WO2022092803A1

WO2022092803A1 - Belt conveyor device for conveying wafer storage container to be used in semiconductor manufacturing

Info

Publication number: WO2022092803A1
Application number: PCT/KR2021/015209
Authority: WO
Inventors: 민남홍; 김기윤
Original assignee: 주식회사 세미티에스
Priority date: 2020-10-30
Filing date: 2021-10-27
Publication date: 2022-05-05
Also published as: KR102258981B1; CN114435865A

Abstract

According to the present invention, a belt conveyor device for conveying a wafer storage container to be used in semiconductor manufacturing comprises: a conveyor body including a first side frame and a second side frame provided, respectively, at both ends of a lower frame; first_1 to first_n (wherein n is an integer of two or greater) idle rollers provided so that each one end thereof is rotatably coupled to the inner surface of the first side frame and each rotational center axis thereof is positioned colinearly, and second_1 to second_n idle rollers provided so that each one end thereof is rotatably coupled to the inner surface of the second side frame and each rotational center axis thereof is positioned colinearly; a driving roller having both ends rotatably provided in a first roller area of the first side frame and a second roller area of the second side frame, the first roller area of the first side frame formed by projecting the upper and lower surfaces of each of the first_1 to first_n idle rollers, and the second roller area of the second side frame formed by projecting the upper and lower surfaces of each of the second_1 to second_n idle rollers; and a first conveying belt provided so that the inner circumferential surface of the upper side thereof and the inner circumferential surface of the lower side thereof are in close contact with the upper and lower surfaces of each of the first_1 to first_n idle rollers and the outer circumferential surface of the upper side is in close contact with the lower surface of the driving roller, and a second conveying belt provided so that the inner circumferential surface of the upper side thereof and the inner circumferential surface of the lower side thereof are in close contact with the upper and lower surfaces of each of the second_1 to second_n idle rollers and the outer circumferential surface of the upper side is in close contact with the lower surface of the driving roller.

Description

Belt conveyor device for transferring wafer storage containers used in semiconductor manufacturing processes

The present invention relates to a wafer transport device used in a semiconductor manufacturing process, and more particularly, to a belt conveyor device transporting a storage container for storing wafers used in a semiconductor manufacturing process.

In a semiconductor manufacturing process, it is an important issue to safely transport a wafer. Therefore, a wafer storage container equipped with a plurality of wafers, for example, a conveyor transporting a FOUP (Front Opening Unified Pod), needs to be designed so that unexpected problems do not occur during the loading, unloading, and transfer of the wafer storage container. There is a need. In addition, in the semiconductor manufacturing site, the conveyor for transporting the wafer storage container has a structural problem that takes up a lot of space as its length is long and complexly arranged, so a method for reducing the volume of the conveyor also exists.

In FIG. 1 of the prior document (Korean Patent Publication No. 10-2147277), a belt conveyor including a plurality of pulleys is disclosed, and the belt conveyor has a bend pulley, a tension pulley, and a driving pulley at the lower portion thereof. It can be seen that there is a limit to lowering the height because the back must be placed. In addition, in the belt conveyor of the prior document, in the conveyed object being conveyed in contact with the contact surface that is at least a part of the outer peripheral surface of the upper side of the belt, when static electricity or frictional heat is generated on the contact surface, the conveyed object is separated from the contact surface of the belt in a timely manner However, there is a risk that an unexpected impact to the object to be transported may occur, or the transport of the object to be transported may not be properly transported due to a decrease in frictional force due to frictional heat, but a method for reducing this risk has not been disclosed. not.

Therefore, there is a need for a belt conveyor device having a new structure that can be used in a semiconductor manufacturing process by overcoming the problems and limitations of the existing conveyors such as the belt conveyor of the prior literature.

An object of the present invention is to reduce the overall volume by making the height of the belt conveyor device lower by renewing the arrangement of each of the components of the belt conveyor device.

Another object of the present invention is to reduce the effect of static electricity or frictional heat that may occur between the belt and the wafer storage container by forming a space in which the belt and the wafer storage container are spaced apart in the belt conveyor device.

In addition, another object of the present invention is to allow a belt to be stably fastened without detachment by making a predetermined coating or groove formed on at least some of the idle roller and the driving roller in the belt conveyor device.

In order to achieve the object of the present invention as described above and to realize the characteristic effects of the present invention to be described later, the characteristic configuration of the present invention is as follows.

According to one aspect of the present invention, there is provided a belt conveyor device for conveying a wafer storage container used in a semiconductor manufacturing process, the conveyor body including a first side frame and a second side frame installed at both ends of a lower frame, respectively; Each one end is rotatably coupled to the inner surface of the first side frame, and the first 1_1 idle rollers to 1_n installed so that the respective rotational central axes are positioned on the same straight line - Wherein n is an integer of 2 or more - Idle roller and 2_1 idle rollers to 2_n idle rollers, each of which one end is rotatably coupled to the inner surface of the second side frame and installed so that the respective central axes of rotation are positioned on the same straight line; The first roller area of the first side frame formed by projecting the upper surfaces and lower surfaces of each of the 1_1 idle roller to the 1_n idle roller, and the upper and lower surfaces of the 2_1 idle roller to the 2_n idle roller, respectively a driving roller having both ends rotatably installed in each of the second roller areas of the second side frame formed by projecting them; and an upper inner circumferential surface and a lower inner circumferential surface are in close contact with the upper surfaces and lower surfaces of each of the 1_1 idle roller to the 1_n idle roller, respectively, and a first installed so that the upper outer circumferential surface is in close contact with the lower surface of the driving roller 1, the inner peripheral surface of the upper side and the inner peripheral surface of the lower side are in close contact with the upper surfaces and lower surfaces of each of the first conveying belt and the 2_1 idle roller to the 2_n idle roller, and the outer peripheral surface of the upper side is in close contact with the lower surface of the driving roller a second conveying belt installed to be in close contact; There is provided a belt conveyor device comprising a.

As an example, a driving motor installed on at least one of the first side frame and the second side frame to rotate the driving roller to correspond to the conveying direction of the wafer storage container; There is provided a belt conveyor device further comprising a.

As an example, the drive roller is provided with a belt conveyor device, characterized in that the motor roller with a drive motor and a speed reducer built therein.

As an example, one end is rotatably coupled to the first roller region, and one end is rotatably coupled to at least one first tension roller installed on the driving roller and to the second roller region, and the at least one second tension roller installed on the driving roller; There is provided a belt conveyor device further comprising a.

As an example, the inner circumferential surface of the upper side of the first conveyance belt is in close contact with the upper surface of the first tension roller, and the inner circumferential surface of the upper side of the second conveyance belt is in close contact with the upper surface of the second tension roller. A device is provided.

As an example, the upper surface of the first tension roller is positioned on the same straight line as upper surfaces of each of the 1_1 idle roller to the 1_n idle roller, and the upper surface of the second tension roller is the second_1 idle roller to the 2_n There is provided a belt conveyor device positioned on the same straight line with upper surfaces of each of the idle rollers.

As an example, there is provided a belt conveyor device in which diameters of the first tension roller and the second tension roller are smaller than a diameter of the driving roller.

As an example, there is provided a belt conveyor device in which a diameter of the driving roller is smaller than diameters of each of the 1_1 idle roller to the 1_n idle roller and the diameters of each of the 2_1 idle roller to the 2_n idle roller.

As an example, the n is an integer multiple of 2, and the driving roller is

) with idle rollers and 1_(

+1) installed between the idle rollers, (ii) the other end is 2_(

) with the idle roller and the second_(

+1) A belt conveyor device installed between idle rollers is provided.

As an example, (1) each of the 1_1 idle rollers to the 1_n idle rollers, and at least some of the driving rollers, increase the frictional force of (i) a portion in contact with the first conveying belt on at least a portion of an outer peripheral surface thereof or (ii) a groove corresponding to the width of the first transfer belt is formed so that the first transfer belt is installed therein, thereby preventing the separation of the first transfer belt; (2) Each of the 2_1 idle rollers to the 2_n idle rollers, and at least some of the driving rollers, have at least a portion of an outer circumferential surface thereof (i) for increasing the friction force of a portion in contact with the second conveying belt or (ii) a groove corresponding to the width of the second conveyance belt is formed so that the second conveyance belt is installed therein, characterized in that the second conveyance belt is prevented from being separated A belt conveyor apparatus is provided.

According to the present invention, the following effects are obtained.

The present invention has the effect of reducing the overall volume by making the height of the belt conveyor device lower by renewing the arrangement of each component of the belt conveyor device.

In addition, the present invention has an effect of reducing the effect of static electricity or frictional heat that may occur between the belt and the wafer storage container by forming a space in which the belt and the wafer storage container are spaced apart in the belt conveyor device.

In addition, the present invention has the effect of allowing the belt to be stably fastened without detachment by allowing a predetermined coating or groove to be formed on at least some of the idle roller and the driving roller in the belt conveyor device.

1 is a diagram schematically illustrating a belt conveyor device having two first tension rollers and an inner surface of a first side frame of the belt conveyor device according to an embodiment of the present invention.

2A and 2B are views schematically illustrating an inner surface of a first side frame when a first tension roller is installed in a first position according to an embodiment of the present invention.

2C and 2D are views schematically illustrating an inner surface of a first side frame when the first tension roller is installed in a second position according to an embodiment of the present invention.

FIG. 2E is a diagram schematically illustrating an inner surface of a first side frame in the absence of a first tension roller according to an embodiment of the present invention.

3 is a diagram schematically illustrating a wafer storage container being conveyed in a belt conveyor device having two first tension rollers according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] Reference is made to the accompanying drawings, which show by way of illustration specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different but need not be mutually exclusive. For example, certain shapes, structures, and characteristics described herein with respect to one embodiment may be implemented in other embodiments without departing from the spirit and scope of the invention.

In addition, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Accordingly, the detailed description set forth below is not intended to be taken in a limiting sense, and the scope of the present invention, if properly described, is limited only by the appended claims, along with all scope equivalents as those claimed. Like reference numerals in the drawings refer to the same or similar functions throughout the various aspects.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings in order to enable those of ordinary skill in the art to easily practice the present invention.

1 is a view schematically illustrating a belt conveyor device having two first tension rollers and an inner surface of a first side frame of the belt conveyor device according to an embodiment of the present invention.

Referring to FIG. 1 , the belt conveyor apparatus 100 may include a conveyor body including a first side frame 110 and a second side frame 120 installed at both ends of a lower frame 130 , respectively. And, each one end is rotatably coupled to the inner surface 200 of the first side frame 110 , and the first 1_1 idle rollers to 1_n installed so that the respective central axes of rotation are located on the same straight line 202 . The idle rollers 210-(1_1), 210-(1_2), ..., 210-(1_n)) and one end of each of the second side frames are rotatably coupled to the inner surface of the frame 120, each It may include a 2_1 idle roller to 2_n idle roller installed so that the central axes of rotation are located on the same straight line. In this case, n may be an integer of 2 or more.

For reference, components installed on the second side frame 120 opposite to the first side frame 110 are not shown in the drawings of FIGS. 1 to 3 , but are installed on the first side frame 110 . Components of the same type may be installed to correspond to each other. And, in the following, the components installed on the first side frame 110 will be described based on, and the components installed on the second side frame 120 may not be separately described, but even in such a case, the second side frame ( It should be noted that content similar to the description of the components installed on the first side frame 110 may be applied to the components installed in 120 .

Next, the belt conveyor device 100, the first 1_1 idle roller to the 1_n idle roller (210-(1_1), 210-(1_2), ..., 210-(1_n)) each of the upper surfaces and lower surfaces The first roller area 201 formed on the inner surface 200 of the first side frame 110 by being projected, and the upper and lower surfaces of each of the 2_1 idle roller to 2_n idle roller are projected to the second side frame 120 ) may include a driving roller 220 having both ends rotatably installed in each of the second roller regions formed on the inner surface.

At this time, as an example of the present invention, the driving roller 220 is installed on at least one of the first side frame 110 and the second side frame 120 so that the driving roller 220 corresponds to the conveying direction of the wafer storage container. It may be linked with a driving motor that rotates as much as possible. FIG. 2 illustrates a case in which the driving motor 221 is installed on the outer surface of the first side frame 112 .

However, as another example of the invention, the driving roller 220 may be a motor roller having a driving motor and a reducer built therein. In this case, there is no need for a separate driving motor to be installed outside the driving roller 220 , and the wafer storage container can be transported by rotating itself.

In addition, as another example of the invention, n may be an integer of a multiple of 2, and the driving roller 220 includes (i) one end of the first_(

) with idle rollers and 1_(

+1) installed between the idle rollers, (ii) the other end is 2_(

) with the idle roller and the second_(

+1) Can be installed between idle rollers. At this time, the driving roller 220 and the adjacent idle roller 1_(

) with idle rollers and 1_(

+1) The spacing between the spaces formed by the idle rollers is the first idle roller to the first_(

) the interval of each idle roller, and the first_(

+1) The interval between the idle rollers to the 1_n idle rollers may be greater than each of the idle rollers, which may vary according to the implementation conditions of the present invention.

And, the belt conveyor device 100, the 1_1 idle roller to the 1_n idle roller (210-(1_1), 210-(1_2), ..., 210-(1_n)) on the upper and lower surfaces of each The inner peripheral surface of the upper side and the inner peripheral surface of the lower side are in close contact with each other, and the first conveying belt installed so that the outer peripheral surface of the upper side is in close contact with the lower surface of the driving roller 220, the upper surfaces of each of the 2_1 idle rollers to the 2_n idle rollers; A second conveying belt installed so that the inner peripheral surface of the upper side and the inner peripheral surface of the lower side are in close contact with the lower surfaces, respectively, and the outer peripheral surface of the upper side is in close contact with the lower surface of the driving roller 220 .

At least a portion of the upper side of the first conveying belt 240 and the second conveying belt installed in this way is drawn in in the direction of the driving roller 220 to form a predetermined separation space, so that the outer peripheral surface of the upper side is continuous. It may be divided into at least two faces rather than a face. 1, a predetermined separation space 241 formed in the first transfer belt 240 is shown, and related details are further described with reference to a separate drawing ( FIG. 3 ) in which a wafer storage container is shown below. Let me explain in detail.

Next, as an example of the invention, the belt conveyor apparatus 100 has a diameter of the driving roller 220 of 1_1 idle rollers to 1_n idle rollers 210-(1_1), 210-(1_2), ... , 210-(1-n)) and smaller than the diameters of each of the 2_1 idle rollers to the 2_n idle rollers, respectively, so that both ends of the driving roller 220 are the first roller area 201 and the second roller Each of the realms can be completely covered. By doing so, the height 300 of the first side frame 110 may be lowered.

In addition, as another example of the invention, the belt conveyor apparatus 100 has one end rotatably coupled to the first roller region 201 , and at least one first tension roller installed on the driving roller 220 . (230-1, 230-2), and one end is rotatably coupled to the second roller region, and may further include at least one second tension roller installed on the upper portion of the driving roller 220

And, in the belt conveyor apparatus 100, the inner peripheral surface of the upper side of the first transfer belt is in close contact with the upper surface of the first tension rollers 230-1 and 230-2, and the second transfer belt is attached to the upper surface of the second tension roller By making the inner peripheral surface of the upper side of the to be in close contact, the first transfer belt and the second transfer belt can have a strong tension.

In addition, in the belt conveyor apparatus 100, the upper surfaces of the first tension rollers 230-1 and 230-2 are the 1_1 idle rollers to the 1_n idle rollers 210-(1_1), 210-(1_2), . The separation space 241 formed on the outer peripheral surface of the upper side of the first transfer belt can be started from the upper surface of the first tension rollers 230-1 and 230-2, and is formed on the outer peripheral surface of the upper side of the second transfer belt The separation space may be made to start from the upper surface of the second tension roller.

In addition, the first tension rollers 230-1 and 230-2 and the second tension roller have a diameter smaller than that of the driving roller 220, so that the first tension rollers 230-1 and 230- 2) may be completely included in the first roller region, and the second tension roller may be completely included in the second roller region. By doing so, the height 300 of the first side frame 110 may be lowered.

For reference, FIG. 1 shows an example of the invention in which two first tension rollers 230-1 and 230-2 and two second tension rollers are installed, respectively. Unlike this, the first tension roller and the second tension roller Each of the rollers may be installed one by one, or the first tension roller and the second tension roller may be absent, which may vary according to the implementation conditions of the present invention.

2A and 2B are views schematically showing the inner surface of the first side frame when the first tension roller is installed in the first position according to an embodiment of the present invention, and FIGS. 2C and 2D are, It is a view schematically showing the inner surface of the first side frame when the first tension roller is installed in the second position according to an embodiment of the present invention.

Referring to FIG. 2A , as an example of the present invention, when there is one first tension roller 230-1 and is installed in the first position, which is the upper left side of the driving roller 220, the first transport belt 240 is driven The upper belt portion corresponding to the upper left side of the roller 220 is installed to have a strong tension by the first tension roller 230-1, and on the upper right side of the driving roller 220, an idle roller adjacent thereto It may be installed to connect the upper surface of the and the lower surface of the driving roller 220 in a straight line. However, referring to FIG. 2B , unlike the one shown in FIG. 2A , in the first conveyance belt 240 , the upper belt portion corresponding to the upper right side of the driving roller 220 is the first tension roller 230-1). The inner peripheral surface is installed to have strong tension by being in contact with the first tension roller 230-1, and on the upper left side of the driving roller 220, the upper surface of the idle roller adjacent to the left side of the driving roller 220 It may be installed so as to connect the lower surface of the driving roller and the driving roller in a straight line.

In addition, as another example of the present invention, the first tension roller may be installed at a second position on the upper right side of the driving roller 220 .

2C and 2D are diagrams schematically illustrating a region of a first belt and a first roller when the first tension roller is installed at a second position according to an embodiment of the present invention.

As shown in FIGS. 2C and 2D , when there is one first tension roller 230 - 2 and is installed at the second position on the upper right side of the driving roller 220 , the first tension roller is located at the first position from the top Since the content is similar to the case in which (230-1) is installed only in the left and right directions, a detailed description will be omitted.

And, as another example of the invention, when there is a space above the driving roller 220 in the vertical direction, the first tension roller may be installed directly above the driving roller 220, even in this case, the first transfer The installation form of the belt 240 may be applied in the same manner as described above.

Also, since the second tension roller may be installed so that the second belt has a strong tension in a manner similar to that of the first tension roller as described above, a description thereof will also be omitted.

Next, as another example of the invention, the belt conveyor apparatus 100 may not have the first tension roller and the second tension roller installed.

Referring to FIG. 2E , the first transport belt 240 may be installed such that the upper surfaces of the idle rollers adjacent to the left and right of the driving roller 220 and the lower surface of the driving roller 220 are connected in a straight line. In this case, as described above, the magnitude of the tension may be smaller than when the first tension roller is installed. Due to the nature of the installation form to be used, the first conveying belt 240 may be installed so that the driving roller 220 also serves as a tension roller.

And, the interaction between the first transfer belt 240 and the wafer storage container will be described below with reference to FIG. 3 showing the wafer storage container transported by the belt conveyor apparatus 100 as described above.

FIG. 3 is a diagram schematically illustrating a wafer storage container being conveyed in a belt conveyor apparatus having two first tension rollers according to an embodiment of the present invention.

Referring to FIG. 3 , a portion of the lower surface of the wafer storage container 400 is in contact with the first wafer storage container contact surfaces 242-1 and 243-1, which are part of the upper outer peripheral surface of the first transfer belt 240, and the lower surface Another portion of the second transfer belt may be in contact with the contact surface of the second wafer storage container, which is a part of the outer peripheral surface of the upper side of the second transfer belt. At this time, since the first wafer storage container contact surface and the second wafer storage container contact surface correspond to each other and may be in a similar state, below, the first wafer storage container contact surfaces 242-1 and 243-1 and the first transfer belt 240 It will be explained on the basis of

As shown in FIG. 3 , a separation space 241 corresponding to the position of the driving roller 220 may be formed on the outer peripheral surface of the upper side of the first conveyance belt 240 . Based on this, the upper outer circumferential surface of the first conveying belt 240 has a 1-1 division upper side outer circumferential surface 242-1 and 242-2 and a 1-2 division upper side outer circumferential surface 243-1, 243-2). Through this, as compared to the case where the upper outer peripheral surface of the first transfer belt 240 has a single surface, static electricity is generated on the contact surface between the wafer storage container and the belt during the transfer process including loading and unloading of the wafer storage container. Possibility of unexpected disconnection of contact even though the storage container should be timely disconnected from the belt, resulting in parts of the belt being attached to the wafer storage container and being pulled up, falling from it, and impacting the wafer storage container In addition, as frictional heat is generated on the contact surface between the wafer storage container and the belt, and frictional force is reduced, the possibility of occurrence of a situation in which the wafer storage container cannot be conveyed properly can also be reduced.

Next, as an example of the invention, (1) each of the 1_1 idle rollers to the 1_n idle rollers 210-(1_1), 210-(1_2), ..., 210-(1_n)), and a driving roller ( 220), at least a portion of at least a portion of its outer peripheral surface (i) a predetermined coating for increasing the friction force of the portion in contact with the first transfer belt 240, or (ii) the first transfer belt 240 By forming a groove corresponding to the width of the first transfer belt 240 to be installed therein, the separation of the first transfer belt 240 is prevented, and (2) the 2_1 idle roller to the 2_n idle roller Each, and at least a portion of the driving roller 220, at least a portion of its outer peripheral surface is (i) a predetermined coating for increasing the friction force of the portion in contact with the second conveying belt, or (ii) the second conveying belt By forming a groove corresponding to the width of the second transfer belt to be installed therein, it is possible to prevent separation of the second transfer belt.

At this time, the predetermined coating may be a synthetic resin such as urethane, but is not limited thereto, and other materials may be adopted according to the operating conditions of the invention.

In addition, the belt conveyor apparatus 100 as described above may be connected in plurality as needed in a modular manner to constitute the entire conveyor system, in which case the first roller area 201 and the second roller of each of the belt conveyor apparatuses. Each area is formed so as to be in close contact with each of the adjacent roller areas at a predetermined height, so that each of the corresponding conveying belts is continuously repeated without being spaced apart by a predetermined interval or more. It can be stably conveyed in contact with each of its respective upper outer peripheral surfaces.

In the above, the present invention has been described with specific matters such as specific components and limited embodiments and drawings, but these are provided to help a more general understanding of the present invention, and the present invention is not limited to the above embodiments. , various modifications and variations can be devised from these descriptions by those of ordinary skill in the art to which the present invention pertains.

Accordingly, the spirit of the present invention should not be limited to the above-described embodiments, and not only the claims described below, but also all modifications equivalently or equivalently to the claims described below belong to the scope of the spirit of the present invention. will do it

Claims

A belt conveyor device for transporting a wafer storage container used in a semiconductor manufacturing process, comprising:

a conveyor body including a first side frame and a second side frame respectively installed at both ends of the lower frame;

Each one end is rotatably coupled to the inner surface of the first side frame, and the first 1_1 idle rollers to 1_n installed so that the respective rotational central axes are positioned on the same straight line - Wherein n is an integer of 2 or more - Idle roller and 2_1 idle rollers to 2_n idle rollers, each of which one end is rotatably coupled to the inner surface of the second side frame and installed so that the respective central axes of rotation are positioned on the same straight line;

The first roller area of the first side frame formed by projecting the upper surfaces and lower surfaces of each of the 1_1 idle roller to the 1_n idle roller, and the upper and lower surfaces of the 2_1 idle roller to the 2_n idle roller, respectively a driving roller having both ends rotatably installed in each of the second roller areas of the second side frame formed by projecting them; and

A first installed so that the inner peripheral surface of the upper side and the inner peripheral surface of the lower side are in close contact with the upper surfaces and lower surfaces of each of the 1_1 idle roller to the 1_n idle roller, respectively, and the outer peripheral surface of the upper side is in close contact with the lower surface of the driving roller The inner peripheral surface of the upper side and the inner peripheral surface of the lower side are in close contact with the conveying belt and the upper and lower surfaces of each of the 2_1 idle roller to the 2_n idle roller, respectively, and the outer peripheral surface of the upper side is in close contact with the lower surface of the driving roller a second conveying belt installed so as to be possible;

A belt conveyor device comprising a.
According to claim 1,

a driving motor installed on at least one of the first side frame and the second side frame to rotate the driving roller to correspond to a conveyance direction of the wafer storage container;

Belt conveyor device further comprising a.
According to claim 1,

The drive roller is a belt conveyor device, characterized in that the motor roller and the drive motor and the speed reducer built therein.
According to claim 1,

One end is rotatably coupled to the first roller region, and at least one first tension roller installed on the driving roller, and one end rotatably coupled to the second roller region, the driving roller at least one second tension roller installed thereon;

Belt conveyor device further comprising a.
5. The method of claim 4,

A belt conveyor device in which an inner peripheral surface of the upper side of the first transfer belt is in close contact with an upper surface of the first tension roller, and an inner peripheral surface of the upper side of the second transfer belt is in close contact with an upper surface of the second tension roller.
5. The method of claim 4,

An upper surface of the first tension roller is positioned on the same straight line as upper surfaces of each of the 1_1 idle roller to the 1_n idle roller, and an upper surface of the second tension roller is disposed on the second_1 idle roller to the 2_n idle roller, respectively A belt conveyor device located on the same straight line as the upper surfaces of
5. The method of claim 4,

A belt conveyor device in which diameters of the first tension roller and the second tension roller are smaller than diameters of the driving roller.
According to claim 1,

A diameter of the driving roller is smaller than diameters of each of the 1_1 idle roller to the 1_n idle roller and the diameters of each of the 2_1 idle roller to the 2_n idle roller.
According to claim 1,

wherein n is an integer multiple of 2,

The driving roller, (i) one end of the first_(
) with idle rollers and 1_(
+1) installed between the idle rollers, (ii) the other end is 2_(
) with the idle roller and the second_(
+1) Belt conveyor device installed between idle rollers.
According to claim 1,

(1) Each of the first_1 idle rollers to the first_n idle rollers, and at least a portion of the driving roller, has at least a portion of its outer peripheral surface (i) a predetermined value for increasing the frictional force of a portion in contact with the first conveying belt or (ii) a groove corresponding to the width of the first transfer belt is formed so that the first transfer belt is installed therein, thereby preventing the separation of the first transfer belt, (2) Each of the 2_1 idle rollers to the 2_n idle rollers, and at least a portion of the driving roller, has at least a portion of its outer peripheral surface (i) a predetermined coating for increasing the friction force of a portion in contact with the second conveying belt or (ii) a groove corresponding to the width of the second conveying belt is formed so that the second conveying belt is installed therein, thereby preventing separation of the second conveying belt. .