wafer storage containers has a structural problem in that it is long in length and complicated in arrangement and occupies a large space, so that a method of reducing the volume of the conveyor is also required.
The prior art document (korean registered patent publication No. 10-2147277) discloses a belt conveyor including a plurality of pulleys (Pulley) in fig. 1, and it is seen that there is a limit in lowering the height thereof since a bending pulley, a tension pulley, a driving pulley, etc. must be provided at the lower portion of the belt conveyor. Further, in the belt conveyor of the prior art, among objects to be conveyed which are conveyed in contact with a contact surface which is at least a part of an upper side outer peripheral surface of a belt, when static electricity or frictional heat is generated at the contact surface, there occurs a phenomenon that the objects to be conveyed cannot be timely detached from the belt contact surface to cause unexpected impact to the objects to be conveyed, or friction force is reduced due to frictional heat to cause the objects to be conveyed to be not normally conveyed, etc., but there is no disclosure of a method for reducing such risk.
Accordingly, there is a need for a belt conveyor having a new structure that can be used in semiconductor manufacturing processes by overcoming the problems and limitations of existing conveyors, such as the belt conveyors of the prior art.
Disclosure of Invention
Technical problem
The present invention aims to reduce the height of a belt conveyor by updating the arrangement of each component of the belt conveyor to reduce the overall volume.
In addition, another object of the present invention is to reduce the influence of static electricity or frictional heat that may occur between a belt and a wafer storage container by forming a space in which the belt and the wafer storage container are spaced apart in a belt conveyor.
It is a further object of the present invention to provide a belt conveyor that is capable of being stably fastened without detachment by forming a predetermined coating or groove on at least some of the idler rollers and the drive roller.
Technical proposal
In order to achieve the above object and to achieve the characteristic effects of the present invention described below, the characteristic structure of the present invention is as follows.
An aspect of the present invention provides a belt conveyor for conveying a wafer storage container used in a semiconductor manufacturing process, comprising: the conveyor body comprises a1 st side frame and a2 nd side frame which are respectively arranged at two side ends of the lower frame; the novel roller type roller comprises 1_1 to 1_n idler rollers and 2_1 to 2_n idler rollers, wherein each side end of the 1_1 to 1_n idler rollers is rotatably combined with the inner side surface of the 1 st side surface frame, each rotation center shaft is arranged on the same straight line, each side end of the 2_1 to 2_n idler rollers is rotatably combined with the inner side surface of the 2 nd side surface frame, each rotation center shaft is arranged on the same straight line, and n is an integer more than 2; a driving roller having both side ends rotatably disposed at a1 st roller region of each of the 1 st side frames and a2 nd roller region of the 2 nd side frames, the 1 st roller region being formed by projecting each of the 1 st idler rollers above and below the 1 st idler roller, and the 2 nd roller region being formed by projecting each of the 2 nd idler rollers above and below the 2_n nd idler roller; and a1 st conveyor belt and a2 nd conveyor belt, wherein an upper side inner peripheral surface and a lower side inner peripheral surface of the 1 st conveyor belt are respectively in close contact with an upper surface and a lower surface of each of the 1 st idler roller to the 1 st idler roller, an upper side outer peripheral surface is in close contact with a lower surface of the driving roller, an upper side inner peripheral surface and a lower side inner peripheral surface of the 2 nd conveyor belt are respectively in close contact with an upper surface and a lower surface of each of the 2 st idler roller to the 2_n th idler roller, and an upper side outer peripheral surface is in close contact with a lower surface of the driving roller.
As an example, the present invention provides a belt conveyor further comprising a driving motor provided to at least one of the 1 st side frame and the 2 nd side frame and rotating the driving roller to correspond to a conveying direction of the wafer storage container.
As an example, the present invention provides a belt conveyor, wherein the driving roller is a motor roller having a driving motor and a speed reducer built therein.
As an example, the present invention provides a belt conveyor comprising at least one 1 st tension roller and at least one 2 nd tension roller, wherein one side end of the 1 st tension roller is rotatably coupled to the 1 st roller region and is disposed at an upper portion of the driving roller, and one side end of the 2 nd tension roller is rotatably coupled to the 2 nd roller region and is disposed at an upper portion of the driving roller.
As an example, the present invention provides a belt conveyor in which the inner peripheral surface of the upper portion side of the 1 st belt is in close contact with the upper surface of the 1 st tension roller, and the inner peripheral surface of the upper portion side of the 2 nd belt is in close contact with the upper surface of the 2 nd tension roller.
As an example, the present invention provides a belt conveyor, wherein the upper surface of the 1 st tension roller is positioned on the same line as the upper surface of each of the 1 st idler roller to the 1 st idler roller, and the upper surface of the 2 nd tension roller is positioned on the same line as the upper surface of each of the 2 st idler roller to the 2_n nd idler roller.
As an example, the present invention provides a belt conveyor, wherein the diameters of the 1 st tension roller and the 2 nd tension roller are smaller than the diameter of the driving roller.
As an example, the present invention provides a belt conveyor, wherein the diameter of the driving roller is smaller than the diameter from each 1_1 th idler roller to the 1—n idler roller, and smaller than the diameter from each 2_1 th idler roller to the 2_n th idler roller.
As an example, the present invention provides a belt conveyor, wherein n is an integer of 2 times, and the driving roller is arranged such that (i) one side end is located at the first positionIdler roll and the firstBetween the idler rollers, (ii) the other side end is positioned at the firstIdler roll and the firstBetween the idler rollers.
As an example, the present invention provides a belt conveyor characterized in that (1) at least a part of an outer peripheral surface of at least a part of each of the 1 st idler roller to the 1 st idler roller and the drive roller is (i) coated with a predetermined coating for increasing a friction force with the 1 st conveyor belt contact portion, or (ii) formed with a groove corresponding to the 1 st conveyor belt width so that the 1 st conveyor belt is disposed inside thereof to prevent the 1 st conveyor belt from coming off, (2) at least a part of an outer peripheral surface of at least a part of each of the 2 nd idler roller to the 2_n nd idler roller and the drive roller is (i) coated with a predetermined coating for increasing a friction force with the 2 nd conveyor belt contact portion, or (ii) formed with a groove corresponding to the 2 nd conveyor belt width so that the 2 nd conveyor belt is disposed inside thereof to prevent the 2 nd conveyor belt from coming off.
Technical effects
The effect of the present invention is to reduce the height of the belt conveyor to reduce the overall volume by updating the arrangement of each component of the belt conveyor.
In addition, the present invention has an effect of reducing an influence of static electricity or frictional heat that may occur between the belt and the wafer storage container by forming a space in which the belt and the wafer storage container are spaced apart in the belt conveyor.
Furthermore, the present invention has an effect in that the belt can be stably fastened without being detached by forming a predetermined coating or groove on at least some of the idler rollers and the drive roller in the belt conveying device.
Drawings
Fig. 1 is a schematic view of a belt conveyor having two 1 st tension rollers and an inner side of a1 st side frame of the belt conveyor according to an embodiment of the present invention.
Fig. 2a and 2b are schematic views of the inner side of the 1 st side frame when the 1 st tension roller is disposed at the 1 st position according to an embodiment of the present invention.
Fig. 2c and 2d are schematic views of the inner side of the 1 st side frame when the 1 st tension roller is disposed at the 2 nd position according to an embodiment of the present invention.
Fig. 2e is a schematic view of the inside of the 1 st side frame without the 1 st tensioning roller according to an embodiment of the present invention.
Fig. 3 is a schematic view of a wafer storage container transported in a belt conveyor having two 1 st tension rollers according to an embodiment of the present invention.
Description of the reference numerals
100: Belt conveyor 110: 1 st side frame
120: Side frame 2 130: lower frame of conveyor body
200: 1 St side frame inner side 201: roll 1 area
202: Straight line based on rotation axis position of each 1 st idler roller to 1 st idler roller
210- (1_1), 210- (1_2), 210- (1_N): 1 st idler roller to 1 st idler roller
220: Drive roller 221: driving motor
230-1, 230-2: 1 St tension roller 240: no. 1 conveyor belt
241: Predetermined space of space
242-1, 242-2: 1 St-1 st divided upper side outer peripheral surface of 1 st conveyor belt
243-1, 243-2: 1 St-2 nd divided upper side outer peripheral surface of 1 st conveyor belt
242-1, 243-1: Contact surface of 1 st wafer storage container
300: 1 St side frame height 400: wafer storage container
Detailed Description
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings that show, as examples, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It is to be understood that the various embodiments of the invention, although different, are not necessarily mutually exclusive. For example, a particular shape, structure, and characteristic described herein may be implemented in one embodiment in other embodiments without departing from the spirit and scope of the invention.
In addition, it is to be understood that the location or arrangement of individual components within each disclosed embodiment may be modified without departing from the spirit and scope of the invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is defined only by the appended claims, along with the full scope of equivalents to which such claims are entitled. Like reference numerals in the drawings indicate the same or similar functionality in several respects.
In order that those skilled in the art can easily practice the present invention, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 is a schematic view of a belt conveyor having two 1 st tension rollers and an inner side of a1 st side frame of the belt conveyor according to an embodiment of the present invention.
Referring to fig. 1, the belt conveyor 100 may be composed of a conveyor body including a 1 st side frame 110 and a 2 nd side frame 120 disposed at both side ends of a lower frame 130, respectively. In addition, 1_1 to 1_n idler rollers 210- (1_1), 210- (1_2),. The first, 210- (1_n) and 2_1 to 2_n idler rollers may be included, wherein each side end of the 1_1 to 1_n idler rollers is rotatably coupled to the inner side 200 of the 1 st side frame 110, each rotation center axis is disposed on the same straight line 202, each side end of the 2_1 to 2_n idler rollers is rotatably coupled to the inner side of the 2 nd side frame 120, and each rotation center axis is disposed on the same straight line. In this case, n may be an integer of 2 or more.
For reference, fig. 1 to 3 do not show components disposed on the 2 nd side frame 120 opposite to the 1 st side frame 110, but components of the same type as those disposed on the 1 st side frame 110 may be disposed to correspond to each other. In addition, the description of the components provided on the 2 nd side frame 120 may not be separately described below with reference to the components provided on the 1 st side frame 110, but even in this case, it should be noted that similar descriptions to those provided on the 1 st side frame 110 may be applicable to the components provided on the 2 nd side frame 120.
Next, the belt conveyor 100 may include a driving roller 220 whose both side ends are rotatably disposed at each of the 1 st roller region 210 and the 2 nd roller region 201 formed at the inner side 200 of the 1 st side frame 110 by projecting each of the 1 st idler roller 210- (1_1), 210- (1_2),., 210- (1—n) and lower, and the 2 nd roller region formed at the inner side of the 2 nd side frame 120 by projecting each of the 2 nd idler roller 210 and lower of the 2_n nd idler roller.
At this time, as an example of the present invention, the driving roller 220 may be coupled with a driving motor provided to at least one of the 1 st side frame 110 and the 2 nd side frame 120 and rotating the driving roller 220 to correspond to the transport direction of the wafer storage container. Fig. 2 shows a case where the driving motor 221 is provided on the outer side of the 1 st side frame 112.
However, as another example of the present invention, the driving roller 220 may be a motor roller having a driving motor and a speed reducer built therein. At this time, a separate driving motor, which can be rotated by itself to convey the wafer storage container, is not required to be provided outside the driving roller 220.
In another example of the present invention, n may be an integer of 2 times, and the driving roller 220 may be disposed such that (i) one side end thereof may be located at the first sideIdler roll and the firstBetween idler rollers, (ii) the other side end can be positioned at the firstIdler roll and the firstBetween the idler rollers. At this time, by an idler roller adjacent to the drive roller 220, i.e. the firstIdler roller and the firstThe idler rollers can form a space interval larger than that from each 1 st idler roller to the 1 st idler rollerSpacing of idler rollers and everyThe spacing of the idler rollers to the 1 st—n idler roller can vary depending on the implementation conditions of the present invention.
In addition, the belt conveyor 100 may include a 1 st conveyor belt and a2 nd conveyor belt, wherein an upper side inner circumferential surface and a lower side inner circumferential surface of the 1 st conveyor belt are in close contact with an upper surface and a lower surface of each of the 1 st to 1 st idler rollers 210- (1_1), 210- (1_2), 210- (1—n), respectively, an upper side outer circumferential surface is in close contact with a lower surface of the driving roller 220, an upper side inner circumferential surface and a lower side inner circumferential surface of the 2 nd conveyor belt are in close contact with an upper surface and a lower surface of each of the 2 st to 2_n nd idler rollers, respectively, and an upper side outer circumferential surface is in close contact with a lower surface of the driving roller 220.
At least a portion of the upper sides of the 1 st and 2 nd conveyors 240 and 2 nd conveyor thus disposed are introduced in the direction of the driving roller 220 and form a predetermined interval space so that the outer circumferential surface of the upper side thereof may be divided into at least two surfaces instead of one continuous surface. Fig. 1 illustrates a predetermined spacing space 241 formed in the 1 st conveyor belt 240, the relevant contents of which will be described in more detail below with reference to a separate drawing (fig. 3), which also illustrates a wafer storage container.
Next, as an example of the present invention, in the belt conveying apparatus 100, the diameter of the driving roller 220 is smaller than the diameters of each of the 1_1 st to 1 st idler rollers (210- (1_1), 210- (1_2),... In this way, the height 300 of the 1 st side frame 110 may be reduced.
In addition, as another example of the present invention, the belt conveyor 100 may further include at least one 1 st tension roller 230-1, 230-2 and at least one 2 nd tension roller, wherein one side end of the 1 st tension roller is rotatably coupled to the 1 st roller region 201 and disposed at an upper portion of the driving roller 220, and one side end of the 2 nd tension roller is rotatably coupled to the 2 nd roller region and disposed at an upper portion of the driving roller 220.
In addition, in the belt conveying apparatus 100, the inner peripheral surface of the upper side of the 1 st conveyor belt is closely contacted to the upper surfaces of the 1 st tension rollers 230-1, 230-2, and the inner peripheral surface of the upper side of the 2 nd conveyor belt is closely contacted to the upper surface of the 2 nd tension roller, so that the 1 st conveyor belt and the 2 nd conveyor belt can have strong tension.
In addition, in the belt conveying apparatus 100, the upper surface of the 1 st tension roller 230-1, 230-2 is positioned on the same line as the upper surface of each of the 1 st idler roller to the 1 st idler roller 210- (1_1), 210- (1_2),. And 210- (1_n), and the upper surface of the 2 nd tension roller is positioned on the same line as the upper surface of each of the 2 st idler roller to 2_n idler roller, so that the interval space 241 formed on the upper side outer circumferential surface of the 1 st conveyor belt may be started from the upper surface of the 1 st tension roller 230-1, 230-2, and the interval space formed on the upper side outer circumferential surface of the 2 nd conveyor belt may be started from the upper surface of the 2 nd tension roller.
In addition, the diameter of each 1 st tension roller 230-1, 230-2 and the 2 nd tension roller is smaller than the diameter of the driving roller 220, so that the 1 st tension roller 230-1, 230-2 may be entirely included in the 1 st roller region and the 2 nd tension roller may be entirely included in the 2 nd roller region. In this way, the height 300 of the 1 st side frame 110 may be reduced.
For reference, fig. 1 shows an example of the present invention in which two 1 st tension rollers 230-1, 230-2 and two 2 nd tension rollers are provided, respectively, in which case one 1 st tension roller and one 2 nd tension roller may be provided, respectively, or the 1 st tension roller and the 2 nd tension roller may not be provided, which may vary depending on the implementation conditions of the present invention.
Fig. 2a and 2b are schematic views of the inner side of the 1 st side frame when the 1 st tension roller is disposed at the 1 st position according to an embodiment of the present invention, and fig. 2c and 2d are schematic views of the inner side of the 1 st side frame when the 1 st tension roller is disposed at the 2 nd position according to an embodiment of the present invention.
Referring to fig. 2a, as an example of the present invention, when the 1 st tension roller is one 230-1 and is disposed at the 1 st position, i.e., the upper left side of the driving roller 220, the belt portion of the 1 st conveyor belt 240 corresponding to the upper left side of the driving roller 220 may have a strong tension by the 1 st tension roller 230-1, and the upper side of the adjacent idler roller and the lower side of the driving roller 220 may be connected in a straight line at the upper right side of the driving roller 220. However, referring to fig. 2b, unlike the one shown in fig. 2a, the belt portion of the 1 st conveyor belt 240 corresponding to the upper right side of the driving roller 220 is extended to the 1 st tension roller 230-1 and the inner circumferential surface thereof is in contact with the 1 st tension roller 230-1 so that it has a strong tension, and the upper side of the idler roller adjacent to the left side of the driving roller 220 and the lower side of the driving roller 220 may be connected in a straight line at the upper left side of the driving roller 220.
In addition, as another example of the present invention, the 1 st tension roller may be provided at the 2 nd position, that is, the upper right side of the driving roller 220.
Fig. 2c and 2d are schematic illustrations of the 1 st belt and 1 st roller area with the 1 st tension roller disposed in the 2 nd position in accordance with an embodiment of the present invention.
As shown in fig. 2c and 2d, when the 1 st tension roller is 230-2 and is disposed at the 2 nd position, i.e., the upper right side of the driving roller 220, since the content is similar to the case where the 1 st tension roller is disposed at the 1 st position, only the left and right directions are different, and thus, the description thereof will not be repeated.
In addition, as another example of the present invention, when there is a space in the vertical direction upper portion of the driving roller 220, the 1 st tension roller may be disposed directly above the driving roller 220, and in this case, the 1 st conveyor belt may be disposed in the same manner as described above.
In addition, the 2 nd tension roller may be provided in a similar manner to the 1 st tension roller described above so that the 2 nd belt has a strong tension, which is not described herein.
Next, as another example of the present invention, the belt conveyor 100 may not have the 1 st tension roller and the 2 nd tension roller.
Fig. 2e is a schematic view of the inside of the 1 st side frame without the 1 st tensioning roller according to an embodiment of the present invention.
Referring to fig. 2e, the 1 st conveyor belt 240 may be disposed such that an upper face of each of the idler rollers adjacent to the left and right of the driving roller 220 and a lower face of the driving roller 220 are connected in a straight line. At this time, as described above, the magnitude of the tension thereof may be smaller than that when the 1 st tension roller is provided, but in view of the feature of the arrangement form in which at least a portion of the upper side of the 1 st conveyor belt 240 is introduced into and contacts the lower portion of the driving roller 220, the 1 st conveyor belt 240 may be arranged such that the driving roller 220 also functions as a tension roller.
In addition, the interaction between the 1 st conveyor belt 240 and the wafer storage container will be described below with reference to fig. 3, and fig. 3 also shows the wafer storage container conveyed by the belt conveyor apparatus 100 as described above.
Fig. 3 is a schematic view of a wafer storage container transported in a belt conveyor having two 1 st tension rollers according to an embodiment of the present invention.
Referring to fig. 3, a lower portion of the wafer storage container 400 is in contact with the 1 st wafer storage container contact surfaces 242-1, 243-1, which are a portion of the upper side outer circumferential surface of the 1 st conveyor 240, and another lower portion may be in contact with the 2 nd wafer storage container contact surface, which is a portion of the upper side outer circumferential surface of the 2 nd conveyor. At this time, since the 1 st wafer storage container contact surface and the 2 nd wafer storage container contact surface correspond to each other and may be in a similar state, description will be made below with reference to the 1 st wafer storage container contact surfaces 242-1, 243-1 and the 1 st conveyor belt 240.
As shown in fig. 3, a space 241 corresponding to the position of the driving roller 220 may be formed on the upper side outer circumferential surface of the 1 st belt 240. Based on this, the upper side outer peripheral surface of the 1 st belt 240 can be divided into 1 st divided upper side outer peripheral surfaces 242-1, 242-2 and 1 st divided upper side outer peripheral surfaces 243-1, 243-2. This reduces the possibility that the following occurs, compared with the case where the upper outer peripheral surface of the 1 st belt 240 is one surface: during transport of the wafer storage container, including loading and unloading, static electricity is generated at the contact surface between the wafer storage container and the belt, and even if the wafer storage container should be timely disconnected from contact with the belt, the contact is not accidentally disconnected, resulting in a portion of the belt being attached to the wafer storage container and pulled up, or falling from this state and striking the wafer storage container; since frictional heat is generated at the contact surface between the wafer storage container and the belt and frictional force is reduced, conveyance of the wafer storage container cannot be properly performed.
Next, as an example of the present invention, (1) at least a portion of the outer circumferential surface of at least one of (i) each of the 1 st to 1 st idler rollers 210- (1_1), 210- (1_2), (1 st, 210- (1—n) and the driving roller 220 is coated with a predetermined coating for increasing friction force with the contact portion of the 1 st conveyor belt 240, or (ii) a groove corresponding to the width of the 1 st conveyor belt 240 is formed so that the 1 st conveyor belt 240 is disposed inside thereof, thereby preventing the 1 st conveyor belt 240 from being separated, (2) at least a portion of the outer circumferential surface of at least one of (i) each of the 2 nd to 2_n nd idler rollers and the driving roller 220 is coated with a predetermined coating for increasing friction force with the contact portion of the 2 nd conveyor belt, or (ii) a groove corresponding to the width of the 2 nd conveyor belt is formed so that the 2 nd conveyor belt is disposed inside thereof, thereby preventing the 2 nd conveyor belt from being separated.
In this case, the predetermined coating layer may be, but not limited to, a synthetic resin such as polyurethane, and other materials may be used according to the implementation conditions of the present invention.
In addition, the plurality of belt conveyors 100 as described above may be connected in a modular manner as needed to constitute an entire conveyor system, wherein each 1 st roller region 201 and 2 nd roller region of each belt conveyor may be formed to be continuously in close contact with each roller region adjacent to each other at a predetermined height such that each conveyor belt corresponding to each of them is continuously repeated with a gap not exceeding a predetermined interval, whereby it is possible to ensure that the wafer storage containers are brought into contact with each of their respective upper side outer circumferential surfaces and stably conveyed.
Hereinabove, the present invention has been described with reference to specific matters such as specific components and limited embodiments and drawings, but this is only to facilitate a more complete understanding of the present invention, and the present invention is not limited to the above-described embodiments, and various modifications and variations may be devised by those skilled in the art to which the present invention pertains.
The spirit of the invention should not be limited to the foregoing embodiments, and it is intended that all equivalents and modifications equivalent to those claims be included in the spirit of the invention, except as indicated by the appended claims.
Claims (10)
1. A belt conveyor for conveying a wafer storage container used in a semiconductor manufacturing process, comprising:
the conveyor body comprises a1 st side frame and a 2 nd side frame which are respectively arranged at two side ends of the lower frame;
The novel roller type roller comprises 1_1 to 1_n idler rollers and 2_1 to 2_n idler rollers, wherein each side end of the 1_1 to 1_n idler rollers is rotatably combined with the inner side surface of the 1 st side surface frame, each rotation center shaft is arranged on the same straight line, each side end of the 2_1 to 2_n idler rollers is rotatably combined with the inner side surface of the 2 nd side surface frame, each rotation center shaft is arranged on the same straight line, and n is an integer more than 2;
a driving roller having both side ends rotatably disposed at a1 st roller region of each of the 1 st side frames and a2 nd roller region of the 2 nd side frames, the 1 st roller region being formed at an inner side surface of the 1 st side frame by projecting each of the 1 st idler rollers onto and under the 1 st idler roller, and the 2 nd roller region being formed at an inner side surface of the 2 nd side frame by projecting each of the 2 st idler rollers onto and under the 2_n nd idler roller; and
A 1 st conveyor belt and a2 nd conveyor belt, wherein an upper side inner peripheral surface and a lower side inner peripheral surface of the 1 st conveyor belt are respectively in close contact with an upper surface and a lower surface of each of the 1 st idler roller to the 1 st idler roller, an upper side outer peripheral surface of the 1 st conveyor belt is in close contact with a lower surface of the driving roller, an upper side inner peripheral surface and a lower side inner peripheral surface of the 2 nd conveyor belt are respectively in close contact with an upper surface and a lower surface of each of the 2 st idler roller to the 2_n nd idler roller, and an upper side outer peripheral surface of the 2 nd conveyor belt is in close contact with a lower surface of the driving roller;
Wherein a predetermined space is formed on an upper outer peripheral surface of the 1 st conveyor belt corresponding to a position of the driving roller, a predetermined space is formed on an upper outer peripheral surface of the 2 nd conveyor belt corresponding to a position of the driving roller, and
The predetermined space formed on the upper outer peripheral surface of the 1 st conveyor makes the upper outer peripheral surface of the 1 st conveyor not contact the lower surface of the wafer storage container, and the predetermined space formed on the upper outer peripheral surface of the 2 nd conveyor makes the upper outer peripheral surface of the 2 nd conveyor not contact the lower surface of the wafer storage container.
2. The belt conveyor of claim 1, further comprising:
And a driving motor provided to at least one of the 1 st side frame and the 2 nd side frame and rotating the driving roller to correspond to a conveying direction of the wafer storage container.
3. The belt conveyor of claim 1, wherein:
The driving roller is a motor roller with a driving motor and a speed reducer inside.
4. The belt conveyor of claim 1, further comprising:
the tension roller comprises at least one tension roller 1 and at least one tension roller 2, wherein one side end of the tension roller 1 is rotatably combined with the roller 1 area and is arranged on the upper portion of the driving roller, and one side end of the tension roller 2 is rotatably combined with the roller 2 area and is arranged on the upper portion of the driving roller.
5. The belt conveyor of claim 4, wherein:
the inner peripheral surface of the upper side of the 1 st conveyor belt is in close contact with the upper surface of the 1 st tension roller, and the inner peripheral surface of the upper side of the 2 nd conveyor belt is in close contact with the upper surface of the 2 nd tension roller.
6. The belt conveyor of claim 4, wherein:
The upper surface of the 1 st tensioning roller is positioned on the same straight line from each 1 st idler roller to the upper surface of the 1 st idler roller, and the upper surface of the 2 nd tensioning roller is positioned on the same straight line from each 2 st idler roller to the upper surface of the 2_n th idler roller.
7. The belt conveyor of claim 4, wherein:
The diameters of the 1 st tensioning roller and the 2 nd tensioning roller are smaller than the diameter of the driving roller.
8. The belt conveyor of claim 1, wherein:
The diameter of the driving roller is smaller than the diameter from each 1_1 th idler roller to the 1_n idler roller and smaller than the diameter from each 2_1 th idler roller to the 2_n idler roller.
9. The belt conveyor of claim 1, wherein:
The n is an integer which is a multiple of 2,
The driving roller is arranged in such a way that (i) one side end is positioned at the first sideIdler roll and the firstBetween the idler rollers, (ii) the other side end is positioned at the firstIdler roll and the firstBetween the idler rollers.
10. The belt conveyor of claim 1, wherein:
(1) At least a portion of the outer circumferential surface of at least a portion of each of the 1 st idler roller to the 1 st idler roller and the driving roller is (i) coated with a predetermined coating for increasing friction with the 1 st conveyor belt contact portion, or (ii) formed with grooves corresponding to the 1 st conveyor belt width so that the 1 st conveyor belt is disposed inside thereof, thereby preventing the 1 st conveyor belt from being detached, (2) at least a portion of the outer circumferential surface of at least a portion of each of the 2 st idler roller to the 2_n nd idler roller and the driving roller is (i) coated with a predetermined coating for increasing friction with the 2 nd conveyor belt contact portion, or (ii) formed with grooves corresponding to the 2 nd conveyor belt width so that the 2 nd conveyor belt is disposed inside thereof, thereby preventing the 2 nd conveyor belt from being detached.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2020-0143234 | 2020-10-30 | ||
| KR1020200143234A KR102258981B1 (en) | 2020-10-30 | 2020-10-30 | Belt conveyor apparatus for transferring container of wafer used in semiconductor manufacturing process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114435865A CN114435865A (en) | 2022-05-06 |
| CN114435865B true CN114435865B (en) | 2024-09-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111258287.4A Active CN114435865B (en) | 2020-10-30 | 2021-10-27 | Belt conveyor |
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| Country | Link |
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| KR (1) | KR102258981B1 (en) |
| CN (1) | CN114435865B (en) |
| WO (1) | WO2022092803A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102258981B1 (en) * | 2020-10-30 | 2021-06-02 | 주식회사 세미티에스 | Belt conveyor apparatus for transferring container of wafer used in semiconductor manufacturing process |
| CN115352672A (en) * | 2022-09-15 | 2022-11-18 | 青岛星图智能装备有限公司 | Conveying device of binding machine |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05162831A (en) * | 1991-12-18 | 1993-06-29 | Iwaki Electron Corp Ltd | Widthwise adjustable belt conveyor device |
| KR20090092054A (en) * | 2008-02-26 | 2009-08-31 | 삼성테크윈 주식회사 | Apparatus for transferring pcb |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5261527A (en) * | 1992-03-31 | 1993-11-16 | Feco Engineered Systems, Inc. | Tandem belt conveyor system |
| KR0163545B1 (en) * | 1995-12-23 | 1999-02-01 | 김광호 | Semiconductor wafer transfer equipment |
| KR101000904B1 (en) * | 2010-10-01 | 2010-12-13 | 주식회사 에스제이이노테크 | Inspection conveyer apparatus |
| CN202754491U (en) * | 2012-05-10 | 2013-02-27 | 广东联塑科技实业有限公司 | Belt off-center run preventing transmission structure |
| CN207631958U (en) * | 2017-11-30 | 2018-07-20 | 张家口市通用机械有限责任公司 | Adjustable conveying equipment |
| KR102258981B1 (en) * | 2020-10-30 | 2021-06-02 | 주식회사 세미티에스 | Belt conveyor apparatus for transferring container of wafer used in semiconductor manufacturing process |
-
2020
- 2020-10-30 KR KR1020200143234A patent/KR102258981B1/en active IP Right Grant
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2021
- 2021-10-27 CN CN202111258287.4A patent/CN114435865B/en active Active
- 2021-10-27 WO PCT/KR2021/015209 patent/WO2022092803A1/en active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05162831A (en) * | 1991-12-18 | 1993-06-29 | Iwaki Electron Corp Ltd | Widthwise adjustable belt conveyor device |
| KR20090092054A (en) * | 2008-02-26 | 2009-08-31 | 삼성테크윈 주식회사 | Apparatus for transferring pcb |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102258981B1 (en) | 2021-06-02 |
| CN114435865A (en) | 2022-05-06 |
| WO2022092803A1 (en) | 2022-05-05 |
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