CN114427779A - Linear vacuum drying equipment - Google Patents
Linear vacuum drying equipment Download PDFInfo
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- CN114427779A CN114427779A CN202111458815.0A CN202111458815A CN114427779A CN 114427779 A CN114427779 A CN 114427779A CN 202111458815 A CN202111458815 A CN 202111458815A CN 114427779 A CN114427779 A CN 114427779A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
- F26B5/041—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum for drying flowable materials, e.g. suspensions, bulk goods, in a continuous operation, e.g. with locks or other air tight arrangements for charging/discharging
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/001—Handling, e.g. loading or unloading arrangements
- F26B25/003—Handling, e.g. loading or unloading arrangements for articles
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention discloses linear vacuum drying equipment, which relates to the technical field of drying equipment and comprises a feeding area, a drying area and a discharging area which are sequentially communicated, and a vacuum regulation and control system for controlling the vacuum state of the feeding area, the drying area and the discharging area, wherein the drying area comprises a front buffer cavity, a drying cavity and a rear buffer cavity which are sequentially communicated, a gas spraying system is arranged in the cavity of the drying cavity, a heating system is arranged at the bottom in the cavity of the drying cavity, and the gas spraying system comprises gas spraying areas and gas pumping areas which are arranged at intervals and are alternately and repeatedly arranged. The invention has the advantages that through the mode of air supply and air exhaust at uniform intervals and the combination of dynamic transmission of the glass, fresh air is uniformly distributed on all parts of the surface of the glass to form better gas exchange, so that better drying effect is achieved, and the dynamic transmission mode is also favorable for the capacity design of large-scale mass production equipment with linear transmission.
Description
Technical Field
The invention relates to the technical field of drying equipment, in particular to linear vacuum drying equipment.
Background
Solar energy is inexhaustible renewable energy source and is also clean energy source, and no environmental pollution is generated. Among the effective uses of solar energy; solar photovoltaic utilization is one of the most attractive projects in the most rapid and active research field in recent years. For this reason, solar cells have been developed and developed. In recent years, as the efficiency of the HIT battery, the Topcon structure, the perovskite tandem solar cell and the like is high, the efficiency of the HIT battery, the Topcon structure, the perovskite tandem solar cell and the like is improved very fast in recent years, and the volume production is greatly promoted.
Solar cells are usually prepared on glass plated with transparent conductive films, wherein most organic layers are usually coated, organic sol coated is usually a liquid formula solution, redundant organic solution is required to be dried and volatilized after coating is finished, the volatilization process is required to be very uniform, and conventional designs usually have the following steps: firstly, uniformly supplementing air by an upper spraying plate, and exhausting air from the periphery of the bottom; secondly, the unilateral air supplement forms convection by the air extraction at the opposite side. However, the two methods have the following problems that the gas tends to flow towards the peripheral edge of the glass in the first method, so that the gas in the central area of the spray plate is thinner, and the volatilization of a film layer is uneven; in the second scheme, the organic solution on the surface of the glass can be exchanged in the process of volatilization of the gas entering, and the gas entering at one side is fresh due to the design of air extraction at the opposite side, so that the gas exchange at the opposite side is influenced. Such a commonly used scheme of air-supply and air-exhaust is not ideal.
Disclosure of Invention
The invention aims to provide linear vacuum drying equipment, which has the advantages that fresh gas is uniformly distributed on all positions on the surface of glass to form better gas exchange by combining a mode of uniformly supplementing and exhausting gas at intervals and dynamic transmission of the glass, so that a better drying effect is achieved, the dynamic transmission mode is also favorable for the capacity design of large-scale mass production equipment for linear transmission, and the technical problems in the background technology are solved.
In order to achieve the purpose, the invention provides the following technical scheme: a linear vacuum drying device comprises a feeding area, a drying area and a discharging area which are sequentially communicated, and a vacuum regulation and control system for controlling the vacuum state of the feeding area, the drying area and the discharging area;
the drying area comprises a front buffer cavity, a drying cavity and a rear buffer cavity which are sequentially communicated, a gas spraying system is arranged in the drying cavity, and a heating system is arranged at the bottom in the drying cavity;
the gas spraying system comprises gas spraying areas and gas pumping areas which are arranged at intervals and are alternately and repeatedly arranged.
Optionally, the air injection area and the air extraction area both include a plurality of air ports, the air extraction area is arranged in a groove relative to the air injection area, the diameter of each air port is 0.5mm to 5mm, the width of each groove is 0.5mm to 5mm, and the length of each groove is 1mm to 1000 mm.
Optionally, the length of the effective air injection area of the air injection area is greater than the width of the substrate to be dried in the direction perpendicular to the conveying direction, specifically greater than 1cm to 10 cm.
Optionally, the gas spraying system is fixed on a parallel surface of a surface to be dried after the substrate to be dried is transmitted to the drying cavity, and the distance between the bottom surface of the gas spraying system and the two parallel surfaces of the upper surface of the substrate to be dried is 2 mm-200 mm.
Optionally, the gas sprayed by the gas spraying system includes one or more mixed gases of nitrogen, hydrogen, dry air, oxygen, methylamine, ammonia and the like.
Optionally, the feeding region comprises a feeding platform and a feeding cavity, the discharging region comprises a discharging cavity and a discharging platform, the feeding platform is communicated with the front buffer cavity, the drying cavity, the rear buffer cavity, the discharging cavity and the discharging platform in sequence, and gate valves are arranged between the feeding platform and the feeding cavity, between the feeding cavity and the front buffer cavity, between the rear buffer cavity and the discharging cavity, and between the discharging cavity and the discharging platform.
Optionally, the vacuum regulation and control system comprises a vacuum pump, and the vacuum pump is respectively communicated with the feeding cavity and the discharging cavity through a first electromagnetic valve, a second electromagnetic valve and a three-way pipe.
Optionally, the system further comprises an inflator pump and an air pump, wherein the inflator pump is communicated with the air injection area so as to adjust the air injection flow of the air injection area by controlling the inflator pump, the air intake flow of the whole equipment is 0.2slm to 200slm, and the air pump is communicated with the air extraction area.
Optionally, the number of the drying chambers is at least one.
Compared with the prior art, the invention has the following beneficial effects:
firstly, the invention is linear transmission, the feeding cavity and the discharging cavity are separated by two gate valves, so that the drying cavity can be kept in a vacuum state all the time, and thus the substrate can realize dynamic linear transmission drying treatment, the mass production treatment of substrate drying is realized, and the productivity is very high.
The air injection areas and the air extraction areas are arranged at intervals, a small air flow circulating space is formed between the adjacent air injection areas and the adjacent air extraction areas, air in the space is kept fresh all the time through the supplement of the air injection areas, and the uniformity of the air in the vertical transmission direction is ensured by the mode that the air ports are uniformly distributed, so that the uniformity of the similar drying effect of the area is ensured.
Thirdly, the air injection areas and the air extraction areas are repeatedly arranged, when the substrate is dynamically conveyed forwards, the substrate can be gradually and uniformly dried after passing through the plurality of circulation units of the air injection areas and the air extraction areas, and each point on the substrate in the conveying direction passes through the same number of circulation units, so that the uniformity of the drying effect in the conveying direction of the substrate is ensured.
And fourthly, the heights of the vacuum regulation and control system, the heating system and the gas spraying system can be regulated, and the gas flow of the air injection can be regulated and controlled, so that the equipment has extremely high compatibility and process stability.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a top view of the gas shower system of the present invention;
fig. 3 is a bottom view of the gas shower system configuration of the present invention.
In the figure: 1-feeding platform, 2-feeding cavity, 3-front buffer cavity, 4-drying cavity, 6-rear buffer cavity, 7-blanking cavity, 8-blanking platform, 9-gate valve, 10-vacuum pump, 11-gas spraying system, 12-heating system, 13-three-way pipe, 14-first electromagnetic valve, 16-second electromagnetic valve, 17-gas spraying area and 18-gas extraction area.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
referring to fig. 1 to 3, the present invention provides a technical solution: the linear vacuum drying equipment comprises a feeding area, a drying area and a discharging area which are sequentially communicated, and a vacuum regulation and control system for controlling the vacuum state of the feeding area, the drying area and the discharging area.
The drying area comprises a front buffer cavity 3, a drying cavity 4 and a rear buffer cavity 6 which are sequentially communicated, a gas spraying system 11 is arranged in the cavity of the drying cavity 4, a heating system 12 is arranged at the bottom in the cavity of the drying cavity 4, the gas spraying system 11 comprises a gas spraying area 17 and a gas extraction area 18 which are arranged at intervals and are alternately and repeatedly arranged, and the gas spraying area 17 and the gas extraction area 18 are spaced by 5 cm.
The vacuum regulation and control system, the heating system 12 and the gas spraying system 11 in the invention can adopt the existing general technical means, such as realizing the height regulation of the vacuum regulation and control system by an electric push rod and the gas flow regulation and control of the gas injection, thus the equipment has extremely high compatibility and process stability.
The whole equipment is vacuumized to the bottom pressure, which can be 10Pa in the embodiment, by a vacuum regulation and control system, then the substrate to be dried is conveyed into the drying cavity 4 through the front buffer cavity 3 by the material loading area, in the process, because the air injection areas 17 and the air extraction areas 18 are arranged at intervals, and the adjacent air injection areas 17 and the air extraction areas 18 form a small air flow circulation space, the gas in the space is kept fresh all the time through the supplement of the gas injection area 17, and the uniformity of the gas in the vertical transmission direction is ensured by the way of uniformly distributing a plurality of gas ports, so that the uniformity of the drying effect of the area is ensured, then the substrate is dynamically conveyed forwards, the substrate is gradually and uniformly dried after passing through the circulating units of the plurality of air injection areas 17 and the air extraction areas 18, every point on the substrate in the conveying direction passes through the same number of circulating units, so that the uniformity of the drying effect in the conveying direction of the substrate is ensured. The dried substrate is then transported away through a blanking area so that the substrate completes the entire process and proceeds to the next process.
Further, the length of the effective air injection area of the air injection area 17 is larger than the width of the substrate to be dried in the direction perpendicular to the conveying direction, specifically larger than 1 cm-10 cm.
Further, the gas spraying system 11 is fixed on the parallel surface of the surface to be dried after the substrate to be dried is transmitted to the drying chamber 4, and the distance between the bottom surface of the gas spraying system 11 and the two parallel surfaces of the upper surface of the substrate to be dried is 2 mm-200 mm.
Further, the gas sprayed by the gas spraying system 11 includes one or more mixed gases of nitrogen, hydrogen, dry air, oxygen, ammonia, and the like.
Further, the material loading region includes material loading platform 1 and material loading chamber 2, the material unloading region includes unloading chamber 7 and unloading platform 8, material loading platform 1, material loading chamber 2, preceding cushion chamber 3, dry chamber 4, back cushion chamber 6, unloading chamber 7 and unloading platform 8 are linked together in proper order, between material loading platform 1 and the material loading chamber 2, between material loading chamber 2 and preceding cushion chamber 3, between back cushion chamber 6 and the unloading chamber 7, and all be provided with gate valve 9 between unloading chamber 7 and the unloading platform 8.
The substrate to be dried is conveyed to the feeding platform 1 through the transmission system, then the gate valve 9 between the feeding platform 1 and the feeding cavity 2 is opened, the substrate to be dried is conveyed into the feeding cavity 2, and the gate valve 9 between the feeding platform 1 and the feeding cavity 2 is closed. And the vacuum pressure in the feeding cavity 2 is pumped to be consistent with the pressure of the front buffer cavity 3 through a vacuum regulation and control system.
Opening a gate valve 9 between the feeding cavity 2 and the front buffer cavity 3, transferring the substrate to be dried to a drying cavity 4 through the front buffer cavity 3, advancing at a constant speed, then closing the gate valve 9 between the rear feeding cavity 2 and the front buffer cavity 3, breaking vacuum in the feeding cavity 2, door valve 9 is opened once more between its material loading platform 1 and the material loading chamber 2, the next piece of base plate of treating drying can be transmitted to material loading chamber 2 in, the base plate of treating drying that transmits to drying chamber 4 advances at the uniform velocity, through drying chamber 4, through back cushion chamber 6 again, door valve 9 between cushion chamber 6 and the unloading chamber 7 is opened afterwards, base plate after the drying transmits to unloading chamber 7 in, close door valve 9 between back cushion chamber 6 and the unloading chamber 7 after the complete transmission, unloading chamber 7 breaks vacuum to atmosphere, door valve 9 between unloading chamber 7 and the unloading platform 8 is opened afterwards, base plate after the drying transmits to unloading platform 8 department, so this base plate accomplishes whole process.
In summary, the apparatus is designed to be linear transfer, and the feeding cavity 2 and the discharging cavity 7 are separated by two gate valves, so that the drying cavity 4 can be kept in a vacuum state all the time, and thus the substrate can be subjected to dynamic linear transfer drying treatment, and thus the mass production treatment of substrate drying is realized, and the productivity is very high.
Further, the vacuum regulation and control system comprises a vacuum pump 10, and the vacuum pump 10 is respectively communicated with the feeding cavity 2 and the discharging cavity 7 through a first electromagnetic valve 14, a second electromagnetic valve 16 and a three-way pipe 13.
Further, the device also comprises an inflator pump 19 and an air pump 20, wherein the inflator pump 19 is communicated with the air injection area 17 so as to adjust the air injection flow of the air injection area 17 by controlling the inflator pump 19, the air inlet flow of the whole device is 0.2 slm-200 slm, and the air pump 20 is communicated with the air extraction area 18.
Further, the number of the drying chambers 4 is at least one.
In the second embodiment, on the basis of the previous embodiment, another embodiment may be:
the total equipment had an inlet flow of 10 slm.
In a third embodiment, on the basis of the previous embodiment, another embodiment may be:
the effective gas injection area length of the gas injection area 17 is greater than the width of the substrate to be dried perpendicular to the transport direction, specifically greater than 5 cm.
The working principle is as follows: when the linear vacuum drying equipment is used, the gate valve 9 between the back buffer cavity 6 and the blanking cavity 7 is opened, then the vacuum pump 10 is started, the second electromagnetic valve 16 is opened, and the whole equipment is vacuumized to the bottom pressure and 10 Pa.
Then the vacuum pump 10 and the second electromagnetic valve 16 are closed, the substrate to be dried is conveyed to the loading platform 1 through the transmission system, then the gate valve 9 between the loading platform 1 and the loading cavity 2 is opened, the substrate to be dried is conveyed into the loading cavity 2, and the gate valve 9 between the loading platform 1 and the loading cavity 2 is closed.
And starting the vacuum pump 10, opening the first electromagnetic valve 14, pumping the vacuum pressure in the feeding cavity 2 to be consistent with the pressure of the front buffer cavity 3, and then closing the vacuum pump 10 and the first electromagnetic valve 14.
And opening a gate valve 9 between the feeding cavity 2 and the front buffer cavity 3, conveying the substrate to be dried to a drying cavity 4 through the front buffer cavity 3, advancing at a constant speed, then closing the gate valve 9 between the rear feeding cavity 2 and the front buffer cavity 3, breaking vacuum in the feeding cavity 2, opening the gate valve 9 between the feeding platform 1 and the feeding cavity 2 again, and conveying the next substrate to be dried into the feeding cavity 2.
The substrate to be dried, which is transmitted to the drying cavity 4, moves forward at a constant speed, passes through the drying cavity 4 and then passes through the rear buffer cavity 6, in the process, the air injection areas 17 and the air extraction areas 18 are arranged at intervals, and the adjacent air injection areas 17 and the air extraction areas 18 form a small air flow circulation space, the air in the space is kept fresh all the time through the supplement of the air injection areas 17, and the uniformity of the air in the vertical transmission direction is ensured by the uniform distribution mode of a plurality of air ports, so that the uniformity of the drying effect of the area is ensured, the substrate is dynamically transmitted forward, the substrate is gradually and uniformly dried after passing through the circulation units of the air injection areas 17 and the air extraction areas 18, each point in the transmission direction on the substrate passes through the circulation units with the same number, and the uniformity of the drying effect in the substrate transmission direction is ensured.
Then the gate valve 9 between the buffer cavity 6 and the blanking cavity 7 is opened, the dried substrate is conveyed into the blanking cavity 7, the gate valve 9 between the buffer cavity 6 and the blanking cavity 7 is closed after the substrate is completely conveyed, the blanking cavity 7 is vacuumized to the atmosphere, then the gate valve 9 between the blanking cavity 7 and the blanking platform 8 is opened, and the dried substrate is conveyed to the blanking platform 8, so that the substrate finishes all processes and enters the next process.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The linear vacuum drying equipment is characterized by comprising a feeding area, a drying area and a discharging area which are sequentially communicated, and a vacuum regulation and control system for controlling the vacuum state of the feeding area, the drying area and the discharging area;
the drying area comprises a front buffer cavity (3), a drying cavity (4) and a rear buffer cavity (6) which are communicated in sequence, a gas spraying system (11) is arranged in the drying cavity (4), and a heating system (12) is arranged at the bottom in the drying cavity (4);
the gas spraying system (11) comprises gas spraying areas (17) and gas extraction areas (18) which are arranged at intervals and are alternately and repeatedly arranged.
2. The linear vacuum drying apparatus of claim 1, wherein: the air injection area (17) and the air extraction area (18) both comprise a plurality of air ports, the air extraction area (18) is arranged in a groove relative to the air injection area (17), the diameter of each air port is 0.5-5 mm, the width of each groove is 0.5-5 mm, and the length of each groove is 1-1000 mm.
3. The linear vacuum drying apparatus of claim 1, wherein: the length of an effective air injection area of the air injection area (17) is larger than the width of the substrate to be dried in the direction vertical to the conveying direction, and is specifically larger than 1 cm-10 cm.
4. The linear vacuum drying apparatus of claim 1, wherein: the gas spraying system (11) is fixed on a parallel surface of a surface to be dried after the substrate to be dried is transmitted to the drying cavity (4), and the distance between the bottom surface of the gas spraying system (11) and two parallel surfaces of the upper surface of the substrate to be dried is 2-200 mm.
5. The linear vacuum drying apparatus of claim 1, wherein: the gas sprayed by the gas spraying system (11) comprises one or more mixed gases of nitrogen, hydrogen, dry air, oxygen, ammonia gas and the like.
6. The linear vacuum drying apparatus of any one of claims 1 to 5, wherein: the material loading region comprises a material loading platform (1) and a material loading cavity (2), the material unloading region comprises a material unloading cavity (7) and a material unloading platform (8), the material loading platform (1) is the material loading cavity (2), the front buffer cavity (3) is the drying cavity (4), the rear buffer cavity (6) is the material unloading cavity (7) and the material unloading platform (8) are sequentially communicated, the material loading platform (1) is the material loading cavity (2), the material loading cavity (2) is the front buffer cavity (3), the rear buffer cavity (6) is the material unloading cavity (7), and a gate valve (9) is arranged between the material unloading cavity (7) and the material unloading platform (8).
7. The linear vacuum drying apparatus of claim 6, wherein: the vacuum regulation and control system comprises a vacuum pump (10), wherein the vacuum pump (10) is communicated with the feeding cavity (2) and the discharging cavity (7) through a first electromagnetic valve (14), a second electromagnetic valve (16) and a three-way pipe (13).
8. The linear vacuum drying apparatus of claim 1, wherein: the air-jet device is characterized by further comprising an inflator pump (19) and an air pump (20), wherein the inflator pump (19) is communicated with the air-jet area (17) so as to adjust the air-jet flow of the air-jet area (17) by controlling the inflator pump (19), the air-jet flow of the whole device is 0.2 slm-200 slm, and the air pump (20) is communicated with the air-jet area (18).
9. The linear vacuum drying apparatus of claim 1, wherein: the number of the drying chambers (4) is at least one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111458815.0A CN114427779A (en) | 2021-12-01 | 2021-12-01 | Linear vacuum drying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111458815.0A CN114427779A (en) | 2021-12-01 | 2021-12-01 | Linear vacuum drying equipment |
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| Publication Number | Publication Date |
|---|---|
| CN114427779A true CN114427779A (en) | 2022-05-03 |
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| CN202111458815.0A Pending CN114427779A (en) | 2021-12-01 | 2021-12-01 | Linear vacuum drying equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115867100A (en) * | 2023-03-03 | 2023-03-28 | 昆山晟成光电科技有限公司 | Perovskite film production line annealing crystallization equipment and method |
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2021
- 2021-12-01 CN CN202111458815.0A patent/CN114427779A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115867100A (en) * | 2023-03-03 | 2023-03-28 | 昆山晟成光电科技有限公司 | Perovskite film production line annealing crystallization equipment and method |
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